CN114061648A - Device and method for detecting blockage of fine hole of electrostatic chuck - Google Patents
Device and method for detecting blockage of fine hole of electrostatic chuck Download PDFInfo
- Publication number
- CN114061648A CN114061648A CN202111147829.0A CN202111147829A CN114061648A CN 114061648 A CN114061648 A CN 114061648A CN 202111147829 A CN202111147829 A CN 202111147829A CN 114061648 A CN114061648 A CN 114061648A
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- China
- Prior art keywords
- electrostatic chuck
- heat supply
- hole
- pipe
- communicated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 9
- 238000001514 detection method Methods 0.000 claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 55
- 239000011148 porous material Substances 0.000 claims description 27
- 238000001816 cooling Methods 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000002826 coolant Substances 0.000 claims description 8
- 239000003595 mist Substances 0.000 claims description 2
- 238000010998 test method Methods 0.000 claims 1
- 238000012360 testing method Methods 0.000 claims 1
- 230000003068 static effect Effects 0.000 description 8
- 239000012535 impurity Substances 0.000 description 3
- 230000036619 pore blockages Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 210000005239 tubule Anatomy 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a device and a method for detecting blockage of a fine hole of an electrostatic chuck, belonging to the technical field of electrostatic chucks and comprising a rack, wherein an electrostatic chuck placing assembly is arranged on the rack and comprises a supporting disk, a first through hole is formed in the supporting disk, a heat supply assembly is arranged on the lower side wall of the supporting disk and is communicated with the first through hole, a detection assembly is arranged above the supporting disk and is connected with the supporting disk through a supporting frame, and the supporting frame is hinged with the rack.
Description
Technical Field
The invention relates to the technical field of electrostatic chucks, in particular to a device and a method for detecting pore blockage of an electrostatic chuck.
Background
Be equipped with the ascending through-hole of a plurality of axis directions on the electrostatic chuck, because the aperture of through-hole is little, and the length of through-hole is longer relatively, consequently, be difficult to direct observe out this through-hole with eyes whether blockking up, if this through-hole blocks up then can influence the use of electrostatic chuck, consequently need an electrostatic chuck pore to block up detection device and detection method, judge whether the through-hole on the electrostatic chuck is blockked up to in order to carry out work on next step.
Disclosure of Invention
The invention aims to provide a device and a method for detecting the blockage of a fine hole of an electrostatic chuck, which can detect whether the electrostatic chuck is blocked.
In order to solve the technical problems, the technical scheme of the invention is as follows:
on one hand, the invention provides a device for detecting blockage of a fine hole of an electrostatic chuck, which comprises a rack, wherein an electrostatic chuck placing assembly is arranged on the rack and comprises a supporting disk, a first through hole is formed in the supporting disk, a heat supply assembly is arranged on the lower side wall of the supporting disk and is communicated with the first through hole, a detection assembly is arranged above the supporting disk and is connected with the supporting disk through a supporting frame, and the supporting frame is hinged with the rack.
Preferably, the heat supply assembly comprises a heat supply pipe communicated with the first through hole, one end of the heat supply pipe is communicated with the first through hole, and the other end of the heat supply pipe is communicated with the heat supply piece.
Preferably, the heat supply part comprises a water container, the water container is communicated with the heat supply pipe, and a heating element is arranged in the water container.
Preferably, a water adding pipe is arranged on the heat supply pipe, and a valve is arranged on the water adding pipe.
Preferably, the detection assembly comprises a hollow cooling pipe, a second through hole is formed in the support frame, and the cooling pipe is communicated with the second through hole.
Preferably, a coolant containing pipe is arranged on the outer side wall of the cooling pipe, and the cooling pipe is sleeved in the coolant containing pipe.
In another aspect, the present invention provides a method of detection, the method comprising the steps of:
the electrostatic chuck is flatly placed on the supporting plate, the position of the fine hole of the electrostatic chuck is found, and the lower end of the fine hole of the electrostatic chuck is opposite to the first through hole;
the heat supply assembly starts to work, and provides hot water vapor below the fine holes of the electrostatic chuck, and the water vapor enters the fine holes of the electrostatic chuck through the first through holes;
whether the thin tube of the electrostatic chuck is blocked is judged by observing whether white mist exists in the cooling tube.
Adopt above-mentioned technical scheme, owing to be equipped with the static chuck and place the subassembly for can place the static chuck, so that carry out the detection that the pore blockked up to the static chuck, owing to be equipped with the heat supply subassembly, make and to provide water vapour for the detection and be used for blockking up the detection, owing to be equipped with the determine module, make and to judge whether the static chuck pore blocks up.
Drawings
FIG. 1 is a schematic diagram of a partial cross-sectional structure of an electrostatic chuck pore clogging detection apparatus according to the present invention;
fig. 2 is an enlarged schematic view of a in fig. 1 according to the present invention.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1 and fig. 2, fig. 1 is a schematic partial sectional structure view of an electrostatic chuck pore clogging detection apparatus of the present invention, fig. 2 is an enlarged structural view of a in fig. 1, and is a schematic structural view of an electrostatic chuck pore clogging detection apparatus, the present invention provides an electrostatic chuck pore clogging detection apparatus, including a frame 1, an electrostatic chuck placing assembly is provided on the frame 1, the electrostatic chuck placing assembly is connected with the frame 1 through a connecting rod 3, the electrostatic chuck placing assembly includes a support plate 2, a first through hole 10 is provided on the support plate 2, a heat supply assembly is provided on a lower side wall of the support plate 2, the heat supply assembly is used for supplying water vapor for detection, the heat supply assembly is communicated with the first through hole 10, a detection assembly is provided above the support plate 2, the detection assembly is used for detecting whether the electrostatic chuck is clogged, the detection assembly is connected with the support plate 2 through a support frame 4, the support frame 4 is hinged with the rack 1, the electrostatic chuck can be put in place after the electrostatic chuck is opened, and then the support frame 4 is closed, so that the detection assembly is positioned above the fine hole of the electrostatic chuck to be detected;
the hot water vapor is provided by the heat supply assembly, the water vapor enters the pores of the electrostatic chuck through the first through hole 10 and then passes through the pores of the electrostatic chuck, if the pores of the electrostatic chuck are blocked, the hot water vapor cannot enter the pores of the electrostatic chuck, the water vapor cannot be condensed into water drops in the cooling pipe 12 of the detection assembly, white air cannot be observed by naked eyes, if the pores of the electrostatic chuck are not blocked, the hot water vapor enters the pores of the electrostatic chuck through the first through hole 10 and enters the cooling pipe 12 after passing through the pores of the electrostatic chuck, and the water vapor is condensed into water drops due to the lower temperature of the cooling pipe 12, so that the white air can be seen in the cooling pipe 12, namely the condensed water drops can be seen, whether the electrostatic chuck is blocked or not can be detected through the detection;
the heat supply assembly comprises a heat supply pipe 5 communicated with the first through hole 10, one end of the heat supply pipe 5 is communicated with the first through hole 10, the other end of the heat supply pipe 5 is communicated with the heat supply piece, water vapor is supplied through the heat supply piece, and the water vapor enters the fine hole of the electrostatic chuck through the heat supply pipe 5;
the heating part comprises a water container 8, the water container 8 is communicated with the heating pipe 5, a heating element 9 is arranged in the water container 8, the heating element 9 can be a heating rod, a wire of the heating rod can be punched on the side wall of the water container 8 to extend out, a rubber ring can be arranged at the punched position to seal, water in the water container 8 is heated through the heating element 9, and water in the water container 8 is gasified and enters the pores of the electrostatic chuck;
the heating pipe 5 is provided with a water adding pipe 6, the water adding pipe 6 is provided with a valve 7, the water adding pipe is arranged obliquely upwards, cold water can be conveniently added into the water container 8, the valve 7 can be closed when the heating pipe is not used, impurities are prevented from entering the water container 8, impurities enter the water container 8 and then are heated, the impurities can enter the pores of the electrostatic chuck along with water vapor and further block the pores of the electrostatic chuck, when water is added into the water adding pipe 6, the valve 7 is opened, and when the water container 8 is heated, the valve 7 is also opened, so that redundant water vapor can be normally discharged;
the detection assembly comprises a hollow cooling pipe 12, a second through hole 11 is formed in the support frame 4, and the cooling pipe 12 is communicated with the second through hole 11, so that water vapor generated by the heat supply assembly can normally enter the fine hole of the electrostatic chuck;
a coolant placing pipe 13 is arranged on the outer side wall of the cooling pipe 12, the cooling pipe 12 is sleeved in the coolant placing pipe 13, the coolant placing pipe 13 can be shorter than the cooling pipe 12, and when the cooling device is used, ice blocks or cold water can be placed in the coolant placing pipe 13 to cool the cooling pipe 12, so that liquefied water vapor can be seen, and whether the thin pipe of the electrostatic chuck is blocked or not can be judged;
the invention also provides a method for detecting the pore blockage of the electrostatic chuck, which comprises the following steps:
the electrostatic chuck is flatly placed on the supporting plate 2, the position of the fine hole of the electrostatic chuck is found, and the lower end of the fine hole of the electrostatic chuck is opposite to the first through hole 10, so that water vapor generated by the heat supply assembly can normally enter the fine hole of the electrostatic chuck, and whether the fine hole of the electrostatic chuck is blocked or not can be detected conveniently;
the heat supply assembly starts to work, and provides hot water vapor below the fine holes of the electrostatic chuck, and the water vapor enters the fine holes of the electrostatic chuck through the first through holes 10;
whether the tubule of electrostatic chuck is blockked up is judged through whether having white fog in observing the cooling tube 12, if there is white fog in observing the cooling tube 12, then the electrostatic chuck pore is not blockked up, if can not see white fog in the cooling tube 12, then the electrostatic chuck pore has blockked up, needs to arrange the mediation.
Owing to be equipped with the static chuck and place the subassembly for can place the static chuck, so that carry out the detection that the pore blockked up to the static chuck, owing to be equipped with the heat supply subassembly, make and to provide water vapour for the detection and be used for blockking up the detection, owing to be equipped with the determine module, make and judge whether the static chuck pore blocks up.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, and the scope of protection is still within the scope of the invention.
Claims (7)
1. The utility model provides an electrostatic chuck pore blocks up detection device which characterized in that: the improved electrostatic chuck device comprises a frame, it places the subassembly to be equipped with electrostatic chuck in the frame, electrostatic chuck places the subassembly and includes the supporting disk, be equipped with first through-hole on the supporting disk, be equipped with the heat supply subassembly on the lower lateral wall of supporting disk, the heat supply subassembly with first through-hole intercommunication, the top of supporting disk is equipped with the determine module, the determine module with the supporting disk passes through the support frame to be connected, the support frame with the frame is articulated.
2. The electrostatic chuck pore clogging detection apparatus according to claim 1, wherein: the heat supply assembly comprises a heat supply pipe communicated with the first through hole, one end of the heat supply pipe is communicated with the first through hole, and the other end of the heat supply pipe is communicated with the heat supply piece.
3. The electrostatic chuck pore clogging detection apparatus according to claim 2, wherein: the heat supply part comprises a water container, the water container is communicated with the heat supply pipe, and a heating part is arranged in the water container.
4. The electrostatic chuck pore clogging detection apparatus according to claim 3, wherein: and a water adding pipe is arranged on the heat supply pipe, and a valve is arranged on the water adding pipe.
5. The electrostatic chuck pore clogging detection apparatus according to claim 1, wherein: the detection assembly comprises a hollow cooling pipe, a second through hole is formed in the support frame, and the cooling pipe is communicated with the second through hole.
6. The electrostatic chuck pore clogging detection apparatus according to claim 5, wherein: and a coolant placing pipe is arranged on the outer side wall of the cooling pipe, and the cooling pipe is sleeved in the coolant placing pipe.
7. A method of testing a test device according to any of claims 1-6, wherein the method comprises the steps of:
the electrostatic chuck is flatly placed on the supporting plate, the position of the fine hole of the electrostatic chuck is found, and the lower end of the fine hole of the electrostatic chuck is opposite to the first through hole;
the heat supply assembly starts to work, and provides hot water vapor below the fine holes of the electrostatic chuck, and the water vapor enters the fine holes of the electrostatic chuck through the first through holes;
whether the thin tube of the electrostatic chuck is blocked is judged by observing whether white mist exists in the cooling tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111147829.0A CN114061648A (en) | 2021-09-29 | 2021-09-29 | Device and method for detecting blockage of fine hole of electrostatic chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111147829.0A CN114061648A (en) | 2021-09-29 | 2021-09-29 | Device and method for detecting blockage of fine hole of electrostatic chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114061648A true CN114061648A (en) | 2022-02-18 |
Family
ID=80233848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111147829.0A Pending CN114061648A (en) | 2021-09-29 | 2021-09-29 | Device and method for detecting blockage of fine hole of electrostatic chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114061648A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108321095A (en) * | 2017-01-16 | 2018-07-24 | 株式会社迪思科 | The choke detecting method and processing unit (plant) of chuck table |
| CN111308574A (en) * | 2020-02-12 | 2020-06-19 | 首钢集团有限公司 | Device and method for detecting clogging of refractory during continuous casting of steel |
| CN211945357U (en) * | 2020-01-20 | 2020-11-17 | 朱汉奇 | Ash conveying pipeline blockage detection system |
| CN212645984U (en) * | 2020-08-27 | 2021-03-02 | 重庆创精温锻成型有限公司 | Airtightness detection device |
-
2021
- 2021-09-29 CN CN202111147829.0A patent/CN114061648A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108321095A (en) * | 2017-01-16 | 2018-07-24 | 株式会社迪思科 | The choke detecting method and processing unit (plant) of chuck table |
| CN211945357U (en) * | 2020-01-20 | 2020-11-17 | 朱汉奇 | Ash conveying pipeline blockage detection system |
| CN111308574A (en) * | 2020-02-12 | 2020-06-19 | 首钢集团有限公司 | Device and method for detecting clogging of refractory during continuous casting of steel |
| CN212645984U (en) * | 2020-08-27 | 2021-03-02 | 重庆创精温锻成型有限公司 | Airtightness detection device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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Application publication date: 20220218 |
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| RJ01 | Rejection of invention patent application after publication |