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CN113957408B - A large vacuum coating machine equipped with a workpiece hanging plate transfer cabin synchronous transport manipulator - Google Patents

A large vacuum coating machine equipped with a workpiece hanging plate transfer cabin synchronous transport manipulator Download PDF

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Publication number
CN113957408B
CN113957408B CN202111031091.1A CN202111031091A CN113957408B CN 113957408 B CN113957408 B CN 113957408B CN 202111031091 A CN202111031091 A CN 202111031091A CN 113957408 B CN113957408 B CN 113957408B
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CN
China
Prior art keywords
plate
transition
cabin
bearing
sleeve
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CN202111031091.1A
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Chinese (zh)
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CN113957408A (en
Inventor
李志荣
陈思
李运俊
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Guangdong Huicheng Vacuum Technology Co ltd
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Guangdong Huicheng Vacuum Technology Co ltd
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Priority to CN202111031091.1A priority Critical patent/CN113957408B/en
Publication of CN113957408A publication Critical patent/CN113957408A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manipulator (AREA)

Abstract

一种设有工件挂板转舱同步运送机械手的大型真空镀膜机,机内设有相邻的工艺舱和过渡舱,过渡舱和工艺舱设有插板阀分隔;工艺舱内设有:工艺转架,其为一个竖立的多边形柱体壳,吊挂在带驱动机构的工艺转架垂直回转轴上,柱体壳侧面每个面上设有可挂钩工件挂板的挂钩,工件挂板为竖立长方形板,四角开有挂钩孔;过渡舱内设有:工件挂板过渡转架,其为在一竖直且带驱动机构的过渡中心转轴的上部及下部、对应地设有若干对沿径向放射性伸出的上下挂杆,上下挂杆的一侧面设有挂钩;工件挂板转舱同步运送机械手,用于将工件挂板在过渡舱的过渡转架和工艺舱的工艺转架之间来回移动传送。本发明结构简化、造价降低、使用方便、故障率低。

A large vacuum coating machine provided with a workpiece hanging plate transfer chamber synchronous transport manipulator, wherein adjacent process chambers and transition chambers are provided in the machine, and the transition chambers and process chambers are separated by a plug valve; the process chamber is provided with: a process turret, which is an upright polygonal cylindrical shell, suspended on the vertical rotating shaft of the process turret with a driving mechanism, and each side of the cylindrical shell is provided with a hook that can be hooked with a workpiece hanging plate, and the workpiece hanging plate is an upright rectangular plate with hook holes at four corners; the transition chamber is provided with: a workpiece hanging plate transition turret, which is a vertical transition center rotating shaft with a driving mechanism, and correspondingly provided with a plurality of pairs of upper and lower hanging rods extending radially, and one side of the upper and lower hanging rods is provided with a hook; a workpiece hanging plate transfer chamber synchronous transport manipulator, which is used to move the workpiece hanging plate back and forth between the transition turret of the transition chamber and the process turret of the process chamber. The present invention has a simplified structure, reduced cost, convenient use, and low failure rate.

Description

Large vacuum coating machine with workpiece hanging plate rotating cabin synchronous conveying manipulator
Technical Field
The invention relates to a vacuum coating machine, in particular to a large vacuum coating machine provided with a workpiece hanging plate rotating cabin synchronous conveying manipulator.
Background
The technical development trend of vacuum coating equipment is to improve the productivity and efficiency and the quality and stability of the coated product. To improve productivity and efficiency, equipment design is larger and larger, loading capacity is larger and larger, single workpiece hanging tools are larger and heavier, and large workpiece hanging plates are adopted for single-sided plated products. The most basic requirement for improving the quality and stability of the film is to control the stable and unchanged film coating atmosphere in the cabin, namely to ensure that the residual gas in each cabin is reduced to the minimum and the consistency is kept unchanged, besides introducing new film coating technology and new technology. Therefore, the most effective means is to carry out coating and workpiece loading and unloading in vacuum without breaking vacuum in each compartment, so that each compartment is coated in the same vacuum environment, atmosphere in the compartment is not polluted by atmosphere due to breaking vacuum, and the consistency of residual atmosphere among compartments can be maintained, and the quality and consistency of the film layers are greatly improved.
Therefore, in recent years, the development of vacuum plating equipment has been increased in size and in number. When the multi-cabin configuration is carried out, the coating process cabin is always kept in a vacuum state, the coating process cabin is connected with the feeding cabin and the discharging cabin through vacuum valves, a workpiece is sent into the coating cabin from the feeding cabin under the vacuum state, and the workpiece is moved out to the discharging cabin under the vacuum state after the coating process is finished. On the one hand, the equipment is large in size, the number of hanging tools for hanging workpieces is large, the hanging tools are large in size, and the hanging tools after hanging the workpieces are heavy. The transfer of these hangers to the transfer pod under vacuum must be accomplished by a robot. In order to adapt to the development trend of the current vacuum coating equipment, a vacuum manipulator suitable for various purposes needs to be developed. Therefore, the multi-cabin type coating equipment is provided with a plurality of manipulators, and the equipment is complex and huge and has high manufacturing cost.
At present, a multi-cabin type coating machine is designed to separate a feeding cabin from a discharging cabin, a feeding moving frame and a discharging moving frame are needed respectively, and a plurality of manipulators are correspondingly adopted, so that the designed equipment has the advantages of complex structure, high manufacturing cost, inconvenient use and high failure rate.
Disclosure of Invention
The invention aims to solve the technical problem of providing a large vacuum coating machine with a workpiece hanging plate rotating cabin synchronous conveying manipulator, which has the advantages of simplified equipment structure, low manufacturing cost, convenient use and low failure rate.
The technical scheme adopted by the invention is as follows:
a large-scale vacuum coating machine with a workpiece hanging plate rotating cabin synchronous conveying manipulator is characterized in that: adjacent coating process cabins 1 and transition cabins 4 are arranged in the vacuum coating machine, and a gate valve 2 is arranged between the transition cabins and the coating process cabins for separation;
The coating process cabin is internally provided with: the process rotating frame 5 is a vertical polygonal column shell, is hung on a vertical rotating shaft of the process rotating frame with a driving mechanism, is provided with hooks capable of hooking workpiece hanging plates 8 on each side of the side surface of the column shell, is a vertical rectangular plate, and is provided with hook holes near four end corners;
the transition cabin is internally provided with:
A workpiece hanging plate transition rotating frame 18, which is provided with a plurality of pairs of upper and lower hanging rods 18-2 which radially extend out correspondingly at the upper part and the lower part of a vertical transition center rotating shaft 18-1 with a driving mechanism, wherein one side of the upper and lower hanging rods is provided with a hook 12 corresponding to a hook hole of the workpiece hanging plate 8;
The synchronous conveying manipulator of the workpiece hanging plate rotating cabin is used for moving and conveying the workpiece hanging plate 8 back and forth between the transition rotating frame 18 of the transition cabin and the process rotating frame 5 of the coating process cabin.
Preferably, the workpiece hanging plate rotating cabin synchronous conveying manipulator comprises an inner cabin part and an outer cabin part:
The intra-cabin portion includes: a transporting manipulator support 17 of a polyhedral (simplified hexahedral) box-shaped structure for drawing convenience, wherein a vertical central rotating shaft 19 is rotatably supported between a top plate and a bottom plate at the middle position, and three circular gears 68 are sequentially connected with the central rotating shaft 19 from top to bottom through keys 22; a central rotating shaft motor 26 is fixed on the top surface of the bottom plate of the conveying manipulator support frame 17, an output shaft is fixedly connected with a driving circular gear 23 through a connecting shaft 24, and the driving circular gear 23 is meshed with a circular gear 68 below; two pairs of horizontal rack working arms 14 are correspondingly arranged on the front wall and the rear wall of the box-type conveying manipulator support frame in a front-back mode and correspondingly arranged up and down at the same time, the tooth surfaces of the rack working arms are inwards meshed with the upper round gears 68 and the middle round gears 68 respectively, and a horizontal guide rail sliding block mechanism is arranged between the rear surface of the rack working arms and the front wall and the rear wall of the box-type conveying manipulator support frame, so that the rack working arms can move left and right relative to the box-type conveying manipulator support frame; the right ends of the upper and lower rack working arms of the front wall respectively penetrate through the right wall opening of the box-type conveying manipulator support frame, the left ends of the upper and lower rack working arms of the rear wall penetrate through the left wall opening of the box-type conveying manipulator support frame, and the upper and lower penetrating ends of the same side wall are hinged on the vertical central line of the back surface of a swing claw plate 10, so that the swing claw plate can swing relative to the upper and lower rack working arms, and a reset spring is sleeved at the hinge shaft to enable the swing claw plate 10 to be automatically reset at the position of the rack working arm 14; the swing claw plate 10 is a vertical rectangular plate, hooks 12 corresponding to the workpiece hanging plate 8 are arranged near four corners on the plate surface, and one end of the bottom edge of the swing claw plate 10 is provided with a downward extending horizontal guide roller or bearing; the bottom plate of the conveying manipulator support frame 17 is also provided with an arc-shaped guide plate 13 with a horizontal arc-shaped edge, and the position of the guide plate is arranged so that when the rack working arm 14 starts to extend forwards towards the transition rotating frame 18, the guide bearing 9 at the lower end of the swing claw plate 10 is attached to the bottommost part of the arc-shaped guide plate 13, and the guide bearing 9 climbs an arc-shaped slope along the arc-shaped edge of the arc-shaped guide plate in the process of extending forwards of the rack working arm 14, so that the swing claw plate 10 swings by a hinge; the design of the arcuate edge is such that the swing claw plate 10 swings in a horizontal direction when the guide bearing 9 climbs to the top of the arcuate slope.
The outer part of the cabin is a rotation and lifting and driving transmission device of the inner part of the cabin arranged below the bilge.
Preferably, the cabin exterior portion comprises: a through hole is formed in the position, corresponding to the central rotating shaft 19 in the inner part of the transition cabin 4, of the bottom plate, a vertical spline shaft sleeve mechanism is arranged outside the through hole, the spline shaft sleeve mechanism consists of a spline shaft and a spline shaft sleeve sleeved outside the spline shaft sleeve mechanism, the spline shaft and the spline shaft sleeve can move axially relatively but only rotate simultaneously, the spline shaft sleeve can be rotatably supported on the bottom surface of the bottom plate of the transition cabin 4, and a spline shaft sleeve rotary driving mechanism is further arranged on the bottom surface of the bottom plate of the transition cabin 4; the top end of the spline shaft is fixedly supported at the bottom of the conveying manipulator support frame 17 at the inner part of the cabin, the bottom end of the spline shaft can relatively rotate and can only be supported at the upper end of a piston rod of a cylinder in an up-down moving mode, and the cylinder is fixedly supported on the bottom surface of the bottom plate of the transition cabin 4.
The spline shaft sleeve is rotatably supported on the bottom surface of the bottom plate of the transition cabin 4 and has the structure that: a rotating sleeve 43 is sleeved outside the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism and is fixedly connected with the spline shaft sleeve 40, the rotating sleeve 43 is rotatably supported in an inner cavity of a tubular fixing seat 42 through a bearing, and the upper end of the fixing seat 42 is fixed below the bottom plate of the transition cabin.
The spline shaft sleeve rotary driving mechanism is as follows: the motor is arranged on the bottom surface of the bottom plate of the transition cabin 4, and the output of the motor is decelerated and then drives the spline shaft sleeve to rotate through the synchronous belt pulley transmission mechanism.
The spline shaft sleeve mechanism is a ball spline shaft sleeve mechanism and is an outsourcing piece, the middle part of the spline shaft is provided with a plurality of parallel axis shallow key grooves, the cross section of each key groove is in a very shallow circular arc shape of a ball, and the depth of each key groove can accommodate a small spherical crown of the ball; the spline shaft is sleeved with a spline shaft sleeve 40 of a ball spline shaft sleeve mechanism outside, the spline shaft sleeve 40 is formed by combining an upper sleeve and a lower sleeve which are symmetrical, the upper end surface of the upper sleeve is provided with an annular shoulder, the upper sleeve and the lower sleeve are also provided with corresponding key grooves at the key grooves of the spline shaft 31 corresponding to the ball spline shaft sleeve mechanism, the section of each key groove is a large semicircular arc shape except for a very shallow circular arc shape of the balls, and the depth of each key groove can accommodate the rest parts of the balls; and the spline shaft and the two circular arc key grooves on the shaft sleeve are folded to just embed the whole ball and can roll in the folded key grooves. Thus, conditions are prepared for the spline shaft to move up and down smoothly relative to the shaft sleeve, and the spline rotates along with the shaft sleeve due to the transverse pushing of the balls in the key grooves when the shaft sleeve rotates. However, when the two are moved up and down relative to each other, the balls are accumulated when they roll up and down due to the length limitation of the spline sleeve 40 of the ball spline sleeve mechanism, and an elliptical ring path must be designed to allow the balls to roll in a circulating manner. Therefore, arc-shaped curved grooves are respectively excavated in the shaft sleeve on the same side of the upper end and the lower end of the shaft sleeve key groove, and the shaft sleeve key groove is connected with an axial key groove in a transitional way to form a narrow elliptic groove. The cross section of the parallel section and the curved transition section of the groove is the large circle of the diameter of the ball, and can accommodate the whole ball. The key slot of the spline shaft is longer than the shaft sleeve, when the spline shaft moves upwards, the balls move upwards to the notch of the transition curved slot at the upper end of the shaft sleeve, are forced to roll into the transition curved slot of the shaft sleeve, and sequentially enter the elliptical slot for circular rolling. Similar operation will occur when the spline shaft moves down.
The workpiece hanging plate is a vertical rectangular hanging plate, four corners on the plate surface are provided with hanging hook holes, the front and rear surfaces of the hanging hook holes are respectively plugged by symmetrical hanging hook locking plates, the hanging hook locking plates are provided with hanging hook holes in the center, the hanging hook locking plates are in the shape of a lower circle, and the upper ends of the hanging hook locking plates are narrow slotted holes.
The beneficial effects are that: the invention has only one transition cabin, which combines the original feeding moving rack and the discharging moving rack into one transition rotating rack, and the original need of adopting a plurality of manipulators is changed into one manipulator, and the previous manipulators usually operate according to a single action flow procedure, namely, taking out the workpiece hanging board from the workpiece hanging board rotating rack, transporting, indexing to face the inlet of the process cabin, extending into the process cabin, hanging the workpiece hanging board, taking out the plated workpiece hanging board again, exiting the process cabin, indexing to face the direction of the workpiece hanging board rotating rack, transporting and hanging the workpiece hanging board on the rotating rack. The invention has lower efficiency in one-way process, one set of manipulator is provided with two sets of rack working arms for picking and placing the workpiece hanging plate, the rack working arms are reversely installed and act, one set of the rack working arms extend forwards to pick the workpiece hanging plate, and the other set of rack working arms extend forwards reversely to the process cabin to mount and hang the workpiece hanging plate. One set of manipulator realizes the simultaneous picking and loading, then indexes 180 degrees, and the two sets of rack working arms exchange actions. The mechanical arm and the equipment of the workpiece hanging plate rotating frame matched with the mechanical arm have the advantages of simplified structure, low cost, convenient use, high power and low failure rate.
Drawings
The invention is described in detail below with reference to the drawings and the detailed description.
FIG. 1a is a schematic cross-sectional view of a component structure of an embodiment of the present invention;
FIG. 1b is a schematic cross-sectional view of a part of the cabin interior of a synchronous transport robot according to an embodiment of the present invention;
FIG. 2 is a schematic view of a synchronous transport robot rack arm retracted state;
FIG. 3 is a schematic view of a synchronous transport robot rack arm in an extended state;
FIG. 4 is a schematic view of a rotation state of a rack working arm main body of the synchronous conveying manipulator;
FIG. 5a is a schematic front view of the workpiece strap of FIG. 1;
FIG. 5B is a cross-sectional view taken along line B-B of FIG. 5 a;
FIG. 5c is a cross-sectional view taken along line A-A of FIG. 5 a;
FIG. 5d is an enlarged partial schematic view of FIG. 5 c;
FIG. 6 is a partial top view of the synchronous conveyor robot rack arm assembly of FIG. 1;
FIG. 7 is an enlarged schematic top view of the synchronous transport robot III of FIG. 2 and its associated transition turret;
FIG. 8 is an enlarged schematic view of a top portion of a center spindle of the IV synchronous transport robot of FIG. 1;
FIG. 9 is a partial schematic view of the center spindle assembly of the V-sync transport robot of FIG. 1;
FIG. 10 is a partial schematic view of the swing claw plate rotating mechanism and the hooking workpiece hanging plate of the VII synchronous transport robot of FIG. 1;
FIG. 11 is a schematic view of the drive transmission for the overall rotation and lifting of the VI synchronous transport robot of FIG. 1.
In the drawings, the names of other parts are related with reference numerals:
A coating process cabin 1; a gate valve 2; a gate valve plate 3; a transition cabin 4; a process turret 5; a hook plate 6; a hook hole 6-1; a first socket head cap screw 7; a work hanging plate 8; a guide bearing 9; swing the claw plate 10; a spring 11; a hook 12; a guide plate 13; a rack work arm 14; a guide rail 15; a slider 16; a carrying robot support 17; a transition turret 18; a transition turret shaft 18-1; a transition swivel mount hanging bar 18-2; a central rotation shaft 19; a central spindle top cover plate 19-1; a first deep groove ball bearing 20; a top bearing cover 21; a flat key 22; a driving circular gear 23; a connecting shaft 24; a motor support column 25; a center spindle motor 26; a first bearing housing 27; a first planar ball bearing 28; a second deep groove ball bearing 29; a transition plate 30; a spline shaft 31 of the ball spline shaft sleeve mechanism; a gland 32; a seal seat 33; a skeleton oil seal 34; a first O-ring 35; a second O-ring 36; a third O-ring 37; a bottom lock plate 38; a first stop collar 39; a spline sleeve 40 of a ball spline sleeve mechanism; a third deep groove ball bearing 41; a fixing base 42; a rotating sleeve 43; a bottom lock cover 44; a second stop collar 45; a first synchronizing wheel 46; a second flat key 47; a timing belt 48; a second synchronizing wheel 49; a drive shaft 50; a speed reducer 51; a screw 52; a nut 53; a speed reducer lock plate 54; a fixing post 55; a spacer 56; a second motor 57; a second bearing seat 58; a second planar ball bearing 59; a fourth deep groove ball bearing 60; a bearing lock plate 61; a transition shaft 62; a cylinder 63; a cylinder support plate 64; a connecting post 65; a lock lever 66; a raising post 67; a circular gear 68; and a hinge shaft 69.
Detailed Description
Referring to fig. 1, a schematic cross-sectional view of an embodiment of the present invention is shown showing the overall structure of a vacuum coater, a synchronized transport robot, and a cabin and turret associated with its transport workpiece hitch. In the left side coating process cabin 1 of FIG. 1, a process rotating frame 5 is arranged, a workpiece hanging plate 8 is hung on the process rotating frame, a transition cabin 4 is arranged on the right side, a transition rotating frame 18 is arranged on the right side, and a workpiece hanging plate 8 is also hung on an upper hanging rod 18-2; a synchronous conveying manipulator II is arranged between the gate valve 2 and the transition rotary frame 18.
The mechanical arm is divided into an outer cabin part and an inner cabin part, an outer cabin part VI outside the cabin bottom plate is a rotating shaft and a power and transmission mechanism thereof, the inner cabin part is a mechanical arm main body, the mechanical arm main body is supported by a ball spline shaft outside the cabin, and the main body comprises a mechanical structure and a power and transmission device for realizing the advancing and retreating rotation of a rack working arm to take and put a work piece hanging plate. The lifting rotating shaft outside the cabin body and extending into the cabin body supports the conveying manipulator supporting frame 17, and the lifting rotating shaft outside the cabin body can drive the conveying manipulator supporting frame 17 to rotate and lift. The center of the bottom plate of the conveying manipulator support frame 17 is rotatably connected with an upright central rotating shaft assembly V through a bearing seat, and the top end of the central rotating shaft is rotatably connected with the center of the top plate of the conveying manipulator support frame 17 through a bearing assembly IV.
The lower part of the central rotating shaft is connected with a rotary driving assembly which comprises a central rotating shaft 19, a driving circular gear 23, a connecting shaft 24, a motor support column 25 and a central rotating shaft motor 26. The motor support column 25 is fixedly connected to a bottom plate in the carrying manipulator support frame 17, the central rotating shaft motor 26 is fixed to a transverse plate of the motor support column 25, an output shaft of the central rotating shaft motor 26 is fixedly connected with the driving circular gear 23 through a connecting shaft 24, and the driving circular gear 23 is meshed with a lower circular gear 68 connected with a corresponding key on the central rotating shaft 19.
Fig. 1 also shows a transversely arranged rack working arm 14 associated with an upright central spindle 19, the front end of the rack working arm 14 being hinged to a swing claw plate 10, the front of the swing claw plate 10 being hooked to a workpiece hanger plate 8, the rear section of the rack working arm being a rack section, on the other face of which there is no tooth, a slide 16 being provided, which is in sliding connection with a guide rail 15, the guide rail 15 being fixed to a conveyor arm support 17. Fig. 1 shows vii a swing claw plate steering swing assembly.
Fig. 2 to 4 are plan views showing the working environment and three working states of the synchronous transport robot. Figure 2 shows the main configuration and structure within the process and transition cabins. The coating process cabin 1 is connected with the transition cabin 4, the middle gate valve 2 is separated, and the two cabins are communicated or separated by opening or closing the gate valve plate 3. The coating process cabin 1 is a coating cabin, a process rotating frame 5 is arranged in the cabin, the coating process cabin is a polygonal rotatable vertical cage (the drawing is simplified to be a hexagon), each side is provided with a workpiece hanging plate I, the workpiece hanging plate I is hung on a hook 12 of the process rotating frame 5, and a workpiece to be coated is attached to the outer surface of the workpiece hanging plate 8. When the valve is closed, coating operation is carried out; when the valve is opened, the plated workpiece hanging plate I and the workpiece hanging plate I to be plated are taken out and hung. The transition cabin 4 is a turnover cabin, and is provided with a quincuncial transition rotating frame 18 for storing a workpiece hanging plate, and a rotating shaft 18-1 of the transition rotating frame drives the rotating frame to rotate. A plurality of groups of hanging rods 18-2 corresponding to the upper and lower parts are radially and transversely extended from the rotating shaft along the radius to be fixedly connected (six stations are simplified in the drawing), and hooks 12 are arranged on the front and rear parts of the upper hanging rod and the lower hanging rod. The upper hanging rod 8-2 and the lower hanging rod 8-2 of each station hang the workpiece hanging plate I in the same plate surface direction. After the valve of the coating process cabin 1 is closed, the cabin door of the transition cabin 4 can be opened, a workpiece hanging plate of a workpiece to be coated is hung on the transition rotary frame 18 from outside the cabin, or the coated workpiece hanging plate I is taken out of the cabin from the transition rotary frame 18.
In addition, a synchronous workpiece conveying hanging plate manipulator II is also arranged in the transition cabin 4. It is located between the gate valve 2 and the transition rotary frame 18, one rack working arm 14 of the manipulator can extend into the coating process cabin 1 to hang or take out the workpiece hanging plate 8, and the other rack working arm 14 can extend to the transition rotary frame 18 to pick up and put the upright workpiece hanging plate 8.
Fig. 2 shows the rack working arm 14 in a retracted state, and the swing claw plates 10 at the front ends of the front and rear sets of upper and lower rack working arms 14 are in a normal state, both being perpendicular to the rack working arm 14. The swing claw plate 10 is a standing plate in which upper and lower points of a vertical center line are hinged with upper and lower rack operating arms 14, and the swing claw plate 10 can swing laterally with respect to the rack operating arms until being parallel to the rack operating arms. The hinge shaft is sleeved with a spring to enable the swing claw plate 10 to automatically reset to be perpendicular to the rack working arm 14 to be in a normal position. In the retracted state, the lower guide bearing 9 of the swing claw plate 10 at the front end of the right rack working arm 14 is shown to be close to the bottom end point of the arc-shaped guide plate 13.
Fig. 3 shows two sets of rack working arms of the synchronous conveying manipulator in an extended state. In the figure, the valve plate 3 of the gate valve is shown to be opened, the film plating process cabin 1 is communicated with the transition cabin 4, the rear rack working arm 14 of the synchronous conveying manipulator II extends forwards through the gate valve 2 to reach the process rotating frame 5, the hook 12 on the swing claw plate 10 at the front end of the synchronous conveying manipulator is hooked on the hook hole 6-1 of the workpiece hanging plate 8 on the process rotating frame 5, the front rack working arm 14 extends forwards towards the transition rotating frame 18 in the opposite direction, the guide bearing 9 at the lower end of the front swing claw plate 10 supports against the arc-shaped guide plate 13 at the beginning, the front rack working arm 14 extends forwards to the guide bearing 9 to climb an arc-shaped slope at one side, the swing claw plate 10 is forced to swing through a hinge to a swinging angle, when the guide bearing 9 climbs to the arc-shaped slope top, the swing claw plate 10 swings to be parallel to the direction of the rack working arm, the corresponding station on the transition rotating frame 18 is also turned into a horizontal position, and the hook 12 on the swing claw plate 10 just hooks the hook hole 6-1 of the hanging rod 18-2 on the station, and the workpiece hanging plate 8 can be taken out.
Fig. 4 is a diagram showing the overall rotation state of the synchronous transport manipulator, in which the front and rear rack working arms 14 have hung the workpiece hanging plate 8, i.e. the workpiece hanging plate 8 is hooked from the swing claw plate 10 on the rack working arm 14 on the left side of fig. 3 and retracted, and the rear rack working arm 14 is withdrawn from the coating process cabin 1 and returned to the original position; when the swing claw plate 10 on the front rack working arm 14 is retracted after hanging the workpiece hanging plate 8, the guide bearing 9 on the swing claw plate 10 descends along the arc shape of the guide plate 13, so that the swing claw plate 10 returns to a vertical state from a state parallel to the rack working arm; after the front and rear rack arms 14 are reset, the synchronous transport robot ii is rotated clockwise by 90 degrees as a whole, which is the case shown in fig. 4. The manipulator ii will continue to rotate clockwise until 180 degrees and will return to the state of fig. 2, but the continued action is that the front and rear rack arms 14 are mutually shifted in position, and the workpiece hanging plates 8 on the swing claw plates 10 are respectively hung on the idle positions of the process turret 5 and the transition turret 18.
Fig. 5 a-5 d are schematic views of the workpiece hanging plate of fig. 2, including three views, front elevation, side elevation and top elevation, showing the construction of the workpiece hanging plate. The structure is an upright rectangular plate, a hook hole is arranged near four corners of the upright rectangular plate, and a structure enlarged schematic diagram of the hook hole is attached in the figure. The drawing shows a hook hole structure, which comprises a hook plate 6, a first inner hexagon screw 7, a workpiece hook plate 8 and a hook hole 6-1. The hook plate 6 is a square thin plate, a hook hole 6-1 is dug in the center, the shape of the hook hole is a lower circle, the upper end of the hook hole is a narrowed slot hole, the hook plate is a through hole, and four corners of the hook plate 6 are provided with four first inner hexagon screws 7 for fixedly connecting the hook plate to a workpiece hanging plate 8. The workpiece hanging plate 8 is provided with corresponding through holes corresponding to the hanging holes 6-1, the other hanging plate 6 is arranged at the back of the workpiece hanging plate 8 and at the corresponding position of the hanging plate 6, and the size and the shape are the same as those of the hanging plate 6, namely the hanging holes 6-1 are arranged at the four corners of the front and the back of the workpiece hanging plate 8.
FIG. 6 is a partial top view of the synchronous transport robot rack arm assembly of FIG. 1. The rack working arm component structure of the workpiece hanging plate is shown, and the rack working arm component structure has the functions of front and rear rack working arms, synchronous action and taking, placing and conveying the workpiece hanging plate in the transition rotating frame 18 and the process rotating frame 5 respectively. The rack working arm assembly comprises a guide bearing 9, a swing claw plate 10, a spring 11, a hook 12, a guide plate 13, a rack working arm 14, a guide rail 15, a sliding block 16 and a circular gear 68. The circular gear 68 is fixedly sleeved on a central rotating shaft (not shown), the circular gear is dragged to rotate, two sides of the circular gear are meshed with the rack working arm 14, the rack working arm 14 is in a lath shape, a half section of the rack is a rack, the other half section of the light body, the front end of the light body section is hinged with the swing claw plate 10, a spring 11 is wound around a hinge shaft, and the swing claw plate 10 and the rack working arm 14 are maintained to be in a normal vertical state by the elasticity of the spring. The swing claw plate 10 is a vertical rectangular plate, hooks 12 are arranged near the upper, lower, front and rear four corners of the swing claw plate, a downward extending guide bearing 9 is arranged at one end of the bottom edge of the swing claw plate 10, and when the rack working arm is in a retracted state, the bottom point of the arc-shaped upward slope of the guide plate 13 is in front of the guide bearing 9 at the plate edge of the swing claw plate on the right side of the diagram. Two sliding blocks 16 are embedded on the other side of the rack working arm 14, the sliding blocks are sleeved on a guide rail 15 which is arranged parallel to the rack working arm, and the guide rail 15 is fixedly connected to the front wall and the rear wall of a conveying manipulator supporting frame 17. When the circular gear 68 rotates counterclockwise, the rear rack working arm extends leftward and the front rack working arm extends rightward; when the circular gear 68 rotates clockwise, the rear rack working arm retracts rightward, and the front rack working arm retracts leftward.
Fig. 7 is an enlarged partial top view of the synchronous transport robot of fig. 3 and its associated transition turret showing the structure of transition turret 18 and the forward rack arm extending action of the workpiece hitch. The transition rotating frame 18 is of a plum blossom-shaped structure, a plurality of pairs of hanging rods 18-2 are welded along the radial direction from the transition center rotating shaft 18-1, one station is matched with the pair of hanging rods 18-2 up and down, the upper and lower distances of the two hanging rods correspond to the upper and lower hook hole distances of the workpiece hanging plate, and hooks 12 are arranged at the positions of the hanging rods 18-2 corresponding to the hook holes 6-1 of the workpiece hanging plate 8.
All the workpiece hanging plates 8 are hung along the same direction, the front rack working arm is shown to extend forward to the position for taking the workpiece hanging plates, referring to fig. 6, the front rack working arm 14 is in a state of extending forward, the swing claw plate 10 at the front end of the front rack working arm 14 is perpendicular to the rack working arm 14, the guide bearing 9 at the plate end of the swing claw plate 10 is positioned at the bottom end of the arc slope of the guide plate 13, when the front rack working arm 14 extends forward, the guide bearing 9 on the swing claw plate 10 at the front end climbs along the arc slope of the guide plate 13, the swing claw plate 10 on the front rack working arm 14 is forced to rotate by a swing angle through a hinge, and when the guide bearing 9 climbs to the arc slope top, the swing claw plate 10 swings to be parallel to the direction of the rack working arm. At this time, the swing claw plate 10 on the front rack working arm 14 just extends into the station of the transition rotary frame 18 where the workpiece hanging plate 8 is hung, and the transition rotary frame 18 rotates to rotate the corresponding hanging rod 18-2 to a horizontal position, and is correspondingly parallel to the swing claw plate 10, so that the swing claw plate 10 is convenient to take out the workpiece hanging plate 8 on the hanging rod 18-2. After the right swing claw plate 10 takes out the workpiece hanging plate 8, the front rack working arm 14 is retracted, the guide bearing 9 at the lower end of the swing claw plate 10 descends along the arc slope of the guide plate 13, the swing claw plate 10 rotates anticlockwise from the direction parallel to the rack working arm under the action of the hinge and the spring between the swing claw plate 10 and the rack working arm 14, and when the guide bearing 9 on the swing claw plate 10 descends to the arc slope bottom, the swing claw plate 10 rotates and resets to the vertical position.
FIG. 8 is an enlarged view of a portion of the top structure of the center spindle of the IV synchronous transport robot of FIG. 1. It shows the structure of the movable connection at the top of the central rotating shaft 19, and the movable connection assembly at the top of the central rotating shaft comprises a central rotating shaft 19, a central rotating shaft top cover 19-1, a first deep groove ball bearing 20, a top bearing cover 21 and a conveying manipulator supporting frame 17. The first deep groove ball bearing 20 is sleeved on the top end of the central rotating shaft 19, a central rotating shaft top cover 19-1 fastened by screws is propped at the shaft end of the central rotating shaft 19, the inner ring of the first deep groove ball bearing 20 is pressed on the ring edge of the top cover, the central rotating shaft 19 penetrates through a central hole on the top plate of the conveying manipulator support frame to extend downwards, the bearing outer ring is pressed on the top bearing cover 21 and a boss around the central hole of the conveying manipulator support frame 17, and the top bearing cover 21 is fixedly connected on a boss around the central hole of the conveying manipulator support frame 17 by screws, so that the top of the central rotating shaft is movably connected.
Fig. 9 is a schematic view of the central spindle assembly of the v-sync transport robot of fig. 1, showing the structure of the central spindle assembly comprising a central spindle 19, three flat keys 22, and three circular gears 68. The central rotating shaft 19 is a vertical long shaft, a convex ring shoulder is arranged near the lower end of the shaft, a shaft top cover plate 19-1 is fixedly connected with the top of the upper end of the central rotating shaft by a screw, 3 circular gears 68 are fixedly arranged on the central rotating shaft 19 from top to bottom, the lowest circular gear 68 is fixedly connected with the central rotating shaft by a flat key, and is meshed with a driving circular gear 23 of the rotary driving assembly of the central rotating shaft 19 to drive the central rotating shaft 19 to rotate. The first and second circular gears 68 on the central shaft 19 are shown as being fixedly connected with the central shaft by the flat key 22, and the upper and lower circular gears 68 are respectively meshed with racks of the upper and lower sets of rack working arms.
Fig. 10 is a partial schematic view of the swing claw plate rotating mechanism and the hooking workpiece hanging plate of the vii synchronous transport robot of fig. 1, which is a vertical sectional view, and is more clearly shown in combination with the above-mentioned plan view. The structure of the rack working arm hinged with the swing claw plate and the structure and relative position of the hook and the hook hole, and the structure and relative position of the guide bearing and the guide plate are shown in the figure. The rack working arm and swing claw plate hinge structure comprises a rack working arm 14, a swing claw plate 10, a hinge shaft 69 and a spring 11. The front end of the rack working arm 14 is provided with a through hole which is opposite to the through hole of the board back protruding block of the swing claw board 10, the inserting hinge shaft 69 is hinged, the spring is used for pulling the rack working arm 14 and the swing claw board 10 to enable the board surface of the swing claw board 10 to be in a normal position vertical to the rack working arm 14, the lower end of the board of the swing claw board 10 is fixedly connected with a downward extending lock rod 66, the end of the lock rod 66 is fixedly connected with a guide bearing 9, the guide bearing is close to the guide board 13, the guide board 13 is fixedly connected with a heightening column 67, and the heightening column is welded on the bottom plate of the transition cabin 4. The guide plate 13 is horizontally arranged, the projected arc shape is bent from left to right in a overlook mode, when the rack working arm 14 is in a retreating state, the swing claw plate 10 is at a normal position, and the guide bearing 9 is close to the arc outsole edge of the guide plate 13. When the rack working arm 14 extends forwards, the guide bearing 9 leans against the arc line of the guide plate 13 and moves towards the arc top, so that the swing claw plate 10 turns around the hinge to be parallel to the rack working arm 14; when the rack working arm retreats, the hinged joint of the swing claw plate 10 is dragged to retreat, the guide bearing 9 rolls along the guide plate 13 from the arc top to the arc bottom, the spring 11 drives the swing claw plate 10 to reversely overturn, and the swing claw plate and the rack working arm 14 are restored to a normal state. In the figure, hooks 12 are arranged at four corners of the front surface of the swing claw plate 10 and are hooked in hook holes 6-1 of a workpiece hanging plate 8, the four corners of the workpiece hanging plate 8 are provided with the hook holes 6-1, each hole is provided with a front square hanging plate and a rear square hanging plate 6 which clamp the workpiece hanging plate 8, the four corners of the hanging plate 6 are fixedly connected with the workpiece hanging plate through screws 7, the centers of the hanging plate 6 are provided with the hook holes 6-1, the lower parts of the hanging plate are circular grooves, and the upper parts of the hanging plate are narrow grooves, and are through holes. The corresponding part of the workpiece hanging plate 8 is hollowed out. The drawing also shows that the work piece hanging plate 8 on the transition rotary frame 18 is hung at the hanging hole 6-1 by the hanging hook 12 of the transition rotary frame hanging rod 18-2.
FIG. 11 is a partial schematic view of the drive transmission for the overall rotation and lifting of the VI synchronous transport robot of FIG. 1. The synchronous conveying manipulator needs to realize the actions of integral rotation and lifting, is completed by connecting a lifting rotating shaft which extends out of the cabin into the cabin with a conveying manipulator support frame, and meanwhile, the outside of the cabin is provided with a matched power and transmission device. The structure can be divided into a lifting rotating shaft assembly, a rotary driving assembly, a lifting driving assembly and a connecting conveying manipulator support frame assembly.
The lifting rotating shaft assembly comprises a spline shaft 31 of a ball spline shaft sleeve mechanism, a gland 32, a sealing seat 33, a framework oil seal 34, a first O-shaped ring 35, a second O-shaped ring 36, a third O-shaped ring 37, a bottom locking plate 38, a first limiting sleeve 39, a spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, a third deep groove ball bearing 41, a fixed seat 42, a rotating sleeve 43, a bottom locking cover 44 and a second limiting sleeve 45. The lifting rotating shaft component structure is as follows: the fixed seat 42 is a sleeve with an end face annular shoulder, the inner cavity of the fixed seat is a stepped inner hole, the inner diameters of two ends of the fixed seat are large, and a section of raised step is arranged near the bottom end of the fixed seat; the bottom locking plate 38 is a circular plate with a middle through hole, the sleeve of the fixed seat 42 penetrates through the middle hole of the bottom locking plate 38, the annular shoulder of the fixed seat 42 is in sealing and fixing connection with the upper end face of the bottom locking plate 38 through the second O-shaped ring 36 by using a screw, the annular shoulder of the fixed seat 42 is sleeved into the through hole of the bottom plate of the transition cabin 4, the upper end face of the bottom locking plate 38 exceeds the annular shoulder part of the fixed seat 42, and the annular shoulder of the fixed seat is in sealing and fixing connection with the outer wall of the bottom plate of the transition cabin 4 through the third O-shaped ring 37. The lifting rotating shaft selects the spline shaft 31 of the ball spline shaft sleeve mechanism, it is a set of outsourcing piece, the middle part of the spline shaft 31 of the ball spline shaft sleeve mechanism is equipped with several parallel axis shallow key ways, can hold the depth of the ball crown of small part of ball, the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, it is by two symmetrical sleeves to be joined up, there is a circular shoulder on the upper end surface of upper sleeve, there are corresponding key ways in the spline shaft 31 of the corresponding ball spline shaft sleeve mechanism of upper and lower sleeves, can hold the ball part except above-mentioned small part of ball crown, in this way, the spline shaft 31 of the ball spline shaft sleeve mechanism and two circular arc key ways on the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism are closed and just buried into the whole ball, And can roll in the folding key groove. thus, conditions are provided for smooth up-and-down movement of the spline shaft 31 of the ball spline shaft mechanism relative to the spline shaft 40 of the ball spline shaft mechanism, and secondly, when the spline shaft 40 of the ball spline shaft mechanism rotates, the spline shaft 31 of the ball spline shaft mechanism rotates accordingly due to the lateral pushing of the balls in the key grooves. However, when the two are moved up and down relative to each other, the balls are accumulated when they roll up and down due to the length limitation of the spline sleeve 40 of the ball spline sleeve mechanism, and an elliptical ring path must be designed to allow the balls to roll in a circulating manner. Therefore, on the same side of the upper and lower ends of the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, arc-shaped curved grooves are respectively dug in the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, and the same axial spline grooves newly dug in the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism are connected in a transitional manner to form a narrow elliptic groove. The cross section of the parallel section and the curved transition section of the groove is the large circle of the diameter of the ball, and can accommodate the whole ball. the spline groove of the spline shaft 31 of the ball spline shaft sleeve mechanism is longer than the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, when the spline shaft 31 of the ball spline shaft sleeve mechanism moves upwards, the balls move upwards to the transition curved groove notch at the upper end of the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, are forced to roll into the transition curved groove of the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism and sequentially enter the elliptical groove to roll circularly, and the lower end transition curved groove notch is also provided with a ball spline groove which supplements the balls from the groove of the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism to the spline shaft 31 of the ball spline shaft sleeve mechanism and the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism. Similarly, the spline shaft 31 of the ball spline shaft mechanism moves downward.
The rotary sleeve 43 is fixedly sleeved outside the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism, the upper sleeve end surface of the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism is pressed on the upper annular shoulder of the rotary sleeve 43 in an annular manner, and the upper sleeve end surface is fixedly connected with the upper sleeve end surface by bolts; the end face annular shoulder of the lower sleeve of the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism is fixedly connected with the lower end face of the rotary sleeve 43 by bolts, a third deep groove ball bearing 41 is sleeved outside the upper end part of the rotary sleeve 43, the upper end of the inner ring of the bearing abuts against the upper annular shoulder of the rotary sleeve 43, the bearing is sleeved in an upper stepped hole in the inner cavity of the fixed seat 42, the lower end of the outer ring of the bearing abuts against a boss of the inner cavity, and the upper end of the outer ring of the bearing is limited by a first limiting sleeve 39. The rotating sleeve 43 is sleeved with a third deep groove ball bearing 41 near the lower end part, and is sleeved in a lower stepped hole of the inner cavity of the fixed seat 42, the upper end surface of the outer ring of the rotating sleeve is propped against a boss of the inner cavity, the lower end surface of the outer ring of the rotating sleeve is limited by a bottom locking cover 44 fixedly connected with the fixed seat 42, and the lower end of the inner ring of the rotating sleeve is limited by a second limiting sleeve 45. The sealing seat 33 is sleeved into the upper end hole of the fixed seat 42, the upper end surface of the sealing seat 33 is provided with a convex ring shoulder, the convex ring shoulder is pressed on the upper end of the fixed seat 42, and the sealing seat is fixedly connected with the upper ring shoulder of the fixed seat 42 by a screw through the first O-shaped ring 35. The center of the seal seat 33 has a through hole, and the spline shaft 31 of the ball spline shaft mechanism extends out from the through hole into the chamber. A framework oil seal 34 is arranged between a spline shaft 31 of the ball spline shaft sleeve mechanism and the inner wall of the central hole for sealing, the lower end of the framework oil seal 34 is limited by an annular shoulder in the central hole of a sealing seat 33, and a gland 32 fixedly connected with the sealing seat 33 is arranged at the upper end of the framework oil seal 34 for compressing. The sealing seat 33 is sleeved into the lower end surface of the inner cavity part of the fixed seat 42 and abuts against the first limit sleeve 39.
The rotation driving assembly is a structure for dragging the rotation shaft of the lifting rotating shaft, and comprises a first synchronous wheel 46, a second flat key 47, a synchronous belt 48, a second synchronous wheel 49, a transmission shaft 50, a speed reducer 51, a screw 52, a nut 53, a speed reducer locking plate 54, a fixing column 55, a gasket 56 and a second motor 57. The rotating shaft of the second motor 57 is connected with the speed reducer 51, and the upper end surface of the speed reducer 51 is fixedly connected with the speed reducer locking plate 54. The fixed column 55 is welded on the outer wall of the bottom plate of the transition cabin 4, the upper end of the screw 52 is screwed into the fixed column 55 and then fixed by the nut 53, and the lower end of the screw 52 is fixedly connected with the 53 speed reducer locking plate 54 by the nut, so that the motor and the speed reducer box are fixed outside the bottom plate of the transition cabin. The transmission shaft 50 of the speed reducer 51 is connected with the second synchronizing wheel 49 in a downward extending manner, the second synchronizing wheel 49 rotates to drive the first synchronizing wheel 46 to rotate together through the synchronizing belt 48, the first synchronizing wheel 46 is fixedly connected with the rotating sleeve 43 through the second flat key 47, and the rotating sleeve 43 is also dragged to rotate, so that the spline shaft sleeve 40 of the ball spline shaft sleeve mechanism and the spline shaft 31 of the ball spline shaft sleeve mechanism are driven to rotate, and the manipulator is dragged to integrally rotate.
The lift driving assembly is a mechanism for driving the lift rotating shaft to lift, and comprises a second bearing seat 58, a second planar ball bearing 59, a fourth deep groove ball bearing 60, a bearing lock plate 61, a transition shaft 62, an air cylinder 63, an air cylinder supporting plate 64 and a connecting column 65. The lifting driving assembly has the following structure: the sleeve-shaped second bearing seat 58 with a downward opening is fixedly connected to the lower end face of the spline shaft 31 of the ball spline shaft sleeve mechanism by screws, the second bearing seat 58 is provided with two layers of ladder inner cavities, the inner diameter close to the opening is large, the inner cavity of the second plane ball bearing 59 close to the inner cavity is sleeved first, then the inner hole of the second plane ball bearing 59 is sleeved with the transition shaft 62, the annular shoulder of the transition shaft 62 is abutted against the inner ring of the second plane ball bearing 59, the fourth deep groove ball bearing 60 is sleeved into the space between the transition shaft 62 and the ladder inner cavity of the lower layer of the second bearing seat 58, the annular shoulder of the transition shaft 62 is abutted against the inner ring of the fourth deep groove ball bearing 60, the inner cavity step of the second bearing seat 58 is abutted against the outer ring of the fourth deep groove ball bearing, and the bearing lock plate 61 is fixedly connected with the opening end face of the second bearing seat 58 by screws. The piston rod of the cylinder 63 is fixedly connected with the lower end face of the transition shaft 62, the cylinder 63 is fixed on a cylinder supporting plate 64, the cylinder supporting plate 64 is fixedly connected with the lower ends of a front connecting column 65 and a rear connecting column 65, and the upper end of the front connecting column is fixedly connected with the outer wall of the transition cabin bottom plate. The cylinder piston pushes the piston rod to stretch up and down, so that the ball spline shaft is driven to lift up and down, and the manipulator is driven to lift up and down integrally.
The connecting and conveying manipulator support frame assembly is used for connecting the lifting rotating shaft with the conveying manipulator support frame to transfer rotation and lifting functions, and meanwhile, the function of independent rotation of the central rotating shaft of the manipulator is kept. The connecting transfer robot support frame assembly comprises a transfer robot support frame 17, a central rotating shaft 19, a first bearing seat 27, a first plane ball bearing 28, a second deep groove ball bearing 29, a transition plate 30 and a spline shaft 31 of a ball spline shaft sleeve mechanism. The structure is as follows: the upper end face of a spline shaft 31 of the ball spline shaft sleeve mechanism is fixedly connected with a transition plate 30 by a screw, the transition plate 30 is upwards and fixedly connected with the lower end face of a central boss of the supporting frame 17 of the conveying manipulator by the screw, the upper end face of the central boss is upwards and fixedly connected with a first bearing seat 27 by the screw, the bearing seat is provided with a central through hole and a stepped inner cavity, and a central rotating shaft extends into the inner cavity of the first bearing seat 27 from the central through hole. The central rotating shaft 19 is sleeved into a first plane ball bearing 28, a first stepped hole in the inner cavity of the first bearing seat 27 is filled, the outer ring of the bearing is limited against the step of the inner cavity, then a second deep groove ball bearing 29 is sleeved into a second stepped hole, the upper end of the outer ring of the bearing is limited against the second step of the inner cavity, and the lower end of the outer ring of the bearing is limited against the boss of the supporting frame 17 of the conveying manipulator. The lifting rotating shaft and the central rotating shaft are shown to be separated in the figure, and the central rotating shaft can independently rotate by itself after being lifted and rotated along with the supporting frame of the conveying manipulator.
Benefits of the invention
(1) A transition cabin is adopted to replace a multi-cabin mode such as a feeding cabin, a discharging cabin and the like, so that vacuum space is saved; (2) The hanging plate mode of synchronously taking, placing and conveying the working workpieces by adopting a set of double rack working arms of the mechanical arm is adopted to replace a multi-cabin multi-special mechanical hand working mode, so that the equipment structure is greatly simplified, the number of mechanical arms is reduced, the process steps and the operation are simplified, and the work efficiency is improved;
(3) The device has the advantages of simplified structure, simplified process action, improved reliability, low failure rate, low manufacturing cost of the device and low operation cost.

Claims (8)

1.一种设有工件挂板转舱同步运送机械手的大型真空镀膜机,其特征是:所述真空镀膜机内设有相邻的镀膜工艺舱(1)和过渡舱(4),过渡舱和镀膜工艺舱之间设有插板阀(2)分隔;1. A large vacuum coating machine provided with a workpiece hanging plate transfer chamber synchronous transport robot, characterized in that: the vacuum coating machine is provided with adjacent coating process chambers (1) and transition chambers (4), and a gate valve (2) is provided between the transition chamber and the coating process chamber to separate them; 所述镀膜工艺舱内设有:工艺转架(5),其为一个竖立的多边形柱体壳,吊挂在带驱动机构的工艺转架垂直回转轴上,柱体壳侧面每个面上设有可挂钩工件挂板(8)的挂钩,工件挂板为竖立长方形板,四端角附近开有挂钩孔;The coating process chamber is provided with: a process rotating frame (5), which is an upright polygonal cylindrical shell, suspended on a vertical rotating shaft of the process rotating frame with a driving mechanism, and each side surface of the cylindrical shell is provided with a hook capable of hooking a workpiece hanging plate (8), the workpiece hanging plate is an upright rectangular plate, and hook holes are opened near the four end corners; 所述过渡舱内设有:The transition cabin is provided with: 工件挂板过渡转架(18),其为在一竖直且带驱动机构的过渡中心转轴(18-1)的上部及下部、对应地设有若干对沿径向放射性伸出的上下挂杆(18-2),上下挂杆的一侧面设有对应于工件挂板的挂钩孔的挂钩(12);A workpiece hanging plate transition rotating frame (18) is provided with a plurality of pairs of upper and lower hanging rods (18-2) extending radially and radially on the upper and lower parts of a vertical transition central rotating shaft (18-1) with a driving mechanism, and a hook (12) corresponding to the hook hole of the workpiece hanging plate is provided on one side of the upper and lower hanging rods; 工件挂板转舱同步运送机械手,用于将工件挂板在过渡舱的过渡转架和镀膜工艺舱的工艺转架之间来回移动传送;The workpiece hanging plate transfer chamber synchronous transport robot is used to move the workpiece hanging plate back and forth between the transition transfer frame of the transition chamber and the process transfer frame of the coating process chamber; 所述的工件挂板转舱同步运送机械手包括作为机械手主体的舱内部分以及实现舱内部分整体升降转动的舱外部分:The workpiece hanging plate transfer cabin synchronous transport manipulator includes an inner cabin part as the main body of the manipulator and an outer cabin part that realizes the overall lifting and rotation of the inner cabin part: 所述舱内部分包括:一六面体箱型结构的运送机械手支撑架(17),其中间位置的顶板和底板之间可回转地支承着一垂直的中心转轴(19),中心转轴上从上往下依次连接有上中下三个圆形齿轮(68);一中心转轴电机(26)固定在运送机械手支撑架的底板顶面,输出轴连接有主动圆形齿轮(23),主动圆形齿轮与在下的圆形齿轮(68)啮合;箱型运送机械手支撑架的前壁和后壁上,前后对应且同时上下对应地设有水平横向的两对齿条工作臂(14),齿条工作臂的齿面向内并同时分别与上中两个圆形齿轮啮合、背面则在与箱型运送机械手支撑架的前壁和后壁之间设有水平导轨滑块机构,使得齿条工作臂相对于箱型运送机械手支撑架可左右移动;前壁上下两齿条工作臂的右端分别穿出箱型运送机械手支撑架的右壁开孔,后壁上下两齿条工作臂的左端穿出箱型运送机械手支撑架的左壁开孔;同侧壁的上下穿出端铰接在一摆动爪板(10)背面的垂直中线上,使得摆动爪板可相对上下两齿条工作臂摆动;铰接轴处套有复位弹簧使摆动爪板自动复位于垂直齿条工作臂位置;摆动爪板呈竖立矩形板,其板面上的四角附近设有对应于工件挂板的挂钩(12),摆动爪板底边一端设有下伸的水平导向滚轮或轴承(9);运送机械手支撑架的底板上还设有具有水平弧形边的弧形的导向板(13),其位置布置应使得齿条工作臂朝向过渡转架前伸起始时,摆动爪板下端的导向轴承贴住弧形的导向板最底处、齿条工作臂前伸过程中导向轴承沿弧形的导向板的弧形边爬弧形坡,使得摆动爪板通过铰链转动而摆动角度;弧形边的设计应使得当导向轴承爬至弧形坡顶时,摆动爪板摆动成平行于齿条工作臂方向;The cabin interior part comprises: a hexahedral box-shaped transport robot support frame (17), wherein a vertical central rotating shaft (19) is rotatably supported between the top plate and the bottom plate in the middle position, and three circular gears (68) are connected to the central rotating shaft in order from top to bottom; a central rotating shaft motor (26) is fixed to the top surface of the bottom plate of the transport robot support frame, and the output shaft is connected to the driving circular gear (23), and the driving circular gear is meshed with the circular gear (68) at the bottom; on the front wall and the rear wall of the box-shaped transport robot support frame, two pairs of horizontal and transverse rack working arms (14) are provided in correspondence with each other in front and back and in correspondence with each other in the upper and middle circular gears, and the back surface of the rack working arm is provided with a horizontal guide rail slider mechanism between the front wall and the rear wall of the box-shaped transport robot support frame, so that the rack working arm can move left and right relative to the box-shaped transport robot support frame; the right ends of the upper and lower rack working arms on the front wall respectively pass through the right wall opening of the box-shaped transport robot support frame, and the upper and lower rack working arms on the rear wall are provided with a horizontal guide rail slider mechanism. The left end of the working arm passes through the left wall opening of the box-shaped transport robot support frame; the upper and lower passing ends of the same side wall are hinged on the vertical midline of the back of a swing claw plate (10), so that the swing claw plate can swing relative to the upper and lower rack working arms; a reset spring is sleeved at the hinge shaft to automatically return the swing claw plate to the vertical rack working arm position; the swing claw plate is a vertical rectangular plate, and hooks (12) corresponding to the workpiece hanging plate are provided near the four corners of the plate surface, and a downwardly extending horizontal guide roller or bearing (9) is provided at one end of the bottom edge of the swing claw plate; the transport The bottom plate of the manipulator support frame is also provided with an arc-shaped guide plate (13) having a horizontal arc-shaped edge, and its position arrangement should be such that when the rack working arm starts to extend forward toward the transition rotating frame, the guide bearing at the lower end of the swing claw plate is attached to the bottom of the arc-shaped guide plate, and during the extension of the rack working arm, the guide bearing climbs the arc-shaped slope along the arc-shaped guide plate, so that the swing claw plate swings through the hinge rotation; the arc-shaped edge is designed so that when the guide bearing climbs to the top of the arc-shaped slope, the swing claw plate swings to be parallel to the direction of the rack working arm; 所述运送机械手支撑架(17)中间位置的顶板和底板之间可回转地支承着垂直的中心转轴(19)结构为:第一深沟球轴承(20)套在中心转轴的顶端,中心转轴轴端顶设有用螺钉紧固的中心转轴顶盖(19-1),顶盖环边压着第一深沟球轴承的内圈,中心转轴穿过运送机械手支撑架顶板上的中心孔伸向下,顶轴承盖(21)和支撑架的中心孔周边凸台上下压着轴承外圈,顶轴承盖用螺钉固连在支撑架中心孔周边凸台上,实现中心转轴顶部活动连接。A vertical center shaft (19) is rotatably supported between the top plate and the bottom plate in the middle of the transport robot support frame (17). The structure is as follows: a first deep groove ball bearing (20) is sleeved on the top end of the center shaft, a center shaft top cover (19-1) fastened with screws is provided on the top end of the center shaft, the top cover ring edge presses the inner ring of the first deep groove ball bearing, the center shaft passes through the center hole on the top plate of the transport robot support frame and extends downward, the top bearing cover (21) and the peripheral boss of the center hole of the support frame press the outer ring of the bearing up and down, and the top bearing cover is fixedly connected to the peripheral boss of the center hole of the support frame by screws to realize the movable connection of the top of the center shaft. 2.根据权利要求1所述的设有工件挂板转舱同步运送机械手的大型真空镀膜机,其特征是:所述舱外部分包括:在过渡舱底板对应舱内部分中心转轴位置上开有通孔,通孔外设有一垂直的花键轴套机构,花键轴套机构由花键轴及套在其外的花键轴套构成,花键轴及花键轴套可相对轴向移动但只能同时转动,花键轴套可回转地支承在过渡舱底板底面上,过渡舱底板底面上还设有花键轴套旋转驱动机构;花键轴的顶端固定支撑在舱内部分的支撑架底部、底端则可相对回转但只能同时上下地间接支承在一气缸的活塞杆上端,气缸则固定支撑在过渡舱底板底面上。2. According to claim 1, a large-scale vacuum coating machine equipped with a workpiece hanging plate transfer cabinet synchronous transport robot is characterized in that: the outer cabin part includes: a through hole is opened at the position of the central rotation axis of the cabin part corresponding to the bottom plate of the transition cabin, and a vertical spline sleeve mechanism is arranged outside the through hole. The spline sleeve mechanism is composed of a spline shaft and a spline sleeve sleeved outside it. The spline shaft and the spline sleeve can move axially relative to each other but can only rotate at the same time. The spline sleeve can be rotatably supported on the bottom surface of the bottom plate of the transition cabin, and a spline sleeve rotation drive mechanism is also arranged on the bottom surface of the bottom plate of the transition cabin; the top end of the spline shaft is fixedly supported on the bottom of the support frame of the cabin part, and the bottom end can rotate relatively but can only be indirectly supported on the upper end of the piston rod of a cylinder up and down at the same time, and the cylinder is fixedly supported on the bottom surface of the bottom plate of the transition cabin. 3.根据权利要求2所述的设有工件挂板转舱同步运送机械手的大型真空镀膜机,其特征是:所述花键轴套可回转地支承在过渡舱底板底面上的结构为:一旋转套(43)套在滚珠花键轴套机构之花键轴套(40)的外面且两者固定连接,旋转套又通过轴承可回转地支承在一管状固定座(42)内腔,固定座的上端则固定在过渡舱底板下。3. According to claim 2, the large vacuum coating machine equipped with a workpiece hanging plate transfer cabin synchronous transport robot is characterized in that: the structure in which the spline sleeve is rotatably supported on the bottom surface of the transition cabin bottom plate is: a rotating sleeve (43) is sleeved on the outside of the spline sleeve (40) of the ball spline sleeve mechanism and the two are fixedly connected, and the rotating sleeve is rotatably supported in the inner cavity of a tubular fixed seat (42) through a bearing, and the upper end of the fixed seat is fixed under the transition cabin bottom plate. 4.根据权利要求3所述的设有工件挂板转舱同步运送机械手的大型真空镀膜机,其特征是:所述的花键轴套可回转地支承在过渡舱底板底面上的结构为:固定座(42)为上端面设有外凸环肩的套管,内腔则为两头内径大靠近底端有一段凸环台阶的阶梯内孔;一圆环形底锁板(38),套在固定座外并用螺钉把固定座的环肩通过第二O型圈(36)与底锁板的上端面密封固连,固定座的环肩又套入过渡舱的底板的通孔内,底锁板的上端面超出固定座的环肩部分,通过第三O型圈(37)与过渡舱的底板外壁密封固连;旋转套(43)套在滚珠花键轴套机构之花键轴套(40)的外面,花键轴套的上端面外凸环肩压在旋转套的上环肩上,两者用螺钉固连;花键轴套的下套筒的端面环肩又与旋转套下端面用螺钉固连;旋转套上部外套有深沟球轴承,该轴承内圈上端抵着旋转套的上环肩,该轴承套在固定座内腔的上阶梯孔内,其外圈下端抵着该内腔凸环上,其外圈上端有第一限位套(39)限位;旋转套靠近下端部也套有深沟球轴承,它套在固定座内腔下阶梯孔内,其外圈上端面抵着内腔凸环,外圈下端面被与固定座固连的底锁盖(44)限位,其内圈下端扺着第二限位套(45)限位;环状的密封座(33)套入固定座的上端孔,密封座的上端面有凸环肩,压在固定座的上端凸环肩上,通过第一O型圈(35)用螺钉与固定座上环肩密封固连;滚珠花键轴套机构之花键轴(31)从密封座的中心通孔穿出伸入舱内;滚珠花键轴套机构之花键轴(31)与密封座的中心孔内壁之间置有骨架油封(34)作动密封,骨架油封下端由密封座(33)中心孔内环肩限位,骨架油封上端有与密封座固连的压盖(32)压紧;密封座套入固定座内腔部分的下端面抵着第一限位套(39)。4. According to claim 3, the large vacuum coating machine with a workpiece hanging plate transfer cabin synchronous transport robot is characterized in that: the structure in which the spline shaft sleeve is rotatably supported on the bottom surface of the transition cabin bottom plate is: the fixed seat (42) is a sleeve with an outer convex shoulder on the upper end surface, and the inner cavity is a stepped inner hole with a large inner diameter at both ends and a convex ring step near the bottom end; a circular bottom locking plate (38) is sleeved outside the fixed seat and the shoulder of the fixed seat is sealed and fixedly connected to the upper end surface of the bottom locking plate by screws through a second O-ring (36), and the shoulder of the fixed seat is sleeved The bottom plate of the transition chamber is inserted into the through hole of the bottom plate of the transition chamber, the upper end surface of the bottom lock plate exceeds the shoulder portion of the fixed seat, and is sealed and fixedly connected to the outer wall of the bottom plate of the transition chamber through a third O-ring (37); the rotating sleeve (43) is sleeved on the outside of the spline sleeve (40) of the ball spline sleeve mechanism, the outer convex shoulder of the upper end surface of the spline sleeve is pressed on the upper shoulder of the rotating sleeve, and the two are fixedly connected by screws; the end face shoulder of the lower sleeve of the spline sleeve is fixedly connected to the lower end face of the rotating sleeve by screws; a deep groove ball bearing is arranged on the upper outer sleeve of the rotating sleeve, the upper end of the inner ring of the bearing is against the upper shoulder of the rotating sleeve, and the shaft The bearing sleeve is in the upper stepped hole of the inner cavity of the fixed seat, and the lower end of its outer ring abuts against the convex ring of the inner cavity, and the upper end of its outer ring is limited by a first limiting sleeve (39); the rotating sleeve is also sleeved with a deep groove ball bearing near the lower end, which is sleeved in the lower stepped hole of the inner cavity of the fixed seat, and the upper end face of its outer ring abuts against the convex ring of the inner cavity, and the lower end face of the outer ring is limited by a bottom lock cover (44) fixedly connected to the fixed seat, and the lower end of its inner ring abuts against the second limiting sleeve (45) for limiting; the annular sealing seat (33) is sleeved into the upper end hole of the fixed seat, and the upper end face of the sealing seat has a convex ring shoulder, which presses on the upper end convex ring shoulder of the fixed seat. The first O-ring (35) is connected to the upper shoulder seal of the fixed seat by screws; the spline shaft (31) of the ball spline sleeve mechanism passes through the central through hole of the sealing seat and extends into the cabin; a skeleton oil seal (34) is arranged between the spline shaft (31) of the ball spline sleeve mechanism and the inner wall of the central hole of the sealing seat to act as a seal, the lower end of the skeleton oil seal is limited by the inner shoulder of the central hole of the sealing seat (33), and the upper end of the skeleton oil seal is pressed by a gland (32) fixedly connected to the sealing seat; the lower end surface of the sealing seat inserted into the inner cavity of the fixed seat abuts against the first limiting sleeve (39). 5.根据权利要求4所述的设有工件挂板转舱同步运送机械手的大型真空镀膜机,其特征是:所述的花键轴底端可相对回转但只能同时上下移动地间接支承在一气缸的活塞杆上端的结构为:一开口朝下的套筒状第二轴承座(58)用螺钉固连在滚珠花键轴套机构之花键轴(31)的下端面上,第二轴承座有二层阶梯内腔,靠近开口处的内径大,一第二平面球轴承(59)设在第二轴承座靠里面的内腔,第二平面球轴承的内孔套入过渡轴(62),过渡轴上设有的环肩抵住第二平面球轴承内圈,一第四深沟球轴承(60)套入过渡轴和第二轴承座下层阶梯内腔之间的空间,过渡轴环肩抵住第四深沟球轴承的内圈,第二轴承座的内腔台阶抵住其外圈,用轴承锁板(61)通过螺钉与第二轴承座开口端面固连对轴承限位;气缸(63)的活塞杆与过渡轴下端面固连。5. According to claim 4, the large vacuum coating machine with a workpiece hanging plate transfer cabin synchronous transport robot is characterized in that: the structure of the lower end of the spline shaft being relatively rotatable but only being able to move up and down at the same time indirectly supported by the upper end of the piston rod of a cylinder is: a sleeve-shaped second bearing seat (58) with an opening facing downward is fixedly connected to the lower end surface of the spline shaft (31) of the ball spline shaft sleeve mechanism by screws, the second bearing seat has a two-layer stepped inner cavity, the inner diameter near the opening is larger, and a second plane ball bearing (59) is arranged on the second shaft The inner cavity of the bearing seat is close to the inner cavity, the inner hole of the second plane ball bearing is inserted into the transition shaft (62), the shoulder provided on the transition shaft abuts against the inner ring of the second plane ball bearing, a fourth deep groove ball bearing (60) is inserted into the space between the transition shaft and the lower step inner cavity of the second bearing seat, the shoulder of the transition shaft abuts against the inner ring of the fourth deep groove ball bearing, the inner cavity step of the second bearing seat abuts against its outer ring, and the bearing lock plate (61) is fixedly connected to the open end face of the second bearing seat by screws to limit the bearing; the piston rod of the cylinder (63) is fixedly connected to the lower end face of the transition shaft. 6.根据权利要求5所述的设有工件挂板转舱同步运送机械手的大型真空镀膜机,其特征是:所述花键轴套旋转驱动机构为:过渡舱底板底面上设有电动机,电动机输出减速后经同步皮带轮传动机构带动花键轴套旋转。6. According to claim 5, the large vacuum coating machine equipped with a workpiece hanging plate transfer cabin synchronous transport robot is characterized in that: the spline sleeve rotation drive mechanism is: a motor is provided on the bottom surface of the transition cabin bottom plate, and the motor output is reduced in speed and drives the spline sleeve to rotate through a synchronous pulley transmission mechanism. 7.根据权利要求4所述的设有工件挂板转舱同步运送机械手的大型真空镀膜机,其特征是:所述滚珠花键轴套机构之花键轴(31)上端面用螺钉固连过渡板(30),再用螺钉把过渡板向上固连运送机械手支撑架的下中心凸台的下端面上,该下中心凸台上端面用螺钉向上固连第一轴承座(27),该轴承座有中心通孔和阶梯内腔,中心转轴从中心通孔伸入第一轴承座内腔;中心转轴先套入第一平面球轴承(28),装入第一轴承座内腔第一阶梯孔,轴承外圈抵着内腔台阶限位,然后套入第二深沟球轴承(29)装入第二阶梯孔,该轴承外圈上端抵着内腔第二台阶,其下端扺着运送机械手支撑架下凸台限位。7. According to claim 4, a large vacuum coating machine with a workpiece hanging plate transfer cabin synchronous transport robot is characterized in that: the upper end face of the spline shaft (31) of the ball spline sleeve mechanism is fixedly connected to the transition plate (30) by screws, and then the transition plate is fixedly connected upward to the lower end face of the lower center boss of the transport robot support frame by screws, and the upper end face of the lower center boss is fixedly connected to the first bearing seat (27) by screws, and the bearing seat has a center through hole and a stepped inner cavity, and the center shaft extends from the center through hole into the inner cavity of the first bearing seat; the center shaft is first inserted into the first plane ball bearing (28), and installed into the first stepped hole of the inner cavity of the first bearing seat, and the outer ring of the bearing is limited by the inner cavity step, and then the second deep groove ball bearing (29) is inserted into the second stepped hole, and the upper end of the outer ring of the bearing is limited by the second step of the inner cavity, and the lower end is limited by the lower boss of the transport robot support frame. 8.根据权利要求1-7任意一项所述的设有工件挂板转舱同步运送机械手的大型真空镀膜机,其特征是:所述的工件挂板为一竖立的长方形挂板,板面上的四角部开有挂钩孔,挂钩孔前后面分别用对称的挂钩锁板封堵,挂钩锁板中央挖有挂钩孔,其形状是下圆而上端为收窄的槽孔。8. A large vacuum coating machine equipped with a workpiece hanging plate transfer cabin synchronous transport robot according to any one of claims 1-7, characterized in that: the workpiece hanging plate is an upright rectangular hanging plate, with hook holes on the four corners of the plate surface, the front and back of the hook holes are respectively blocked by symmetrical hook locking plates, and a hook hole is dug in the center of the hook locking plate, and its shape is a lower circle with a narrowed slot at the upper end.
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