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CN113744776B - Memory circuit, data writing and reading method thereof, memory and electronic equipment - Google Patents

Memory circuit, data writing and reading method thereof, memory and electronic equipment Download PDF

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Publication number
CN113744776B
CN113744776B CN202110864849.3A CN202110864849A CN113744776B CN 113744776 B CN113744776 B CN 113744776B CN 202110864849 A CN202110864849 A CN 202110864849A CN 113744776 B CN113744776 B CN 113744776B
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data
tunnel junction
bottom electrode
memory
memory circuit
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CN113744776A (en
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杨美音
李文静
叶力
向清懿
罗军
高建峰
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Institute of Microelectronics of CAS
HiSilicon Technologies Co Ltd
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Institute of Microelectronics of CAS
HiSilicon Technologies Co Ltd
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1675Writing or programming circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1653Address circuits or decoders
    • G11C11/1655Bit-line or column circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1653Address circuits or decoders
    • G11C11/1657Word-line or row circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1673Reading or sensing circuits or methods

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Hall/Mr Elements (AREA)

Abstract

The invention can provide a memory circuit, a data writing and reading method thereof, a memory and an electronic device. The writing method comprises the following steps: a unidirectional current within a first preset range is introduced into a bottom electrode connected with the tunnel junction so as to write first data into the tunnel junction; or a unidirectional current within a second preset range is introduced into a bottom electrode connected with the tunnel junction so as to write second data into the tunnel junction. The absolute value of the current in the second preset range is larger than that in the first preset range, and the first data and the second data are opposite. The reading method comprises the following steps: a preset read voltage is applied to the tunnel junction to read out the data written in the tunnel junction. The memory circuit includes a bottom electrode, a tunnel junction, a first switching device, a second switching device, a bit line, a source line, and a read line. The invention changes the written data content by controlling the absolute value of the unidirectional current, so as to effectively solve at least one problem existing in the prior memory technology.

Description

存储器电路及其数据写入和读取方法、存储器、电子设备Memory circuit and data writing and reading method thereof, memory, electronic device

技术领域Technical field

本发明涉及存储器技术领域,更为具体来说,本发明能够提供存储器电路及其数据写入和读取方法、存储器、电子设备。The present invention relates to the field of memory technology. More specifically, the present invention can provide memory circuits and data writing and reading methods thereof, memories, and electronic devices.

背景技术Background technique

自旋轨道矩磁随机存储器(SOT-MRAM,Spin-Orbit TorqueMagnetic RandomAccess Memory)是指能够通过磁化状态的改变而存储数据的随机存储器,具有非易失性、低功耗以及抗辐射等优点。自旋轨道矩磁随机存储器的最基本存储单元是磁性隧道结(MTJ,Magnetic Tunnel Junction),通常,自旋轨道矩磁随机存储器需要外加磁场辅助写入,并且需要在底电极中通入两个相反的电流来实现写入不同信息。由于SOT-MRAM的读写通道分离需要两个晶体管来控制MTJ的读写操作,这大大增加了存储阵列的面积,减小了存储密度。此外,如何增加信息写入的可靠性也是一大难点。Spin-Orbit TorqueMagnetic Random Access Memory (SOT-MRAM) refers to a random access memory that can store data by changing the magnetization state. It has the advantages of non-volatility, low power consumption, and radiation resistance. The most basic storage unit of spin orbit moment magnetic random access memory is a magnetic tunnel junction (MTJ). Usually, spin orbit moment magnetic random access memory requires an external magnetic field to assist writing, and two electrodes need to be passed through the bottom electrode. Opposite currents are used to write different information. Since the read and write channel separation of SOT-MRAM requires two transistors to control the read and write operations of the MTJ, this greatly increases the area of the storage array and reduces the storage density. In addition, how to increase the reliability of information writing is also a major difficulty.

发明内容Contents of the invention

为兼顾磁随机存储器高可靠性和高集成度的要求,本发明可提供一种存储器电路及其数据写入和读取方法、存储器、电子设备,在满足高集成度要求的前提下实现了通过可靠的控制策略达到存储器数据写入的目的。In order to take into account the requirements of high reliability and high integration of magnetic random access memory, the present invention can provide a memory circuit and its data writing and reading methods, memory, and electronic equipment, which can achieve the requirements of high integration on the premise of meeting the requirements of high integration. Reliable control strategy achieves the purpose of memory data writing.

为实现上述的技术目的,本发明能够提供一种存储器电路的数据写入方法,该数据写入方法包括但不限于如下的一个或多个步骤。向与隧道结相连的底电极中通入处于第一预设范围内的单向电流,以写入第一数据至隧道结;或者,本发明向与隧道结相连的底电极中通入处于第二预设范围内的单向电流,以写入第二数据至隧道结。其中,第二预设范围内的电流绝对值大于第一预设范围内的电流绝对值,第一数据与第二数据相反。In order to achieve the above technical objectives, the present invention can provide a data writing method for a memory circuit. The data writing method includes but is not limited to one or more of the following steps. A unidirectional current within a first preset range is passed into the bottom electrode connected to the tunnel junction to write the first data to the tunnel junction; alternatively, the present invention passes a unidirectional current within a first preset range into the bottom electrode connected to the tunnel junction. Two unidirectional currents within a preset range are used to write second data to the tunnel junction. Wherein, the absolute value of the current in the second preset range is greater than the absolute value of the current in the first preset range, and the first data is opposite to the second data.

为实现上述的技术目的,本发明能够提供一种存储器电路的数据读取方法,该方法包括但不限于如下的步骤。向与底电极相连的隧道结中施加预设读取电压,以读出已写入于隧道结中存储的第一数据或第二数据。In order to achieve the above technical objectives, the present invention can provide a data reading method for a memory circuit, which method includes but is not limited to the following steps. A preset read voltage is applied to the tunnel junction connected to the bottom electrode to read out the first data or second data that has been written and stored in the tunnel junction.

为实现上述的技术目的,本发明还能够提供一种存储器电路,该存储器电路可包括但不限于底电极、隧道结、第一开关器件、第二开关器件、位线、源线以及读线。本发明的底电极用于在数据写入过程中通入单向电流,隧道结设置于底电极上且与底电极相连,用于存储写入的数据。第一开关器件与隧道结连接,第二开关器件与底电极的一端连接,位线与底电极的另一端连接,源线与第二开关器件连接,读线与第一开关器件连接。In order to achieve the above technical objectives, the present invention can also provide a memory circuit, which may include but is not limited to a bottom electrode, a tunnel junction, a first switching device, a second switching device, a bit line, a source line and a read line. The bottom electrode of the present invention is used to pass a unidirectional current during the data writing process, and the tunnel junction is disposed on the bottom electrode and connected to the bottom electrode, and is used to store the written data. The first switching device is connected to the tunnel junction, the second switching device is connected to one end of the bottom electrode, the bit line is connected to the other end of the bottom electrode, the source line is connected to the second switching device, and the read line is connected to the first switching device.

为实现上述的技术目的,本发明还能够具体提供一种存储器,该存储器可包括但不限于本发明任一实施例中的存储器电路。In order to achieve the above technical objectives, the present invention can also specifically provide a memory, which may include but is not limited to the memory circuit in any embodiment of the present invention.

为实现上述的技术目的,本发明还能够具体提供一种电子设备,该电子设备可包括但不限于本发明任一实施例中的存储器。In order to achieve the above technical objectives, the present invention can also specifically provide an electronic device, which may include but is not limited to the memory in any embodiment of the present invention.

本发明的有益效果为:相比于现有技术,本发明通过单向电流绝对值的大小改变写入的数据内容。通过在SOT底电极中通入水平方向的电流,本发明电流写入方式由电流的大小决定,即小电流(绝对值)写入“0”(或“1”),大电流(绝对值)写入“1”(或“0”)。该方式能够有效避免反复调整电流方向导致的控制电路复杂、数据写入可靠性差或增加器件的结构复杂度等问题。本发明降低了对存储器电路结构复杂度以及控制逻辑复杂度的要求,能够有助于实现SOT-MRAM存储器件的小型化和微型化,从而满足制造高密度的SOT-MRAM存储器件的要求。The beneficial effects of the present invention are: compared with the prior art, the present invention changes the written data content through the absolute value of the unidirectional current. By passing a horizontal current into the SOT bottom electrode, the current writing method of the present invention is determined by the size of the current, that is, a small current (absolute value) writes "0" (or "1"), and a large current (absolute value) writes "0" (or "1") Write "1" (or "0"). This method can effectively avoid problems such as complex control circuits, poor data writing reliability, or increased structural complexity of the device caused by repeated adjustments of the current direction. The invention reduces the requirements for memory circuit structure complexity and control logic complexity, and can help realize the miniaturization and miniaturization of SOT-MRAM memory devices, thereby meeting the requirements for manufacturing high-density SOT-MRAM memory devices.

附图说明Description of drawings

图1示出了本发明一个或多个实施例中的隧道结写入曲线的示意图(横坐标表示用于形成单向电流的电压,纵坐标表示隧道结电阻)。Figure 1 shows a schematic diagram of a tunnel junction writing curve in one or more embodiments of the present invention (the abscissa represents the voltage used to form a unidirectional current, and the ordinate represents the tunnel junction resistance).

图2示出了本发明一些实施例中存储器电路的结构示意图。Figure 2 shows a schematic structural diagram of a memory circuit in some embodiments of the present invention.

图3示出了本发明一些实施例中包含多个存储单元的存储器电路的结构示意图。FIG. 3 shows a schematic structural diagram of a memory circuit including multiple memory cells in some embodiments of the present invention.

图4示出了本发明另一些实施例中存储器电路的结构示意图。Figure 4 shows a schematic structural diagram of a memory circuit in other embodiments of the present invention.

图5示出了本发明另一些实施例中包含多个存储单元的存储器电路的结构示意图。FIG. 5 shows a schematic structural diagram of a memory circuit including multiple memory cells in other embodiments of the present invention.

图6示出了本发明还有一些实施例中存储器电路的结构示意图。Figure 6 shows a schematic structural diagram of a memory circuit in some embodiments of the present invention.

图7示出了本发明还有一些实施例中包含多个存储单元的存储器电路的结构示意图。FIG. 7 shows a schematic structural diagram of a memory circuit including multiple memory cells in some embodiments of the present invention.

图8示出了本发明一个或多个实施例中隧道结的结构示意图。Figure 8 shows a schematic structural diagram of a tunnel junction in one or more embodiments of the present invention.

具体实施方式Detailed ways

以下,将参照附图来描述本公开的实施例。但是应该理解,这些描述只是示例性的,而并非要限制本公开的范围。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本公开的概念。Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood, however, that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. Furthermore, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily confusing the concepts of the present disclosure.

在附图中示出了根据本公开实施例的各种结构示意图。这些图并非是按比例绘制的,其中为了清楚表达的目的,放大了某些细节,并且可能省略了某些细节。图中所示出的各种区域、层的形状以及它们之间的相对大小、位置关系仅是示例性的,实际中可能由于制造公差或技术限制而有所偏差,并且本领域技术人员根据实际所需可以另外设计具有不同形状、大小、相对位置的区域/层。Various structural schematic diagrams according to embodiments of the present disclosure are shown in the accompanying drawings. The drawings are not drawn to scale, with certain details exaggerated and may have been omitted for purposes of clarity. The shapes of the various regions and layers shown in the figures, as well as the relative sizes and positional relationships between them are only exemplary. In practice, there may be deviations due to manufacturing tolerances or technical limitations, and those skilled in the art will base their judgment on actual situations. Additional regions/layers with different shapes, sizes, and relative positions can be designed as needed.

在本公开的上下文中,当将一层/元件称作位于另一层/元件“上”时,该层/元件可以直接位于该另一层/元件上,或者它们之间可以存在居中层/元件。另外,如果在一种朝向中一层/元件位于另一层/元件“上”,那么当调转朝向时,该层/元件可以位于该另一层/元件“下”。In the context of this disclosure, when a layer/element is referred to as being "on" another layer/element, it can be directly on the other layer/element or intervening layers/elements may be present between them. element. Additionally, if one layer/element is "on" another layer/element in one orientation, then the layer/element can be "under" the other layer/element when the orientation is reversed.

本发明能够提供一种存储器电路的数据写入方法,具体可为一种利用电流大小对存储器进行不同数据写入的方法。本发明中涉及的存储器具体为SOT-MRAM(SpinOrbitTorque-Magnetic Random Access Memory),即自旋轨道耦合-磁随机存取存储器单元,可见本发明实施例可提供一种利用电流大小对SOT-MRAM进行数据写入的方法。The present invention can provide a data writing method for a memory circuit. Specifically, it can be a method for writing different data into a memory by using current magnitude. The memory involved in the present invention is specifically SOT-MRAM (SpinOrbitTorque-Magnetic Random Access Memory), that is, a spin-orbit coupling-magnetic random access memory unit. It can be seen that embodiments of the present invention can provide a method of using current magnitude to perform SOT-MRAM The method of writing data.

如图1所示,并可结合图2至图8,该存储器电路的数据写入方法可包括但不限于如下的步骤:向与隧道结相连的底电极中通入处于第一预设范围内的单向电流,以写入第一数据至隧道结;或者,向与隧道结相连的底电极中通入处于第二预设范围内的单向电流,以写入不同于第一数据的第二数据至隧道结。其中,本实施例中第二预设范围内的电流绝对值大于第一预设范围内的电流绝对值,第一数据与第二数据相反。第一数据为“1”,第二数据为“0”;或者,第一数据为“0”,第二数据为“1”。单向电流为平行于底电极延伸方向的单向电流,本实施例中的底电极延伸方向为水平方向。本发明一个或多个实施例中的隧道结可包括但不限于依次设置的自由层、隧穿层、参考层、中间层、反铁磁层以及顶电极;其中,自由层设置于底电极上。As shown in Figure 1, and in combination with Figures 2 to 8, the data writing method of the memory circuit can include but is not limited to the following steps: passing into the bottom electrode connected to the tunnel junction within a first preset range A unidirectional current in a second preset range to write the first data to the tunnel junction; or, a unidirectional current in a second preset range is passed into the bottom electrode connected to the tunnel junction in order to write a third data different from the first data. Two data to the tunnel junction. In this embodiment, the absolute value of the current in the second preset range is greater than the absolute value of the current in the first preset range, and the first data is opposite to the second data. The first data is "1" and the second data is "0"; or the first data is "0" and the second data is "1". The unidirectional current is a unidirectional current parallel to the extension direction of the bottom electrode. In this embodiment, the extension direction of the bottom electrode is the horizontal direction. The tunnel junction in one or more embodiments of the present invention may include, but is not limited to, a free layer, a tunneling layer, a reference layer, an intermediate layer, an antiferromagnetic layer and a top electrode arranged in sequence; wherein the free layer is arranged on the bottom electrode .

结合图1中隧道结写入曲线,电压的单位例如可以是V,电阻的单位例如可以是Ω,本发明单向电流的大小、方向均对应于施加的电压,电流随电压的增大而增大;写入的数据与隧道结的阻值相对应,例如,写入的数据“1”与高阻态对应、写入的数据“0”与低阻态对应,或者,写入的数据“0”与高阻态对应、写入的数据“1”与低阻态对应;可理解的是,本发明中隧道结的阻值随着单向电流绝对值的增大而增大。对于第一预设范围、第二预设范围及对应电压的具体值,本发明能够根据实际器件组成进行对应设置,例如,第一预设范围对应电压为﹣1.5V~﹢1.5V;示例中的电压边界值(﹣1.5V或﹢1.5V)对应的电流值可称为翻转电流,本发明能够在写入电流大于翻转电流写入“1”、小于翻转电流写入“0”,或者写入电流小于翻转电流写入“1”、大于翻转电流写入“0”。Write a curve in conjunction with the tunnel junction in Figure 1. The unit of voltage can be, for example, V, and the unit of resistance can be, for example, Ω. The magnitude and direction of the unidirectional current in the present invention correspond to the applied voltage, and the current increases as the voltage increases. Large; the written data corresponds to the resistance of the tunnel junction, for example, the written data "1" corresponds to the high-resistance state, the written data "0" corresponds to the low-resistance state, or the written data " 0" corresponds to the high-resistance state, and the written data "1" corresponds to the low-resistance state; it can be understood that the resistance of the tunnel junction in the present invention increases as the absolute value of the unidirectional current increases. For the specific values of the first preset range, the second preset range and the corresponding voltage, the present invention can make corresponding settings according to the actual device composition. For example, the corresponding voltage of the first preset range is -1.5V ~ -1.5V; in the example The current value corresponding to the voltage boundary value (-1.5V or +1.5V) can be called the flip current. The present invention can write "1" when the writing current is greater than the flipping current, write "0" when it is less than the flipping current, or write If the input current is less than the flip current, "1" is written, and if it is greater than the flip current, "0" is written.

具体地,本实施例向与隧道结相连的底电极中通入处于第一预设范围内的单向电流包括:使单向电流通过二极管和与隧道结相连的底电极;二极管的导通方向为单向电流的方向,例如自源线至底电极的方向或者底电极至源线的方向。本发明实施例可利用位线与底电极的另一端连接,通过读线与第一开关器件连接,第一开关器件连接于隧道结上。Specifically, in this embodiment, passing a unidirectional current within a first preset range into the bottom electrode connected to the tunnel junction includes: causing the unidirectional current to pass through the diode and the bottom electrode connected to the tunnel junction; the conduction direction of the diode It is the direction of unidirectional current, such as the direction from the source line to the bottom electrode or the direction from the bottom electrode to the source line. In embodiments of the present invention, the bit line can be used to connect to the other end of the bottom electrode, and the read line can be connected to the first switching device, and the first switching device is connected to the tunnel junction.

本发明实施例中的反铁磁层例如为人工反铁磁层。其中,本发明中的自由层与参考层通过隧穿层实现了铁磁耦合(反铁磁),而参考层与人工反铁磁层总和的磁矩方向与参考层反平行(平行)。所以自由层受到参考层的耦合场、参考层与人工反铁磁层总和的磁场方向相反。在SOT底电极中通电流时,在第一预设范围内电流(小电流)下,焦耳热小,自由层翻转到参考层与自由层耦合磁场方向;在第二预设范围内电流(大电流)下,由于电流的增大导致焦耳热增大,温度随之上升,参考层对自由层的耦合场变小,这时,自由层的方向由人工反铁磁层与参考层的漏磁场决定。由于漏磁场与耦合场在方向上是相反的,所以本发明能够在不同大小电流的作用下使自由层的翻转方向发生反向,即实现了不同电流下隧道结高阻态与低阻态之间的转换,即实现了数据“0”或“1”的写入。The antiferromagnetic layer in the embodiment of the present invention is, for example, an artificial antiferromagnetic layer. Among them, the free layer and the reference layer in the present invention realize ferromagnetic coupling (antiferromagnetism) through the tunnel layer, and the direction of the total magnetic moment of the reference layer and the artificial antiferromagnetic layer is antiparallel (parallel) to the reference layer. Therefore, the free layer is subject to the coupling field of the reference layer, and the magnetic field direction of the total of the reference layer and the artificial antiferromagnetic layer is opposite. When current is passed through the SOT bottom electrode, under the current within the first preset range (small current), the Joule heat is small, and the free layer flips to the direction of the coupling magnetic field between the reference layer and the free layer; under the current within the second preset range (large current) current), the Joule heat increases due to the increase in current, the temperature rises accordingly, and the coupling field of the reference layer to the free layer becomes smaller. At this time, the direction of the free layer is determined by the leakage magnetic field of the artificial antiferromagnetic layer and the reference layer. Decide. Since the leakage magnetic field and the coupling field are opposite in direction, the present invention can reverse the flipping direction of the free layer under the action of currents of different sizes, that is, realizing the transition between the high-resistance state and the low-resistance state of the tunnel junction under different currents. The conversion between them realizes the writing of data "0" or "1".

与本发明存储器电路的数据写入方法基于同一发明技术构思,对应地,本发明的一种存储器电路的数据读取方法包括如下的步骤:The data writing method of the memory circuit of the present invention is based on the same inventive technical concept. Correspondingly, the data reading method of a memory circuit of the present invention includes the following steps:

向与底电极相连的隧道结中施加预设读取电压(Vread),以读出通过本发明实施例如上的数据写入方法的已写入于隧道结中存储的第一数据或第二数据。本发明中的数据读取过程包括:向隧道结施加预设读取电压,然后通过读出放大器接收到的反馈信号(反馈信号可以是读电流或电荷量等)来判断出隧道结处于高阻态或者低阻态。A preset read voltage (Vread) is applied to the tunnel junction connected to the bottom electrode to read out the first data or second data that has been written and stored in the tunnel junction through the above data writing method according to the embodiment of the present invention. . The data reading process in the present invention includes: applying a preset read voltage to the tunnel junction, and then judging that the tunnel junction is in a high resistance state by reading the feedback signal received by the read amplifier (the feedback signal can be a read current or charge amount, etc.) state or low resistance state.

如图3所示,并可结合图2,本实施例提供了向一种存储器阵列写入数据“1”或“0”的过程。As shown in Figure 3, and combined with Figure 2, this embodiment provides a process of writing data "1" or "0" to a memory array.

UL(Up Left)UL(Up Left) UR(Up Right)UR(Up Right) DL(Down Left)DL(Down Left) DR(Down Right)DR(Down Right) RLRL GNDGND GNDGND GNDGND GNDGND WLwL GNDGND GNDGND GNDGND GNDGND SLSL VddVdd VddVdd GNDGND GNDGND BLBL GNDGND VddVdd GNDGND VddVdd

如上表所示,向左上方(UL)的存储单元中写入数据,例如高阻态下写入“1”、低阻态下写入“0”或者高阻态下写入“0”、低阻态下写入“1”。本实施例令源线(SL)610接入电平Vdd,令位线(BL)510接入电平GND,以形成通过底电极100的水平方向的单向电流;并令读线(RL)710接入电平GND,令字线(WL)810接入电平GND,此时晶体管300处于关闭状态。本发明能够通过改变Vdd数值的大小而向存储单元中写入“1”或“0”,即通过调节水平方向上的单向电流的大小改变写入隧道结中的数据。同时根据存储阵列中沿x方向的多个存储单元共用源线610、源线620、读线710、读线720、字线810及字线820,沿y方向的多个存储单元共用位线510、位线520,为避免向右上方(UR)、左下方(DL)、右下方(DR)的存储单元中写入数据,向右上方(UR)的存储单元的源线(SL)610接入电平Vdd,令位线(BL)520接入电平Vdd,令读线(RL)710接入电平GND,令字线(WL)810接入电平GND;向左下方(DL)的存储单元的源线(SL)620接入电平GND,令位线(BL)510接入电平GND,令读线(RL)720接入电平GND,令字线(WL)820接入电平GND;向右下方(DR)的存储单元的源线(SL)620接入电平GND,令位线(BL)520接入电平Vdd,令读线(RL)720接入电平GND,令字线(WL)820接入电平GND。As shown in the table above, write data to the memory cell in the upper left (UL), for example, write "1" in the high-resistance state, write "0" in the low-resistance state, or write "0" in the high-resistance state. Write "1" in low resistance state. In this embodiment, the source line (SL) 610 is connected to the level Vdd, and the bit line (BL) 510 is connected to the level GND to form a unidirectional current in the horizontal direction through the bottom electrode 100; and the read line (RL) is connected to the level GND. 710 is connected to the level GND, so that the word line (WL) 810 is connected to the level GND. At this time, the transistor 300 is in a closed state. The present invention can write "1" or "0" into the memory cell by changing the value of Vdd, that is, changing the data written in the tunnel junction by adjusting the size of the unidirectional current in the horizontal direction. At the same time, according to the fact that multiple memory cells along the x direction in the memory array share the source line 610, the source line 620, the read line 710, the read line 720, the word line 810 and the word line 820, the multiple memory cells along the y direction share the bit line 510. , bit line 520, in order to avoid writing data into the memory cells in the upper right (UR), lower left (DL), and lower right (DR), the source line (SL) 610 of the upper right (UR) memory cell is connected. Enter the level Vdd, connect the bit line (BL) 520 to the level Vdd, connect the read line (RL) 710 to the level GND, and connect the word line (WL) 810 to the level GND; to the lower left (DL) The source line (SL) 620 of the memory cell is connected to the level GND, the bit line (BL) 510 is connected to the level GND, the read line (RL) 720 is connected to the level GND, and the word line (WL) 820 is connected to the level GND. Input level GND; connect the source line (SL) 620 of the memory cell to the lower right (DR) to the level GND, connect the bit line (BL) 520 to the level Vdd, and connect the read line (RL) 720 to the voltage level. level GND, so that word line (WL) 820 is connected to level GND.

类似地,从存储单元中读出数据时,本实施例仍以读取左上方(UL)存储单元的数据为例进行说明。Similarly, when reading data from a memory unit, this embodiment still takes reading data from an upper left (UL) memory unit as an example for description.

ULUL URUR DLD.L. DRDR RLRL VreadVread VreadVread GNDGND GNDGND WLwL Vgvg Vgvg GNDGND GNDGND SLSL GNDGND GNDGND GNDGND GNDGND BLBL GNDGND VreadVread GNDGND VreadVread

如上表所示,本实施例令源线(SL)610接入电平GND,令位线(BL)510也接入电平GND,并令读线(RL)710接入电平Vread,令字线(WL)810接入电平Vg;其中Vread表示预设读取电压,Vg表示栅电压,用于使金属氧化物半导体场效应管300(晶体管)打开,通过施加预设读取电压Vread,在待读取MTJ中产生读电流,读出放大器接收到相应的反馈信号从而判断当前隧道结为低阻态或高阻态,进而判断隧道结中存储的数据。此时根据存储阵列中沿x方向的多个存储单元共用源线610、源线620、读线710、读线720、字线810及字线820,沿y方向的多个存储单元共用位线510、位线520,为避免读取右上方(UR)、左下方(DL)、右下方(DR)的存储单元中的数据,向右上方(UR)的存储单元的源线(SL)610接入电平GND,令位线(BL)520接入电平Vread,令读线(RL)710接入电平Vread,令字线(WL)810接入电平Vg;向左下方(DL)的存储单元的源线(SL)620接入电平GND,令位线(BL)510接入电平GND,令读线(RL)720接入电平GND,令字线(WL)820接入电平GND;向右下方(DR)的存储单元的源线(SL)620接入电平GND,令位线(BL)520接入电平Vread,令读线(RL)720接入电平GND,令字线(WL)820接入电平GND。As shown in the above table, in this embodiment, the source line (SL) 610 is connected to the level GND, the bit line (BL) 510 is also connected to the level GND, and the read line (RL) 710 is connected to the level Vread. The word line (WL) 810 is connected to the level Vg; where Vread represents the preset read voltage, and Vg represents the gate voltage, which is used to turn on the metal oxide semiconductor field effect transistor 300 (transistor) by applying the preset read voltage Vread , a read current is generated in the MTJ to be read, and the sense amplifier receives the corresponding feedback signal to determine whether the current tunnel junction is in a low-resistance state or a high-resistance state, and then determines the data stored in the tunnel junction. At this time, according to the fact that multiple memory cells along the x direction in the memory array share source line 610, source line 620, read line 710, read line 720, word line 810, and word line 820, multiple memory cells along the y direction share a bit line. 510. Bit line 520. In order to avoid reading the data in the memory cells in the upper right (UR), lower left (DL), and lower right (DR), the source line (SL) 610 of the upper right (UR) memory cell is Connect the level GND, connect the bit line (BL) 520 to the level Vread, connect the read line (RL) 710 to the level Vread, and connect the word line (WL) 810 to the level Vg; to the lower left (DL ) of the memory cell, the source line (SL) 620 is connected to the level GND, the bit line (BL) 510 is connected to the level GND, the read line (RL) 720 is connected to the level GND, and the word line (WL) 820 Connect the level GND; connect the source line (SL) 620 of the memory cell on the lower right (DR) to the level GND, connect the bit line (BL) 520 to the level Vread, and connect the read line (RL) 720 The level GND, so that the word line (WL) 820 is connected to the level GND.

如图5所示,并可结合图4,本发明另一些实施例还能够提供向存储器阵列写入数据“1”或“0”的过程。As shown in Figure 5, and combined with Figure 4, other embodiments of the present invention can also provide a process of writing data "1" or "0" to the memory array.

ULUL URUR DLD.L. DRDR RLRL GNDGND GNDGND GNDGND GNDGND SLSL VddVdd VddVdd GNDGND GNDGND BLBL GNDGND VddVdd GNDGND VddVdd

如上表所示,向左上方(UL)的存储单元中写入数据,例如高阻态下写入“1”、低阻态下写入“0”或者高阻态下写入“0”、低阻态下写入“1”。本实施例令源线(SL)610接入电平Vdd,令位线(BL)510接入电平GND,以形成水平方向的单向电流,单向电流的方向与二极管的导通方向一致;令读线(RL)710接入电平GND。本发明通过改变Vdd数值的大小而向存储单元中写入“1”或“0”。此时根据该存储阵列中沿x方向的多个存储单元共用源线610、源线620、读线710、读线720,沿y方向的多个存储单元共用位线510、位线520,为避免向右上方(UR)、左下方(DL)、右下方(DR)的存储单元中写入数据,向右上方(UR)的存储单元的源线(SL)610接入电平Vdd,令位线(BL)520接入电平Vdd,令读线(RL)710接入电平GND;向左下方(DL)的存储单元的源线(SL)620接入电平GND,令位线(BL)510接入电平GND,令读线(RL)720接入电平GND;向右下方(DR)的存储单元的源线(SL)620接入电平GND,令位线(BL)520接入电平Vdd,令读线(RL)720接入电平GND。As shown in the table above, write data to the memory cell in the upper left (UL), for example, write "1" in the high-resistance state, write "0" in the low-resistance state, or write "0" in the high-resistance state. Write "1" in low resistance state. In this embodiment, the source line (SL) 610 is connected to the level Vdd, and the bit line (BL) 510 is connected to the level GND to form a unidirectional current in the horizontal direction. The direction of the unidirectional current is consistent with the conduction direction of the diode. ; Make the read line (RL) 710 connect to the level GND. The present invention writes "1" or "0" into the memory unit by changing the value of Vdd. At this time, according to the fact that multiple memory cells in the memory array along the x direction share the source line 610, the source line 620, the read line 710, and the read line 720, and the multiple memory cells along the y direction share the bit line 510 and the bit line 520, as Avoid writing data to the memory cells in the upper right (UR), lower left (DL), and lower right (DR), and connect the source line (SL) 610 of the upper right (UR) memory cell to the level Vdd, so that The bit line (BL) 520 is connected to the level Vdd, so that the read line (RL) 710 is connected to the level GND; the source line (SL) 620 of the memory cell on the lower left (DL) is connected to the level GND, so that the bit line (BL) 510 is connected to the level GND, so that the read line (RL) 720 is connected to the level GND; the source line (SL) 620 of the memory cell on the lower right (DR) is connected to the level GND, so that the bit line (BL) is connected to the level GND. )520 is connected to the level Vdd, and the read line (RL) 720 is connected to the level GND.

类似地,从如上存储阵列中的存储单元中读出数据时,仍以左上方(UL)存储单元为例说明。Similarly, when reading data from the memory cells in the above memory array, the upper left (UL) memory cell is still used as an example.

ULUL URUR DLD.L. DRDR RLRL VreadVread VreadVread GNDGND GNDGND SLSL GNDGND GNDGND GNDGND GNDGND BLBL GNDGND VreadVread GNDGND VreadVread

如上表所示,本实施例令源线(SL)610接入电平GND,令位线(BL)510也接入电平GND,并令读线(RL)710接入电平Vread,其中Vread表示预设读取电压,通过施加预设读取电压后读出放大器接收到的反馈信号来判断当前隧道结为低阻态或高阻态,进而判断其存储的数据为“1”或“0”。此时根据该存储阵列中沿x方向的多个存储单元共用源线610、源线620、读线710、读线720,沿y方向的多个存储单元共用位线510、位线520,为避免读取右上方(UR)、左下方(DL)、右下方(DR)的存储单元中的数据,向右上方(UR)的存储单元的源线(SL)610接入电平GND,令位线(BL)520也接入电平Vread,并令读线(RL)710接入电平Vread;向左下方(DL)的存储单元的源线(SL)620接入电平GND,令位线(BL)510也接入电平GND,令读线(RL)720接入电平GND;向右下方(DR)的存储单元的源线(SL)620接入电平GND,位线(BL)520接入电平Vread,令读线(RL)720接入电平GND。As shown in the above table, in this embodiment, the source line (SL) 610 is connected to the level GND, the bit line (BL) 510 is also connected to the level GND, and the read line (RL) 710 is connected to the level Vread, where Vread represents the preset read voltage. By applying the preset read voltage and reading the feedback signal received by the amplifier, it is judged whether the current tunnel junction is in a low-resistance state or a high-resistance state, and then the stored data is judged to be "1" or " 0". At this time, according to the fact that multiple memory cells in the memory array along the x direction share the source line 610, the source line 620, the read line 710, and the read line 720, and the multiple memory cells along the y direction share the bit line 510 and the bit line 520, as To avoid reading the data in the storage cells in the upper right (UR), lower left (DL), and lower right (DR), connect the source line (SL) 610 of the upper right (UR) storage unit to the level GND, so that The bit line (BL) 520 is also connected to the level Vread, and the read line (RL) 710 is connected to the level Vread; the source line (SL) 620 of the memory cell to the lower left (DL) is connected to the level GND, so that The bit line (BL) 510 is also connected to the level GND, so that the read line (RL) 720 is connected to the level GND; the source line (SL) 620 of the memory cell to the lower right (DR) is connected to the level GND, and the bit line (BL) 520 is connected to the level Vread, and the read line (RL) 720 is connected to the level GND.

如图7所示,并可结合图6,本发明还有一些实施例能够提供向存储器阵列写入数据“1”或“0”的过程。As shown in Figure 7, and combined with Figure 6, some embodiments of the present invention can provide a process of writing data "1" or "0" to the memory array.

如上表所示,向左上方(UL)的存储单元中写入数据,例如高阻态下写入“1”、低阻态下写入“0”或者高阻态下写入“0”、低阻态下写入“1”。本实施例令源线(SL)610接入电平GND,令位线(BL)510接入电平Vdd,以形成水平方向的单向电流;令读线(RL)710接入电平Vdd。本发明通过改变Vdd数值的大小而向存储单元中写入“1”或“0”。此时根据该存储阵列中沿x方向的多个存储单元共用源线610、源线620、读线710、读线720,沿y方向的多个存储单元共用位线510、位线520,为避免向右上方(UR)、左下方(DL)、右下方(DR)的存储单元中写入数据,向右上方(UR)的存储单元的源线(SL)610接入电平GND,令位线(BL)520接入电平GND,令读线(RL)710接入电平Vdd;向左下方(DL)的存储单元的源线(SL)620接入电平Vdd,令位线(BL)510接入电平Vdd,令读线(RL)720接入电平Vdd;向右下方(DR)的存储单元的源线(SL)620接入电平Vdd,令位线(BL)520接入电平GND,令读线(RL)720接入电平Vdd。As shown in the table above, write data to the memory cell in the upper left (UL), for example, write "1" in the high-resistance state, write "0" in the low-resistance state, or write "0" in the high-resistance state. Write "1" in low resistance state. In this embodiment, the source line (SL) 610 is connected to the level GND, and the bit line (BL) 510 is connected to the level Vdd to form a unidirectional current in the horizontal direction; the read line (RL) 710 is connected to the level Vdd. . The present invention writes "1" or "0" into the memory unit by changing the value of Vdd. At this time, according to the fact that multiple memory cells in the memory array along the x direction share the source line 610, the source line 620, the read line 710, and the read line 720, and the multiple memory cells along the y direction share the bit line 510 and the bit line 520, as Avoid writing data to the memory cells in the upper right (UR), lower left (DL), and lower right (DR), and connect the source line (SL) 610 of the memory cell in the upper right (UR) to the level GND, so that The bit line (BL) 520 is connected to the level GND, so that the read line (RL) 710 is connected to the level Vdd; the source line (SL) 620 of the memory cell on the lower left (DL) is connected to the level Vdd, so that the bit line (BL) 510 is connected to the level Vdd, so that the read line (RL) 720 is connected to the level Vdd; the source line (SL) 620 of the memory cell on the lower right (DR) is connected to the level Vdd, so that the bit line (BL) is connected to the level Vdd. )520 is connected to the level GND, and the read line (RL) 720 is connected to the level Vdd.

类似地,从如上存储阵列中的存储单元中读出数据时,仍以左上方(UL)存储单元为例说明。Similarly, when reading data from the memory cells in the above memory array, the upper left (UL) memory cell is still used as an example.

ULUL URUR DLD.L. DRDR RLRL GNDGND GNDGND VreadVread VreadVread SLSL VreadVread VreadVread VreadVread VreadVread BLBL VreadVread GNDGND VreadVread GNDGND

如上表所示,本实施例令源线(SL)610接入电平Vread,令位线(BL)510也接入电平Vread,并令读线(RL)710接入电平GND,其中Vread表示预设读取电压,通过预设读取电压后读出放大器接收到的反馈信号来判断当前隧道结为低阻态或高阻态,进而判断其存储的数据为“1”或“0”。此时根据该存储阵列中沿x方向的多个存储单元共用源线610、源线620、读线710、读线720,沿y方向的多个存储单元共用位线510、位线520,为避免读取右上方(UR)、左下方(DL)、右下方(DR)的存储单元中的数据,向右上方(UR)的存储单元的源线(SL)610接入电平Vread,令位线(BL)520也接入电平GND,并令读线(RL)710接入电平GND;向左下方(DL)的存储单元的源线(SL)620接入电平Vread,令位线(BL)510也接入电平Vread,令读线(RL)720接入电平Vread;向右下方(DR)的存储单元的源线(SL)620接入电平Vread,位线(BL)520接入电平GND,令读线(RL)720接入电平Vread。As shown in the above table, in this embodiment, the source line (SL) 610 is connected to the level Vread, the bit line (BL) 510 is also connected to the level Vread, and the read line (RL) 710 is connected to the level GND, where Vread represents the preset read voltage. Through the feedback signal received by the read amplifier after presetting the read voltage, it is judged whether the current tunnel junction is in a low-resistance state or a high-resistance state, and then the stored data is judged to be "1" or "0" ". At this time, according to the fact that multiple memory cells in the memory array along the x direction share the source line 610, the source line 620, the read line 710, and the read line 720, and the multiple memory cells along the y direction share the bit line 510 and the bit line 520, as To avoid reading the data in the storage cells in the upper right (UR), lower left (DL), and lower right (DR), connect the source line (SL) 610 of the upper right (UR) storage unit to the level Vread, so that The bit line (BL) 520 is also connected to the level GND, and the read line (RL) 710 is connected to the level GND; the source line (SL) 620 of the memory cell to the lower left (DL) is connected to the level Vread, so that The bit line (BL) 510 is also connected to the level Vread, so that the read line (RL) 720 is connected to the level Vread; the source line (SL) 620 of the memory cell to the lower right (DR) is connected to the level Vread, and the bit line (BL) 520 is connected to the level GND, and the read line (RL) 720 is connected to the level Vread.

如图2-3所示,与存储器电路的数据写入方法或者读取方法基于同一发明技术构思,本发明能够提供一种存储器电路。本发明一个或多个实施例中的存储器电路包括但不限于底电极100、隧道结200、第一开关器件300、第二开关器件400、位线BL(500,510,520)、源线SL(600,610,620)、读线RL(700,710,720)以及字线(800,810,820)等。As shown in Figure 2-3, based on the same inventive technical concept as the data writing method or reading method of the memory circuit, the present invention can provide a memory circuit. The memory circuit in one or more embodiments of the present invention includes but is not limited to the bottom electrode 100, the tunnel junction 200, the first switching device 300, the second switching device 400, the bit line BL (500, 510, 520), the source line SL (600, 610, 620), Read lines RL (700, 710, 720) and word lines (800, 810, 820), etc.

底电极100用于在数据写入过程中通入单向电流,以向底电极100上方的隧道结200中写入数据;本实施例底电极100具体为一层具有SOT(自旋轨道耦合)效应的薄膜电极材料。The bottom electrode 100 is used to pass a unidirectional current during the data writing process to write data into the tunnel junction 200 above the bottom electrode 100; in this embodiment, the bottom electrode 100 is specifically a layer with SOT (spin orbit coupling) Effect thin film electrode materials.

隧道结200设置于底电极100上且与底电极100相连,本发明实施例隧道结200用于存储写入的数据,数据读取过程中向隧道结200施加预设读取电压Vread产生读电流,从而读取隧道结中存储的数据。The tunnel junction 200 is disposed on the bottom electrode 100 and connected to the bottom electrode 100. In the embodiment of the present invention, the tunnel junction 200 is used to store written data. During the data reading process, a preset read voltage Vread is applied to the tunnel junction 200 to generate a read current. , thereby reading the data stored in the tunnel node.

如图8所示,本实施例的隧道结200为多层薄膜结构,隧道结200可包括但不限于依次设置的自由层、隧穿层、参考层、中间层、反铁磁层及顶电极。其中,本实施例反铁磁层为人工反铁磁层。本发明实施例可通过PVD(Physical Vapor Deposition,物理气相沉积)或ALD(Atomic Layer Deposition,原子层沉积)等薄膜生长工艺依次形成底电极100、自由层、隧穿层、参考层、中间层、反铁磁层以及顶电极,例如通过生长Ta(钽)、Pt(铂)、W(钨)等形成SOT底电极100,以及通过生长Co(钴)、CoFeB(一种磁性材料)等形成自由层。As shown in Figure 8, the tunnel junction 200 in this embodiment is a multi-layer thin film structure. The tunnel junction 200 may include but is not limited to a free layer, a tunneling layer, a reference layer, an intermediate layer, an antiferromagnetic layer and a top electrode arranged in sequence. . Among them, the antiferromagnetic layer in this embodiment is an artificial antiferromagnetic layer. In embodiments of the present invention, the bottom electrode 100, the free layer, the tunneling layer, the reference layer, the intermediate layer, and The antiferromagnetic layer and the top electrode, for example, form the SOT bottom electrode 100 by growing Ta (tantalum), Pt (platinum), W (tungsten), etc., and form the SOT bottom electrode 100 by growing Co (cobalt), CoFeB (a magnetic material), etc. layer.

如图2、3所示,本发明可通过存储阵列结构形成存储电路。其中,第一开关器件300与隧道结200连接,而第二开关器件400与底电极100的一端连接。可选地,本发明第一开关器件300为金属氧化物半导体场效应管(晶体管),第二开关器件400为二极管,导通方向为自源线(600,610,620)至底电极100的方向。与源线相对应,本发明中的位线(500,510,520)BL与底电极100的另一端连接。而且,源线(600,610,620)SL与第二开关器件400连接。本发明中的读线(700,710,720)RL与第一开关器件300连接,字线(800,810,820)WL与金属氧化物半导体场效应管的栅极连接。As shown in Figures 2 and 3, the present invention can form a memory circuit through a memory array structure. The first switching device 300 is connected to the tunnel junction 200 , and the second switching device 400 is connected to one end of the bottom electrode 100 . Optionally, the first switching device 300 of the present invention is a metal oxide semiconductor field effect transistor (transistor), the second switching device 400 is a diode, and the conduction direction is from the source line (600, 610, 620) to the bottom electrode 100. Corresponding to the source line, the bit line (500, 510, 520) BL in the present invention is connected to the other end of the bottom electrode 100. Furthermore, the source line (600, 610, 620) SL is connected to the second switching device 400. In the present invention, the read line (700, 710, 720) RL is connected to the first switching device 300, and the word line (800, 810, 820) WL is connected to the gate of the metal oxide semiconductor field effect transistor.

底电极100与隧道结200形成存储单元,且多个存储单元可形成存储阵列。本发明实施例的存储阵列中,沿x方向的多个存储单元共用源线610、源线620、读线710、读线720、字线810及字线820,沿y方向的多个存储单元共用位线510、位线520。本发明隧道结200包括依次设置的自由层、隧穿层、参考层、中间层、反铁磁层以及顶电极;其中,自由层设置于底电极100上。The bottom electrode 100 and the tunnel junction 200 form a memory cell, and multiple memory cells may form a memory array. In the memory array of the embodiment of the present invention, multiple memory cells along the x direction share the source line 610, the source line 620, the read line 710, the read line 720, the word line 810 and the word line 820. The multiple memory cells along the y direction share Bit lines 510 and 520 are shared. The tunnel junction 200 of the present invention includes a free layer, a tunneling layer, a reference layer, an intermediate layer, an antiferromagnetic layer and a top electrode arranged in sequence; wherein, the free layer is arranged on the bottom electrode 100 .

如图4-5所示,与存储器电路的数据写入方法或者读取方法基于同一发明技术构思,本发明还能够提供另一种结构形式的存储器电路。本发明一个或多个实施例中的存储器电路可包括但不限于底电极100、隧道结200、第一开关器件300、第二开关器件400、位线BL(500,510,520)、源线SL(600,610,620)以及读线RL(700,710,720)。底电极100也是用于在数据写入过程中向其通入单向电流,从而向底电极100上方的隧道结200中写入信息,可由具有自旋轨道耦合效应的电极材料构成。隧道结200设置于底电极100上且与底电极100相连,可以通过向隧道结上方的读线RL上施加预设读取电压实现从隧道结200中读取数据。该实施例的存储阵列中,沿x方向的多个存储单元共用源线610、源线620、读线710、读线720,沿y方向的多个存储单元共用位线510、位线520。隧道结200包括依次设置的自由层、隧穿层、参考层、中间层、反铁磁层以及顶电极;其中,本发明自由层设置于底电极100上。As shown in Figures 4-5, the data writing method or reading method of the memory circuit is based on the same inventive technical concept, and the present invention can also provide a memory circuit of another structural form. The memory circuit in one or more embodiments of the present invention may include, but is not limited to, a bottom electrode 100, a tunnel junction 200, a first switching device 300, a second switching device 400, a bit line BL (500, 510, 520), and a source line SL (600, 610, 620). And the reading line RL(700,710,720). The bottom electrode 100 is also used to pass a unidirectional current to it during the data writing process, thereby writing information into the tunnel junction 200 above the bottom electrode 100. It can be composed of an electrode material with a spin-orbit coupling effect. The tunnel junction 200 is disposed on the bottom electrode 100 and connected to the bottom electrode 100. Data can be read from the tunnel junction 200 by applying a preset read voltage to the read line RL above the tunnel junction. In the memory array of this embodiment, multiple memory cells along the x direction share source lines 610, 620, read lines 710, and read lines 720, and multiple memory cells along the y direction share bit lines 510 and 520. The tunnel junction 200 includes a free layer, a tunneling layer, a reference layer, an intermediate layer, an antiferromagnetic layer and a top electrode arranged in sequence; wherein, the free layer of the present invention is arranged on the bottom electrode 100 .

如图4、5所示,区别与图2、3中的存储器电路结构,本实施例第一开关器件300为二极管,导通方向为自读线(700,710,720)至隧道结200的方向。本实施例第二开关器件400为二极管,导通方向具体为单向电流的方向,图示为自源线(600,610,620)至底电极100的方向。底电极100与隧道结200形成存储单元,多个存储单元形成存储阵列。As shown in Figures 4 and 5, different from the memory circuit structure in Figures 2 and 3, the first switching device 300 in this embodiment is a diode, and the conduction direction is from the read line (700, 710, 720) to the tunnel junction 200. The second switching device 400 in this embodiment is a diode, and the conduction direction is specifically the direction of the unidirectional current, which is the direction from the source line (600, 610, 620) to the bottom electrode 100 as shown in the figure. The bottom electrode 100 and the tunnel junction 200 form a memory cell, and a plurality of memory cells form a memory array.

如图6、7所示,与存储器电路的数据写入方法或者读取方法基于同一发明技术构思,本发明还可提供其他结构形式的存储器电路。本发明一个或多个实施例中的存储器电路可包括但不限于底电极100、隧道结200、第一开关器件300、第二开关器件400、位线BL(500,510,520)、源线SL(600,610,620)以及读线RL(700,710,720)。底电极100也是用于在数据写入过程中向其通入单向电流,以向底电极100上方的隧道结200中写入数据,底电极可由具有自旋轨道耦合效应的材料构成。隧道结200设置于底电极100上且与底电极100相连,可以根据向隧道结施加预设读取电压后,读出放大器接收到的反馈信号来实现从隧道结200中读取数据。该实施例的存储阵列中,沿x方向的多个存储单元共用源线610、源线620、读线710、读线720,沿y方向的多个存储单元共用位线510、位线520。隧道结200包括依次设置的自由层、隧穿层、参考层、中间层、反铁磁层以及顶电极;自由层设置于底电极100上。As shown in Figures 6 and 7, the data writing method or reading method of the memory circuit is based on the same inventive technical concept, and the present invention can also provide memory circuits with other structural forms. The memory circuit in one or more embodiments of the present invention may include, but is not limited to, a bottom electrode 100, a tunnel junction 200, a first switching device 300, a second switching device 400, a bit line BL (500, 510, 520), and a source line SL (600, 610, 620). And the reading line RL(700,710,720). The bottom electrode 100 is also used to pass a unidirectional current to it during the data writing process to write data into the tunnel junction 200 above the bottom electrode 100. The bottom electrode may be made of a material with a spin-orbit coupling effect. The tunnel junction 200 is disposed on the bottom electrode 100 and connected to the bottom electrode 100. Data can be read from the tunnel junction 200 according to the feedback signal received by the sense amplifier after applying a preset read voltage to the tunnel junction. In the memory array of this embodiment, multiple memory cells along the x direction share source lines 610, 620, read lines 710, and read lines 720, and multiple memory cells along the y direction share bit lines 510 and 520. The tunnel junction 200 includes a free layer, a tunneling layer, a reference layer, an intermediate layer, an antiferromagnetic layer and a top electrode arranged in sequence; the free layer is arranged on the bottom electrode 100 .

如图6、7所示,区别与图2、3中的存储器电路结构,本实施例第一开关器件300为二极管,导通方向为自隧道结200至读线(700,710,720)的方向。本实施例第二开关器件400为二极管,导通方向具体为单向电流的方向,图示为自底电极100至源线(600,610,620)的方向。底电极100与隧道结200形成存储单元,多个存储单元形成存储阵列。As shown in Figures 6 and 7, different from the memory circuit structure in Figures 2 and 3, the first switching device 300 in this embodiment is a diode, and the conduction direction is from the tunnel junction 200 to the read line (700, 710, 720). The second switching device 400 in this embodiment is a diode, and the conduction direction is specifically the direction of the unidirectional current, which is the direction from the bottom electrode 100 to the source line (600, 610, 620). The bottom electrode 100 and the tunnel junction 200 form a memory cell, and a plurality of memory cells form a memory array.

与存储器电路的数据写入或读取方法基于同一发明技术构思,本发明还能够提供一种存储器,该存储器可包括但不限于本发明任一实施例中的存储器电路。Based on the same inventive technical concept as the data writing or reading method of the memory circuit, the present invention can also provide a memory, which may include but is not limited to the memory circuit in any embodiment of the present invention.

与存储器电路的数据写入或读取方法基于同一发明技术构思,本发明还能够提供一种电子设备,该电子设备可包括但不限于本发明任一实施例中的存储器。Based on the same inventive technical concept as the data writing or reading method of the memory circuit, the present invention can also provide an electronic device, which may include but is not limited to the memory in any embodiment of the present invention.

应当理解的是,本发明所涉及的电子设备可包括但不限于智能电话、计算机、平板电脑、可穿戴智能设备、人工智能设备、移动电源等。It should be understood that the electronic devices involved in the present invention may include, but are not limited to, smart phones, computers, tablets, wearable smart devices, artificial intelligence devices, mobile power supplies, etc.

在以上的描述中,对于各层的构图、刻蚀等技术细节并没有做出详细的说明。但是本领域技术人员应当理解,可以通过各种技术手段,来形成所需形状的层、区域等。另外,为了形成同一结构,本领域技术人员还可以设计出与以上描述的方法并不完全相同的方法。另外,尽管在以上分别描述了各实施例,但是这并不意味着各个实施例中的措施不能有利地结合使用。In the above description, there is no detailed explanation of the technical details such as patterning and etching of each layer. However, those skilled in the art should understand that various technical means can be used to form layers, regions, etc. in desired shapes. In addition, in order to form the same structure, those skilled in the art can also design methods that are not exactly the same as those described above. In addition, although each embodiment is described separately above, this does not mean that the measures in the various embodiments cannot be used in combination to advantage.

以上对本公开的实施例进行了描述。但是,这些实施例仅仅是为了说明的目的,而并非为了限制本公开的范围。本公开的范围由所附权利要求及其等价物限定。不脱离本公开的范围,本领域技术人员可以做出多种替代和修改,这些替代和修改都应落在本公开的范围之内。The embodiments of the present disclosure have been described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present disclosure. The scope of the disclosure is defined by the appended claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art can make various substitutions and modifications, and these substitutions and modifications should all fall within the scope of the present disclosure.

Claims (11)

1. A memory circuit, comprising:
the bottom electrode is used for introducing unidirectional current in the data writing process;
the tunnel junction is arranged on the bottom electrode and connected with the bottom electrode, and is used for storing written data;
a first switching device connected to the tunnel junction;
a second switching device connected to one end of the bottom electrode;
a bit line connected to the other end of the bottom electrode;
a source line connected to the second switching device;
a read line connected to the first switching device;
the unidirectional current is unidirectional current parallel to the extending direction of the bottom electrode;
the second switching device is a diode, the conduction direction is the same as the direction of the unidirectional current, and the memory circuit changes the written data content through the absolute value of the unidirectional current.
2. The memory circuit of claim 1, wherein,
the first switching device is a metal oxide semiconductor field effect transistor;
the memory circuit further includes a word line;
the word line is connected with the grid electrode of the metal oxide semiconductor field effect transistor.
3. The memory circuit of claim 1, wherein,
the first switching device is a diode, and the conducting direction is the direction from the reading line to the tunnel junction or the direction from the tunnel junction to the reading line.
4. A memory circuit according to any one of claims 1 to 3, wherein,
the bottom electrode and the tunnel junction form a memory cell;
a plurality of the memory cells form a memory array.
5. A memory circuit according to any one of claims 1 to 3, wherein,
the tunnel junction comprises a free layer, a tunneling layer, a reference layer, an intermediate layer, an antiferromagnetic layer and a top electrode which are sequentially arranged;
wherein the free layer is disposed on the bottom electrode.
6. A data writing method of a memory circuit, which is implemented using the memory circuit of any one of claims 1 to 5, comprising:
a unidirectional current within a first preset range is introduced into a bottom electrode connected with a tunnel junction so as to write first data into the tunnel junction;
or, introducing unidirectional current in a second preset range into the bottom electrode connected with the tunnel junction so as to write second data into the tunnel junction;
the absolute value of the current in the second preset range is larger than that in the first preset range, and the first data are opposite to the second data.
7. The method of claim 6, wherein the supplying unidirectional current within a first predetermined range to the bottom electrode connected to the tunnel junction comprises:
the direction of the unidirectional current is the same as the conduction direction of a diode, and the diode is connected with the bottom electrode.
8. The method for writing data to a memory circuit according to claim 6 or 7, wherein,
the first data is "1", and the second data is "0";
alternatively, the first data is "0" and the second data is "1".
9. A data reading method of a memory circuit, which is implemented using the memory circuit of any one of claims 1 to 5, comprising:
a preset read voltage is applied to a tunnel junction connected to a bottom electrode to read out the first data or the second data which have been written in the tunnel junction.
10. A memory comprising the memory circuit of any one of claims 1 to 5.
11. An electronic device comprising the memory of claim 10.
CN202110864849.3A 2021-07-29 2021-07-29 Memory circuit, data writing and reading method thereof, memory and electronic equipment Active CN113744776B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106654002A (en) * 2016-11-03 2017-05-10 北京航空航天大学 Low-power-consumption magnetic multi-resistance-state memory cell
CN112164706A (en) * 2020-09-21 2021-01-01 上海磁宇信息科技有限公司 Magnetic memory and manufacturing method thereof
CN112186096A (en) * 2019-07-01 2021-01-05 上海磁宇信息科技有限公司 Magnetic random access memory and preparation method thereof
CN112420096A (en) * 2020-11-20 2021-02-26 复旦大学 Spin orbit torque magnetic random access memory without MOS tube
CN112582531A (en) * 2019-09-30 2021-03-30 华为技术有限公司 Magnetic memory and preparation method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4780878B2 (en) * 2001-08-02 2011-09-28 ルネサスエレクトロニクス株式会社 Thin film magnetic memory device
JP6178451B1 (en) * 2016-03-16 2017-08-09 株式会社東芝 Memory cell and magnetic memory

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106654002A (en) * 2016-11-03 2017-05-10 北京航空航天大学 Low-power-consumption magnetic multi-resistance-state memory cell
CN112186096A (en) * 2019-07-01 2021-01-05 上海磁宇信息科技有限公司 Magnetic random access memory and preparation method thereof
CN112582531A (en) * 2019-09-30 2021-03-30 华为技术有限公司 Magnetic memory and preparation method thereof
CN112164706A (en) * 2020-09-21 2021-01-01 上海磁宇信息科技有限公司 Magnetic memory and manufacturing method thereof
CN112420096A (en) * 2020-11-20 2021-02-26 复旦大学 Spin orbit torque magnetic random access memory without MOS tube

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