CN113675182B - Planar optical coupling device and method for manufacturing the same - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及光电耦合器技术领域,尤其涉及一种平面式光耦合装置及其制造方法。The invention relates to the technical field of photocouplers, in particular to a planar photocoupler and a manufacturing method thereof.
背景技术Background technique
光电耦合器(opticalcoupler equipment),亦称光电隔离器或光耦合器,简称光耦,其是以光为媒介来传输电信号的器件,通常把发光芯片(如发光二极管LED)与收光芯片(如光敏半导体管,光敏电阻)封装在同一壳体内。当输入端加电信号时发光芯片会发出光线,收光芯片接收光线之后就产生光电流,从输出端流出,从而实现了“电—光—电”控制。以光为媒介把输入端信号耦合到输出端的光电耦合器,由于它具有体积小、寿命长、无触点,抗干扰能力强,输出和输入之间绝缘,单向传输信号等优点,在数字电路上获得广泛的应用。Optical coupler (optical coupler equipment), also known as photoelectric isolator or optocoupler, referred to as optocoupler, is a device that uses light as a medium to transmit electrical signals. Usually, a light-emitting chip (such as a light-emitting diode LED) and a light-receiving chip ( Such as photosensitive semiconductor tubes, photoresistors) are packaged in the same housing. When the input terminal is powered on, the light-emitting chip will emit light, and the light-receiving chip will generate photocurrent after receiving the light, which flows out from the output terminal, thus realizing the "electricity-optical-electricity" control. The optocoupler, which uses light as a medium to couple the input signal to the output, has the advantages of small size, long life, no contact, strong anti-interference ability, insulation between output and input, and one-way signal transmission. widely used in circuits.
具备MOSFET功能的光耦合器越来越受重视,多被应用于电源管理等方面,例如是作为内部光继电器应用于充电桩或变压器等。传统的具备MOSFET功能的光电耦合器主要有上下对立式与平面式。Optocouplers with MOSFET functions are gaining more and more attention, and are mostly used in power management and other aspects. For example, they are used as internal photorelays in charging piles or transformers. Traditional optocouplers with MOSFET functions mainly include up-down opposition type and planar type.
如图1所示,上下对立式的光电耦合器的发光芯片1与收光芯片2是分别置放于上、下支架两端,MOSFET芯片3设置于非收光区,使用具有透光性的内塑封胶对收光芯片2与发光芯片1进行封装包覆,由于发光芯片1与收光芯片2需通过透光率不大于25%的内塑封胶包覆,将导致发光芯片1的光束大幅减少,使得收光芯片2效率不佳,进而降低产品整体性能。As shown in Figure 1, the light-emitting
如图2所示,传统的平面式光电耦合器,需要在两只输出引脚6、7间设置一个假支撑部5(False Lead),以连接基岛与框架本体,不然会出现悬浮(floating)状态。由于MOSFET光电耦合器常常于高压状态(250V-600V)下操作,因此,两只输出引脚间的假支撑部5容易造成高压端点跳火,导致整个产品功能性失效。As shown in Figure 2, the traditional planar photocoupler needs to set a false support part 5 (False Lead) between the two
因此,本发明的主要目的在于提供一种平面式光耦合装置及其制造方法,以解决上述问题。Therefore, the main purpose of the present invention is to provide a planar optical coupling device and its manufacturing method to solve the above problems.
发明内容Contents of the invention
本发明之目的在于提供一种平面式光耦合装置及其制造方法,可有效提升光传递效率,且提升装置在高压状态下的工作稳定性。The object of the present invention is to provide a planar optical coupling device and its manufacturing method, which can effectively improve the light transmission efficiency and improve the working stability of the device under high voltage conditions.
为达所述优点至少其中之一或其他优点,本发明的一实施例提出一种平面式光耦合装置,其包括第一基岛、绝缘垫片、收光芯片、导光结构、发光芯片、第一引脚、第二引脚、第一MOSFET芯片与封装层。In order to achieve at least one of the above advantages or other advantages, an embodiment of the present invention proposes a planar optical coupling device, which includes a first base island, an insulating spacer, a light-receiving chip, a light-guiding structure, a light-emitting chip, The first pin, the second pin, the first MOSFET chip and the packaging layer.
绝缘垫片设置于第一基岛上,收光芯片设置于绝缘垫片上,导光结构设置于收光芯片上,发光芯片设置于导光结构上,第一引脚电性连接于发光芯片的正极,第二引脚电性连接于发光芯片的负极,第一MOSFET芯片设置于第一基岛上并电性连接于收光芯片,第一MOSFET芯片与绝缘垫片是隔开设置,封装层包覆发光芯片与第一MOSFET芯片。The insulating spacer is disposed on the first base island, the light-receiving chip is disposed on the insulating spacer, the light-guiding structure is disposed on the light-receiving chip, the light-emitting chip is disposed on the light-guiding structure, and the first pin is electrically connected to the light-emitting chip The positive pole of the light-emitting chip is electrically connected to the second pin, and the first MOSFET chip is arranged on the first base island and electrically connected to the light-receiving chip. The first MOSFET chip is separated from the insulating gasket, and the packaging The layer covers the light emitting chip and the first MOSFET chip.
在一些实施例中,所述导光结构可以是导光玻璃或导光板。In some embodiments, the light guide structure may be a light guide glass or a light guide plate.
在一些实施例中,所述封装层是以不透光材料制成。In some embodiments, the encapsulation layer is made of opaque material.
在一些实施例中,所述平面式光耦合装置还包括第二基岛与第二MOSFET芯片,所述第二基岛与所述第一基岛是隔开设置,所述第二MOSFET芯片设置于所述第二基岛上,并电性连接于所述收光芯片。In some embodiments, the planar optical coupling device further includes a second base island and a second MOSFET chip, the second base island is separated from the first base island, and the second MOSFET chip is set on the second base island and electrically connected to the light-receiving chip.
在一些实施例中,所述平面式光耦合装置还包括第一接合线、第二接合线、第三接合线、第四接合线、第五接合线、第六接合线、以及第七接合线,所述第一接合线的两端分别连接所述发光芯片的正极与所述第一引脚,所述第二接合线的两端分别连接所述发光芯片的负极与所述第二引脚,所述第三接合线的两端分别连接所述第一基岛与所述第一MOSFET芯片的源极,所述第四接合线的两端分别连接所述第一基岛与所述第二MOSFET芯片的源极,所述第五接合线的两端分别连接所述第一基岛与所述收光芯片,所述第六接合线的两端分别连接所述第一MOSFET芯片的栅极与所述收光芯片,所述第七接合线的两端分别连接所述第二MOSFET芯片的栅极与所述收光芯片。In some embodiments, the planar optical coupling device further includes a first bonding wire, a second bonding wire, a third bonding wire, a fourth bonding wire, a fifth bonding wire, a sixth bonding wire, and a seventh bonding wire , the two ends of the first bonding wire are respectively connected to the anode of the light-emitting chip and the first pin, and the two ends of the second bonding wire are respectively connected to the negative electrode of the light-emitting chip and the second pin , both ends of the third bonding wire are respectively connected to the first base island and the source of the first MOSFET chip, and both ends of the fourth bonding wire are respectively connected to the first base island and the first MOSFET chip The source electrodes of two MOSFET chips, the two ends of the fifth bonding wire are respectively connected to the first base island and the light-receiving chip, and the two ends of the sixth bonding wire are respectively connected to the gate of the first MOSFET chip pole and the light-receiving chip, and both ends of the seventh bonding wire are respectively connected to the gate of the second MOSFET chip and the light-receiving chip.
在一些实施例中,所述第一接合线、所述第二接合线、所述第三接合线、所述第四接合线、所述第五接合线、所述第六接合线、以及所述第七接合线皆是金线。In some embodiments, the first bonding wire, the second bonding wire, the third bonding wire, the fourth bonding wire, the fifth bonding wire, the sixth bonding wire, and the The seventh bonding wires are all gold wires.
为达所述优点至少其中之一或其他优点,本发明的又一实施例进一步提出一种平面式光耦合装置的制造方法,所述平面式光耦合装置的制造方法包括以下步骤:将收光芯片与第一MOSFET芯片置放于第一基岛上;在收光芯片与第一基岛之间放置绝缘垫片;在收光芯片上方依次置放导光结构与发光芯片;将第一MOSFET芯片与收光芯片电性连接;进行封装处理。In order to achieve at least one of the above advantages or other advantages, another embodiment of the present invention further proposes a method for manufacturing a planar optical coupling device. The method for manufacturing a planar optical coupling device includes the following steps: The chip and the first MOSFET chip are placed on the first base island; an insulating gasket is placed between the light-receiving chip and the first base island; a light-guiding structure and a light-emitting chip are sequentially placed above the light-receiving chip; the first MOSFET The chip is electrically connected with the light-receiving chip; and packaged.
进一步的,在所述将第一MOSFET芯片与收光芯片电性连接的步骤之后还包括以下步骤:设置第二基岛,所述第二基岛与所述第一基岛是隔开设置;将第二MOSFET芯片置放于所述第二基岛上,并将所述第二MOSFET芯片与所述收光芯片电性连接。Further, after the step of electrically connecting the first MOSFET chip and the light-receiving chip, the following steps are further included: setting a second base island, and the second base island is separated from the first base island; A second MOSFET chip is placed on the second base island, and the second MOSFET chip is electrically connected to the light-receiving chip.
因此,利用本发明所提供的一种平面式光耦合装置及其制造方法,通过平面式支架的设计,相较于传统的上下对立式光电耦合器而言,可有效提升光传输效率;借由绝缘垫片的设置,将收光芯片与第一MOSFET芯片设置于同一个基岛上,相较于传统的平面式光电耦合器而言,可达到收光芯片孤立(Isolation)效果,无需再设置假支撑部,进而避免高压操作下产品失效的问题,保证产品在高压状态下的工作稳定性。Therefore, using a planar optical coupling device and its manufacturing method provided by the present invention, the design of the planar bracket can effectively improve the light transmission efficiency compared with the traditional up-and-down optocoupler; By setting the insulating spacer, the light-receiving chip and the first MOSFET chip are arranged on the same base island. Compared with the traditional planar optocoupler, the effect of isolation of the light-receiving chip can be achieved without further The false support part is set to avoid the problem of product failure under high pressure operation and ensure the working stability of the product under high pressure.
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,而可依照说明书的内容予以实施,并且为了让本发明的上述和其他目的、特征和优点能够更明显易懂,以下列举较佳实施例,并配合附图,详细说明如下。The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable , the preferred embodiments are listed below, and in conjunction with the accompanying drawings, the detailed description is as follows.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1是传统的上下对立式光电耦合器的截面结构示意图;Fig. 1 is a schematic diagram of a cross-sectional structure of a conventional up-and-down opposed optocoupler;
图2是传统的平面式光电耦合器的平面结构示意图;Fig. 2 is a schematic plan view of a conventional planar optocoupler;
图3是本发明平面式光耦合装置的截面结构示意图;Fig. 3 is a schematic cross-sectional structure diagram of a planar optical coupling device of the present invention;
图4是本发明平面式光耦合装置的平面结构示意图;以及Fig. 4 is a schematic plan view of the planar optical coupling device of the present invention; and
图5是本发明平面式光耦合装置的制造方法的流程示意图。FIG. 5 is a schematic flowchart of a method for manufacturing a planar optical coupling device of the present invention.
附图标记:Reference signs:
10-平面式光耦合装置;11-第一基岛;12-第二基岛;14-绝缘垫片;16-收光芯片;18-导光结构;20-发光芯片;21-第一引脚;22-第二引脚;31-第一MOSFET芯片;32-第二MOSFET芯片;40-封装层;51-第一接合线;52-第二接合线;53-第三接合线;54-第四接合线;55-第五接合线;56-第六接合线;57-第七接合线;60-输出端。10-planar optical coupling device; 11-first base island; 12-second base island; 14-insulating gasket; 16-light-receiving chip; 18-light guiding structure; 20-light-emitting chip; 21-first lead 22-the second pin; 31-the first MOSFET chip; 32-the second MOSFET chip; 40-packaging layer; 51-the first bonding wire; 52-the second bonding wire; 53-the third bonding wire; 54 - fourth bonding wire; 55 - fifth bonding wire; 56 - sixth bonding wire; 57 - seventh bonding wire; 60 - output.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
在本发明的描述中,需要理解的是,术语“中心”、“横向”、“上”、“下”、“左”、“右”、“垂直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或组件必须具有特定的方位、或以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,除非另有说明,“多个”的含义是两个或两个以上。另外,术语“包括”及其任何变形,皆为“至少包含”的意思。In describing the present invention, it should be understood that the terms "central", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", " The orientation or positional relationship indicated by "bottom", "inner", "outer" and so on is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or positional relationship. Components must have a particular orientation, or be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more. In addition, the term "comprising" and any variations thereof mean "comprising at least".
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸的连接,或一体成型的连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个组件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. The connection, or integrally formed connection; can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.
这里所使用的术语仅仅是为了描述具体实施例而不意图限制示例性实施例。除非上下文明确地另有所指,否则这里所使用的单数形式“一个”、“一项”还意图包括复数。还应当理解的是,这里所使用的术语“包括”和/或“包含”规定所陈述的特征、整数、步骤、操作、单元和/或组件的存在,而不排除存在或添加一个或更多其他特征、整数、步骤、操作、单元、组件和/或其组合。The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments. As used herein, the singular forms "a", "an" and "an" are intended to include the plural unless the context clearly dictates otherwise. It should also be understood that the terms "comprising" and/or "comprising" as used herein specify the presence of stated features, integers, steps, operations, units and/or components, but do not exclude the presence or addition of one or more Other features, integers, steps, operations, units, components and/or combinations thereof.
请参阅图3和图4,图3是本发明平面式光耦合装置10的截面结构示意图,图4是本发明平面式光耦合装置10的平面结构示意图。需要说明的是,图4中省略了封装层40,以清晰表达图示内容。为达所述优点至少其中之一或其他优点,本发明的一实施例提出一种平面式光耦合装置10。如图中所示,平面式光耦合装置10包括第一基岛11、绝缘垫片14、收光芯片16、导光结构18、发光芯片20、第一引脚21、第二引脚22、第一MOSFET芯片31与封装层40。Please refer to FIG. 3 and FIG. 4 , FIG. 3 is a schematic cross-sectional view of the planar
绝缘垫片14设置于第一基岛11上,其主要用于隔绝收光芯片16与第一基岛11的电性。收光芯片16设置于绝缘垫片14上,用于接收发光芯片20发射的光线。导光结构18设置于收光芯片16上,用于导引发光芯片20发射的光线照射至收光芯片16。发光芯片20设置于导光结构18上,第一引脚21电性连接于发光芯片20的正极,第二引脚22电性连接于发光芯片20的负极。第一MOSFET芯片31设置于第一基岛11上并电性连接于收光芯片16,第一MOSFET芯片31在收到收光芯片16输出的电压后,会转换成电流,再由输出端60输出电流,并且可以充当开关,有助于实现电路的单向导通。第一MOSFET芯片31与绝缘垫片14是隔开设置,换言之,第一MOSFET芯片31与绝缘垫片14及绝缘垫片14上置放的元件具有一定距离。封装层40包覆发光芯片20与第一MOSFET芯片31,起到挡光、保护等作用。The insulating
平面式光耦合装置10的工作原理如下:当第一引脚21与第二引脚22通电时,发光芯片20会发射光线,此光线通过导光结构18会照射至收光芯片16,收光芯片16在受到光线照射后是将接收到的光线的能量转换成电能以产生光电压,该光电压会施加于第一MOSFET芯片31,推动第一MOSFET芯片31动作,进而由输出端60输出电流。The working principle of the planar
在一实施例中,如图4中所示,平面式光耦合装置10还包括第二基岛12与第二MOSFET芯片32。第二基岛12与第一基岛11是隔开设置,换言之,第一基岛11与第二基岛12之间具有一定距离。第二MOSFET芯片32设置于第二基岛12上,并电性连接于收光芯片16,第二MOSFET芯片32的用途与第一MOSFET芯片31基本相同,不再赘述。借此第二MOSFET芯片32的设置,平面式光耦合装置10可以具备双向开关的功能。In an embodiment, as shown in FIG. 4 , the planar
进一步说明,平面式光耦合装置10的各元件可以是通过接合线进行电性连接。具体来说,如图4所示,平面式光耦合装置10还包括第一接合线51、第二接合线52、第三接合线53、第四接合线54、第五接合线55、第六接合线56、以及第七接合线57。第一接合线51的两端分别连接发光芯片20的正极与第一引脚21。第二接合线52的两端分别连接发光芯片20的负极与第二引脚22。第三接合线53的两端分别连接第一基岛11与第一MOSFET芯片31的源极。第四接合线54的两端分别连接第一基岛11与第二MOSFET芯片32的源极。第五接合线55的两端分别连接第一基岛11与收光芯片16。To further illustrate, the components of the planar
第六接合线56的两端分别连接第一MOSFET芯片31的栅极与收光芯片16。Both ends of the
第七接合线57的两端分别连接第二MOSFET芯片32的栅极与收光芯片16。在一实施例中,上述各接合线可以是使用金线,具有良好导电性能。在一实施例中,收光芯片16具有多个栅极和一个源极,第五接合线55的两端分别连接第一基岛11与收光芯片16的源极,作为接地线,提升安全性;第六接合线56的两端分别连接第一MOSFET芯片31的栅极与收光芯片16的一个栅极,以驱动第一MOSFET芯片31;第七接合线57的两端分别连接第二MOSFET芯片32的栅极与收光芯片16的另一个栅极,以驱动第二MOSFET芯片32。通过收光芯片16的多栅极设置,可以分别驱动第一MOSFET芯片31与第二MOSFET芯片32,以满足使用需求。Both ends of the
补充说明的是,栅极也叫G极(Gate),作为控制极。漏极也叫D极(Drain),作为供电极。源极也叫S极(Source),作为输出极。It should be added that the grid is also called G (Gate), which is used as the control electrode. The drain is also called the D pole (Drain), as the supply electrode. The source is also called S pole (Source), as the output pole.
请结合图3与图4参阅图5,图5是本发明平面式光耦合装置10的制造方法的流程示意图。为达所述优点至少其中之一或其他优点,本发明的另一实施例进一步提出一种平面式光耦合装置10的制造方法。如图中所示,平面式光耦合装置10的制造方法包括下列步骤:Please refer to FIG. 5 in conjunction with FIG. 3 and FIG. 4 . FIG. 5 is a schematic flowchart of a manufacturing method of the planar
S100:将收光芯片与第一MOSFET芯片置放于第一基岛上;S100: placing the light-receiving chip and the first MOSFET chip on the first base island;
S200:在收光芯片与第一基岛之间放置绝缘垫片;S200: placing an insulating gasket between the light-receiving chip and the first base island;
S300:在收光芯片上方依次置放导光结构与发光芯片;S300: Place the light guide structure and the light emitting chip in sequence above the light receiving chip;
S400:将第一MOSFET芯片与收光芯片电性连接;S400: electrically connecting the first MOSFET chip to the light-receiving chip;
S500:进行封装处理。S500: Perform encapsulation processing.
进一步说明,在步骤S200中设置的绝缘垫片14与第一MOSFET芯片31是间隔一定距离。在步骤S400与步骤S500之间还可包括以下步骤:设置第二基岛12;接着,将第二MOSFET芯片32置放于第二基岛12上,并将第二MOSFET芯片32与收光芯片16电性连接。其中,第二基岛12与第一基岛11是隔开设置,换言之,第一基岛11与第二基岛12之间具有一定距离。在步骤S500中,进行封装处理可以是使用封装层40包覆发光芯片20与第一MOSFET芯片31。To further illustrate, the insulating
在一实施例中,各元件之间的电性连接方式包括:将第一接合线51的两端分别连接发光芯片20的正极与第一引脚21;将第二接合线52的两端分别连接发光芯片20的负极与第二引脚22;将第三接合线53的两端分别连接第一基岛11与第一MOSFET芯片31的源极;将第四接合线54的两端分别连接第一基岛11与第二MOSFET芯片32的源极;将第五接合线55的两端分别连接第一基岛11与收光芯片16;将第六接合线56的两端分别连接第一MOSFET芯片31的栅极与收光芯片16;将第七接合线57的两端分别连接第二MOSFET芯片32的栅极与收光芯片16。In one embodiment, the electrical connection method between the components includes: respectively connecting the two ends of the
在上述任一实施例中,导光结构18可以是导光玻璃或导光板等,以起到良好的导光作用。在上述任一实施例中,封装层40可以是以不透光材料制成,在起到封装保护的作用下,避免发光芯片20发射的光线外散。In any of the above-mentioned embodiments, the
综上所述,利用本发明所提供的一种平面式光耦合装置10及其制造方法,通过平面式支架的设计,相较于传统的上下对立式光电耦合器而言,可有效提升光传输效率。借由绝缘垫片14的设置,将收光芯片16与第一MOSFET芯片31设置于同一个基岛上,相较于传统的平面式光电耦合器而言,可达到收光芯片16孤立(Isolation)效果,无需再设置假支撑部,进而避免高压操作下产品失效的问题,保证产品在高压状态下的工作稳定性。In summary, using a planar
尽管本文中较多的使用了诸如MOSFET芯片、光耦、基岛等术语,但并不排除使用其它术语的可能性。使用这些术语仅仅是为了更方便地描述和解释本发明的本质;把它们解释成任何一种附加的限制都是与本发明精神相违背的。Although terms such as MOSFET chips, optocouplers, and base islands are frequently used in this article, the possibility of using other terms is not excluded. These terms are used only for the purpose of describing and explaining the essence of the present invention more conveniently; interpreting them as any kind of additional limitation is against the spirit of the present invention.
最后应说明的是:以上各实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述各实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limiting them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the various embodiments of the present invention. scope.
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