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CN113860916B - Corrosion-resistant niobium titanium carbide coating, corrosion-resistant silicon carbide container and preparation method and application thereof - Google Patents

Corrosion-resistant niobium titanium carbide coating, corrosion-resistant silicon carbide container and preparation method and application thereof Download PDF

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CN113860916B
CN113860916B CN202111083862.1A CN202111083862A CN113860916B CN 113860916 B CN113860916 B CN 113860916B CN 202111083862 A CN202111083862 A CN 202111083862A CN 113860916 B CN113860916 B CN 113860916B
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杨育圣
赵增武
赵冉
张曙岩
王拓尧
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Inner Mongolia University of Science and Technology
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Abstract

本发明提供了一种碳化铌钛耐侵蚀涂层,化学组成包括碳化铌和碳化钛。所述化学组成的碳化铌钛耐侵蚀涂层能够有效防止熔融氟化物‑氧化物造成侵蚀,相比于没有耐侵蚀保护层的材料,在1400~1800℃范围内碳化铌‑碳化钛为固态,在用于碳化硅电解槽表面时,能够有效防止电解质与碳化硅电解槽接触造成侵蚀进而影响电解提取金属的过程。该碳化铌钛耐侵蚀涂层用于电解槽时,能够减少电解质中的Fe2O3、Nb2O5、TiO2与电解槽基体材料发生反应造成化学侵蚀,也能阻止电解质中的O2‑、F对电解槽基体材料造成的热侵蚀,能够有效保障电解提取金属的顺利进行。

Figure 202111083862

The invention provides a niobium-titanium carbide corrosion-resistant coating, the chemical composition includes niobium carbide and titanium carbide. The niobium-titanium carbide corrosion-resistant coating of the chemical composition can effectively prevent the erosion caused by the molten fluoride-oxide. Compared with the material without the corrosion-resistant protective layer, the niobium carbide-titanium carbide is solid in the range of 1400-1800 °C, When used on the surface of a silicon carbide electrolytic cell, it can effectively prevent the electrolyte from contacting the silicon carbide electrolytic cell and cause erosion, thereby affecting the process of electrolytic extraction of metals. When the niobium-titanium carbide corrosion-resistant coating is used in an electrolytic cell, it can reduce the chemical corrosion caused by the reaction between Fe 2 O 3 , Nb 2 O 5 , TiO 2 in the electrolyte and the base material of the electrolytic cell, and can also prevent O 2 in the electrolyte. , F The thermal erosion of the base material of the electrolytic cell can effectively ensure the smooth progress of electrolytic extraction of metals.

Figure 202111083862

Description

耐侵蚀碳化铌钛涂层、耐侵蚀碳化硅容器及其制备方法和 应用Erosion-resistant niobium-titanium carbide coating, erosion-resistant silicon carbide container and preparation method thereof application

技术领域technical field

本发明涉及耐侵蚀材料技术领域,尤其涉及一种耐侵蚀碳化铌钛涂层、耐侵蚀碳化硅容器及其制备方法和应用。The invention relates to the technical field of erosion-resistant materials, in particular to an erosion-resistant niobium-titanium carbide coating, an erosion-resistant silicon carbide container, and a preparation method and application thereof.

背景技术Background technique

白云鄂博矿是举世闻名的铁、铌、稀土共伴生矿床,相比较其他矿物,白云鄂博矿含有约20%的萤石,这些氟化物的存在对高温实验时的耐侵蚀材料提出了更高的要求。由于氟化物的存在,现有的高温陶瓷材料很难满足长时间工作的要求。随着近年来碳达峰碳中和的要求,电化学清洁冶金已经在白云鄂博矿物直接提取金属上得到了应用。在电化学提取白云鄂博矿物中的金属时,由于高温氧化物-氟化物体系的存在,坩埚材料需要满足耐高温、耐电化学侵蚀、耐氟化物侵蚀、耐氧化物侵蚀、电惰性、可加工性能好等要求,但是目前能够在高温氧化物-氟化物体系电化学冶金时长时间使用的耐侵蚀坩埚材料非常有限,Bayan Obo Mine is a world-famous co-associated deposit of iron, niobium and rare earth. Compared with other minerals, Bayan Obo Mine contains about 20% fluorite. The existence of these fluorides puts forward higher corrosion resistance materials in high temperature experiments. Require. Due to the existence of fluoride, the existing high-temperature ceramic materials are difficult to meet the requirements of long-term work. With the requirement of carbon neutralization in recent years, electrochemical clean metallurgy has been applied in the direct extraction of metals from Bayan Obo minerals. When electrochemically extracting metals from Bayan Obo minerals, due to the existence of a high-temperature oxide-fluoride system, the crucible material needs to meet the requirements of high temperature resistance, electrochemical corrosion resistance, fluoride corrosion resistance, oxide corrosion resistance, electrical inertness, and machinability. However, the corrosion-resistant crucible materials that can be used for a long time in the electrochemical metallurgy of the high-temperature oxide-fluoride system are very limited.

目前,性质优良的高温陶瓷材料,例如氧化锆、氮化硅、氮化硼、碳化硅等材料常被用作高温熔体实验的坩埚材料,但当高温熔体中含有卤化物,特别是含有氟化物时,这些高温陶瓷材料很难长时间保持高温化学惰性。同时白云鄂博矿中又有含铁、铌、钛等组成的矿物,这些矿物高温时易于这些高温陶瓷材料反应。目前常用的高温陶瓷材料都会与熔体发生反应,造成化学侵蚀或热侵蚀,目前还未见在白云矿为电解质进行金属铁、铌、钛的提取时合适电解槽材料的报道。At present, high-temperature ceramic materials with excellent properties, such as zirconia, silicon nitride, boron nitride, silicon carbide and other materials are often used as crucible materials for high-temperature melt experiments, but when the high-temperature melt contains halides, especially those containing In the presence of fluorides, it is difficult for these high temperature ceramic materials to remain chemically inert at high temperatures for extended periods of time. At the same time, there are minerals containing iron, niobium, titanium, etc. in the Bayan Obo mine. These minerals are easy to react with these high-temperature ceramic materials at high temperature. At present, the commonly used high-temperature ceramic materials will react with the melt, resulting in chemical erosion or thermal erosion. There is no report of suitable electrolytic cell materials when dolomite is used as the electrolyte for the extraction of metallic iron, niobium, and titanium.

发明内容SUMMARY OF THE INVENTION

有鉴于此,本发明提供一种耐侵蚀碳化铌钛涂层、耐侵蚀碳化硅容器及其制备方法和应用,本发明提供的耐侵蚀碳化铌钛涂层能够耐高温氧化物-氟化物体系的长时间高温侵蚀,具体的能够在1800℃以下的高温条件下,耐氧化物-氟化物体系的长时间高温侵蚀和化学侵蚀。In view of this, the present invention provides an erosion-resistant niobium-titanium carbide coating, an erosion-resistant silicon carbide container, and a preparation method and application thereof. Long-term high-temperature erosion, specifically, it can resist long-term high-temperature erosion and chemical erosion of oxide-fluoride systems under high temperature conditions below 1800 °C.

本发明提供了一种碳化铌钛耐侵蚀涂层,化学组成包括碳化铌和碳化钛。The invention provides a niobium-titanium carbide corrosion-resistant coating, the chemical composition includes niobium carbide and titanium carbide.

优选的,所述碳化铌钛耐侵蚀涂层的厚度为40~150μm。Preferably, the thickness of the niobium-titanium carbide corrosion-resistant coating is 40-150 μm.

本发明提供了一种耐侵蚀碳化硅容器,包括碳化硅容器基体和吸附在所述碳化硅容器基体内表面的碳化铌钛耐侵蚀涂层,所述碳化铌钛耐侵蚀涂层上述技术方案所述的碳化铌钛耐侵蚀涂层。The present invention provides an erosion-resistant silicon carbide container, comprising a silicon carbide container base and a niobium-titanium carbide erosion-resistant coating adsorbed on the inner surface of the silicon carbide container base. Niobium-titanium carbide corrosion-resistant coating described above.

优选的,所述碳化硅容器基体为碳化硅电解槽。Preferably, the silicon carbide container base is a silicon carbide electrolytic cell.

本发明提供了制备上述技术方案所述碳化铌钛耐侵蚀涂层的原料,包括以下质量百分含量的组分:The present invention provides raw materials for preparing the niobium-titanium carbide erosion-resistant coating described in the above technical solution, including the following components by mass percentage:

5~30%的CaO、10~50%的SiO2、5~40%的CaF2、0~20%的CeO2、2.5~25%的TiO2、2.5~25%的Nb2O5和2.5~25%的Fe2O35-30% CaO, 10-50% SiO 2 , 5-40% CaF 2 , 0-20% CeO 2 , 2.5-25% TiO 2 , 2.5-25% Nb 2 O 5 and 2.5 ~ 25 % Fe2O3 .

本发明提供了上述技术方案所述碳化铌钛耐侵蚀涂层或上述技术方案所述耐侵蚀碳化硅容器的制备方法,包括以下步骤:The present invention provides the preparation method of the corrosion-resistant niobium-titanium carbide coating described in the above technical solution or the corrosion-resistant silicon carbide container described in the above technical solution, comprising the following steps:

将上述技术方案所述原料置于碳化硅容器基体内;The raw material described in the above technical solution is placed in the silicon carbide container base;

在保护气氛中,将放有所述原料的碳化硅容器加热升温后保温,所述升温和保温的过程中,所述原料变为液相与所述碳化硅坩埚的内表面接触发生反应,在所述碳化硅容器基体内原位高温反应形成碳化铌钛耐侵蚀涂层,所述保温的温度为1300~1800℃。In a protective atmosphere, the silicon carbide container in which the raw material is placed is heated and then kept warm. During the process of heating and holding, the raw material changes into a liquid phase and reacts with the inner surface of the silicon carbide crucible. The in-situ high-temperature reaction in the silicon carbide container substrate forms a niobium-titanium carbide corrosion-resistant coating, and the temperature of the heat preservation is 1300-1800°C.

优选的,所述加热升温包括连续升温或分段升温,所述连续升温的升温速率为1~50℃/min;Preferably, the heating and heating includes continuous heating or segmented heating, and the heating rate of the continuous heating is 1 to 50°C/min;

所述分段升温包括以下步骤:The step-by-step heating includes the following steps:

以第一升温速率升温至中间温度,所述第一升温速率为1~50℃/min,所述中间温度为500~1300℃;heating up to an intermediate temperature at a first heating rate, the first heating rate is 1-50°C/min, and the intermediate temperature is 500-1300°C;

以第二升温速率由所述中间温度升温至保温温度,所述第二升温速率为1~50℃/min,所述保温温度为1300~1800℃。The temperature is raised from the intermediate temperature to the holding temperature at a second heating rate, the second heating rate is 1-50°C/min, and the holding temperature is 1300-1800°C.

优选的,所述保温的时间为12~48h。Preferably, the incubation time is 12-48h.

优选的,所述保温后还包括:将保温得到的碳化硅容器冷却后倒置,重复所述加热升温和保温。Preferably, after the heat preservation, the method further comprises: inverting the silicon carbide container obtained by the heat preservation after cooling, and repeating the heating, temperature increase and heat preservation.

本发明提供了上述技术方案所述耐侵蚀碳化硅容器在耐熔融氟化物-氧化物侵蚀中的应用。The present invention provides the application of the corrosion-resistant silicon carbide container described in the above technical solution in corrosion-resistant molten fluoride-oxide.

本发明提供了一种碳化铌钛耐侵蚀涂层,化学组成包括碳化铌和碳化钛。所述化学组成的碳化铌钛耐侵蚀涂层能够有效防止熔融氟化物-氧化物造成侵蚀,相比于没有耐侵蚀保护层的材料,在1400~1800℃范围内碳化铌-碳化钛为固态,在用于碳化硅电解槽表面时,能够有效防止电解质与碳化硅电解槽接触造成侵蚀进而影响电解提取金属的过程。该碳化铌钛耐侵蚀涂层用于电解槽时,能够减少电解质中的Fe2O3、Nb2O5、TiO2与电解槽基体材料发生反应造成化学侵蚀,也能阻止电解质中的O2-、F-对电解槽基体材料造成的热侵蚀,能够有效保障电解提取金属的顺利进行。The invention provides a niobium-titanium carbide corrosion-resistant coating, the chemical composition includes niobium carbide and titanium carbide. The chemical composition of the niobium-titanium carbide corrosion-resistant coating can effectively prevent the erosion caused by the molten fluoride-oxide. Compared with the material without the corrosion-resistant protective layer, the niobium carbide-titanium carbide is solid in the range of 1400-1800 °C, When used on the surface of a silicon carbide electrolytic cell, it can effectively prevent the electrolyte from contacting the silicon carbide electrolytic cell and cause erosion, thereby affecting the process of electrolytic extraction of metals. When the niobium-titanium carbide corrosion-resistant coating is used in an electrolytic cell, it can reduce the chemical corrosion caused by the reaction between Fe 2 O 3 , Nb 2 O 5 , TiO 2 in the electrolyte and the base material of the electrolytic cell, and can also prevent O 2 in the electrolyte. - , F - The thermal erosion of the base material of the electrolytic cell can effectively ensure the smooth progress of the electrolytic extraction of metals.

本发明还提供了制备所述碳化铌钛耐侵蚀层的原料和制备方法,所述原料包括CaO、SiO2、CaF2、CeO2、TiO2、Nb2O5和Fe2O3,以所述原料制备耐侵蚀层时,以碳化硅容器为基体,将原料加入到碳化硅容器中,通过升高温度使原料变为液相与碳化硅容器接触并发生反应,碳化钛对碳化铌和碳化硅具有较强的溶解度,在液相原料与碳化硅容器接触后生成的碳化铌-碳化钛吸附在碳化硅容器内表面,从而形成包括碳化铌和碳化钛的耐侵蚀层。The present invention also provides raw materials and a preparation method for preparing the niobium-titanium carbide corrosion-resistant layer, the raw materials include CaO, SiO 2 , CaF 2 , CeO 2 , TiO 2 , Nb 2 O 5 and Fe 2 O 3 , so that the When preparing the corrosion-resistant layer from the above-mentioned raw materials, the silicon carbide container is used as the matrix, the raw material is added into the silicon carbide container, and the raw material is changed into a liquid phase by increasing the temperature to contact and react with the silicon carbide container. Silicon has strong solubility, and the niobium carbide-titanium carbide formed after the liquid-phase raw material is contacted with the silicon carbide container is adsorbed on the inner surface of the silicon carbide container, thereby forming an erosion-resistant layer including niobium carbide and titanium carbide.

本发明提供的制备方法使用碳化硅材质的容器作为基体,加工性好,在容器内表面原位制备的碳化铌钛耐侵蚀层,不受容器形状的影响,且制备耐侵蚀层的工艺简单、操作简便、耐侵蚀层形貌容易控制。The preparation method provided by the invention uses a container made of silicon carbide as a substrate, and has good processability. The niobium-titanium carbide corrosion-resistant layer prepared in-situ on the inner surface of the container is not affected by the shape of the container, and the process for preparing the corrosion-resistant layer is simple, The operation is simple and the morphology of the corrosion-resistant layer is easy to control.

进一步的,本发明提供的方法增加反应时间能够增加侵蚀层厚度;增加原料中的TiO2、Nb2O5、Fe2O3(<17.5wt%)的含量,能够提高侵蚀层的致密性,进一步提高了耐侵蚀效果。Further, increasing the reaction time in the method provided by the present invention can increase the thickness of the erosion layer; increasing the content of TiO 2 , Nb 2 O 5 , Fe 2 O 3 (<17.5wt%) in the raw material can improve the compactness of the erosion layer, The erosion resistance effect is further improved.

附图说明Description of drawings

为了更清楚地说明本发明实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图。In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.

图1为本发明实施例提供的耐侵蚀碳化硅电解槽应用示意图;1 is an application schematic diagram of an erosion-resistant silicon carbide electrolytic cell provided by an embodiment of the present invention;

图2为本发明实施例原位高温反应制备耐侵蚀层的加热示意图;Fig. 2 is the heating schematic diagram of preparing the corrosion-resistant layer by in-situ high temperature reaction according to the embodiment of the present invention;

图3为本发明实施例原位高温反应制备耐侵蚀层的盐去除示意图;3 is a schematic diagram of salt removal of an erosion-resistant layer prepared by an in-situ high-temperature reaction according to an embodiment of the present invention;

图4为本发明实施例制备得到的耐侵蚀碳化硅电解槽截面的扫描电镜图;Fig. 4 is the scanning electron microscope picture of the corrosion-resistant silicon carbide electrolytic cell section prepared by the embodiment of the present invention;

图5为本发明实施例制备得到的碳化铌钛耐侵蚀层的成分图;5 is a composition diagram of a niobium-titanium carbide corrosion-resistant layer prepared in an embodiment of the present invention;

图6为本发明比较例1制备得到的碳化钛侵蚀保护层的扫描电镜图;6 is a scanning electron microscope image of the titanium carbide erosion protective layer prepared in Comparative Example 1 of the present invention;

图7为本发明比较例1制备得到的碳化钛侵蚀保护层的成分图;7 is a composition diagram of the titanium carbide erosion protection layer prepared in Comparative Example 1 of the present invention;

图8为本发明比较例2制备得到的碳化铌侵蚀保护层的扫描电镜图;Fig. 8 is the scanning electron microscope image of the niobium carbide erosion protective layer prepared by comparative example 2 of the present invention;

图9为本发明比较例2制备得到的碳化铌侵蚀保护层的成分图;9 is a composition diagram of the niobium carbide corrosion protection layer prepared in Comparative Example 2 of the present invention;

图10为本发明比较例3制备得到的碳化钛-碳化铌及掺杂部分盐的侵蚀层的扫描电镜图;10 is a scanning electron microscope image of the titanium carbide-niobium carbide and the etched layer doped with partial salt prepared in Comparative Example 3 of the present invention;

图11为本发明实施例4制备得到的耐侵蚀层的扫描电镜图;11 is a scanning electron microscope image of the corrosion-resistant layer prepared in Example 4 of the present invention;

图12为本发明得到的无侵蚀保护层的坩埚进行实验后的检测图。Fig. 12 is an inspection diagram of the crucible obtained by the present invention without an erosion protective layer after an experiment.

具体实施方式Detailed ways

本发明提供了一种碳化铌钛耐侵蚀层,化学组成包括碳化铌和碳化钛。The invention provides a niobium-titanium carbide corrosion-resistant layer, the chemical composition includes niobium carbide and titanium carbide.

本发明提供的碳化铌钛耐侵蚀层中铌元素和钛元素的原子比优选为1:1~1:3.5;所述碳化铌钛耐侵蚀层优选包括以下原子百分含量的元素:54.2%的C、34.7%的Ti和9.8%的Nb。在本发明中,所述碳化铌钛耐侵蚀层的厚度优选为40~150μm,更优选为50μm~150μm;在本发明的实施例中,所述碳化铌钛耐侵蚀层的厚度可具体为50μm、80μm、100μm或150μm。The atomic ratio of niobium element and titanium element in the niobium-titanium carbide corrosion-resistant layer provided by the present invention is preferably 1:1 to 1:3.5; the niobium-titanium carbide corrosion-resistant layer preferably includes the following elements in atomic percentage: 54.2% of C, 34.7% Ti and 9.8% Nb. In the present invention, the thickness of the niobium-titanium carbide corrosion-resistant layer is preferably 40-150 μm, more preferably 50-150 μm; in the embodiment of the present invention, the thickness of the niobium-titanium carbide corrosion-resistant layer may be specifically 50 μm , 80μm, 100μm or 150μm.

在本发明中,所述碳化铌钛耐侵蚀层用于碳化硅容器表面,提供了一种耐侵蚀碳化硅容器。在本发明中,所述耐侵蚀碳化硅容器包括碳化硅容器基体和吸附在所述碳化硅容器基体内表面的碳化铌耐侵蚀涂层,所述碳化铌钛耐侵蚀层为上述技术方案所述碳化铌钛耐侵蚀层。In the present invention, the niobium-titanium carbide erosion-resistant layer is used on the surface of the silicon carbide container, thereby providing an erosion-resistant silicon carbide container. In the present invention, the erosion-resistant silicon carbide container includes a silicon carbide container base and a niobium carbide erosion-resistant coating adsorbed on the inner surface of the silicon carbide container base, and the niobium-titanium carbide erosion-resistant coating is described in the above technical solution Niobium carbide titanium corrosion resistant layer.

本发明对所述碳化硅容器的种类没有特殊的限制,可以为任意碳化硅材质的容器,如碳化硅电解池、碳化硅坩埚。The present invention has no special limitation on the type of the silicon carbide container, which can be any container made of silicon carbide, such as a silicon carbide electrolytic cell and a silicon carbide crucible.

为了制备上述碳化铌钛耐侵蚀层,本发明还提供了制备原料,包括以下质量百分含量的组分:In order to prepare the above-mentioned niobium-titanium carbide corrosion-resistant layer, the present invention also provides preparation raw materials, including the following components by mass percentage:

5~30%的CaO、10~50%的SiO2、5~40%的CaF2、0~20%的CeO2、2.5~25%的TiO2、2.5~25%的Nb2O5和2.5~25%的Fe2O35-30% CaO, 10-50% SiO 2 , 5-40% CaF 2 , 0-20% CeO 2 , 2.5-25% TiO 2 , 2.5-25% Nb 2 O 5 and 2.5 ~ 25 % Fe2O3 .

在本发明中,所述制备原料优选包括质量百分含量为10~25%的CaO,更优选为15~20%;In the present invention, the preparation raw materials preferably include CaO with a mass percentage content of 10-25%, more preferably 15-20%;

所述制备原料优选包括质量百分含量为15~45%的SiO2,更优选为30~42%;The preparation raw materials preferably include SiO 2 with a mass percentage content of 15-45%, more preferably 30-42%;

所述制备原料优选包括质量百分含量为10~30%的CaF2,更优选为15~25%,最优选为15~20%;The preparation raw material preferably comprises 10-30% by mass of CaF 2 , more preferably 15-25%, most preferably 15-20%;

所述制备原料优选包括质量百分含量为2~15%的CeO2,更优选为5~10%;The preparation raw material preferably includes CeO 2 with a mass percentage content of 2-15%, more preferably 5-10%;

所述制备原料优选包括质量百分含量为5~20%的TiO2,更优选为7.5~15%;The preparation raw material preferably comprises TiO 2 with a mass percentage content of 5-20%, more preferably 7.5-15%;

所述制备原料优选包括质量百分含量为4~20%的Nb2O5,更优选为5~15%;The preparation raw materials preferably include Nb 2 O 5 with a mass percentage content of 4-20%, more preferably 5-15%;

所述制备原料优选包括质量百分含量为4~20%的Fe2O3,更优选为5~17.5%。The preparation raw material preferably includes Fe 2 O 3 with a mass percentage content of 4-20%, more preferably 5-17.5%.

在本发明的实施例中,所述制备原料优选包括:15.5%的CaO、42%的SiO2、20%的CaF2、5%的CeO2、7.5%的TiO2、5%的Nb2O5和5%的Fe2O3In the embodiment of the present invention, the preparation raw materials preferably include: 15.5% CaO, 42% SiO 2 , 20% CaF 2 , 5% CeO 2 , 7.5% TiO 2 , 5% Nb 2 O 5 and 5% Fe 2 O 3 .

在本发明中,所述制备原料中的各组分优选为粉末状,所述粉末的粒度优选为大于等于200目。在本发明中,所述制备原料中的各组分的纯度优选为>98%。In the present invention, each component in the preparation raw material is preferably in powder form, and the particle size of the powder is preferably greater than or equal to 200 mesh. In the present invention, the purity of each component in the preparation raw material is preferably >98%.

本发明还提供了以上述技术方案所述制备原料制备碳化铌钛耐侵蚀层或耐侵蚀碳化硅容器的制备方法,包括以下步骤:The present invention also provides a preparation method for preparing a niobium-titanium carbide erosion-resistant layer or an erosion-resistant silicon carbide container by using the raw materials described in the above technical solution, comprising the following steps:

将上述技术方案所述原料置于碳化硅容器基体内;The raw material described in the above technical solution is placed in the silicon carbide container base;

在保护气氛中,将放有所述原料的碳化硅容器加热升温后保温,所述升温和保温的过程中,所述原料变为液相与所述碳化硅坩埚的内表面接触发生反应,在所述碳化硅容器基体内原位高温反应形成碳化铌钛耐侵蚀涂层,所述保温的温度为1300~1800℃。In a protective atmosphere, the silicon carbide container in which the raw material is placed is heated and then kept warm. During the process of heating and holding, the raw material changes into a liquid phase and reacts with the inner surface of the silicon carbide crucible. The in-situ high-temperature reaction in the silicon carbide container substrate forms a niobium-titanium carbide corrosion-resistant coating, and the temperature of the heat preservation is 1300-1800°C.

本发明将上述技术方案所述的原料置于碳化硅容器基体内,优选将所述原料制备成型后,将得到成型体置于碳化硅容器基体内。在本发明中,所述成型的方法优选为压片;所述压片的压力优选为3~10Mpa,所述压片的保压时间优选为2~15min。在本发明中,所述成型体优选为圆片,所述圆片的直径优选为10~30mm。本发明对所述压片的设备没有特殊的限制,采用本领域技术人员熟知的粉末压片机即可。In the present invention, the raw materials described in the above technical solutions are placed in the base of the silicon carbide container. Preferably, after the raw materials are prepared and shaped, the obtained shaped body is placed in the base of the silicon carbide container. In the present invention, the molding method is preferably tableting; the tableting pressure is preferably 3-10 Mpa, and the pressure-holding time of the tableting is preferably 2-15 min. In the present invention, the molded body is preferably a wafer, and the diameter of the wafer is preferably 10 to 30 mm. The present invention has no particular limitation on the tableting equipment, and a powder tableting machine well known to those skilled in the art can be used.

在本发明中,所述原料的质量与所述碳化硅容器基体的容积之比优选为1:1~1:3In the present invention, the ratio of the mass of the raw material to the volume of the silicon carbide container substrate is preferably 1:1 to 1:3

所述原料置于碳化硅容器基体内后,本发明将放有原料的碳化硅容器在保护气氛中加热升温后保温,所述升温和保温的过程中,所述原料变为液相与所述碳化硅坩埚的内表面接触发生反应,在所述碳化硅容器基体内原位高温反应形成碳化铌钛耐侵蚀涂层,所述保温的温度为1300~1800℃。After the raw material is placed in the base of the silicon carbide container, the present invention heats the silicon carbide container with the raw material in a protective atmosphere and then heats it up. The inner surface of the silicon carbide crucible is contacted and reacted, and the niobium-titanium carbide corrosion-resistant coating is formed by an in-situ high-temperature reaction in the silicon carbide container base, and the temperature of the heat preservation is 1300-1800°C.

本发明对所述加热升温和保温的设备没有特殊的限制,采用本领域技术人员熟知的加热炉即可,具体将放有原料的碳化硅容器置于加热炉内,如图2所示,加热炉的顶部设置有保护气体出口,加热炉的底部设置有保护气体入口。本发明对所述保护气氛没有特殊的限制,采用本领域技术人员熟知的保护气体即可,在本发明的实施例中,所述保护气体优选为氩气。The present invention has no special restrictions on the equipment for heating, heating and heat preservation, and a heating furnace well-known to those skilled in the art can be used. Specifically, the silicon carbide container with the raw materials is placed in the heating furnace, as shown in FIG. The top of the furnace is provided with a protective gas outlet, and the bottom of the heating furnace is provided with a protective gas inlet. The present invention has no special limitation on the protective atmosphere, and a protective gas well known to those skilled in the art can be used. In the embodiment of the present invention, the protective gas is preferably argon.

在本发明中,所述加热升温优选为连续升温或分段升温,在本发明中所述连续升温的升温速率优选为1~50℃/min,更优选为5~40℃/min,最优选为10~20℃/min。In the present invention, the heating and heating is preferably continuous heating or staged heating, and the heating rate of the continuous heating in the present invention is preferably 1-50°C/min, more preferably 5-40°C/min, and most preferably It is 10~20 ℃/min.

在本发明中,所述分段升温优选包括以下步骤:In the present invention, the stepwise heating preferably comprises the following steps:

以第一升温速率升温至中间温度,所述第一升温速率为1~50℃/min,所述中间温度为500~1300℃;heating up to an intermediate temperature at a first heating rate, the first heating rate is 1-50°C/min, and the intermediate temperature is 500-1300°C;

以第二升温速率由所述中间温度升温至保温温度,所述第二升温速率为1~50℃/min,所述保温温度为1300~1800℃。The temperature is raised from the intermediate temperature to the holding temperature at a second heating rate, the second heating rate is 1-50°C/min, and the holding temperature is 1300-1800°C.

本发明在温度升至保温温度后进行保温,所述保温的时间优选为12~48h,在本发明的实施例中,所述保温可具体为12h、15h、20h、24h、30h、35h、40h、45h或48h。The present invention conducts heat preservation after the temperature rises to the heat preservation temperature, and the time of the heat preservation is preferably 12-48h. In the embodiment of the present invention, the heat preservation may be specifically 12h, 15h, 20h, 24h, 30h, 35h, 40h , 45h or 48h.

在本发明中,所述第一升温速率优选为5~40℃/min,更优选为10~20℃/min;所述中间温度优选为700~1200℃,更优选为1000℃。在本发明中,所述第二升温速率优选为5~40℃/min,更优选为10~20℃/min;所述中间温度优选为1400~1600℃,更优选为1500℃。在所述升温和保温的过程中,原料熔融为液相,液相的原料与碳化硅内表面接触发生反应,在碳化硅容器原位生成碳化铌和碳化钛,具体反应过程如下:In the present invention, the first heating rate is preferably 5-40°C/min, more preferably 10-20°C/min; the intermediate temperature is preferably 700-1200°C, more preferably 1000°C. In the present invention, the second heating rate is preferably 5-40°C/min, more preferably 10-20°C/min; the intermediate temperature is preferably 1400-1600°C, more preferably 1500°C. During the process of temperature increase and heat preservation, the raw material is melted into a liquid phase, and the raw material in the liquid phase contacts and reacts with the inner surface of the silicon carbide to generate niobium carbide and titanium carbide in-situ in the silicon carbide container. The specific reaction process is as follows:

SiC+Fe2O3→Fe/FeSi/Fe3C+SiO2+CO/CO2SiC+Fe 2 O 3 →Fe/FeSi/Fe 3 C+SiO 2 +CO/CO 2 ;

SiC+Nb2O5→NbC+SiO2SiC+Nb 2 O 5 →NbC+SiO 2 ;

SiC+TiO2→TiC+SiO2SiC+TiO 2 →TiC+SiO 2 ;

Fe3C+Nb2O5→Fe+TiC+CO;Fe 3 C+Nb 2 O 5 →Fe+TiC+CO;

Fe3C+TiO2→Fe+TiC+CO。Fe 3 C+TiO 2 →Fe+TiC+CO.

所述保温后,本发明优选将保温得到的碳化硅容器冷却后倒置,重复所述加热升温和保温。本发明对所述冷却的方式没有特殊的限制,采用本领域技术人员熟知的冷却技术方案即可,如随炉冷却。After the heat preservation, in the present invention, preferably, the silicon carbide container obtained by heat preservation is cooled and then inverted, and the heating, temperature increase and heat preservation are repeated. The present invention has no particular limitation on the cooling method, and a cooling technical solution well-known to those skilled in the art can be adopted, such as cooling with the furnace.

所述冷却后,本发明优选将冷却的碳化硅容器倒置,重复所述加热升温和保温。如图3所示,本发明的实施例中,具体将冷却的碳化硅容器使用钼丝倒吊在加热炉内,在所述碳化硅容器的外围放置尺寸更大的碳化硅容器以进行保护。在本发明中,所述重复加热升温和保温与上述技术方案所述加热升温和保温的方案一致,在此不再赘述。在本发明的实施例中,所述重复加热升温和保温中的保温时间优选为6h。After the cooling, in the present invention, the cooled silicon carbide container is preferably turned upside down, and the heating and temperature-preserving are repeated. As shown in FIG. 3 , in the embodiment of the present invention, the cooled silicon carbide container is hanged upside down in the heating furnace using molybdenum wire, and a larger size silicon carbide container is placed on the periphery of the silicon carbide container for protection. In the present invention, the repeated heating and temperature-raising and heat-retaining are consistent with the solutions of the above-mentioned technical solutions, which are not repeated here. In the embodiment of the present invention, the holding time in the repeated heating and holding is preferably 6h.

本发明通过倒置、重复加热升温和保温,使得原料充分的从碳化硅容器中留出,在碳化硅容器内表面原位形成了碳化铌钛耐侵蚀层。In the present invention, through inversion, repeated heating, heating and heat preservation, the raw material is fully left out of the silicon carbide container, and a niobium-titanium carbide corrosion-resistant layer is formed on the inner surface of the silicon carbide container in situ.

本发明提供的方法在碳化硅容器内表面原位生成了碳化铌钛耐侵蚀层,从而在用于熔融氟化物-氧化物体系时,具有更长时间的耐高温侵蚀和化学侵蚀作用。The method provided by the invention forms an erosion-resistant layer of niobium-titanium carbide on the inner surface of the silicon carbide container in situ, so that when it is used in a molten fluoride-oxide system, it has the effect of resisting high-temperature erosion and chemical erosion for a longer time.

下面结合附图对本发明实施例进行详细描述。The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

需说明的是,在不冲突的情况下,以下实施例及实施例中的特征可以相互组合;并且,基于本公开中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本公开保护的范围。It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict; and, based on the embodiments in the present disclosure, those of ordinary skill in the art can obtain the results obtained without creative work. All other embodiments fall within the protection scope of the present disclosure.

需要说明的是,下文描述在所附权利要求书的范围内的实施例的各种方面。应显而易见,本文中所描述的方面可体现于广泛多种形式中,且本文中所描述的任何特定结构及/或功能仅为说明性的。基于本公开,所属领域的技术人员应了解,本文中所描述的一个方面可与任何其它方面独立地实施,且可以各种方式组合这些方面中的两者或两者以上。举例来说,可使用本文中所阐述的任何数目个方面来实施设备及/或实践方法。另外,可使用除了本文中所阐述的方面中的一或多者之外的其它结构及/或功能性实施此设备及/或实践此方法。It is noted that various aspects of embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is illustrative only. Based on this disclosure, those skilled in the art should appreciate that an aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method may be practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.

实施例1Example 1

实施例所采用原料CaO-SiO2-CaF2-CeO2-TiO2-Nb2O5-Fe2O3成分见表1The raw materials CaO-SiO 2 -CaF 2 -CeO 2 -TiO 2 -Nb 2 O 5 -Fe 2 O 3 used in the examples are shown in Table 1

表1实施例1采用的CaO-SiO2-CaF2-CeO2-TiO2-Nb2O5-Fe2O3原料成分Table 1 CaO-SiO 2 -CaF 2 -CeO 2 -TiO 2 -Nb 2 O 5 -Fe 2 O 3 raw material components used in Example 1

成分Element CaOCaO SiO<sub>2</sub>SiO<sub>2</sub> CaF<sub>2</sub>CaF<sub>2</sub> CeO<sub>2</sub>CeO<sub>2</sub> TiO<sub>2</sub>TiO<sub>2</sub> Nb<sub>2</sub>O<sub>5</sub>Nb<sub>2</sub>O<sub>5</sub> Fe<sub>2</sub>O<sub>3</sub>Fe<sub>2</sub>O<sub>3</sub> 含量(wt%)Content (wt%) 15.515.5 4242 2020 55 7.57.5 55 55

按各氧化物的比例共称取3.21g粉末原料,使用粉末压片机将粉末原料压制成直径为13mm的圆片,压力设置为5Mpa,保压时间为5min;A total of 3.21g of powder raw materials were weighed according to the proportion of each oxide, and the powder raw materials were compressed into a disc with a diameter of 13mm using a powder tablet machine, the pressure was set to 5Mpa, and the pressure holding time was 5min;

将得到的圆片放入碳化硅电解槽内,将放有圆片的碳化硅电解槽置于加热炉中加热(加热示意图如图2所示),在氩气保护气氛中,按照10℃/min的升温速率由室温升温至1000℃,再由5℃/min的升温速率由1000℃升温至1500℃,在1500℃保温24h,随炉冷却后将电解槽取出;The obtained wafer is placed in the silicon carbide electrolytic cell, and the silicon carbide electrolytic cell with the wafer is placed in a heating furnace for heating (the heating schematic diagram is shown in Figure 2). The heating rate of min is raised from room temperature to 1000 °C, and then the temperature is increased from 1000 °C to 1500 °C at a heating rate of 5 °C/min, and the temperature is kept at 1500 °C for 24 hours. After cooling in the furnace, the electrolytic cell is taken out;

使用钼丝将上述加热后的电解槽倒置吊在加热炉中,在电解槽外围放置尺寸更大的碳化硅坩埚将加热炉进行保护,按照上述升温步骤,将样品加热至1500℃并保温6h,使电解槽中的样品充分的从电解槽中流出,在碳化硅电解槽内表面原位形成碳化铌钛耐侵蚀层,加热留出示意图如图3所示。Use molybdenum wire to hang the heated electrolytic cell upside down in the heating furnace, place a larger silicon carbide crucible around the electrolytic cell to protect the heating furnace, and heat the sample to 1500 ° C and keep it for 6 h according to the above heating steps. The sample in the electrolytic cell is fully flowed out of the electrolytic cell, and a niobium-titanium carbide corrosion-resistant layer is formed on the inner surface of the silicon carbide electrolytic cell in situ, and the schematic diagram of heating is shown in Figure 3.

将电解槽沿轴线方向切开,进行扫描电镜检测,结果如图4和5所示,从扫描电镜的结果来看,在碳化硅电解槽的内表面已经生成了较为致密的碳化铌-碳化钛耐侵蚀保护层,电解质与电解槽充分接触24h后,通过发生上述化学反应,已经生成了厚度约为95μm的较为致密的碳化铌-碳化钛耐侵蚀保护层。The electrolytic cell was cut along the axial direction, and the scanning electron microscope inspection was carried out. The results are shown in Figures 4 and 5. From the scanning electron microscope results, relatively dense niobium carbide-titanium carbide has been formed on the inner surface of the silicon carbide electrolytic cell. Erosion-resistant protective layer: After the electrolyte and the electrolytic cell are fully contacted for 24 hours, a relatively dense niobium carbide-titanium carbide erosion-resistant protective layer with a thickness of about 95 μm has been formed through the above-mentioned chemical reaction.

实施例2Example 2

实施例所采用原料CaO-SiO2-CaF2-CeO2-TiO2-Nb2O5-Fe2O3成分见表2The raw materials CaO-SiO 2 -CaF 2 -CeO 2 -TiO 2 -Nb 2 O 5 -Fe 2 O 3 used in the examples are shown in Table 2

表2实施例2采用的CaO-SiO2-CaF2-CeO2-TiO2-Nb2O5-Fe2O3原料成分Table 2 CaO-SiO 2 -CaF 2 -CeO 2 -TiO 2 -Nb 2 O 5 -Fe 2 O 3 raw material components used in Example 2

成分Element CaOCaO SiO<sub>2</sub>SiO<sub>2</sub> CaF<sub>2</sub>CaF<sub>2</sub> CeO<sub>2</sub>CeO<sub>2</sub> TiO<sub>2</sub>TiO<sub>2</sub> Nb<sub>2</sub>O<sub>5</sub>Nb<sub>2</sub>O<sub>5</sub> Fe<sub>2</sub>O<sub>3</sub>Fe<sub>2</sub>O<sub>3</sub> 含量(wt%)Content (wt%) 55 1010 55 55 2525 2525 2525

按各氧化物的比例共称取5g粉末原料,使用粉末压片机将粉末原料压制成直径为30mm的圆片,压力设置为10Mpa,保压时间为15min;A total of 5g of powdered raw materials were weighed according to the proportion of each oxide, and the powdered raw materials were compressed into discs with a diameter of 30mm using a powder tablet machine, the pressure was set to 10Mpa, and the pressure holding time was 15min;

将得到的圆片放入碳化硅电解槽内,将放有圆片的碳化硅电解槽置于加热炉中加热(加热示意图如图2所示),在氩气保护气氛中,按照50℃/min的升温速率由室温升温至500℃,再由8℃/min的升温速率由500℃升温至1450℃,在1450℃保温48h,随炉冷却后将电解槽取出;The obtained wafer is put into the silicon carbide electrolytic cell, and the silicon carbide electrolytic cell with the wafer is placed in a heating furnace for heating (the heating schematic diagram is shown in Figure 2). The heating rate of min is increased from room temperature to 500 °C, and then the temperature is increased from 500 °C to 1450 °C at a heating rate of 8 °C/min, and the temperature is kept at 1450 °C for 48 hours. After cooling in the furnace, the electrolytic cell is taken out;

使用钼丝将上述加热后的电解槽倒置吊在加热炉中,在电解槽外围放置尺寸更大的碳化硅坩埚将加热炉进行保护,按照上述升温步骤,将样品加热至1450℃并保温6h,使电解槽中的样品充分的从电解槽中流出,在碳化硅电解槽内表面原位形成碳化铌钛耐侵蚀层,加热留出示意图如图3所示。Use molybdenum wire to hang the heated electrolytic cell upside down in the heating furnace, place a larger size silicon carbide crucible around the electrolytic cell to protect the heating furnace, and heat the sample to 1450 ° C and keep it for 6 h according to the above heating steps. The sample in the electrolytic cell is fully flowed out of the electrolytic cell, and a niobium-titanium carbide corrosion-resistant layer is formed on the inner surface of the silicon carbide electrolytic cell in situ, and the schematic diagram of heating is shown in Figure 3.

将电解槽沿轴线方向切开,进行扫描电镜检测,从扫描电镜的结果来看,在碳化硅电解槽的内表面已经生成了较为致密的碳化铌-碳化钛耐侵蚀保护层,氧化物-氟化物熔体熔化形成的电解质与电解槽充分接触24h后,通过发生上述化学反应,已经生成了厚度约为150μm的较为致密的碳化铌-碳化钛耐侵蚀保护层。The electrolytic cell was cut along the axial direction, and the scanning electron microscope inspection was carried out. From the results of the scanning electron microscope, a relatively dense niobium carbide-titanium carbide corrosion-resistant protective layer has been formed on the inner surface of the silicon carbide electrolytic cell, oxide-fluorine After the electrolyte formed by the melting of the compound melt is fully in contact with the electrolytic cell for 24 hours, a relatively dense niobium carbide-titanium carbide corrosion-resistant protective layer with a thickness of about 150 μm has been formed through the above-mentioned chemical reaction.

实施例3Example 3

实施例所采用原料CaO-SiO2-CaF2-CeO2-TiO2-Nb2O5-Fe2O3成分见表3The raw materials CaO-SiO 2 -CaF 2 -CeO 2 -TiO 2 -Nb 2 O 5 -Fe 2 O 3 used in the examples are shown in Table 3

表3实施例3采用的CaO-SiO2-CaF2-CeO2-TiO2-Nb2O5-Fe2O3原料成分Table 3 CaO-SiO 2 -CaF 2 -CeO 2 -TiO 2 -Nb 2 O 5 -Fe 2 O 3 raw material components used in Example 3

成分Element CaOCaO SiO<sub>2</sub>SiO<sub>2</sub> CaF<sub>2</sub>CaF<sub>2</sub> CeO<sub>2</sub>CeO<sub>2</sub> TiO<sub>2</sub>TiO<sub>2</sub> Nb<sub>2</sub>O<sub>5</sub>Nb<sub>2</sub>O<sub>5</sub> Fe<sub>2</sub>O<sub>3</sub>Fe<sub>2</sub>O<sub>3</sub> 含量(wt%)Content (wt%) 1010 4040 3030 12.512.5 2.52.5 2.52.5 2.52.5

按各氧化物的比例共称取1.5g粉末原料,使用粉末压片机将粉末原料压制成直径为10mm的圆片,压力设置为3Mpa,保压时间为2min;A total of 1.5g of powder raw materials were weighed according to the proportion of each oxide, and the powder raw materials were compressed into discs with a diameter of 10mm using a powder tablet machine, the pressure was set to 3Mpa, and the pressure holding time was 2min;

将得到的圆片放入碳化硅电解槽内,将放有圆片的碳化硅电解槽置于加热炉中加热(加热示意图如图2所示),在氩气保护气氛中,按照5℃/min的升温速率由室温升温至1400℃,再由5℃/min的升温速率由1400℃升温至1600℃,在1600℃保温12h,随炉冷却后将电解槽取出;The obtained wafer is put into the silicon carbide electrolytic cell, and the silicon carbide electrolytic cell with the wafer is placed in a heating furnace for heating (the heating schematic diagram is shown in Figure 2). The heating rate of min is increased from room temperature to 1400 °C, and then the temperature is increased from 1400 °C to 1600 °C at a heating rate of 5 °C/min, and the temperature is kept at 1600 °C for 12 hours. After cooling in the furnace, the electrolytic cell is taken out;

使用钼丝将上述加热后的电解槽倒置吊在加热炉中,在电解槽外围放置尺寸更大的碳化硅坩埚将加热炉进行保护,按照上述升温步骤,将样品加热至1600℃并保温6h,使电解槽中的样品充分的从电解槽中流出,在碳化硅电解槽内表面原位形成碳化铌钛耐侵蚀层,加热留出示意图如图3所示。Use molybdenum wire to hang the heated electrolytic cell upside down in the heating furnace, place a larger size silicon carbide crucible around the electrolytic cell to protect the heating furnace, and heat the sample to 1600 ° C and keep it for 6 h according to the above heating steps. The sample in the electrolytic cell is fully flowed out of the electrolytic cell, and a niobium-titanium carbide corrosion-resistant layer is formed on the inner surface of the silicon carbide electrolytic cell in situ, and the schematic diagram of heating is shown in Figure 3.

将电解槽沿轴线方向切开,进行扫描电镜检测,从扫描电镜的结果来看,在碳化硅电解槽的内表面已经生成了较为致密的碳化铌-碳化钛耐侵蚀保护层,电解质与电解槽充分接触24h后,通过发生上述化学反应,已经生成了厚度约为40μm的较为致密的碳化铌-碳化钛耐侵蚀保护层。The electrolytic cell was cut along the axial direction, and the scanning electron microscope inspection was carried out. From the results of the scanning electron microscope, a relatively dense niobium carbide-titanium carbide corrosion-resistant protective layer has been formed on the inner surface of the silicon carbide electrolytic cell, and the electrolyte and the electrolytic cell have been formed. After being fully contacted for 24 hours, a relatively dense niobium carbide-titanium carbide corrosion-resistant protective layer with a thickness of about 40 μm has been formed by the above-mentioned chemical reaction.

比较例1Comparative Example 1

以表4所示成分(没有Fe2O3和Nb2O5时)替换实施例1中的原料,按照实施例1的方案在碳化硅电解槽内表面制备耐侵蚀层。The raw materials in Example 1 were replaced with the components shown in Table 4 (without Fe 2 O 3 and Nb 2 O 5 ), and an erosion-resistant layer was prepared on the inner surface of the silicon carbide electrolytic cell according to the scheme of Example 1.

表4比较例1采用的原料组成Table 4 Composition of raw materials used in Comparative Example 1

成分Element CaOCaO SiO<sub>2</sub>SiO<sub>2</sub> CaF<sub>2</sub>CaF<sub>2</sub> CeO<sub>2</sub>CeO<sub>2</sub> TiO<sub>2</sub>TiO<sub>2</sub> 含量(wt%)Content (wt%) 17.217.2 46.746.7 22.222.2 5.65.6 8.38.3

本发明将得到的碳化硅电解槽进行扫描电镜检测,结果如图6和图7所示,本比较例得到的是碳化钛侵蚀保护层。In the present invention, the obtained silicon carbide electrolytic cell is detected by scanning electron microscope, and the results are shown in Figs.

比较例2Comparative Example 2

以表5所示成分(即没有Fe2O3和TiO2)替换实施例1中的原料,按照实施例1的方案在碳化硅电解槽内表面制备耐侵蚀层。The raw materials in Example 1 were replaced with the components shown in Table 5 (ie, no Fe 2 O 3 and TiO 2 ), and an erosion-resistant layer was prepared on the inner surface of the silicon carbide electrolytic cell according to the scheme of Example 1.

表5比较例2采用的原料组成The raw material composition that table 5 comparative example 2 adopts

成分Element CaOCaO SiO<sub>2</sub>SiO<sub>2</sub> CaF<sub>2</sub>CaF<sub>2</sub> CeO<sub>2</sub>CeO<sub>2</sub> Nb<sub>2</sub>O<sub>5</sub>Nb<sub>2</sub>O<sub>5</sub> 含量(wt%)Content (wt%) 17.717.7 4848 22.922.9 5.75.7 5.75.7

本发明将得到的碳化硅电解槽进行扫描电镜检测,结果如图8和图9所示,本比较例得到的是碳化铌侵蚀保护层。In the present invention, the obtained silicon carbide electrolytic cell is tested by scanning electron microscope, and the results are shown in Figs.

通过对比碳化铌、碳化钛侵蚀保护层扫描电镜图以及主要成分发现,当Fe2O3、TiO2、Nb2O5同时存在时形成的碳化铌-碳化钛侵蚀保护层更加致密,主要成分主要是碳化铌、碳化钛,而单独存在的碳化铌或碳化钛侵蚀保护层中夹杂着较多的盐,侵蚀防护效果不如碳化铌-碳化钛侵蚀保护层。By comparing the SEM images of niobium carbide and titanium carbide erosion protection layer and the main components, it is found that the niobium carbide-titanium carbide erosion protection layer formed when Fe 2 O 3 , TiO 2 and Nb 2 O 5 coexist is more compact, and the main components are mainly It is niobium carbide and titanium carbide, and the niobium carbide or titanium carbide corrosion protection layer that exists alone contains more salts, and the corrosion protection effect is not as good as that of niobium carbide-titanium carbide corrosion protection layer.

比较例3Comparative Example 3

以表6所示成分(即没有Fe2O3)替换实施例1中的原料,按照实施例1的方案在碳化硅电解槽内表面制备耐侵蚀层。The raw materials in Example 1 were replaced with the components shown in Table 6 (ie, no Fe 2 O 3 ), and an erosion-resistant layer was prepared on the inner surface of the silicon carbide electrolytic cell according to the scheme of Example 1.

表6比较例3采用的原料组成The raw material composition that table 6 comparative example 3 adopts

成分Element CaOCaO SiO<sub>2</sub>SiO<sub>2</sub> CaF<sub>2</sub>CaF<sub>2</sub> CeO<sub>2</sub>CeO<sub>2</sub> Nb<sub>2</sub>O<sub>5</sub>Nb<sub>2</sub>O<sub>5</sub> TiO<sub>2</sub>TiO<sub>2</sub> 含量(wt%)Content (wt%) 16.216.2 44.244.2 21.121.1 5.35.3 5.35.3 7.97.9

本发明将得到的碳化硅电解槽进行扫描电镜检测,结果如图10所示,本比较例得到的是碳化钛-碳化铌及掺杂部分盐的侵蚀层。In the present invention, the obtained silicon carbide electrolytic cell is inspected by scanning electron microscope, and the result is shown in FIG. 10 . In this comparative example, titanium carbide-niobium carbide and an etched layer doped with partial salt are obtained.

实施例4Example 4

表7实施例4采用的CaO-SiO2-CaF2-CeO2-TiO2-Nb2O5-Fe2O3原料成分Table 7 CaO-SiO 2 -CaF 2 -CeO 2 -TiO 2 -Nb 2 O 5 -Fe 2 O 3 raw material components used in Example 4

成分Element CaOCaO SiO<sub>2</sub>SiO<sub>2</sub> CaF<sub>2</sub>CaF<sub>2</sub> CeO<sub>2</sub>CeO<sub>2</sub> TiO<sub>2</sub>TiO<sub>2</sub> Nb<sub>2</sub>O<sub>5</sub>Nb<sub>2</sub>O<sub>5</sub> Fe<sub>2</sub>O<sub>3</sub>Fe<sub>2</sub>O<sub>3</sub> 含量(wt%)Content (wt%) 15.515.5 4242 2020 55 7.57.5 55 55

按各氧化物的比例共称取3.21g粉末原料,使用粉末压片机将粉末原料压制成直径为13mm的圆片,压力设置为5Mpa,保压时间为5min;A total of 3.21g of powder raw materials were weighed according to the proportion of each oxide, and the powder raw materials were compressed into a disc with a diameter of 13mm using a powder tablet machine, the pressure was set to 5Mpa, and the pressure holding time was 5min;

将得到的圆片放入碳化硅电解槽内,将放有圆片的碳化硅电解槽置于加热炉中加热(加热示意图如图2所示),在氩气保护气氛中,按照10℃/min的升温速率由室温升温至1000℃,再由5℃/min的升温速率由1000℃升温至1500℃,在1500℃保温24h,以便生成侵蚀保护层,随炉冷却后将电解槽取出,然后重复上述加热及保温步骤并进行五次实验,从而检验侵蚀保护层的性能;The obtained wafer is placed in the silicon carbide electrolytic cell, and the silicon carbide electrolytic cell with the wafer is placed in a heating furnace for heating (the heating schematic diagram is shown in Figure 2). The heating rate of min is increased from room temperature to 1000 °C, and then the temperature is increased from 1000 °C to 1500 °C at a heating rate of 5 °C/min, and the temperature is kept at 1500 °C for 24 hours to form an erosion protection layer. Repeat the above heating and holding steps and carry out five experiments to test the performance of the erosion protection layer;

实验后将电解槽沿轴线方向切开,进行扫描电镜检测,结果如图11所示,从扫描电镜的结果来看,在碳化硅电解槽的内表面耐侵蚀层厚度约为100μm,相比实施例1的侵蚀保护层厚度变化不大。After the experiment, the electrolytic cell was cut along the axis direction, and the scanning electron microscope inspection was carried out. The results are shown in Figure 11. From the scanning electron microscope results, the thickness of the corrosion-resistant layer on the inner surface of the silicon carbide electrolytic cell is about 100 μm. The erosion protection layer thickness of Example 1 did not change much.

比较例4Comparative Example 4

表8比较例4采用的CaO-SiO2-CaF2-CeO2-TiO2-Nb2O5-Fe2O3原料成分Table 8 CaO-SiO 2 -CaF 2 -CeO 2 -TiO 2 -Nb 2 O 5 -Fe 2 O 3 raw material components used in Comparative Example 4

成分Element CaOCaO SiO<sub>2</sub>SiO<sub>2</sub> CaF<sub>2</sub>CaF<sub>2</sub> CeO<sub>2</sub>CeO<sub>2</sub> Fe<sub>2</sub>O<sub>3</sub>Fe<sub>2</sub>O<sub>3</sub> 含量(wt%)Content (wt%) 17.717.7 4848 22.922.9 5.75.7 5.75.7

按各氧化物的比例共称取3.21g粉末原料,使用粉末压片机将粉末原料压制成直径为13mm的圆片,压力设置为5Mpa,保压时间为5min;A total of 3.21g of powder raw materials were weighed according to the proportion of each oxide, and the powder raw materials were compressed into a disc with a diameter of 13mm using a powder tablet machine, the pressure was set to 5Mpa, and the pressure holding time was 5min;

将得到的圆片放入碳化硅电解槽内,将放有圆片的碳化硅电解槽置于加热炉中加热(加热示意图如图2所示),在氩气保护气氛中,按照10℃/min的升温速率由室温升温至1000℃,再由5℃/min的升温速率由1000℃升温至1500℃,在1500℃保温24h,此例中原料没有TiO2、Nb2O5的存在,因此无法形成侵蚀保护层,除此以外其他实验条件均相同。The obtained wafer is placed in the silicon carbide electrolytic cell, and the silicon carbide electrolytic cell with the wafer is placed in a heating furnace for heating (the heating schematic diagram is shown in Figure 2). The heating rate of min is increased from room temperature to 1000 °C, and then the temperature is increased from 1000 °C to 1500 °C with a heating rate of 5 °C/ min , and the temperature is kept at 1500 °C for 24 hours. The corrosion protection layer could not be formed, except that other experimental conditions were the same.

图12为无侵蚀保护层的坩埚进行实验后的检测图,发现当无侵蚀保护层时,电解质对电解槽的侵蚀厚度发到可600~1200μm。Fig. 12 is the inspection diagram of the crucible without the corrosion protection layer after the experiment. It is found that when there is no corrosion protection layer, the corrosion thickness of the electrolyte to the electrolytic cell can reach 600-1200 μm.

经过对比看出,在电解槽内表面原位形成耐侵蚀保护层有效的解决了以CaO-SiO2-CaF2-REO-TiO2-Nb2O5-Fe2O3体系为电解质进行电解提取金属过程中电解质对电解槽的侵蚀问题。After comparison, it can be seen that the in-situ formation of the corrosion-resistant protective layer on the inner surface of the electrolytic cell effectively solves the problem of electrolytic extraction with the CaO-SiO 2 -CaF 2 -REO-TiO 2 -Nb 2 O 5 -Fe 2 O 3 system as the electrolyte. Electrolyte erosion of electrolytic cells in metal processes.

以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应以权利要求的保护范围为准。The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the technical scope disclosed by the present invention can easily think of changes or substitutions. All should be included within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (8)

1.耐侵蚀碳化硅容器,包括碳化硅容器基体和吸附在所述碳化硅容器基体内表面的碳化铌钛耐侵蚀涂层,所述碳化铌钛耐侵蚀涂层的化学组成包括碳化铌和碳化钛。1. An erosion-resistant silicon carbide container, comprising a silicon carbide container base and a niobium-titanium carbide erosion-resistant coating adsorbed on the inner surface of the silicon carbide container base, wherein the chemical composition of the niobium-titanium carbide erosion-resistant coating includes niobium carbide and carbide titanium. 2.根据权利要求1所述的耐侵蚀碳化容器,其特征在于,所述碳化铌钛耐侵蚀涂层的厚度为40~150μm。2 . The corrosion-resistant carbonization container according to claim 1 , wherein the thickness of the niobium-titanium carbide corrosion-resistant coating is 40-150 μm. 3 . 3.根据权利要求1或2所述的耐侵蚀碳化硅容器,其特征在于,所述碳化硅容器基体为碳化硅电解槽。3. The corrosion-resistant silicon carbide container according to claim 1 or 2, wherein the silicon carbide container base is a silicon carbide electrolytic cell. 4.权利要求1~3任意一项所述耐侵蚀碳化硅容器的制备方法,包括以下步骤:4. the preparation method of the corrosion-resistant silicon carbide container described in any one of claim 1~3, comprises the following steps: 将制备所述耐侵蚀碳化硅容器中碳化铌钛耐侵蚀涂层的原料置于碳化硅容器基体内,所述原料包括以下质量百分含量的组分:5~30%的CaO、10~50%的SiO2、5~40%的CaF2、0~20%的CeO2、2.5~25%的TiO2、2.5~25%的Nb2O5和2.5~25%的Fe2O3The raw material for preparing the niobium-titanium carbide corrosion-resistant coating in the corrosion-resistant silicon carbide container is placed in the silicon carbide container base, and the raw material includes the following components in mass percentage: 5-30% CaO, 10-50 % SiO 2 , 5~40% CaF 2 , 0~20% CeO 2 , 2.5~25% TiO 2 , 2.5~25% Nb 2 O 5 and 2.5~25% Fe 2 O 3 ; 在保护气氛中,将放有所述原料的碳化硅容器基体加热升温后保温,所述升温和保温的过程中,所述原料变为液相与所述碳化硅容器基体的内表面接触发生反应,在所述碳化硅容器基体内原位高温反应形成碳化铌钛耐侵蚀涂层,所述保温的温度为1300~1800℃。In a protective atmosphere, the silicon carbide container base containing the raw material is heated and then kept warm. During the process of heating and heat preservation, the raw material changes into a liquid phase and reacts with the inner surface of the silicon carbide container base. , in-situ high temperature reaction in the silicon carbide container base to form a niobium-titanium carbide corrosion-resistant coating, and the temperature of the heat preservation is 1300-1800 °C. 5.根据权利要求4所述的制备方法,其特征在于,所述加热升温包括连续升温或分段升温,所述连续升温的升温速率为1~50℃/min;5. preparation method according to claim 4, is characterized in that, described heating temperature rise comprises continuous temperature rise or subsection temperature rise, and the temperature rise rate of described continuous temperature rise is 1~50 ℃/min; 所述分段升温包括以下步骤:The step-by-step heating includes the following steps: 以第一升温速率升温至中间温度,所述第一升温速率为1~50℃/min,所述中间温度为500~1300℃;heating up to an intermediate temperature at a first heating rate, the first heating rate is 1-50°C/min, and the intermediate temperature is 500-1300°C; 以第二升温速率由所述中间温度升温至保温温度,所述第二升温速率为1~50℃/min,所述保温温度为1300~1800℃。The temperature is raised from the intermediate temperature to the holding temperature at a second heating rate, the second heating rate is 1-50°C/min, and the holding temperature is 1300-1800°C. 6.根据权利要求4或5所述的制备方法,其特征在于,所述保温的时间为12~48h。6. preparation method according to claim 4 or 5 is characterized in that, the time of described insulation is 12~48h. 7.根据权利要求4或5所述的制备方法,其特征在于,所述保温后还包括:将保温得到的碳化硅容器冷却后倒置,重复所述加热升温和保温。7 . The preparation method according to claim 4 , wherein after the heat preservation, the method further comprises: cooling the silicon carbide container obtained by the heat preservation and then inverting the container, and repeating the heating and the heat preservation. 8 . 8.权利要求1~3任意一项所述的耐侵蚀碳化硅容器在耐熔融氟化物-氧化物侵蚀中的应用。8. The application of the corrosion-resistant silicon carbide container according to any one of claims 1 to 3 in corrosion-resistant molten fluoride-oxide.
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