CN114045494A - Low-acidity etching production method for PCB and two-liquid type acidic etching liquid system - Google Patents
Low-acidity etching production method for PCB and two-liquid type acidic etching liquid system Download PDFInfo
- Publication number
- CN114045494A CN114045494A CN202111241051.XA CN202111241051A CN114045494A CN 114045494 A CN114045494 A CN 114045494A CN 202111241051 A CN202111241051 A CN 202111241051A CN 114045494 A CN114045494 A CN 114045494A
- Authority
- CN
- China
- Prior art keywords
- etching
- acid
- cyanate
- etching solution
- pcb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 225
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 63
- 239000007788 liquid Substances 0.000 title claims abstract description 31
- 230000002378 acidificating effect Effects 0.000 title claims abstract description 26
- 239000002253 acid Substances 0.000 claims abstract description 79
- 239000000654 additive Substances 0.000 claims abstract description 34
- 230000000996 additive effect Effects 0.000 claims abstract description 32
- SWRGUMCEJHQWEE-UHFFFAOYSA-N ethanedihydrazide Chemical compound NNC(=O)C(=O)NN SWRGUMCEJHQWEE-UHFFFAOYSA-N 0.000 claims abstract description 28
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 claims abstract description 21
- 239000007800 oxidant agent Substances 0.000 claims abstract description 21
- 230000001590 oxidative effect Effects 0.000 claims abstract description 20
- 239000012752 auxiliary agent Substances 0.000 claims abstract description 16
- QYTOONVFPBUIJG-UHFFFAOYSA-N azane;cyanic acid Chemical compound [NH4+].[O-]C#N QYTOONVFPBUIJG-UHFFFAOYSA-N 0.000 claims abstract description 10
- ZVCDLGYNFYZZOK-UHFFFAOYSA-M sodium cyanate Chemical compound [Na]OC#N ZVCDLGYNFYZZOK-UHFFFAOYSA-M 0.000 claims abstract description 10
- GKKCIDNWFBPDBW-UHFFFAOYSA-M potassium cyanate Chemical compound [K]OC#N GKKCIDNWFBPDBW-UHFFFAOYSA-M 0.000 claims abstract description 8
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 30
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 26
- 239000011780 sodium chloride Substances 0.000 claims description 15
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 14
- 235000019270 ammonium chloride Nutrition 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 7
- BZSXEZOLBIJVQK-UHFFFAOYSA-N 2-methylsulfonylbenzoic acid Chemical compound CS(=O)(=O)C1=CC=CC=C1C(O)=O BZSXEZOLBIJVQK-UHFFFAOYSA-N 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 239000005708 Sodium hypochlorite Substances 0.000 claims description 4
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 claims description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 14
- KBIWNQVZKHSHTI-UHFFFAOYSA-N 4-n,4-n-dimethylbenzene-1,4-diamine;oxalic acid Chemical compound OC(=O)C(O)=O.CN(C)C1=CC=C(N)C=C1 KBIWNQVZKHSHTI-UHFFFAOYSA-N 0.000 abstract 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Natural products OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 229910001431 copper ion Inorganic materials 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- TVWHTOUAJSGEKT-UHFFFAOYSA-N chlorine trioxide Chemical compound [O]Cl(=O)=O TVWHTOUAJSGEKT-UHFFFAOYSA-N 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 235000011121 sodium hydroxide Nutrition 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 208000028571 Occupational disease Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- -1 chlorine ions Chemical class 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 210000002345 respiratory system Anatomy 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Description
Concentration of sodium cyanate (mg/L) | 100 | 200 | 300 | 400 | 500 |
Etching Rate (. mu.m/min) | 28~32 | 30~34 | 33~37 | 38~42 | 40~43 |
Etching factor | 3.1 | 3.2 | 3.8 | 4.2 | 4.3 |
Concentration of sodium cyanate (mg/L) | 600 | 700 | 800 | 900 | 1000 |
Etching Rate (. mu.m/min) | 44~48 | 42~46 | 41~45 | 38~41 | 33~38 |
Etching factor | 4.4 | 4.7 | 4.6 | 4.5 | 4.0 |
Concentration of ammonium cyanate (mg/L) | 100 | 200 | 300 | 400 | 500 |
Etching Rate (. mu.m/min) | 30~33 | 32~36 | 35~39 | 36~40 | 38~43 |
Etching factor | 3.2 | 3.3 | 3.3 | 3.7 | 4.1 |
Concentration of ammonium cyanate (mg/L) | 600 | 700 | 800 | 900 | 1000 |
Etching Rate (. mu.m/min) | 42~46 | 44~49 | 43~46 | 43~47 | 42~45 |
Etching factor | 4.3 | 4.3 | 4.5 | 4.7 | 4.6 |
Concentration of oxalic acid dihydrazide (mg/L) | 0 | 10 | 20 | 30 | 40 | 50 |
Etching Rate (. mu.m/min) | 30~46 | 31~45 | 33~45 | 35~46 | 35~44 | 36~47 |
Etching factor | 3.4 | 3.6 | 3.7 | 3.7 | 3.6 | 4.1 |
Concentration of oxalic acid dihydrazide (mg/L) | 60 | 70 | 80 | 90 | 100 | 110 |
Etching Rate (. mu.m/min) | 35~46 | 37~48 | 38~47 | 39~49 | 38~47 | 36~45 |
Etching factor | 4.3 | 4.3 | 4.4 | 4.8 | 4.5 | 3.9 |
Volume ratio of mixture | 1:1 | 1:2 | 1:3 | 1:4 | 1:5 | 1:6 |
Etching Rate (. mu.m/min) | 44~47 | 43~46 | 44~47 | 45~48 | 40~43 | 40~42 |
Etching factor | 4.6 | 4.7 | 4.5 | 4.6 | 3.8 | 3.9 |
Volume ratio of mixture | 7:1 | 6:1 | 5:1 | 4:1 | 3:1 | 2:1 |
Etching Rate (. mu.m/min) | 39~42 | 39~41 | 40~42 | 40~42 | 44~47 | 45~48 |
Etching factor | 4.0 | 3.9 | 4.1 | 4.0 | 4.5 | 4.6 |
Volume ratio of mixture | 1:1 | 1:2 | 1:3 | 1:4 | 1:5 | 1:6 |
Etching Rate (. mu.m/min) | 43~46 | 44~48 | 45~50 | 43~48 | 39~42 | 39~40 |
Etching factor | 4.6 | 4.5 | 4.5 | 4.7 | 4.3 | 4.3 |
Volume ratio of mixture | 7:1 | 6:1 | 5:1 | 4:1 | 3:1 | 2:1 |
Etching Rate (. mu.m/min) | 38~40 | 38~40 | 40~42 | 44~46 | 45~49 | 44~47 |
Etching factor | 4.0 | 4.1 | 4.2 | 4.4 | 4.7 | 4.5 |
Volume ratio of mixture | 1:1 | 1:2 | 1:3 | 1:4 | 1:5 | 1:6 |
Etching Rate (. mu.m/min) | 44~47 | 43~47 | 43~46 | 43~46 | 40~42 | 40~41 |
Etching factor | 4.7 | 4.5 | 4.6 | 4.5 | 4.1 | 4.0 |
Volume ratio of mixture | 7:1 | 6:1 | 5:1 | 4:1 | 3:1 | 2:1 |
Etching Rate (. mu.m/min) | 38~41 | 40~42 | 39~41 | 42~46 | 44~48 | 43~47 |
Etching factor | 4.1 | 4.2 | 4.0 | 4.5 | 4.7 | 4.8 |
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111241051.XA CN114045494B (en) | 2021-10-25 | 2021-10-25 | Low-acidity etching production method for PCB and two-liquid type acidic etching liquid system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111241051.XA CN114045494B (en) | 2021-10-25 | 2021-10-25 | Low-acidity etching production method for PCB and two-liquid type acidic etching liquid system |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114045494A true CN114045494A (en) | 2022-02-15 |
CN114045494B CN114045494B (en) | 2023-02-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202111241051.XA Active CN114045494B (en) | 2021-10-25 | 2021-10-25 | Low-acidity etching production method for PCB and two-liquid type acidic etching liquid system |
Country Status (1)
Country | Link |
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CN (1) | CN114045494B (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1130408A (en) * | 1993-09-08 | 1996-09-04 | 菲布罗技术公司 | Copper etchant solution additives |
US6212769B1 (en) * | 1999-06-29 | 2001-04-10 | International Business Machines Corporation | Process for manufacturing a printed wiring board |
JP2005068524A (en) * | 2003-08-27 | 2005-03-17 | C Uyemura & Co Ltd | Etching solution |
CN101379219A (en) * | 2005-10-25 | 2009-03-04 | 德国艾托科技公司 | Composition and method for improved adhesion of polymeric materials to copper or copper alloy surfaces |
US20180090500A1 (en) * | 2013-12-31 | 2018-03-29 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor arrangement with capacitor and method of fabricating the same |
-
2021
- 2021-10-25 CN CN202111241051.XA patent/CN114045494B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1130408A (en) * | 1993-09-08 | 1996-09-04 | 菲布罗技术公司 | Copper etchant solution additives |
US6212769B1 (en) * | 1999-06-29 | 2001-04-10 | International Business Machines Corporation | Process for manufacturing a printed wiring board |
JP2005068524A (en) * | 2003-08-27 | 2005-03-17 | C Uyemura & Co Ltd | Etching solution |
CN101379219A (en) * | 2005-10-25 | 2009-03-04 | 德国艾托科技公司 | Composition and method for improved adhesion of polymeric materials to copper or copper alloy surfaces |
US20180090500A1 (en) * | 2013-12-31 | 2018-03-29 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor arrangement with capacitor and method of fabricating the same |
Also Published As
Publication number | Publication date |
---|---|
CN114045494B (en) | 2023-02-03 |
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PB01 | Publication | ||
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TA01 | Transfer of patent application right |
Effective date of registration: 20220623 Address after: 518000 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant after: Shenzhen Qianhai Rongda chuangtu Chemical Technology Co.,Ltd. Applicant after: GUANGZHOU MISI HEALTH TECHNOLOGY Co.,Ltd. Address before: 518000 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant before: Shenzhen Qianhai Rongda chuangtu Chemical Technology Co.,Ltd. |
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Effective date of registration: 20221221 Address after: 518000 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant after: Shenzhen Qianhai Rongda chuangtu Chemical Technology Co.,Ltd. Address before: 518000 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant before: Shenzhen Qianhai Rongda chuangtu Chemical Technology Co.,Ltd. Applicant before: GUANGZHOU MISI HEALTH TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20230712 Address after: 518100 B607, Building 1-3, Starcraft Home, Hongxing Community, Songgang Street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Hongrong Hui Technology Co.,Ltd. Address before: 518000 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Patentee before: Shenzhen Qianhai Rongda chuangtu Chemical Technology Co.,Ltd. |
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