CN113654659B - Swinging Fourier transform infrared spectrum device of parallel reflecting mirror group - Google Patents
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Abstract
本发明公开了一种平行反射镜组摆动式傅里叶变换红外光谱装置，包括准直镜L1，分束器BS，四个平面反射镜M1、M2、M3、M4，平行反射镜组M5，成像镜L2和探测器D；平行反射镜组M5为一对平行放置的平行反射镜，相对的两平行面为反射面；所述平行反射镜组M5的底端固定，依靠底部的机构沿中心的摆轴在设定角度内摆动，所述摆轴与所述分束器BS处于同一水平线；在工作过程中，随着所述平行反射镜组M5的往复摆动，能得到随摆动角度变化的光程差。该装置结构简单且容易实现，通过平行反射镜组的往复摆动产生光程差，降低了对运动部件的精度要求，同时提高了光谱分辨率。
The invention discloses a swing type Fourier transform infrared spectroscopy device with a parallel mirror group, which includes a collimator L1, a beam splitter BS, four plane mirrors M1, M2, M3, M4, a parallel mirror group M5, The imaging mirror L2 and the detector D; the parallel mirror group M5 is a pair of parallel mirrors placed in parallel, and the opposite two parallel surfaces are reflection surfaces; the bottom end of the parallel mirror group M5 is fixed, and relies on the mechanism at the bottom to The pendulum axis swings within the set angle, and the pendulum axis is on the same horizontal line as the beam splitter BS; in the working process, with the reciprocating swing of the parallel mirror group M5, the Optical path difference. The structure of the device is simple and easy to implement, and the optical path difference is generated by the reciprocating swing of the parallel mirror group, which reduces the precision requirement of the moving parts and improves the spectral resolution at the same time.
Description
技术领域technical field
本发明涉及红外光谱仪技术领域，尤其涉及一种平行反射镜组摆动式傅里叶变换红外光谱装置。The invention relates to the technical field of infrared spectrometers, in particular to a parallel mirror group swing type Fourier transform infrared spectrometer device.
背景技术Background technique
红外光谱仪是对物质的化学组成进行探测的有效科学仪器，具有精度高、分析速度快、结果稳定、分析过程无破坏性等优点。红外光谱仪可以用于定性分析，也可以用于定量分析，还可以对未知物进行剖析，是科研和工程领域必不可少的分析技术，在化工、医药、环境、鉴定、公检法等领域得到了广泛的应用，傅里叶变换红外光谱仪(Fourier TransformInfraRed Spectrometer，FTIR)相比其它类型的红外光谱仪，具有测量精度高、杂散光低、分辨率高、光通量大、测定速度快和测量波段宽等优势，是光谱分析强有力的工具。Infrared spectrometer is an effective scientific instrument for detecting the chemical composition of substances. It has the advantages of high precision, fast analysis speed, stable results, and non-destructive analysis process. Infrared spectrometer can be used for qualitative analysis, quantitative analysis, and analysis of unknown substances. It is an indispensable analysis technology in the field of scientific research and engineering. Compared with other types of infrared spectrometers, Fourier Transform InfraRed Spectrometer (FTIR) has the advantages of high measurement accuracy, low stray light, high resolution, large luminous flux, fast measurement speed and wide measurement band. It is a powerful tool for spectral analysis.
傅里叶变换红外光谱仪从实现的方式上，主要可以分为时间调制型和空间调制型两类，空间调制型傅里叶变换光谱技术中无运动部件，具有很好的稳定性，但系统的光谱分辨率偏低；时间调制型FTIR大多基于迈克尔逊干涉仪及其变形结构，如图1所示为现有技术中典型的基于迈克尔逊干涉仪的直线往复平动式FTIR结构示意图，其通过控制动镜的直线运动来改变两束干涉光的光程差，得到干涉图，系统主要由准直镜L1，分束器BS，固定反射镜M1，动镜M2，成像镜L2和探测器D组成。光线经过准直镜L1准直后进入干涉仪系统，分束器BS将光线分为透射和反射两路光，其中反射光经过定镜M1反射后回到分束器BS，透射光经过动镜M2反射后也返回分束器BS，两路光在分束器汇合后形成干涉光，其中一部分光经成像镜L2汇聚后被探测器D接收；工作过程中，随着动镜M2的往复平动，使得干涉仪的两臂产生随时间变化的光程差，系统光程差x与动镜M2移动距离d相关。Fourier transform infrared spectrometers can be mainly divided into two types: time modulation type and space modulation type in terms of implementation methods. The space modulation type Fourier transform infrared spectrometer technology has no moving parts and has good stability, but the system The spectral resolution is low; the time-modulated FTIR is mostly based on the Michelson interferometer and its deformed structure. As shown in Figure 1, it is a typical linear reciprocating translational FTIR structure schematic diagram based on the Michelson interferometer in the prior art. Control the linear motion of the moving mirror to change the optical path difference between the two beams of interference light to obtain the interferogram. The system mainly consists of a collimator L1, a beam splitter BS, a fixed mirror M1, a moving mirror M2, an imaging mirror L2 and a detector D composition. The light enters the interferometer system after being collimated by the collimator L1. The beam splitter BS divides the light into two paths of transmission and reflection. The reflected light returns to the beam splitter BS after being reflected by the fixed mirror M1, and the transmitted light passes through the moving mirror. After M2 is reflected, it also returns to the beam splitter BS. The two beams of light converge to form interference light, and a part of the light is collected by the detector D after being converged by the imaging mirror L2; Moving, so that the two arms of the interferometer produce an optical path difference that changes with time, and the system optical path difference x is related to the moving distance d of the moving mirror M2.
x＝2d (1)x=2d (1)
动镜M2通过往复平动一个行程后，在探测器上可以得到一定光程差内的完整干涉强度信息，对于复色光而言，探测器上的干涉图强度表达式如下：After the moving mirror M2 moves back and forth for a stroke, the complete interference intensity information within a certain optical path difference can be obtained on the detector. For polychromatic light, the expression of the intensity of the interferogram on the detector is as follows:
式中，σ为入射光波数，B(σ)为入射的光谱强度，σmin～σmax为入射波数范围。得到系统的干涉强度后，通过傅里叶变换等数据处理即可复原出目标的原始光谱信息。傅里叶变换光谱仪的光谱分辨率正比于两相干光束间最大光程差的倒数,考虑到切趾函数不同,光谱分辨率的值总介于1/2L到1/L之间,L为光谱仪的最大光程差，即L愈大,光谱分辨率也愈高。In the formula, σ is the incident light wavenumber, B(σ) is the incident spectral intensity, and σ min ~ σ max is the incident wavenumber range. After obtaining the interference intensity of the system, the original spectral information of the target can be restored through data processing such as Fourier transform. The spectral resolution of a Fourier transform spectrometer is proportional to the reciprocal of the maximum optical path difference between two coherent beams. Considering the different apodization functions, the spectral resolution is always between 1/2L and 1/L, where L is the spectrometer The maximum optical path difference, that is, the larger the L, the higher the spectral resolution.
上述平动式迈克尔逊型光谱仪对动镜的运动精度要求非常严格，动镜在运动过程中产生的倾斜将会使反射回的光线产生倾角，导致干涉图的调制度下降，因此在平动式迈克尔逊型光谱仪中需严格控制动镜运动过程中的倾斜量，对动镜的运动控制提出较高的要求。The above-mentioned translational Michelson spectrometer has very strict requirements on the movement accuracy of the moving mirror. The tilt generated by the moving mirror during the movement will cause the reflected light to have an inclination angle, resulting in a decrease in the modulation degree of the interferogram. Therefore, in the translational type In the Michelson spectrometer, it is necessary to strictly control the tilt amount during the movement of the moving mirror, which puts forward higher requirements for the movement control of the moving mirror.
发明内容Contents of the invention
本发明的目的是提供一种平行反射镜组摆动式傅里叶变换红外光谱装置，该装置结构简单且容易实现，通过平行反射镜组的往复摆动产生光程差，降低了对运动部件的精度要求，同时提高了光谱分辨率。The object of the present invention is to provide a kind of parallel reflective mirror group swing type Fourier transform infrared spectroscopy device, the device structure is simple and easy to realize, the optical path difference is generated by the reciprocating swing of the parallel reflective mirror group, which reduces the accuracy of the moving parts requirements while increasing the spectral resolution.
本发明的目的是通过以下技术方案实现的：The purpose of the present invention is achieved by the following technical solutions:
一种平行反射镜组摆动式傅里叶变换红外光谱装置，述装置包括准直镜L1，分束器BS，四个平面反射镜M1、M2、M3、M4，平行反射镜组M5，成像镜L2和探测器D，其中：A kind of parallel mirror group swing type Fourier transform infrared spectroscopy device, described device comprises collimating mirror L1, beam splitter BS, four plane mirrors M1, M2, M3, M4, parallel mirror group M5, imaging mirror L2 and detector D, where:
平面反射镜M1、M4和分束器BS平行放置，且平面反射镜M1和M4关于分束器BS对称放置；The plane mirrors M1, M4 and the beam splitter BS are placed in parallel, and the plane mirrors M1 and M4 are symmetrically placed with respect to the beam splitter BS;
平面反射镜M2与入射光垂直放置，平面反射镜M3与入射光平行放置，且平面反射镜M2和M3关于分束器BS对称放置；The plane mirror M2 is placed perpendicular to the incident light, the plane mirror M3 is placed parallel to the incident light, and the plane mirrors M2 and M3 are placed symmetrically with respect to the beam splitter BS;
平行反射镜组M5为一对平行放置的平行反射镜，相对的两平行面为反射面；所述平行反射镜组M5的底端固定，依靠底部的机构沿中心的摆轴在设定角度内摆动，所述摆轴与所述分束器BS处于同一水平线；在工作过程中，随着所述平行反射镜组M5的往复摆动，能得到随摆动角度变化的光程差；The parallel mirror group M5 is a pair of parallel mirrors placed in parallel, and the opposite two parallel surfaces are reflecting surfaces; the bottom end of the parallel mirror group M5 is fixed, relying on the mechanism at the bottom along the pendulum axis in the center within a set angle Swing, the swing axis and the beam splitter BS are on the same horizontal line; during the working process, with the reciprocating swing of the parallel mirror group M5, the optical path difference that changes with the swing angle can be obtained;
入射光经过所述准直镜L1准直后进入所述分束器BS，所述分束器BS将光线分为透射和反射两路光；The incident light enters the beam splitter BS after being collimated by the collimating mirror L1, and the beam splitter BS divides the light into two paths of transmitted light and reflected light;
其中，透射光经过平面反射镜M1，平行反射镜组M5和平面反射镜M3反射后，再次经过平行反射镜组M5和平面反射镜M1反射，最后返回所述分束器BS；Wherein, after the transmitted light is reflected by the plane mirror M1, the parallel mirror group M5 and the plane mirror M3, it is again reflected by the parallel mirror group M5 and the plane mirror M1, and finally returns to the beam splitter BS;
反射光经过平面反射镜M4，平行反射镜组M5和平面反射镜M2反射后，再次经过平行反射镜组M5和平面反射镜M4反射，最后返回所述分束器BS；After the reflected light is reflected by the plane mirror M4, the parallel mirror group M5 and the plane mirror M2, it is again reflected by the parallel mirror group M5 and the plane mirror M4, and finally returns to the beam splitter BS;
两路光在所述分束器BS汇合后形成干涉光，其中一部分干涉光经所述成像镜L2汇聚后被所述探测器D接收。The two paths of light are combined by the beam splitter BS to form interference light, and part of the interference light is collected by the detector D after being converged by the imaging mirror L2.
由上述本发明提供的技术方案可以看出，上述装置结构简单且容易实现，通过平行反射镜组的往复摆动产生光程差，降低了对运动部件的精度要求，同时提高了光谱分辨率。It can be seen from the above-mentioned technical solution provided by the present invention that the structure of the above-mentioned device is simple and easy to implement, and the optical path difference is generated by the reciprocating swing of the parallel mirror group, which reduces the precision requirements for moving parts and improves the spectral resolution at the same time.
附图说明Description of drawings
为了更清楚地说明本发明实施例的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域的普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他附图。In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For Those of ordinary skill in the art can also obtain other drawings based on these drawings on the premise of not paying creative work.
图1为现有技术中典型的基于迈克尔逊干涉仪的直线往复平动式FTIR结构示意图；Fig. 1 is a typical linear reciprocating translational FTIR structure schematic diagram based on Michelson interferometer in the prior art;
图2为本发明实施例提供的平行反射镜组摆动式傅里叶变换红外光谱装置的结构示意图；Fig. 2 is a schematic structural diagram of a parallel mirror group swing type Fourier transform infrared spectroscopy device provided by an embodiment of the present invention;
图3为本发明实施例所述平行反射镜组M5摆动产生光程差的示意图。FIG. 3 is a schematic diagram of the optical path difference generated by the oscillation of the parallel mirror group M5 according to the embodiment of the present invention.
具体实施方式Detailed ways
下面结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例，这并不构成对本发明的限制。基于本发明的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明的保护范围。The technical solutions in the embodiments of the present invention are clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. It does not constitute a limitation of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
如图2为本发明实施例提供的平行反射镜组摆动式傅里叶变换红外光谱装置的结构示意图，所述装置包括准直镜L1，分束器BS，四个平面反射镜M1、M2、M3、M4，平行反射镜组M5，成像镜L2和探测器D，其中：Figure 2 is a schematic structural view of the parallel mirror group swing type Fourier transform infrared spectroscopy device provided by the embodiment of the present invention, the device includes a collimator L1, a beam splitter BS, four plane mirrors M1, M2, M3, M4, parallel mirror group M5, imaging mirror L2 and detector D, where:
平面反射镜M1、M4和分束器BS平行放置，且平面反射镜M1和M4关于分束器BS对称放置；The plane mirrors M1, M4 and the beam splitter BS are placed in parallel, and the plane mirrors M1 and M4 are symmetrically placed with respect to the beam splitter BS;
平面反射镜M2与入射光垂直放置，平面反射镜M3与入射光平行放置，且平面反射镜M2和M3关于分束器BS对称放置；The plane mirror M2 is placed perpendicular to the incident light, the plane mirror M3 is placed parallel to the incident light, and the plane mirrors M2 and M3 are placed symmetrically with respect to the beam splitter BS;
平行反射镜组M5为一对平行放置的平行反射镜，相对的两平行面为反射面；所述平行反射镜组M5的底端固定，依靠底部的机构沿中心的摆轴在设定角度内摆动，所述摆轴与所述分束器BS处于同一水平线；在工作过程中，随着所述平行反射镜组M5的往复摆动，能得到随摆动角度变化的光程差；The parallel mirror group M5 is a pair of parallel mirrors placed in parallel, and the opposite two parallel surfaces are reflecting surfaces; the bottom end of the parallel mirror group M5 is fixed, relying on the mechanism at the bottom along the pendulum axis in the center within a set angle Swing, the swing axis and the beam splitter BS are on the same horizontal line; during the working process, with the reciprocating swing of the parallel mirror group M5, the optical path difference that changes with the swing angle can be obtained;
入射光经过所述准直镜L1准直后进入所述分束器BS，所述分束器BS将光线分为透射和反射两路光；The incident light enters the beam splitter BS after being collimated by the collimating mirror L1, and the beam splitter BS divides the light into two paths of transmitted light and reflected light;
其中，透射光经过平面反射镜M1，平行反射镜组M5和平面反射镜M3反射后，再次经过平行反射镜组M5和平面反射镜M1反射，最后返回所述分束器BS；Wherein, after the transmitted light is reflected by the plane mirror M1, the parallel mirror group M5 and the plane mirror M3, it is again reflected by the parallel mirror group M5 and the plane mirror M1, and finally returns to the beam splitter BS;
反射光经过平面反射镜M4，平行反射镜组M5和平面反射镜M2反射后，再次经过平行反射镜组M5和平面反射镜M4反射，最后返回所述分束器BS；After the reflected light is reflected by the plane mirror M4, the parallel mirror group M5 and the plane mirror M2, it is again reflected by the parallel mirror group M5 and the plane mirror M4, and finally returns to the beam splitter BS;
两路光在所述分束器BS汇合后形成干涉光，其中一部分干涉光经所述成像镜L2汇聚后被所述探测器D接收。The two paths of light are combined by the beam splitter BS to form interference light, and part of the interference light is collected by the detector D after being converged by the imaging mirror L2.
具体实现中，所述装置的光谱分辨率由最大光程差决定，所述最大光程差由所述平行反射镜组M5的两个平行反射镜之间的距离h和最大摆动角θmax决定；具体是根据光谱分辨率需求来设计两个平行反射镜之间的距离h和最大摆动角θmax。In a specific implementation, the spectral resolution of the device is determined by the maximum optical path difference, and the maximum optical path difference is determined by the distance h between the two parallel mirrors of the parallel mirror group M5 and the maximum swing angle θ max ; Specifically, the distance h between the two parallel mirrors and the maximum swing angle θ max are designed according to the requirement of spectral resolution.
如图3所示为本发明实施例所述平行反射镜组M5摆动产生光程差的示意图，假设两个平行反射镜之间的距离为h，摆动角度为θ，透射光的光程为OPup，反射光的光程为OPdown，则：As shown in Figure 3, it is a schematic diagram of the optical path difference generated by the swing of the parallel mirror group M5 according to the embodiment of the present invention, assuming that the distance between the two parallel mirrors is h, the swing angle is θ, and the optical path of the transmitted light is OP up , the optical path of the reflected light is OP down , then:
得到的光程差为：The resulting optical path difference is:
进一步的，最大光程差表示为：Further, the maximum optical path difference is expressed as:
其中，θmax为最大摆动角；Among them, θ max is the maximum swing angle;
通过所述平行反射镜组M5的往复摆动，实现光程差的连续变化，在所述探测器D上得到完整的干涉图，再通过对干涉图进行光谱复原，得到对应的光谱图。Through the reciprocating swing of the parallel mirror group M5, the continuous change of the optical path difference is realized, and a complete interferogram is obtained on the detector D, and then the corresponding spectral diagram is obtained by performing spectral restoration on the interferogram.
本发明实施例中的运动部件是一对平行反射镜，通过往复摆动产生光程差，由于经过平行反射镜组的光线，出射光线与入射光线平行，因此在平行反射镜组的摆动过程中并不会引起光线的偏折，从而降低对运动部件的精度要求。The moving part in the embodiment of the present invention is a pair of parallel mirrors, which produce an optical path difference through reciprocating swing. Since the light passing through the parallel mirror group, the outgoing light is parallel to the incident light, so there is no difference in the swing process of the parallel mirror group. It will not cause deflection of light, thereby reducing the precision requirements for moving parts.
另外，由于光线在系统中的相同光路走过2次，因此在相同平行反射镜间距和摆角时，系统光程差增加一倍，因此光谱分辨率提高了一倍；并且本发明实施例中的平行反射镜组仅由平行放置的两面反射镜组成，结构简单，容易实现。In addition, since the light passes through the same optical path twice in the system, the optical path difference of the system is doubled when the distance between the parallel mirrors and the swing angle are the same, so the spectral resolution is doubled; and in the embodiment of the present invention The parallel mirror group is only composed of two mirrors placed in parallel, which has a simple structure and is easy to realize.
值得注意的是，本发明实施例中未作详细描述的内容属于本领域专业技术人员公知的现有技术。It should be noted that the content not described in detail in the embodiments of the present invention belongs to the prior art known to those skilled in the art.
以上所述，仅为本发明较佳的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明披露的技术范围内，可轻易想到的变化或替换，都应涵盖在本发明的保护范围之内。因此，本发明的保护范围应该以权利要求书的保护范围为准。本文背景技术部分公开的信息仅仅旨在加深对本发明的总体背景技术的理解，而不应当被视为承认或以任何形式暗示该信息构成已为本领域技术人员所公知的现有技术。The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person familiar with the technical field can easily conceive of changes or changes within the technical scope disclosed in the present invention. Replacement should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be determined by the protection scope of the claims. The information disclosed in this Background section is only intended to enhance the understanding of the general background of the present invention, and should not be considered as an acknowledgment or any form of suggestion that the information constitutes the prior art that is already known to those skilled in the art.
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| JPH09133582A (en) * | 1995-11-10 | 1997-05-20 | Opt Res:Kk | Differential optical path interferometer and fourier transform spectrometer employing it |
| CN104713649A (en) * | 2013-12-13 | 2015-06-17 | 天津同阳科技发展有限公司 | Interferometer used for spectrograph |
| CN109297600A (en) * | 2018-10-22 | 2019-02-01 | 中国科学院西安光学精密机械研究所 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
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| JPH09133582A (en) * | 1995-11-10 | 1997-05-20 | Opt Res:Kk | Differential optical path interferometer and fourier transform spectrometer employing it |
| CN104713649A (en) * | 2013-12-13 | 2015-06-17 | 天津同阳科技发展有限公司 | Interferometer used for spectrograph |
| CN109297600A (en) * | 2018-10-22 | 2019-02-01 | 中国科学院西安光学精密机械研究所 | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror |
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