CN113899477B - Testing temperature calibration jig and method - Google Patents
Testing temperature calibration jig and method Download PDFInfo
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- CN113899477B CN113899477B CN202111479622.3A CN202111479622A CN113899477B CN 113899477 B CN113899477 B CN 113899477B CN 202111479622 A CN202111479622 A CN 202111479622A CN 113899477 B CN113899477 B CN 113899477B
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- 238000012360 testing method Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000000523 sample Substances 0.000 claims abstract description 49
- 238000009529 body temperature measurement Methods 0.000 claims abstract description 41
- 230000005540 biological transmission Effects 0.000 claims abstract description 19
- 238000009434 installation Methods 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 238000003825 pressing Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000010998 test method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 13
- 238000009413 insulation Methods 0.000 abstract description 4
- 238000012795 verification Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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Abstract
The invention discloses a test temperature calibration jig and a test temperature calibration method, wherein the test temperature calibration jig comprises a high-temperature installation part and a temperature measurement display meter, the high-temperature installation part comprises a product equivalent carrying disc, a measurement temperature probe and a temperature detection thermocouple, a product installation groove is formed in the product equivalent carrying disc, the measurement temperature probe and the temperature detection thermocouple are installed on the product equivalent carrying disc, one end of the measurement temperature probe extends into the product installation groove, the other end of the measurement temperature probe is connected with the temperature detection thermocouple, and the temperature detection thermocouple is connected with the temperature measurement display meter through a temperature measurement transmission lead. According to the invention, the high-temperature installation part is arranged on the transmission turntable, and the transmission turntable sequentially conveys the high-temperature installation part to different temperature areas of the high-temperature equipment to detect the cavity temperature of different areas in the sealed heat insulation of the high-temperature equipment, so that the accurate real-time temperature verification of the high-temperature equipment can be realized.
Description
Technical Field
The invention relates to a test temperature calibration jig and a test temperature calibration method, and belongs to the technical field of semiconductor detection.
Background
Some packaged product manufacturing processes require high temperature testing to determine the suitability of the product for storage, transport, and use in high temperature climatic environments. The severity of the test depends on the temperature of the elevated temperature and the duration of exposure. The quality of the product after the high temperature test is generally checked according to the requirements specified in the technical conditions or technical agreements of the product. The influence of high temperature environment on the performance of the chip packaging product is reflected in that the resistance of the conductive material in the product is increased, so that the current changes, and the performance parameters of the chip packaging product are influenced.
The high-temperature test equipment used for producing packaged products needs to verify and confirm different temperature areas so as to verify the conformity of the temperature displayed by the high-temperature equipment and the actual measurement temperature, the direct purpose of the temperature measurement work is to ensure the uniformity of measurement units and the accuracy and reliability of measurement values, and the purpose is to ensure that whether the products meet the requirements of relevant performance parameters or not through the calibration of the measurement instruments in use, and to judge that the products meet the high-temperature requirements.
The existing high-temperature equipment temperature check has the following defects: because the high-temperature test equipment has a large volume, the temperature in the temperature cavity is high through some sealing heat insulation devices, and the conventional temperature measurement probe or thermometer which is checked externally cannot extend into the temperature cavity which extends into different temperature areas of the measurement equipment to measure the temperature, and usually only in the equipment shutdown state, the temperature measurement probe extends into the inlet and the outlet of the high-temperature equipment to measure the actual temperature value; or after the local sealing heat insulation device is removed, the temperature measuring probe is extended into the local temperature cavity closest to the high-temperature equipment, and the actual temperature value is measured. The temperature sample testing methods for the high-temperature equipment have the following defects: the measurement is inconvenient, and the measured temperature error is large; the cavity temperatures of different temperature areas of the high-temperature equipment cannot be accurately measured; the measured temperature sample cannot represent the packaged product itself.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention provides a test temperature calibration jig and a test temperature calibration method.
The technical scheme is as follows: in order to achieve the purpose, the invention adopts the technical scheme that:
the utility model provides a test temperature check-up tool, includes high temperature installation department and temperature measurement display list, the high temperature installation department includes that the product equivalence carries dish, temperature measurement probe, temperature measurement thermocouple, the product equivalence is carried and is provided with the product mounting groove on the dish, temperature measurement probe, temperature measurement thermocouple are installed and are carried the dish at the product equivalence, just in temperature measurement probe one end is deepened the product mounting groove, and the other end and temperature measurement thermocouple connection, be connected through temperature measurement transmission wire between temperature measurement thermocouple and the temperature measurement display list.
Preferably: the product equivalent carrying disc is provided with a product pressing plate, and the product pressing plate is arranged on an opening of the product mounting groove.
Preferably: the product equivalent carrying disc is connected with the product pressing plate through fastening screws.
A test temperature verification method comprises the following steps:
And 2, placing the tested product sample in the product mounting groove, and enabling the temperature measuring probe to be in contact with the tested product sample.
And 3, fixedly mounting the product pressing plate on the equivalent product carrying disc through a fastening screw, so that the tested product sample is fixed in the product mounting groove.
And 4, conveying the high-temperature installation part to different temperature areas of the high-temperature equipment in sequence by the conveying turntable, wherein the conveying process of the product pressing plate is equivalent to the conveying process of the packaged product in different temperature areas of the high-temperature equipment in production.
And 5, measuring temperature signals of the tested product sample in different temperature areas by the temperature measuring probe in real time, and converting the temperature signals of the tested product sample in different temperature areas into thermoelectric force signals by the temperature detecting thermocouple.
And 6, receiving the thermoelectromotive force signal by the temperature metering display meter, converting the thermoelectromotive force signal into a temperature data value, and then displaying the temperature data value of the tested product sample in each different temperature area in real time.
Preferably: and a temperature metering display meter is arranged outside the high-temperature area of the conveying turntable.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, the high-temperature installation part is arranged on the transmission turntable, and the transmission turntable sequentially conveys the high-temperature installation part to different temperature areas of the high-temperature equipment to detect the cavity temperature of different areas in the sealed heat insulation of the high-temperature equipment, so that the accurate real-time temperature verification of the high-temperature equipment can be realized. Therefore, the invention has the following advantages: 1. temperature checking and measuring are conveniently and quickly carried out; 2. the cavity temperature of different areas of the high-temperature equipment can be accurately measured in real time; 3. the temperature measured by the temperature jig is equivalent to the temperature of the product packaged by the product.
Drawings
Fig. 1 is a working principle diagram of the present invention.
Fig. 2 is a schematic diagram of the structure of the present invention.
Fig. 3 is a first structural diagram of the present invention.
Fig. 4 is a cross-sectional view of fig. 3.
Fig. 5 is an enlarged schematic view of a portion a in fig. 4.
Fig. 6 is a schematic diagram of an explosive structure according to the present invention.
Wherein, 1 is the equivalent year dish of product, 11 is the product clamp plate, 12 is the product mounting groove, 13 is fastening screw, 2 is the measuring temperature probe, 3 is the temperature detection thermocouple, 4 is the temperature measurement transmission wire, 5 is the temperature measurement display list, 6 is the product sample that is surveyed.
Detailed Description
The present invention is further illustrated by the following description in conjunction with the accompanying drawings and the specific embodiments, it is to be understood that these examples are given solely for the purpose of illustration and are not intended as a definition of the limits of the invention, since various equivalent modifications will occur to those skilled in the art upon reading the present invention and fall within the limits of the appended claims.
The utility model provides a test temperature check-up tool, is shown as figure 1-6, includes high temperature installation department and temperature measurement display list 5, the high temperature installation department includes that the product equivalence carries a set 1, temperature measurement probe 2, temperature detection thermocouple 3, the product equivalence is carried and is provided with product mounting groove 12 on the dish 1, temperature measurement probe 2, temperature detection thermocouple 3 install on the product equivalence carries a set 1, just 2 one end of temperature measurement probe is deepened in product mounting groove 12, and the other end is connected with temperature detection thermocouple 3, be connected through temperature measurement transmission wire 4 between temperature detection thermocouple 3 and the temperature measurement display list 5.
The product equivalent carrying disc 1 is provided with a product pressing plate 11, and the product pressing plate 11 is arranged on an opening of the product mounting groove 12. The product equivalent carrying disc 1 is connected with the product pressing plate 11 through a fastening screw 13.
As shown in fig. 1, the working principle is as follows: the temperature detection thermocouple 3 comprises a thermode A, a thermode B and a reference end, the temperature of the measurement end of the temperature measurement probe 2 is t, the temperature of the measurement end is in contact with the surface of a measured object, a loop is formed by the thermode A and the thermode B, the temperature of the reference end is t0, and a thermoelectromotive force EAB (t, t0) is generated in the loop. The temperature signal is converted into a thermoelectromotive signal, and the temperature of the measured medium is converted into a temperature value represented by a temperature measurement display meter 5 through a special compensation wire (temperature measurement transmission wire 4) connected with the measuring instrument.
The invention fixes the tested packaged product sample in the equivalent carrying disc of the product through the pressing plate, contacts the temperature measuring probe with the tested product sample, and displays the tested temperature on the temperature measuring display meter through the special temperature measuring transmission lead.
A test temperature verification method comprises the following steps:
And 2, placing the tested product sample 6 in the product mounting groove 12, and enabling the temperature measuring probe 2 to be in contact with the tested product sample 6.
And 3, fixedly mounting the product pressing plate 11 on the product equivalent carrying disc 1 through a fastening screw 13, so that the tested product sample 6 is fixed in the product mounting groove 12.
And 4, conveying the high-temperature installation part to different temperature areas of the high-temperature equipment in sequence by the conveying turntable, wherein the conveying process of the product pressing plate 11 is equivalent to the conveying process of the packaged product in different temperature areas of the high-temperature equipment in production.
And 5, measuring temperature signals of the tested product sample 6 in different temperature areas by the temperature measuring probe 2 in real time, and converting the temperature signals of the tested product sample 6 in different temperature areas into thermoelectromotive force signals by the temperature detecting thermocouple 3.
And 6, receiving the thermoelectromotive force signal by the temperature metering display table 5, converting the thermoelectromotive force signal into a temperature data value, and then displaying the temperature data value of the tested product sample 6 in different temperature areas in real time.
When the invention is used for testing and inspecting the temperature of high-temperature equipment, a high-temperature mounting part (a product equivalent carrying disc 1) is replaced and mounted in an equipment conveying turntable, a temperature metering display meter is mounted in a region outside a high-temperature region of the conveying turntable, measured temperature data values are collected through a test transmission lead, when the conveying turntable conveys the product equivalent carrying disc 1 to different temperature regions of the high-temperature equipment in sequence, the process that a packaged product is conveyed in different temperature regions of the high-temperature equipment in actual equivalent production is realized, and the real-time measurement of the temperature data values of the packaged product in different temperature regions is realized.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.
Claims (3)
1. A test method for testing a temperature calibration jig is characterized in that: the test temperature calibration jig comprises a high-temperature installation part and a temperature measurement display meter (5), wherein the high-temperature installation part comprises a product equivalent carrying disc (1), a temperature measurement probe (2) and a temperature detection thermocouple (3), a product installation groove (12) is formed in the product equivalent carrying disc (1), the temperature measurement probe (2) and the temperature detection thermocouple (3) are installed on the product equivalent carrying disc (1), one end of the temperature measurement probe (2) extends into the product installation groove (12), the other end of the temperature measurement probe is connected with the temperature detection thermocouple (3), and the temperature detection thermocouple (3) is connected with the temperature measurement display meter (5) through a temperature measurement transmission lead (4); a product pressing plate (11) is arranged on the product equivalent carrying disc (1), and the product pressing plate (11) is arranged on an opening of the product mounting groove (12); the method comprises the following steps:
step 1, mounting a high-temperature mounting part on a transmission turntable, wherein the high-temperature mounting part is connected with a temperature measurement display meter (5) through a temperature measurement transmission lead (4);
step 2, placing the tested product sample (6) in the product mounting groove (12), and enabling the temperature measuring probe (2) to be in contact with the tested product sample (6);
step 3, fixedly mounting a product pressing plate (11) on the product equivalent carrying disc (1) through a fastening screw (13) to fix a tested product sample (6) in a product mounting groove (12);
step 4, the conveying turntable conveys the high-temperature installation parts to different temperature areas of the high-temperature equipment in sequence, and the conveying process of the product pressing plate (11) is equivalent to the conveying process of the packaged products in different temperature areas of the high-temperature equipment in production;
step 5, the temperature measuring probe (2) measures the temperature signals of the measured product sample (6) in different temperature areas in real time, and the temperature detecting thermocouple (3) converts the temperature signals of the measured product sample (6) in different temperature areas into thermoelectromotive force signals;
and 6, receiving the thermoelectromotive force signal by the temperature metering display meter (5), converting the thermoelectromotive force signal into a temperature data value, and then displaying the temperature data value of the tested product sample (6) in different temperature areas in real time.
2. The method according to claim 1, wherein the step of testing the temperature calibration jig comprises: the product equivalent carrying disc (1) is connected with the product pressing plate (11) through a fastening screw (13).
3. The method according to claim 2, wherein the step of testing the temperature calibration jig comprises: the temperature metering display meter (5) is arranged outside the high-temperature area of the conveying turntable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111479622.3A CN113899477B (en) | 2021-12-07 | 2021-12-07 | Testing temperature calibration jig and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111479622.3A CN113899477B (en) | 2021-12-07 | 2021-12-07 | Testing temperature calibration jig and method |
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| Publication Number | Publication Date |
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| CN113899477A CN113899477A (en) | 2022-01-07 |
| CN113899477B true CN113899477B (en) | 2022-02-18 |
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Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2047539C3 (en) * | 1970-09-26 | 1973-09-20 | Gesellschaft Fuer Kernforschung Mbh, 7500 Karlsruhe | Thermocouple |
| JPH02298829A (en) * | 1989-05-15 | 1990-12-11 | Fuji Electric Co Ltd | heat treatment equipment |
| JP2860144B2 (en) * | 1990-06-19 | 1999-02-24 | 東京エレクトロン株式会社 | Plate temperature measuring device |
| JPH113868A (en) * | 1997-06-12 | 1999-01-06 | Nec Yamagata Ltd | Device and method for lamp annealing |
| KR20070083462A (en) * | 2004-07-23 | 2007-08-24 | 가부시키가이샤 아이.피.비. | Silicon wafer substrate jam stage, silicon wafer substrate temperature measurement |
| JP4888861B2 (en) * | 2005-11-17 | 2012-02-29 | 光照 木村 | Calibration method for current detection type thermocouple and current detection type thermocouple |
| WO2010088237A1 (en) * | 2009-01-30 | 2010-08-05 | Embedded Designs Inc. | Method and apparatus for measuring part temperature through a conveyorized thermal processor |
| CN104201125A (en) * | 2014-08-13 | 2014-12-10 | 南通富士通微电子股份有限公司 | Measuring method for hot-pressing product temperature curve |
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