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CN114069185B - A tunable magnetostatic wave resonator - Google Patents

A tunable magnetostatic wave resonator Download PDF

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CN114069185B
CN114069185B CN202210061911.XA CN202210061911A CN114069185B CN 114069185 B CN114069185 B CN 114069185B CN 202210061911 A CN202210061911 A CN 202210061911A CN 114069185 B CN114069185 B CN 114069185B
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microstrip line
substrate
cavity
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lower substrate
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CN114069185A (en
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杜姗姗
杨青慧
王明
樊鑫安
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University of Electronic Science and Technology of China
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00Resonators of the waveguide type
    • H01P7/06Cavity resonators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00Resonators of the waveguide type
    • H01P7/08Strip line resonators
    • H01P7/082Microstripline resonators

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Abstract

An adjustable static magnetic wave resonator belongs to the technical field of microwave radio frequency devices. The resonator comprises a resonator body, wherein the resonator body comprises a resonant cavity, a lower substrate arranged in the resonant cavity, a radio-frequency input end arranged on one side of the resonant cavity and a radio-frequency output end arranged at the top of the resonant cavity; a first microstrip line located above the lower substrate; the second microstrip line is positioned on the lower substrate and coupled with the first microstrip line; the disc is connected with the radio frequency output end; and the YIG substrate is positioned above the first microstrip line and the second microstrip line. The adjustable static magnetic wave resonator can be tunable from a frequency band of 4GHz-12GHz, the 3dB bandwidth is extremely narrow, the Q value range is 2000-4500, the assembling, adjusting and measuring efficiency of the resonator is effectively improved, the processing technology is simplified, the processing cost is reduced, and the batch production of the yttrium iron garnet tuned resonator is facilitated.

Description

一种可调静磁波谐振器A tunable magnetostatic wave resonator

技术领域technical field

本发明属于微波射频器件技术领域,具体涉及一种可调静磁波谐振器。The invention belongs to the technical field of microwave radio frequency devices, and in particular relates to a tunable magnetostatic wave resonator.

背景技术Background technique

为适应通信设备小型轻量化的发展,对信号源提出了低相位噪声以及宽调谐带宽的要求,目前常见的微波固态信号源为介质谐振振荡器(DRO)、压控振荡器(VCO)或者二者的结合,以及以钇铁石榴石(YIG)谐振器为基础制成的可调静磁波谐振器。In order to adapt to the development of small and lightweight communication equipment, low phase noise and wide tuning bandwidth are required for signal sources. At present, the common microwave solid-state signal sources are dielectric resonant oscillator (DRO), voltage controlled oscillator (VCO) or two. A combination of yttrium iron garnet (YIG) resonators and tunable magnetostatic wave resonators based on yttrium iron garnet (YIG) resonators.

目前,以钇铁石榴石(YIG)为基础制成的可调静磁波谐振器主要是利用了钇铁石榴石材料的铁磁共振特性而制成。传统的谐振结构,一般采用钇铁石榴石小球作为谐振子,利用环耦合结构,实现谐振器的激励。然而,这类谐振器的谐振腔中的钇铁石榴石小球需要经过复杂且高精度的抛光工艺制备,工艺难度大,对应采用的加工设备也相对昂贵。同时,由于钇铁石榴石小球需要微调晶向才能使用,使得谐振器的调试装配更加复杂。At present, tunable magnetostatic wave resonators based on yttrium iron garnet (YIG) are mainly made by utilizing the ferromagnetic resonance properties of yttrium iron garnet materials. In the traditional resonant structure, yttrium iron garnet balls are generally used as the resonator, and the ring coupling structure is used to realize the excitation of the resonator. However, the yttrium iron garnet spheres in the resonator cavity of this type of resonator need to be prepared through a complex and high-precision polishing process, which is difficult and the corresponding processing equipment is relatively expensive. At the same time, since the yttrium iron garnet ball needs to be fine-tuned to use, the debugging and assembly of the resonator is more complicated.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于,针对背景技术存在的缺陷,提出了一种可调静磁波谐振器。The purpose of the present invention is to propose a tunable magnetostatic wave resonator in view of the defects existing in the background art.

为实现上述目的,本发明采用的技术方案如下:For achieving the above object, the technical scheme adopted in the present invention is as follows:

一种可调静磁波谐振器,其特征在于,包括:A tunable magnetostatic wave resonator, comprising:

谐振器主体1,所述谐振器主体1包括谐振腔、设于谐振腔内的下基板7、设于谐振腔一侧的射频输入端2和设于谐振腔顶部的射频输出端3;Resonator main body 1, the resonator main body 1 includes a resonant cavity, a lower substrate 7 arranged in the resonant cavity, a radio frequency input end 2 arranged on one side of the resonant cavity, and a radio frequency output end 3 arranged on the top of the resonant cavity;

第一微带线4,所述第一微带线4位于下基板7之上、并与伸入谐振腔内的射频输入端2连接;a first microstrip line 4, the first microstrip line 4 is located on the lower substrate 7 and connected to the radio frequency input end 2 extending into the resonant cavity;

第二微带线5,所述第二微带线5位于下基板7之上、并与第一微带线4耦合;a second microstrip line 5, the second microstrip line 5 is located on the lower substrate 7 and coupled with the first microstrip line 4;

圆盘31,所述圆盘31与从谐振腔顶部伸入谐振腔内的射频输出端3连接;a disc 31, the disc 31 is connected with the radio frequency output end 3 extending into the resonant cavity from the top of the resonant cavity;

YIG基片6,所述YIG基片6包括GGG基片61和生长于GGG基片61表面的YIG薄膜62;所述YIG基片6位于第一微带线4和第二微带线5之上,且完全覆盖第一微带线4和第二微带线5的耦合区域;所述YIG基片6位于圆盘31正下方。YIG substrate 6, the YIG substrate 6 includes a GGG substrate 61 and a YIG film 62 grown on the surface of the GGG substrate 61; the YIG substrate 6 is located between the first microstrip line 4 and the second microstrip line 5 and completely cover the coupling area of the first microstrip line 4 and the second microstrip line 5 ; the YIG substrate 6 is located directly under the disk 31 .

进一步的,所述第一微带线4沿下基板7长度方向设置,第一微带线4包括依次连接的输入段41、第一过渡段42、U型段43,输入段41连接射频输入端2;所述第二微带线5包括依次连接的叉型段51、第二过渡段52、接地覆盖段53。所述U型段43的两个分支位于叉型段51的两个内凹中、且U型段43与叉型段51不接触,所述接地覆盖段53上设有接地导通孔54,接地导通孔54贯通下基板7并与下基板7底面设置的接地层71连接;所述GGG基片61位于U型段43和叉型段51上方、并与U型段43和叉型段51接触,所述GGG基片61完全覆盖U型段43和叉型段51、且不接触接地覆盖段53。Further, the first microstrip line 4 is arranged along the length direction of the lower substrate 7, and the first microstrip line 4 includes an input section 41, a first transition section 42, and a U-shaped section 43 connected in sequence, and the input section 41 is connected to the radio frequency input. End 2; the second microstrip line 5 includes a fork section 51, a second transition section 52, and a ground covering section 53 that are connected in sequence. The two branches of the U-shaped section 43 are located in the two inner recesses of the fork-shaped section 51, and the U-shaped section 43 is not in contact with the fork-shaped section 51. The grounding cover section 53 is provided with a grounding conduction hole 54. The ground via 54 penetrates through the lower substrate 7 and is connected to the ground layer 71 provided on the bottom surface of the lower substrate 7; the GGG substrate 61 is located above the U-shaped section 43 and the forked section 51, and is connected to the U-shaped section 43 and the forked section. 51, the GGG substrate 61 completely covers the U-shaped segment 43 and the fork-shaped segment 51, and does not contact the ground covering segment 53.

进一步的,所述接地覆盖段53呈U型,包括与第二过渡段52垂直连接的第一接地段、以及分别垂直连接于第一接地段两端的两个第二接地段,第二接地段位于下基板7长度方向两侧,所述第二接地段的长度等于下基板7的长度,第一接地段的长度等于下基板7的宽度。Further, the ground covering section 53 is U-shaped, and includes a first ground section vertically connected to the second transition section 52, and two second ground sections vertically connected to both ends of the first ground section, respectively. Located on both sides of the lower substrate 7 in the length direction, the length of the second ground segment is equal to the length of the lower substrate 7 , and the length of the first ground segment is equal to the width of the lower substrate 7 .

进一步的,所述输入段41宽度大于第一过渡段42宽度,第一过渡段42宽度与第二过渡段52宽度相等。Further, the width of the input section 41 is greater than the width of the first transition section 42 , and the width of the first transition section 42 is equal to the width of the second transition section 52 .

进一步的,所述第一微带线4和第二微带线5关于下基板7长度方向的中线轴对称。Further, the first microstrip line 4 and the second microstrip line 5 are axially symmetrical with respect to the center line of the lower substrate 7 in the length direction.

进一步的,所述谐振器主体1处于外置磁场8中,外置磁场8的方向平行于下基板7宽度方向。Further, the resonator body 1 is in an external magnetic field 8 , and the direction of the external magnetic field 8 is parallel to the width direction of the lower substrate 7 .

进一步的,所述射频输入端2和射频输出端3采用射频绝缘子,射频输入端2通过焊接与第一微带线4连接,射频输出端3通过导电胶与圆盘31连接。Further, the radio frequency input end 2 and the radio frequency output end 3 use radio frequency insulators, the radio frequency input end 2 is connected to the first microstrip line 4 by welding, and the radio frequency output end 3 is connected to the disc 31 by conductive glue.

进一步的,所述谐振腔包括:Further, the resonant cavity includes:

第一腔10,下基板7、第一微带线4、第二微带线5和YIG基片6均位于第一腔10中;The first cavity 10, the lower substrate 7, the first microstrip line 4, the second microstrip line 5 and the YIG substrate 6 are all located in the first cavity 10;

第二腔11,所述第二腔11是第一腔10顶部向上凸出形成的,YIG基片6的顶面位于第二腔内,YIG基片6的两侧面与第二腔11的侧面之间有间距;The second cavity 11, the second cavity 11 is formed by protruding upward from the top of the first cavity 10, the top surface of the YIG substrate 6 is located in the second cavity, the two sides of the YIG substrate 6 and the side surfaces of the second cavity 11 space between

第三腔12,所述第三腔12是第二腔11顶部向上凸出形成的,圆盘31位于第三腔12内。The third cavity 12 , the third cavity 12 is formed by protruding upward from the top of the second cavity 11 , and the disk 31 is located in the third cavity 12 .

进一步的,所述YIG基片6位于圆盘31的正下方,即YIG基片6的中心正对圆盘31中心。Further, the YIG substrate 6 is located directly below the disk 31 , that is, the center of the YIG substrate 6 is directly opposite the center of the disk 31 .

进一步的,所述YIG薄膜62通过液相外延技术生长于GGG基片61上。Further, the YIG thin film 62 is grown on the GGG substrate 61 by liquid phase epitaxy.

与现有技术相比,本发明的有益效果为:Compared with the prior art, the beneficial effects of the present invention are:

1、本发明采用钇铁石榴石薄膜替代钇铁石榴石小球作为谐振子,采用微带线结构替代复杂的耦合电路结构,得到的可调静磁波谐振器可实现从4GHz-12GHz频段内可调谐,3dB带宽极窄,Q值范围为2000~4500,不仅有效提高了谐振器的组装调测效率,还简化了加工工艺,降低了加工成本,更有利于实现对钇铁石榴石调谐谐振器的批量化生产。1. The present invention adopts the yttrium iron garnet film to replace the yttrium iron garnet ball as the resonator, adopts the microstrip line structure to replace the complex coupling circuit structure, and the obtained adjustable magnetostatic wave resonator can be tunable from the 4GHz-12GHz frequency band, The 3dB bandwidth is extremely narrow, and the Q value ranges from 2000 to 4500, which not only effectively improves the assembly and commissioning efficiency of the resonator, but also simplifies the processing technology, reduces the processing cost, and is more conducive to the realization of batches of yttrium iron garnet tuning resonators production.

2、本发明提供的一种可调静磁波谐振器,通过对腔体结构的设计,以及微带线、圆盘、YIG基片的布局,使得水平输入的射频信号在腔内耦合后,转为垂直向上输出,增加了输入与输出之间的隔离度。2. A tunable magnetostatic wave resonator provided by the present invention, through the design of the cavity structure, and the layout of the microstrip line, the disc, and the YIG substrate, so that the horizontally input radio frequency signal is coupled in the cavity, and then rotates. For vertical upward output, the isolation between input and output is increased.

3、本发明提供的一种可调静磁波谐振器,通过第一微带线和第二微带线的结构设计,实现向YIG薄膜耦合射频信号;同时对U型段与叉型段的间隙、以及微带线宽度的设置,调整耦合到YIG薄膜材料上的射频磁场最强,得到更好的响应波形;并通过控制圆盘大小以及圆盘与YIG薄膜材料之间的距离,对整体谐振器的响应波形进行调整。3. A tunable magnetostatic wave resonator provided by the present invention realizes coupling of radio frequency signals to the YIG film through the structural design of the first microstrip line and the second microstrip line; , and the setting of the width of the microstrip line, adjust the RF magnetic field coupled to the YIG film material to be the strongest, and obtain a better response waveform; and by controlling the size of the disk and the distance between the disk and the YIG film material, the overall resonance adjust the response waveform of the controller.

4、本发明提供的一种可调静磁波谐振器,通过第二微带线的第二过渡段、接地覆盖段,实现了微带线的良好接地,同时接地覆盖段整体呈U型,从与输入端相对的一端形成从外围对YIG基片的包裹,利用导通至下基板背面的接地层实现接地,具有减小基板谐振的效果。4. The tunable magnetostatic wave resonator provided by the present invention realizes the good grounding of the microstrip line through the second transition section and the grounding covering section of the second microstrip line. The end opposite to the input end forms a wrapping of the YIG substrate from the periphery, and the grounding layer conducted to the backside of the lower substrate is used to realize the grounding, which has the effect of reducing the resonance of the substrate.

附图说明Description of drawings

图1为本发明实施例的可调静磁波谐振器的立体结构图。FIG. 1 is a three-dimensional structural diagram of a tunable magnetostatic wave resonator according to an embodiment of the present invention.

图2为本发明实施例的可调静磁波谐振器的正视图;2 is a front view of a tunable magnetostatic wave resonator according to an embodiment of the present invention;

图3为本发明实施例的可调静磁波谐振器的下基板及YIG基片的结构示意图;3 is a schematic structural diagram of a lower substrate and a YIG substrate of a tunable magnetostatic wave resonator according to an embodiment of the present invention;

图4为本发明实施例的可调静磁波谐振器的下基板的背部视图;4 is a back view of a lower substrate of a tunable magnetostatic wave resonator according to an embodiment of the present invention;

图5为本发明实施例的可调静磁波谐振器的第一微带线和第二微带线结构图;5 is a structural diagram of a first microstrip line and a second microstrip line of a tunable magnetostatic wave resonator according to an embodiment of the present invention;

图6为本发明实施例的可调静磁波谐振器在外置磁场为2512Oe时的三维电磁仿真结果。FIG. 6 is a three-dimensional electromagnetic simulation result of the tunable magnetostatic wave resonator according to the embodiment of the present invention when the external magnetic field is 2512 Oe.

具体实施方式Detailed ways

为使本发明实施例的目的、技术方案和优点更加清楚,下面结合附图对本发明的实施方式进行详细说明,但本发明所描述的实施例是本发明一部分实施例,而不是全部的实施例。In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but the embodiments described in the present invention are a part of the embodiments of the present invention, not all of the embodiments. .

实施例Example

实施例提供的一种可调静磁波谐振器,如图1~图2所示,包括:A tunable magnetostatic wave resonator provided by the embodiment, as shown in FIG. 1 to FIG. 2 , includes:

谐振器主体1,所述谐振器主体1包括谐振腔、设于谐振腔内的下基板7、设于谐振腔一侧的射频输入端2和设于谐振腔顶部的射频输出端3;Resonator main body 1, the resonator main body 1 includes a resonant cavity, a lower substrate 7 arranged in the resonant cavity, a radio frequency input end 2 arranged on one side of the resonant cavity, and a radio frequency output end 3 arranged on the top of the resonant cavity;

第一微带线4,所述第一微带线4位于下基板7之上、并与伸入谐振腔内的射频输入端2连接;a first microstrip line 4, the first microstrip line 4 is located on the lower substrate 7 and connected to the radio frequency input end 2 extending into the resonant cavity;

第二微带线5,所述第二微带线5位于下基板7之上、并与第一微带线4耦合;a second microstrip line 5, the second microstrip line 5 is located on the lower substrate 7 and coupled with the first microstrip line 4;

圆盘31,所述圆盘31与从谐振腔顶部伸入谐振腔内的射频输出端3连接;a disc 31, the disc 31 is connected with the radio frequency output end 3 extending into the resonant cavity from the top of the resonant cavity;

YIG基片6,所述YIG基片6包括连接第一微带线4的GGG(即钆镓石榴石)基片61和生长于GGG基片61表面的YIG薄膜62;所述YIG基片6位于第一微带线4和第二微带线5之上,且完全覆盖第一微带线4和第二微带线5的耦合区域;所述YIG基片6位于圆盘31正下方。YIG substrate 6, the YIG substrate 6 includes a GGG (ie gadolinium gallium garnet) substrate 61 connected to the first microstrip line 4 and a YIG film 62 grown on the surface of the GGG substrate 61; the YIG substrate 6 It is located on the first microstrip line 4 and the second microstrip line 5 and completely covers the coupling area of the first microstrip line 4 and the second microstrip line 5 ; the YIG substrate 6 is located directly under the disk 31 .

具体的,射频输入端2和射频输出端3采用射频绝缘子,射频输入端2通过焊接与第一微带线4连接,用于输入射频信号,射频输出端3通过导电胶与圆盘31连接,用于输出射频信号。Specifically, the radio frequency input end 2 and the radio frequency output end 3 use radio frequency insulators, the radio frequency input end 2 is connected to the first microstrip line 4 by welding, and is used for inputting radio frequency signals, and the radio frequency output end 3 is connected to the disc 31 by conductive glue, Used to output RF signals.

具体的,谐振腔由金属铝制成,包括:第一腔10,下基板7、第一微带线4、第二微带线5和YIG基片6均位于第一腔10中;第二腔11,所述第二腔11是第一腔10顶部向上凸出形成的,YIG基片6的顶面位于第二腔内,YIG基片6的两侧面与第二腔11的侧面之间有间距;第三腔12,所述第三腔12是第二腔11顶部向上凸出形成的,圆盘31位于第三腔12内,射频输出端3下部伸入第三腔12内并连接圆盘31。Specifically, the resonant cavity is made of metal aluminum, and includes: a first cavity 10, the lower substrate 7, the first microstrip line 4, the second microstrip line 5 and the YIG substrate 6 are all located in the first cavity 10; the second Cavity 11, the second cavity 11 is formed by protruding upward from the top of the first cavity 10, the top surface of the YIG substrate 6 is located in the second cavity, between the two sides of the YIG substrate 6 and the side surface of the second cavity 11 There is a distance; the third cavity 12, the third cavity 12 is formed by protruding upward from the top of the second cavity 11, the disc 31 is located in the third cavity 12, and the lower part of the radio frequency output end 3 protrudes into the third cavity 12 and is connected Disc 31.

如图3~图5所示,第一微带线4沿下基板7长度方向设置,第一微带线4包括依次连接的输入段41、第一过渡段42、U型段43,输入段41连接射频输入端2;所述第二微带线5包括依次连接的叉型段51、第二过渡段52、接地覆盖段53,叉型段51呈山字型,具有两个内凹处。所述U型段43的两个分支位于叉型段51的两个内凹中、且U型段43与叉型段51不接触,所述接地覆盖段53上设有接地导通孔54,接地导通孔54贯通下基板7并与下基板7底面设置的接地层71连接;所述GGG基片61位于U型段43和叉型段51上方、并与U型段43和叉型段51接触,所述GGG基片61完全覆盖U型段43和叉型段51、且不接触接地覆盖段53。As shown in FIG. 3 to FIG. 5 , the first microstrip line 4 is arranged along the length direction of the lower substrate 7 , and the first microstrip line 4 includes an input section 41 , a first transition section 42 , a U-shaped section 43 connected in sequence, and the input section 41 is connected to the radio frequency input end 2; the second microstrip line 5 includes a fork section 51, a second transition section 52, and a ground covering section 53 that are connected in sequence, and the fork section 51 is mountain-shaped and has two inner recesses . The two branches of the U-shaped section 43 are located in the two inner recesses of the fork-shaped section 51, and the U-shaped section 43 is not in contact with the fork-shaped section 51. The grounding cover section 53 is provided with a grounding conduction hole 54. The ground via 54 penetrates through the lower substrate 7 and is connected to the ground layer 71 provided on the bottom surface of the lower substrate 7; the GGG substrate 61 is located above the U-shaped section 43 and the forked section 51, and is connected to the U-shaped section 43 and the forked section. 51, the GGG substrate 61 completely covers the U-shaped segment 43 and the fork-shaped segment 51, and does not contact the ground covering segment 53.

如图5所示,接地覆盖段53呈U型,包括与第二过渡段52垂直连接的第一接地段、以及分别垂直连接于第一接地段两端的两个第二接地段,第二接地段位于下基板7长度方向两侧,所述第二接地段的长度等于下基板7的长度,第一接地段的长度等于下基板7的宽度。输入段41宽度大于第一过渡段42宽度,第一过渡段42宽度与第二过渡段52宽度相等。第一微带线4和第二微带线5关于下基板7长度方向的中线轴对称。As shown in FIG. 5 , the ground covering section 53 is U-shaped, and includes a first ground section vertically connected to the second transition section 52 and two second ground sections vertically connected to both ends of the first ground section. The sections are located on both sides in the length direction of the lower substrate 7 , the length of the second ground section is equal to the length of the lower substrate 7 , and the length of the first ground section is equal to the width of the lower substrate 7 . The width of the input section 41 is greater than the width of the first transition section 42 , and the width of the first transition section 42 is equal to the width of the second transition section 52 . The first microstrip line 4 and the second microstrip line 5 are axis-symmetrical about the center line of the lower substrate 7 in the longitudinal direction.

如图2所示,所述谐振器主体1处于外置磁场8中,外置磁场8的两个磁极分别位于谐振器主体1的两侧,方向平行于下基板7宽度方向。As shown in FIG. 2 , the resonator body 1 is in an external magnetic field 8 , and the two magnetic poles of the external magnetic field 8 are respectively located on both sides of the resonator body 1 , and the directions are parallel to the width direction of the lower substrate 7 .

实施例提供的一种可调静磁波谐振器,在外置磁场8的作用下,当输入射频信号频率与YIG薄膜62的铁磁共振频率相等时,射频输入端2的第一微带线4将水平入射的射频信号耦合到与下基板7相连的YIG基片6上,再耦合到圆盘31,经射频输出端3向上垂直输出。随着外置磁场大小的变化,YIG薄膜62铁磁共振频率发生变化,从而实现可调谐特性。In the tunable magnetostatic wave resonator provided by the embodiment, under the action of the external magnetic field 8, when the frequency of the input radio frequency signal is equal to the ferromagnetic resonance frequency of the YIG film 62, the first microstrip line 4 of the radio frequency input end 2 will The horizontally incident radio frequency signal is coupled to the YIG substrate 6 connected to the lower substrate 7 , and then coupled to the disk 31 , and is output vertically upward through the radio frequency output terminal 3 . With the change of the external magnetic field, the ferromagnetic resonance frequency of the YIG thin film 62 changes, thus realizing the tunable characteristics.

图6为本发明实施例的可调静磁波谐振器在外置磁场为2512Oe时的三维电磁仿真结果;外置磁场8的磁场大小范围设置为816Oe到3555Oe。由图6可知,当外置磁场8的大小为2512Oe时,本发明实施例的谐振器的3dB带宽为6.7MHz,Q值达到4300左右。6 is a three-dimensional electromagnetic simulation result of the tunable magnetostatic wave resonator according to the embodiment of the present invention when the external magnetic field is 2512 Oe; the magnetic field size range of the external magnetic field 8 is set to be 816 Oe to 3555 Oe. It can be seen from FIG. 6 that when the size of the external magnetic field 8 is 2512 Oe, the 3dB bandwidth of the resonator in the embodiment of the present invention is 6.7MHz, and the Q value reaches about 4300.

因此,本发明采用钇铁石榴石薄膜替代钇铁石榴石小球作为谐振子,采用微带线结构替代复杂的耦合电路结构,得到的可调静磁波谐振器可实现从4GHz-12GHz频段内可调谐,3dB带宽极窄,Q值范围为2000~4500,不仅有效提高了谐振器的组装调测效率,还简化了加工工艺,降低了加工成本,更有利于实现对钇铁石榴石调谐谐振器的批量化生产。Therefore, in the present invention, the yttrium iron garnet film is used to replace the yttrium iron garnet ball as the resonator, and the microstrip line structure is used to replace the complex coupling circuit structure, and the obtained tunable magnetostatic wave resonator can be tunable in the frequency band of 4GHz-12GHz, The 3dB bandwidth is extremely narrow, and the Q value ranges from 2000 to 4500, which not only effectively improves the assembly and commissioning efficiency of the resonator, but also simplifies the processing technology, reduces the processing cost, and is more conducive to the realization of batches of yttrium iron garnet tuning resonators production.

以上仅为本发明的优选实施例,并不表示是唯一的或是限制本发明。本领域技术人员应理解,在不脱离本发明的范围情况下,对本发明进行的各种改变或同等替换,均属于本发明保护的范围。The above are only preferred embodiments of the present invention, and are not intended to be the only or limit the present invention. Those skilled in the art should understand that, without departing from the scope of the present invention, various changes or equivalent substitutions made to the present invention all belong to the protection scope of the present invention.

Claims (9)

1.一种可调静磁波谐振器,其特征在于,包括:1. an adjustable magnetostatic wave resonator, is characterized in that, comprises: 谐振器主体(1),所述谐振器主体(1)包括谐振腔、设于谐振腔内的下基板(7)、设于谐振腔一侧的射频输入端(2)和设于谐振腔顶部的射频输出端(3);A resonator main body (1), the resonator main body (1) comprising a resonant cavity, a lower substrate (7) arranged in the resonant cavity, a radio frequency input end (2) arranged on one side of the resonant cavity, and a radio frequency input end (2) arranged on the top of the resonant cavity The RF output terminal (3); 第一微带线(4),所述第一微带线(4)位于下基板(7)之上、并与伸入谐振腔内的射频输入端(2)连接;a first microstrip line (4), the first microstrip line (4) is located on the lower substrate (7) and is connected to the radio frequency input end (2) extending into the resonant cavity; 第二微带线(5),所述第二微带线(5)位于下基板(7)之上、并与第一微带线(4)耦合;a second microstrip line (5), the second microstrip line (5) being located on the lower substrate (7) and coupled to the first microstrip line (4); 圆盘(31),所述圆盘(31)与从谐振腔顶部伸入谐振腔内的射频输出端(3)连接;a disc (31), the disc (31) is connected to a radio frequency output end (3) extending into the resonant cavity from the top of the resonant cavity; YIG基片(6),所述YIG基片(6)包括GGG基片(61)和生长于GGG基片(61)表面的YIG薄膜(62);所述YIG基片(6)位于第一微带线(4)和第二微带线(5)之上,且完全覆盖第一微带线(4)和第二微带线(5)的耦合区域;所述YIG基片(6)位于圆盘(31)正下方。YIG substrate (6), the YIG substrate (6) includes a GGG substrate (61) and a YIG film (62) grown on the surface of the GGG substrate (61); the YIG substrate (6) is located in the first above the microstrip line (4) and the second microstrip line (5), and completely covering the coupling area of the first microstrip line (4) and the second microstrip line (5); the YIG substrate (6) Located just below the disc (31). 2.根据权利要求1所述的可调静磁波谐振器,其特征在于,所述第一微带线(4)沿下基板(7)长度方向设置,第一微带线(4)包括依次连接的输入段(41)、第一过渡段(42)、U型段(43),输入段(41)连接射频输入端(2);所述第二微带线(5)包括依次连接的叉型段(51)、第二过渡段(52)、接地覆盖段(53);所述U型段(43)的两个分支位于叉型段(51)的两个内凹中、且U型段(43)与叉型段(51)不接触,所述接地覆盖段(53)上设有接地导通孔(54),接地导通孔(54)贯通下基板(7)并与下基板(7)底面设置的接地层(71)连接;所述GGG基片(61)位于U型段(43)和叉型段(51)上方、并与U型段(43)和叉型段(51)接触,所述GGG基片(61)完全覆盖U型段(43)和叉型段(51)、且不接触接地覆盖段(53)。2 . The tunable magnetostatic wave resonator according to claim 1 , wherein the first microstrip line ( 4 ) is arranged along the length direction of the lower substrate ( 7 ), and the first microstrip line ( 4 ) comprises sequential The connected input section (41), the first transition section (42), and the U-shaped section (43), and the input section (41) is connected to the radio frequency input end (2); the second microstrip line (5) includes sequentially connected The fork-shaped section (51), the second transition section (52), and the grounding cover section (53); the two branches of the U-shaped section (43) are located in the two inner recesses of the fork-shaped section (51), and the U-shaped section (51) has two branches. The segment (43) is not in contact with the fork segment (51), the grounding cover segment (53) is provided with a grounding via (54), and the grounding via (54) penetrates through the lower substrate (7) and is connected to the lower substrate (7). The ground layer (71) provided on the bottom surface of the substrate (7) is connected; the GGG substrate (61) is located above the U-shaped segment (43) and the fork-shaped segment (51), and is connected to the U-shaped segment (43) and the fork-shaped segment (51) contact, the GGG substrate (61) completely covers the U-shaped segment (43) and the fork-shaped segment (51), and does not contact the ground covering segment (53). 3.根据权利要求2所述的可调静磁波谐振器,其特征在于,所述接地覆盖段(53)呈U型,包括与第二过渡段(52)垂直连接的第一接地段、以及分别垂直连接于第一接地段两端的两个第二接地段,第二接地段位于下基板(7)长度方向两侧,所述第二接地段的长度等于下基板(7)的长度,第一接地段的长度等于下基板(7)的宽度。3. The tunable magnetostatic wave resonator according to claim 2, characterized in that the ground covering section (53) is U-shaped, comprising a first ground section vertically connected to the second transition section (52), and The two second grounding sections are respectively vertically connected to both ends of the first grounding section, the second grounding sections are located on both sides in the length direction of the lower substrate (7), the length of the second grounding section is equal to the length of the lower substrate (7), The length of a ground segment is equal to the width of the lower substrate (7). 4.根据权利要求2所述的可调静磁波谐振器,其特征在于,所述输入段(41)宽度大于第一过渡段(42)宽度,第一过渡段(42)宽度与第二过渡段(52)宽度相等。4 . The tunable magnetostatic wave resonator according to claim 2 , wherein the width of the input section ( 41 ) is greater than the width of the first transition section ( 42 ), and the width of the first transition section ( 42 ) is the same as the width of the second transition section ( 42 ). The segments (52) are of equal width. 5.根据权利要求1所述的可调静磁波谐振器,其特征在于,所述第一微带线(4)和第二微带线(5)关于下基板(7)长度方向的中线轴对称。5. The tunable magnetostatic wave resonator according to claim 1, characterized in that, the first microstrip line (4) and the second microstrip line (5) are about the centerline axis of the length direction of the lower substrate (7) symmetry. 6.根据权利要求1所述的可调静磁波谐振器,其特征在于,所述谐振器主体(1)处于外置磁场(8)中,外置磁场(8)的方向平行于下基板(7)宽度方向。6 . The tunable magnetostatic wave resonator according to claim 1 , wherein the resonator body ( 1 ) is in an external magnetic field ( 8 ), and the direction of the external magnetic field ( 8 ) is parallel to the lower substrate ( 6 . 7) Width direction. 7.根据权利要求1所述的可调静磁波谐振器,其特征在于,所述射频输入端(2)和射频输出端(3)采用射频绝缘子,射频输入端(2)通过焊接与第一微带线(4)连接,射频输出端(3)通过导电胶与圆盘(31)连接。7 . The tunable magnetostatic wave resonator according to claim 1 , wherein the radio frequency input end ( 2 ) and the radio frequency output end ( 3 ) use radio frequency insulators, and the radio frequency input end ( 2 ) is welded to the first The microstrip line (4) is connected, and the radio frequency output end (3) is connected with the disc (31) through conductive glue. 8.根据权利要求1所述的可调静磁波谐振器,其特征在于,所述谐振腔包括:8. The tunable magnetostatic wave resonator according to claim 1, wherein the resonant cavity comprises: 第一腔(10),下基板(7)、第一微带线(4)、第二微带线(5)和YIG基片(6)均位于第一腔(10)中;The first cavity (10), the lower substrate (7), the first microstrip line (4), the second microstrip line (5) and the YIG substrate (6) are all located in the first cavity (10); 第二腔(11),所述第二腔(11)是第一腔(10)顶部向上凸出形成的,YIG基片(6)的顶面位于第二腔内,YIG基片(6)的两侧面与第二腔(11)的侧面之间有间距;The second cavity (11), the second cavity (11) is formed by protruding upward from the top of the first cavity (10), the top surface of the YIG substrate (6) is located in the second cavity, the YIG substrate (6) There is a distance between the two sides of the second cavity (11) and the sides of the second cavity (11); 第三腔(12),所述第三腔(12)是第二腔(11)顶部向上凸出形成的,圆盘(31)位于第三腔(12)内。The third cavity (12), the third cavity (12) is formed by protruding upward from the top of the second cavity (11), and the disc (31) is located in the third cavity (12). 9.根据权利要求1所述的可调静磁波谐振器,其特征在于,所述YIG薄膜(62)通过液相外延技术生长于GGG基片(61)上。9 . The tunable magnetostatic wave resonator according to claim 1 , wherein the YIG thin film ( 62 ) is grown on the GGG substrate ( 61 ) by liquid phase epitaxy. 10 .
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