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CN113776459A - A confocal three-dimensional measurement system and coordinate and color measurement method - Google Patents

A confocal three-dimensional measurement system and coordinate and color measurement method Download PDF

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Publication number
CN113776459A
CN113776459A CN202111020692.2A CN202111020692A CN113776459A CN 113776459 A CN113776459 A CN 113776459A CN 202111020692 A CN202111020692 A CN 202111020692A CN 113776459 A CN113776459 A CN 113776459A
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depth
confocal
image sensor
light source
projected
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魏悦
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Shanghai Mediworks Precision Instruments Co Ltd
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Shanghai Mediworks Precision Instruments Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a confocal three-dimensional measurement system which is characterized by comprising a laser light source, a digital micromirror array, a light splitting device, a depth scanning lens and an image sensor, wherein the laser light source is arranged on the front side of the digital micromirror array; the laser light source emits collimated laser with a certain diameter to be projected on the digital micro-mirror array, a group of point arrays with certain intervals are projected on the surface of a target object to be measured through the light splitting device by the aid of the reflector array of the digital micro-mirror array, light spot information projected on different depths on the target object is collected by the image sensor after passing through the depth scanning lens.

Description

Confocal three-dimensional measurement system and coordinate and color measurement method
Technical Field
The invention relates to a confocal three-dimensional measurement system and a coordinate and color measurement method, belonging to the technical field of three-dimensional object detection.
Background
For three-dimensional measurement, the resolution precision of the conventional structured light or multi-view vision technology and the like in many applications cannot meet the measurement requirement, and real-time true color three-dimensional imaging modeling cannot be usually carried out. The confocal technology can effectively eliminate various scattered lights generated by a detection sample during imaging, so that the resolution limit of a common wide-field imaging system is broken through, but the confocal technology needs point-by-point scanning and is slow in imaging speed, and the confocal technology cannot be well adapted to some applications needing rapid imaging.
Disclosure of Invention
In order to solve the problems in the background art, the technical scheme of the invention is to provide a confocal three-dimensional measurement system, which is characterized by comprising a laser light source, a digital micromirror array, a light splitting device (including but not limited to a light splitting prism, a dichroic mirror and the like), a depth scanning lens and an image sensor; the laser light source emits collimated laser with a certain diameter to be projected on the digital micro-mirror array, a group of point arrays with certain intervals are projected on the surface of a target object to be measured through the light splitting device by the aid of the reflector array of the digital micro-mirror array, light spot information projected on the target object at different depths is collected by the image sensor after passing through the depth scanning lens.
Preferably, the depth scanning lens is a liquid zoom lens or a lens performing scanning movement in the depth direction.
Preferably, the laser light source includes a red laser light source, a green laser light source and a blue laser light source.
The technical scheme of the invention also provides a confocal three-dimensional coordinate measuring method, which is characterized by comprising the following steps:
step one, a laser source emits laser;
step two, the laser is projected to the digital micro-mirror array through collimation;
step three, controlling a reflector array of the digital micromirror array, and projecting a group of point arrays with specific intervals to the surface of a target object;
fourthly, the light spot information projected to different depths on the target object is collected by the image sensor after passing through the depth scanning lens;
controlling a depth scanning lens to scan in the depth direction, and judging the depth position at which the image of each light spot is focused according to the size and brightness of the light spot on an image sensor so as to obtain the space coordinates of all the light spots;
and step six, controlling pixel points of the digital micromirror array, scanning the projected point array in the X direction and the Y direction in sequence, and repeating the step three to the step five to finally obtain the space coordinate positions of all the points to be measured on the whole target object.
Preferably, in the fifth step, the depth scanning lens is controlled to scan in the depth direction, for example, if the light spot is at the parfocal position, a minimum-size and highest-brightness diffuse spot is obtained on the image sensor, after each depth scanning, images of the image sensor at all scanning positions are obtained, and according to the brightness distribution on each picture, which depth position the image of each light spot is focused on is determined, so that the spatial coordinates of all light spots can be obtained.
The technical scheme of the invention also provides a confocal three-dimensional color measurement method, which is characterized by comprising the following steps:
the method comprises the following steps that firstly, a laser light source sequentially emits red laser, green laser and blue laser;
projecting the three primary colors laser to the digital micromirror array through collimation;
step three, controlling a reflector array of the digital micromirror array, and projecting a group of point arrays with certain intervals to the surface of a target object;
fourthly, the light spot information projected to different depths on the target object is collected by the image sensor after passing through the depth scanning lens;
controlling a depth scanning lens to scan in the depth direction, and judging the depth position at which the image of each light spot is focused according to the size and brightness of the light spot on the image sensor;
and step six, calculating the color of the point according to the brightness components of the red, green and blue colors recorded by the image sensor when the light point is at the focusing position.
The invention has the advantages that the fast confocal full-color scanning at different depth levels can be realized through the improved array confocal and depth scanning technology, and the high-speed, high-resolution and full-color three-dimensional imaging is considered.
Drawings
FIG. 1 is a schematic structural diagram of a confocal three-dimensional measurement system;
FIG. 2 is a schematic diagram of a point array projected by a digital micromirror array;
FIG. 3 is a schematic diagram of controlling the digital micromirror array to scan the projected spot array in the X direction.
Detailed Description
In order to make the invention more comprehensible, preferred embodiments are described in detail below with reference to the accompanying drawings.
Examples
In this embodiment, as shown in fig. 1, a laser source 1 emits collimated laser with a certain diameter, and projects the collimated laser onto a digital micromirror array 3, so as to control a mirror array of the digital micromirror array 3, and project a group of dot arrays with a certain interval to the surface of a target object 5 to be measured through a light splitter 4, where the dot arrays are generally distributed as shown in fig. 2.
Light spots projected to different depths on the target object 5 form diffuse spots with different sizes and energy distributions on the image sensor 7 after passing through the depth scanning lens 6. The depth scanning lens 6 may be a liquid zoom lens, or a lens that is mechanically movable in the depth direction. Controlling the depth scanning lens 6 to scan in the depth direction, for example, the light spot is at the parfocal position, will result in the smallest size and highest brightness of the diffuse spot on the image sensor. After each depth scanning, the image sensor images at all scanning positions are obtained, and the focusing position of each light spot in the depth direction is found according to the brightness distribution on each picture, namely the depth coordinate position of each light spot, wherein the Z direction is defined as the depth direction of the depth scanning lens 6, and the light spot array direction is X, Y direction, so that the projection X, Y coordinate of the light spot is easily obtained according to the position of the light spot on the image sensor, and the space coordinate position of the light spot can be obtained.
Taking two points in the projected dot matrix as an example, when the depth scanning lens is at the initial position, the two points form two light spots with lower brightness and larger size on the sensor, after the depth scanning starts, the light spots formed by the two points gradually shrink, the central brightness gradually increases, and at the depth a, the brightness of the first point reaches the highest value, and the size of the light spot is the smallest. When the depth b is scanned, the brightness of the second point is highest, and the spot size is smallest, so that the depth direction position of the first point is a, and the depth direction position of the second point is b.
The pixel points of the digital micromirror array 3 are controlled to scan the projected dot array in the X and Y directions sequentially, as shown in fig. 3. And finally obtaining the space coordinate positions of all the points to be measured on the whole target object 5.
The laser light source 1 can be a laser synthesis of three colors of red, green and blue, and finally the point cloud space position coordinates of the surface of the measured object and the color information of each imaging point can be obtained simultaneously. The three primary colors of laser are respectively projected according to the time sequence, red, green and blue are sequentially changed, the image sensor 7 records and obtains the brightness components of the red, green and blue colors of each point of the target object 5 at the focusing position, and therefore the color of the point is calculated.

Claims (6)

1.一种共聚焦三维测量系统,其特征在于,包括激光光源、数字微镜阵列、分光器件、深度扫描透镜和图像传感器;所述激光光源投射一定大小的一束激光,投射在数字微镜阵列,经数字微镜阵列的反光镜阵列投射一组具有特定间隔的点阵列通过分光器件到被测的目标物体表面,投射在目标物体上不同深度上的光点信息,经深度扫描透镜后由图像传感器采集。1. a confocal three-dimensional measurement system, is characterized in that, comprises laser light source, digital micromirror array, spectroscopic device, depth scanning lens and image sensor; Described laser light source projects a certain size of laser beam, projected on digital micromirror Array, through the mirror array of the digital micro-mirror array, a group of point arrays with specific intervals are projected to the surface of the target object to be measured through the spectroscopic device, and the light point information at different depths on the target object is projected. Image sensor acquisition. 2.根据权利要求1所述的一种共聚焦三维测量系统,其特征在于,所述的深度扫描透镜为液体变焦透镜或在深度方向进行扫描运动的透镜。2 . The confocal three-dimensional measurement system according to claim 1 , wherein the depth scanning lens is a liquid zoom lens or a lens that performs scanning motion in the depth direction. 3 . 3.根据权利要求1所述的一种共聚焦三维测量系统,其特征在于,所述的激光光源包括红色激光光源、绿色激光光源和蓝色激光光源。3 . The confocal three-dimensional measurement system according to claim 1 , wherein the laser light source comprises a red laser light source, a green laser light source and a blue laser light source. 4 . 4.一种共聚焦三维坐标测量方法,其特征在于,采用权利要求1或2所述的共聚焦三维测量系统,具体步骤如下:4. a confocal three-dimensional coordinate measurement method, is characterized in that, adopts the confocal three-dimensional measurement system described in claim 1 or 2, and concrete steps are as follows: 步骤一、激光光源发射出激光;Step 1. The laser light source emits laser light; 步骤二、准直激光投射到数字微镜阵列;Step 2: Project the collimated laser to the digital micromirror array; 步骤三、控制数字微镜阵列的反光镜阵列,投射一组具有一定间隔的点阵列到目标物体表面;Step 3, controlling the mirror array of the digital micromirror array, and projecting a group of point arrays with a certain interval to the surface of the target object; 步骤四、投射到目标物体上不同深度上的光点信息,经深度扫描透镜后,由图像传感器采集;Step 4: The light point information projected on the target object at different depths is collected by the image sensor after being scanned by the depth lens; 步骤五、控制深度扫描透镜在深度方向上扫描,根据光点在图像传感器上弥散斑的尺寸和亮度判断各光点的成像在哪个深度位置上聚焦,从而得到所有光点的空间坐标;Step 5: Control the depth scanning lens to scan in the depth direction, and determine at which depth position the imaging of each light spot is focused according to the size and brightness of the scattered spot on the image sensor, so as to obtain the spatial coordinates of all the light spots; 步骤六、控制数字微镜阵列的像素点,将投射的点阵列在X方向和Y方向依次进行扫描,重复步骤三至步骤五,最终得到整个目标物体上所有待测点的空间坐标位置。Step 6: Control the pixel points of the digital micromirror array, scan the projected point array in the X direction and the Y direction in turn, repeat steps 3 to 5, and finally obtain the spatial coordinate positions of all the points to be measured on the entire target object. 5.根据权利要求4所述的一种共聚焦三维坐标测量方法,其特征在于,所述步骤五中,控制深度扫描透镜在深度方向上扫描,如光点在齐焦位置上,会在图像传感器上得到尺寸最小,亮度最高的弥散斑,每次进行深度扫描后,得到所有扫描位置上的图像传感器成像,根据其每张画面上的亮度分布,判断各光点的成像在哪个深度位置上聚焦,即可得到所有的光点的空间坐标。5. A confocal three-dimensional coordinate measurement method according to claim 4, characterized in that, in the step 5, the depth scanning lens is controlled to scan in the depth direction, if the light spot is in a parfocal position, it will be in the image The diffused spot with the smallest size and the highest brightness is obtained on the sensor. After each depth scan, the image sensor images at all scanning positions are obtained. According to the brightness distribution on each screen, it is determined which depth position the image of each light spot is at. By focusing, the spatial coordinates of all light spots can be obtained. 6.一种共聚焦三维颜色测量方法,其特征在于,采用权利要求3所述的共聚焦三维测量系统,具体步骤如下:6. a confocal three-dimensional color measurement method, is characterized in that, adopts the confocal three-dimensional measurement system described in claim 3, and concrete steps are as follows: 步骤一、激光光源依次发射出红色激光、绿色激光和蓝色激光;Step 1: The laser light source emits a red laser, a green laser and a blue laser in sequence; 步骤二、三原色准直激光投射到数字微镜阵列;Step 2. The three primary color collimated lasers are projected onto the digital micromirror array; 步骤三、控制数字微镜阵列的反光镜阵列,投射一组具有一定间隔的点阵列到目标物体表面;Step 3, controlling the mirror array of the digital micromirror array, and projecting a group of point arrays with a certain interval to the surface of the target object; 步骤四、投射到目标物体上不同深度上的光点信息,经深度扫描透镜后,由图像传感器采集;Step 4: The light point information projected on the target object at different depths is collected by the image sensor after being scanned by the depth lens; 步骤五、控制深度扫描透镜在深度方向上扫描,根据光点在图像传感器上弥散斑的尺寸和亮度判断各光点的成像在哪个深度位置上聚焦;Step 5: Controlling the depth scanning lens to scan in the depth direction, and judging at which depth position the imaging of each light spot is focused according to the size and brightness of the scattered spot on the image sensor; 步骤六、根据光点在聚焦位置时图像传感器记录得到的红绿蓝三种颜色各自亮度分量,从而计算出该点的颜色。Step 6: Calculate the color of the spot according to the respective luminance components of the three colors of red, green and blue recorded by the image sensor when the light spot is in the focus position.
CN202111020692.2A 2021-09-01 2021-09-01 A confocal three-dimensional measurement system and coordinate and color measurement method Pending CN113776459A (en)

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Citations (11)

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CN111295565A (en) * 2018-10-09 2020-06-16 登士柏希罗纳有限公司 Apparatus and method for determining surface topology and associated colors
CN112648926A (en) * 2021-01-13 2021-04-13 宁波五维检测科技有限公司 Line-focusing color confocal three-dimensional surface height measuring device and method
CN112781526A (en) * 2020-12-29 2021-05-11 华侨大学 Off-axis optical dispersion error elimination system and method for parallel chromatic confocal measurement

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1941843A2 (en) * 2004-06-17 2008-07-09 Cadent Ltd. Method and apparatus for colour imaging a three-dimensional structure
CN102802520A (en) * 2009-06-17 2012-11-28 3形状股份有限公司 Focus Scanning Apparatus
CN104783757A (en) * 2009-06-17 2015-07-22 3形状股份有限公司 Focus scanning apparatus
CN102506754A (en) * 2011-11-09 2012-06-20 西安工业大学 Confocal measurement device for simultaneously measuring surface appearance and color of object and using method thereof
TW201321714A (en) * 2011-11-29 2013-06-01 Univ Nat Taipei Technology Chromatic confocal microscope system and signal process method of the same
CN102589471A (en) * 2012-03-06 2012-07-18 上海理工大学 Parallel confocal detection system and method
CN107677371A (en) * 2013-02-13 2018-02-09 3形状股份有限公司 Record the focusing scanning means of color
CN107543508A (en) * 2016-06-27 2018-01-05 陈亮嘉 Optical system and object surface three-dimensional shape detection method using same
KR20170106251A (en) * 2017-07-20 2017-09-20 이영종 Hyper spectral image sensor and 3D Scanner using it
CN111295565A (en) * 2018-10-09 2020-06-16 登士柏希罗纳有限公司 Apparatus and method for determining surface topology and associated colors
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Application publication date: 20211210