CN114034300A - Optical accelerometer and inertial navigation system - Google Patents
Optical accelerometer and inertial navigation system Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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Abstract
An optical accelerometer and an inertial navigation system are provided. The optical accelerometer comprises a broadband light source, a filter, a spectrum detector and a calculation module, wherein the filter is provided with an FP (Fabry-Perot) cavity, the filter is positioned at one side of the broadband light source and used for receiving emitted light of the broadband light source and outputting transmitted light, and when the acceleration acting on the filter is different, the cavity lengths of the corresponding FP cavities are different; the spectrum detector is positioned on one side of the filter, which is far away from the broadband light source, and is used for detecting the central wavelength of the transmitted light; and the calculation module is used for determining and outputting corresponding acceleration according to the central wavelength. The optical accelerometer measures acceleration by using the cavity length of the FP cavity of the filter corresponding to different central wavelengths of transmitted light, ensures higher sensitivity and avoids the problems that a capacitive accelerometer in the prior art has low signal-to-noise ratio, high power consumption and is easy to suffer from electromagnetic interference.
Description
Technical Field
The present application relates to the field of inertial navigation, and in particular, to an optical accelerometer and an inertial navigation system.
Background
The navigation mode mainly comprises satellite positioning navigation, inertial navigation and the like, the satellite positioning navigation is easily interfered by the outside, and the inertial navigation is the only mode which can realize autonomous navigation without depending on outside information, so the method has important application value in some special applications. The core component in the inertial navigation comprises an inertial accelerometer and an inertial gyroscope, wherein the inertial accelerometer is used for measuring the acceleration of the carrier, and the inertial gyroscope is used for measuring the angular velocity of the carrier, so that the spatial position of the carrier is calculated.
In inertial navigation, navigation errors can be accumulated along with the lengthening of navigation time, and the sensing precision of an inertial element in an inertial navigation system can greatly influence the navigation precision, so that the inertial navigation has urgent needs on a high-precision accelerometer and a high-precision gyroscope. At present, a capacitive accelerometer based on a Micro-Electro-Mechanical System (MEMS) process is mainly used in inertial navigation, when acceleration is input, a MEMS mass block generates corresponding displacement due to inertia, so as to change the capacitance of capacitors at two sides of the mass block in the accelerometer, and the capacitance change can be converted into an electrical signal through a suitable differential amplification circuit, so as to obtain the acceleration.
However, the capacitive accelerometer has the problems of low signal-to-noise ratio, large power consumption and susceptibility to electromagnetic interference, and limits the expansion of the application scene.
The above information disclosed in this background section is only for enhancement of understanding of the background of the technology described herein and, therefore, certain information may be included in the background that does not form the prior art that is already known in this country to a person of ordinary skill in the art.
Disclosure of Invention
The main purpose of the present application is to provide an optical accelerometer and an inertial navigation system, so as to solve the problems that a capacitive accelerometer in the prior art has a low signal-to-noise ratio, a large power consumption, and is susceptible to electromagnetic interference.
In order to achieve the above object, according to one aspect of the present application, there is provided an optical accelerometer including a broadband light source, a filter, a spectrum detector, and a calculation module, wherein the filter has an FP (Fabry-Perot) cavity, the filter is located at one side of the broadband light source, the filter is configured to receive emitted light of the broadband light source and output transmitted light, and when acceleration acting on the filter is different, cavity lengths of the corresponding FP cavities are different; the spectrum detector is positioned on one side of the filter, which is far away from the broadband light source, and is used for detecting the central wavelength of the transmitted light; and the calculation module is used for determining and outputting the corresponding acceleration according to the central wavelength.
Optionally, the spectrum detector includes a linear gradient filter and a linear array detector, where the linear gradient filter is located on a side of the filter away from the broadband light source; the linear gradient filter is used for outputting the transmitted light after the transmitted light is split, the linear detector is located on one side of the linear gradient filter, which is far away from the filter, and the linear detector is used for detecting the central wavelength of the transmitted light after the light is split.
Optionally, the linear graded filter includes a first high-reflection film, a spacer layer, a second high-reflection film, and a first substrate that are sequentially stacked in a direction away from the filter, where a thickness of the spacer layer is linearly graded; the material of the first substrate comprises at least one of Si, Ge, ZnSe, SiO2 and Al2O 3.
Optionally, the filter includes a fixed mirror, a movable mirror, and a cantilever structure, where the fixed mirror is located between the broadband light source and the spectrum detector; the movable mirror is positioned between the fixed mirror and the broadband light source, the distance between the movable mirror and the fixed mirror is the cavity length, and under the condition that the acceleration is generated, the movable mirror moves along the direction close to the fixed mirror or the direction far away from the fixed mirror, so that the cavity length is changed; the movable mirror is movably connected with the fixed mirror through the cantilever beam structure.
Optionally, the fixed mirror includes a third high-reflection film, a second substrate, and a first antireflection film that are sequentially stacked along a direction away from the movable mirror, and the movable mirror includes a fourth high-reflection film, a third substrate, and a second antireflection film that are sequentially stacked along a direction away from the fixed mirror.
Optionally, the second substrate and the third substrate are both double-sided polished substrates, and the materials of the second substrate and the third substrate are independently selected from Si, Ge, ZnSe, SiO2And Al2O3At least one of; the third high-reflection film and the fourth high-reflection filmIs independently selected from Al2O3、Si、Ge、ZnS、SiO2、SiO、Si3N4、Ta2O5And MgF2At least two of the first antireflection film and the second antireflection film are made of materials independently selected from Al2O3、Si、Ge、ZnS、SiO2、SiO、Si3N4、Ta2O5And MgF2At least one of (1).
Optionally, the medium in the FP cavity is air, and the filter is an interference filter.
Optionally, the emission light of the broadband light source is perpendicular to the surface of the spectrum detector.
Optionally, the broadband light source comprises at least one of a composite infrared LED light source, a silicon nitride infrared light source, and a xenon-mercury light source.
According to another aspect of the present application there is also provided an inertial navigation system comprising any one of the optical accelerometers.
Use the technical scheme of this application, optical accelerometer including the broadband light source, wave filter, spectrum detection instrument and the calculation module that arrange in proper order, the wave filter has the FP chamber, is in as the action acceleration on the wave filter is different, corresponding the chamber length in FP chamber is different, makes like this the central wavelength of the transmitted light that the wave filter sent changes, the rethread the spectrum detection instrument surveys central wavelength is last by the calculation module according to detecting the acceleration that the central wavelength confirms to correspond has realized the detection to the acceleration like this. The optical accelerometer utilizes the cavity length of the FP cavity of the filter to correspond to the central wavelength of different transmission light to measure the acceleration, ensures higher sensitivity, and avoids the problems that a capacitive type accelerometer in the prior art has low signal-to-noise ratio, large power consumption and is easy to suffer from electromagnetic interference.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application. In the drawings:
FIG. 1 shows a schematic structural diagram of an optical accelerometer according to an embodiment of the application;
fig. 2 to 3 respectively show structural diagrams of a linear graded filter according to an embodiment of the present application;
FIG. 4 shows a schematic structural diagram of a filter according to an embodiment of the application;
figure 5 illustrates a radiation spectrum of emitted light of a broadband light source according to an embodiment of the present application;
FIG. 6 shows a transmission spectrum plot of a filter of an optical accelerometer according to an embodiment of the application;
figures 7 to 9 show schematic diagrams of an optical accelerometer under different acceleration conditions according to embodiments of the application, respectively;
FIG. 10 shows a schematic top view of a cantilever beam structure of an optical accelerometer according to an embodiment of the application;
fig. 11 to 12 respectively show a transmission spectrum curve diagram of a filter according to an embodiment of the present application at different accelerations.
Wherein the figures include the following reference numerals:
10. a broadband light source; 20. a filter; 30. a spectrum detector; 31. a linear graded filter; 32. a line detector; 100. emitting light; 200. transmitting light; 201. a FP cavity; 202. a movable mirror cantilever; 203. a second antireflection film; 204. a third substrate; 205. a fourth high-reflection film; 206. a second bond site; 207. a second substrate; 208. a third high-reflection film; 209. a first antireflection film; 210. a first bond site; 300. a first high-reflection film; 301. a spacer layer; 302. a second high-reflection film; 303. a first substrate; 304. and a fourth antireflection film.
Detailed Description
It should be noted that the following detailed description is exemplary and is intended to provide an alternative description of the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. Also, in the specification and claims, when an element is described as being "connected" to another element, the element may be "directly connected" to the other element or "connected" to the other element through a third element.
As described in the background of the invention, the capacitive accelerometer has the problems of low signal-to-noise ratio, high power consumption and susceptibility to electromagnetic interference, and in order to solve the problems, the present application provides an optical accelerometer and an inertial navigation system.
According to an exemplary embodiment of the present application, as shown in fig. 1, there is provided an optical accelerometer, including a broadband light source 10, a filter 20, a spectrum detector 30 and a calculation module, wherein the filter 20 has an FP cavity 201, the filter 20 is located at one side of the broadband light source 10, the filter 20 is configured to receive an emitted light 100 of the broadband light source 10 and output a transmitted light 200, and when an acceleration acting on the filter 20 is different, a cavity length L of the FP cavity 201 is different; the spectrum detector 30 is located on a side of the filter 20 away from the broadband light source 10, and the spectrum detector 30 is configured to detect a center wavelength of the transmitted light 200; and the calculation module is used for determining and outputting the corresponding acceleration according to the central wavelength.
The optical accelerometer comprises a broadband light source, a filter, a spectrum detector and a calculation module which are sequentially arranged, wherein the filter is provided with FP cavities, when the acceleration acting on the filter is different, the cavity lengths of the corresponding FP cavities are different, so that the central wavelength of transmission light emitted by the filter is changed, the central wavelength is detected by the spectrum detector, and finally the calculation module determines the corresponding acceleration according to the detected central wavelength, so that the acceleration is detected. According to the optical accelerometer, acceleration measurement is performed by using the cavity length of the FP cavity of the filter corresponding to different central wavelengths of transmitted light, so that high sensitivity is ensured, and the problems that a capacitive type accelerometer in the prior art is low in signal-to-noise ratio, high in power consumption and prone to electromagnetic interference are solved.
The broadband light source has a short coherence length and a large spectral width. The broadband light source is usually a super-radiation or super-fluorescence light source, and the broadband pulse laser light source must have an ultra-short pulse width. The radiation range of the broadband light source comprises the working wavelength of the filter.
According to a specific embodiment of the present application, the filter is an FP filter, and the FP filter is processed by using an MEMS process compatible with an optical process.
In the practical application process, the broadband light source can be any feasible broadband light source in the prior art, and a person skilled in the art can flexibly select the broadband light source according to the practical situation. In a specific embodiment, the broadband light source includes at least one of a composite infrared LED light source, a ge-w light source, a silicon nitride infrared light source, and a mercury-xenon lamp light source. In a more specific embodiment, the broadband light source is a composite infrared LED light source.
In order to identify the change of the central wavelength of the transmitted light and calculate the corresponding acceleration value, the central wavelength of the transmitted light needs to be accurately detected in real time. The traditional spectrum detection mode needs to scan on a time domain to determine the wavelength, and cannot meet the requirement of real-time detection. In this case, in order to further ensure that the central wavelength of the transmitted light is accurately obtained in real time, and further ensure that the acceleration is detected timely and accurately, and further ensure that the sensitivity of the optical accelerometer is high, according to another specific embodiment of the present application, as shown in fig. 1, the spectrum detector 30 includes a linear gradient filter 31 and a linear array detector 32, where the linear gradient filter 31 is located on a side of the filter 20 away from the broadband light source 10; the linear gradient filter 31 is configured to split the transmitted light and output the split light, the line detector 32 is located on a side of the linear gradient filter 31 away from the filter 20, and the line detector 32 is configured to detect the center wavelength of the split transmitted light 200. The linear gradient filter plate outputs the transmission light at a specific position of the linear gradient filter plate according to the central wavelength of the transmission light, and the linear detector detects the response position of the transmission light on the linear gradient filter plate after the transmission light is output according to the position, so that the central wavelength is further ensured to be detected timely and accurately, and the problem that the wavelength can be determined only by scanning in a time domain in a traditional spectrum detection mode is solved.
In practical applications, the linear graded filter may be any available linear graded filter in the prior art, and in a specific embodiment, as shown in fig. 2, the linear graded filter includes a first high-reflective film 300, a spacer layer 301, a second high-reflective film 302, and a first substrate 303 stacked in sequence along a direction away from the filter, where the thickness of the spacer layer 301 is linearly graded; the material of the first substrate 303 includes Si, Ge, ZnSe, SiO2And Al2O3At least one of (1). Since the thickness of the spacer layer is linearly varied, different positions of the linear graded filter can transmit light with different wavelengths, as shown in fig. 2. According to the principle, when a beam of monochromatic light uniformly irradiates on the first high-reflection film of the linear gradient filter, one and only one point of the beam of monochromatic light can transmit, and the other positions of the beam of monochromatic light cannot transmit, as shown in fig. 3. Therefore, when a linear detector is arranged on the light-emitting surface of the upper linear gradient filter in the following process, the upper linear gradient filter is arranged on the light-emitting surfaceThe pixels of the line detector in the light-transmitting area respond by detecting light signals, and the pixels except the pixels do not respond due to no light irradiation. This further enables accurate acquisition of the center wavelength in real time.
In practical applications, as shown in fig. 2 and 3, the linear graded filter further includes a fourth antireflection film 304, and the fourth antireflection film is located on the surface of the first substrate 303 away from the second high reflection film 302.
According to another specific embodiment of the present application, as shown in fig. 4, the filter includes a fixed mirror, a movable mirror, and a cantilever structure, wherein the fixed mirror is located between the broadband light source and the spectrum detector; a movable mirror disposed between the fixed mirror and the broadband light source, the movable mirror being spaced apart from the fixed mirror by the cavity length, the movable mirror moving in a direction approaching or separating from the fixed mirror when the acceleration is generated, so that the cavity length is changed; the movable mirror is movably connected with the fixed mirror through the cantilever beam structure.
According to another specific embodiment of the present application, as shown in fig. 4, the fixed mirror includes a third high reflection film 208, a second substrate 207, and a first antireflection film 209 sequentially stacked in a direction away from the movable mirror, and the movable mirror includes a fourth high reflection film 205, a third substrate 204, and a second antireflection film 203 sequentially stacked in a direction away from the fixed mirror. The third high-reflectivity film 208, the fourth high-reflectivity film 205, and the gap between the third high-reflectivity film 208 and the fourth high-reflectivity film 205 form the FP cavity 201.
In practical application, as shown in fig. 4, the cantilever structure includes two first bonding points 210, two second bonding points 206, and two movable mirror cantilevers 202, the movable mirror is connected to the first bonding points 210 through the movable mirror cantilevers 202 on two sides, and the first bonding points 210 are connected to the fixed mirror through the second bonding points 206. Of course, the cantilever beam structure is not limited to the structure shown in fig. 4, and those skilled in the art can flexibly configure the cantilever beam structure according to actual situations.
In another specific embodiment of the present application, the second substrate and the third substrate are both double-side polished substrates, and the materials of the second substrate and the third substrate are independently selected from Si, Ge, ZnSe, and SiO2And Al2O3At least one of; the third high-reflection film and the fourth high-reflection film are made of materials independently selected from Al2O3、Si、Ge、ZnS、SiO2、SiO、Si3N4、Ta2O5And MgF2At least two of the first antireflection film and the second antireflection film are made of Al independently2O3、Si、Ge、ZnS、SiO2、SiO、Si3N4、Ta2O5And MgF2At least one of (1). The double-sided polishing ensures that the substrate has good light transmission performance. The first antireflection film and the second antireflection film ensure high light transmittance, and the third high-reflection film and the fourth high-reflection film ensure high light reflectivity. Of course, the materials of the second substrate, the third high-reflection film, the fourth high-reflection film, the first antireflection film, and the second antireflection film are not limited to the above materials, and any suitable materials in the prior art may be selected.
In a specific embodiment of the present application, it is assumed that the radiation spectrum of the above-described light band light source is as shown in fig. 5. In an ideal filter, the filter characteristics show that when light from a broad-spectrum light source is applied to the filter, the spectrum of the transmitted light is:
wherein,
wherein R issThe reflectivities of the third and fourth high-reflection films of the filter, dsAnd nsLength and refractive index, θ, of the FP cavitysIs the incident angle of the emitted light to the surface of the filter. Thus, a spectral curve of the transmitted light as shown in fig. 6 was obtained.
Ideally the center wavelength of the transmitted light is related to the FP cavity of the filter as follows:
wherein m is the interference order.
To further ensure simpler calculation of the acceleration, in a specific embodiment of the present application, the medium in the FP cavity is air, so that the refractive index of light therein is approximately 1; the emission light of the broadband light source is perpendicular to the surface of the spectrum detector, namely thetasIs 0 deg.. Meanwhile, in order to further ensure that the dynamic range of the optical accelerometer is large, the filter is a 1-order interference filter. Of course, the filter may also be a high-order interference filter.
From the above formula, it can be seen that, with the change of the FP cavity, the transmission wavelength of the filter changes, and by using the above principle, the filter is used as an acceleration sensitive device, thereby further ensuring that the obtained optical accelerometer does not have the problems of low signal-to-noise ratio, large power consumption and susceptibility to electromagnetic interference. Specifically, one of the high-reflection films on two sides of the FP cavity of the filter is made into a sensitive structure in a cantilever beam mode, and when acceleration occurs, the movable mirror of the filter is close to or far away from the fixed mirror due to inertia effect, so that the central wavelength of transmitted light of the filter can be changed.
In yet another specific embodiment of the present application, the initial bitWhen in use, the cavity length of the FP cavity of the filter is assumed to be dmCorresponding to a central wavelength of the transmission spectrum of λm(ii) a Further assume that the linear graded filter corresponds to the center wavelength λ of the transmission spectrummIs exactly at the center of the line detector, then the pixel P at the center of the line detector in the initial statemThere is a signal output and no signal is output from any other pixel, as shown in fig. 7.
When the acceleration direction is upward, the movable mirror of the filter will move downward relative to the fixed mirror due to inertia, and the cavity length becomes small as dlCorresponding to a central wavelength of the transmission spectrum of λl(ii) a The linear graded filter corresponds to the central wavelength λ of the transmission spectrumlIs located at the left side of the center of the line detector, and corresponds to the pixel P which is located at the left side of the center of the line detectorlThere is a signal output and no signal is output from any other pixel, as shown in fig. 8.
When the acceleration direction is downward, the movable mirror will move upward relative to the fixed mirror due to inertia, and the cavity length becomes small as dnCorresponding to a central wavelength of the transmission spectrum of λn(ii) a The linear gradient filter corresponds to the central wavelength lambda of the transmission spectrumlIs located at the right side of the center of the line array detector, and corresponds to the pixels P with the right deviation of the center position of the line array detectornThere is a signal output and no signal is output from any other pixel, as shown in fig. 9.
According to a more specific embodiment of the present application, the broadband light source is a composite infrared LED light source, and the light emitting band of the composite infrared LED light source can cover 1300nm to 2200 nm. The second substrate of the fixed mirror is selected as a double polished silicon wafer, and the material of the third high reflection film can be selected from a high-refractive-index material Si and a low-refractive-index material SiO2The specific film structure is Si (substrate, 500 μm): SiO22(280.35nm)/Si(116.31nm)/SiO2(280.35nm)/Si(116.31nm)/SiO2(282.95nm)/Si (117.38 nm); the second antireflection film is made of ZnS, Si or SiO2The specific film system structure is as follows: si (substrate, 500 μm): ZnS (327.50nm)/Si (196.15nm)/ZnS (93.63nm)/SiO2(209.14nm)。
The third substrate is a double polished silicon wafer with the thickness of 400 μm, and the material of the fourth high reflection film and the material of the second reflection reducing film are selected in the same way as the fixed mirror. The movable mirror has a length of 3000 μm, a width of 1500 μm, and a thickness of 400 μm. The cantilever structure has a total length of about 4500 μm, a width of 10 μm, and a thickness of 15 μm. The fixed mirror and the movable mirror are bonded by Au-Au bonding.
The preparation process comprises the following steps: firstly, respectively manufacturing a third high-reflection film and a fourth high-reflection film on the second substrate and the third substrate in an electron beam evaporation mode; then, preparing Au bonding points on the second substrate and the third substrate in an evaporation mode; then, Au-Au thermocompression bonding is carried out on the second deposition with the high-reflection film and the third substrate; then, etching the cantilever beam area to the thickness of 15 μm by wet etching; then, a cantilever beam structure is manufactured in a dry etching mode; finally, a first antireflection film and a second antireflection film are respectively manufactured on the back surfaces of the second substrate and the third substrate by adopting an electron beam evaporation mode, so that the filter shown in fig. 4 and 10 is obtained. Of course, the cantilever structure may be prepared and then bonded.
Of course, the process of manufacturing the filter is not limited to the above process, and those skilled in the art can manufacture the filter by any feasible method in the prior art. In a specific embodiment, the filter is processed by: the second substrate material is selected from the group consisting of, but not limited to, Si, Ge, ZnSe, SiO2And Al2O3The substrate needs to be polished on two sides, so that good light transmission performance is guaranteed; preparing a third high-reflectivity film and a first anti-reflection film, bonding points and the like on the second substrate, wherein the materials of the third high-reflectivity film and the first anti-reflection film include but are not limited to Al2O3、Si、Ge、ZnS、SiO2、SiO、Si3N4、Ta2O5And MgF2And then manufacturing a sacrificial layer, manufacturing a fifth high-reflection film on the sacrificial layer after the sacrificial layer is manufactured, finally patterning the fifth high-reflection film to obtain a movable mirror, andthe sacrificial layer is removed to form the FP cavity.
The transmission spectrum curves of the above filter at different accelerations are shown in fig. 11 and 12. For the initial state of the filter described above, the full width at half maximum of the transmission spectrum is about 6nm, corresponding to an acceleration resolution of 7.5 μ g in this state.
The first substrate of the linear gradient filter is selected to be a double polished silicon wafer, the first high-reflection film, the second high-reflection film and the fourth antireflection film are designed to be the same as those of the filter, and the material of the spacing layer is selected to be SiO2The thickness was linearly graded from 350nm to 873 nm. The specific manufacturing process is as follows: firstly, manufacturing the fourth antireflection film on one side of a double-polished silicon wafer in an electron beam evaporation mode; then, manufacturing the second high-reflection film on the other side of the double-polished silicon wafer in an electron beam evaporation mode; after the second high-reflection film is manufactured, a layer of SiO is manufactured in a chemical vapor deposition mode2(ii) a After that, SiO is realized by means of gray scale photoetching2Manufacturing linear gradual change of the layer thickness; and finally, manufacturing the first high-reflection film. After the preparation of the linear gradient filter is completed, the linear array detector and the linear gradient filter are aligned and packaged.
In practical applications, the line detector is an InGaAs detector.
According to another exemplary embodiment of the present application, there is also provided an inertial navigation system including any one of the above-described optical accelerometers.
The inertial navigation system comprises any one of the optical accelerometers, the optical accelerometers comprise a broadband light source, a filter, a spectrum detector and a calculation module which are sequentially arranged, the filter is provided with FP cavities, when the acceleration acting on the filter is different, the cavity lengths of the corresponding FP cavities are different, so that the central wavelength of transmission light emitted by the filter is changed, the central wavelength is detected by the spectrum detector, and finally the calculation module determines the corresponding acceleration according to the detected central wavelength, so that the detection of the acceleration is realized. According to the optical accelerometer, acceleration measurement is performed by using the cavity length of the FP cavity of the filter corresponding to different central wavelengths of transmitted light, so that the high sensitivity of the inertial navigation system is ensured, and the problems that a capacitive type accelerometer in the prior art is low in signal-to-noise ratio, high in power consumption and prone to electromagnetic interference are solved.
From the above description, it can be seen that the above-described embodiments of the present application achieve the following technical effects:
1) the optical accelerometer comprises a broadband light source, a filter, a spectrum detector and a calculation module which are sequentially arranged, wherein the filter is provided with an FP (Fabry-Perot) cavity, when the acceleration acting on the filter is different, the cavity length of the corresponding FP cavity is different, so that the central wavelength of transmission light emitted by the filter is changed, the central wavelength is detected by the spectrum detector, and finally the calculation module determines the corresponding acceleration according to the detected central wavelength, so that the detection of the acceleration is realized. According to the optical accelerometer, acceleration measurement is performed by using the cavity length of the FP cavity of the filter corresponding to different central wavelengths of transmitted light, so that high sensitivity is ensured, and the problems that a capacitive type accelerometer in the prior art is low in signal-to-noise ratio, high in power consumption and prone to electromagnetic interference are solved.
2) The inertial navigation system comprises any one of the optical accelerometers, wherein each optical accelerometer comprises a broadband light source, a filter, a spectrum detector and a calculation module which are sequentially arranged, each filter is provided with an FP (Fabry-Perot) cavity, when the acceleration acting on each filter is different, the cavity length of the corresponding FP cavity is different, so that the central wavelength of transmission light emitted by each filter is changed, the central wavelength is detected by the spectrum detector, and finally the corresponding acceleration is determined by the calculation module according to the detected central wavelength, so that the acceleration is detected. According to the optical accelerometer, acceleration measurement is performed by using the cavity length of the FP cavity of the filter corresponding to different central wavelengths of transmitted light, so that the high sensitivity of the inertial navigation system is ensured, and the problems that a capacitive type accelerometer in the prior art is low in signal-to-noise ratio, high in power consumption and prone to electromagnetic interference are solved.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. An optical accelerometer, comprising:
a broadband light source;
the filter is arranged on one side of the broadband light source and used for receiving the emitted light of the broadband light source and outputting the transmitted light, and when the acceleration acting on the filter is different, the cavity lengths of the corresponding FP cavities are different;
the spectrum detector is positioned on one side of the filter, which is far away from the broadband light source, and is used for detecting the central wavelength of the transmitted light;
and the calculation module is used for determining and outputting the corresponding acceleration according to the central wavelength.
2. The optical accelerometer according to claim 1, wherein the spectrum detector comprises:
the linear gradient filter is positioned on one side of the filter, which is far away from the broadband light source, and is used for outputting the transmitted light at a specific position of the linear gradient filter according to the central wavelength of the transmitted light;
and the linear detector is positioned on one side of the linear gradient filter, which is far away from the filter, and is used for detecting the central wavelength of the transmitted light after light splitting.
3. An optical accelerometer according to claim 2, wherein the accelerometer is a linear accelerometerThe linear gradient filter comprises a first high-reflection film, a spacing layer, a second high-reflection film and a first substrate which are sequentially stacked along the direction far away from the filter, wherein the thickness of the spacing layer is linearly and gradually changed, and the material of the first substrate comprises Si, Ge, ZnSe and SiO2And Al2O3At least one of (1).
4. The optical accelerometer of claim 1, wherein the filter comprises:
the fixed mirror is positioned between the broadband light source and the spectrum detector;
the movable mirror is positioned between the fixed mirror and the broadband light source, the distance between the movable mirror and the fixed mirror is the cavity length, and under the condition that the acceleration is generated, the movable mirror moves along the direction close to the fixed mirror or the direction far away from the fixed mirror, so that the cavity length is changed;
the cantilever beam structure, the movable mirror passes through the cantilever beam structure movably with fixed mirror is connected.
5. The optical accelerometer according to claim 4, wherein the fixed mirror includes a third high-reflection film, a second substrate, and a first antireflection film sequentially stacked in a direction away from the movable mirror, and the movable mirror includes a fourth high-reflection film, a third substrate, and a second antireflection film sequentially stacked in a direction away from the fixed mirror.
6. The optical accelerometer of claim 5, wherein the second substrate and the third substrate are both double-sided polished substrates, the materials of the second substrate and the third substrate being independently selected from Si, Ge, ZnSe, SiO2And Al2O3At least one of; the materials of the third high-reflection film and the fourth high-reflection film are independently selected from Al2O3、Si、Ge、ZnS、SiO2、SiO、Si3N4、Ta2O5And MgF2At least two of the first antireflection film and the second antireflection film are made of materials independently selected from Al2O3、Si、Ge、ZnS、SiO2、SiO、Si3N4、Ta2O5And MgF2At least one of (1).
7. An optical accelerometer according to any one of claims 1 to 6, wherein the medium in the FP cavity is air and the filter is an interference filter.
8. The optical accelerometer according to any one of claims 1 to 6, wherein the emitted light of the broadband light source is perpendicular to the surface of the spectroscopic probe.
9. The optical accelerometer of any one of claims 1 to 6, wherein the broadband light source comprises at least one of a composite infrared LED light source, a silicon nitride infrared light source, and a xenon-mercury light source.
10. An inertial navigation system comprising an optical accelerometer according to any one of claims 1 to 9.
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