CN114098171A - Electronic smoke gas flow sensing chip and electronic cigarette - Google Patents
Electronic smoke gas flow sensing chip and electronic cigarette Download PDFInfo
- Publication number
- CN114098171A CN114098171A CN202111437326.7A CN202111437326A CN114098171A CN 114098171 A CN114098171 A CN 114098171A CN 202111437326 A CN202111437326 A CN 202111437326A CN 114098171 A CN114098171 A CN 114098171A
- Authority
- CN
- China
- Prior art keywords
- accommodating space
- flue gas
- vibrating diaphragm
- electronic
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003571 electronic cigarette Substances 0.000 title claims description 18
- 239000000779 smoke Substances 0.000 title abstract description 25
- 239000003546 flue gas Substances 0.000 claims abstract description 33
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 29
- 230000000149 penetrating effect Effects 0.000 claims description 8
- 239000011148 porous material Substances 0.000 claims description 6
- 238000004806 packaging method and process Methods 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 6
- 235000019504 cigarettes Nutrition 0.000 description 9
- 239000012528 membrane Substances 0.000 description 8
- 241000208125 Nicotiana Species 0.000 description 5
- 235000002637 Nicotiana tabacum Nutrition 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- SNICXCGAKADSCV-JTQLQIEISA-N (-)-Nicotine Chemical compound CN1CCC[C@H]1C1=CC=CN=C1 SNICXCGAKADSCV-JTQLQIEISA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000005802 health problem Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229960002715 nicotine Drugs 0.000 description 1
- SNICXCGAKADSCV-UHFFFAOYSA-N nicotine Natural products CN1CCCC1C1=CC=CN=C1 SNICXCGAKADSCV-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000391 smoking effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/50—Control or monitoring
- A24F40/51—Arrangement of sensors
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/40—Constructional details, e.g. connection of cartridges and battery parts
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/50—Control or monitoring
Landscapes
- Fire-Detection Mechanisms (AREA)
Abstract
The invention relates to an electronic flue gas flow sensing chip which comprises a substrate with a cavity and a capacitance sensing structure stacked on the substrate, wherein the capacitance sensing structure comprises a first vibrating diaphragm, a second vibrating diaphragm and a back plate, the first vibrating diaphragm and the second vibrating diaphragm are arranged at intervals oppositely, the back plate is clamped between the first vibrating diaphragm and the second vibrating diaphragm, a vibration space is formed by the back plate and the first vibrating diaphragm and the second vibrating diaphragm, and the vibration space is sealed by the first vibrating diaphragm and the second vibrating diaphragm. According to the electronic smoke flow sensing chip provided by the invention, the vibration space is sealed by the first vibrating diaphragm and the second vibrating diaphragm, so that the vibration space is free from interference of smoke and dust in the electronic smoke, and the stability of the sensor is improved.
Description
Technical Field
The invention relates to the field of electronic cigarettes, in particular to an electronic cigarette smoke flow sensing chip and an electronic cigarette using the same.
Background
At present, about 11 hundred million people smoke globally, because tobacco leaves contain nicotine, smoking has great harm to health, and with the continuous improvement of living standard, more and more people pay attention to health problems, and as a substitute of cigarettes, electronic cigarettes are popular with consumers.
Inside electron cigarette including the electron flue gas stream sensing chip of atomizer and control atomizer switch, because the inside smog that can produce of electron cigarette, thereby it condenses easily and disturbs its detection in electron flue gas stream sensing chip, influences its stability. In addition, because the inside of the electronic cigarette needs to be fed from the outside during operation, impurities such as external dust and the like easily enter the electronic cigarette flow sensing chip to influence the performance.
Disclosure of Invention
The invention provides an electronic smoke flow sensing chip and an electronic cigarette in order to overcome the defects of the prior art.
In order to achieve the above object, the present invention provides an electronic flue gas flow sensing chip, which includes a substrate having a cavity and a capacitance sensing structure stacked on the substrate, wherein the capacitance sensing structure includes a first vibrating diaphragm, a second vibrating diaphragm and a back plate sandwiched between the first vibrating diaphragm and the second vibrating diaphragm, the first vibrating diaphragm and the second vibrating diaphragm are arranged at an interval, so as to form a vibration space, and the vibration space is sealed by the first vibrating diaphragm and the second vibrating diaphragm.
Furthermore, the back plate is provided with a back plate hole in a penetrating mode.
Furthermore, the capacitance sensing structure further comprises a supporting column connected with the first vibrating diaphragm and the second vibrating diaphragm, and the supporting column penetrates through the back plate hole to support the first vibrating diaphragm and the second vibrating diaphragm.
Furthermore, one side of the capacitance sensing structure is communicated with the accommodating space, and the other side of the capacitance sensing structure is communicated with the external atmospheric pressure.
Further, the air pressure in the vibration space is set to be the atmospheric pressure.
Further, the capacitance sensing structure further includes a spacer layer disposed between the first diaphragm and the backplate and between the backplate and the second diaphragm at intervals.
The invention also provides an electronic cigarette, which comprises a rod body with a first accommodating space, a shell accommodated in the first accommodating space and an electronic smoke flow sensor, wherein the shell and the rod body jointly enclose a second accommodating space, the electronic smoke flow sensor is accommodated in the second accommodating space, the rod body is provided with a first communication hole which is communicated with the outside and the second accommodating space in a penetrating manner, the shell is provided with a second communication hole which is communicated with the first accommodating space and the second accommodating space in a penetrating manner, and the electronic smoke flow sensor comprises the electronic smoke flow sensing chip as claimed in any one of claims 1 to 6 and an ASIC chip which is electrically connected with the electronic smoke flow sensing chip.
Further, the casing is including encircleing first intercommunicating pore is fixed in the lateral wall of the body of rod and with the diapire that the lateral wall is connected, the diapire runs through and is provided with the second intercommunicating pore, electron flue gas flow sensor includes circuit board and lid fits the encapsulation shell of circuit board, the circuit board with the circuit board encloses to close and forms and accepts electron flue gas flow sensor with the third accommodating space of ASIC chip, the circuit board is fixed in the diapire just runs through and is equipped with the intercommunication the third accommodating space with the third intercommunicating pore of first accommodating space, the encapsulation shell runs through and is equipped with the intercommunication the third accommodating space with the fourth intercommunicating pore of second accommodating space.
Further, a sealing ring is clamped between the circuit board and the bottom wall and surrounds the third communication hole.
According to the electronic flue gas flow sensing chip provided by the invention, the vibration space is sealed by the first vibrating diaphragm and the second vibrating diaphragm which are arranged on two sides of the back plate, so that smoke, tobacco tar and dust cannot enter, and the problem that the performance of the electronic flue gas flow sensing chip is influenced by the interference of the electronic flue gas flow sensing chip with magazines is solved.
Drawings
Figure 1 is a schematic cross-sectional view of an electronic cigarette of the present invention;
figure 2 is a schematic cross-sectional view of an electronic cigarette of the present invention in another embodiment;
FIG. 3 is a schematic structural diagram of an electronic flue gas flow sensing chip of the present invention;
FIG. 4 is an exploded view of the e-beam sensor chip of the present invention;
fig. 5 is a schematic cross-sectional view of an e-flue gas flow sensing chip of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present invention in its various embodiments. However, the technical solution claimed in the present invention can be implemented without these technical details and various changes and modifications based on the following embodiments.
The invention relates to an electronic smoke flow sensing chip and an electronic smoke, as shown in fig. 1, which is a schematic structural diagram of the electronic smoke provided by the invention, an electronic smoke 100 comprises a rod body 110 having a first accommodating space 101, a shell 120 accommodated in the first accommodating space 101 and an electronic smoke flow sensor 130, the shell 120 and the rod body 110 jointly enclose a second accommodating space 102, the electronic smoke flow sensor 130 is accommodated in the second accommodating space 102, the rod body 110 is provided with a first through hole 111 communicating the outside with the second accommodating space 102 in a penetrating manner, the shell 120 comprises a side wall 121 surrounding the first through hole 111 and fixed on the rod body 110 and a bottom wall 122 connected with the side wall 121, the bottom wall 122 is provided with a second through hole 123 communicating the second accommodating space 102 and the first accommodating space 101 in a penetrating manner, the electronic smoke flow sensor 130 comprises a circuit board 131 and a shell 132 covering the circuit board 131, the circuit board 131 and the packaging shell 132 are enclosed to form a third accommodating space 133, the third accommodating space 133 accommodates an electronic smoke flow sensing chip 200 and an ASIC chip 134 electrically connected with the electronic smoke flow sensing chip 200, the circuit board 131 is fixed on the bottom wall 122 and penetrates through a third communication hole 135 for communicating the first accommodating space 101 with the third accommodating space 133, and the packaging shell 132 penetrates through a fourth communication hole 136 for communicating the second accommodating space 102 with the third accommodating space 133; so set up, make one side of electron cigarette gas flow sense chip 200 communicate with first accommodating space 101 through third communicating hole 135 and second communicating hole 123, the opposite side of electron cigarette gas flow sense chip 200 is connected with the external world through fourth communicating hole 136 and first communicating hole 111, thus when the electron cigarette worked, produce the atmospheric pressure difference with the external world in the first accommodating space, the electron cigarette gas flow sense chip can detect this atmospheric pressure difference thus output signal. Further, a sealing ring 137 is further interposed between the circuit board 131 and the bottom wall 122, and the sealing ring 137 is disposed around the third communication hole 135, so that the pressure change in the first receiving space 101 can be directly and intensively fed back to the electronic smoke flow sensing chip 200.
In other alternative embodiments, as shown in fig. 2, one side of the e-flue gas flow sensing chip 200 may also communicate with the outside through the third communication hole 135 and the first communication hole 111, and the other side of the e-flue gas flow sensing chip 200 may communicate with the first receiving space 101 through the fourth communication hole 136 and the second communication hole 123. The sealing ring 137 is interposed between the circuit board 131 and the stem 110, and the sealing ring 137 is disposed around the third communication hole 135.
As shown in fig. 3 to 5, the electronic flue gas flow sensor 200 includes a substrate 210 having a cavity 201, and a capacitance sensing structure 220 stacked on the substrate 210, where the capacitance sensing structure 220 includes a first diaphragm 221, a second diaphragm 222 and a back plate 223 interposed between the first diaphragm 221 and the second diaphragm 222, a back plate hole 2231 is disposed through the back plate 223, the back plate 223 is spaced from the first diaphragm 221 and the second diaphragm 222 by a spacer layer 224 to form a vibration space 225, and the vibration space 225 is enclosed by the first diaphragm 221 and the second diaphragm 222. So set up for in smog, tobacco tar in the electron cigarette and the unable vibration space 225 that gets into electron flue gas stream sensing chip 200 of external dust, isolated the route that these materials got into the inside vibration space of electron flue gas stream sensing chip, and then prevented because smog tobacco tar dust etc. have improved the stability of electron cigarette product to electron flue gas stream sensing chip. The vibration space 225 is set to be at atmospheric pressure, and thus, the first diaphragm 221 and the second diaphragm 222 can operate to close the vibration space 225 under normal atmospheric pressure, so that the manufacturing cost of the electronic flue gas flow sensor 200 can be reduced.
As shown in fig. 4 to 5, a back plate hole 2231 is formed in the back plate 223 sandwiched between the first vibrating membrane 221 and the second vibrating membrane 222, the back plate hole 2231 can balance air pressures on two sides of the back plate 223, so that the sensitivity of the electronic flue gas flow sensor is optimized and damping is reduced, a supporting column 226 is further connected between the first vibrating membrane 221 and the second vibrating membrane 222 in the back plate hole 2231, the supporting column 226 supports the first vibrating membrane 221 and the second vibrating membrane 222, and adhesion among the first vibrating membrane 221, the second vibrating membrane 222 and the back plate 223 is also prevented. Further, the support column 226, which is connected to both the first diaphragm 221 and the second diaphragm 222, can ensure synchronous vibration of the first diaphragm 221 and the second diaphragm 222.
According to the electronic flue gas flow sensing chip provided by the invention, the vibration space is sealed by the first vibrating diaphragm and the second vibrating diaphragm which are arranged on two sides of the back plate, so that smoke, tobacco tar and dust cannot enter, and the problem that the performance of the electronic flue gas flow sensing chip is influenced by the interference of the electronic flue gas flow sensing chip with magazines is solved.
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.
Claims (9)
1. The utility model provides an electronic flue gas flow sensing chip, its is including the basement that has the cavity and fold and locate capacitance sensing structure on the basement, its characterized in that, capacitance sensing structure includes first vibrating diaphragm, the second vibrating diaphragm that relative interval set up and presss from both sides and locates first vibrating diaphragm with backplate between the second vibrating diaphragm, the backplate with first vibrating diaphragm with second vibrating diaphragm interval sets up in order to form the vibration space, the vibration space passes through first vibrating diaphragm with the second vibrating diaphragm seals.
2. The electronic flue gas flow sensing chip of claim 1, wherein the back plate is provided with a back plate hole therethrough.
3. The electronic flue gas flow sensing chip of claim 2, wherein the capacitance sensing structure further comprises a supporting column connecting the first diaphragm and the second diaphragm, and the supporting column penetrates through the back plate hole to support the first diaphragm and the second diaphragm.
4. The electronic flue gas flow sensing chip of claim 1, wherein one side of said capacitive sensing structure is in communication with said receiving space and the other side of said capacitive sensing structure is in communication with ambient atmospheric pressure.
5. The e-flue gas flow sensing chip of claim 1, wherein the air pressure in the vibrating space is set to atmospheric pressure.
6. The electronic flue gas flow sensing chip of claim 1, wherein the capacitance sensing structure further comprises a spacer layer disposed at intervals between the first diaphragm and the back plate and between the back plate and the second diaphragm.
7. The utility model provides an electronic cigarette, its characterized in that, electronic cigarette including the body of rod that has first accommodating space, accept in first accommodating space's casing and electron flue gas stream sensor, the casing with the body of rod encloses into second accommodating space jointly, electron flue gas stream sensor accept in second accommodating space, the body of rod runs through be provided with the intercommunication external with the first intercommunicating pore of second accommodating space, the casing runs through to be provided with the intercommunication first accommodating space with the second intercommunicating pore of second accommodating space, electron flue gas stream sensor include according to any one of claims 1-6 electron flue gas stream sensor chip and with the ASIC chip that electron flue gas stream sensor chip electricity is connected.
8. The electronic cigarette according to claim 7, wherein the housing includes a side wall surrounding the first through hole and fixed to the rod body, and a bottom wall connected to the side wall, the bottom wall is provided with a second through hole in a penetrating manner, the electronic cigarette flow sensor includes a circuit board and a packaging shell covering the circuit board, the circuit board and the circuit board enclose a third accommodating space for accommodating the electronic cigarette flow sensor and the ASIC chip, the circuit board is fixed to the bottom wall and provided with a third through hole in a penetrating manner for communicating the third accommodating space with the first accommodating space, and the packaging shell is provided with a fourth through hole in a penetrating manner for communicating the third accommodating space with the second accommodating space.
9. The electronic cigarette according to claim 8, wherein a seal ring is interposed between the circuit board and the bottom wall, and the seal ring is disposed around the third communication hole.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202111437326.7A CN114098171A (en) | 2021-11-30 | 2021-11-30 | Electronic smoke gas flow sensing chip and electronic cigarette |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111437326.7A CN114098171A (en) | 2021-11-30 | 2021-11-30 | Electronic smoke gas flow sensing chip and electronic cigarette |
Publications (1)
Publication Number | Publication Date |
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CN114098171A true CN114098171A (en) | 2022-03-01 |
Family
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Family Applications (1)
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CN202111437326.7A Pending CN114098171A (en) | 2021-11-30 | 2021-11-30 | Electronic smoke gas flow sensing chip and electronic cigarette |
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CN (1) | CN114098171A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024139617A1 (en) * | 2022-12-29 | 2024-07-04 | 深圳市基克纳科技有限公司 | Electronic cigarette having child lock function |
WO2024207151A1 (en) * | 2023-04-03 | 2024-10-10 | 瑞声声学科技(深圳)有限公司 | Electronic cigarette |
WO2024255877A1 (en) * | 2023-06-16 | 2024-12-19 | 潍坊歌尔微电子有限公司 | Mems microphone, electronic device, and preparation method for mems microphone |
GB2635606A (en) * | 2023-09-26 | 2025-05-21 | Memsensing Microsystems Suzhou China Co Ltd | Airflow sensor and airflow sensor packaging structure |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104219598A (en) * | 2013-05-31 | 2014-12-17 | 美律电子(深圳)有限公司 | Sonic sensor with two vibrating diaphragms |
CN104581585A (en) * | 2013-10-16 | 2015-04-29 | 美律电子(深圳)有限公司 | Sonic sensor provided with diaphragm support structure |
CN204796752U (en) * | 2015-07-09 | 2015-11-25 | 深圳市三悦科技有限公司 | Electronics cigarette gas flow controller |
US20170219391A1 (en) * | 2015-07-28 | 2017-08-03 | Nazhiyuan Technology (Tangshan), LLC. | Pneumatic Sensor and Electronic Cigarette |
CN109714690A (en) * | 2018-12-31 | 2019-05-03 | 瑞声声学科技(深圳)有限公司 | MEMS microphone |
CN209949415U (en) * | 2019-06-11 | 2020-01-14 | 歌尔科技有限公司 | MEMS microphones and electronic equipment |
CN210988222U (en) * | 2019-10-29 | 2020-07-14 | 广东烨嘉声学科技有限公司 | An electronic cigarette sensor with integrated ASIC chip |
CN211792034U (en) * | 2019-12-27 | 2020-10-27 | 歌尔微电子有限公司 | MEMS chip |
CN112075672A (en) * | 2020-09-30 | 2020-12-15 | 苏州敏芯微电子技术股份有限公司 | Sensing Devices and Electronic Cigarettes |
CN213215349U (en) * | 2020-06-05 | 2021-05-18 | 潍坊歌尔微电子有限公司 | Airflow sensor for electronic cigarette and electronic cigarette |
CN213694144U (en) * | 2020-12-25 | 2021-07-13 | 歌尔微电子有限公司 | MEMS sensor chips, microphones and electronics |
CN113184797A (en) * | 2021-06-02 | 2021-07-30 | 迈感微电子(上海)有限公司 | Sensor packaging structure |
-
2021
- 2021-11-30 CN CN202111437326.7A patent/CN114098171A/en active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104219598A (en) * | 2013-05-31 | 2014-12-17 | 美律电子(深圳)有限公司 | Sonic sensor with two vibrating diaphragms |
CN104581585A (en) * | 2013-10-16 | 2015-04-29 | 美律电子(深圳)有限公司 | Sonic sensor provided with diaphragm support structure |
CN204796752U (en) * | 2015-07-09 | 2015-11-25 | 深圳市三悦科技有限公司 | Electronics cigarette gas flow controller |
US20170219391A1 (en) * | 2015-07-28 | 2017-08-03 | Nazhiyuan Technology (Tangshan), LLC. | Pneumatic Sensor and Electronic Cigarette |
CN109714690A (en) * | 2018-12-31 | 2019-05-03 | 瑞声声学科技(深圳)有限公司 | MEMS microphone |
CN209949415U (en) * | 2019-06-11 | 2020-01-14 | 歌尔科技有限公司 | MEMS microphones and electronic equipment |
CN210988222U (en) * | 2019-10-29 | 2020-07-14 | 广东烨嘉声学科技有限公司 | An electronic cigarette sensor with integrated ASIC chip |
CN211792034U (en) * | 2019-12-27 | 2020-10-27 | 歌尔微电子有限公司 | MEMS chip |
CN213215349U (en) * | 2020-06-05 | 2021-05-18 | 潍坊歌尔微电子有限公司 | Airflow sensor for electronic cigarette and electronic cigarette |
CN112075672A (en) * | 2020-09-30 | 2020-12-15 | 苏州敏芯微电子技术股份有限公司 | Sensing Devices and Electronic Cigarettes |
CN213694144U (en) * | 2020-12-25 | 2021-07-13 | 歌尔微电子有限公司 | MEMS sensor chips, microphones and electronics |
CN113184797A (en) * | 2021-06-02 | 2021-07-30 | 迈感微电子(上海)有限公司 | Sensor packaging structure |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024139617A1 (en) * | 2022-12-29 | 2024-07-04 | 深圳市基克纳科技有限公司 | Electronic cigarette having child lock function |
WO2024207151A1 (en) * | 2023-04-03 | 2024-10-10 | 瑞声声学科技(深圳)有限公司 | Electronic cigarette |
WO2024255877A1 (en) * | 2023-06-16 | 2024-12-19 | 潍坊歌尔微电子有限公司 | Mems microphone, electronic device, and preparation method for mems microphone |
GB2635606A (en) * | 2023-09-26 | 2025-05-21 | Memsensing Microsystems Suzhou China Co Ltd | Airflow sensor and airflow sensor packaging structure |
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