CN113883053A - Totally-enclosed direct-current frequency conversion dry-type scroll vacuum pump - Google Patents
Totally-enclosed direct-current frequency conversion dry-type scroll vacuum pump Download PDFInfo
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- CN113883053A CN113883053A CN202111255364.0A CN202111255364A CN113883053A CN 113883053 A CN113883053 A CN 113883053A CN 202111255364 A CN202111255364 A CN 202111255364A CN 113883053 A CN113883053 A CN 113883053A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0021—Systems for the equilibration of forces acting on the pump
- F04C29/0028—Internal leakage control
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/06—Silencing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
- F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
- F04C29/128—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type of the elastic type, e.g. reed valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/50—Bearings
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Abstract
本发明公开了一种全封闭直流变频干式涡旋真空泵，属于真空泵技术领域。包括驱动主轴转动的电机，所述电机和主轴均位于机壳内，机壳底部连接底座，主轴上设有冷却降温机构，主轴顶部连接偏心轴，偏心轴通过自润滑轴承连接动涡旋盘，所述动涡旋盘通过浮动轴承与主支撑滑动连接，所述主支撑底部连接机壳，主支撑顶部连接定涡旋盘，定涡旋盘中部设有排气口，所述排气口处设有单向排气机构。本发明的有益效果是：采用全封闭结构，使真空泵能够满足更多、更复杂的环境，同时可以降低涡旋真空泵工作工程中产生的振动以及噪声。采用变频风冷机构，对真空泵的主要产热部件主轴以及动涡旋盘进行散热。
The invention discloses a fully enclosed direct current variable frequency dry scroll vacuum pump, which belongs to the technical field of vacuum pumps. It includes a motor that drives the main shaft to rotate, the motor and the main shaft are both located in the casing, the bottom of the casing is connected to the base, the main shaft is provided with a cooling and cooling mechanism, the top of the main shaft is connected to an eccentric shaft, and the eccentric shaft is connected to the movable scroll through self-lubricating bearings. The movable scroll is slidably connected to the main support through a floating bearing, the bottom of the main support is connected to the casing, the top of the main support is connected to the fixed scroll, the middle of the fixed scroll is provided with an exhaust port, and the exhaust port is Equipped with a one-way exhaust mechanism. The beneficial effects of the present invention are: adopting a fully enclosed structure, the vacuum pump can meet more and more complex environments, and at the same time, the vibration and noise generated in the working engineering of the vortex vacuum pump can be reduced. The frequency conversion air-cooling mechanism is adopted to dissipate heat from the main heat-generating components of the vacuum pump, the main shaft and the movable scroll.
Description
Technical Field
The invention relates to a totally-enclosed direct-current variable-frequency dry-type scroll vacuum pump, and belongs to the technical field of vacuum pumps.
Background
The working cavity of the scroll vacuum pump is formed by the meshing installation of a pair of scroll disks with the same structure and 180 degrees of phase difference. In the working process, the crankshaft drives the movable scroll plate to rotate around the main shaft under a certain eccentricity. Meanwhile, the anti-rotation mechanism ensures the phase difference between the movable scroll and the fixed scroll, and the crescent volume formed by the mutual meshing of the movable scroll and the fixed scroll generates periodic change, thereby realizing the air suction, compression and exhaust circulation of the scroll vacuum pump and achieving the purpose of forcibly conveying gas.
The main moving part of the scroll vacuum pump is only one movable scroll plate, so that the power transmission is simple, and the moving part in the pump and the pump cavity almost have no friction, so that the scroll vacuum pump has the advantages of stable operation, high volume efficiency, low vibration noise, high reliability and the like. Based on this, the scroll vacuum pump has been widely accepted in the industries of semiconductors, scientific instruments, medical equipment and the like.
In recent years, due to the limitation of application occasions, the traditional vacuum system is difficult to meet the requirements of cleanness, oil free and corrosion resistance, and the dry type scroll vacuum pump is vigorously developed and popularized. In the working process of the dry type scroll vacuum pump, no metal is contacted with metal in the pump cavity, and no friction exists in the pumping cavity element, so that the dry type scroll vacuum pump has the advantages of stable operation, low energy consumption, high reliability, compact structure and long service life.
With the rapid development of science and technology in China, the requirements of high and new technology products on vacuum degree and vibration noise performance are increasingly strict. For example, during the pharmaceutical process, too high a vacuum level may cause the drug to react, fail, or even deteriorate. In the processing process of semiconductor materials, the vacuum degree can seriously affect the quality of products, the materials can be oxidized due to the overhigh vacuum degree, and the products can be damaged due to the overlow vacuum degree. Most of the current dry-type scroll vacuum pumps are fixed frequency, the vacuum degree of the system can only be adjusted through a ball valve, electric energy is wasted, noise is large, and the development direction of green energy conservation is not met. More importantly, the vacuum pump is difficult to realize accurate control of the vacuum degree.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention aims to provide a totally-enclosed direct-current variable-frequency dry-type scroll vacuum pump which saves energy and realizes the adjustment of vacuum degree.
The technical scheme of the invention is as follows: a totally-enclosed direct-current frequency conversion dry-type scroll vacuum pump comprises a motor for driving a main shaft to rotate, wherein the motor and the main shaft are both positioned in a machine shell, the bottom of the machine shell is connected with a base, the main shaft is provided with a cooling mechanism, the top of the main shaft is connected with an eccentric shaft, the eccentric shaft is connected with a movable scroll plate through a self-lubricating bearing, the movable scroll plate is connected with the main support in a sliding way through the floating bearing, the bottom of the main support is connected with the casing, the top of the main support is connected with the fixed scroll plate, the middle part of the fixed scroll plate is provided with an exhaust port, the exhaust port department is equipped with one-way exhaust mechanism, decides the vortex dish side top and is equipped with the air inlet, moves the tooth a top and the sealed swing joint of deciding the vortex dish, decides the tooth b bottom of vortex dish and moves the sealed swing joint of vortex dish, is fixed with on the main tributary and prevents the rotation spacer pin, prevent that rotation spacer pin top extends to in the bottom recess of moving the vortex dish.
The cooling mechanism is a turbofan.
The one-way exhaust mechanism comprises a reed valve block located at the exhaust port, one end of the reed valve block is arranged at the top of the exhaust port side through a fastening bolt, a limiter is arranged at the top of the reed valve block, and the end part of the limiter is fixed through the fastening bolt.
The motor is a brushless DC motor, the brushless DC motor is connected with a power supply through a controller, the controller is connected with a processor, a vacuum degree standard value is preset in the processor, the processor is connected with a pressure sensor, and the detection end of the pressure sensor is located at an air inlet.
And a stator bushing made of nitrile rubber is arranged outside the motor.
The fixed scroll is provided with a sealing groove, a sealing strip is installed in the sealing groove, and the sealing strip is made of stainless steel-butyronitrile materials with self-lubricating performance.
Based on the technical means, the invention can obtain the following gain effects: (1) this frequency conversion vortex vacuum pump adopts totally closed structure, makes the vacuum pump can satisfy more, more complicated environment, can reduce vibration and the noise that produces in the work engineering of vortex vacuum pump simultaneously. (2) The main shaft of the vacuum pump, the movable scroll plate, the main support and other connecting parts are all bearings with self-lubricating performance, and the inner lining is made of Polytetrafluoroethylene (PTFE) material. The bearing can effectively reduce the friction between the main shaft and each component in the motion process, improve the wear resistance and ensure the reliability when the oil is not available. (3) When the main shaft rotates, the movable scroll is driven to generate radial disturbance, the floating bearing can balance the disturbance, leakage of compressed gas generated through axial and radial gaps is reduced, and backflow of the gas is reduced. (4) A variable-frequency air cooling mechanism is adopted to dissipate heat of a main shaft of a main heat-generating component of the vacuum pump and the movable scroll plate. The turbofan rotates along with the main shaft, reduces the temperature of the main shaft and the movable scroll plate, and prolongs the service life of the movable scroll plate and the main shaft. Under the condition of high rotation frequency of the vacuum pump, the friction between parts is strong and the temperature is high due to the fact that the rotation speed of the main shaft is high. The rotating speeds of the fan and the main shaft are consistent, and the cooling capacity is obviously enhanced.
Drawings
FIG. 1 is a block diagram of the present invention;
FIG. 2 is a structural view of the exhaust mechanism of the present invention;
FIG. 3 is an electrical control schematic of the present invention;
FIG. 4 is a diagram of an orbiting scroll structure;
fig. 5 is a structural view of a turbofan.
The reference numbers in the figures are as follows: 1. the air exhaust mechanism comprises 1.1 parts of reed valve plates, 1.2 parts of fastening bolts, 1.3 parts of a limiting stopper, 2 parts of a fixed scroll, 3 parts of a movable scroll, 4 parts of a main support, 5 parts of a shell, 6 parts of a cooling mechanism, 7 parts of a base, 8 parts of a main shaft, 9 parts of a stator bushing, 10 parts of a motor, 11 parts of a self-lubricating bearing, 12 parts of a floating bearing, 13 parts of an anti-rotation limiting pin, 14 parts of a pressure sensor, 15 parts of an air inlet.
Detailed Description
The invention will be further illustrated with reference to the following specific examples shown in figures 1 to 5:
a totally-enclosed direct-current frequency conversion dry-type scroll vacuum pump comprises a motor 10 for driving a main shaft 8 to rotate, wherein the motor 10 and the main shaft 8 are both positioned in a casing 5, the bottom of the casing 5 is connected with a base 7, a turbofan is arranged on the main shaft 8 and rotates synchronously with the main shaft, the temperature is reduced in the system operation process, the top of the main shaft 8 is connected with an eccentric shaft, the eccentric shaft is connected with a movable scroll 3 through a self-lubricating bearing 11, a lining of the self-lubricating bearing 11 is made of Polytetrafluoroethylene (PTFE) material, the bearing can effectively reduce the friction between the main shaft and each component in the main shaft movement process, the wear resistance is improved, the reliability in oil-free operation is ensured, the movable scroll 3 is in sliding connection with a main support 4 through a floating bearing 12, the floating bearing 12 provides reverse thrust for the movable scroll 3 in the operation process, the bottom of the main support 4 is connected with the casing 5, the top of the main support 4 is connected with the fixed scroll 2, the middle part of the fixed scroll 2 is provided with an exhaust port, the exhaust port is provided with a one-way exhaust mechanism 1, the one-way exhaust mechanism 1 comprises a reed valve block 1.1 positioned at the exhaust port, one end of the reed valve block 1.1 is arranged at the top of the exhaust port side through a fastening bolt 1.2, the top of the reed valve block 1.1 is provided with a limiter 1.3, the end part of the limiter 1.3 is fixed through the fastening bolt 1.2, the limiter 1.3 can prevent the reed valve block 1.1 from overtravel, the reed valve block is made of stainless steel and has good rigidity, the fastening bolt 1.2 is fixed to ensure that the reed valve block 1.1 can exhaust well and can be tightly closed after exhaust, the air return phenomenon is prevented, the top of the side of the fixed scroll 2 is provided with an air inlet 15, the top of the tooth a of the movable scroll 3 is in sealing movable connection with the fixed scroll 2, the bottom of the tooth b of the fixed scroll 2 is in sealing movable connection with the movable scroll 3, an anti-rotation limiting pin 13 is fixed on the main support 4, the top of the anti-rotation limiting pin 13 extends into a groove at the bottom of the movable scroll 3, and the anti-rotation limiting pin 13 is matched with the groove at the bottom of the movable scroll 3, so that the movable scroll 3 can only make revolution translation along with the eccentric shaft in a plane.
The motor 10 is a brushless DC motor, the brushless DC motor is connected with a power supply through a controller, the controller is connected with a processor, a vacuum degree standard value is preset in the processor, the processor is connected with a pressure sensor 14, and the detection end of the pressure sensor 14 is positioned at an air inlet 15. A pressure sensor 14 at an air inlet 15 detects the internal pressure of the system, data are transmitted to a processor, the processor adjusts the pulse duty ratio through a controller according to the vacuum degree requirement set by a user, the rotation frequency of the motor is changed to realize accurate adjustment of the vacuum degree of a pumped area, the rotation frequency of the motor is changed by changing voltage, and when the voltage is increased, the rotation speed of the motor is increased; when the voltage decreases, the motor speed decreases. The controller can change the voltage of the motor by adjusting the duty ratio of the pulse width modulation signal, thereby realizing the adjustment of the rotation frequency of the motor. According to the vacuum degree requirement set by the user, the controller outputs a voltage pulse signal to drive the motor to rotate, and a pressure sensor probe at the air inlet senses the pressure (P) of the working areaa). Degree of vacuum (V)r) Obtained according to the following formula:
Pv＝Patm-Pa
Pvis the relative pressure, PatmIs atmospheric pressure, PaIs the pressure of the working area.
And a stator bushing 9 made of nitrile rubber is arranged outside the motor 10. The bushing has excellent heat resistance and wear resistance. The motor can still be protected at the temperature of 90 ℃, and the noise of the motor under the high-frequency operation is reduced.
The fixed scroll 2 is provided with a sealing groove, a sealing strip is installed in the sealing groove, and the sealing strip is made of stainless steel-butyronitrile materials with self-lubricating performance. The sealing strip has good strength and lubricating performance. The leakage of compressed gas is prevented, and the friction loss between the movable scroll and the fixed scroll is reduced, so that the volumetric efficiency of the vacuum pump is improved.
Under the action of the anti-rotation mechanism, the movable vortex plate revolves around the main shaft in a plane. The gas enters a crescent closed area between the movable vortex plate and the fixed vortex plate from the gas inlet. The contact point between the movable and the fixed scroll plates moves along the curved surface of the scroll so as to realize the suction, compression and exhaust of the vacuum pump. The vacuum degree is gradually increased to be close to the set vacuum degree requirement. The controller reduces the duty ratio of the pulse, reduces the rotating speed of the driving motor and enables the driving motor to stably run, and the vacuum degree of the working area is stabilized at the vacuum degree required by a user. The main shaft adopted by the vacuum pump is a motor section and an eccentric shaft section which are integrally formed. The main shaft has excellent strength and rigidity, and ensures that the vacuum pump has good reliability in the long-term working process.
When the pressure inside the scroll pump is lower than the atmospheric pressure, the exhaust mechanism can eliminate the phenomena of insufficient compression ratio and air return. The tail part of a reed valve plate 1.1 of the exhaust mechanism is arranged on the end surface of the fixed scroll through a fastening bolt 1.2. The head of the valve plate is circular, and the diameter of the valve plate is 2mm larger than the size of the exhaust hole. In the exhaust process, the reed valve block 1.1 is deformed and opened by the impact of gas, and the limiter 1.3 protects the reed valve block 1.1 from being damaged by the impact of gas. The reed valve plate 1.1 is made of stainless steel and has good rigidity. The reed valve plate can exhaust well and can be tightly closed after exhausting by controlling the opening height of the limiter, so that the reed valve plate can exhaust fully and can prevent the air return phenomenon.
The wind power of the turbine fan blades is strong, the propagation distance is long, and the heat dissipation effect is better. The turbine fan blades are arranged on the main shaft through a shaft end retainer ring, a bearing and screws and rotate along with the main shaft, so that the cooling and the cooling of the movable scroll plate of the main heat generating component of the vacuum pump are realized. Under the high rotation frequency of the vacuum pump, the friction between parts is strong, and the temperature is high. The fan rotates along with the main shaft, so that the rotating speed of the fan is obviously improved, the cooling capacity is obviously enhanced, and the reliability of parts such as the main shaft, the movable scroll plate and the like is improved. Under the low-frequency rotation frequency, the friction between the movable scroll plate of the vacuum pump and each component is relatively weak, the heat of the movable scroll plate is not high, the heat dissipation function is met, and meanwhile, the energy loss of the fan can be effectively reduced, and the energy consumption is reduced.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (6)
1. A totally-enclosed direct-current frequency conversion dry-type scroll vacuum pump is characterized by comprising a motor (10) for driving a main shaft (8) to rotate, wherein the motor (10) and the main shaft (8) are both positioned in a casing (5), the bottom of the casing (5) is connected with a base (7), the main shaft (8) is provided with a cooling mechanism (6), the top of the main shaft (8) is connected with an eccentric shaft, the eccentric shaft is connected with a movable scroll (3) through a self-lubricating bearing (11), the movable scroll (3) is in sliding connection with a main support (4) through a floating bearing (12), the bottom of the main support (4) is connected with the casing (5), the top of the main support (4) is connected with a fixed scroll (2), the middle of the fixed scroll (2) is provided with an exhaust port, the exhaust port is provided with a one-way exhaust mechanism (1), the top of the side of the fixed scroll (2) is provided with an air inlet (15), and the top of a tooth a of the movable scroll (3) is in sealing connection with the fixed scroll (2), the bottom of the tooth b of the fixed scroll (2) is movably connected with the movable scroll (3) in a sealing manner, an anti-rotation limiting pin (13) is fixed on the main support (4), and the top of the anti-rotation limiting pin (13) extends into a groove at the bottom of the movable scroll (3).
2. A totally enclosed direct current variable frequency dry scroll vacuum pump according to claim 1, wherein the cooling down mechanism (6) is a turbofan.
3. The totally-enclosed direct-current frequency conversion dry scroll vacuum pump according to claim 1, wherein the one-way exhaust mechanism (1) comprises a reed valve block (1.1) located at the exhaust port, one end of the reed valve block (1.1) is arranged at the top of the exhaust port side through a fastening bolt (1.2), a limiter (1.3) is arranged at the top of the reed valve block (1.1), and the end of the limiter (1.3) is fixed through the fastening bolt (1.2).
4. A totally enclosed direct current frequency conversion dry type scroll vacuum pump according to claim 1, wherein the motor (10) is a dc brushless motor, the dc brushless motor is connected with a power supply through a controller, the controller is connected with a processor, a vacuum standard value is preset in the processor, the processor is connected with a pressure sensor (14), and a detection end of the pressure sensor (14) is located at the air inlet (15).
5. A totally enclosed direct current variable frequency dry scroll vacuum pump according to claim 1, wherein a stator bushing (9) of nitrile rubber is provided outside the motor (10).
6. A totally-enclosed direct-current frequency conversion dry-type scroll vacuum pump as claimed in claim 1, wherein the fixed scroll (2) is provided with a sealing groove, a sealing strip is installed in the sealing groove, and the sealing strip is made of stainless steel-butyronitrile material with self-lubricating property.
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| CN202111255364.0A CN113883053A (en) | 2021-10-27 | 2021-10-27 | Totally-enclosed direct-current frequency conversion dry-type scroll vacuum pump |
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| CN202111255364.0A CN113883053A (en) | 2021-10-27 | 2021-10-27 | Totally-enclosed direct-current frequency conversion dry-type scroll vacuum pump |
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