CN114114585B - Six-freedom-degree compliant mechanism movement table for lenses - Google Patents

Abstract

The invention provides a six-degree-of-freedom compliant mechanism motion platform for lenses, including: lenses, XYθ _Z micro-adjustment mechanisms, and Zθ _X θ _Y micro-adjustment mechanisms. The XYθ _Z micro-adjustment mechanism includes flexible hinges, X-direction, Y1-direction and Y2-direction drive motors, three motors are evenly distributed along the circumference of the lens, and the shaft ends of the motors are connected to X-direction, Y1-direction and Y2-direction drive devices, and are respectively arranged nearby X-direction, Y1-direction and Y2-direction anti-backlash device. The Zθ _X θ _Y micro-adjustment mechanism includes an upper moving plate, a Z1-direction motor, a Z2-direction motor, a Z3-direction motor, three ejector rods and a lens barrel. Three Z-direction adjustment flexible hinges are evenly distributed along the circumference of the lens barrel, and the Z-direction adjustment of the lens is realized by synchronously driving the three Z-direction adjustment flexible hinges. Adjustment of the lens in the θ _X and θ _Y directions is realized by differentially driving three Z-direction adjustable flexible hinges. The invention can adjust the lens in the direction of six degrees of freedom to compensate the errors introduced by the manufacture and assembly of the lens and its supporting mechanism and the errors caused by the environment change during the service period of the objective lens.

Description

A lens six-degree-of-freedom compliant mechanism motion platform

technical field

The invention specifically relates to a six-degree-of-freedom compliant mechanism motion platform for lenses, which can be used for attitude adjustment of objective lenses in photolithography machines, and can also be used for installation, detection and debugging of workpieces in production.

Background technique

With the development of large-scale integrated circuits, the demand for high-precision projection lithography machines is increasing. For high-precision projection lithography machines, due to the limitation of processing and assembly capabilities, errors will inevitably occur in the manufacturing and assembly process. In addition, during the long-term use of high-precision projection lithography machines, environmental changes such as temperature and pressure will cause changes in the attitude of the lens, which will have a negative impact on image quality. Therefore, it is necessary to adjust the attitude of the lens to ensure that the lens can be adjusted in the six directions of X, Y, Z, θ _X , θ _Y , and θ _Z , so as to relieve the lens position changes caused by processing, assembly and environmental changes, and ensure The relative position of the lens in the entire optical system improves the imaging quality.

Contents of the invention

The object of the present invention is to provide a lens six-degree-of-freedom compliant mechanism motion table, which is used to adjust the degrees of freedom of the lens in the six directions of X, Y, Z, θ _X , θ _Y , and θ _Z , so as to compensate Introduced errors and errors caused by environmental changes during long-term use ensure the imaging quality of the objective lens.

The technical solution adopted in the present invention is: a six-degree-of-freedom compliant mechanism motion platform for lenses, which includes: a lens 1, an XYθ _Z micro-adjustment mechanism, and a Zθ _X θ _Y micro-adjustment mechanism. The XYθ _Z micro-adjustment mechanism includes a flexible hinge 2, an X-direction drive motor 3.1, a Y1-direction drive motor 3.2, and a Y2-direction drive motor 3.3, and the motor shaft end is threaded to connect the X-direction drive device 4.1, the Y1-direction drive device 4.2 and the Y2-direction drive Device 4.3, and arrange X-direction anti-backlash device 5.1, Y1-direction anti-backlash device 5.2 and Y2-direction anti-backlash device 5.3 nearby. The Zθ _X θ _Y micro-adjustment mechanism includes an upper moving plate 6, a Z1-direction motor 7.1, a Z2-direction motor 7.2, a Z3-direction motor 7.3, and three ejector rods (that is, the first ejector rod 8.1, the second ejector rod 8.2, the third ejector rod Push rod 8.3) and lens barrel 9. Three Z-direction adjustable flexible hinges are evenly distributed along the circumference of the lens barrel 9 (namely the first Z-direction adjustable flexible hinge 9.1, the second Z-direction adjustable flexible hinge 9.2, and the third Z-direction adjustable flexible hinge 9.3). By synchronously driving three Z-direction adjustment flexible hinges (namely, the first Z-direction adjustment flexible hinge 9.1, the second Z-direction adjustment flexible hinge 9.2, and the third Z-direction adjustment flexible hinge 9.3) to realize one-way lens Z-direction adjustment. By differentially driving three Z-direction adjustable flexible hinges (i.e., the first Z-direction adjustable flexible hinge 9.1, the second Z-direction adjustable flexible hinge 9.2, and the third Z-direction adjustable flexible hinge 9.3), the lens θ _X and θ _Y directions are single to adjust. The flexible hinge 2 and the upper moving plate 6 are connected by screws to realize the connection of the XYθ _Z micro-adjustment mechanism and the Zθ _X θ _Y micro-adjustment mechanism. The invention can adjust the lens in the direction of six degrees of freedom to compensate the errors introduced by the manufacture and assembly of the lens and its supporting mechanism and the errors caused by the environment change during the service period of the objective lens.

The three motors of the XYθ _Z micro-adjustment mechanism (i.e. X-direction drive motor 3.1, Y1-direction drive motor 3.2, and Y2-direction drive motor 3.3) are evenly distributed along the circumference of the lens, and the driving force directions produced by the three motors are consistent with the force at the center of the lens. The arms are equal, and the three-degree-of-freedom adjustment of the lens in the X, Y, and θ _Z directions is realized by adjusting the magnitude and direction of the driving force of the three motors.

The flexible hinge 2 of the _XYθZ micro-adjustment mechanism is divided into two layers, the innermost layer 2.1 is the motion layer, the outermost layer 2.2 is the fixed layer, and three motors (i.e. X-direction drive motor 3.1, Y1-direction drive motor 3.2, Y2 Drive motors 3.3) are all installed on the outermost layer 2.2.

The three driving devices of the XYθ _Z micro-adjustment mechanism (i.e. the X-direction driving device 4.1, the Y1-direction driving device 4.2, and the Y2-direction driving device 4.3) all include a ball end rod (i.e. the first ball end rod 11.1, the second Ball end rod 11.2, the third ball end rod 11.3) and the ball end rod cover (i.e. the first ball end rod cover 12.1, the second ball end rod cover 12.2, the third ball end rod cover 12.3), the mutually matched ball end rod There is a gap between it and the ball head sleeve, and it needs to be matched during the processing to ensure that the gaps of the three groups are basically the same.

The three anti-backlash devices (i.e. X-direction anti-backlash device 5.1, Y1-direction anti-backlash device 5.2, Y2-direction anti-backlash device 5.3) of the described XYθ _Z micro-adjustment mechanism are used to eliminate three motors (i.e. X-direction drive) respectively. Motor 3.1, Y1 to the drive motor 3.2, Y2 to the drive motor 3.3) when the shaft shrinks the ball head rod (i.e. the first ball head rod 11.1, the second ball head rod 11.2, the third ball head rod 11.3) and the ball head rod cover (that is, the gap between the first ball head cover 12.1, the second ball head cover 12.2, and the third ball cover 12.3).

The Zθ _X θ _Y micro-adjustment mechanism adjusts the three-degree-of-freedom attitude of the lens through three Z-direction adjustment flexible hinges uniformly distributed along the circumference of the lens barrel 9 (that is, the first Z-direction adjustment flexible hinge 9.1, the second Z-direction adjustment flexible hinge, and the second Z-direction adjustment flexible hinge). The flexible hinge 9.2 and the third Z-direction adjustment flexible hinge 9.3) are realized. Drive the first ejector rod 8.1 horizontally through the Z1 direction motor 7.1, the first ejector rod 8.1 generates a horizontal linear motion to drive the first Z-direction adjustment flexible hinge 9.1, and the first Z-direction adjustment flexible hinge 9.1 pushes the upper moving plate 6 to generate a single point Z to the movement. By synchronously driving three Z-direction adjustable flexible hinges (i.e. the first Z-direction adjustable flexible hinge 9.1, the second Z-direction adjustable flexible hinge 9.2, and the third Z-direction adjustable flexible hinge 9.3) to realize the unidirectional movement of the upper moving plate 6 in the Z direction, and then Realize the Z-direction adjustment of the lens. By differentially driving three Z-direction adjustable flexible hinges (i.e., the first Z-direction adjustable flexible hinge 9.1, the second Z-direction adjustable flexible hinge 9.2, and the third Z-direction adjustable flexible hinge 9.3), respectively, the upper moving plate 6 can be adjusted at θ _X , One-way movement in the θ _Y direction, thereby realizing the adjustment of the lens in the θ _X and θ _Y directions.

The first Z-direction adjustment flexible hinge 9.1, the second Z-direction adjustment flexible hinge 9.2, and the third Z-direction adjustment flexible hinge 9.3 are processed by the wire-cut lens barrel, and are integrated with the lens barrel 9 to achieve a high degree of component integration.

The principle of the present invention is: the present invention provides a lens six-degree-of-freedom compliant mechanism motion platform, its function is to the attitude of the specific lens in the projection objective lens in the six directions of X, Y, Z, θ _X , θ _Y , θ _Z Make adjustments. The lens six-degree-of-freedom compliant mechanism movement platform involved in the present invention includes: a lens 1, an XYθ _Z micro-adjustment mechanism, and a Zθ _X θ _Y micro-adjustment mechanism. The _XYθZ micro-adjustment mechanism includes a flexible hinge 2, an X-direction drive motor 3.1, a Y1-direction drive motor 3.2, and a Y2-direction drive motor 3.3. The three motors are evenly distributed along the circumference of the lens, and the shaft ends of the motors are threaded to connect the X-direction drive device 4.1, Y1-direction driving device 4.2 and Y2-direction driving device 4.3, and X-direction anti-backlash device 5.1, Y1-direction anti-backlash device 5.2 and Y2-direction anti-backlash device 5.3 are respectively arranged nearby. The Zθ _X θ _Y micro-adjustment mechanism includes an upper moving plate 6, a Z1-direction motor 7.1, a Z2-direction motor 7.2, a Z3-direction motor 7.3, and three ejector rods (that is, the first ejector rod 8.1, the second ejector rod 8.2, the third ejector rod Push rod 8.3) and lens barrel 9. Three Z-direction adjustable flexible hinges (i.e., the first Z-direction adjustable flexible hinge 9.1, the second Z-directed flexible hinge 9.2, and the third Z-directed flexible hinge 9.3) are evenly distributed along the circumference of the lens barrel 9. By synchronously driving the three The Z-direction adjustment flexible hinges (namely the first Z-direction adjustment flexible hinge 9.1, the second Z-direction adjustment flexible hinge 9.2, and the third Z-direction adjustment flexible hinge 9.3) realize one-way adjustment of the lens in the Z direction. By differentially driving three Z-direction adjustable flexible hinges (i.e., the first Z-direction adjustable flexible hinge 9.1, the second Z-direction adjustable flexible hinge 9.2, and the third Z-direction adjustable flexible hinge 9.3), the lens θ _X and θ _Y directions are single to adjust. The flexible hinge 2 and the upper moving plate 6 are connected by screws to realize the connection of the XYθ _Z micro-adjustment mechanism and the Zθ _X θ _Y micro-adjustment mechanism. The invention can adjust the lens in the direction of six degrees of freedom to compensate the errors introduced by the manufacture and assembly of the lens and its supporting mechanism and the errors caused by the environment change during the service period of the objective lens.

This device uses the principle of compliant mechanism. Both the XYθ _Z micro-adjustment mechanism and the Zθ _X θ _Y micro-adjustment mechanism adopt a flexible hinge structure. By changing the driving mode, the different positions of the hinge are elastically deformed, and the six degrees of freedom of the lens are realized through coupling. While adjusting, the compliance mechanism can slow down the lens deformation caused by temperature changes to a certain extent.

The beneficial effects of the present invention are: the device adopts a modular design, and is divided into three independent modules of the lens, the XYθ _Z micro-adjustment mechanism and the Zθ _X θ _Y micro-adjustment mechanism. Each module is independent of each other and can be installed and debugged separately , the final integration realizes the six-degree-of-freedom adjustment of the lens, with good adjustment flexibility and high integration. Since both the XYθ _Z micro-adjustment mechanism and the Zθ _X θ _Y micro-adjustment mechanism only include an integral hinge to realize the adjustments in the X, Y, and θZ directions and the adjustments in the Z, θ _X , and θ _Y directions respectively, and the adjustment in the Z direction The flexible hinge is cut and processed by the lens barrel, which is integrated with the lens barrel, making the structure simple and easy to adjust; since the drive structures in the X, Y1 and Y2 directions are exactly the same and are evenly distributed along the circumference, it can be assembled according to the objective lens. The overall demand is adjusted, so as to adjust the overall coordinate XY direction; similarly, since the structure and principle of the three Z-direction adjustment mechanisms are completely the same, they can also be interchanged, so that the coordinate direction of the lens θ _X - θ _Y is flexible. Tune.

Description of drawings

The specific structural form of the lens six-degree-of-freedom compliant mechanism motion platform described in the present invention is further elaborated in the form of drawings:

Fig. 1 is a schematic diagram of a moving platform of a six-degree-of-freedom compliant mechanism for a lens in the present invention, wherein 1 is a lens, 2 is a flexible hinge, 3.1 is an X-direction driving motor, 3.2 is a Y1-direction driving motor, 3.3 is a Y2-direction driving motor, 4.1 X-direction driving device, 4.2 is Y1-direction driving device, 4.3 is Y2-direction driving device, 5.1 is X-direction anti-backlash device, 5.2 is Y1-direction anti-backlash device, 5.3 is Y2-direction anti-backlash device, 6 is upper moving plate, 7.2 is the Z2 direction motor, and 9 is the lens barrel.

Figure 2 is a schematic diagram of the mirror _XYθZ micro-adjustment mechanism, where 2 is the flexible hinge, 2.1 is the innermost layer, 2.2 is the outermost layer, 3.1 is the X-direction drive motor, 3.2 is the Y1-direction drive motor, and 3.3 is the Y2-direction drive Motor, 5.2 is Y1 direction anti-backlash device.

Fig. 3 is a schematic diagram of the X-direction driving device of the XYθ _Z micro-adjustment mechanism, wherein 11.1 is the X-direction ball head rod, 12.1 is the X-direction ball head rod sleeve, 21 is the first through hole, 22 is the second through hole, J is a spherical surface, K is a cylindrical surface, and I is an internal thread at the shaft end.

Fig. 4 is a schematic diagram of the movement of the XYθ _Z micro-adjustment mechanism, wherein 201 is the first through hole, 202 is the second through hole, 203 is the third through hole, 204 is the fourth through hole, 205 is the fifth through hole, 206 is the sixth through hole, 207 is the seventh through hole, 208 is the eighth through hole, 209 is the ninth through hole, and 210 is the tenth through hole.

Fig. 5 is a schematic diagram of a Zθ _X θ _Y micro-adjustment mechanism.

Fig. 6 is a side view of the Zθ _X θ _Y micro-adjustment mechanism, wherein 101 is the first fulcrum, 102 is the second fulcrum, 103 is the third fulcrum, 104 is the fourth fulcrum, 105 is the fifth fulcrum, 106 is the sixth fulcrum Fulcrum, 107 is the seventh fulcrum, 108 is the eighth fulcrum, 109 is the ninth fulcrum, 110 is the tenth fulcrum, and 2.1 is the innermost layer.

Figure 7 is a schematic diagram of the Zθ _X θ _Y micro-adjustment mechanism, in which 6 is the upper moving plate, 7.2 is the motor in the Z2 direction, 7.3 is the motor in the Z3 direction, 8.1 is the first ejector rod, 8.2 is the second ejector rod, and 8.3 is the second ejector rod Three ejector rods, 9 are lens barrels.

8 is a schematic diagram of the lens barrel, wherein 9.1 is the first Z-direction adjustment flexible hinge, 9.2 is the second Z-direction adjustment flexible hinge, and 9.3 is the third Z-direction adjustment flexible hinge.

Figure 9 is a schematic diagram of the movement of the Zθ _X θ _Y micro-adjustment mechanism, where 13 is a slider, 14 is a connecting rod, D is the first hinge, E is the second hinge, F is the third hinge, and G is the fourth hinge , H is the fifth hinge, and I is the sixth hinge.

Detailed ways

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.

As shown in Figure 1, the device includes a three-layer structure, from top to bottom are lens 1, XYθ _Z micro-adjustment mechanism and Zθ _X θ _Y micro-adjustment mechanism. There are three steps on the lens, _{that is, step A, step B, and step C, which are fixed on the XYθ Z micro -} adjustment mechanism below by screws _; 2. Connect with the 6 bolts of the upper moving plate to realize the connection of the XYθ _Z micro-adjustment mechanism and the Zθ _X θ _Y micro-adjustment mechanism.

As shown in Figure 2, the XYθ _Z micro-adjustment mechanism includes a flexible hinge 2, three drive motors (namely X-direction drive motor 3.1, Y1-direction drive motor 3.2, Y2-direction drive motor 3.3), three drive devices (namely X-direction drive motor 3.1, Y2-direction drive motor 3.3), three drive devices (namely X-direction Driving device 4.1, Y1 direction driving device 4.2, Y2 direction driving device 4.3), three anti-backlash devices (ie X-direction anti-backlash device 5.1, Y1-direction anti-backlash device 5.2, Y2-direction anti-backlash device 5.3). The flexible hinge 2 is divided into two layers, the innermost layer 2.1 is the movement layer, and the outermost layer 2.2 is the fixed layer. The three motors (i.e. X-direction drive motor 3.1, Y1-direction drive motor 3.2, and Y2-direction drive motor 3.3) are installed on the outermost layer 2.2 with screws, and the shaft ends of the three motors are respectively threaded to connect three drive devices (that is, X-direction drive motor 3.3). 4.1 to the drive device, 4.2 to the Y1 direction drive device, 4.3 to the Y2 direction drive device), and arrange three anti-backlash devices in the vicinity (i.e. X-direction anti-backlash device 5.1, Y1-direction anti-backlash device 5.2, Y2-direction anti-backlash device 5.3 ), the two ends of the three anti-backlash devices (i.e. X-direction anti-backlash device 5.1, Y1-direction anti-backlash device 5.2, Y2-direction anti-backlash device 5.3) are respectively connected to the innermost layer 2.1 and the outermost layer 2.2 of the flexible hinge.

As shown in Fig. 3, since the structures and installation methods of the three driving devices (namely, the X-direction driving device 4.1, the Y1-direction driving device 4.2, and the Y2-direction driving device 4.3) are identical, the X-direction driving device 4.1 is taken as an example for description. The X-direction driving device 4.1 includes the X-direction ball head 11.1 and the X-direction ball head sleeve 12.1, the spherical surface J of the X-direction ball head rod 11.1 is located in the cylindrical surface K of the X-direction ball head sleeve 12.1, and there is a gap between the two . The X-direction ball head rod 11.1 is connected to the X-direction motor through the internal thread I of the shaft end, and there are two through holes (i.e. through hole one 20 and through hole two 21) on the X-direction ball head rod sleeve 12.1, which are connected to the flexible motor by screws. On the innermost layer 2.1 of the hinge 2.

As shown in Figures 2 and 3, the three motors of the XYθ _Z micro-adjustment mechanism (i.e. X-direction drive motor 3.1, Y1-direction drive motor 3.2, and Y2-direction drive motor 3.3) are evenly distributed along the lens circumference, and the driving force generated by the three motors The direction is equal to the force arm of the center of the lens, through three drive motors (namely X-direction drive motor 3.1, Y1-direction drive motor 3.2, Y2-direction drive motor 3.3), respectively generate drive force FX, FY1, FY2, by adjusting the three forces The size and direction of the device can be adjusted in three degrees of freedom. The X-direction drive motor 3.1 points to the positive X direction, drives the flexible hinge 2 through the X-direction drive motor 3.1, and synchronously drives the Y1-direction drive motor 3.2 and the Y2-direction drive motor 3.3 to realize unidirectional adjustment of the lens in the X direction. By differentially driving the Y1-direction drive motor 3.2 and the Y2-direction drive motor 3.3, the unidirectional adjustment of the lens in the Y direction is realized. By synchronously driving the X-direction driving motor 3.1, the Y-direction driving motor 3.2 and the Y2-direction driving motor 3.3, the one-way adjustment of the lens θ _Z direction is realized.

As shown in FIG. 4 , three identical flexible hinge structures are evenly distributed along the circumference of the flexible hinge 2 . Because the structures and dimensions of the three places are identical, taking the hinge structure near the driving force in the FX direction as an example, the flexible hinge 2 is provided with a first through hole 201, a second through hole 202, a third through hole 203, and a fourth through hole 204. , the fifth through hole 205, the sixth through hole 206, the seventh through hole 207, the eighth through hole 208, the ninth through hole 209, and the tenth through hole 210 form a hinge, which is equivalent to ten fulcrums. The partial enlargement of each place is shown in Figure 5. The first through hole 201 and the third through hole 203, the second through hole 202 and the fourth through hole 204, the fifth through hole 205 and the eighth through hole 208, the sixth through hole 206 and the ninth through hole 209, the seventh through hole The through holes 207 and the tenth through holes 210 are symmetrically arranged in pairs.

As shown in FIG. 6 , according to the structure of the flexible hinge 2 , a schematic diagram of its mechanism movement is obtained. Taking the hinge structure near the FX direction driving force as an example, the first fulcrum 101 and the third fulcrum 103, the second fulcrum 102 and the fourth fulcrum 104, the fifth fulcrum 105 and the eighth fulcrum 108, the sixth fulcrum 106 and the ninth fulcrum 109, the seventh fulcrum 107 and the tenth fulcrum 110 are arranged symmetrically in pairs. Drive the connecting rod between the fifth fulcrum 105 and the sixth fulcrum 106 to drive the innermost layer 2.1 of the flexible hinge 2 to move. The quadrilateral structure guides the X-direction movement of the innermost layer 2.1 of the flexible hinge 2.

As shown in Figure 7, the Zθ _X θ _Y micro-adjustment mechanism includes: the upper moving plate 6, three motors (namely the Z1 direction motor 7.1, the Z2 direction motor 7.2, the Z3 direction motor 7.3), three ejector rods (i.e. the first Ejector 8.1, second ejector 8.2, third ejector 8.3), lens barrel 9. Three motors (namely Z1-direction motor 7.1, Z2-direction motor 7.2, Z3-direction motor 7.3) and three ejector rods (namely first ejector rod 8.1, second ejector rod 8.2, third ejector rod 8.3) ejector rods along the circumferential direction Evenly distributed.

As shown in Figure 8, three Z-direction adjustment flexible hinges are evenly distributed along the circumferential direction on the lens barrel 9 (i.e. the first Z-direction adjustment flexible hinge 9.1, the second Z-direction adjustment flexible hinge 9.2, and the third Z-direction adjustment flexible hinge 9.3 ), the structures of the three Z-direction adjustable flexible hinges are exactly the same, the first Z-direction adjustable flexible hinge 9.1, the second Z-direction adjustable flexible hinge 9.2, and the third Z-direction adjustable flexible hinge 9.3 are processed by cutting the lens barrel, and the mirror Tube 9 is one.

As shown in Figure 9, the first hinge D, the second hinge E, the third hinge F, and the fourth hinge G are symmetrically arranged, and the fifth hinge H and the sixth hinge I form a parallelogram structure to guide the movement of the slider 13, horizontally Drive the connecting rod 14 to rotate to realize the Z-direction movement of the slider 13 .

As shown in Figures 7, 8, and 9, the first ejector rod 8.1 is driven horizontally by the first motor 7.1, and the first ejector rod 8.1 generates a horizontal linear motion to drive the first Z-direction adjustment flexible hinge 9.1, and the first Z-direction adjustment flexible hinge 9.1 Pushing the upper moving plate 6 produces a single-point Z-direction movement. One-way movement of the upper moving plate 6 in the Z direction is achieved by synchronously driving three Z-direction adjustable flexible hinges (ie, the first Z-direction adjustable flexible hinge 9.1, the second Z-direction adjustable flexible hinge 9.2, and the third Z-direction adjustable flexible hinge 9.3) , and then realize the Z-direction adjustment of the lens. By differentially driving three Z-direction adjustable flexible hinges (i.e., the first Z-direction adjustable flexible hinge 9.1, the second Z-direction adjustable flexible hinge 9.2, and the third Z-direction adjustable flexible hinge 9.3), respectively, the upper moving plate 6 can be adjusted at θ _X , One-way movement in the θ _Y direction, thereby realizing the adjustment of the lens in the θ _X and θ _Y directions.

The design examples described in detail in the present invention are only used to illustrate the advantages and rationality of the present invention, and all examples of optimal design based on the technical solutions of the present invention belong to the category of the present invention. The technologies and principles not described in detail in the present invention belong to the technologies known to those in the field of the present invention.

Claims (10)

1. A lens six degrees of freedom compliant mechanism motion platform is characterized in that: comprise: eyeglass (1), XYθ _Z micro-adjustment mechanism and Zθ _X θ _Y micro-adjustment mechanism; XYθ _Z micro-adjustment mechanism comprises flexible hinge ( 2), X-direction drive motor (3.1), Y1-direction drive motor (3.2), Y2-direction drive motor (3.3), the motor shaft end is connected with X-direction drive device (4.1), Y1-direction drive device (4.2) and Y2 drive device (4.3), and arrange the X-direction anti-backlash device (5.1), Y1-direction anti-backlash device (5.2) and Y2-direction anti-backlash device (5.3) nearby; Zθ _X θ _Y micro-adjustment mechanism includes the above Moving plate (6), Z1 direction motor (7.1), Z2 direction motor (7.2), Z3 direction motor (7.3), first ejector rod (8.1), second ejector rod (8.2), third ejector rod (8.3) And the lens barrel (9), the lens barrel (9) is evenly distributed along the circumference of three Z-direction adjustment flexible hinges, that is, the first Z-direction adjustment flexible hinge (9.1), the second Z-direction adjustment flexible hinge (9.2), and the third Z-direction adjustment flexible hinge (9.2). To adjust the flexible hinge (9.3), by synchronously driving three Z-directed flexible hinges, namely the first Z-directed adjusted flexible hinge (9.1), the second Z-directed adjusted flexible hinge (9.2), the third Z-directed adjusted flexible hinge (9.3 ) realizes one-way adjustment in the Z direction of the lens, and three Z-direction adjustment flexible hinges are differentially driven, that is, the first Z-direction adjustment flexible hinge (9.1), the second Z-direction adjustment flexible hinge (9.2), and the third Z-direction adjustment flexible hinge (9.3) The one-way adjustment of the lens θ _X and θ _Y directions is realized respectively, and the flexible hinge (2) and the upper moving plate (6) are connected by screws to realize the XYθ _Z micro-adjustment mechanism and the Zθ _X θ _Y micro-adjustment mechanism connect. 2. A lens six-degree-of-freedom compliant motion table according to claim 1, characterized in that: the X-direction drive motor (3.1), the Y1-direction drive motor (3.2), and the Y2 drive motor (3.2) of the XYθ _Z micro-adjustment mechanism The driving motors (3.3) are evenly distributed along the circumference of the lens, and the driving force directions generated by the three motors are equal to the force arm at the center of the lens; the X-direction driving motor (3.1) points to the positive X direction, and the flexible hinge is driven by the X-direction driving motor (3.1) (2), simultaneously drive the Y1-direction drive motor (3.2) to shrink and the Y2-direction drive motor (3.3) to elongate to offset the torque generated by the X-direction drive, and realize the one-way adjustment of the lens in the X-direction; the X-direction drive motor (3.1) does not move , by differentially driving the Y1-direction drive motor (3.2) and Y2-direction drive motor (3.3), to realize the unidirectional adjustment of the lens Y direction; by synchronously driving the X-direction drive motor (3.1), Y-direction drive motor (3.2) and Y2-direction Drive the motor (3.3) to realize the unidirectional adjustment of the lens θ _Z direction. 3. A lens six-degree-of-freedom compliant mechanism movement platform according to claim 1, characterized in that: the flexible hinge (2) of the XYθ _Z micro-adjustment mechanism is divided into two layers, and the innermost layer (2.1) is a movement The outermost layer (2.2) is a fixed layer, and the X-direction drive motor (3.1), Y1-direction drive motor (3.2), and Y2-direction drive motor (3.3) are all installed on the outermost layer (2.2). 4. A lens six-degree-of-freedom compliant mechanism movement table according to claim 1, characterized in that: the X-direction driving device (4.1), the Y1-direction driving device (4.2) and the Y2 direction of the XYθ _Z micro-adjustment mechanism The structure and installation method of the driving device (4.3) are exactly the same, including a ball head rod and a ball head rod sleeve, the driving device (4.1), the Y1 direction driving device (4.2) and the Y2 direction driving device (4.3) Three ball studs—the X-directed ball stud (11.1), the Y-directed ball stud (11.2) and the Y2-directed ball stud (11.3) are respectively located in the X-directed ball stud sleeve (12.1) and the Y-directed ball stud In the cylindrical surface of the sleeve (12.2) and the Y2 direction ball end sleeve (12.3), the X direction ball end sleeve (12.1), the Y direction ball end sleeve (12.2) and the Y2 direction ball end sleeve (12.3) respectively use screws Attached to the innermost layer (2.1) of the flexible hinge (2). 5. A motion table with a six-degree-of-freedom compliant mechanism for lenses according to claim 1, characterized in that: the X-direction ball head (11.1) and the Y-direction ball head (11.2) of the XYθ _Z micro-adjustment mechanism And there are gaps between the Y2-direction ball head (11.3) and the X-direction ball head sleeve (12.1), the Y-direction ball head sleeve (12.2) and the Y2-direction ball head sleeve (12.3), and the ball heads that cooperate with each other Rods and ball head sleeves need to be matched during processing to ensure that the gaps between the three sets are basically the same. 6. A lens six-degree-of-freedom compliant mechanism movement platform according to claim 1, characterized in that: the three anti-backlash devices of the XYθ _Z micro-adjustment mechanism are the X-direction anti-backlash device (5.1), the Y1-direction The anti-backlash device (5.2) and the Y2-direction anti-backlash device (5.3) are respectively used to eliminate the X-direction ball when the axis of the X-direction drive motor (3.1), Y1-direction drive motor (3.2), and Y2-direction drive motor (3.3) shrinks. Head rod (11.1), Y direction ball head rod (11.2) and Y2 direction ball head rod (11.3) and X direction ball head rod cover (12.1), Y direction ball head rod cover (12.2) and Y2 direction ball end rod cover (12.3) between gaps. 7. A lens six-degree-of-freedom compliant mechanism movement platform according to claim 1, characterized in that: the Zθ _X θ _Y micro-adjustment mechanism includes: an upper moving plate (6), a Z1-direction motor (7.1), Z2 direction motor (7.2), Z3 direction motor (7.3), first ejector rod (8.1), second ejector rod (8.2), third ejector rod (8.3), lens barrel (9), Z1 direction motor (7.1) , the Z2 direction motor (7.2), the Z3 direction motor (7.3) and the first ejector pin (8.1), the second ejector pin (8.2) and the third ejector pin (8.3) are all uniformly distributed along the circumferential direction. 8. A motion platform with a six-degree-of-freedom compliant mechanism for lenses according to claim 1, characterized in that three Z-direction adjustable flexible hinges are evenly distributed along the circumferential direction on the lens barrel (9), that is, the first Z-direction adjustable flexible hinge (9.1), the second Z-direction adjustment flexible hinge (9.2), the third Z-direction adjustment flexible hinge (9.3), the first Z-direction adjustment flexible hinge (9.1), the second Z-direction adjustment flexible hinge (9.2), the third Z-direction adjustment flexible hinges (9.3) are all processed by cutting lens barrels and integrated with lens barrels (9). The material of the lens barrels is made of elastic materials, including: 9Cr18 and titanium alloy. 9. A lens six-degree-of-freedom compliant mechanism motion table according to claim 1, characterized in that: the first hinge (D), the second hinge (E), the third hinge (F), the fourth hinge (G ) are symmetrically arranged, the 5th hinge (H) and the 6th hinge (I) form a parallelogram structure to guide the movement of the slide block (13), and the horizontal drive connecting rod (14) rotates to realize the Z-direction movement of the slide block (13). 10. A moving table with a lens six-degree-of-freedom compliance mechanism according to claim 1, characterized in that: the first ejector rod (8.1) is driven horizontally by the Z1 direction motor (7.1), and the first ejector rod (8.1) generates a horizontal The linear motion drives the first Z-direction adjustment flexible hinge (9.1), and the first Z-direction adjustment flexible hinge (9.1) pushes the upper moving plate (6) to generate a single-point Z-direction movement, and synchronously drives the first Z-direction adjustment flexible hinge ( 9.1), the second Z-direction adjustment flexible hinge (9.2), and the third Z-direction adjustment flexible hinge (9.3) realize the one-way movement of the upper moving plate (6) in the Z direction, and then realize the Z-direction adjustment of the lens, through the differential drive of the first The first Z-direction adjustment flexible hinge (9.1), the second Z-direction adjustment flexible hinge (9.2), and the third Z-direction adjustment flexible hinge (9.3) realize the unidirectional movement of the upper moving plate (6) in the θ _X and θ _Y directions respectively, Further, the adjustment in the θ _X and θ _Y directions of the lens is realized.

Images