CN113725270A - Display substrate, preparation method thereof and display device - Google Patents
Display substrate, preparation method thereof and display device Download PDFInfo
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- CN113725270A CN113725270A CN202110998166.7A CN202110998166A CN113725270A CN 113725270 A CN113725270 A CN 113725270A CN 202110998166 A CN202110998166 A CN 202110998166A CN 113725270 A CN113725270 A CN 113725270A
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- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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Abstract
一种显示基板及其制备方法、显示装置，所述显示基板包括：设置在基底上的电致变色结构，设置在所述电致变色结构远离所述基底一侧的发光层，所述电致变色结构包括第一电极层和电致变色层，所述电致变色层设置为根据所述第一电极层的电压在透明与不透明之间变化且在所述发光层发光时不透明，所述电致变色层在所述基底的正投影与所述发光层在所述基底的正投影存在交叠，所述第一电极层在所述基底的正投影与所述电致变色层在所述基底的正投影存在交叠。本实施例提供的方案，电致变色层在发光层发光时不透明，可以遮挡来自远离发光层一侧的光线，提高显示的可分辨率，且不用提升亮度来达到压制环境光的作用，可以降低功率，增加显示基板寿命。
A display substrate, a preparation method thereof, and a display device, the display substrate comprising: an electrochromic structure disposed on a base, a light-emitting layer disposed on a side of the electrochromic structure away from the base, the electrochromic structure The color-changing structure includes a first electrode layer and an electrochromic layer, the electrochromic layer is configured to change between transparent and opaque according to the voltage of the first electrode layer and is opaque when the light-emitting layer emits light, the electrochromic layer is The orthographic projection of the electrochromic layer on the substrate overlaps with the orthographic projection of the light-emitting layer on the substrate, and the orthographic projection of the first electrode layer on the substrate and the electrochromic layer on the substrate The orthographic projections of . In the solution provided in this embodiment, the electrochromic layer is opaque when the light-emitting layer emits light, which can block the light from the side away from the light-emitting layer, improve the resolution of the display, and suppress the ambient light without increasing the brightness. power and increase the life of the display substrate.
Description
Technical Field
The present disclosure relates to display technologies, and more particularly, to a display substrate, a method for manufacturing the same, and a display device.
Background
With the continuous development of display technology, Organic Light-Emitting Diode (OLED) technology is increasingly applied to transparent displays. Transparent display is an important personalized display field of display technology, and refers to image display in a transparent state, so that a viewer can see not only images in a display device but also scenes behind the display device, and Virtual Reality (VR) and Augmented Reality (AR) and 3D display functions can be realized. The premise that the OLED is used for flexible display is that a flexible substrate material exists, and the ultrathin OLED screen can realize transparent display by adjusting the light transmittance of the film layer.
Disclosure of Invention
The following is a summary of the subject matter described in detail herein. This summary is not intended to limit the scope of the claims.
The embodiment of the disclosure provides a display substrate, a preparation method thereof and a display device, and the display resolution of transparent display is improved.
An embodiment of the present disclosure provides a display substrate, including: the electrochromic structure of setting on the base sets up the electrochromic structure is kept away from the luminescent layer of base one side, the electrochromic structure includes first electrode layer and electrochromic layer, the electrochromic layer sets up to change between transparent and opaque according to the voltage of first electrode layer and is in the luminescent layer is opaque when luminous, the electrochromic layer is in the orthographic projection of base with the luminescent layer is in there is the overlap in the orthographic projection of base, first electrode layer is in the orthographic projection of base with the electrochromic layer is in there is the overlap in the orthographic projection of base.
In an exemplary embodiment, the first electrode layer is disposed on a side of the electrochromic layer away from the substrate, and the first electrode layer is a part of an anode that controls light emission of the light emitting layer.
In an exemplary embodiment, the display substrate further includes a driving structure layer and a flat layer sequentially disposed between the substrate and the electrochromic structure, the flat layer is provided with a via hole exposing the driving structure layer, the first electrode layer is electrically connected to the driving structure layer through the via hole, and an orthographic projection of the electrochromic layer on the substrate is located outside the orthographic projection of the via hole on the substrate.
In an exemplary embodiment, the first electrode layer is disposed on a side of the electrochromic layer close to the substrate, the display substrate further includes a second electrode layer and a third electrode layer sequentially disposed between the electrochromic layer and the light emitting layer, the first electrode layer is electrically connected to the second electrode layer, the second electrode layer is electrically connected to the third electrode layer, and the first electrode layer, the second electrode layer and the third electrode layer constitute an anode for controlling the light emitting layer to emit light.
In an exemplary embodiment, the display substrate further includes a driving structure layer and a flat layer disposed between the substrate and the electrochromic structure, the flat layer is provided with a via hole exposing the driving structure layer, the first electrode layer is electrically connected to the driving structure layer through the via hole, and an orthographic projection of the via hole on the substrate is located in an orthographic projection of the electrochromic layer on the substrate.
In an exemplary embodiment, an orthographic projection of the electrochromic layer on the substrate is located within an orthographic projection of the first electrode layer on the substrate.
In an exemplary embodiment, the electrochromic layer is made using a material that is not electrically conductive when in an opaque state.
In an exemplary embodiment, the material of the electrochromic layer includes polyaniline.
An embodiment of the present disclosure provides a display device, including the display substrate according to any one of the embodiments.
The embodiment of the disclosure provides a preparation method of a display substrate, which includes:
forming an electrochromic structure on a substrate, wherein the electrochromic structure comprises a first electrode layer and an electrochromic layer, and an orthographic projection of the first electrode layer on the substrate and an orthographic projection of the electrochromic layer on the substrate are overlapped; the electrochromic layer is arranged to change between transparent and opaque according to a voltage of the first electrode layer;
forming a light emitting layer on one side of the electrochromic structure far away from the substrate, wherein the orthographic projection of the electrochromic layer on the substrate is overlapped with the orthographic projection of the light emitting layer on the substrate; the electrochromic layer is arranged to be opaque when the light emitting layer emits light.
The embodiment of the disclosure includes a display substrate, a preparation method thereof and a display device, wherein the display substrate comprises: the electrochromic structure of setting on the base sets up the electrochromic structure is kept away from the luminescent layer of base one side, the electrochromic structure includes first electrode layer and electrochromic layer, the electrochromic layer sets up to change between transparent and opaque according to the voltage of first electrode layer and is in the luminescent layer is opaque when luminous, the electrochromic layer is in the orthographic projection of base with the luminescent layer is in there is the overlap in the orthographic projection of base, first electrode layer is in the orthographic projection of base with the electrochromic layer is in there is the overlap in the orthographic projection of base. According to the scheme provided by the embodiment, the electrochromic layer is opaque when the light emitting layer emits light, light rays from one side far away from the light emitting layer can be shielded, the resolution ratio of display is improved, the effect of pressing ambient light is achieved without increasing brightness, power can be reduced, and the service life of the display substrate is prolonged.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and drawings.
Other aspects will be apparent upon reading and understanding the attached drawings and detailed description.
Drawings
The accompanying drawings are included to provide a further understanding of the disclosed embodiments and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention.
FIG. 1 is a schematic diagram of a display substrate provided in an exemplary embodiment;
FIG. 2 is a schematic diagram of a display substrate according to another exemplary embodiment;
FIG. 3 is a schematic view of a display substrate according to yet another exemplary embodiment;
FIG. 4 is a schematic illustration of an electrochromic layer transparent and opaque provided by an exemplary embodiment;
FIG. 5 is a schematic illustration of an example embodiment providing an opaque electrochromic layer for a portion of a pixel of a display substrate;
fig. 6 is a flowchart illustrating a method for manufacturing a display substrate according to an exemplary embodiment.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the case of conflict, the embodiments of the present disclosure and the features of the embodiments may be arbitrarily combined with each other.
The steps illustrated in the flow charts of the figures may be performed in a computer system such as a set of computer-executable instructions. Also, while a logical order is shown in the flow diagrams, in some cases, the steps shown or described may be performed in an order different than here.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs.
In the drawings, the size of each component, the thickness of layers, or regions may be exaggerated for clarity. Therefore, the embodiments of the present disclosure are not necessarily limited to the dimensions, and the shapes and sizes of the respective components in the drawings do not reflect a true scale. Further, the drawings schematically show ideal examples, and the embodiments of the present disclosure are not limited to the shapes or numerical values shown in the drawings.
The ordinal numbers such as "first", "second", "third", etc., in this disclosure are provided to avoid confusion among the constituent elements, and do not indicate any order, number, or importance.
In the present disclosure, for convenience, terms indicating orientation or positional relationship such as "middle", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like are used to explain positional relationship of constituent elements with reference to the drawings, only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured in a specific orientation, and be operated, and thus, should not be construed as limiting the present disclosure. The positional relationship of the components is changed as appropriate in accordance with the direction in which each component is described. Therefore, the words described in the disclosure are not limited thereto, and may be replaced as appropriate.
In this disclosure, the terms "mounted," "connected," and "connected" are to be construed broadly unless otherwise specifically stated or limited. For example, it may be a fixed connection, or a removable connection, or an integral connection; can be a mechanical connection, or an electrical connection; either directly or indirectly through intervening components, or both may be interconnected. The specific meaning of the above terms in the present disclosure can be understood by those of ordinary skill in the art as appropriate.
In the present disclosure, "electrically connected" includes a case where constituent elements are connected together by an element having some kind of electrical action. The "element having a certain electric function" is not particularly limited as long as it can transmit and receive an electric signal between connected components. Examples of the "element having some kind of electric function" include not only an electrode and a wiring but also a switching element such as a transistor, a resistor, an inductor, a capacitor, other elements having various functions, and the like.
In the present disclosure, "parallel" means a state in which an angle formed by two straight lines is-10 ° or more and 10 ° or less, and therefore, includes a state in which the angle is-5 ° or more and 5 ° or less. The term "perpendicular" refers to a state in which the angle formed by two straight lines is 80 ° or more and 100 ° or less, and therefore includes a state in which the angle is 85 ° or more and 95 ° or less.
In the present disclosure, "film" and "layer" may be interchanged with one another. For example, the "conductive layer" may be sometimes replaced with a "conductive film". Similarly, the "insulating film" may be replaced with an "insulating layer".
The whole screen of transparent display has very high transmissivity, and this just leads to coming from the light source on back very easily amazing to the distinguishable definition to screen display content under the whole visual angle, so the application effect of transparent display under daytime or the environment of strong illumination needs to promote the realization relative definition that shows luminance of itself, leads to very high energy consumption, and the device life-span also can attenuate more obviously. A method for reducing the susceptibility of transparent display to external environment light is as follows: the switching of the pixels between transparent and non-transparent is realized, and the resolution in strong ambient light is improved.
An embodiment of the present disclosure provides a display substrate, including: the electrochromic structure of setting on the base sets up the electrochromic structure is kept away from the luminescent layer of base one side, the electrochromic structure includes first electrode layer and electrochromic layer, the electrochromic layer sets up to change between transparent and opaque according to the voltage of first electrode layer and is in the luminescent layer is opaque when luminous, the electrochromic layer is in the orthographic projection of base with the luminescent layer is in there is the overlap in the orthographic projection of base, first electrode layer is in the orthographic projection of base with the electrochromic layer is in there is the overlap in the orthographic projection of base.
According to the scheme provided by the embodiment, the electrochromic layer is opaque when the light emitting layer emits light, light rays from one side far away from the light emitting layer can be shielded, the resolution ratio of display is improved, the effect of pressing ambient light is achieved without increasing brightness, power can be reduced, and the service life of the display substrate is prolonged.
In one exemplary embodiment, the first electrode layer may be a part of an anode controlling the light emitting layer; alternatively, it may be an electrode separate from the anode.
In an exemplary embodiment, the opaque may be a dark color or black color of the electrochromic layer.
Fig. 1 is a schematic diagram of a display substrate according to an exemplary embodiment. As shown in fig. 1, a display substrate provided by an embodiment of the present disclosure may include: a substrate 9, a driving structure layer 10 disposed on the substrate 9, a flat layer 11 disposed on the side of the driving structure layer 10 away from the substrate 9, a first electrode layer 12 disposed on the side of the flat layer 11 away from the substrate 9, an electrochromic layer 13 disposed on the side of the first electrode layer 12 away from the substrate 9, a second electrode layer 14 disposed on the side of the electrochromic layer 13 away from the substrate 9, a third electrode layer 15 disposed on the side of the second electrode layer 14 away from the substrate 9, a pixel definition layer 16 disposed on the side of the third electrode layer 15 away from the substrate, a light emitting layer 17 disposed on the side of the pixel definition layer 16 away from the substrate, wherein the flat layer 11 is opened with a via hole exposing the driving structure layer 10, the first electrode layer 12 is electrically connected to the driving structure layer 10 through the via hole, the second electrode layer 14 is electrically connected to the first electrode layer 12, and the third electrode layer 15 is electrically connected to the second electrode layer 14, and the first electrode layer 12, the second electrode layer 14, and the third electrode layer 15 constitute an anode that controls light emission of the light emitting layer 17. An orthographic projection of the electrochromic layer 13 on the substrate 9 is overlapped with an orthographic projection of the light emitting layer 17 on the substrate 9, and an orthographic projection of the first electrode layer 12 on the substrate 9 is overlapped with an orthographic projection of the electrochromic layer 13 on the substrate 9. The first electrode layer 12 and the electrochromic layer 13 constitute an electrochromic structure, the electrochromic layer 13 is colored between transparent and opaque under the voltage control of the first electrode layer 12, and the electrochromic layer 13 is opaque when the light emitting layer 17 emits light.
In the present embodiment, the first electrode layer 12 is used as a part of the anode of the light emitting layer 17, and when the light emitting layer is controlled to emit light, the electrochromic layer 13 is simultaneously changed to be opaque, so as to block light from the substrate side, thereby improving the display resolution. The scheme that this embodiment provided need not to set up the electrode alone for electrochromic layer, and uses same electrode with the luminescent layer, and the two is synchronous, and electrochromic layer discolours to be opaque when the luminescent layer is luminous, avoids the two asynchronous problem that appears.
In an exemplary embodiment, an orthographic projection of the via on the substrate 9 may be located within an orthographic projection of the electrochromic layer 13 on the substrate 9. According to the scheme provided by the embodiment, the electrochromic layer 13 can cover a relatively large range, light is shielded as much as possible, and the display resolution is improved. However, the embodiment of the present disclosure is not limited thereto, and the orthographic projection of the electrochromic layer 13 on the substrate 9 may be located outside the orthographic projection of the via on the substrate 9, for example, the orthographic projection of the electrochromic layer 13 on the substrate 9 may surround the orthographic projection of the via on the substrate 9, or the electrochromic layer 13 is located on the same side of the via. In this scheme, electrochromic layer 13 avoids the via hole, and first electrode layer 12 and second electrode layer 14 can carry out the electricity through the via hole and connect, and the technology is more convenient.
In an exemplary embodiment, an orthographic projection of the electrochromic layer 13 on the substrate 9 is located within an orthographic projection of the first electrode layer 12 on the substrate 9. In this embodiment, the electrochromic layer 13 blocks only the region covered by the first electrode layer 12, that is, blocks the light-emitting region, and does not block the non-light-emitting region, so that the transmittance of the display substrate is not affected, and the effect on the transparent display is reduced.
In an exemplary embodiment, the electrical connection between the first electrode layer 12 and the second electrode layer 14 may be performed by means of a lap joint, an orthographic projection of the electrochromic layer 13 on the substrate 9 may be located in the orthographic projection of the first electrode layer 13 on the substrate 9, and an area of the first electrode layer 12 not covered by the electrochromic layer 13 is electrically connected to the second electrode layer 14. An orthographic projection of the area of the first electrode layer 12 not covered by the electrochromic layer 13 on a plane parallel to said substrate 9 may surround an orthographic projection of said electrochromic layer 13.
In an exemplary embodiment, the display substrate may include a plurality of sub-pixels (one-to-one corresponding to the light emitting layers), and the electrochromic layer 13 may correspond to the sub-pixels one-to-one; alternatively, one electrochromic layer 13 may correspond to a plurality of sub-pixels. The electrochromic layer 13 may increase the display resolution at the sub-pixel level when corresponding to the sub-pixels one by one.
In an exemplary embodiment, the electrochromic layer 13 is made using a material that is not electrically conductive when in the opaque state. According to the scheme provided by the embodiment, when the light emitting layer is turned on, the electrochromic layer is changed into an opaque state and is not conductive, and the energy consumption is not increased due to the fact that local voltage is increased by using the electrochromic layer. For example, polyaniline is used for preparing an electrochromic layer, and the polyaniline is non-conductive when the polyaniline is changed to be opaque.
In an exemplary embodiment, the material of the electrochromic layer includes polyaniline. The disclosed embodiments are not so limited and may be other electrochromic materials.
Polyaniline is a material which is cheap and has wide application, has good light absorption characteristics as a high molecular polymer, can realize continuous and reversible color change through redox reaction in a certain voltage range, and is a good electrochromic material. When the voltage is changed from-1V to 1V, the absorption band of light can be shifted to the short wave direction, the blue shift phenomenon can also be accompanied with the color change, namely yellow-green-blue-purple-brown, the color change is determined by the redox degree of polyaniline, and when the voltage is more than 1V, the aniline is in a complete oxidation state to show black, the redox reaction is reversible, and the cycle life is very long. The characteristic that polyaniline is black and opaque under high voltage is utilized, the structure that the luminous pixel has a black bottom plate can be realized, and the transmission amount of a strong light source on the back in a luminous pixel area can be shielded, so that the resolution ratio of display is increased, and the effect of suppressing ambient light is achieved without increasing brightness.
In an exemplary embodiment, the material of the first electrode layer 12 and the third electrode layer 15 is, for example, a transparent conductive film. A transparent conductive film such as Indium Tin Oxide (ITO), Indium Zinc Oxide (IZO), or the like, and the material of the second electrode layer 14 is silver (Ag), for example.
In an exemplary embodiment, the driving structure layer 10 includes, for example, a thin film transistor composed of an active layer, a gate electrode, a source electrode, and a drain electrode. The first electrode layer 12 may be electrically connected to the drain electrode through a via hole.
In an exemplary embodiment, the display substrate may be an OLED display substrate or a Quantum-dot Light Emitting Diodes (QLED) display substrate. The display substrate realizes transparent display by using a transparent anode.
Fig. 2 is a schematic view of a display substrate according to another embodiment. As shown in fig. 2, the display substrate provided in this embodiment may include: a substrate 9, a driving structure layer 10 disposed on the substrate 9, a flat layer 11 disposed on the side of the driving structure layer 10 far from the substrate 9, an electrochromic layer 13 disposed on the side of the flat layer 11 far from the substrate 9, a first electrode layer 12 disposed on the side of the electrochromic layer 13 far from the substrate, a second electrode layer 14 disposed on the side of the first electrode layer 12 far from the substrate 9, a third electrode layer 15 disposed on the side of the second electrode layer 14 far from the substrate 9, a pixel defining layer 16 disposed on the side of the third electrode layer 15 far from the substrate, a light emitting layer 17 disposed on the side of the pixel defining layer 16 far from the substrate, wherein the flat layer 11 is opened with a via hole exposing the driving structure layer 10, the first electrode layer 12 is electrically connected to the driving structure layer 10 through the via hole, the second electrode layer 14 is electrically connected to the first electrode layer 12, and the third electrode layer 15 is electrically connected to the second electrode layer 14, and the first electrode layer 12, the second electrode layer 14, and the third electrode layer 15 constitute an anode that controls light emission of the light emitting layer 17. The orthographic projection of the electrochromic layer 13 on the substrate 9 is overlapped with the orthographic projection of the light-emitting layer 17 on the substrate 9, and the orthographic projection of the first electrode layer 12 on the substrate 9 is overlapped with the orthographic projection of the electrochromic layer 13 on the substrate. The first electrode layer 12 and the electrochromic layer 13 constitute an electrochromic structure, the electrochromic layer 13 is colored between transparent and opaque under the voltage control of the first electrode layer 12, and the electrochromic layer 13 is opaque when the light emitting layer 17 emits light. The orthographic projection of the electrochromic layer 13 on the substrate 9 may be outside the orthographic projection of the via on the substrate 9.
According to the scheme provided by the embodiment, the electrochromic layer 13 is opaque when the light emitting layer 17 emits light, light from the substrate side is shielded, the electrochromic layer 13 is arranged on one side, close to the substrate 9, of the first electrode layer 12 and avoids a via hole, the via hole is not provided with the electrochromic layer 13, resistance in the via hole is not affected, local resistance is prevented from being increased, energy consumption is improved, and in addition, compared with the scheme that the electrochromic layer 13 is arranged on one side, far away from the substrate 9, of the first electrode layer 12, the scheme provided by the embodiment is simpler and more convenient in implementation process.
In an exemplary embodiment, as shown in fig. 3, an orthographic projection of the electrochromic layer 13 on the substrate 9 may surround an orthographic projection of the via on the substrate 9. According to the scheme provided by the embodiment, the electrochromic layer 13 can avoid the via hole, the shielding area of the electrochromic layer 13 is increased, and the display resolution can be improved.
Fig. 4 is a schematic diagram of transparent and opaque states of an electrochromic layer provided in an exemplary embodiment. As shown in fig. 4, when one of the two sub-pixels emits light, the electrochromic layer 13 changes color to be opaque (for example, to be black), and light cannot penetrate through the sub-pixel, so that the display resolution can be improved; the other sub-pixel does not emit light, the electrochromic layer 13 remains transparent, and light passes through the sub-pixel to maintain a transparent display.
Fig. 5 is a schematic plan view of a display substrate according to an exemplary embodiment. As shown in fig. 5, the display substrate provided by this embodiment includes m rows (i1 to im) n columns (j1 to jn) of sub-pixels, which may include a red sub-pixel R, a green sub-pixel G, and a blue sub-pixel B, wherein a part of the sub-pixels emit light, the corresponding electrochromic layer becomes black, and the corresponding sub-pixel region presents a black background, so that the front-view display effect is not affected by strong light in the back direction (the side away from the light emitting layer from the substrate) of the high-transmittance display substrate, a high-definition front-view display is realized, the interference of ambient light on the display is improved, the display resolution is improved, and the display control at the sub-pixel level can be realized.
Fig. 6 is a flowchart of a method for manufacturing a display substrate according to an embodiment of the disclosure. As shown in fig. 6, an embodiment of the present disclosure provides a method for manufacturing a display substrate, including:
According to the preparation method of the display substrate, the electrochromic structure is prepared, the electrochromic layer is opaque when the light emitting layer emits light, light rays from one side far away from the light emitting layer can be shielded, the resolution ratio of display is improved, the effect of suppressing ambient light is achieved without improving brightness, power can be reduced, and the service life of the display substrate is prolonged. In addition, the preparation process of the embodiment can be realized by using the existing mature preparation equipment, the improvement on the existing process is small, the preparation process can be well compatible with the existing preparation process, and the preparation process is simple to realize and easy to implement.
In an exemplary embodiment, forming the electrochromic structure on the substrate includes:
forming a driving structure layer on a substrate;
forming a flat layer on one side of the driving structure layer, which is far away from the substrate;
and forming an electrochromic structure on the side of the flat layer far away from the substrate.
In an exemplary embodiment, forming the electrochromic structure on the side of the planarization layer away from the substrate includes:
forming the electrochromic layer on one side of the flat layer far away from the substrate;
and forming the first electrode layer on the side of the electrochromic layer far away from the substrate.
In an exemplary embodiment, forming the electrochromic structure on the side of the planarization layer away from the substrate includes:
forming a first electrode layer on one side of the flat layer far away from the substrate;
forming the electrochromic layer on the side of the first electrode layer far away from the substrate;
and sequentially forming a second electrode layer and a third electrode layer on one side of the electrochromic layer far away from the substrate.
The following further illustrates the technical solution of this embodiment through the manufacturing process of the display substrate of this embodiment. The "patterning process" in this embodiment includes processes of depositing a film, coating a photoresist, exposing a mask, developing, etching, and stripping the photoresist, and is a well-established manufacturing process in the related art. The "photolithography process" referred to in this embodiment includes coating film coating, mask exposure, and development, and is a well-established production process in the related art. The deposition may be performed by a known process such as sputtering, evaporation, chemical vapor deposition, etc., the coating may be performed by a known coating process, and the etching may be performed by a known method, which is not particularly limited herein. In the description of the present embodiment, it is to be understood that "thin film" refers to a layer of a material deposited or coated on a substrate. The "thin film" may also be referred to as a "layer" if it does not require a patterning process or a photolithography process throughout the fabrication process. If a patterning process or a photolithography process is required for the "thin film" in the entire manufacturing process, the "thin film" is referred to as a "thin film" before the patterning process, and the "layer" after the patterning process. The "layer" after the patterning process or the photolithography process includes at least one "pattern".
The preparation method of the display substrate provided by the embodiment of the disclosure comprises the following steps:
forming a pattern of a driving structure layer 10 on a substrate 9; the driving structure layer 10 includes an active layer, a gate electrode, a source electrode, and a drain electrode; the substrate 9 may be a flexible substrate or a rigid substrate.
And coating a flat layer film on the driving structure layer, forming a flat layer 11 pattern covering the driving structure layer by a mask exposure and development photoetching process, and forming a through hole on the flat layer 11 to expose the drain electrode. The planarization layer film may use an organic material.
Depositing a transparent conductive film, and patterning the transparent conductive film through a patterning process to form a pattern of a first electrode layer 12, wherein the first electrode layer 12 is connected with a drain electrode through a via hole;
coating a polyaniline film, and forming a pattern of the electrochromic layer 13 by a mask exposure and development photoetching process;
depositing a first metal film, and patterning the first metal film through a patterning process to form a pattern of a second electrode layer 14, wherein the second electrode layer 14 is electrically connected with the first electrode layer 12; the first metal film is, for example, silver (Ag).
Depositing a transparent conductive film, and patterning the transparent conductive film through a patterning process to form a third electrode layer 15 pattern;
coating a pixel definition film on the substrate with the patterns, and forming the patterns of the pixel definition layer 16 through a photoetching process; the pixel defining film may be polyimide, acryl, polyethylene terephthalate, or the like.
An organic light emitting material and a cathode metal are sequentially deposited on the substrate on which the aforementioned pattern is formed, to form a light emitting layer 17 and a cathode pattern, as shown in fig. 1 (cathode not shown).
The embodiment of the disclosure also provides a display device, which includes the display substrate of the foregoing embodiment. The display device may be: any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator and the like.
Although the embodiments of the present invention have been described above, the above description is only for the convenience of understanding the present invention, and is not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
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| CN202110998166.7A CN113725270B (en) | 2021-08-27 | 2021-08-27 | Display substrate and preparation method thereof, and display device |
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| CN202110998166.7A CN113725270B (en) | 2021-08-27 | 2021-08-27 | Display substrate and preparation method thereof, and display device |
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| CN114740667A (en) * | 2022-04-22 | 2022-07-12 | 湖北长江新型显示产业创新中心有限公司 | Display module and display device |
| US20220271105A1 (en) * | 2021-02-19 | 2022-08-25 | Boe Technology Group Co., Ltd. | Display substrate, method of forming display substrate and display device |
| CN118763093A (en) * | 2024-06-29 | 2024-10-11 | 天马新型显示技术研究院(厦门)有限公司 | Display panel and display device having the same |
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