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CN113569513B - On-chip multidimensional logic gate design method based on waveguide mode - Google Patents

On-chip multidimensional logic gate design method based on waveguide mode Download PDF

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CN113569513B
CN113569513B CN202110739727.1A CN202110739727A CN113569513B CN 113569513 B CN113569513 B CN 113569513B CN 202110739727 A CN202110739727 A CN 202110739727A CN 113569513 B CN113569513 B CN 113569513B
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王健
刘俊
王乾克
胡敏
郭邦红
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Huazhong University of Science and Technology
National Quantum Communication Guangdong Co Ltd
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Abstract

本发明公开了一种基于波导模式的片上多维逻辑门设计方法,该方法采用反向设计方法将结构区域设置成m×n的结构矩阵,按照数组的序号对应结构矩阵的位置上有a nm×a nm像素点,像素点被赋予了不同的初始值,然后利用FDTD算法和m×n的结构矩阵每个像素赋予的初值分别计算不同输入模式的输出端口中各个模式的比例,并按照结构矩阵数组中的序号找到结构矩阵中对应的位置进行变换操作,若操作后新的FOM值大于之前的FOM值,则保留这种结构变化,同时FOM被更新为新的结构的FOM,否则,反之;若FOM没有改变则局部最优解。本发明通过对器件区域的折射率分布不断改变,最终获得局部最优或全局最优解,大大提高了结构的精准程度,提高了硅基亚波长结构的性能。

The invention discloses a method for designing multi-dimensional logic gates on a chip based on a waveguide mode. The method uses a reverse design method to set a structure area into an m×n structure matrix. According to the sequence number of the array, there are a nm×a nm pixel points at the position of the structure matrix, and the pixel points are assigned different initial values. Then, the FDTD algorithm and the initial value assigned to each pixel of the m×n structure matrix are used to calculate the proportion of each mode in the output port of different input modes, and the corresponding position in the structure matrix is found according to the sequence number in the structure matrix array for transformation operation. If the new FOM value after the operation is greater than the previous FOM value, the structural change is retained, and the FOM is updated to the FOM of the new structure. Otherwise, vice versa; if the FOM does not change, the local optimal solution is obtained. The invention continuously changes the refractive index distribution of the device area, and finally obtains the local optimal solution or the global optimal solution, which greatly improves the accuracy of the structure and improves the performance of the silicon-based sub-wavelength structure.

Description

一种基于波导模式的片上多维逻辑门设计方法A design method for on-chip multidimensional logic gates based on waveguide modes

技术领域Technical Field

本发明涉及微纳光电子和量子信息技术领域,具体涉及一种基于波导模式的片上多维逻辑门设计方法。The invention relates to the field of micro-nano optoelectronics and quantum information technology, and in particular to an on-chip multi-dimensional logic gate design method based on a waveguide mode.

背景技术Background technique

量子计算(quantum computation)是基于量子力学基本原理的具有超强并行计算能力的全新计算方式。如果用二进制的“0”和“1”来表示信息,经典计算机中处理信息的经典比特(bit)在某个特定时刻只能处于“0”或者“1”,单次操作N个bit只能对2N个数中的1个数进行运算,而量子计算机中的量子比特(qubit)则可以处在|0>和|1>的任意叠加态(α|0>+β|1>)上,单次操作N个qubit能够同时实现对2N个数的并行运算,这种叠加特性使得量子计算机在处理某些特定问题如密码破译和数据搜索时具有超越经典计算机的明显优势。Quantum computation is a new computing method with super parallel computing capabilities based on the basic principles of quantum mechanics. If binary "0" and "1" are used to represent information, the classical bit that processes information in a classical computer can only be in "0" or "1" at a specific moment, and a single operation of N bits can only operate on 1 number out of 2N numbers. However, the quantum bit (qubit) in a quantum computer can be in any superposition state (α|0>+β|1>) of |0> and |1>. A single operation of N qubits can simultaneously realize parallel operations on 2N numbers. This superposition characteristic gives quantum computers a clear advantage over classical computers when dealing with certain specific problems such as code cracking and data search.

通用型量子计算机的处理器由量子逻辑门(quantum logic gate)组成。量子逻辑门通过量子力学的幺正变换完成对量子比特的受控演化,是实现量子计算的基础。The processor of a general-purpose quantum computer is composed of quantum logic gates. Quantum logic gates complete the controlled evolution of quantum bits through unitary transformations in quantum mechanics and are the basis for realizing quantum computing.

在众多量子系统中,光量子系统凭借着它天然的优势,在几十年量子信息的发展过程中一直处于领先地位。光子是一种飞行的量子比特,其超快的传播速度非常利于作为信息传输的载体。光量子态在传输过程中,对环境噪声有着很好的免疫,在经历很长的传输距离和时间后仍然能够保持其相干性。同时,光子有很多自由度可以用来编码,包括光子的路径、偏振、轨道角动量、频率、时间等,同时在集成光学器件中,波导模式也可以用来编码信息。在所有量子系统中,光量子系统对硬件的要求是最低的,不需要在真空和低温的环境下操作,这降低了量子态的调控难度,同时使得光子系统最利于做原理展示和实验验证。Among many quantum systems, photon quantum systems have been in a leading position in the development of quantum information for decades due to their natural advantages. Photons are flying quantum bits, and their ultra-fast propagation speed is very conducive to being used as a carrier for information transmission. During the transmission process, the photon quantum state is very immune to environmental noise and can still maintain its coherence after a long transmission distance and time. At the same time, photons have many degrees of freedom that can be used for encoding, including the path, polarization, orbital angular momentum, frequency, time, etc. of the photons. At the same time, in integrated optical devices, waveguide modes can also be used to encode information. Among all quantum systems, the photon quantum system has the lowest hardware requirements and does not need to operate in a vacuum and low-temperature environment. This reduces the difficulty of controlling the quantum state and makes the photon system most conducive to principle demonstration and experimental verification.

目前的主要研究方向有两类:一是在自由空间中操纵光子的线性光学量子计算,它操作简单、技术成熟,目前绝大多数量子计算方案都是在自由空间光学系统中首先被验证的,但其可扩展性差、稳定性差,非常容易受到环境因素扰动;二是基于集成芯片的光量子计算,芯片中通常使用光波导来构建复杂的光子回路。尽管波导芯片系统目前还是处于起步阶段,但是具有良好的可扩展性、稳定性和高集成度,因此前景广阔。同时,高维量子通信具有如下诸多优势:1)具有更大的信息容量;2)对噪声有更高的容忍度;3)增强了对量子克隆的鲁棒性;4)更显著地违反了定域理论和贝尔不等式。因此,近年来高维量子通信吸引了越来越多研究者的热切关注。There are two main research directions at present: one is linear optical quantum computing that manipulates photons in free space. It is simple to operate and has mature technology. At present, most quantum computing schemes are first verified in free-space optical systems, but they have poor scalability and stability and are very susceptible to environmental disturbances; the other is optical quantum computing based on integrated chips, in which optical waveguides are usually used to build complex photon circuits. Although the waveguide chip system is still in its infancy, it has good scalability, stability and high integration, so it has broad prospects. At the same time, high-dimensional quantum communication has many advantages as follows: 1) It has a larger information capacity; 2) It has a higher tolerance to noise; 3) It has enhanced robustness to quantum cloning; 4) It more significantly violates the local theory and Bell's inequality. Therefore, in recent years, high-dimensional quantum communication has attracted the keen attention of more and more researchers.

亚波长结构(Sub-Wavelength Structure,SWS)是一种周期远小于材料等效波长的阵列化结构,即周期Λ<<λ(2neff),其中λ为真空波长,neff为等效折射率。由于其周期远小于波长,亚波长结构中只存在零级衍射,光的高阶衍射级次均不能向自由空间传播,只能束缚在结构内部,因此可将其整体视为一层各向异性的介质。通过将依照亚波长尺度变化的设计图案刻蚀在绝缘体上的硅材料(Silicon on insulator,SOI)表面,并填充其他的材料(如:空气、二氧化硅等),可以实现具有目标功能的器件。Sub-wavelength structure (SWS) is an array structure with a period much smaller than the material's equivalent wavelength, that is, the period Λ<<λ(2n eff ), where λ is the vacuum wavelength and n eff is the equivalent refractive index. Since its period is much smaller than the wavelength, there is only zero-order diffraction in the sub-wavelength structure, and the higher-order diffraction orders of light cannot propagate into the free space and can only be bound inside the structure. Therefore, it can be regarded as a layer of anisotropic medium as a whole. By etching a design pattern that changes according to the sub-wavelength scale on the surface of silicon on insulator (SOI) and filling it with other materials (such as air, silicon dioxide, etc.), a device with the target function can be realized.

由于可以在超小尺度灵活改变波导介电常数,因此硅基亚波长结构可以对光场进行高效调控,实现超小型、高性能硅基光子器件。过去,在设计硅基光子器件时,主要依赖一些先验知识的物理模型或效应,然后依据经验通过简单的参数调整或参数扫描的方法来找出这些模型中能匹配所需功能的各几何尺寸参数的最佳点,这一设计过程在一定程度上是“盲目”的。通过参数调整或参数扫描来寻找器件的模型参数的设计方法属于“正向设计”。使用这种方式来设计的器件模型通常结构较简单,且一般具有一定理论物理模型,能通过解析法分析。通过参数扫描,我们能从一系列具有不同结构参数的器件中,人工挑出具有目标功能的器件。Since the waveguide dielectric constant can be flexibly changed at an ultra-small scale, silicon-based subwavelength structures can efficiently control the light field and realize ultra-small, high-performance silicon-based photonic devices. In the past, when designing silicon-based photonic devices, we mainly relied on some physical models or effects with prior knowledge, and then used simple parameter adjustment or parameter scanning methods based on experience to find the best points of various geometric size parameters in these models that can match the required functions. This design process is "blind" to a certain extent. The design method of finding the model parameters of the device through parameter adjustment or parameter scanning belongs to "forward design". The device model designed in this way usually has a simpler structure and generally has a certain theoretical physical model, which can be analyzed by analytical methods. Through parameter scanning, we can manually pick out devices with target functions from a series of devices with different structural parameters.

然而,这种常规设计方式考虑的参量维度十分有限,且无法预知是否能达到比较好的结果。更重要的是一些具有特殊功能和尺寸要求的器件,通过采用这种方式并不能被设计得到。因此需要对现有硅基亚波长结构的设计方案进行进一步地改进。However, this conventional design method considers very limited parameter dimensions, and it is impossible to predict whether it can achieve relatively good results. More importantly, some devices with special functions and size requirements cannot be designed using this method. Therefore, it is necessary to further improve the existing design scheme of silicon-based subwavelength structures.

发明内容Summary of the invention

为了解决上述技术问题,本发明提供提升光量子逻辑门的性能的基于波导模式的高维片上多维逻辑门的制作方法。In order to solve the above technical problems, the present invention provides a method for manufacturing a high-dimensional on-chip multi-dimensional logic gate based on a waveguide mode to improve the performance of an optical quantum logic gate.

为实现上述目的,本发明采取的技术方案如下:一种基于波导模式的片上多维逻辑门设计方法,该方法包括以下步骤:To achieve the above object, the technical solution adopted by the present invention is as follows: a method for designing an on-chip multi-dimensional logic gate based on a waveguide mode, the method comprising the following steps:

一种基于波导模式的片上多维逻辑门设计方法,其特征在于,该方法包括以下步骤:A method for designing on-chip multi-dimensional logic gates based on waveguide modes, characterized in that the method comprises the following steps:

步骤1:确定结构区域的尺寸和像素点初始值:采用反向设计方法将所述结构区域设置成m×n的结构矩阵,按照数组的序号对应结构矩阵的位置上有a nm×a nm的像素点,像素点位置的中心设置有直径d nm的圆孔,所述圆孔的材料为Si或者SiO2,根据材料的不同像素点被赋予不同的初始值;Step 1: Determine the size of the structure area and the initial value of the pixel point: Use the reverse design method to set the structure area into an m×n structure matrix. According to the sequence number of the array, there are a nm×a nm pixel points at the positions of the structure matrix. A circular hole with a diameter of d nm is set at the center of the pixel point position. The material of the circular hole is Si or SiO 2. Different initial values are assigned to the pixel points according to different materials.

步骤2:利用FDTD算法和m×n的结构矩阵每个像素点赋予的初始值计算不同输入模式的输出端口中各个模式的比例,所述输入输出模式为TEi,并用其构成评价该结构的FOM,FOM表达式如下所示:Step 2: Calculate the proportion of each mode in the output port of different input modes using the FDTD algorithm and the initial value assigned to each pixel of the m×n structure matrix, where the input and output modes are TE i , and use them to form the FOM for evaluating the structure. The FOM expression is as follows:

其中ti 1为输入TEi模式后目标模式的透过率,ti 2为输入TEi后其它模式的透过率,α为损耗和串扰的平衡因子,m为模式的数目,i=0,1,2,…,m;Where ti1 is the transmittance of the target mode after inputting TE i mode, ti2 is the transmittance of other modes after inputting TE i , α is the balance factor of loss and crosstalk, m is the number of modes, i = 0, 1, 2, …, m;

步骤3:按照结构矩阵数组中的序号找到结构矩阵中对应的位置进行结构转换操作:Step 3: Find the corresponding position in the structure matrix according to the serial number in the structure matrix array to perform the structure conversion operation:

操作1:如果对应位置中所述圆孔的材料是Si,则通过控制程序修改圆孔材料为SiO2,然后计算FOM得到新的FOM值;Operation 1: If the material of the circular hole in the corresponding position is Si, the circular hole material is modified to SiO 2 through the control program, and then the FOM is calculated to obtain a new FOM value;

操作2:如果对应位置中所述圆孔的材料是SiO2,,则通过控制程序修改圆孔材料为Si,然后计算FOM得到新的FOM值;Operation 2: If the material of the circular hole in the corresponding position is SiO 2 , the circular hole material is modified to Si through the control program, and then the FOM is calculated to obtain a new FOM value;

将操作1或操作2得到的新的FOM值和转换之前的FOM做比较,如果新的FOM值大于之前的FOM值,则保留这种结构转换操作后的结构,同时FOM被更新为新的结构的FOM,否则,保留原结构及其的FOM值;Compare the new FOM value obtained by operation 1 or operation 2 with the FOM before the conversion. If the new FOM value is greater than the previous FOM value, the structure after the structural conversion operation is retained, and the FOM is updated to the FOM of the new structure. Otherwise, the original structure and its FOM value are retained.

步骤4:将一组随机生成的1~mn自然数序列,依次赋予结构矩阵对应数列的每一个像素,按照1~mn从小到大的顺序依次比较并保留FOM值大的FOM值及其对应结构矩阵,得到一轮优化的FOM和结构矩阵;Step 4: assign a set of randomly generated 1-mn natural number sequences to each pixel of the corresponding sequence of the structure matrix in turn, and compare and retain the FOM values with large FOM values and their corresponding structure matrices in the order of 1-mn from small to large, and obtain a round of optimized FOM and structure matrix;

然后以这一轮的FOM和结构矩阵作为下一轮优化的初始FOM和结构矩阵,以此类推进行优化,倘若这一轮优化后FOM没有改变,此时得到局部最优解。Then the FOM and structure matrix of this round are used as the initial FOM and structure matrix of the next round of optimization, and the optimization is carried out in this way. If the FOM does not change after this round of optimization, the local optimal solution is obtained.

优选地,像素的初始值设置为0或者1。Preferably, the initial value of a pixel is set to 0 or 1.

优选地,所述m×n的结构矩阵中m和n的取值范围是10-50;Preferably, the value range of m and n in the m×n structure matrix is 10-50;

优选地,a nm×a nm的像素中a的取值范围是80nm–220nm。Preferably, the value range of a in the a nm×a nm pixel is 80 nm-220 nm.

优选地,所述圆孔直径d的取值范围是60nm-150nm。Preferably, the diameter d of the circular hole ranges from 60 nm to 150 nm.

优选地,所述结构区域的尺寸为2.5-4.5μm×1-2.5μm。Preferably, the size of the structure region is 2.5-4.5 μm×1-2.5 μm.

优选地,所述结构区域刻蚀深度h为150-250nm。Preferably, the etching depth h of the structure region is 150-250 nm.

本发明有益的技术效果:本发明采用反向设计的方法,利用多模波导中的多个波导模式,不断转换矩阵结构,保留数值大的FOM值和对应机构,最终获得局部最优或全局最优解,得到结构精细的硅基亚波长高维量子逻辑门器件的设计,大大提高了光量子逻辑门的性能。Beneficial technical effects of the present invention: The present invention adopts a reverse design method, utilizes multiple waveguide modes in a multimode waveguide, continuously transforms the matrix structure, retains large FOM values and corresponding mechanisms, and ultimately obtains a local optimal or global optimal solution, thereby obtaining a design of a silicon-based sub-wavelength high-dimensional quantum logic gate device with a fine structure, greatly improving the performance of the optical quantum logic gate.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本发明一种基于波导模式的片上多维逻辑门设计方法的步骤流程图。FIG1 is a flow chart showing the steps of a method for designing an on-chip multi-dimensional logic gate based on a waveguide mode according to the present invention.

图2为本发明实施例三维X门结构示意图。FIG. 2 is a schematic diagram of a three-dimensional X-gate structure according to an embodiment of the present invention.

图3为本发明实施例三维X输入TE0模式的传输图谱。FIG. 3 is a transmission spectrum of a three-dimensional X-input TE0 mode according to an embodiment of the present invention.

图4为本发明实施例三维X输入TE1模式的传输图谱。FIG. 4 is a transmission spectrum of a three-dimensional X-input TE1 mode according to an embodiment of the present invention.

图5为本发明实施例三维X输入TE2模式的传输图谱。FIG. 5 is a transmission spectrum of a three-dimensional X-input TE2 mode according to an embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合实施例对本发明进行进一步详细说明,但本发明要求保护的范围并不局限于下述具体实施例。In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments, but the scope of protection claimed in the present invention is not limited to the following specific embodiments.

与正向设计不同的另一种器件设计方法是“反向设计”。反向设计是指将器件区域视作一个“黑箱”,针对我们所需要的目标功能,对器件区域的折射率分布进行设计的过程。Another device design method different from forward design is "reverse design". Reverse design refers to the process of treating the device area as a "black box" and designing the refractive index distribution of the device area according to the target function we need.

根据普通无源SOI器件的工艺特点,器件区域的折射率通常表现为“被刻蚀”或“不被刻蚀”两种状态。当SOI器件的上包层为空气时,被刻蚀的部分其材料组成为空气,不被刻蚀的部分其材料组成为硅。According to the process characteristics of ordinary passive SOI devices, the refractive index of the device area usually shows two states: "etched" or "not etched". When the upper cladding of the SOI device is air, the etched part is composed of air, and the unetched part is composed of silicon.

反向设计的整体思路是,根据器件的目标功能,设置一个品质因数(Figure ofmerit,FOM),通过反向优化算法,找出一个能使得FOM最大化的器件形态。除此之外,器件的形态还通常需要满足一定的约束条件。较于传统的正向设计,反向设计方法开启了更大的参数空间,可以通过优化计算得到十分精细的结构,获得局部最优或全局最优解,充分利用现有高精度制作工艺与高性能计算能力。The overall idea of reverse design is to set a figure of merit (FOM) according to the target function of the device, and find a device shape that can maximize the FOM through a reverse optimization algorithm. In addition, the shape of the device usually needs to meet certain constraints. Compared with traditional forward design, the reverse design method opens up a larger parameter space, and can obtain a very fine structure through optimization calculation, obtain a local optimal or global optimal solution, and make full use of existing high-precision manufacturing processes and high-performance computing capabilities.

本实施例就是利用了反向设计来实现基于波导模式的片上多维逻辑门的设计,本实施例的具体方案如下:This embodiment uses reverse design to realize the design of on-chip multi-dimensional logic gates based on waveguide modes. The specific scheme of this embodiment is as follows:

如图1所示,一种基于波导模式的片上多维逻辑门设计方法,该方法包括以下步骤:As shown in FIG1 , a method for designing an on-chip multi-dimensional logic gate based on a waveguide mode includes the following steps:

步骤1:确定结构区域的尺寸和像素点初始值:采用反向设计方法将所述结构区域设置成m×n的结构矩阵,所述m×n的结构矩阵中m和n的取值范围是12-50。按照数组的序号对应结构矩阵的位置上有a nm×a nm像素点,a的取值范围是100nm–200nm,像素点位置的中心有一个直径d nm的圆孔,d的取值范围是90nm-150nm,圆孔的材料为Si或者SiO2,根据材料的不同像素点被赋予不同的初始值,像素点的初始值设置为0或者1。结构初值赋值则是类比于模式转换器件的不对称结构,可以加快迭代计算的收敛。Step 1: Determine the size of the structure area and the initial value of the pixel point: Use the reverse design method to set the structure area into an m×n structure matrix, in which the value range of m and n is 12-50. According to the sequence number of the array, there are a nm×a nm pixels at the position of the structure matrix corresponding to the position of the array, and the value range of a is 100nm-200nm. There is a circular hole with a diameter of d nm in the center of the pixel point position, and the value range of d is 90nm-150nm. The material of the circular hole is Si or SiO 2. Different initial values are assigned to the pixels according to different materials, and the initial value of the pixels is set to 0 or 1. The assignment of the initial value of the structure is analogous to the asymmetric structure of the mode conversion device, which can accelerate the convergence of the iterative calculation.

这里所述结构区域的尺寸为2.5-4.5μm×1-2.5μm,所述结构区域刻蚀深度h为150-250nm。Here, the size of the structure region is 2.5-4.5 μm×1-2.5 μm, and the etching depth h of the structure region is 150-250 nm.

步骤2:利用FDTD算法(FDTD算法,全称时域差分法,是一种光子器件的常用仿真方法)根据m×n的结构矩阵每个圆孔位置赋予的初值分别计算不同输入模式的输出端口中各个模式的比例(不同的结构矩阵对应的结构,在其输入端口输入不同模式后,输出端口中各个模式的比列均不相同),输出端口中各个模式的比例是通过重积分的方法计算来的,是利用3D-FDTD算法仿真硅基光子无源器件时常用的一种分析模式成份的方法。Step 2: Use the FDTD algorithm (FDTD algorithm, full name time domain difference method, is a commonly used simulation method for photonic devices) to calculate the proportion of each mode in the output port of different input modes according to the initial value assigned to each circular hole position in the m×n structure matrix (the structures corresponding to different structure matrices have different proportions of each mode in the output port after different modes are input into their input ports). The proportion of each mode in the output port is calculated by the method of multiple integration, which is a method commonly used to analyze mode components when using the 3D-FDTD algorithm to simulate silicon-based photonic passive devices.

所述输入输出模式为TEi,并用其构成评价该结构的FOM,FOM表达式如下所示:The input-output mode is TEi, and it is used to form the FOM for evaluating the structure. The FOM expression is as follows:

其中ti 1为输入TEi模式后目标模式的透过率,ti 2为输入TEi后其它模式的透过率,α为损耗和串扰的平衡因子,m为模式的数目,i=0,1,2,…,m。Where ti1 is the transmittance of the target mode after inputting TE i mode, ti2 is the transmittance of other modes after inputting TE i , α is the balance factor of loss and crosstalk, m is the number of modes, i = 0, 1, 2, …, m.

以TE0模式输入为例,目标转化成TE1模式,所以t0 1为输入TE0模式后TE1模式的透过率,所以t0 2为输入TE0模式后TE0或TE2模式的透过率;α为损耗和串扰的平衡因子,当α趋向0时,可得到一个损耗较低的结果,当α趋向1时,可得到一个串扰较低的结果。Taking TE0 mode input as an example, the target is converted to TE1 mode, so t 0 1 is the transmittance of TE1 mode after TE0 mode is input, so t 0 2 is the transmittance of TE0 or TE2 mode after TE0 mode is input; α is the balance factor of loss and crosstalk. When α tends to 0, a result with lower loss can be obtained. When α tends to 1, a result with lower crosstalk can be obtained.

步骤3:按照结构矩阵数组中的序号找到结构矩阵中对应的位置进行结构转换操作:Step 3: Find the corresponding position in the structure matrix according to the serial number in the structure matrix array to perform the structure conversion operation:

操作1:如果对应位置中所述圆孔的材料是Si,则通过控制程序修改圆孔材料为SiO2,然后重新计算FOM得到新的FOM值;Operation 1: If the material of the circular hole in the corresponding position is Si, the circular hole material is modified to SiO 2 through the control program, and then the FOM is recalculated to obtain a new FOM value;

操作2:如果对应位置中所述圆孔的材料是SiO2,则通过控制程序修改圆孔材料为Si,然后重新计算FOM得到新的FOM值;Operation 2: If the material of the circular hole in the corresponding position is SiO 2 , the circular hole material is modified to Si through the control program, and then the FOM is recalculated to obtain a new FOM value;

在操作1和2中转换不同材料的目的是为了改变该像素点中圆孔的材料,也就是圆孔中的折射率,从而成功地更调控器件中的折射率的分布,材料的改变圆孔位置对应的像素点的数值也随之改变。材料的转换是通过写脚本控制结构矩阵的变化,从而改变器件的结构。The purpose of converting different materials in operations 1 and 2 is to change the material of the circular hole in the pixel, that is, the refractive index in the circular hole, so as to successfully regulate the distribution of the refractive index in the device. The value of the pixel corresponding to the circular hole position will also change with the change of the material. The conversion of materials is to control the change of the structure matrix by writing a script, thereby changing the structure of the device.

将操作1或操作2得到的新的FOM值和转换之前的FOM做比较,如果新的FOM值大于之前的FOM值,则保留这种结构转换操作,同时FOM被更新为新的结构的FOM,否则FOM保持不变,变保留原结构;Compare the new FOM value obtained by operation 1 or operation 2 with the FOM before the conversion. If the new FOM value is greater than the previous FOM value, the structural conversion operation is retained and the FOM is updated to the FOM of the new structure. Otherwise, the FOM remains unchanged and the original structure is retained.

步骤4:将一组随机生成的1~mn自然数序列,依次赋予结构矩阵对应数列的每一个像素,按照1~mn从小到大的顺序依次比较并保留较大的FOM和对应结构矩阵,得到一轮优化的FOM和结构矩阵;Step 4: assign a set of randomly generated 1-mn natural number sequences to each pixel of the corresponding sequence of the structure matrix in turn, and compare and retain the larger FOM and corresponding structure matrix in the order of 1-mn from small to large, and obtain a round of optimized FOM and structure matrix;

由于m×n的结构矩阵每个矩阵元对应一种材料(Si或SiO2),矩阵元的总数为mn。如果要利用结构矩阵得到我们想要的结构,需要完成2mn次比较才能得到,但这样费时费力,且很难完成,因此采用步骤4的方式,大大节约了计算的时间,提高了效率。Since each matrix element of the m×n structure matrix corresponds to a material (Si or SiO 2 ), the total number of matrix elements is mn. If we want to use the structure matrix to get the structure we want, we need to complete 2mn comparisons to get it, but this is time-consuming and labor-intensive, and difficult to complete. Therefore, using step 4 can greatly save calculation time and improve efficiency.

然后以这一轮的FOM和结构矩阵作为下一轮优化的初始FOM和结构矩阵,以此类推进行优化,倘若某一轮优化后FOM没有改变,此时得到局部最优解,这里的没有变化是指相邻的两轮之间的FOM,进行一轮优化后,FOM的值还没有改变优化,因此已经达到了最优值。Then use the FOM and structure matrix of this round as the initial FOM and structure matrix of the next round of optimization, and optimize in this way. If the FOM does not change after a round of optimization, the local optimal solution is obtained. The no change here refers to the FOM between two adjacent rounds. After a round of optimization, the FOM value has not changed, so the optimal value has been reached.

以上方法可以适用于设计多维的任意逻辑门结构,以下是采用本实施例的方法设计得到的一种三维X门。The above method can be applied to designing any multi-dimensional logic gate structure. The following is a three-dimensional X gate designed by using the method of this embodiment.

如图2所示,本实施例得到的三维X门结构尺寸为3.6μm×1.8μm,刻蚀深度h为220nm,其中像素点的大小为150nm×150nm,像素点中心有一个直径100nm的圆孔,此时反向设计结构区域对应一个24×12的结构矩阵。As shown in FIG. 2 , the size of the three-dimensional X-gate structure obtained in this embodiment is 3.6 μm×1.8 μm, and the etching depth h is 220 nm, wherein the size of the pixel is 150 nm×150 nm, and there is a circular hole with a diameter of 100 nm in the center of the pixel. At this time, the reverse design structure area corresponds to a 24×12 structure matrix.

当输入TE0模式时输出TE1模式,输入TE1模式输出TE2模式,输入TE2模式输出TE0模式,此时即实现了X门操作。When TE0 mode is input, TE1 mode is output; when TE1 mode is input, TE2 mode is output; when TE2 mode is input, TE0 mode is output. In this case, X-gate operation is realized.

图3-5分别为输入TE0模式、TE1模式和TE2模式的传输图谱,在1540nm-1560nm波段下,TE0模式转化成TE1模式的损耗<1dB,串扰<22dB;TE1模式转化成TE2模式的损耗<1.13dB,串扰<21.24dB;TE2模式转化成TE0模式的损耗<0.73dB,串扰<22.9dB。Figures 3-5 are the transmission spectra of the input TE0 mode, TE1 mode and TE2 mode respectively. In the 1540nm-1560nm band, the loss of TE0 mode converted to TE1 mode is <1dB, and the crosstalk is <22dB; the loss of TE1 mode converted to TE2 mode is <1.13dB, and the crosstalk is <21.24dB; the loss of TE2 mode converted to TE0 mode is <0.73dB, and the crosstalk is <22.9dB.

采用本发明反向设计的方案,通过对器件区域的折射率分布不断改变,最终获得局部最优或全局最优解,大大提高了结构的精准程度,提高了硅基亚波长结构的性能。By adopting the reverse design solution of the present invention, the refractive index distribution of the device area is continuously changed to finally obtain a local optimal or global optimal solution, thereby greatly improving the accuracy of the structure and the performance of the silicon-based subwavelength structure.

根据上述说明书的揭示和教导,本发明所属领域的技术人员还可以对上述实施方式进行变更和修改。因此,本发明并不局限于上面揭示和描述的具体实施方式,对发明的一些修改和变更也应当落入本发明的权利要求的保护范围内。此外,尽管本说明书中使用了一些特定的术语,但这些术语只是为了方便说明,并不对发明构成任何限制。According to the disclosure and teaching of the above description, those skilled in the art to which the present invention belongs may also make changes and modifications to the above embodiments. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and changes to the invention should also fall within the scope of protection of the claims of the present invention. In addition, although some specific terms are used in this specification, these terms are only for the convenience of description and do not constitute any limitation to the invention.

Claims (7)

1. An on-chip multidimensional logic gate design method based on a waveguide mode is characterized by comprising the following steps:
step 1: determining the size of a structural area and the initial value of a pixel point: the structural area is set to be an m multiplied by n structural matrix by adopting a reverse design method, a pixel point with a nm multiplied by a nm is arranged at the position corresponding to the structural matrix according to the serial number of the array, a round hole with a diameter of d nm is arranged at the center of the pixel point, and the round hole is made of Si or SiO 2 Different initial values are given according to different pixel points of the material;
step 2: calculating the proportion of each mode in the output ports of different input modes by using FDTD algorithm and the initial value given by each pixel point of m multiplied by n structural matrix, wherein the input and output modes are TE i And the FOM of this structure was evaluated using its constitution, the FOM expression is as follows:
wherein t is i 1 To input TE i Transmittance of target mode after mode, t i 2 To input TE i Transmittance of the latter other modes, alpha being the balance of loss and crosstalkFactor, m, is the number of modes, i=0, 1,2, …, m;
step 3: finding the corresponding position in the structure matrix according to the sequence number in the structure matrix array to perform structure conversion operation:
operation 1: if the material of the round hole in the corresponding position is Si, modifying the round hole material into SiO through a control program 2 Then recalculate the FOM to obtain a new FOM value;
operation 2: if the material of the round hole in the corresponding position is SiO 2 Modifying the round hole material into Si through a control program and then recalculating the FOM to obtain a new FOM value;
comparing the new FOM value obtained in the operation 1 or the operation 2 with the FOM before conversion, if the new FOM value is larger than the previous FOM value, reserving the structure conversion operation, and meanwhile, updating the FOM into the FOM with the new structure, otherwise, reserving the FOM with the original structure;
step 4: sequentially giving a group of randomly generated 1-mn natural number sequences to each pixel point of corresponding number sequences of the structural matrix, sequentially comparing and retaining FOM with large numerical value FOM in the comparison structure and the corresponding structural matrix according to the sequence from 1-mn to large, and obtaining a round of optimized FOM and structural matrix;
and then taking the FOM and the structural matrix of the round as the initial FOM and the structural matrix of the next round of optimization, and advancing the row optimization, wherein if the FOM is unchanged after the round of optimization, the local optimal solution is obtained.
2. The method of designing a multi-dimensional logic gate on a chip based on a waveguide mode according to claim 1, wherein an initial value of a pixel point is set to 0 or 1.
3. The method for designing a multi-dimensional logic gate on a chip based on a waveguide mode according to claim 1, wherein the m and n values in the m x n structural matrix range from 10 to 50.
4. The method of on-chip multi-dimensional logic gate design based on waveguide mode according to claim 1, wherein the value of a in the pixel of a nm x a nm is in the range of 80nm-220nm.
5. The method for designing the on-chip multidimensional logic gate based on the waveguide mode as recited in claim 1, wherein the diameter d of the round hole is in the range of 60nm-150nm.
6. A method of designing a multi-dimensional logic gate on a chip based on a waveguide mode as claimed in claim 1, wherein the size of the structural region is 2.5-4.5 μm x 1-2.5 μm.
7. The method for designing a multi-dimensional logic gate on a chip based on a waveguide mode according to claim 6, wherein the etching depth h of the structural region is 150-250nm.
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