CN113589545B - Shape memory alloy actuator and method thereof - Google Patents

Abstract

SMA actuators and related methods are described. One embodiment of the actuator includes: a base; a plurality of warping arms; and at least a first shape memory alloy wire that warps with a pair of the plurality of warping arms. Arm connection. Another embodiment of the actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator is attached to the base.

Description

Shape memory alloy actuator and method

This application is a divisional application of the Chinese invention patent application submitted on May 4, 2018 with application number 201880029763.5.

Cross-references to related applications

This application claims priority to U.S. Patent Application No. 15/971,995, filed on May 4, 2018, and further claims priority to U.S. Provisional Patent Application No. 62/502,568, filed on May 5, 2017, and filed on March 30, 2018. Priority is filed to U.S. Provisional Patent Application No. 62/650,991, the entire contents of which are incorporated herein by reference.

Technical field

Embodiments of the invention relate to the field of shape memory alloy systems. In particular, embodiments of the invention relate to the field of shape memory alloy actuators and methods related thereto.

Background technique

Shape memory alloy ("SMA") systems have movable components or structures that can be used as autofocus actuators, for example, in conjunction with camera lens elements. These systems can be surrounded by structures such as shielding enclosures. The movable assembly is supported by a support such as a plurality of balls to move on the support assembly. The flexure element formed from metal such as phosphor bronze or stainless steel has a movable plate and flexures. The flexure extends between the movable plate and the fixed support assembly and acts as a spring to enable movement of the movable assembly relative to the fixed support assembly. Balls allow moving components to move with little resistance. The movable component and the supporting component are connected by four shape memory alloy (SMA) wires extending between each component. One end of each SMA wire is attached to the support component and the opposite end is attached to the movable component. The suspension is driven by applying an electrical drive signal to the SMA wire. However, these types of systems suffer from system complexities that result in bulky systems that require large footprints and large height clearances. Additionally, existing systems are unable to provide high Z travel range with a compact, low-profile footprint.

Contents of the invention

SMA actuators and related methods are described. One embodiment of the actuator includes: a base; a plurality of warping arms; and at least a first shape memory alloy wire coupled to a pair of the plurality of warping arms. . Another embodiment of an actuator includes a base, and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator is attached to the base.

Other features and advantages of embodiments of the invention will become apparent from the accompanying drawings and the following detailed description.

Description of the drawings

Embodiments of the invention are illustrated by way of example and not by way of limitation in the views of the accompanying drawings, in which like reference numerals designate similar elements and in the drawings:

Figure 1a illustrates a lens assembly including an SMA actuator configured as a warping actuator, in accordance with an embodiment;

Figure 1b shows an SMA actuator according to an embodiment;

Figure 2 shows an SMA actuator according to an embodiment;

3 shows an exploded view of an autofocus assembly including an SMA wire actuator, according to an embodiment;

4 illustrates an autofocus assembly including an SMA actuator, according to an embodiment;

Figure 5 shows an SMA actuator according to an embodiment including a sensor;

6 shows top and side views of an SMA actuator configured as a warping actuator equipped with a lens holder, according to an embodiment;

Figure 7 shows a side view of a portion of an SMA actuator according to an embodiment;

Figure 8 shows multiple views of an embodiment of a warping actuator;

Figure 9 shows a dual element actuator with a lens holder according to an embodiment;

10 shows a cross-sectional view of an autofocus assembly including an SMA actuator, according to an embodiment;

Figures 11a-c show views of a bimorph actuator according to some embodiments;

Figure 12 shows a view of an embodiment of a bimorph actuator according to an embodiment;

Figure 13 shows an end pad cross-section of a bimorph actuator according to an embodiment;

Figure 14 shows a middle power pad cross-section of a bi-die actuator according to an embodiment;

Figure 15 shows an exploded view of an SMA actuator including two warping actuators, according to an embodiment;

Figure 16 shows an SMA actuator including two warping actuators, according to an embodiment;

Figure 17 shows a side view of an SMA actuator including two warping actuators, according to an embodiment;

Figure 18 shows a side view of an SMA actuator including two warping actuators, according to an embodiment;

19 shows an exploded view of an assembly including an SMA actuator including two warping actuators, according to an embodiment;

Figure 20 shows an SMA actuator including two warping actuators, according to an embodiment;

Figure 21 illustrates an SMA actuator including two warping actuators, according to an embodiment;

Figure 22 shows an SMA actuator including two warping actuators, according to an embodiment;

Figure 23 shows an SMA actuator including two warping actuators and a coupler, according to an embodiment;

24 illustrates an exploded view of an SMA system including an SMA actuator including a warping actuator with a stacked hanger, according to an embodiment;

25 illustrates an SMA system including an SMA actuator including a warping actuator 2402 with a stacked hanger, according to an embodiment;

Figure 26 illustrates a warping actuator including a stacked hanger, according to an embodiment;

Figure 27 shows a stacked hanger of an SMA actuator according to an embodiment;

Figure 28 illustrates a laminate formed crimp connection of SMA actuators in accordance with an embodiment;

Figure 29 shows an SMA actuator including a warping actuator with a stack hanger;

30 illustrates an exploded view of an SMA system including an SMA actuator including a warping actuator, according to an embodiment;

31 illustrates an SMA system including an SMA actuator including a warping actuator, according to an embodiment;

Figure 32 illustrates an SMA actuator including a warping actuator, according to an embodiment;

Figure 33 shows a dual yoke capture joint of a pair of warping arms of an SMA actuator according to an embodiment;

34 illustrates a resistance weld crimp for an SMA actuator for attaching an SMA wire to a warping actuator, according to an embodiment;

Figure 35 shows an SMA actuator including a warping actuator with a dual yoke capture joint;

Figure 36 shows an SMA dual element liquid lens according to an embodiment;

Figure 37 illustrates an SMA dual element liquid lens in perspective, according to an embodiment;

Figure 38 shows a cross-sectional view and a bottom view of an SMA dual element liquid lens according to an embodiment;

Figure 39 illustrates an SMA system including an SMA actuator with a dual die actuator, according to an embodiment;

Figure 40 shows an SMA actuator with a dual die actuator according to an embodiment;

41 illustrates the length of the bimorph actuator and the location of the bonding pads used to extend the wire length of the SMA wire beyond the bimorph actuator;

Figure 42 shows an exploded view of an SMA system including a bimorph actuator, according to an embodiment;

Figure 43 shows an exploded view of sub-portions of an SMA actuator according to an embodiment;

Figure 44 shows a sub-portion of an SMA actuator according to an embodiment;

Figure 45 illustrates a five-axis sensor displacement system according to an embodiment;

Figure 46 shows an exploded view of a five-axis sensor displacement system according to an embodiment;

Figure 47 shows an SMA actuator including a bimorph actuator integrated into the circuit for all motions according to an embodiment.

Figure 48 shows an SMA actuator including a bimorph actuator integrated into the circuit for all motions according to an embodiment.

Figure 49 shows a cross-section of a five-axis sensor displacement system according to an embodiment;

Figure 50 shows an SMA actuator including a bimorph actuator according to an embodiment;

51 shows a top view of an SMA actuator including a dual-die actuator that moves an image sensor in different x and y positions, according to an embodiment;

52 illustrates an SMA actuator including a dual-element actuator configured as a box-type dual-element autofocus device according to an embodiment;

Figure 53 shows an SMA actuator including a bimorph actuator according to an embodiment;

Figure 54 shows an SMA actuator including a bimorph actuator according to an embodiment;

Figure 55 shows an SMA actuator including a bimorph actuator according to an embodiment;

Figure 56 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

57 shows an exploded view of an SMA system including an SMA actuator including a bimorph actuator configured as a biaxial lens-shifting OIS, according to an embodiment;

58 illustrates a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a biaxial lens-shifting OIS, according to an embodiment;

Figure 59 shows a cartridge-type bimorph actuator according to an embodiment;

Figure 60 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

61 illustrates an exploded view of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

62 illustrates a cross-section of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 63 shows a cartridge-type bimorph actuator according to an embodiment;

64 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

65 illustrates an exploded view of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 66 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 67 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 68 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 69 shows an exploded view of an SMA including an SMA actuator including a bimorph actuator, according to an embodiment;

70 illustrates a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a three-axis sensor-shifting OIS device, according to an embodiment;

Figure 71 illustrates a cartridge-type bimorph actuator component according to an embodiment;

Figure 72 shows a flexible sensor circuit for an SMA system according to an embodiment;

73 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

74 illustrates an exploded view of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 75 shows a cross-section of an SMA system including an SMA actuator, according to an embodiment;

Figure 76 shows a cartridge-type bimorph actuator according to an embodiment;

Figure 77 shows a flexible sensor circuit for an SMA system according to an embodiment;

Figure 78 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 79 shows an exploded view of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 80 shows a cross-section of an SMA system including an SMA actuator, according to an embodiment;

Figure 81 shows a cartridge-type bimorph actuator according to an embodiment;

Figure 82 illustrates a flexible sensor circuit for an SMA system according to an embodiment;

83 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 84 shows an exploded view of an SMA system including an SMA actuator, according to an embodiment;

85 illustrates a cross-section of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 86 illustrates a cartridge-type bimorph actuator for an SMA system, according to an embodiment;

Figure 87 illustrates a flexible sensor circuit for an SMA system according to an embodiment; and

Figure 88 shows exemplary dimensions of a bimorph actuator of an SMA actuator according to an embodiment.

Detailed ways

Described herein are embodiments of SMA actuators that include a compact footprint and provide high actuation heights, for example, movement in the positive z-axis direction (z-direction) (referred to herein as z-stroke). Examples of SMA actuators include SMA warp actuators and SMA bimorph actuators. SMA actuators can be used in many applications including but not limited to use in lens assemblies as autofocus actuators, microfluidic pumps, sensor displacement, optical image stabilization, optical zoom assemblies to mechanically impinge two surfaces to thereby Produces vibration sensations commonly found in tactile feedback sensors and devices, as well as in other systems using actuators. For example, embodiments of the actuators described herein may be used as tactile feedback actuators for use in cell phones or wearable devices that are configured to provide alerts, notifications, warnings, touch areas, or button press responses to the user. . Additionally, more than one SMA actuator can be used in the system to achieve greater travel.

For various embodiments, the SMA actuator has a z-stroke greater than 0.4 mm. Additionally, for various embodiments, the height of the SMA actuator in the z-direction is 2.2 mm or less when the SMA actuator is in its initial non-actuated position. Various embodiments of SMA actuators configured as autofocus actuators in lens assemblies can have a footprint as small as only 3 mm larger than the lens inner diameter ("ID"). According to various embodiments, the SMA actuator may have a wider footprint in one direction to accommodate components including, but not limited to, sensors, wires, traces, and connectors. According to some embodiments, the footprint of the SMA actuator is 0.5 mm longer in one direction, eg, the length of the SMA actuator is 0.5 mm greater than the width.

Figure la illustrates a lens assembly including an SMA actuator configured as a warping actuator, according to an embodiment. Figure 1b shows an SMA actuator configured as a warping actuator according to an embodiment. The warping actuator 102 is coupled to the base 101 . As shown in Figure 1b, the SMA wire 100 is attached to the warping actuator 102 such that when the SMA wire 100 is actuated and retracted, this causes the warping actuator 102 to warp, which causes at least every warping The middle portion 104 of the curved actuator 102 moves in the z-stroke direction, eg, the positive z-direction, as indicated by arrow 108 . According to some embodiments, the SMA wire 100 is actuated when current is supplied to one end of the wire through a wire holder such as the crimp structure 106 . Due to the inherent resistance of the SMA material from which SMA wire 100 is made, electrical current flows through SMA wire 100 and heats it. The other side of the SMA wire 100 has a wire holder, such as a crimp structure 106, which is connected to the SMA wire 100 to complete the circuit to ground. Heating the SMA wire 100 to a sufficient temperature causes the unique material properties to change from a martensite to an austenitic crystal structure, which results in a change in the length of the wire. Changing the current changes the temperature and therefore the length of the wire, which is used to actuate and deactivate the actuator to at least control the movement of the actuator in the z-direction. Those skilled in the art will appreciate that other techniques may be used to provide current to the SMA wires.

Figure 2 shows an SMA actuator configured as an SMA bimorph actuator according to an embodiment. As shown in FIG. 2 , the SMA actuator includes a bimorph actuator 202 coupled to a base 204 . Bimorph actuator 202 includes SMA strips. The bimorph actuator 202 is configured to move at least the unsecured end of the bimorph actuator 202 in the z-stroke direction 208 as the SMA strip 206 retracts.

Figure 3 shows an exploded view of an autofocus assembly including an SMA actuator, according to an embodiment. As shown, in accordance with embodiments described herein, SMA actuator 302 is configured as a warping actuator. The autofocus assembly also includes an optical image stabilizer ("OIS") 304, a lens carrier 306 configured to hold one or more optical lenses using techniques including techniques known in the art, a return spring 308, a vertical slide support 310 and guide cover 312. The lens holder 306 is configured such that when the SMA wire is actuated and pulls and warps the warping SMA actuator 302 using techniques including those known in the art, the SMA actuator 302 moves in the z-stroke direction (e.g., When moving in the z-axis positive direction), it slides against the vertical sliding support part 310. Return spring 308 is configured to exert a force on lens carrier 306 in a direction opposite to the z-travel direction using techniques including techniques known in the art. According to various embodiments, the return spring 308 is configured to cause the lens carrier 306 to move in the direction opposite to the z-travel direction when the tension in the SMA wire decreases as the SMA wire is withdrawn. When the tension in the SMA wire is reduced to the initial value, the lens holder 306 moves to the lowest height in the z-travel direction. 4 illustrates an autofocus assembly including an SMA wire actuator according to the embodiment shown in FIG. 3 .

Figure 5 shows an SMA wire actuator according to an embodiment including a sensor. For various embodiments, sensor 502 is configured to measure movement of the SMA actuator in the z-direction or the movement of the component that the SMA actuator is causing to move using techniques including those known in the art. The SMA actuators include one or more warping actuators 506 configured to actuate using one or more SMA wires 508 similar to those described herein. For example, in the autofocus assembly described with reference to FIG. 4, the sensor is configured to determine the amount of movement of the lens carrier 306 along the z-direction 504 from the initial position using techniques including techniques known in the art. According to some embodiments, the sensor is a tunnel magnetoresistive ("TMR") sensor.

6 shows top and side views of an SMA actuator 602 configured as a warping actuator equipped with a lens holder 604, according to an embodiment. FIG. 7 shows a side view of a portion of the SMA actuator 602 according to the embodiment shown in FIG. 6 . According to the embodiment shown in FIG. 7 , the SMA actuator 602 includes a sliding base 702 . According to an embodiment, the sliding base 702 is formed from a metal such as stainless steel using techniques including techniques known in the art. However, those skilled in the art will appreciate that other materials may be used to form sliding base 702. Additionally, according to some embodiments, the sliding base 702 has a spring arm 612 coupled with the SMA actuator 602 . According to various embodiments, spring arm 612 is configured to serve two functions. The first function is to help push objects, such as lens holder 604, into the vertical sliding surface of the guide cover. For this example, spring arm 612 preloads lens carrier 604 against this surface to ensure that the lens does not tilt during actuation. For some embodiments, the vertical sliding surface 708 is configured to mate with the guide cover. The second function of the spring arm 612 is to help pull the SMA actuator 602 back downward, such as in the negative z direction, after the SMA wire 608 has moved the SMA actuator 602 in the z direction of travel (positive z direction). . Therefore, when the SMA wire 608 is actuated, it contracts to move the SMA actuator 602 in the z-stroke direction, and the spring arm 612 is configured to move the SMA actuator 602 in the z-stroke direction when the SMA wire 608 is detracted. Moves in the opposite direction to the z stroke direction.

SMA actuator 602 also includes a warping actuator 710 . For various embodiments, warp actuator 710 is formed from metal, such as stainless steel. Additionally, warp actuator 710 includes warp arms 610 and one or more wire retainers 606. According to the embodiment shown in FIGS. 6 and 7 , warping actuator 710 includes four wire retainers 606 . Each of the four wire retainers 606 is configured to receive and retain one end of the SMA wire 608 such that the SMA wire 608 is secured to the warping actuator 710 . For various embodiments, the four wire retainers 606 are crimps configured to clamp over a portion of the SMA wire 608 to secure the wire to the crimp. Those skilled in the art will appreciate that the SMA wire 608 can be secured to the wire retainer 606 using techniques known in the art, including, but not limited to: adhesives, welding, and mechanical fastening. A smart memory alloy ("SMA") wire 608 extends between a pair of wire retainers 606 such that the warp arm 610 of the warp actuator 710 is configured to move when the SMA wire 608 is actuated, which causes the The pairs of wire retainers 606 are drawn closer to each other. According to various embodiments, when a current is applied to the SMA wire 608, the SMA wire 608 is electrically actuated to move the warping arm 610 and control the position of the warping arm 610. When the current is removed or the current is below the threshold, the SMA wire 608 is deactivated. This causes the pair of wire retainers 606 to move apart and the warping arm 610 moves in the opposite direction as when the SMA wire 608 is actuated. According to various embodiments, the warping arm 610 is configured to have an initial angle of 5 degrees relative to the sliding base 702 when the SMA wire is withdrawn in its initial position. Also, according to various embodiments, the warping arm 610 is configured to have an angle of 10 to 12 degrees relative to the sliding base 702 at full travel or when the SMA wire is fully actuated.

According to the embodiment shown in FIGS. 6 and 7 , the SMA actuator 602 further includes a sliding support 706 configured between the sliding base 702 and the wire holder 606 . The sliding support 706 is configured to minimize any friction between the sliding base 702 and the warping arm 610 and/or the wire holder 606 . For some embodiments, the sliding support is secured to sliding support 706 . According to various embodiments, the sliding bearing is formed from polyoxymethylene ("POM"). Those skilled in the art will appreciate that other structures may be used to reduce any friction between the warping actuator and the base.

According to various embodiments, sliding base 702 is configured to couple with an assembly base 704, such as an autofocus base for an autofocus assembly. According to some embodiments, actuator base 704 includes etched pad pads. Such etched pad patches may be used to provide clearance for wires and crimps when the SMA actuator 602 is part of an assembly such as an autofocus assembly.

Figure 8 shows multiple views of an embodiment of a warping actuator 802 relative to the x-, y-, and z-axes. As oriented in Figure 8, warp arm 804 is configured to move along the z-axis when the SMA wire is actuated and deactivated as described herein. According to the embodiment shown in FIG. 8 , the warping arms 804 are coupled to each other through an intermediate portion such as a hammock portion 806 . According to various embodiments, the hanger portion 806 is configured to rest over a portion of the object upon which the warping actuator is acted upon to provide support thereto, such as over a portion of the object being acted upon by the warping actuator using techniques including those described herein. The technology moves the lens holder to provide support for it. According to some embodiments, hanger portion 806 is configured to provide lateral stiffness to the warping actuator during actuation. For other embodiments, the warping actuator does not include the hanger portion 806 . According to these embodiments, the warping arm is configured to act on an object to move it. For example, the warp arms are configured to act directly on features of the lens carrier to push it upward.

Figure 9 shows an SMA actuator configured as an SMA bimorph actuator according to an embodiment. SMA bimorph actuators include bimorph actuators 902, including those described herein. According to the embodiment shown in FIG. 9 , one end 906 of each of the dual die actuators 902 is secured to the base 908 . According to some embodiments, the end 906 is welded to the base 908 . However, those skilled in the art will appreciate that other techniques may be used to secure the end 906 to the base 908. Figure 9 also shows a lens carrier 904 arranged such that the dual wafer actuator 902 is configured to curl in the z-direction and lift the carrier 904 in the z-direction when actuated. For some embodiments, a return spring is used to push the dual morph actuator 902 back to the original position. A return spring may be configured as described herein to help push the dual element actuator downward to its initial, deactivated position. Due to the small footprint of the bimorph actuator, SMA actuators can be manufactured with a smaller footprint than existing actuator technology.

10 shows a cross-sectional view of an autofocus assembly including a position sensor, such as a TMR sensor, including an SMA actuator, according to an embodiment. Autofocus assembly 1002 includes a position sensor 1004 attached to a movable spring 1006, and a magnet 1008 attached to a lens mount 1010 of the autofocus assembly including an SMA actuator, such as those described herein. Those SMA actuators. The position sensor 1004 is configured to determine the amount of movement of the lens holder 1010 in the z direction 1005 from the initial position based on the distance of the magnet 1008 from the position sensor 1004 using techniques including techniques known in the art. According to some embodiments, the position sensor 1004 is electrically coupled to a controller or processor (eg, a central processing unit) using a plurality of electrical traces on the spring arms of the movable spring 1006 of the optical stabilization assembly.

Figures 11a-c show views of a bimorph actuator according to some embodiments. According to various embodiments, the bimorph actuator 1102 includes a beam 1104 and one or more SMA materials 1106, such as an SMA strip 1106b (eg, as implemented in accordance with Figure 11b 11a) or SMA wire 1106a (eg, as shown in a cross-section of a bimorph actuator including SMA wires according to the embodiment of Figure 11a). SMA material 1106 is secured to beam 1104 using techniques including those described herein. According to some embodiments, adhesive film material 1108 is used to secure SMA material 1106 to beam 1104 . For various embodiments, the ends of the SMA material 1106 are electrically and mechanically coupled with contacts 1110 configured to supply electrical current to the SMA material 1106 using techniques including techniques known in the art. According to various embodiments, contacts 1110 (eg, as shown in Figures 11a and 11b) are gold-plated copper pads. According to an embodiment, a bimorph actuator 1102 of approximately 1 millimeter in length is configured to produce a large stroke, and a thrust force of 50 millinewtons ("mN") is used as part of a lens assembly, such as shown in Figure 11c. According to some embodiments, using a bimorph actuator 1102 with a length greater than 1 mm will produce greater stroke and less force than a bimorph actuator 1102 with a length of 1 mm. For an embodiment, bimorph actuator 1102 includes 20 micron thick SMA material 1106, 20 micron thick insulator (eg, polyimide insulator) 1112, and 30 micron thick stainless steel beam 1104 or base metal (base metal). Various embodiments include a second insulator 1114 disposed between the contact layer including the contacts 1110 and the SMA material 1106 . According to some embodiments, the second insulator 1114 is configured to insulate the SMA material 1106 from portions of the contact layer not used as contacts 1110 . For some embodiments, the second insulator 1114 is a cover layer, such as a polyimide insulator. Those skilled in the art will appreciate that other dimensions and materials may be used to meet desired design characteristics.

Figure 12 shows a view of an embodiment of a bimorph actuator according to an embodiment. The embodiment shown in Figure 12 includes an intermediate feed 1204 for applying power. Power is supplied at the center of SMA material 1202 (wire or strip), such as the SMA material described herein. The end of the SMA material 1202 is grounded at end pad 1203 to the beam 1206 or base metal as a return path. End pad 1203 is electrically isolated from the remainder of contact layer 1214 . According to an embodiment, the beam 1206 or base metal is placed in close proximity to the SMA material 1202 (eg, SMA wire) along the entire length of the SMA material 1202 to provide more rapid cooling of the wire when current is turned off (i.e., the bimorph actuator is deactivated). The result is faster wire withdrawal and actuator response times. The heat distribution of SMA wires or strips is improved. For example, the heat is distributed more evenly, allowing higher total currents to be reliably transmitted to the wire. Without even heat dissipation, some parts of the wire, such as the middle area, can overheat and become damaged, requiring reduced current and reduced movement to work reliably. The intermediate feed 1204 has the advantage that the SMA material 1202 has faster wire activation/actuation (faster heating) and reduced power consumption (lower resistive path length), resulting in a faster response time. This allows for faster actuator action and the ability to operate at higher frequencies of movement.

As shown in FIG. 12 , beam 1206 includes intermediate metal 1208 that is isolated from the remainder of beam 1206 to form intermediate feed 1204 . Insulators 1210, such as those described herein, are disposed on beams 1206. The insulator 1210 is configured with one or more openings or vias 1212 to provide electrical access to the beam 1206, for example, to couple the ground section 1214b of the contact layer, and to provide contacts to the intermediate metal 1208 to form Intermediate feed 1204. According to some embodiments, a contact layer 1214 such as those described herein includes a power section 1214a and a ground section 1214b to provide actuation/control of a dual die actuator via a power supply contact 1216 and a ground tab 1218 Signal. A capping layer 1220, such as those described herein, is disposed over the contact layer 1214 to electrically isolate the contact layer except at portions of the contact layer 1214 that require electrical coupling (e.g., one or more contacts). ) outside.

Figure 13 shows an end pad cross-section of a bimorph actuator according to the embodiment shown in Figure 12. As described above, end pad 1203 is electrically isolated from the remainder of contact layer 1214 by gap 1222 formed between end pad 1203 and contact layer 1214 . According to some embodiments of the invention, the gap is formed using etching techniques including those known in the art. End pad 1203 includes a via section 1224 configured to electrically couple end pad 1203 with beam 1206 . Via section 1224 is formed in via 1212 , which is formed in insulator 1210 . SMA material 1202 is electrically coupled to end pad 1213 . SMA material 1202 may be electrically coupled to end pad 1213 using techniques including, but not limited to, soldering, resistance welding, laser welding, and direct plating.

FIG. 14 shows an intermediate feed cross-section of the bimorph actuator according to the embodiment shown in FIG. 12 . The intermediate feed 1204 is electrically coupled to the power supply through the shrink layer 1214 and is electrically coupled and thermally coupled to the intermediate metal 1208 by means of a via section 1226 in the intermediate feed 1204 formed in the via 1212, wherein said Via hole 1212 is formed in insulator 1210 .

The actuators described herein may be used to form actuator assemblies using multiple warp actuators and/or multiple dual wafer actuators. According to embodiments, the actuators can be stacked one on top of the other to increase the achievable travel distance.

Figure 15 shows an exploded view of an SMA actuator including two warping actuators, according to an embodiment. According to embodiments described herein, two warping actuators 1302, 1304 are arranged relative to each other to use their actions to oppose each other. For various embodiments, the two warp actuators 1302, 1304 are configured to move in opposite relationship to each other to position the lens carrier 1306. For example, first warp actuator 1302 is configured to receive a power signal opposite to the power signal sent to second warp actuator 1304 .

Figure 16 shows an SMA actuator including two warping actuators, according to an embodiment. The warp actuators 1302, 1304 are configured such that the warp arms 1310, 1312 of each warp actuator 1302, 1304 face each other and the sliding base of each warp actuator 1302, 1304 Seats 1314, 1316 are the outer surfaces of the two warp actuators. According to various embodiments, the hanger portion 1308 of each SMA actuator 1302, 1304 is configured to ride over a portion of the object acted upon by the one or more warping actuators 1302, 1304 to provide the same. A support, such as a frame, is provided to support the lens carriage 1306 which is moved by the warp actuator using techniques including those described herein.

17 illustrates a side view of an SMA actuator including two warping actuators showing the movement of an SMA wire 1318 causing an object such as a lens holder to move in the positive z-direction or in an upward direction, according to an embodiment. direction.

18 illustrates a side view of an SMA actuator including two warping actuators showing the movement of the SMA wire 1318 causing an object such as a lens holder to move in the negative z-direction or downward. direction of movement.

Figure 19 shows an exploded view of an assembly including an SMA actuator including two warping actuators, according to an embodiment. The warp actuators 1902, 1904 are configured such that the warp arms 1910, 1912 of each warp actuator 1902, 1904 are the outer surfaces of both warp actuators, and each warp The sliding bases 1914, 1916 of the actuators 1902, 1904 face each other. According to various embodiments, the hanger portion 1908 of each SMA actuator 1902, 1904 is configured to ride over a portion of the object acted upon by the one or more warping actuators 1902, 1904 to provide the same. A support, such as a frame, is provided to support the lens carriage 1906 which is moved by the warp actuator using techniques including those described herein. For some embodiments, the SMA actuator includes a base portion 1918 configured to receive the second warping actuator 1904 . The SMA actuator may also include a cover portion 1920. Figure 20 illustrates an SMA actuator including two warping actuators including a base portion and a cover portion, according to an embodiment.

Figure 21 illustrates an SMA actuator including two warping actuators, according to an embodiment. For some embodiments, the warp actuators 1902, 1904 are arranged relative to each other such that the hanger portion 1908 of the first warp actuator 1902 rotates relative to the hanger portion of the second warp actuator 1904. About 90 degrees. The 90 degree configuration enables pitch and roll rotation of an object such as lens holder 1906. This provides better control over the movement of the lens carriage 1906. For various embodiments, a differential power signal is applied to the SMA wires of each warp actuator pair, which provides pitch and roll rotation of the lens carrier, thereby achieving tilt OIS action.

Embodiments of the SMA actuator including two warping actuators eliminate the need for a return spring. Using two warp actuators can improve/reduce hysteresis when using SMA wire resistors for position feedback. Reaction force SMA actuators including two warping actuators facilitate more precise position control due to lower hysteresis compared to those actuators including return springs. For some embodiments, such as the one shown in Figure 22, an SMA actuator including two warp actuators 2202, 2204 uses differential power to the left and right sides of each warp actuator 2202, 2204. Right SMA wires 2218a, 2218b provide two-axis tilt. For example, left SMA wire 2218a is actuated with higher power than right SMA wire 2218b. This causes the left side of the lens holder 2206 to move downward and the right side to move upward (tilt). For some embodiments, the SMA wires of the first warping actuator 2202 are held at equal power to serve as a fulcrum against which the SMA wires 2218a, 2218b are differentially urged to cause the tilting action. Invert the power signals applied to the SMA wires, such as applying equal power to the SMA wires of the second warp actuator 2202 and using differential power to the left and right SMAs of the second warp actuator 2204 The wires 2218a and 2218b will cause the lens bracket 2206 to tilt in the other direction. This provides the ability to tilt an object (such as a lens carrier) along either axis of motion, or dial out any tilt between the lens and the sensor for good dynamic tilt, resulting in better image quality across all pixels .

Figure 23 shows an SMA actuator including two warping actuators and a coupler, according to an embodiment. SMA actuators include two warp actuators, such as those described herein. The first warp actuator 2302 is configured to couple with the second warp actuator 2304 using a coupling such as a coupling ring 2305. The warp actuators 2302, 2304 are arranged relative to each other such that the hanger portion 2308 of the first warp actuator 2302 is rotated approximately 90 degrees relative to the hanger portion 2309 of the second warp actuator 2304. A payload for movement, such as a lens or lens assembly, is attached to a lens carrier 2306 configured to be disposed on the sliding base of the first warp actuator 2302 .

For various embodiments, equal power may be applied to the SMA wires of the first warp actuator 2302 and the second warp actuator 2304. This can result in maximizing the z-travel of the SMA actuator in the positive z-direction. For some embodiments, the stroke of the SMA actuator may have a z-stroke that is equal to or greater than twice the stroke of other SMA actuators including two warping actuators. For some embodiments, an additional spring may be added to push the two warps against when the power signal is removed from the SMA actuator, thereby helping to push the actuator assembly and payload back down. Equal and opposite power signals may be applied to the SMA wires of the first and second warp actuators 2302, 2304. This enables the SMA actuator to move in the positive z-direction with the warp actuator and in the negative z-direction with the warp actuator, which enables precise control of the position of the SMA actuator. Additionally, equal and opposite power signals (differential power signals) may be applied to the left and right SMA wires of the first and second warp actuators 2302 and 2304 to cause, for example, the lens holder 2306 The object is tilted in the direction of at least one of two axes.

An embodiment of an SMA actuator that includes two warp actuators and a coupler, such as that shown in Figure 23, can be coupled with additional warp actuators and pairs of warp actuators to Achieve greater desired travel than a single SMA actuator.

Figure 24 shows an exploded view of an SMA system including an SMA actuator including a warping actuator with a stacked hanger, according to an embodiment. As described herein, for some embodiments, an SMA system is configured for use in conjunction with one or more camera lens elements as an autofocus driver. As shown in Figure 24, the SMA system includes a return spring 2403 that, according to various embodiments, is configured to cause the lens holder 2406 to move along the SMA wire 2408 as the tension in the SMA wire 2408 decreases as the SMA wire retreats. The z stroke direction moves in the opposite direction. For some embodiments, the SMA system includes a housing 2409 configured to receive a return spring 2403 and serve as a sliding support to guide the lens carrier in the z-travel direction. Housing 2409 is also configured to be disposed on warp actuator 2402. Warping actuator 2402 includes a sliding base 2401 similar to those described herein. Warping actuator 2402 includes a warping arm 2404 coupled to a hanger portion, such as a stacked hanger 2406 formed from a stack of layers. The warp actuator 2402 also includes an SMA wire attachment structure, such as a stacked crimp connection 2412.

As shown in Figure 24, the sliding base 2401 is arranged on an optional adapter plate 2414. The adapter plate is configured to mate the SMA system or warping actuator 2402 with other systems, such as OIS, additional SMA systems, or other components. Figure 25 illustrates an SMA system 2501 including an SMA actuator including a warping actuator 2402 with a stacked hanger, according to an embodiment.

Figure 26 illustrates a warping actuator including a stacked hanger, according to an embodiment. Warp actuator 2402 includes warp arms 2404. Warping arm 2404 is configured to move along the z-axis when SMA wire 2412 is actuated and deactivated as described herein. The SMA wire 2408 is attached to the warp actuator using a stacked crimp connection 2412 . According to the embodiment shown in FIG. 26 , the warping arms 2404 are coupled to each other through an intermediate portion such as a stacked hanger 2406 . According to various embodiments, the stack hanger 2406 is configured to rest over a portion of an object acted upon by a warping actuator to provide support thereto, such as when being used by a warping actuator including the techniques described herein. The technology moves the lens holder to provide support for it.

Figure 27 shows a stacked hanger of an SMA actuator according to an embodiment. For some embodiments, the stack hanger 2406 material is a low stiffness material such that it does not resist the actuation action. For example, the stack hanger 2406 is formed using a copper layer disposed on a first polyimide layer and a second polyimide layer disposed on the copper. For some embodiments, stack hangers 2406 are formed on warp arms 2404 using deposition and etching techniques including those known in the art. For other embodiments, the stack hanger 2406 is formed separately from the warp arm 2404 and attached to the warp arm 2404 using techniques including welding, adhesives, and other techniques known in the art. For various embodiments, glue or other adhesive is used on the stack hanger 2406 to ensure that the tilt arm 2404 remains in place relative to the lens carrier.

Figure 28 illustrates a laminate formed crimp connection of SMA actuators in accordance with an embodiment. The laminated crimp connection 2412 is configured to attach the SMA wire 2408 to the warp actuator and form a circuit joint with the SMA wire 2408 . For various embodiments, the laminate formed crimp connection 2412 includes a laminate formed from one or more layers of insulator, and one or more conductive layers formed over the crimp.

For example, a polyimide layer is disposed on at least a portion of the stainless steel portion to form crimp 2413. Subsequently, a conductive layer, such as copper, is disposed on the polyimide layer, which conductive layer is electrically coupled to one or more signal traces 2415 provided on the warp actuator. The crimped portion is deformed to bring it into contact with the SMA wire therein, which also brings the SMA wire into electrical contact with the conductive layer. Accordingly, a conductive layer coupled with one or more signal traces is used to apply a power signal to the SMA wire using techniques including those described herein. For some embodiments, a second polyimide layer is formed on the conductive layer in areas where the conductive layer will not be in contact with the SMA wires. For some embodiments, the stacked crimp connection 2412 is formed on the crimp 2413 using deposition and etching techniques including those known in the art. For other embodiments, the stack-formed crimp connection 2412 and one or more electrical traces are formed separately from the crimp 2413 and warp actuator, and are formed using methods including soldering, adhesives, and other methods known in the art. Other technologies are attached to the crimp 2412 and warp actuator.

Figure 29 shows an SMA actuator with a warping actuator with stacked hangers. As shown in Figure 29, when a power signal is applied, the SMA wire shrinks or shortens to move the warping arm and stack hanger in the positive z-direction. The stacked hanger in contact with the object in turn moves the object (such as the lens holder) in the positive z-axis direction. When the power signal is reduced or removed, the SMA wire lengthens and causes the warping arms and stacked hangers to move in the negative z-direction.

Figure 30 shows an exploded view of an SMA system including an SMA actuator including a warping actuator, according to an embodiment. As described herein, for some embodiments, an SMA system is configured for use in conjunction with one or more camera lens elements as an autofocus driver. As shown in Figure 30, the SMA system includes a return spring 3003 that, according to various embodiments, is configured to cause the lens holder 3005 to move along the SMA wire 3008 as the tension in the SMA wire 3008 decreases as the SMA wire retreats. The z stroke direction moves in the opposite direction. For some embodiments, the SMA system includes a stiffener 3000 disposed on a return spring 3003 . For some embodiments, the SMA system includes a housing 3009 formed from two parts configured to receive a return spring 3003 and function as a sliding support to guide the lens carrier in the z-travel direction. Housing 3009 is also configured to be disposed on warp actuator 3002. Warping actuator 3002 includes a sliding base 3001 similar to that described herein, formed from two parts. The sliding base 3001 is separated to electrically isolate the two sides (eg, one side is grounded and the other is power) due to current flowing to the wires through portions of the sliding base 3001 according to some embodiments.

Warp actuator 3002 includes warp arms 3004. Each pair of warp actuators 3002 is formed on a separate portion of warp actuator 3002 . Warping actuator 3002 also includes an SMA wire attachment structure, such as a resistance welding wire crimp 3012. The SMA system optionally includes a flex circuit 3020 for electrically coupling the SMA wire 3008 to one or more control circuits.

As shown in Figure 30, the sliding base 3001 is arranged on an optional adapter plate 3014. The adapter plate is configured to mate the SMA system or warping actuator 3002 with other systems, such as OIS, additional SMA systems, or other components. 31 illustrates an SMA system 3101 including an SMA actuator including a warping actuator 3002, according to an embodiment.

Figure 32 includes an SMA actuator including a warping actuator according to an embodiment. Warp actuator 3002 includes warp arms 3004. Warping arm 3004 is configured to move along the z-axis when SMA wire 3012 is actuated and deactivated as described herein. SMA wire 2408 is attached to resistance welding wire crimp 3012 . According to the embodiment shown in Figure 32, the warp arm 3004 is configured to mate with an object (eg, a lens holder) without using a dual yoke to capture the middle portion of the joint.

Figure 33 shows a dual yoke capture joint of a pair of warping arms of an SMA actuator according to an embodiment. Figure 33 also shows plated pads for attaching optional flex circuitry to the sliding base. For some embodiments, the plated pads are formed using gold. Figure 34 illustrates a resistance weld crimp for an SMA actuator used to attach an SMA wire to a warping actuator, according to an embodiment. For some embodiments, glue or adhesive may also be disposed on top of the weld to aid in mechanical strength and act as fatigue strain relief during operation and shock loading.

Figure 35 shows an SMA actuator including a warping actuator with dual yoke capture joints. As shown in Figure 35, when a power signal is applied, the SMA wire shrinks or shortens so that the warping arm moves in the positive z-direction. The dual yoke catches the joint in contact with the object, causing the object (such as a lens holder) to move in the positive Z direction. When the power signal is reduced or removed, the SMA wire stretches and moves the warping arm in the negative z-direction. The yoke capture feature allows the warp arm to remain in position relative to the lens carrier.

Figure 36 illustrates an SMA dual element liquid lens according to an embodiment. SMA dual element liquid lens 3501 includes a liquid lens subassembly 3502, a housing 3504, and circuitry with an SMA actuator 3506. For various embodiments, the SMA actuator includes four bimorph actuators 3508, such as the embodiments described herein. Bimorph actuator 3508 is configured to push against shaped die 3510 located on flexible membrane 3512. The ring warps the membrane 3512/liquid 3514 to change the path of light through the membrane 3512/liquid 3514. Liquid containment ring 3516 is used to contain liquid 3514 between membrane 3512 and lens 3518. The equal force from the dual-element actuator changes the focus point of the image in the Z direction (perpendicular to the lens), which allows it to be used as autofocus. According to some embodiments, different forces from the dual die actuator 3508 can move light in the X, Y axis directions, which allows it to be used as an optical image stabilizer. With appropriate control of each actuator, both OIS and AF functions can be achieved simultaneously. For some embodiments, three actuators are used. A circuit with an SMA actuator 3506 includes one or more contacts 3520 for control signals to actuate the SMA actuator. According to some embodiments including four SMA actuators, a circuit with SMA actuators 3506 includes four power circuit control contacts and a common return contact for each SMA actuator.

Figure 37 shows an SMA dual element liquid lens in perspective, according to an embodiment. Figure 38 shows a cross-sectional view and a bottom view of an SMA dual element liquid lens according to an embodiment.

Figure 39 illustrates an SMA system including an SMA actuator 3902 with a dual die actuator, according to an embodiment. SMA actuator 3902 includes four bimorph actuators using the technology described herein. As shown in Figure 40, two of the bimorph actuators are configured as positive z-stroke actuators 3904, while the other two are configured as negative z-stroke actuators 3906, which illustrates an implementation according to Example of SMA actuator 3902 with dual die actuator. Opposite actuators 3906, 3904 are configured to control action in both directions throughout their range of travel. This provides the ability to adjust the control code to compensate for tilt. For various embodiments, two SMA wires 3908 attached to the top of the component achieve positive z-stroke displacement. Two SMA wires attached to the bottom of the part enable negative Z-stroke displacement. For some embodiments, each dual die actuator is attached to an object (eg, lens holder 3910) using a tab to engage the object. The SMA system includes a top spring 3912 configured to provide stability of the lens holder 3910 in an axis perpendicular to the z-axis of travel (eg, in the direction of the x- and y-axes). Additionally, top spacer 3914 is configured to be disposed between top spring 3912 and SMA actuator 3902. A bottom spacer 3916 is disposed between the SMA actuator 3902 and the bottom spring 3918. The bottom spring 3918 is configured to provide stability of the lens carrier 3910 in an axis perpendicular to the z-axis of travel, such as in the x- and y-axes. Bottom spring 3918 is configured to be disposed on a base 3920, such as those described herein.

Figure 41 shows the length 4102 of the bimorph actuator 4103 and the location of the bonding pads 4104 for the SMA wire 4206 such that the wire length extends beyond the bimorph actuator. Longer wires than bimorph actuators are used to increase stroke and force. Therefore, the extension length 4108 of the SMA wire 4206 beyond the bimorph actuator 4103 is used to set the stroke and force of the bimorph actuator 4103.

Figure 42 shows an exploded view of an SMA system including an SMA bimorph actuator 4202, according to an embodiment. According to various embodiments, the SMA system is configured to use separate metallic materials and non-conductive adhesive to form one or more circuits to independently power the SMA wires. Some embodiments do not affect AF size and include four bimorph actuators, such as those described herein. Two of the bimorph actuators are configured as positive Z-stroke actuators, while the other two are configured as negative Z-stroke actuators. Figure 43 shows an exploded view of sub-portions of an SMA actuator according to an embodiment. This subsection includes a negative actuator signal connection 4302, a base 4304 with a dual die actuator 4306. Negative actuator signal connection 4302 includes wire bonding pads 4308 for connecting SMA wires of dual die actuator 4306 using techniques including those described herein. A layer of adhesive 4310 is used to secure the negative actuator signal connector 4302 to the base 4304. This subsection also includes a positive actuator signal connection 4314 having a wire bonding pad 4316 for connecting the SMA wire 4312 of the dual die actuator 4306 using techniques including those described herein. A layer of adhesive 4318 is used to secure the positive actuator signal connector 4314 to the base 4304. Base 4304, negative actuator signal connection 4302, and positive actuator signal connection 4314 are each formed from metal, such as stainless steel. Connection pads 4322 on each of base 4304, negative actuator signal connection 4302, and positive actuator signal connection 4314 are configured to electrically couple control signals and ground using techniques including those described herein. Technology Actuates Bimorph Actuator 4306. For some embodiments, connection pad 4322 is gold plated. Figure 44 shows a sub-portion of an SMA actuator according to an embodiment. For some embodiments, gold plated pads are formed on the stainless steel layer for solder bonding or other known electrical termination methods. In addition, the wire bond pads formed are used for signal connectors to electrically connect the SMA wires to implement power signals.

Figure 45 illustrates a five-axis sensor displacement system according to an embodiment. The five-axis sensor displacement system is configured to move an object, such as an image sensor, along five axes relative to one or more lenses. This includes X/Y/Z translation and pitch/roll tilt. Optionally, the system is constructed to use only four axes, with X/Y pan and pitch/roll tilt together, and separate AF on top for Z action. Other embodiments include five-axis sensor displacement systems configured to move one or more lenses relative to the image sensor. For some embodiments, the static lens stack is mounted on the top cover and plugged into the ID (without contacting the orange movable bracket on the inside).

Figure 46 shows an exploded view of a five-axis sensor displacement system according to an embodiment. The five-axis sensor displacement system includes two circuit components: a flexible sensor circuit 4602, a bi-die actuator circuit 4604; and eight to twelve circuit components constructed using techniques including those described herein. Dual chip actuator 4606. The five-axis sensor displacement system includes a movable bracket 4608 configured to hold one or more lenses and a housing 4610. According to an embodiment, the dual die actuator circuit 4604 includes eight to twelve SMA actuators, such as those described herein. These SMA actuators are configured to move the movable carriage 4608 along five axes, such as in the x-direction, y-direction, z-direction, pitch and roll, similar to other five-axis systems described herein.

Figure 47 shows an SMA actuator including a bimorph actuator integrated into the circuit for all actions, according to an embodiment. SMA actuator embodiments may include eight to twelve dual die actuators 4606. However, other embodiments may include more or fewer. 48 illustrates an SMA actuator 4802 that includes a dual die actuator integrated into the circuit for all actions, the SMA actuator 4802 being partially formed to fit within a corresponding housing 4804, according to an embodiment. Figure 49 shows a cross-section of a five-axis sensor displacement system according to an embodiment.

Figure 50 illustrates an SMA actuator 5002 including a bimorph actuator, according to an embodiment. SMA actuator 5002 is configured to move image sensors, lenses, or other various payloads in the x and y directions using four side-mounted SMA bimorph actuators 5004 . Figure 51 shows a top view of an SMA actuator including a bimorph actuator that moves an image sensor, lens, or other various payloads in different x and y positions.

Figure 52 illustrates an SMA actuator including a dual element actuator 5202 configured as a box-type dual element autofocus, according to an embodiment. Four top- and bottom-mounted SMA dual-element actuators, such as those described herein, are configured to move together to produce motion in the z-forming direction for autofocus. 53 illustrates an SMA actuator including a bimorph actuator, two top-mounted bimorph actuators 5302 configured to push down on one or more lenses, according to an embodiment. 54 illustrates an SMA actuator including a bimorph actuator, two bottom mounted bimorph actuators 5402 configured to urge upward on one or more lenses, according to an embodiment. 55 illustrates an SMA actuator including a bimorph actuator according to an embodiment to illustrate four top and bottom mounted SMA bimorph actuators 5502, such as those described herein. The SMA bimorph actuator 5502 is used to move one or more lenses to produce a tilt action.

Figure 56 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as a two-axis lens shifting OIS (device), according to an embodiment. For some embodiments, the two-axis lens shift OIS is configured to move the lens in the X/Y axis. For some embodiments, Z-axis motion comes from a separate AF, such as those described herein. Four dual-chip actuators push one side of the autofocus to achieve OIS action. Figure 57 shows an exploded view of an SMA system including an SMA actuator 5802 including a bimorph actuator 5806 configured as a biaxial lens shifting OIS, according to an embodiment. Figure 58 shows a cross-section of an SMA system including an SMA actuator 5802 including a bimorph actuator 5806 configured as a biaxial lens-shifting OIS, according to an embodiment. 59 illustrates a cartridge bimorph actuator 5802 for use in an SMA system as it is manufactured before being formed for assembly in the system, according to an embodiment. Configured as biaxial lens shift OIS. Such systems can be constructed with high OIS travel OIS (eg, +/-200um or higher). Additionally, this embodiment is configured to have a wide range of motion and good OIS dynamic tilt using four sliding supports (eg, POM sliding supports). Embodiments are configured to easily integrate with AF designs (eg, VCM or SMA).

60 illustrates an SMA system including an SMA actuator including a dual-element actuator configured for five-axis lens shift OIS and autofocus, according to an embodiment. For some embodiments, five-axis lens shift OIS and autofocus are configured to move the lens in the X/Y/Z axes. For some embodiments, pitch and yaw axis actions are used for dynamic tilt adjustment capabilities. Eight dual-die actuators are used to provide motion for autofocus and OIS using the technology described in this article. 61 illustrates an exploded view of an SMA system including an SMA actuator 6202 including dual element actuation configured for five-axis lens shift OIS and autofocus in accordance with an embodiment. Device 6204. 62 illustrates a cross-section of an SMA system including an SMA actuator 6202 including a dual element actuator 6204 configured as a five-axis lens shift OIS and autofocus, according to an embodiment. 63 illustrates a cartridge bimorph actuator 6202 for use in an SMA system as it is manufactured prior to being formed for assembly in the system, according to an embodiment. Configured for five-axis lens shift OIS and autofocus. Such systems can be constructed with high OIS travel OIS (eg, +/-200um or higher) and high autofocus travel (eg, 400um or higher). Additionally, such an embodiment can accommodate any tilt and eliminate the need for a separate autofocus assembly.

Figure 64 illustrates an SMA system including an SMA actuator including a dual wafer actuator configured as an extrapolation box, according to an embodiment. For some embodiments, the dual wafer actuator assembly is configured to wrap around an object such as a lens holder. Because the circuit components move with the lens holder, the flex portion has lower X/Y/Z stiffness. The tail pad of the circuit is static. The extrapolation box can be configured with four or eight dual wafer actuators. Therefore, the extrapolation box can be configured as four dual-morph actuators on each side to achieve OIS movement in the X- and Y-axes. The extrapolation box can be constructed with four dual-element actuators on the top and bottom to enable autofocus with motion in the Z-axis. The extrapolation box can be constructed with eight dual-die actuators on the top, bottom and each side to enable OIS and autofocus with movement in the X, Y and Z axes, and is capable of three-axis tilt (Pitch/Roll/Yaw). 65 shows an exploded view of an SMA system including an SMA actuator 6602 including a bimorph actuator 6604 configured as an outwardly pushing cassette, according to an embodiment. Therefore, the SMA actuator is configured such that the dual morph actuator acts on the housing 6504 to move the lens carrier 6506 using the techniques described herein. 66 illustrates an SMA system including an SMA actuator 6602 that includes a dual wafer actuator configured as an extrapolation box that is partially shaped to receive a lens carrier 6604, according to an embodiment. Figure 67 illustrates an SMA system including an SMA actuator 6602 including a bimorph actuator 6604 as it is formed to fit in the system, according to an embodiment. Configured as an extrapolation box as previously manufactured.

Figure 68 illustrates an SMA system including an SMA actuator 6802 including a bimorph actuator configured as a three-axis sensor displacement OIS, according to an embodiment. For some embodiments, z-axis motion comes from a separate autofocus system. Four dual-die actuators are configured to push on each side of the sensor carrier 6804 to provide motion to the OIS using the techniques described herein. Figure 69 shows an exploded view of an SMA including an SMA actuator 6802 including a dual element actuator configured as a three-axis sensor displacement OIS, according to an embodiment. 70 illustrates a cross-section of an SMA system including an SMA actuator 6802 including a bimorph actuator 6806 configured as a three-axis sensor displacement OIS, according to an embodiment. Figure 71 illustrates a cartridge bimorph actuator 6802 component for use in an SMA system as it is manufactured before being formed for assembly in the system, according to an embodiment. That is configured as a three-axis sensor shift OIS. Figure 72 illustrates a flexible sensor circuit for use in an SMA system configured as a three-axis sensor displacement OIS, according to an embodiment. Such systems can be constructed with high OIS travel OIS (eg, +/-200um or higher) and high autofocus travel (eg, 400um or higher). Additionally, this embodiment is configured to have a wide two-axis motion range and good OIS dynamic tilt using four sliding supports (eg, POM sliding supports). Embodiments are configured to easily integrate with AF designs (eg, VCM or SMA).

73 illustrates an SMA system including an SMA actuator 7302 including a dual die actuator 7304 configured as a six-axis sensor shift OIS and autofocus, according to an embodiment. For some embodiments, the six-axis sensor shift OIS and autofocus are configured to move the lens in the X/Y/Z/pitch/yaw/roll axes. For some embodiments, pitch and yaw axis actions enable dynamic tilt adjustment capabilities. Eight dual-die actuators are used to provide motion for autofocus and OIS using the technology described in this article. Figure 74 shows an exploded view of an SMA system including an SMA actuator 7402 including a dual element actuator 7404 configured as a six-axis sensor shifting OIS and autofocus, according to an embodiment. 75 illustrates a cross-section of an SMA system including an SMA actuator 7402 that includes a dual element actuator configured as a six-axis sensor shift OIS and autofocus, according to an embodiment. Figure 76 illustrates a cartridge dual die actuator 7402 for use in an SMA system that is configured as a fabricated six-axis sensor for shift OIS and autofocus before being shaped to fit the system, according to an embodiment. Figure 77 illustrates a flexible sensor circuit for use in an SMA system configured as a three-axis sensor displacement OIS, according to an embodiment. Such systems can be constructed with high OIS travel OIS (eg, +/-200um or greater) and high autofocus travel (eg, 400um or greater). Additionally, such an embodiment can accommodate any tilt and eliminate the need for a separate autofocus assembly.

Figure 78 illustrates an SMA system including an SMA actuator including a dual element actuator configured as a two-axis camera tilt OIS, according to an embodiment. For some embodiments, the two-axis camera tilt OIS is configured to move the camera along the pitch/yaw axis. Four dual-die actuators are used to push the top and bottom of the autofocus using the technology described in this article to achieve OIS pitch and slide motion for the entire camera motion. Figure 79 shows an exploded view of an SMA system including an SMA actuator 7902 including a dual element actuator 7904 configured as a two-axis camera tilt OIS, according to an embodiment. Figure 80 shows a cross-section of an SMA system including an SMA actuator including a dual element actuator configured as a two-axis camera tilt OIS, according to an embodiment. Figure 81 illustrates a cassette bimorph actuator for use in an SMA system configured as if manufactured before it is shaped to fit the system, according to an embodiment. Two-axis camera tilt OIS. Figure 82 illustrates a flexible sensor circuit for an SMA system configured as a two-axis camera tilt OIS, according to an embodiment. Such systems can be constructed with high OIS travel OIS (eg, plus/minus 3 degrees or more). Embodiments are configured to integrate easily with autofocus ("AF") designs (eg, VCM or SMA).

83 illustrates an SMA system including an SMA actuator including a dual-element actuator configured as a three-axis camera tilt OIS, according to an embodiment. For some embodiments, the two-axis camera tilt OIS is configured to move the camera along a pitch/yaw/roll axis. Four dual-chip actuators were used to push the top and bottom of the autofocus to achieve OIS pitch and slide actions for the entire camera motion using the techniques described in this article, and four dual-chip actuators were used to The technique described in this article pushes the side of the autofocus to achieve OIS side roll action for the entire camera motion. Figure 84 shows an exploded view of an SMA system including an SMA actuator 8402 including a dual element actuator 8404 configured as a three-axis camera tilt OIS, according to an embodiment. Figure 85 shows a cross-section of an SMA system including an SMA actuator including a dual element actuator configured as a three-axis camera tilt OIS, according to an embodiment. Figure 86 illustrates a cartridge bimorph actuator for use in an SMA system configured as it is manufactured prior to being formed for assembly in the system, according to an embodiment. Tilt OIS for three-axis cameras. Figure 87 illustrates a flexible sensor circuit for an SMA system configured as a three-axis camera tilt OIS, according to an embodiment. Such systems can be constructed with high OIS travel OIS (eg, plus/minus 3 degrees or more). Embodiments are configured to easily integrate with AF designs (eg, VCM or SMA).

Figure 88 shows exemplary dimensions of a bimorph actuator of an SMA actuator according to an embodiment. These dimensions are preferred embodiments, but those skilled in the art will understand that other dimensions may be used based on the desired characteristics of the SMA actuator.

It will be understood that terms such as "top," "bottom," "above," "below," and x-, y-, and z-directions, which are used herein as terms of convenience, refer to the spatial relationship of parts relative to each other, and Does not imply orientation with respect to any particular space or gravity. Thus, these terms are intended to cover an assembly of components regardless of whether the assembly is oriented in the specific orientation shown in the drawings and described in the specification, inverted relative to that orientation, or any other rotational variation.

It is to be understood that the term "invention" as used herein should not be construed to mean presenting only a single invention having a single essential element or group of elements. Similarly, it will also be understood that the term "the present invention" encompasses a number of separate innovations, which may be considered separate inventions. Although the present invention has been described in detail with respect to the preferred embodiments and the accompanying drawings, it will be obvious to those skilled in the art that various modifications can be made to the embodiments of the present invention without departing from the spirit and essence of the invention. Modifications and variations. scope of the invention. Additionally, the techniques described herein may be used to fabricate devices with two, three, four, five, six, or more typically n bimorph actuators and warp actuators. It is, therefore, to be understood that the detailed description and drawings set forth above are not intended to limit the breadth of the invention, which should only be inferred from the appended claims and their legal equivalents appropriately interpreted.

Claims (3)

1. A liquid lens, comprising: An electrical circuit including an actuator; flexible membrane; a forming ring located on the flexible membrane; lenses, and a liquid retention ring, the lens being configured on a side of the liquid retention ring opposite the flexible membrane, the liquid retention ring being configured to retain liquid between the lens and the flexible membrane, The actuator is configured to push the shaped element located on the flexible membrane to change the shape of the flexible membrane so that the liquid assumes a shape; Wherein, the actuator includes: base; and At least one bimorph actuator including a shape memory alloy material and a beam, the bimorph actuator being attached to the base at a first end of the beam, the beam being connected to the first end. The opposite second end is configured to be unsecured and the shape memory alloy material is secured to the beam such that the ends of the shape memory alloy material are between the first end and the second end of the beam. and electrically coupled to the beam such that the shape memory alloy material is configured to receive an electric current for actuating the shape memory alloy material and cause the beam to The second end moves in the z-direction to push the forming ring. 2. The liquid lens according to claim 1, wherein the shape memory alloy material is a shape memory alloy wire. 3. The liquid lens of claim 1, wherein the shape memory alloy material is a shape memory alloy strip.