CN113804171B - MEMS gyroscope - Google Patents

Abstract

The present invention provides a MEMS gyroscope comprising: driving the mass block; a driving electrode; detecting a mass block; a detection electrode located below the detection mass; a first compensating beam coupled to the driving mass; a second compensation beam coupled between the first compensation beam and the proof mass; at least one pair of compensating masses coupled to the first compensating beam, wherein a first compensating mass of each pair of compensating masses is located on one side of the first compensating beam and a second compensating mass of each pair of compensating masses is located on the other side of the first compensating beam; at least one pair of compensation electrodes located below the at least one pair of compensation masses for error compensation by applying an electrical signal across the at least one pair of compensation electrodes.

Description

MEMS Gyroscope

[Technical field]

The present invention relates to the technical field of micro-electro-mechanical systems (MEMS), and in particular to a MEMS gyroscope.

[Background technology]

Microcomputer gyroscopes can detect angular velocity by detecting the magnitude of the Coriolis force. Under the action of the driving force, the mass block resonates along the driving direction. When it is sensitive to the angular velocity input, the mass block will have a small displacement along the detection direction due to the Coriolis effect. However, due to the existence of processing errors, the displacement of the mass block in the driving direction will be coupled into the displacement in the detection direction, resulting in the generation of an error signal. The phase of the error signal is the same as the driving displacement, and it differs from the Coriolis force signal by ninety degrees, so it is called an orthogonal error. This orthogonal error seriously affects the detection accuracy, and existing methods cannot completely eliminate it.

Therefore, it is urgent to propose a new technical solution to solve the above problems.

[Summary of the invention]

One of the purposes of the present invention is to provide a MEMS gyroscope which can well compensate for errors and improve the production yield of products.

According to one aspect of the present invention, there is provided a MEMS gyroscope, which includes: a driving mass block, a space is defined inside the driving mass block; a driving electrode, which drives the driving mass block to reciprocate; a detection mass block located in the space; a detection electrode located below the detection mass block, which forms a detection capacitor with the detection mass block, and the movement of the detection mass block is determined by detecting the change of the detection capacitor; a first compensation beam coupled to the driving mass block; and a second compensation beam coupled between the first compensation beam and the detection mass block, wherein the detection mass block reciprocates with the driving mass block under the drive of the driving mass block. at least one pair of compensation masses coupled to the first compensation beam, wherein a first compensation mass in each pair of compensation masses is located on one side of the first compensation beam, and a second compensation mass in each pair of compensation masses is located on the other side of the first compensation beam; at least one pair of compensation electrodes located below the at least one pair of compensation masses, each pair of compensation electrodes comprising a first compensation electrode located below the first compensation mass in the corresponding pair of compensation masses, and a second compensation electrode located below the second compensation mass in the corresponding pair of compensation masses, and error compensation is performed by applying an electrical signal to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes.

Compared with the prior art, the MEMS gyroscope in the present invention can provide error compensation force to the detection mass block through the first compensation beam and the second compensation beam to perform error compensation by applying an electrical signal to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes.

【Brief Description of the Drawings】

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

FIG1 is a schematic diagram of the overall structure of a gyroscope in one embodiment of the present invention;

FIG2 is a schematic side view of the cross-sectional structure of the gyroscope along line AA in the present invention, in which there is no orthogonal error;

FIG3 is a schematic side view of the cross-sectional structure of the gyroscope along line AA in the present invention, in which an orthogonal error exists;

FIG4 is a schematic side view of the cross-sectional structure of the gyroscope along line AA in the present invention, in which an orthogonal error exists and orthogonal error compensation is performed;

FIG5 is a schematic side view of the cross-sectional structure of the gyroscope along line AA in the present invention, in which the orthogonal error causes the overall structure to tilt;

FIG6 is a schematic side view of the cross-sectional structure of the gyroscope along line AA in the present invention. In this state, the orthogonal error causes the entire structure to tilt and the orthogonal error compensation is performed.

[Specific implementation method]

In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

The term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments. Unless otherwise specified, the words "connected", "connected", and "connected" herein that indicate electrical connection all refer to direct or indirect electrical connection.

In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore, cannot be understood as a limitation on the present invention. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The X-axis, Y-axis and Z-axis are the three axes in the coordinate system shown in the figure. In other embodiments, the three axes of the coordinate system can also be set as needed. "And/or" in this article includes and and or, for example, A and/or B includes A, or B, or A and B.

In the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", "coupled" and the like should be understood in a broad sense; for example, it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

In view of the problems existing in the prior art, the present invention provides a MEMS gyroscope, which can compensate for errors well and improve the production yield of products. FIG1 is a schematic diagram of the structure of a MEMS gyroscope in an embodiment of the present invention.

As shown in FIG1 , the MEMS gyroscope includes a driving mass block 1 with a space defined inside, a driving electrode 3 for driving the driving mass block 1 to perform reciprocating motion, a detection mass block 2 located in the space, a detection electrode 4 located below the detection mass block, a first compensation beam 9 coupled to the driving mass block 1, a second compensation beam 13 coupled between the first compensation beam 9 and the detection mass block 2, at least one pair of compensation masses 11 coupled to the first compensation beam 9, and at least one pair of compensation electrodes 5 located below the at least one pair of compensation masses 11.

In one embodiment, the detection mass block 2 includes a detection beam 8 located at the edge, and a second compensation beam 13 is coupled between the first compensation beam 9 and the detection beam 8. The MEMS gyroscope 100 also includes: an anchor point 10 fixed on a substrate (not shown) and a driving beam 7 connecting the anchor point 10 and the driving mass block 1. The driving mass block 1, the detection mass block 2, the compensation mass block 11, the first compensation beam 9, the second compensation beam 13 and the driving beam are all suspended above the substrate, and the detection electrode 4 and the compensation electrode 5 are both arranged on the substrate. In Figures 2-6, only the detection electrode 4 and the compensation electrode 5 are schematically shown, and the substrate is not shown. In fact, the substrate is below the detection electrode 4 and the compensation electrode 5. The driving electrode 3 is also fixedly arranged on the substrate. The driving electrode 3 includes a comb-shaped electrode, and the driving mass block 1 also has a comb-shaped sawtooth that cooperates with the comb-shaped driving electrode 3.

The working principle of the MEMS gyroscope is introduced as follows: the driving electrode 3 drives the driving mass block 1 to perform reciprocating motion, that is, resonant motion; the detection mass block 2 is driven by the driving mass block 1 to perform reciprocating motion together with the driving mass block 1; the detection electrode 4 and the detection mass block 2 form a detection capacitor; when there is rotation on the sensitive axis, the Coriolis force will cause the detection mass 130 to move in the direction of the detection axis, and at this time, the angular velocity of the rotation on the sensitive axis can be detected by detecting the change of the detection capacitor.

More specifically, as shown in FIG1 , the first compensation beam 9 extends along the Y axis, the second compensation beam 13 extends along the X axis, the driving mass block 1 is driven by the driving electrode to reciprocate along the X axis, and the detection mass block 2 is driven by the driving mass block 1 to reciprocate along the X axis together with the driving mass block 1, and the X axis and the Y axis are perpendicular. At this time, the Y axis is the sensitive axis, and the Z axis is the detection axis. When there is rotation on the Y axis, the Coriolis force will cause the detection mass block 2 to move along the Z axis, resulting in a change in the distance between the detection mass block and the detection electrode. At this time, the angular velocity of the rotation on the Y axis can be detected by detecting the change in the detection capacitance.

Fig. 2 is a schematic diagram of the structural side view of the gyroscope along the AA line in the present invention, in which there is no orthogonal error and no angular velocity effect. As shown in Fig. 2(a), the detection mass block 2 is stationary at the original position, and the distance between the detection mass block 2 and the detection electrode 4 is d0; as shown in Fig. 2(b), the detection mass block 2 moves to the right, and the distance between the detection mass block 2 and the detection electrode 4 is d0; as shown in Fig. 2(c), the detection mass block 2 moves to the left, and the distance between the detection mass block 2 and the detection electrode 4 is d0. It can be seen that when there is no angular velocity effect and no orthogonal error (ideal), the distance between the detection mass block and the detection electrode remains unchanged, that is, d0.

However, in reality, when machining errors exist, the displacement of the driving mass block 1 along the driving direction will be coupled to the detection mass block 2, causing it to move along the detection direction (detection axis), and this displacement will be mistaken for an angular velocity signal. This erroneous signal is called an orthogonal error signal. The phase of this orthogonal error signal is usually 90 degrees different from the phase of the Coriolis force, and its amplitude is usually several orders of magnitude larger than the Coriolis force signal detected by the detection mass block 2.

Fig. 3 is a schematic diagram of the side view of the structure of the gyroscope along the AA line in the present invention, in which there is an orthogonal error and no angular velocity effect. As shown in Fig. 3(a), the detection mass block 2 is located at the original position, and the distance between the detection mass block 2 and the detection electrode 4 is d0; as shown in Fig. 3(b), the detection mass block 2 moves to the right, and the distance between the detection mass block 2 and the detection electrode 4 is d1; as shown in Fig. 3(c), the detection mass block 2 moves to the left, and the distance between the detection mass block 2 and the detection electrode 4 is d2. Obviously, even if there is no angular velocity effect, the existence of the orthogonal error will make d1<d0<d2.

In order to prevent the detection circuit from being saturated by the error signal, it is necessary to eliminate the orthogonal error signal. The displacement Z _quad of the detection mass block caused by the orthogonal error can be expressed as:

Z _quad = Asin(ωt)

ω is the driving frequency, and A is the displacement of the detection mass block on the sensitive axis caused by coupling from the driving mass block. Therefore, the orthogonal error signal can be compensated by using signals with opposite phases and opposite amplitudes. The at least one pair of compensation masses 11 and the at least one pair of compensation electrodes 5 can be used to compensate for the orthogonal error. As shown in Figure 1, the first compensation mass 111 in each pair of compensation masses 11 is located on one side of the first compensation beam 9, and the second compensation mass 112 in each pair of compensation masses 11 is located on the other side of the first compensation beam 9. Each pair of compensation electrodes 5 includes a first compensation electrode 51 located below the first compensation mass in the corresponding pair of compensation masses, and a second compensation electrode 52 located below the second compensation mass in the corresponding pair of compensation masses. Error compensation is performed by applying an electrical signal to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes. Specifically, by applying an electrical signal to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes 5, the at least one pair of compensation masses 11 provides the detection mass 2 with error compensation forces along the Z axis, along the X axis, and/or along the Y axis through the first compensation beam 9 and the second compensation beam 13, so as to perform orthogonal error compensation. The phase and magnitude of the error compensation force along the Z axis provided to the detection mass 2 are related to the phase and magnitude of the orthogonal error signal, so as to offset the influence of the orthogonal error signal.

In one embodiment, by applying an electrical signal to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes 5, the first compensation beam 9 can be prompted to rotate forward and/or reversely along the Y-axis, thereby driving the second compensation beam 13 to provide the detection mass block 2 with an error compensation force along the Z-axis. The error compensation force can drive the detection mass block 2 away from the detection electrode 4 or close to the detection electrode 4 along the Z-axis to perform orthogonal error compensation. Specifically, when the detection mass block 2 moves in one direction along the X-axis, an electrical signal is applied to the first compensation electrode and/or the second compensation electrode in the at least one pair of compensation electrodes 5, prompting the first compensation beam 9 to rotate, thereby driving the second compensation beam to provide the detection mass block 2 with an error compensation force along the Z-axis upward, and the error compensation force can drive the detection mass block 2 away from the detection electrode 4 to perform orthogonal error compensation; when the detection mass block 2 moves in another direction opposite to the X-axis, an electrical signal is applied to the first compensation electrode and/or the second compensation electrode in the at least one pair of compensation electrodes 5, prompting the first compensation beam 9 to rotate, thereby driving the second compensation beam to provide the detection mass block 2 with an error compensation force along the Z-axis downward, and the error compensation force can drive the detection mass block 2 to approach the detection electrode 4 along the Z-axis to perform orthogonal error compensation.

As shown in FIG1 , there are two first compensation beams 9, and the two first compensation beams are respectively located on both sides of the detection mass block 9 along the X axis. There are two second compensation beams 13, and the two second compensation beams 13 are respectively located on both sides of the detection mass block 2 along the X axis. There are two detection beams 8, and the two detection beams 8 are respectively located on both sides of the detection mass block 2 along the X axis. Each second compensation beam 13 is connected between a corresponding first compensation beam 9 and a corresponding detection beam 8. The at least one pair of compensation mass blocks 11 includes four pairs of compensation mass blocks, wherein a pair of compensation mass blocks 11a are coupled to a first compensation beam 9 (for example, the first compensation beam 9 on the left) and are located on the upper side of the second compensation beam 13, wherein a pair of compensation mass blocks 11b are coupled to the first compensation beam 9 (for example, the first compensation beam 9 on the left) and are located on the lower side of the second compensation beam 13, wherein a pair of compensation mass blocks 11c are coupled to another first compensation beam 9 (for example, the first compensation beam 9 on the right) and are located on the upper side of the second compensation beam 13, wherein a pair of compensation mass blocks 11d are coupled to another first compensation beam 9 (for example, the first compensation beam 9 on the right) and are located on the lower side of the second compensation beam 13, and the compensation mass block 2 in each pair of compensation mass blocks 11 that is far away from the detection mass block is called a first compensation mass block 111, or an outer compensation mass block, and the compensation mass block close to the detection mass block 2 in each pair of compensation mass blocks 11 is called a second compensation mass block 112, or an inner compensation mass block. The at least one pair of compensation electrodes shown includes four pairs of compensation electrodes, and each pair of compensation electrodes corresponds to a pair of compensation mass blocks. Fig. 1 schematically shows four pairs of compensation mass blocks and four pairs of compensation electrodes.

FIG4 is a schematic diagram of the structure side view of the gyroscope along the AA line in the present invention, in which an orthogonal error exists and orthogonal error compensation is performed. As shown in FIG4(a), when the detection mass block 2 moves rightward along the X-axis, an electrical signal is applied to the first compensation electrode and/or the second compensation electrode in each pair of compensation electrodes 5, such as applying an electrical signal to the first compensation electrode 51 (outer compensation electrode), so as to generate suction between the first compensation electrode 51 and the first compensation mass block 111, so as to cause the left first compensation beam 9 to rotate in the reverse direction (counterclockwise) along the Y-axis, and the right first compensation beam 9 to rotate in the positive direction (clockwise) along the Y-axis, and then the second compensation beam 13 provides the detection mass block 2 with an error compensation force in the upward direction along the Z-axis, thereby driving the detection mass block 2 away from the detection electrode 4 along the Z-axis, offsetting the downward displacement of the detection electrode 4 along the Z-axis caused by the orthogonal error, so as to perform orthogonal error compensation, and at this time, the distance between the detection electrode 4 and the detection mass block 2 is d0, instead of d1 in FIG3. FIG4(a) only shows an electrical signal applied to a first compensation electrode 51. In fact, an electrical signal with an opposite phase may be synchronously applied to the second compensation electrode 52. The amplitude of the applied electrical signal varies and is related to the amplitude of the orthogonal error.

As shown in FIG4(b), when the detection mass block 2 moves to the left along the X-axis, an electrical signal is applied to the first compensation electrode and/or the second compensation electrode in each pair of compensation electrodes 5, for example, an electrical signal is applied to the second compensation electrode 52 (inner compensation electrode), so as to generate suction between the second compensation electrode 52 and the second compensation mass block 112, prompting the first compensation beam 9 on the left to rotate in the positive direction (clockwise) along the Y-axis and the first compensation beam 9 on the right to rotate in the reverse direction (counterclockwise) along the Y-axis, and then the second compensation beam 13 provides the detection mass block 2 with an error compensation force downward along the Z-axis, thereby driving the detection mass block 2 to approach the detection electrode 4 along the Z-axis to offset the upward displacement of the detection electrode 4 along the Z-axis caused by the orthogonal error, thereby achieving orthogonal error compensation. At this time, the distance between the detection electrode 4 and the detection mass block 2 is d0, instead of d2 in FIG3. FIG4( b ) only shows an electrical signal applied to a first compensation electrode 51 . In fact, an electrical signal with an opposite phase may be synchronously applied to the second compensation electrode 52 . The amplitude of the applied electrical signal varies and is related to the amplitude of the orthogonal error.

In one embodiment, the electrical signal applied to the first compensation electrode of the at least one pair of compensation electrodes is V _{quad — cancel — p} :

V _{quad_cancel_p} =V _PM +V _DC +V _AC cos(ωt)

The electrical signal V _{quad — cancel — n} is applied to the second compensation electrode of the at least one pair of compensation electrodes:

V _{quad_cancel_n} =V _PM +V _DC -V _AC cos(ωt)

Wherein, V _PM is the electrical signal applied to the detection mass block, V _DC is a predetermined direct current signal, V _AC is a predetermined alternating current signal, and ω is a driving frequency.

In this way, the reverse compensating force generated is:

Where _ε0 is the dielectric constant of vacuum, N is the number of capacitor groups per unit area, L is the length of the capacitor per unit area, and t is the thickness of the capacitor per unit area.

The magnitude of the quadrature error that can be compensated is proportional to the electrostatic force generated by the compensation voltage:

d _{quad_cancel} ∝F _{e_quad_cancel}

In one embodiment, if the four driving beams 195 are deformed asymmetrically due to poor consistency of process deviation, as shown in FIG5 , D represents the state of the micro-gyroscope when it is not subject to driving force; D1 and D2 represent the state of the micro-gyroscope when the overall structure tilts along the Y axis under the action of the driving force when there is an orthogonal error, where d1<d0<d2. The torsion angle is obtained according to the voltage output of the driving feedback electrode 6, and the same electrical signal is applied to the compensation electrodes corresponding to each pair of compensation mass blocks 11a, 11b, 11c and 11d coupled to the same first compensation beam, and an electrostatic force is generated with the corresponding compensation mass blocks, forcing the driving mass block 1 to always maintain a fixed distance d0 from the electrode during driving, so as to compensate for the tilting movement of the driving mass block 1 and eliminate the displacement of the driving mass block in the Z-axis direction due to process errors.

The MEMS gyroscope further includes: a driving feedback electrode 6 disposed on the substrate, and the driving feedback electrode 6 is located below the driving mass block 1. FIG. 6 is a schematic side view of the cross-sectional structure of the gyroscope along the AA line in the present invention. In this state, the orthogonal error causes the overall structure to tilt and the orthogonal error compensation is performed. When facing the situation D1 as shown in FIG. 5, the solution is shown in D1' in FIG. 6. It is necessary to apply a voltage to each pair of compensation electrodes on the right side of the detection mass block 2, which will cause each pair of compensation mass blocks on the right side to drop as a whole, and then adjust the detection mass block of the gyroscope to return to the initial state; when facing the situation D2 as shown in FIG. 5, the solution is shown in D2' in FIG. 6. It is necessary to apply a voltage to each pair of compensation electrodes on the left side of the detection mass block 2, which will cause the compensation mass block 11 on the left side to drop as a whole, and then adjust the detection mass block 2 to return to the initial state; the distance between the driving mass block and the electrode can be ensured to be d0 by controlling the magnitude of the applied voltage. The compensation electrode can adjust the tilting movement of the driving mass block when driving along the X or Y axis. Due to the existence of manufacturing process deviations, errors caused by non-orthogonality always exist, and coupled with the inconsistency of the process, the yield of the device is therefore low. Through the present invention, an AC+DC electrical signal can be applied to the compensation electrode to generate an electrostatic attraction, thereby providing the detection mass block 2 with an error compensation force for rotation around the X-axis, around the Y-axis and/or along the Z-axis, and compensating for orthogonal errors or other process errors. The method is relatively simple and can significantly improve the product production yield.

In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify and vary the above embodiments within the scope of the present invention.

Claims (10)

1. A MEMS gyroscope, characterized in that it comprises: A driving mass block has a space defined therein; A driving electrode, which drives the driving mass block to perform reciprocating motion; a proof mass located in the space; a detection electrode located below the detection mass block, which forms a detection capacitor with the detection mass block, and the movement of the detection mass block is determined by detecting the change of the detection capacitor; a first compensation beam coupled to the drive mass; a second compensation beam coupled between the first compensation beam and the detection mass block, wherein the detection mass block reciprocates with the driving mass block under the drive of the driving mass block; at least one pair of compensating masses coupled to the first compensation beam, wherein a first compensating mass in each pair of compensating masses is located on one side of the first compensation beam and a second compensating mass in each pair of compensating masses is located on the other side of the first compensation beam; at least one pair of compensation electrodes located under the at least one pair of compensation masses, each pair of compensation electrodes comprising a first compensation electrode located under a first compensation mass in the corresponding pair of compensation masses, and a second compensation electrode located under a second compensation mass in the corresponding pair of compensation masses, and applying an electrical signal to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes to perform error compensation, The first compensation beam extends along the Y axis, and the second compensation beam extends along the X axis. The driving mass block is driven by the driving electrode to reciprocate along the X axis. The detection mass block is driven by the driving mass block to reciprocate along the X axis together with the driving mass block. The Y axis is a sensitive axis. When there is rotation on the Y axis, the detection mass block will cause movement along the Z axis. The angular velocity of the rotation on the Y axis can be detected by detecting the change of the detection capacitance. The X axis is perpendicular to the Y axis, and the Z axis is perpendicular to the X and Y axes. By applying an electrical signal to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes, the at least one pair of compensation mass blocks provides the detection mass block with an error compensation force along the Z axis, or an error compensation force rotating along the X axis, or an error compensation force rotating along the Y axis through the first compensation beam and the second compensation beam. 2 . The MEMS gyroscope according to claim 1 , wherein the detection mass block comprises a detection beam located at an edge, and a second compensation beam is coupled between the first compensation beam and the detection beam. 3. The MEMS gyroscope according to claim 1, further comprising: Anchor points fixed to the substrate; a drive beam connecting the anchor point and the drive mass; The driving mass block, the detecting mass block, the compensating mass block, the first compensation beam, the second compensation beam and the driving beam are all suspended above the substrate, and the detecting electrode and the compensating electrode are both arranged on the substrate. 4. The MEMS gyroscope according to claim 3, characterized in that it also includes: A driving feedback electrode is disposed on the substrate, and the driving feedback electrode is located below the driving mass block. 5. The MEMS gyroscope according to claim 1 is characterized in that an electrical signal is applied to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes to cause the first compensation beam to rotate, and then the second compensation beam provides the detection mass block with an error compensation force along the Z axis. 6. The MEMS gyroscope according to claim 5, characterized in that when the detection mass moves in one direction along the X-axis, an electrical signal is applied to the first compensation electrode and/or the second compensation electrode in the at least one pair of compensation electrodes to cause the first compensation beam to rotate, and then the second compensation beam provides the detection mass with an error compensation force in the Z-axis direction; When the detection mass block moves in another direction opposite to the X-axis, an electrical signal is applied to the first compensation electrode and/or the second compensation electrode of the at least one pair of compensation electrodes, causing the first compensation beam to rotate, and then the second compensation beam provides the detection mass block with an error compensation force downward along the Z-axis. 7. The MEMS gyroscope according to claim 1, characterized in that: The electrical signal V _{quad — cancel — p} applied to the first compensation electrode of the at least one pair of compensation electrodes is: V _{quad_cancel_p} =V _PM +V _DC +V _AC cos(ωt) The electrical signal V _{quad — cancel — n} is applied to the second compensation electrode of the at least one pair of compensation electrodes: V _{quad_cancel_n} =V _PM +V _DC -V _AC cos(ωt) Wherein, V _PM is the electrical signal applied to the detection mass block, V _DC is a predetermined direct current signal, V _AC is a predetermined alternating current signal, and ω is a driving frequency. 8. The MEMS gyroscope according to claim 2, characterized in that: There are two first compensation beams, which are respectively located on both sides of the detection mass block along the X-axis. There are two second compensation beams, which are respectively located on both sides of the detection mass block along the X-axis. There are two detection beams, which are respectively located on both sides of the detection mass block along the X-axis. Each second compensation beam is connected between a corresponding first compensation beam and a corresponding detection beam; The at least one pair of compensating masses comprises four pairs of compensating masses, A pair of compensation masses are coupled to a first compensation beam and are located on an upper side of a second compensation beam, A pair of compensation masses are coupled to the first compensation beam and are located at the lower side of the second compensation beam, One pair of compensation masses is coupled to another first compensation beam and is located on the upper side of the second compensation beam. One pair of compensation masses is coupled to the other first compensation beam and is located at the lower side of the second compensation beam, The at least one pair of compensation electrodes shown includes four pairs of compensation electrodes, each pair of compensation electrodes corresponds to a pair of compensation mass blocks, The compensating mass block in each pair of compensating mass blocks, which is far from the detection mass block, is called a first compensating mass block, and the compensating mass block in each pair of compensating mass blocks, which is close to the detection mass block, is called a second compensating mass block. 9. The MEMS gyroscope according to claim 8, characterized in that by applying an electrical signal to the first compensation electrode and/or the second compensation electrode of each pair of compensation electrodes, one first compensation beam can be caused to rotate in a positive direction and the other first compensation beam can be caused to rotate in a reverse direction, and then the second compensation beam drives the detection mass block to provide an error compensation force along the Z axis to perform orthogonal error compensation. By applying an electrical signal to the first compensation electrode and/or the second compensation electrode of each pair of compensation electrodes, it is possible to cause the one first compensation beam to rotate in the opposite direction and the other first compensation beam to rotate in the forward direction, and then the second compensation beam provides the detection mass block with an error compensation force downward along the Z axis to perform orthogonal error compensation. 10. The MEMS gyroscope according to claim 8, characterized in that: By applying the same electrical signal to a pair of compensation electrodes corresponding to each pair of compensation masses coupled to the same first compensation beam, the second compensation beam provides the detection mass with an error compensation force for rotation along the Y axis; By applying the same electrical signal to a pair of compensation electrodes corresponding to each pair of compensation masses on the same side coupled to different first compensation beams, the second compensation beam provides the detection mass with an error compensation force for rotation along the X-axis.