CN114102672A - Gas replacement device, replacement method thereof, and control method thereof - Google Patents
Gas replacement device, replacement method thereof, and control method thereof Download PDFInfo
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- CN114102672A CN114102672A CN202210082852.4A CN202210082852A CN114102672A CN 114102672 A CN114102672 A CN 114102672A CN 202210082852 A CN202210082852 A CN 202210082852A CN 114102672 A CN114102672 A CN 114102672A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/02—Glove-boxes, i.e. chambers in which manipulations are performed by the human hands in gloves built into the chamber walls; Gloves therefor
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Abstract
The invention relates to the technical field of glove boxes and discloses a gas replacement device, a replacement method and a control method thereof, wherein the gas replacement device comprises a first chamber and a second chamber which are communicated with each other; the air channel system comprises an air inlet module and an air outlet module which are arranged on the inner wall of the first cavity, the air inlet module and the air outlet module are arranged oppositely, and an air channel for gas replacement is formed between the air inlet module and the air outlet module; the door lock module comprises an inner door and an outer door, the second chamber is communicated with the first chamber through the inner door, and the first chamber is communicated with the outside of the shell through the outer door; the control module comprises a gas replacement program for controlling the air duct system, a door lock program for controlling the door lock module and an information processing program for processing information; the starting and stopping of the air duct system and the opening and closing of the inner door and the outer door are automated, manual operation is not needed, the replacement efficiency in the first cavity is improved, and the gas environment in the second cavity is also guaranteed.
Description
Technical Field
The invention relates to the technical field of glove boxes, in particular to a gas replacement device and a replacement method and a control method thereof.
Background
The gas replacement device in the glove box is a transition device when articles are transferred into or out of the operation device, and in order to prevent an external environment from damaging an operation space environment in an article transfer process, the gas replacement device with a gas replacement function and a good sealing environment are generally required to achieve the purpose of purifying a transfer space. At present, the air inlet and the exhaust port of the gas replacement device are generally directly arranged on the shell, and the air inlet and the exhaust port are manually regulated and controlled, so that the gas replacement device is difficult to regulate and control and open and close in real time, the replacement efficiency during gas replacement and the opening and closing efficiency of the first cavity are low, and the gas environment of an operation space is easily influenced.
Disclosure of Invention
The purpose of the invention is: the gas replacement device, the replacement method and the control method thereof are provided, so that the starting and stopping of the air duct system and the opening and closing of the inner door and the outer door are automated, manual operation is not needed, the replacement efficiency in the first cavity is improved, and the gas environment in the second cavity is also ensured.
In order to achieve the above object, the present invention provides a gas replacement device comprising:
a first chamber and a second chamber in communication with each other;
the air duct system comprises an air inlet module and an air outlet module which are arranged on the inner wall of the first cavity, the air inlet module and the air outlet module are arranged oppositely, and an air duct for gas replacement is formed between the air inlet module and the air outlet module;
a door lock module including an inner door and an outer door, the second chamber communicating with the first chamber through the inner door, the first chamber communicating with an outside of the housing through the outer door;
and the control module comprises a gas replacement program for controlling the air duct system, a door lock program for controlling the door lock module and an information processing program for processing information.
Compared with the prior art, the gas replacement device provided by the embodiment of the invention has the beneficial effects that: the air replacement device comprises a first cavity and a second cavity which are communicated with each other, the first cavity is used for replacing articles, the second cavity is used for operating the articles, and an air inlet module and an air outlet module which are oppositely arranged are arranged in the first cavity, so that an air channel for air replacement is formed in the first cavity; the control module controls the air duct system and the door lock module, so that the starting and stopping of the air duct system and the opening and closing of the inner door and the outer door are automated, manual operation is not needed, the replacement efficiency in the first cavity is improved, and the gas environment in the second cavity is also ensured.
According to the gas replacement device provided by the embodiment of the invention, the end faces of one side, opposite to the air inlet module and the air outlet module, of the air inlet module are respectively provided with the air inlet and the air outlet, the air inlet module comprises an air inlet shell, an air inlet channel is formed inside the air inlet shell, one end of the air inlet channel is communicated with the air inlet, and the other end of the air inlet channel is communicated with the outside of the shell; the air outlet module comprises an air outlet shell, an air outlet duct is formed inside the air outlet shell, one end of the air outlet duct is communicated with the air outlet, and the other end of the air outlet duct is communicated with the outside of the shell.
In the gas replacement device of the embodiment of the invention, the opposite end surfaces of the air inlet shell and the air outlet shell are respectively an air inlet end surface and an air outlet end surface, a plurality of air inlets are uniformly distributed on the air inlet end surface, a plurality of air outlets are distributed on the air outlet end surface, and the positions of the air inlets and the air outlets correspond to each other.
According to the gas replacement device provided by the embodiment of the invention, the air inlet and the air outlet are corresponding in position and equal in quantity.
According to the gas replacement device provided by the embodiment of the invention, the plurality of air outlets are uniformly distributed on the air outlet end face.
According to the gas replacement device provided by the embodiment of the invention, the air inlet shell and the air outlet shell cover the whole area of the end surface of one side to which the air inlet shell and the air outlet shell are fixed.
In the gas replacement device provided by the embodiment of the invention, the air inlet module is communicated with the air inlet module arranged outside the first chamber, and the air outlet module is communicated with the air outlet module arranged outside the first chamber.
In the gas replacement device provided by the embodiment of the invention, the gas inlet module and the gas outlet module are connected outside the first chamber through the circulating air duct, and the circulating air duct is internally provided with the fan and the filtering device.
According to the gas replacement device provided by the embodiment of the invention, the air inlet end face is covered with the flow equalizing piece.
In the gas replacement device provided by the embodiment of the invention, the air outlet end face is also covered with the flow equalizing piece.
In the gas replacement device of the embodiment of the invention, the inner door and the outer door are positioned on the side wall of the first chamber and are respectively positioned on two sides of the air channel, the inner door is provided with an inner door lock and an inner door position sensor, the outer door is provided with an outer door lock and an outer door position sensor, the first chamber is also provided with a replacement sensor, and the replacement sensor, the inner door lock, the outer door lock, the inner door position sensor and the outer door position sensor are all electrically connected to a control module.
According to the gas replacement device provided by the embodiment of the invention, the gas replacement program automatically adjusts the control parameters in the gas replacement program according to the gas concentration of the second chamber, so that the gas concentrations of the first chamber and the second chamber are similar or identical, and the influence of opening the inner door on the gas concentration of the second chamber is reduced.
According to the gas replacement device provided by the embodiment of the invention, the control parameters comprise a gas type, a gas concentration value, ventilation time, ventilation frequency, ventilation rate and the like of the air duct system.
According to the gas replacement device provided by the embodiment of the invention, the gas replacement program is combined with the gas concentration in the second chamber and the volume and ventilation rate of the first chamber, and the ventilation time of the air duct system is controlled to change the gas environment in the first chamber.
In the gas replacement device of the embodiment of the invention, the replacement sensor comprises a gas concentration detector, and the gas replacement program changes the gas environment in the first chamber by comparing the gas concentration in the second chamber with the gas concentration in the first chamber and controlling the ventilation time and the ventilation frequency of the air duct system.
In the gas replacement device of the embodiment of the invention, the door lock program controls the outer door lock and the inner door lock through the information of the inner door position sensor, the outer door position sensor and the replacement sensor, so that the opening of the inner door and the outer door is allowed or forbidden, and the mistaken opening of an operator is avoided.
In the gas replacement device according to the embodiment of the present invention, the information processing program may receive and process information of the inner door position sensor, the outer door position sensor, and the replacement sensor, and control the gas replacement program and the door lock program according to the information.
The invention also provides a replacement method, which adopts the gas replacement device of the embodiment, and the method comprises the following steps:
placing an article to be replaced into the first chamber;
the control module starts the air inlet module, and external air enters the air inlet module and passes through the air inlet to form first air inlet;
the first air inlet passes through the flow equalizing piece on the air inlet module to form uniform air inlet;
the uniform air inlet is in contact with the articles in the first chamber to form air outlet;
the air outlet enters the air outlet module through the air outlet and is discharged out of the shell through the air outlet module.
Compared with the prior art, the replacement method provided by the embodiment of the invention has the beneficial effects that: a plurality of air inlets and exhaust ports between relative air inlet terminal surface and the air-out terminal surface admit air and exhaust, and the rethread piece that flow equalizes carries out the integration in wind channel, has both reduced the production at air current dead angle, has also guaranteed that the gas velocity of flow in the wind channel between air inlet terminal surface and the air-out terminal surface is even relatively, has guaranteed the effect of gas replacement in the first cavity.
According to the replacement method provided by the embodiment of the invention, after the uniform inlet air is contacted with the article in the first cavity, second outlet air is formed, the second outlet air passes through the flow equalizing piece on the air outlet module to form uniform outlet air, and the uniform outlet air enters the air outlet module through the air outlet and is discharged out of the shell through the air outlet module.
The invention also provides a control method, which adopts the gas replacement device of the embodiment, and the method comprises the following steps:
the inner door position sensor, the outer door position sensor and the replacement sensor respectively acquire states of the inner door, the outer door and the first chamber and feed back the states to the control module;
the control module judges whether the air duct system can enter a working state or not according to the states of the inner door and the outer door;
the control module judges whether the outer door can enter an opening state or not according to the inner door;
the control module judges whether the inner door can enter an opening state according to the states of the outer door and the first chamber.
Compared with the prior art, the control method provided by the embodiment of the invention has the beneficial effects that: the states of the outer door, the inner door and the first chamber are determined through the outer door position sensor, the inner door position sensor and the displacement sensor, and the inner door is ensured to be closed and the displacement reaction is stopped when the outer door is opened; when the inner door is opened, the outer door is closed, and the replacement reaction is finished; when the replacement reaction is started, the inner door and the outer door are closed; the inner door lock, the outer door lock and the replacement state of the gas replacement device are combined in the gas replacement process, so that the situation that the space environment of the second chamber is damaged due to the fact that the outer environment is communicated with the second chamber on the other side of the inner door when the inner door and the outer door are opened simultaneously can be avoided, and the situation that the environment of the first chamber and the environment of the second chamber are damaged due to the fact that the door is directly opened due to incomplete gas replacement can be avoided.
In the control method of the embodiment of the invention, the control module judges whether the outer door can enter the opening state according to the states of the inner door and the first chamber.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a schematic view of a gas replacement device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an air intake module in the gas exchanger according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a gas replacement device according to another embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a gas replacement device with a circulating air duct according to another embodiment of the present invention;
fig. 5 is a schematic structural view of a gas replacement device according to still another embodiment of the present invention.
In the figure, 1, a housing; 11. an inner door; 12. an outer door; 2. a first chamber; 3. an air inlet module; 31. an air inlet; 32. an air inlet housing; 33. an air inlet end face; 34. a flow equalizing member; 4. an air outlet module; 5. a second chamber; 6. an air intake module; 7. an exhaust module; 8. a circulating air duct; 9, a fan; 10; and (4) a filtering device.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, the meaning of a plurality of means is one or more, the meaning of a plurality of means is two or more, and larger, smaller, larger, etc. are understood as excluding the number, and larger, smaller, inner, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
A gas replacement apparatus according to a preferred embodiment of the present invention is used for a glove box, and particularly for performing gas replacement of a space in which an article to be handled is located before the operation of the glove box so that the gas concentration in the space is the same as or similar to that in the operation space of the glove box.
As shown in fig. 1, specifically, the gas replacement device includes a housing 1, a first chamber 2 for gas replacement is formed inside the housing, the first chamber 2 is used as a gas replacement space, and an article to be replaced is sent into the first chamber 2 for gas replacement; be provided with air duct system in the first cavity 2, air duct system includes air inlet module 3 and air-out module 4, air inlet module 3 and air-out module 4 set up on casing 1 inner wall and with casing 1's outside intercommunication, air inlet module 3 is arranged in sending into first cavity 2 with the gas of outside input and carries out gaseous replacement, air-out module 4 is arranged in with the first cavity 2 of gaseous discharge in the first cavity 2.
As shown in fig. 1, the air inlet module 3 and the air outlet module 4 are oppositely arranged; it can be understood that the air inlet module 3 and the air outlet module 4 can be located on the opposite end surfaces of the inner wall of the casing 1, or can be located at the opposite included angle; an air inlet 31 and an air outlet are respectively arranged on the end face of one side of the air inlet module 3 opposite to the air outlet module 4, and an air channel is formed between the air inlet module 3 and the air outlet module 4 through air flow during replacement. Specifically, the air inlet module 3 and the air outlet module 4 are arranged oppositely, the air inlet surface of the air inlet module 3 and the air outlet surface of the air outlet module 4 are both whole surfaces, and the air outlet and the air inlet 31 are also positioned on the end surface of one side of the air inlet module 3 opposite to the air outlet module 4, so that an air channel for gas replacement is formed in the first chamber 2; the relative setting that makes air inlet module 3 and air outlet module 4 makes the two maximize opposite arrange in first cavity 2, forms the straight blow wind channel in making first cavity 2, reduces the production at air current dead angle, guarantees the effect of gas replacement.
The gas replacement device further comprises a control module, the air inlet module 3 and the air outlet module 4 are electrically connected to the control module, and the control module is used for controlling the air inlet module 3 and the air outlet module 4 according to the gas environment in the operation space of the glove box, so that the gas environment in the first chamber 2 is close to the gas environment in the first chamber 2, the replacement time is shortened, and the replacement efficiency is improved; and in the replacement process of the article, the control module can also adjust the working modes of the air inlet module 3 and the air outlet module 4 according to the gas environments in the first chamber 2 and the operating space, so that the influence on the gas environment in the operating space when the first chamber 2 is communicated with the operating space is reduced.
As shown in fig. 2, in some embodiments of the present invention, the air intake module 3 includes an air intake housing 32, and the material of the air intake housing 32 may be metal or plastic; an air inlet duct is formed inside the air inlet casing 32, one end of the air inlet duct is communicated with the air inlet 31, and the other end of the air inlet duct is communicated with the outside of the casing 1, so that air which is gathered from the outside of the casing 1 reaches the air inlet 31 through the air inlet duct, and then is sent into the first chamber 2 from the air inlet 31 for air replacement; the air outlet module 4 comprises an air outlet shell, the structure of the air outlet shell is basically consistent with that of the air inlet shell, and the air outlet shell can be made of metal or plastic; an air outlet duct is formed inside the air outlet casing, one end of the air outlet duct is communicated with the air outlet, the other end of the air outlet duct is communicated with the outside of the casing 1, and the replaced air in the first cavity 2 enters the air outlet duct through the air outlet and is then conveyed to the outside of the casing 1 through the air outlet duct. The air inlet housing 32 and the air outlet housing constrain the air entering and exiting the first chamber 2 in the air duct, so that the air flow entering the air inlet 31 and the air outlet is stable, and the smooth proceeding of the replacement process in the first chamber 2 is facilitated.
As shown in fig. 1, in some embodiments of the present invention, the opposite end surfaces of the air inlet casing 32 and the air outlet casing are an air inlet end surface 33 for air inlet and an air outlet end surface for air outlet, a plurality of air inlets 31 are uniformly distributed on the air inlet end surface 33, the airflow in the air inlet duct reaches the first chamber 2 through a plurality of air outlets, and the uniformly arranged air inlets 31 make the airflow entering the first chamber 2 uniformly distributed in flow velocity. A plurality of air outlets are distributed on the air outlet end face, the gas which is replaced in the first cavity 2 enters the air outlet shell through the air outlets, and the gas in the first cavity 2 is discharged through the arranged air outlets.
In some embodiments of the present invention, the air inlet 31 corresponds to the air outlet, and the corresponding air inlet 31 corresponds to the corresponding air outlet in the horizontal and vertical directions, so that the air flow entering the first chamber 2 from the air inlet 31 can be smoothly discharged when reaching the air outlet, thereby ensuring the uniform and stable flow rate of the air duct in the housing 1.
In some embodiments of the present invention, the air inlets 31 correspond to the air outlets in position, and the corresponding air inlets 31 and the corresponding air outlets are corresponding and equal in number in the horizontal and vertical directions, so that the air flow entering the first chamber 2 from the air inlets 31 can be smoothly discharged when reaching the air outlets, thereby ensuring the uniformity and stability of the flow velocity of the air duct in the housing 1.
In some embodiments of the present invention, a plurality of air outlets are uniformly distributed on the air outlet end surface, the positions of the air inlets 31 correspond to the positions of the air outlets, and the corresponding air inlets 31 and the corresponding air outlets are corresponding and equal in number in the horizontal and vertical directions, so that the airflow entering the first chamber 2 from the air inlets 31 can be smoothly discharged when reaching the air outlets, and the uniformly arranged air outlets make the flow velocity distribution of the air discharged from the first chamber 2 uniform. It can be understood that the plurality of air inlets 31 and the plurality of air outlets are corresponding in position and equal in number on the air inlet end face 33 and the air outlet end face, and the air inlets 31 and the air outlets which are corresponding in position and equal in number and are uniformly distributed can further ensure the uniformity and stability of the flow rate of the air duct in the housing 1. The air inlet 31 and the air outlet may be distributed in a strip shape or in a ring shape, and are not limited herein, so as to achieve a stable and uniform flow velocity of the air duct.
As shown in fig. 5, the air inlet casing 32 and the air outlet casing cover the whole area of the end surface of one side to which the air inlet casing 32 and the air outlet casing are fixed, and the upper end, the lower end, the left end and the right end of the air inlet casing 32 and the air outlet casing are abutted to the end surfaces adjacent to the end surfaces to which the air inlet casing 32 and the air outlet casing are fixed, so that the areas of the air inlet casing 32 and the air outlet casing and the end surface of one side to which the air inlet casing is fixed are equal to each other, the maximum air outlet area of the end surface of the one side is reached, the time for gas replacement is reduced, and the efficiency of gas replacement is improved.
As shown in fig. 3, the first chamber 2 may be configured as an exhaust purification type, the air intake module 3 is communicated with the air intake module 6 outside the first chamber 2, the air outlet module 4 is communicated with the exhaust module 7 outside the first chamber 2, the air intake module 6 controls external clean air to enter the first chamber 2 through the air intake module 3, and the clean air is mixed with air in the first chamber 2 to enter the air outlet module 4 and then is discharged out of the first chamber through the exhaust module 7.
As shown in fig. 4, the first chamber 2 may further be of a circulating filtration purification type, the air intake module 6 and the air exhaust module 7 are communicated through a circulating air duct 8, and a fan 9 and a filter device 10 are arranged in the circulating air duct 8 to purify air through a circulating filtration manner.
As shown in fig. 2, in some embodiments of the present invention, the flow equalizing members 34 are covered on the outer sides of the air inlet end surface 33 and the air outlet end surface, and the flow equalizing members 34 are arranged to integrate the gas entering the first chamber 2 and the gas leaving the first chamber 2 through the flow equalizing members 34, so that the flow rate of the gas passing through the flow equalizing members 34 is more uniform and stable, and the replacement effect in the first chamber 2 is ensured. In particular, the flow straightener 34 comprises a flow homogenizing film.
As shown in fig. 1, in some embodiments of the present invention, a second chamber 5 is further disposed at one side of the first chamber 2, the second chamber 5 is used as an operation space, the article replaced in the first chamber 2 is sent into the second chamber 5 for further operation, the second chamber 5 is disposed at one side of the first chamber 2 and is communicated with the first chamber 2, so as to directly send the article from the replaced first chamber 2 into the second chamber 5; the gas condition of the first chamber 2 after the replacement is similar to or the same as the gas condition of the second chamber 5, and the gas condition can be directly communicated for transferring the articles.
As shown in fig. 1, in some embodiments of the present invention, a door lock module is further included, which includes an inner door 11 and an outer door 12, the inner door 11 is used for directly feeding the articles in the first chamber 2 into the operation space, and the second chamber 5 is communicated with the first chamber 2 through the inner door 11; the outer door 12 is used for sending an external object into the first chamber 2, and the shell 1 is communicated with the outside of the shell 1 through the outer door 12; interior door 11 and outer door 12 are located casing 1's lateral wall and are located the both sides in wind channel respectively, and when operating personnel or system feedback inner door were closed, article were sent into the wind channel by the outer door 12 of wind channel one side and are replaced, sent into second cavity 5 by the interior door 11 of wind channel opposite side after the replacement was accomplished and operate, and this setting makes full use of the space of casing 1's lateral wall, is favorable to reducing the volume of device.
The inner door 11 is provided with an inner door lock and an inner door position sensor, the inner door position sensor is used for detecting the opening and closing state of the inner door 11, and the inner door lock is used for locking the inner door 11; the outer door 12 is provided with an outer door lock and an outer door position sensor, the outer door position sensor is used for detecting the opening and closing state of the outer door 12, and the outer door lock is used for locking the outer door 12; a displacement sensor is also arranged in the first chamber 2 and is used for detecting whether the displacement reaction in the first chamber 2 is carried out or not; the displacement sensor, the inner door lock, the outer door lock, the inner door position sensor and the outer door position sensor are all electrically connected to the control module. In the working process, the states of the outer door 12, the inner door 11 and the first chamber 2 are determined through the outer door position sensor, the inner door position sensor and the displacement sensor so as to ensure that the inner door 11 is tightly closed and the displacement reaction is stopped when the outer door 12 is opened; when the inner door 11 is opened, the outer door 12 is closed, and the replacement reaction is completed; ensuring that the inner door 11 and the outer door 12 are closed when the displacement reaction is started; the inner door lock, the outer door lock and the replacement state of the gas replacement device are combined in the gas replacement process, so that the situation that the space environment of the second chamber 5 is damaged due to the fact that the inner door 11 and the outer door 12 are opened simultaneously to enable the external environment to be communicated with the second chamber 5 on the other side of the inner door 11 can be avoided, and the situation that the environment of the first chamber 2 and the environment of the second chamber 5 are damaged due to the fact that the doors are directly opened due to incomplete gas replacement can be avoided.
In some embodiments of the present invention, the control module further includes a gas replacement program for controlling the air duct system, a door lock program for controlling the door lock module, and an information processing program for processing information, and the control module controls the air duct system and the door lock module through the information processing program, so that the start and stop of the air duct system and the opening and closing of the inner door and the outer door are automated, manual operation is not required, the replacement efficiency in the first chamber 2 is improved, and the gas environment in the second chamber 5 is also ensured.
In some embodiments of the present invention, the gas replacement process automatically adjusts the control parameters in the gas replacement process according to the gas concentration of the second chamber 5, so that the gas concentrations of the first chamber 2 and the second chamber 5 are similar or the same, and the influence of opening the inner door 11 on the gas concentration of the second chamber 5 is reduced. The gas displacement procedure is generally operated in two steps, a first step for purging the first chamber 2 and a second step for controlling the gas concentration in the first chamber 2. Specifically, the control parameters include gas type, gas concentration value, ventilation time, ventilation frequency, ventilation rate and the like of the air duct system.
Further, when the replacement sensor in the first chamber 2 includes a gas concentration detector, the gas concentration in the first chamber 2 is controlled in a manner of target value control so as to be substantially equal to the gas concentration in the second chamber 5 for the replacement apparatus having the gas concentration detector.
When the displacement sensor in the first chamber does not include the gas concentration detector, the control module combines the volume and the gas inflow rate of the first chamber 2, and changes the gas concentration in the first chamber 2 to be close to the gas concentration in the second chamber 5 by controlling the introduction time of the gain gas and the introduction time of the subtraction gas.
In some embodiments of the present invention, the door lock program controls the outer door lock and the inner door lock through the information of the inner door position sensor, the outer door position sensor and the replacement sensor, so as to allow or prohibit the opening of the inner door 11 and the outer door 12, and avoid the mistaken opening of the door by the operator.
In some embodiments of the invention, the information processing program combines a gas replacement program and a door lock program to standardize the article transfer operation. The information processing program can receive and process the information of the inner door position sensor, the outer door position sensor and the replacement sensor, and control the gas replacement program and the door lock program according to the information. Not only can avoid the internal door 11 and the external door 12 to open simultaneously and make the external environment communicate with each other with the second chamber 5 and lead to the second chamber 5 environment to receive destruction, but also can avoid gaseous replacement incomplete and directly open the internal door 11 and lead to the gas environment of second chamber 5 to receive destruction.
The replacement sensor, the inner door position sensor and the outer door position sensor can be replaced or directly used for monitoring temperature and humidity, and the replacement sensor is installed in the first cavity through a flange and used for monitoring temperature. Along with the temperature rise, the humidity in the cavity is reduced, the input or output quantity value of the gas can be controlled, and temperature and humidity monitoring feedback can be provided for the cavity and even the whole workstation.
The preferred embodiment of the present invention further includes a gas replacement method, which uses the gas replacement device of the above embodiment, and the gas replacement method includes the steps of:
s1: placing the article to be replaced into the first chamber 2;
s2: the control module starts the air inlet module 3, and external air enters the air inlet module 3 and passes through the air inlet 31 to form first air inlet;
s3: the first air inlet passes through the flow equalizing piece 34 on the air inlet module 3 to form uniform air inlet;
s4: the uniform air is uniformly fed into the first chamber 2 to contact with the articles to form air outlet;
s5: the outlet air enters the outlet air module 4 through the outlet and is discharged out of the casing 1 through the outlet air module 4.
According to the gas replacement method, air is fed and exhausted through the plurality of air inlets and the plurality of air outlets between the opposite air inlet end face 33 and the opposite air outlet end face, and the air channel is integrated through the flow equalizing piece 34, so that the generation of air flow dead angles is reduced, the relatively uniform flow velocity of gas in the air channel between the air inlet end face 33 and the air outlet end face is ensured, and the effect of gas replacement in the first cavity 2 is ensured.
In some embodiments of the invention, in S4, the outlet air includes a second outlet air. Even air inlet contacts with article in first cavity 2 after, form the second air-out, the second air-out forms even air-out through the piece 34 that flow equalizes on the air-out module 4, even air-out is through the space between piece 34 and the air-out module 4 that flow equalizes, and get into air-out module 4 by the air outlet on the air-out module 4, and through air-out module 4 discharge casing, make the air current that flows first cavity 2 also form even air-out, the even stability of the air current in the first cavity 2 has been guaranteed.
In some embodiments of the present invention, before S1, there is also step S0: the gas replacement program in the control module enables the state of the first chamber 2 to be close to the state of the second chamber 5 according to the state of the second chamber 5, and the control module regulates and controls the gas environment in the first chamber 2 before the articles are placed into the first chamber 2, so that the time of the gas replacement process of the articles in the first chamber 2 is shorter, and the efficiency is higher.
In some embodiments of the present invention, in S2, the external air is slowed down between the flow equalizing member 34 and the air inlet 31, and is mixed uniformly to form a uniform air flow and flows to the flow equalizing member 34.
In some embodiments of the present invention, after the uniform gas enters the first chamber 2 in S4, the gas will diffuse into the whole space of the first chamber 2 in addition to the gas replacement near the object, so that the concentration of the air in the whole first chamber 2 is similar to or the same as that in the second chamber 5.
The preferred embodiment of the present invention further includes a method for controlling a gas replacement device, and the gas replacement device according to the above embodiment includes the steps of:
s01: the inner door position sensor, the outer door position sensor and the replacement sensor respectively acquire states of the inner door, the outer door and the first chamber and feed the states back to the control module;
s02: the control module judges whether the air duct system can enter a working state or not according to the states of the inner door and the outer door;
s03: the control module judges whether the outer door can enter an opening state or not according to the inner door;
s03: the control module judges whether the inner door can enter an opening state according to the states of the outer door and the first chamber.
According to the door lock of the gas replacement device and the replacement control method, the states of the outer door 12, the inner door 11 and the first chamber 2 are determined through the position sensor of the outer door 12, the position sensor of the inner door 11 and the replacement sensor, and the inner door 11 is ensured to be closed and the replacement reaction is stopped when the outer door 12 is opened; when the inner door 11 is opened, the outer door 12 is closed and the replacement reaction is completed; when the replacement reaction is started, the inner door 11 and the outer door 12 are closed; the inner door lock, the outer door lock and the replacement state of the gas replacement device are combined in the gas replacement process, so that the situation that the space environment of the second chamber 5 is damaged due to the fact that the inner door 11 and the outer door 12 are opened simultaneously to enable the external environment to be communicated with the second chamber 5 on the other side of the inner door 11 can be avoided, and the situation that the environment of the first chamber 2 and the environment of the second chamber 5 are damaged due to the fact that the doors are directly opened due to incomplete gas replacement can be avoided.
In some embodiments of the present invention, the control module determines whether the outer door can enter the open state according to the state of the first chamber, so as to prevent the outer door from being opened when the replacement is not completed, thereby affecting the replacement progress.
Specifically, the replacement control method of the first chamber 2 is automatically adjusted according to the spatial environment state of the second chamber 5, where the spatial environment state of the second chamber 5 includes, but is not limited to, gas concentration and temperature and humidity. The adjustment contents of the replacement control method for the first chamber 2 include, but are not limited to, the type of gas, the gas replacement duration, the control of the target gas concentration, and the control of the target temperature and humidity.
In some embodiments of the present invention, the displacement sensor is a gas concentration detector, the displacement sensor detects the gas concentration in the first chamber 2 and transmits the information to an information processing program in the control module, the information processing program compares the gas concentration in the first chamber 2 with the gas concentration in the second chamber 5 to determine whether the displacement reaction needs to be ended, and if the gas concentrations are close to or equal to each other, the displacement reaction is determined to be completed. Furthermore, the air replacement program in the control module can also control the opening and closing of the air duct system, and when the concentration of the gas in the first chamber 2 is not close to or the same as the concentration of the gas in the second chamber 5, the air replacement program maintains the operation of the air duct system; if the gas concentration in the first chamber 2 is similar to or the same as the gas concentration in the second chamber 5, the gas replacement process stops the operation of the air duct system. According to the gas concentration of the second chamber 5, the gas replacement duration is automatically adjusted, or the gas concentration of the first chamber 2 is automatically controlled, so that the gas concentration of the first chamber 2 is close to the gas concentration of the second chamber 5, and the influence on the gas concentration of the second chamber space when the first chamber 2 is communicated with the second chamber 5 is reduced.
In some embodiments of the present invention, the displacement sensor is a temperature and humidity detector, the displacement sensor detects the temperature and humidity in the first chamber 2 and transmits the information to the information processing program, the temperature and humidity of the first chamber 2 and the temperature and humidity of the second chamber 5 are compared in the information processing program to determine whether the displacement reaction needs to be finished, and if the temperature and humidity are close to or equal to each other, the displacement reaction is determined to be finished. Further, the air replacement program can also control the opening and closing of the air duct system, and when the temperature and humidity in the first chamber 2 are not close to or the same as the temperature and humidity in the second chamber 5, the air replacement program maintains the operation of the air duct system; if the concentration of the gas in the first chamber 2 is similar to or the same as the temperature and humidity in the second chamber 5, the gas replacement procedure stops the operation of the air duct system; the temperature and humidity of the first cavity 2 can be automatically controlled according to the temperature and humidity of the second cavity 5, so that the temperature and humidity of the first cavity 2 are close to the temperature and humidity of the second cavity 5, and the influence on the temperature and humidity of the space of the second cavity when the first cavity 2 is communicated with the second cavity 5 is reduced.
In some embodiments of the present invention, when the air flow velocities of the air inlet module 3 and the air outlet module 4 are constant, the information processing program determines the completion progress of the displacement reaction according to the gas concentration information transmitted by the displacement sensor, and adjusts the working time of the air duct system accordingly.
In some embodiments of the present invention, in S03, before the outer door 12 is opened, the inner door 11 position sensor detects the state of the inner door 11, the displacement sensor detects the internal state of the first chamber 2, and transmits the information to the information processing program; the information processing program judges whether the outer door 12 can be opened or not according to the information of the position sensor and the displacement sensor of the inner door 11, if the inner door 11 is closed and the displacement reaction is not carried out in the first chamber 2, the information processing program sends a signal to the door lock program, and the door lock program sends a signal to the door lock of the outer door and opens the door lock of the outer door; if the inner door 11 is not closed or the replacement reaction is in progress in the first chamber 2, the information processing program sends a signal to the door lock program, and the door lock program sends a signal to the outer door lock to keep the outer door lock in a locked state, so that the outer door 12 is prevented from being opened when the replacement reaction is in progress, gas leakage in the replacement process is prevented, the space environment in the first chamber 2 is influenced, and the time required by the replacement reaction is prolonged.
In some embodiments of the present invention, in S02, before the replacement reaction starts, the inner door 11 position sensor detects the state of the inner door 11, the outer door 12 position sensor detects the state of the outer door 12, and transmits the information to the information processing program; the information processing program judges whether to replace in the first chamber 2 according to the information of the position sensor of the inner door 11 and the position sensor of the outer door 12, if the inner door 11 and the outer door 12 are in a closed state, the information processing program sends information to the gas replacement program, and the gas replacement program sends a signal to the air duct system to start replacement; if the outer door 12 or the inner door 11 is not closed, the information processing program will not send information to the air duct system, so as to prevent the information from being replaced under the condition that the inner door 11 or the outer door 12 is not closed, and thus gas leakage is caused.
In some embodiments of the present invention, in S04, before the inner door 11 is opened, the outer door 12 position sensor detects the state of the outer door 12, the displacement sensor detects the internal state of the first chamber 2, and transmits the information to the information processing program; the information processing program judges whether the inner door 11 can be opened or not according to the information of the position sensor and the replacement sensor of the outer door 12, if the outer door 12 is closed and the replacement reaction in the first chamber 2 is finished, the information processing program sends a signal to the door lock program, and the door lock program sends a signal to the door lock of the inner door and opens the door lock of the inner door; if the outer door 12 is not closed or the displacement reaction is being performed in the first chamber 2, the information processing program sends a signal to the door lock program, and the door lock program sends a signal to the inner door lock to keep the outer door lock in a locked state, so that the inner door 11 is prevented from being opened when the displacement reaction is performed, and the space environment in the second chamber 5 is prevented from being influenced.
The working process of the invention is as follows: the air inlet and the air exhaust are carried out through a plurality of air inlets and air exhaust ports between the opposite air inlet end face 33 and the air outlet end face, and the integration of the air channel is carried out through the flow equalizing piece 34, so that the generation of air flow dead angles is reduced, the relatively uniform air flow velocity in the air channel between the air inlet end face 33 and the air outlet end face is also ensured, and the effect of air replacement in the first cavity 2 is ensured. The states of the outer door 12, the inner door 11 and the first chamber 2 are determined through the outer door 12 position sensor, the inner door 11 position sensor and the displacement sensor, and the inner door 11 is ensured to be tightly closed and the displacement reaction is stopped when the outer door 12 is opened; when the inner door 11 is opened, the outer door 12 is closed and the replacement reaction is completed; when the replacement reaction is started, the inner door 11 and the outer door 12 are closed; the inner door lock, the outer door lock and the replacement state of the gas replacement device are combined in the gas replacement process, so that the situation that the space environment of the second chamber 5 is damaged due to the fact that the inner door 11 and the outer door 12 are opened simultaneously to enable the external environment to be communicated with the second chamber 5 on the other side of the inner door 11 can be avoided, and the situation that the environment of the first chamber 2 and the environment of the second chamber 5 are damaged due to the fact that the doors are directly opened due to incomplete gas replacement can be avoided.
To sum up, the embodiment of the invention provides a gas replacement device, a replacement method and a control method thereof, which enable the starting and stopping of an air duct system and the opening and closing of an inner door and an outer door to be automated, do not need manual operation, improve the replacement efficiency in a first cavity, and ensure the gas environment in a second cavity.
The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (19)
1. A gas exchange device, comprising:
a first chamber and a second chamber in communication with each other;
the air duct system comprises an air inlet module and an air outlet module which are arranged on the inner wall of the first cavity, the air inlet module and the air outlet module are arranged oppositely, and an air duct for gas replacement is formed between the air inlet module and the air outlet module;
a door lock module including an inner door and an outer door, the second chamber communicating with the first chamber through the inner door, the first chamber communicating with an outside of the housing through the outer door;
and the control module comprises a gas replacement program for controlling the air duct system, a door lock program for controlling the door lock module and an information processing program for processing information.
2. The gas replacement device according to claim 1, wherein: an air inlet and an air outlet are respectively arranged on the end face of one side of the air inlet module, which is opposite to the air outlet module, the air inlet module comprises an air inlet shell, an air inlet channel is formed inside the air inlet shell, one end of the air inlet channel is communicated with the air inlet, and the other end of the air inlet channel is communicated with the outside of the shell; the air outlet module comprises an air outlet shell, an air outlet duct is formed inside the air outlet shell, one end of the air outlet duct is communicated with the air outlet, and the other end of the air outlet duct is communicated with the outside of the shell.
3. The gas replacement device according to claim 2, wherein: the air inlet shell and the air outlet shell are opposite end faces which are respectively an air inlet end face and an air outlet end face, a plurality of air inlets are uniformly distributed on the air inlet end face, a plurality of air outlets are distributed on the air outlet end face, and the air inlets correspond to the air outlets in position.
4. The gas replacement device according to claim 2, wherein: the air inlet shell and the air outlet shell cover the whole area of one side end face fixed by the air inlet shell and the air outlet shell.
5. A gas substitution device according to claim 2 or 3, characterized in that: the air inlet module is communicated with the air inlet module arranged outside the first cavity, and the air outlet module is communicated with the exhaust module arranged outside the first cavity.
6. The gas replacement device according to claim 5, wherein: the air inlet module and the air outlet module are connected outside the first chamber through a circulating air duct, and a fan and a filtering device are further arranged in the circulating air duct.
7. A gas substitution device according to claim 3, wherein: the air inlet end face is covered with a flow equalizing piece.
8. The gas replacement device according to claim 7, wherein: the air outlet end face is also covered with the flow equalizing piece.
9. The gas replacement device according to claim 1, wherein: the inner door and the outer door are located on the side wall of the first cavity and located on two sides of the air channel respectively, an inner door lock and an inner door position sensor are arranged on the inner door, an outer door lock and an outer door position sensor are arranged on the outer door, a replacement sensor is further arranged in the first cavity, and the replacement sensor, the inner door lock, the outer door lock, the inner door position sensor and the outer door position sensor are all electrically connected to the control module.
10. The gas replacement device according to claim 9, wherein: and the gas replacement program automatically adjusts the control parameters in the gas replacement program according to the gas concentration of the second chamber, so that the gas concentrations of the first chamber and the second chamber are the same.
11. The gas replacement device of claim 10, wherein: the control parameters include gas type, gas concentration value, ventilation time, ventilation frequency and ventilation rate of the air duct system.
12. The gas replacement device of claim 11, wherein: the gas replacement procedure combines the gas concentration in the second chamber with the volume and ventilation rate of the first chamber to change the gas environment in the first chamber by controlling the ventilation time of the ductwork.
13. A gas substitution device according to claim 10 or 11, characterized in that: the replacement sensor includes a gas concentration detector, and the gas replacement program changes the gas environment in the first chamber by comparing the gas concentration in the second chamber with the gas concentration in the first chamber by controlling the ventilation time and the ventilation frequency of the duct system.
14. The gas replacement device according to claim 9, wherein: the door lock program controls the outer door lock and the inner door lock through the information of the inner door position sensor, the outer door position sensor and the replacement sensor, and allows or prohibits the opening of the inner door and the outer door.
15. The gas replacement device according to claim 9, wherein: the information processing program may receive and process information of the inner door position sensor, the outer door position sensor, and the replacement sensor, and control the gas replacement program and the door lock program according to the information.
16. A displacement method, characterized by using the gas displacement apparatus of claim 8, the method comprising:
placing an article to be replaced into the first chamber;
the control module starts the air inlet module, and external air enters the air inlet module and passes through the air inlet to form first air inlet;
the first air inlet passes through the flow equalizing piece on the air inlet module to form uniform air inlet;
the uniform air inlet is in contact with the articles in the first chamber to form air outlet; the air outlet enters the air outlet module through the air outlet and is discharged out of the shell through the air outlet module.
17. The permutation method of claim 16, wherein: the uniform air inlet is arranged in the first cavity and is in contact with the articles to form second air outlet, the second air outlet passes through the flow equalizing piece on the air outlet module to form uniform air outlet, and the uniform air outlet enters the air outlet module through the air outlet and is discharged out of the shell through the air outlet module.
18. A control method characterized by using the gas replacement device according to claim 9, the method comprising:
the inner door position sensor, the outer door position sensor and the replacement sensor respectively acquire states of the inner door, the outer door and the first chamber and feed back the states to the control module;
the control module judges whether the air duct system can enter a working state or not according to the states of the inner door and the outer door;
the control module judges whether the outer door can enter an opening state or not according to the inner door;
the control module judges whether the inner door can enter an opening state according to the states of the outer door and the first chamber.
19. The control method according to claim 18, characterized in that: the control module judges whether the outer door can enter an opening state according to the states of the inner door and the first chamber.
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| CN202210082852.4A CN114102672A (en) | 2022-01-25 | 2022-01-25 | Gas replacement device, replacement method thereof, and control method thereof |
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