CN114019350A - Parallel testing device - Google Patents
Parallel testing device Download PDFInfo
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- CN114019350A CN114019350A CN202111226475.9A CN202111226475A CN114019350A CN 114019350 A CN114019350 A CN 114019350A CN 202111226475 A CN202111226475 A CN 202111226475A CN 114019350 A CN114019350 A CN 114019350A
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- 238000012360 testing method Methods 0.000 title claims abstract description 40
- 239000000523 sample Substances 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims description 3
- 230000005484 gravity Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
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- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
本发明公开了一种并行测试装置，包括晶圆承载盘、显微镜系统、第一滑杆、第二滑杆、四根悬臂、两个底座、多个探针卡，多个固定杆；本发明能够实现并行测试装置在显微镜系统频繁移动过程中整套装置的平衡稳定，以消除整个过程对晶圆承载台的干扰。避免了并行测试装置因重心不稳导致的振动或底座的变形，从而避免了已扎针的探针卡滑出测试焊盘的情况发生。
The invention discloses a parallel testing device, comprising a wafer carrying tray, a microscope system, a first sliding rod, a second sliding rod, four cantilevers, two bases, a plurality of probe cards, and a plurality of fixing rods; the invention It can realize the balance and stability of the whole set of the parallel test device during the frequent movement of the microscope system, so as to eliminate the interference of the whole process to the wafer carrier. The vibration of the parallel test device or the deformation of the base caused by the unstable center of gravity is avoided, so as to avoid the situation where the probe card that has been pinned slips out of the test pad.
Description
Technical Field
The invention belongs to the semiconductor manufacturing test technology, and particularly relates to a parallel test device.
Background
The parallel test apparatus has a plurality of probe cards, can simultaneously test a plurality of samples, and is widely applied to the field of reliability test with long test time, and the schematic diagram of the parallel test apparatus is shown in fig. 1. When the parallel test device is used for carrying out analysis test experiments, the operation probe needs to frequently move the microscope to the position above the corresponding probe.
Microscope system self has heavier weight, when the microscope leaves the middle balanced position back-and-forth movement in wafer plummer top, just can cause whole system front and back unbalanced weight, when the microscope backward moves, whole microscope system's focus is inclined backward for the wafer plummer is unbalanced, the probe card of having pricked the needle just probably slips off the test pad, the skew of focus can bring bigger vibrations when moving microscope system simultaneously, further aggravate the unbalanced of wafer plummer and arouse more serious slide needle, finally lead to testing unusually, bring higher rate of remeasuring.
Disclosure of Invention
In order to solve the foregoing technical problem, a more stable and reliable parallel test apparatus is provided.
The invention provides a parallel test device, comprising:
the device comprises a wafer bearing disc, a microscope system, a first sliding rod, a second sliding rod, four cantilevers, two bases, a plurality of probe cards and a plurality of fixing rods;
the wafer bearing plate is used for placing a wafer to be tested; the microscope system comprises a microscope, a microscope supporting rod and a moving device; the microscope is arranged on the microscope supporting rod and can horizontally move along the microscope supporting rod; the microscope support bar is mounted on the first slide bar and the second slide bar, and the microscope support bar can horizontally move along the first slide bar and the second slide bar;
the moving device is fixed at one end of the microscope supporting rod, drives the microscope supporting rod to move and controls the staying position of the microscope supporting rod; the first sliding rod and the second sliding rod are respectively supported and fixed by two cantilevers, and the cantilevers are respectively fixed on the left base and the right base; a plurality of probe cards are fixed on each fixing rod, the fixing rods are fixed on the left base and the right base, and the fixing rods are parallel to the microscope supporting rods;
the parallel test apparatus further includes:
at least one weight having a mass that is the same as a mass of the microscope system;
the positions of the balance blocks on the first sliding rod or the second sliding rod are matched with the positions of the microscope system, so that the two cantilevers on the same side are stressed uniformly.
Preferably, the device also comprises a third sliding rod, two guide wheels and a rope;
the third sliding rod is arranged below the first sliding rod and fixed between the two cantilevers, and the third sliding rod is parallel to the first sliding rod. The balance block is arranged on the third sliding rod and can horizontally move along the third sliding rod; the two cantilevers are respectively provided with one guide wheel, the rope is arranged on the two guide wheels, and the rope is tensioned by the guide wheels and can circularly move along the guide wheels; the upper portion of rope with mobile device or microscope bracing piece is fixed, the lower part of rope with the balancing piece is fixed, when the microscope bracing piece is located in the middle of the first slide bar, the balancing piece is located under the microscope bracing piece.
Preferably, the number of the balance weights is two, and the balance weights comprise a first balance weight and a second balance weight; the parallel testing device also comprises a third sliding rod, a fourth sliding rod, four guide wheels and two ropes;
a third slide bar is arranged below the first slide bar, and a fourth slide bar is arranged below the second slide bar; the first balance weight is arranged on the third sliding rod and can horizontally move along the third sliding rod; the second balancing block is arranged on the fourth sliding rod and can horizontally move along the fourth sliding rod; the total mass of the first weight and the second weight is the same as the mass of the microscope system;
each cantilever is also provided with one guide wheel, two ropes are respectively arranged on the two guide wheels at the first slide bar side and the second slide bar side, and the ropes are tensioned by the guide wheels and can circularly move along the guide wheels; the upper portion of the rope is fixed with the moving device or the microscope supporting rod, the lower portion of the rope is fixed with the first balancing block or the second balancing block, and when the microscope supporting rod is located in the middle of the first sliding rod, the first balancing block and the second balancing block are located right below the microscope supporting rod.
Preferably, the first weight and the second weight are of the same mass.
The invention can realize the balance and stability of the whole parallel testing device in the frequent moving process of the microscope system so as to eliminate the interference of the whole process on the wafer bearing table. The vibration or the deformation of the base caused by unstable gravity of the parallel test device is avoided, so that the condition that the probe card with the pricked needle slides out of the test bonding pad is avoided.
Drawings
FIG. 1 is a schematic top view of a parallel testing apparatus according to an embodiment;
FIG. 2 is a schematic side view of a portion of a parallel testing apparatus according to an embodiment.
Detailed Description
As shown in fig. 1, the parallel test apparatus of the present invention includes: the wafer bearing plate 1 is used for placing a wafer to be tested. The microscope system 2 includes a microscope 21, a microscope support rod 22, and a moving device 23.
The microscope 21 is mounted on a microscope support rod 22 to be horizontally movable along the microscope support rod 22.
The microscope support bar 22 is mounted on the first slide bar 3 and the second slide bar 4, and the microscope support bar 22 is horizontally movable along the first slide bar 3 and the second slide bar 4.
The moving device 23 is fixed at one end of the microscope support rod 22, drives the movement of the microscope support rod 22, and controls the stop position of the microscope support rod 22.
The first sliding rod 3 and the second sliding rod 4 are respectively supported and fixed by two cantilevers 4, and the total number of the cantilevers 4 is four, and the cantilevers 4 are respectively fixed on a left base 6 and a right base 6.
The microscope fixing device further comprises a plurality of probe cards 7 and a plurality of fixing rods 8, wherein the probe cards 7 are fixed on each fixing rod 8, the fixing rods 8 are fixed on the left base 6 and the right base 6, and the fixing rods 8 are parallel to the microscope supporting rods 22.
The parallel testing device further comprises at least one balance weight 9, the mass of the balance weight 9 being the same as the mass of the microscope system 2.
The position of the balance weight 9 on the first slide bar 3 or the second slide bar 4 is matched with the position of the microscope system 2, so that the stress of the two cantilevers 4 on the same side is uniform.
There are various implementations of the weight 9, and an exemplary implementation is shown in fig. 2. As shown in fig. 2, a third slide bar 10 is arranged below the first slide bar 3, the third slide bar 10 is fixed between the two cantilevers 4, and the third slide bar 10 is parallel to the first slide bar 3. The distance between the first slide bar 3 and the third slide bar 10 is exemplarily 12 cm.
The balance weight 9 is mounted on the third slide bar 10 and can move horizontally along the third slide bar 10. The mass of the counterweight 9 is the same as the mass of the microscope system 2.
A guide wheel 11 is also arranged on each of the two booms 4, a cable 12 is mounted on the two guide wheels 11, and the cable 12 is tensioned by the guide wheels 11 and can circulate along the guide wheels 11. The upper part of the rope 12 is fixed with the moving device 23 or the microscope supporting rod 22, the lower part of the rope 12 is fixed with the balance weight 9, and when the microscope supporting rod 22 is positioned in the middle of the first slide bar 3, the balance weight 9 is positioned right below the microscope supporting rod 22.
Therefore, when the moving device 23 moves the microscope supporting rod 22, the balance weight 9 correspondingly moves in the opposite direction, and the moving distances are equal, so that the corresponding cantilever 4 is stressed uniformly and is in a balanced state, and the vibration or the deformation of the base 6 caused by unstable gravity of the parallel test device is avoided, thereby avoiding the occurrence of the condition that the probe card 7 with the pricked needle slides out of the test pad.
The rope 12 can be a metal rope, a belt or a toothed belt, and the toothed belt has better driving performance, can avoid sliding with the guide wheel 11, and ensures the position arrangement between the balance weight 9 and the microscope supporting rod 22.
In another embodiment, for example, the third slide bar 10 can be mounted on the other side, i.e. the third slide bar 10 is fixed under one side of the second slide bar 4, in the same way as described above with reference to fig. 2.
Another preferred realization is to provide two weights 9, including a first weight 9 and a second weight 9. A third slide bar 10 is arranged below the first slide bar 3 and a fourth slide bar is arranged below the second slide bar 4. The first weight 9 is mounted on the third slide bar 10 to be horizontally movable along the third slide bar 10. The second weight 9 is mounted on the fourth slide bar and can move horizontally along the fourth slide bar. The total mass of the first weight 9 and the second weight 9 is the same as the mass of the microscope system 2, and the mass of the first weight 9 and the second weight 9 is also the same. The fixing of the guide wheels 11 and the ropes 12 is performed in the same manner as in the aforementioned fig. 2, except that the number of the guide wheels 11 and the ropes 12 is doubled.
Each cantilever 4 is provided with a guide wheel 11, two ropes 12 are respectively arranged on the two guide wheels 11 at the first slide bar 3 side and the second slide bar 4 side, and the ropes 12 are tensioned by the guide wheels 11 and can circularly move along the guide wheels 11; the upper part of the rope 12 is fixed with the moving device 23 or the microscope supporting rod 22, the lower part of the rope 12 is fixed with the first weight 9 or the second weight 9, and when the microscope supporting rod 22 is positioned in the middle of the first slide bar 3, the first weight 9 and the second weight 9 are both positioned right below the microscope supporting rod 22.
In addition, the linkage mode of the balance weight 9 and the microscope supporting rod 22 is not limited to the transmission mode of the guide wheel 11 and the rope 12, and other existing transmission modes can be adopted, such as various transmission modes of gears and racks, toothed belts and gears, and the like.
Claims (9)
1. A parallel test apparatus, comprising: the device comprises a wafer bearing disc, a microscope system, a first sliding rod, a second sliding rod, four cantilevers, two bases, a plurality of probe cards and a plurality of fixing rods;
the wafer bearing plate is used for placing a wafer to be tested;
the microscope system comprises a microscope, a microscope supporting rod and a moving device;
the microscope is arranged on the microscope supporting rod and can horizontally move along the microscope supporting rod;
the microscope support bar is mounted on the first slide bar and the second slide bar, and the microscope support bar can horizontally move along the first slide bar and the second slide bar;
the moving device is fixed at one end of the microscope supporting rod, drives the microscope supporting rod to move and controls the staying position of the microscope supporting rod;
the first sliding rod and the second sliding rod are respectively supported and fixed by two cantilevers, and the cantilevers are respectively fixed on the left base and the right base;
a plurality of probe cards are fixed on each fixing rod, the fixing rods are fixed on the left base and the right base, and the fixing rods are parallel to the microscope supporting rods;
at least one weight having a mass that is the same as a mass of the microscope system;
the positions of the balance blocks on the first sliding rod or the second sliding rod are matched with the positions of the microscope system, so that the two cantilevers on the same side are stressed uniformly.
2. A parallel test apparatus as claimed in claim 1, characterized in that: the device also comprises a third sliding rod, two guide wheels and a rope;
the third sliding rod is arranged below the first sliding rod and fixed between the two cantilevers, and the third sliding rod is parallel to the first sliding rod.
The balance block is arranged on the third sliding rod and can horizontally move along the third sliding rod;
the two cantilevers are respectively provided with one guide wheel, the rope is arranged on the two guide wheels, and the rope is tensioned by the guide wheels and can circularly move along the guide wheels; the upper portion of rope with mobile device or microscope bracing piece is fixed, the lower part of rope with the balancing piece is fixed, when the microscope bracing piece is located in the middle of the first slide bar, the balancing piece is located under the microscope bracing piece.
3. A parallel test apparatus as claimed in claim 2, characterized in that: the distance between the first slide bar and the third slide bar is 12 centimeters.
4. A parallel test apparatus as claimed in claim 2, characterized in that: the rope is a metal rope.
5. A parallel test apparatus as claimed in claim 2, characterized in that: the rope is a belt or a toothed belt.
6. A parallel test apparatus as claimed in claim 1, characterized in that:
the number of the balance weights is two, and the two balance weights comprise a first balance weight and a second balance weight;
the parallel testing device also comprises a third sliding rod, a fourth sliding rod, four guide wheels and two ropes;
a third slide bar is arranged below the first slide bar, and a fourth slide bar is arranged below the second slide bar;
the first balance weight is arranged on the third sliding rod and can horizontally move along the third sliding rod;
the second balancing block is arranged on the fourth sliding rod and can horizontally move along the fourth sliding rod;
the total mass of the first weight and the second weight is the same as the mass of the microscope system;
each cantilever is also provided with one guide wheel, two ropes are respectively arranged on the two guide wheels at the first slide bar side and the second slide bar side, and the ropes are tensioned by the guide wheels and can circularly move along the guide wheels; the upper portion of the rope is fixed with the moving device or the microscope supporting rod, the lower portion of the rope is fixed with the first balancing block or the second balancing block, and when the microscope supporting rod is located in the middle of the first sliding rod, the first balancing block and the second balancing block are located right below the microscope supporting rod.
7. A parallel test apparatus as claimed in claim 6, wherein:
the first weight and the second weight have the same mass.
8. A parallel test apparatus as claimed in claim 6, wherein:
the rope is a metal rope.
9. A parallel test apparatus as claimed in claim 6, wherein:
the rope is a belt or a toothed belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111226475.9A CN114019350A (en) | 2021-10-21 | 2021-10-21 | Parallel testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111226475.9A CN114019350A (en) | 2021-10-21 | 2021-10-21 | Parallel testing device |
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| Publication Number | Publication Date |
|---|---|
| CN114019350A true CN114019350A (en) | 2022-02-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111226475.9A Pending CN114019350A (en) | 2021-10-21 | 2021-10-21 | Parallel testing device |
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| CN (1) | CN114019350A (en) |
Citations (12)
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|---|---|---|---|---|
| EP0053062A1 (en) * | 1980-11-24 | 1982-06-02 | Forest Line | Apparatus for balancing a headstock movable on an arm supported by a single column |
| US5410259A (en) * | 1992-06-01 | 1995-04-25 | Tokyo Electron Yamanashi Limited | Probing device setting a probe card parallel |
| TW449680B (en) * | 1998-09-18 | 2001-08-11 | Gen Scanning Inc | High-speed precision positioning stage |
| JP2005300177A (en) * | 2004-04-06 | 2005-10-27 | Canon Inc | Scanning probe microscope and lithographic apparatus |
| TW201104368A (en) * | 2009-05-20 | 2011-02-01 | Nikon Corp | Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method |
| CN203109805U (en) * | 2013-01-28 | 2013-08-07 | 东莞市宝则发机械设备有限公司 | Weight balancing device capable of adjusting balance automatically |
| CN103342297A (en) * | 2013-07-08 | 2013-10-09 | 徐州重型机械有限公司 | Sliding type counterweight mounting rack and crane |
| CN103629913A (en) * | 2012-08-16 | 2014-03-12 | 上海华虹宏力半导体制造有限公司 | Vertical gravity center adjusting devices of revolution type rotary drier |
| CN104076267A (en) * | 2014-06-30 | 2014-10-01 | 上海华力微电子有限公司 | Parallel test system and testing method thereof |
| CN110501633A (en) * | 2019-08-29 | 2019-11-26 | 上海华力集成电路制造有限公司 | Package level apparatus for testing chip and method |
| CN111312639A (en) * | 2020-02-27 | 2020-06-19 | 至微半导体(上海)有限公司 | Mechanical arm device and method for reducing shaking and vibration of mechanical arm device |
| CN113092992A (en) * | 2021-04-28 | 2021-07-09 | 苏州伊欧陆系统集成有限公司 | Multi-channel testing device applied to probe station |
-
2021
- 2021-10-21 CN CN202111226475.9A patent/CN114019350A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0053062A1 (en) * | 1980-11-24 | 1982-06-02 | Forest Line | Apparatus for balancing a headstock movable on an arm supported by a single column |
| US5410259A (en) * | 1992-06-01 | 1995-04-25 | Tokyo Electron Yamanashi Limited | Probing device setting a probe card parallel |
| TW449680B (en) * | 1998-09-18 | 2001-08-11 | Gen Scanning Inc | High-speed precision positioning stage |
| JP2005300177A (en) * | 2004-04-06 | 2005-10-27 | Canon Inc | Scanning probe microscope and lithographic apparatus |
| TW201104368A (en) * | 2009-05-20 | 2011-02-01 | Nikon Corp | Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method |
| CN103629913A (en) * | 2012-08-16 | 2014-03-12 | 上海华虹宏力半导体制造有限公司 | Vertical gravity center adjusting devices of revolution type rotary drier |
| CN203109805U (en) * | 2013-01-28 | 2013-08-07 | 东莞市宝则发机械设备有限公司 | Weight balancing device capable of adjusting balance automatically |
| CN103342297A (en) * | 2013-07-08 | 2013-10-09 | 徐州重型机械有限公司 | Sliding type counterweight mounting rack and crane |
| CN104076267A (en) * | 2014-06-30 | 2014-10-01 | 上海华力微电子有限公司 | Parallel test system and testing method thereof |
| CN110501633A (en) * | 2019-08-29 | 2019-11-26 | 上海华力集成电路制造有限公司 | Package level apparatus for testing chip and method |
| CN111312639A (en) * | 2020-02-27 | 2020-06-19 | 至微半导体(上海)有限公司 | Mechanical arm device and method for reducing shaking and vibration of mechanical arm device |
| CN113092992A (en) * | 2021-04-28 | 2021-07-09 | 苏州伊欧陆系统集成有限公司 | Multi-channel testing device applied to probe station |
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