CN113777035A - Crystal refractive index measuring method and device and storage medium - Google Patents
Crystal refractive index measuring method and device and storage medium Download PDFInfo
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Abstract
本发明公开了一种晶体折射率测量方法、装置及存储介质，其中方法包括获取由干涉仪产生的参考干涉图像和晶体干涉图像；对参考干涉图像和晶体干涉图像进行重心点计算得到第一重心点坐标和第二重心点坐标；计算重心相对移动量，根据重心相对移动量、参考干涉图像的条纹宽度、晶体的厚度和源光束的波长得到折射率；无需对晶体进行加工改变晶体形状即可直接进行折射率测量，且测量精度高，测量速率高，大大提升了晶体折射率测量的效率和准确率。
The invention discloses a method, a device and a storage medium for measuring the refractive index of a crystal, wherein the method includes acquiring a reference interference image and a crystal interference image generated by an interferometer; calculating the center of gravity of the reference interference image and the crystal interference image to obtain a first center of gravity Point coordinates and second center of gravity point coordinates; calculate the relative movement of the center of gravity, and obtain the refractive index according to the relative movement of the center of gravity, the fringe width of the reference interference image, the thickness of the crystal, and the wavelength of the source beam; no need to process the crystal to change the crystal shape. The refractive index measurement is performed directly, with high measurement accuracy and high measurement rate, which greatly improves the efficiency and accuracy of crystal refractive index measurement.
Description
Technical Field
The invention relates to the field of refractive index measurement, in particular to a crystal refractive index measurement method, a crystal refractive index measurement device and a storage medium.
Background
The refractive index is an important parameter of the crystal and can reflect the optical property and the physical property of the crystal. At present, the representative methods for measuring the refractive index mainly comprise a minimum deflection angle method, an ellipsometry method, an oil immersion method and the like. The minimum deviation angle method has high measurement accuracy, but has the problems of complex and time-consuming operation, the crystal needs to be specially processed into a prism, the processing accuracy requirement is high, the difficulty is high, the shape of the raw material is damaged, and the recycling of the sample is limited. Ellipsometry is mainly used for measuring the refractive index of a thin film. The solution used in the oil immersion method is complicated to prepare, and the transparency of the crystal is reduced and the measurement accuracy is deteriorated when the solution is immersed in oil.
Disclosure of Invention
The present invention is directed to at least one of the technical problems of the prior art, and provides a method and an apparatus for measuring a refractive index of a crystal, and a storage medium.
The technical scheme adopted by the invention for solving the problems is as follows:
in a first aspect of the present invention, a crystal refractive index measurement method includes:
acquiring a reference interference image and a crystal interference image, wherein the reference interference image is generated by a source light beam passing through an interferometer without a crystal placed on the interferometer, and the crystal interference image is generated by the source light beam passing through the interferometer with the crystal placed on the interferometer;
performing center of gravity point calculation on the reference interference image and the crystal interference image to respectively obtain a first center of gravity point coordinate of the reference interference image and a second center of gravity point coordinate of the crystal interference image, wherein the center of gravity point calculation comprises processing the image to obtain a gray value of a pixel point and calculating the center of gravity point coordinate of the image by taking the gray value of the pixel point as the quality of the pixel point;
and obtaining the relative movement amount of the center of gravity according to the first center of gravity point coordinate and the second center of gravity point coordinate, and obtaining the refractive index of the crystal according to the relative movement amount of the center of gravity, the fringe width of the reference interference image, the thickness of the crystal and the wavelength of the source light beam.
According to a first aspect of the invention, the source beam is laser light emitted by a helium-neon laser.
According to the first aspect of the present invention, the interferometer generates two beams by a partial amplitude method to achieve interference.
According to the first aspect of the present invention, the coordinates of the center of gravity point of the image are represented by the following equation:
wherein X is the abscissa of the center of gravity point, Y is the ordinate of the center of gravity point, m is the number of pixels of the image, and XijAbscissa, y, of a pixel point representing the ith row and the jth column of the imageijThe ordinate, g, of a pixel point representing the ith row and the jth column of the imageijAnd expressing the gray value of the pixel point of the ith row and the jth column of the image.
According to the first aspect of the present invention, the obtaining of the relative shift amount of the center of gravity from the first center of gravity point coordinate and the second center of gravity point coordinate is specifically: and calculating the difference of the first gravity center point coordinate and the second gravity center point coordinate to obtain the relative movement amount of the gravity center.
According to the first aspect of the present invention, the refractive index of the crystal is represented by the following formula:
where n is a refractive index of the crystal, Δ Y is the relative shift amount of the center of gravity, Y is a fringe width of the reference interference image, λ is a wavelength of the source beam, and d is a thickness of the crystal.
In a second aspect of the present invention, a crystal refractive index measuring apparatus includes:
an interferometer;
the system comprises an interference image acquisition module, a crystal interference image acquisition module and a control module, wherein the interference image acquisition module is used for acquiring a reference interference image and a crystal interference image, the reference interference image is generated by a source light beam passing through the interferometer without a crystal placed, and the crystal interference image is generated by the source light beam passing through the interferometer with the crystal placed;
the gravity center point calculation module is used for performing gravity center point calculation on the reference interference image and the crystal interference image to respectively obtain a first gravity center point coordinate of the reference interference image and a second gravity center point coordinate of the crystal interference image, wherein the gravity center point calculation comprises processing the image to obtain a gray value of a pixel point and calculating the gravity center point coordinate of the image by taking the gray value of the pixel point as the quality of the pixel point;
and the refractive index calculation module is used for obtaining the relative movement amount of the center of gravity according to the first center of gravity point coordinate and the second center of gravity point coordinate, and obtaining the refractive index of the crystal according to the relative movement amount of the center of gravity, the fringe width of the reference interference image, the thickness of the crystal and the wavelength of the source light beam.
According to a second aspect of the present invention, the interferometer includes a source beam generator, a first lens, a second lens, a first beam splitter, a second beam splitter, an attenuation sheet, and a crystal placing stage; the source light beam generated by the source light beam generator sequentially passes through the first lens, the second lens and the first beam splitter, one light beam obtained by beam splitting of the first beam splitter passes through the attenuation sheet and the second beam splitter, and the other light beam obtained by beam splitting of the first beam splitter passes through the crystal placing table and the second beam splitter.
According to a second aspect of the invention, the interference image acquisition module is a CCD camera.
In a third aspect of the present invention, a storage medium has stored therein executable instructions that when executed by a processor implement the crystal refractive index measurement method according to the first aspect of the present invention.
The scheme at least has the following beneficial effects: the refractive index can be directly measured without processing the crystal to change the shape of the crystal, the measurement precision is high, the measurement speed is high, and the efficiency and the accuracy of the measurement of the refractive index of the crystal are greatly improved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a flow chart of a method for measuring a refractive index of a crystal according to an embodiment of the present invention;
FIG. 2 is a diagram of a crystal refractive index measuring apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the structure of an interferometer and an interferometric image acquisition module;
FIG. 4 is a schematic diagram of a reference interference image;
FIG. 5 is a schematic illustration of a crystal interference image.
Detailed Description
Reference will now be made in detail to the present preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, the meaning of a plurality of means is one or more, the meaning of a plurality of means is two or more, and larger, smaller, larger, etc. are understood as excluding the number, and larger, smaller, inner, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
Referring to fig. 1, an embodiment of a first aspect of the present invention provides a crystal refractive index measurement method.
The crystal refractive index measuring method comprises the following steps:
step S100, acquiring a reference interference image and a crystal interference image, wherein the reference interference image is generated by the source light beam passing through the interferometer 100 without the crystal placed, and the crystal interference image is generated by the source light beam passing through the interferometer 100 with the crystal placed.
In step S100, the interferometer 100 generates a dual beam by a partial amplitude method to achieve interference, and the interferometer 100 is specifically a mach-zehnder interferometer 100.
Referring to fig. 3, the interferometer 100 includes a source beam generator 10, a first lens 21, a second lens 22, a first beam splitter 31, a second beam splitter 32, an attenuation sheet 40, and a crystal placing stage 50; the source light beam generated by the source light beam generator 10 passes through the first lens 21, the second lens 22 and the first beam splitter 31 in sequence, one of the light beams split by the first beam splitter 31 passes through the attenuation sheet 40 and the second beam splitter 32, and the other light beam split by the first beam splitter 31 passes through the crystal placing table 50 and the second beam splitter 32. Interferometer 100 may also be provided with a mirror 60 to adjust the direction of propagation of the light beam.
Specifically, the source beam generator 10 is a helium-neon laser; the source beam is laser emitted by a helium-neon laser. The helium-neon laser is a gas laser which takes neutral atomic gases such as helium and neon as working substances; the continuous laser light is output in a continuous excitation manner. The gas atoms have a determined energy level structure, and are excited by external electrons to generate energy level transition to generate excited radiation to emit laser, so that the helium-neon laser wavelength is pure monochromatic light, the line width is extremely narrow, the wavelength error is only a few nanometers, and the helium-neon laser has an extremely large coherence length. The atomic level structure is determined, and thus the laser is not affected by temperature fluctuation. The effect of the resonant cavity ensures that the laser output has good collimation property, and the divergence angle is small and is only a few milliradians.
When the crystal is not placed on the crystal placing stage 50, a reference interference image can be obtained by the light beam generated by the interferometer 100. When the crystal is placed on the crystal stage 50 with one of the beams passing through the crystal, an interference image of the crystal can be obtained by the beams generated by the interferometer 100.
The light beam generated by the interferometer 100 enters the CCD camera, and a reference interference image and a crystal interference image can be obtained.
Step S200, performing gravity center point calculation on the reference interference image and the crystal interference image to respectively obtain a first gravity center point coordinate of the reference interference image and a second gravity center point coordinate of the crystal interference image, wherein the gravity center point calculation comprises processing the image to obtain a gray value of a pixel point and calculating the gravity center point coordinate of the image by taking the gray value of the pixel point as the quality of the pixel point.
In step S200, since the optical path difference changes after the light beam passes through the crystal, the interference image has significant interference fringe movement and fringe width change. In the image processing process, a single pixel point of the image is regarded as an area, and the gray value of the pixel point is taken as the quality of the pixel point, so that the center of gravity of the interference image can be solved.
And performing gravity center point calculation on the reference interference image and the crystal interference image, wherein the gravity center point coordinates of the images are represented by the following formula:
wherein X is the abscissa of the center of gravity point, Y is the ordinate of the center of gravity point, m is the number of pixels of the image, and XijAbscissa, y, of pixel points representing the ith row and the jth column of the imageijOrdinate, g, of a pixel point representing the ith row and the jth column of an imageijAnd expressing the gray value of the pixel point of the ith row and the jth column of the image. G is the total gray value of the interference image. GxDistance of x-axis, GyIs the distance of the y-axis. The first gravity center point coordinate of the reference interference image and the second gravity center point coordinate of the crystal interference image can be obtained through the formula calculation.
And step S300, obtaining the relative movement amount of the center of gravity according to the first center of gravity point coordinate and the second center of gravity point coordinate, and obtaining the refractive index of the crystal according to the relative movement amount of the center of gravity, the fringe width of the reference interference image, the thickness of the crystal and the wavelength of the source light beam.
For step S300, the obtaining of the relative movement amount of the center of gravity according to the first center of gravity point coordinate and the second center of gravity point coordinate specifically includes: and calculating the difference of the first gravity center point coordinate and the second gravity center point coordinate to obtain the relative movement amount of the gravity center.
The refractive index of the crystal is expressed by the following equation:
where n is the refractive index of the crystal, Δ Y is the relative shift amount of the center of gravity, Y is the fringe width of the reference interference image, λ is the wavelength of the source beam, and d is the thickness of the crystal. y can be calculated from the product of the number of pixels occupied by the interference fringes and the pixel distance.
Referring to fig. 4 and 5, fig. 4 is a schematic view of a reference interference image, and fig. 5 is a schematic view of a crystal interference image. The he-ne laser wavelength was 632.8nm and the crystal measured 4mm thick, and the crystal refractive index measured by processing fig. 4 and 5 using the crystal refractive index measurement method described above was 2.0953, whereas the actual crystal refractive index was 2.0976, which were substantially similar.
By the crystal refractive index measuring method, the refractive index can be directly measured without processing the crystal and changing the shape of the crystal, the measuring precision is high, the measuring speed is high, and the crystal refractive index measuring efficiency and accuracy are greatly improved.
Referring to fig. 2, an embodiment of a second aspect of the present invention provides a crystal refractive index measurement apparatus. The crystal refractive index measuring apparatus employs the crystal refractive index measuring method as an embodiment of the first aspect of the present invention.
The crystal refractive index measuring apparatus includes an interferometer 100, an interference image acquisition module 200, a gravity center point calculation module 300, and a refractive index calculation module 400.
It should be noted that the center of gravity calculation module 300 and the refractive index calculation module 400 can be implemented by circuit hardware or computer software programs.
The interference image obtaining module 200 is configured to obtain a reference interference image and a crystal interference image, where the reference interference image is generated by passing a source light beam through the interferometer 100 without a crystal placed thereon, and the crystal interference image is generated by passing the source light beam through the interferometer 100 with a crystal placed thereon.
The gravity center point calculation module 300 is configured to perform gravity center point calculation on the reference interference image and the crystal interference image to obtain a first gravity center point coordinate of the reference interference image and a second gravity center point coordinate of the crystal interference image, respectively, where the gravity center point calculation includes processing the image to obtain a gray value of a pixel point and calculating the gravity center point coordinate of the image by using the gray value of the pixel point as the quality of the pixel point.
The refractive index calculation module 400 is configured to obtain the relative shift amount of the center of gravity according to the first center of gravity point coordinate and the second center of gravity point coordinate, and obtain the refractive index of the crystal according to the relative shift amount of the center of gravity, the fringe width of the reference interference image, the thickness of the crystal, and the wavelength of the source light beam.
In certain embodiments of the second aspect of the present invention, interferometer 100 comprises source beam generator 10, first lens 21, second lens 22, first beam splitter 31, second beam splitter 32, attenuation sheet 40, and crystal stage 50; the source light beam generated by the source light beam generator 10 passes through the first lens 21, the second lens 22 and the first beam splitter 31 in sequence, one of the light beams split by the first beam splitter 31 passes through the attenuation sheet 40 and the second beam splitter 32, and the other light beam split by the first beam splitter 31 passes through the crystal placing table 50 and the second beam splitter 32. The source beam generator 10 is embodied as a helium-neon laser.
In certain embodiments of the second aspect of the present invention, the interference image acquisition module 200 is a CCD camera.
It should be noted that, the crystal refractive index measuring apparatus adopted in the embodiment of the second aspect of the present invention adopts the crystal refractive index measuring method as the embodiment of the first aspect of the present invention, has the same technical solution, solves the same technical problems, and achieves the same technical effects, and is not described in detail herein.
In an embodiment of a third aspect of the invention, a storage medium is provided. The storage medium has stored therein executable instructions which, when executed by the processor, implement the crystal refractive index measurement method according to the first aspect of the invention.
One of ordinary skill in the art will appreciate that all or some of the steps, systems, and methods disclosed above may be implemented as software, firmware, hardware, and suitable combinations thereof. Some or all of the physical components may be implemented as software executed by a processor, such as a central processing unit, digital signal processor, or microprocessor, or as hardware, or as an integrated circuit, such as an application specific integrated circuit. Such software may be distributed on computer readable media, which may include computer storage media (or non-transitory media) and communication media (or transitory media). The term computer storage media includes volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data, as is well known to those of ordinary skill in the art. Computer storage media includes, but is not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, Digital Versatile Disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium which can be used to store the desired information and which can accessed by a computer. In addition, communication media typically embodies computer readable instructions, data structures, program modules or other data in a modulated data signal such as a carrier wave or other transport mechanism and includes any information delivery media as known to those skilled in the art.
The above description is only a preferred embodiment of the present invention, and the present invention is not limited to the above embodiment, and the present invention shall fall within the protection scope of the present invention as long as the technical effects of the present invention are achieved by the same means.
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| WO2023024467A1 (en) * | 2021-08-26 | 2023-03-02 | 五邑大学 | Crystal refractive index measurement method and apparatus, and storage medium |
| WO2023045351A1 (en) * | 2021-09-24 | 2023-03-30 | 五邑大学 | Crystal refractive index measurement method and apparatus based on fringe image, and storage medium |
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