CN113530971A - Moving coil type self-driven magnetic suspension guide rail device and control method thereof - Google Patents
Moving coil type self-driven magnetic suspension guide rail device and control method thereof Download PDFInfo
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- CN113530971A CN113530971A CN202110865440.3A CN202110865440A CN113530971A CN 113530971 A CN113530971 A CN 113530971A CN 202110865440 A CN202110865440 A CN 202110865440A CN 113530971 A CN113530971 A CN 113530971A
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 239000000725 suspension Substances 0.000 title claims description 51
- 230000006698 induction Effects 0.000 claims abstract description 28
- 238000004804 winding Methods 0.000 claims abstract description 21
- 230000004907 flux Effects 0.000 claims description 20
- 230000033001 locomotion Effects 0.000 claims description 19
- 238000005339 levitation Methods 0.000 claims description 17
- 239000000306 component Substances 0.000 description 19
- 230000000712 assembly Effects 0.000 description 5
- 238000000429 assembly Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007667 floating Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0451—Details of controllers, i.e. the units determining the power to be supplied, e.g. comparing elements, feedback arrangements with P.I.D. control
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0459—Details of the magnetic circuit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/0487—Active magnetic bearings for rotary movement with active support of four degrees of freedom
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Abstract
一种动线圈式自驱动磁浮导轨装置及其控制方法，属于高端装备技术领域。四个导套支撑框架组合构成方形套，四个导套支撑框架的里侧面的中心处分别封装有E型组件，线圈绕组封装在位于上方的导套支撑框架的里侧面上，并位于E型组件的一侧；四个I型电磁铁分别封装在导轴支撑框架的上下左右四个侧面上，四个I型电磁铁与四个E型组件一一相对布置，永磁体封装在导轴支撑框架的上侧，永磁体与线圈绕组相对布置；双极电磁铁为E型，两个霍尔元件安装于双极电磁铁两级极面的中心处，感应线圈缠绕在双极电磁铁两级表面，初级线圈缠绕在双极电磁铁两级的感应线圈表面，电涡流传感器安装于双极电磁铁的中间齿的中心处。本发明用于超精密系统中。
A moving coil type self-driven maglev guide rail device and a control method thereof belong to the technical field of high-end equipment. The four guide sleeve support frames are combined to form a square sleeve, the center of the inner side of the four guide sleeve support frames are respectively encapsulated with E-type components, and the coil winding is packaged on the inner side of the upper guide sleeve support frame, and is located in the E-type components. One side of the component; four I-type electromagnets are packaged on the upper, lower, left, right, and left sides of the guide shaft support frame, respectively, and the four I-type electromagnets are arranged opposite to the four E-type components, and the permanent magnets are packaged on the guide shaft support On the upper side of the frame, the permanent magnets are arranged opposite to the coil windings; the bipolar electromagnet is E-type, two Hall elements are installed at the center of the two-stage pole faces of the bipolar electromagnet, and the induction coil is wound around the two-stage bipolar electromagnet. On the surface, the primary coil is wound on the surface of the induction coil of the two stages of the bipolar electromagnet, and the eddy current sensor is installed at the center of the middle tooth of the bipolar electromagnet. The present invention is used in ultra-precision systems.
Description
Technical Field
The invention belongs to the technical field of high-end equipment, and particularly relates to a moving coil type self-driven magnetic suspension guide rail device and a control method thereof.
Background
Compared with the traditional contact type guide rail, the air-floating guide rail adopts air as a support form, has the advantages of no contact wear and no mechanical friction in the working process, and can realize the positioning motion with higher precision, so that the linear motor and air-floating guide rail driving form is widely applied to an ultra-precise motion system at present. However, as the next generation of high-end equipment is developed to be high-speed, precise and modularized, and a vacuum working environment is required, further, high rigidity and straightness of the linear guide rail and a multi-working scene are required. The air-floating guide rail has air gap adjustment lag, is slow in response speed to external interference, is difficult to ensure high rigidity and straightness of the guide rail, has high requirements on machining precision, and cannot be used in a vacuum operation environment, so that the driving mode of the linear motor and the air-floating guide rail cannot meet the requirements.
The magnetic suspension guide rail realizes stable suspension of an object by controlling the magnitude of electromagnetic force, and has the advantages of high response speed, no friction, high rigidity, low power consumption, low cost and high cleanliness. Compared with the traditional mechanical linear guide rail, the magnetic suspension guide rail has no mechanical contact, thereby avoiding the abrasion caused by friction, prolonging the service life and reducing the maintenance cost; compared with an air floatation guide rail, the air floatation guide rail has the advantages of high response speed, high control precision, capability of actively adjusting the gap, high rigidity, good linearity, good robustness to high rigidity, and suitability for occasions such as vacuum working environment, high-cleanliness environment and the like. Therefore, high-performance and high-rigidity magnetic suspension guide rails are gradually applied to the field of high-end equipment with expected superiority.
The invention patent application with the publication number of CN110524500A, the publication number of 2019, 12 and 03, and the name of 'magnetic suspension guide rail motion platform' explains the mechanical structure and the installation mode of the motion platform, and realizes the multi-degree-of-freedom adjustment of the motion platform by introducing the gravity compensation device to perform suspension support on guide rails with other degrees of freedom. The magnetic suspension guide rail is a core component part of the precise motion platform, belongs to an ultra-precise traditional part, and is more diversified in application occasions compared with a magnetic suspension motion platform.
The invention patent application with the publication number of CN113059365A, the publication number of 2021, 07/02 and the name of 'a side-hung machine tool magnetic suspension guide rail' mainly describes the mechanical structure and the installation mode of the magnetic suspension guide rail on a side-hung machine tool, ensures the operation precision of the machine tool and solves the problem of poor longitudinal installation strength of the traditional magnetic suspension guide rail. The magnetic suspension guide rail mentioned in the patent application of the invention utilizes attraction force between electromagnets as a power source of the guide rail to play a role in driving and guiding, belongs to the application of the magnetic suspension technical principle in special scenes, and is not suitable for being applied to the technical field of high-end equipment as a transmission mechanism product.
The invention patent application with the publication number of CN111571242A and the publication date of 2020, 08 and 25 and the name of 'active magnetic suspension guide rail platform and control method' designs the mechanical structure of the guide rail platform by means of the magnetic suspension technology to realize the purposes of magnetic suspension guiding and magnetic suspension bearing. But still has the following disadvantages: the sensors are only arranged in the supporting direction, the suspension gaps on the two sides of the sliding box are not controllable, and the rigidity and the straightness of the guide rail cannot be guaranteed; the strength of the bracket bearing the electromagnet in the limited space is difficult to ensure, and the problem of short service life exists.
Disclosure of Invention
The invention aims to provide a moving coil type self-driven magnetic suspension guide rail device and a control method thereof, and aims to solve the problems that the existing high-performance guide rail cannot be self-driven, cannot work in a vacuum environment, is single in working occasion and is difficult to control due to high rigidity and straightness.
The moving coil type self-driven magnetic suspension guide rail device is an ultra-precise transmission mechanism based on a magnetic suspension technology, the gap of the guide rail can be actively adjusted on the basis of realizing the self-driving of the guide rail, the micro-displacement adjustment of multiple degrees of freedom can be realized while the high rigidity and good linearity of the guide rail are ensured, and the requirements of the conventional ultra-precise motion platform on the linear guide rail in the aspects of structure, multiple working occasions, motion performance and the like can be met.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a moving coil type self-driven magnetic suspension guide rail device comprises a guide sleeve and a guide shaft, wherein the guide sleeve is sleeved on the guide shaft; the guide sleeve comprises a coil winding, four guide sleeve supporting frames and four E-shaped components; the guide shaft comprises a guide shaft supporting frame, a permanent magnet and four I-shaped electromagnets; each E-shaped component comprises a bipolar electromagnet, a primary coil, an induction coil, an eddy current sensor and two Hall elements;
the four guide sleeve supporting frames are combined to form a square sleeve, E-shaped assemblies are packaged at the centers of the inner side surfaces of the four guide sleeve supporting frames respectively, the four E-shaped assemblies are arranged along the length direction of the guide shaft, and the coil winding is packaged on the inner side surface of the guide sleeve supporting frame above and positioned on one side of the E-shaped assembly;
the guide shaft supporting frame is in a cuboid shape, the four I-shaped electromagnets are respectively packaged on the upper side, the lower side, the left side and the right side of the guide shaft supporting frame, the four I-shaped electromagnets and the four E-shaped components are arranged in a one-to-one opposite mode, the permanent magnet is packaged on the upper side of the guide shaft supporting frame and located on one side of the I-shaped electromagnets, and the permanent magnet is arranged in a manner of being opposite to the coil winding;
the double-pole electromagnet is E-shaped, the two Hall elements are arranged at the center of two-stage pole faces of the double-pole electromagnet, the induction coil is wound on the two-stage surfaces of the double-pole electromagnet, the primary coil is wound on the surfaces of the two-stage induction coils of the double-pole electromagnet and is concentric with the induction coil, and the eddy current sensor is arranged at the center of a middle tooth of the double-pole electromagnet.
A control method for realizing a moving coil type self-driven magnetic suspension guide rail by using a moving coil type self-driven magnetic suspension guide rail device is as follows:
the Z freedom degree of the guide sleeve can be adjusted by adjusting the current of two-stage primary coils of the E-shaped assembly encapsulated on the inner sides of the upper guide sleeve supporting frame and the lower guide sleeve supporting frame of the guide sleeve and enabling the current to be different in magnitude;
the Y freedom degree of the guide sleeve can be adjusted by adjusting the current of two-stage primary coils of the E-shaped assembly encapsulated on the inner side surfaces of the left guide sleeve support frame and the right guide sleeve support frame of the guide sleeve and enabling the current to be different in magnitude;
the degree of freedom of the guide sleeve Ry can be adjusted by adjusting the current of two-stage primary coils of a bipolar electromagnet on E-shaped components encapsulated on the inner sides of the upper guide sleeve supporting frame and the lower guide sleeve supporting frame of the guide sleeve; the method specifically comprises the following steps: the current of the two upper primary coils is required to be different in magnitude, the current of the two lower primary coils is required to be different in magnitude, the large current value of the large current level of the two upper primary coils is the same as that of the two lower primary coils, the small current value of the small current level of the two upper primary coils is the same as that of the small current level of the two lower primary coils, the large current level of the two upper primary coils is opposite to that of the two lower primary coils, and the small current level of the two upper primary coils is opposite to that of the two lower primary coils;
the Rz degree of freedom of the guide sleeve can be adjusted by adjusting the current of two-stage primary coils of a bipolar electromagnet on E-shaped components encapsulated on the inner side surfaces of the left guide sleeve support frame and the right guide sleeve support frame of the guide sleeve; the method specifically comprises the following steps:
the current of the two primary coils on the left side is required to be different in magnitude, the current of the two primary coils on the right side is required to be different in magnitude, the large current value of the large current level of the two primary coils on the left side is identical to the large current value of the large current level of the two primary coils on the right side, the small current value of the small current level of the two primary coils on the left side is identical to the small current value of the small current level of the two primary coils on the right side, the large current level of the two primary coils on the left side and the small current level of the two primary coils on the right side are arranged oppositely, and the small current level of the two primary coils on the left side and the large current level of the two primary coils on the right side are arranged oppositely.
Compared with the prior art, the invention has the beneficial effects that:
the moving coil type self-driven magnetic suspension guide rail device can realize self-driving, has a simple and compact structure, can realize active adjustment of the Y degree of freedom, the Z degree of freedom, the Ry degree of freedom and the Rz degree of freedom of the guide shaft, has good robustness for high rigidity, not only ensures the large rigidity of the guide rail and the straightness on the X degree of freedom, but also can drive the guide sleeve to be finely adjusted on a plurality of degrees of freedom within a variable stroke, and therefore, the moving coil type self-driven magnetic suspension guide rail device can be used for various occasions. According to the control method of the moving coil type self-driven magnetic suspension guide rail, signals are collected in a combined mode of the induction coil and the Hall element (the high-frequency induction coil and the low-frequency Hall element), the accuracy and the high efficiency of the collected signals are guaranteed, the suspension gap of the magnetic suspension guide sleeve is controlled in a magnetic flux feedback mode, the control accuracy of the magnetic suspension guide rail can be improved, and the performance index can be improved. The moving coil type self-driven magnetic suspension guide rail device is applied to an ultra-precise transmission system with the requirements of high positioning precision, high response speed and high rigidity.
Drawings
FIG. 1 is a schematic structural diagram of a moving-coil self-driven magnetic levitation guide rail apparatus according to the present invention;
FIG. 2 is a schematic structural diagram of a guide sleeve in a moving coil type self-driven magnetic levitation guide rail device according to the present invention;
FIG. 3 is a cross-sectional view of section A-A of FIG. 2;
FIG. 4 is a schematic structural diagram of an E-shaped component in a moving coil type self-driven magnetic levitation guide rail device according to the present invention;
FIG. 5 is a schematic view of a guide shaft structure in a moving coil type self-driven magnetic levitation guide rail device according to the present invention;
fig. 6 is a schematic diagram of a control method of a moving coil type self-driven magnetic levitation guide rail according to the present invention.
In the figure: 1-guide sleeve; 2-a guide shaft; 1-1-a first guide sleeve support frame; 1-2-a second guide sleeve support frame; 1-3-a third guide sleeve support frame; 1-4-a fourth guide sleeve support frame; 1-5-E type components; 1-6-coil winding; 1-5-1-primary coil; 1-5-2-induction coil; 1-5-3-hall element; 1-5-4 bipolar electromagnets; 1-5-5-eddy current sensor; 2-1-a guide shaft support frame; 2-2-I type electromagnets; 2-3-permanent magnet.
Detailed Description
The specific structure, operation and control method of the present invention will be further described in detail with reference to the accompanying drawings:
the first embodiment is as follows: with reference to fig. 1 to 5, the present embodiment discloses a moving coil type self-driven magnetic levitation guide rail device, which includes a guide sleeve 1 and a guide shaft 2, wherein the guide sleeve 1 is sleeved on the guide shaft 2; the guide sleeve 1 comprises coil windings 1-6, four guide sleeve supporting frames and four E-shaped components 1-5; the guide shaft 2 comprises a guide shaft supporting frame 2-1, a permanent magnet 2-3 and four I-shaped electromagnets 2-2; each E-shaped component 1-5 comprises a bipolar electromagnet 1-5-4, a primary coil 1-5-1, an induction coil 1-5-2, an eddy current sensor 1-5-5 and two Hall elements 1-5-3;
the four guide sleeve supporting frames are combined to form a square sleeve, E-shaped assemblies (symmetrically arranged) are packaged at the centers of the inner side surfaces of the four guide sleeve supporting frames respectively, the four E-shaped assemblies are arranged along the length direction of the guide shaft 2, and the coil windings 1-6 are packaged on the inner side surface of the guide sleeve supporting frame above and are positioned on one side of the E-shaped assemblies (the coil windings 1-6 are symmetrically arranged in the front and back direction of the guide sleeve supporting frame);
the guide shaft supporting frame 2-1 is in a cuboid shape, the four I-shaped electromagnets 2-2 are respectively packaged on the upper, lower, left and right sides of the guide shaft supporting frame 2-1 (and are symmetrically arranged), the four I-shaped electromagnets 2-2 and the four E-shaped components 1-5 are arranged in a one-to-one opposite mode, the permanent magnet 2-3 is packaged on the upper side of the guide shaft supporting frame 2-1 and is positioned on one side of the I-shaped electromagnet 2-2, and the permanent magnet 2-3 and the coil winding 1-6 are arranged in an opposite mode;
the double-pole electromagnet is 1-5-4 in an E shape, the two Hall elements 1-5-3 are arranged at the center of two-stage pole faces of the double-pole electromagnet 1-5-4, the induction coil 1-5-2 is wound on the two-stage surface of the double-pole electromagnet 1-5-4, the primary coil 1-5-1 is wound on the surface of the induction coil 1-5-2 of the double-pole electromagnet 1-5-4 and is concentric with the induction coil 1-5-2, and the eddy current sensor 1-5-5 is arranged at the center of a middle tooth of the double-pole electromagnet 1-5-4.
Further, as shown in fig. 2 and 3, the four guide sleeve support frames include a first guide sleeve support frame 1-1, a second guide sleeve support frame 1-2, a third guide sleeve support frame 1-3, and a fourth guide sleeve support frame 1-4, the first guide sleeve support frame 1-1 and the third guide sleeve support frame 1-3 are arranged in an up-down opposite manner, the second guide sleeve support frame 1-2 and the fourth guide sleeve support frame 1-4 are arranged in a left-right opposite manner, and the coil windings 1-6 are encapsulated on the inner side surface of the first guide sleeve support frame 1-1.
The second embodiment is as follows: as shown in fig. 1 to 5, the present embodiment is a method for implementing a control method of a moving-coil self-driven magnetic levitation guide rail by using a moving-coil self-driven magnetic levitation guide rail device according to the first embodiment, where the control method includes:
by adjusting the current of the two-stage primary coil 1-5-1 of the E-shaped component 1-5 encapsulated on the inner side surfaces of the upper guide sleeve supporting frame and the lower guide sleeve supporting frame of the guide sleeve 1, the current is different, and the adjustment of the guide sleeve 1Z freedom degree can be realized (namely, the adjustment of the guide sleeve 1Z freedom degree can be realized by adjusting the current of the primary coil 1-5-1 of the E-shaped component 1-5 encapsulated on the inner side surfaces of the first guide sleeve supporting frame 1-1 and the third guide sleeve supporting frame 1-3, the current of the two-stage primary coil 1-5-1 encapsulated on the inner side surface of the first guide sleeve supporting frame 1-1 is required to be consistent, and the current of the two-stage primary coil 1-5-1 encapsulated on the inner side surface of the third guide sleeve supporting frame 1-3 is required to be consistent);
by adjusting the current of the two-stage primary coil 1-5-1 of the E-shaped component 1-5 encapsulated on the inner side surfaces of the left and right guide sleeve supporting frames of the guide sleeve 1, the current is different, and the adjustment of the Y degree of freedom of the guide sleeve 1 can be realized (namely, the adjustment of the current of the two-stage primary coil 1-5-1 of the E-shaped component 1-5 encapsulated on the inner side of the second guide sleeve supporting frame 1-2 and the fourth guide sleeve supporting frame 1-4 can realize the adjustment of the Y degree of freedom of the guide sleeve 1. the current of the two-stage primary coil 1-5-1 encapsulated on the inner side of the second guide sleeve supporting frame 1-2 is required to be consistent, and the current of the two-stage primary coil 1-5-1 encapsulated on the inner side of the fourth guide sleeve supporting frame 1-4 is consistent);
the degree of freedom of the guide sleeve 1Ry can be adjusted by adjusting the current of two-stage primary coils 1-5-1 of a bipolar electromagnet 1-5-4 on the inner side surfaces of an E-shaped component 1-5 encapsulated on the inner side surfaces of an upper guide sleeve supporting frame and a lower guide sleeve supporting frame of the guide sleeve 1; the method specifically comprises the following steps: the current of the upper two-stage primary coil 1-5-1 is required to be different in magnitude, the current of the lower two-stage primary coil 1-5-1 is required to be different in magnitude, the large current value of the large current level of the upper two-stage primary coil 1-5-1 is required to be the same as that of the large current level of the lower two-stage primary coil 1-5-1, the small current value of the small current level of the upper two-stage primary coil 1-5-1 is required to be the same as that of the small current level of the lower two-stage primary coil 1-5-1, the large current level of the upper two-stage primary coil 1-5-1 is required to be opposite to that of the lower two-stage primary coil 1-5-1, and the small current level of the upper two-stage primary coil 1-5-1 is required to be opposite to that of the lower two-stage primary coil 1-5-1 -a high current level of-1 is arranged directly opposite;
the Rz degree of freedom of the guide sleeve 1 can be adjusted by adjusting the current of two-stage primary coils 1-5-1 of a bipolar electromagnet 1-5-4 on the inner side surfaces of the E-shaped components 1-5 encapsulated on the left and right guide sleeve supporting frames of the guide sleeve 1; the method specifically comprises the following steps: the current of the two-stage primary coil 1-5-1 on the left side is required to be different in magnitude, the current of the two-stage primary coil 1-5-1 on the right side is required to be different in magnitude, the large current value of the large current level of the two-stage primary coil 1-5-1 on the left side is identical to the large current value of the large current level of the two-stage primary coil 1-5-1 on the right side, the small current value of the small current level of the two-stage primary coil 1-5-1 on the left side is identical to the small current value of the small current level of the two-stage primary coil 1-5-1 on the right side, the large current level of the two-stage primary coil 1-5-1 on the left side is arranged opposite to the small current level of the two-stage primary coil 1-5-1 on the right side, and the small current level of the two-stage primary coil 1-5-1 on the left side is arranged opposite to the small current level of the two-stage primary coil 1-5-1 on the right side The large current level of-1 is arranged right opposite.
Further, as shown in fig. 1 and 4, a magnetic flux signal is acquired by combining the induction coil 1-5-2 and the hall element 1-5-3, the eddy current sensor 1-5-5 measures a suspension gap, and the suspension gap of the magnetic suspension guide sleeve 1 is controlled in a magnetic flux feedback manner with high precision.
Further, a grating ruler or a laser interferometer is used for collecting information of the movement direction of the guide sleeve 1, and the performance of the movement direction of the X degree of freedom is controlled in a current feedback mode.
The invention relates to a control method of a moving coil type self-driven magnetic suspension guide rail, which is characterized in that a primary coil 1-5-1 of an E-shaped component 1-5 positioned on a shaft sleeve 1 is electrified, attraction force is generated between a bipolar electromagnet 1-5-4 and an I-shaped electromagnet 2-2, and the suspension of the shaft sleeve 1 is realized; the coil windings 1-6 on the shaft sleeve 1 are electrified, the coil windings 1-6 can generate a movable traveling wave magnetic field after being electrified, the traveling wave magnetic field makes linear motion along the direction of X degree of freedom, the magnetic field generated by the permanent magnets 2-3 on the guide shaft 2 interacts with the traveling wave magnetic field to generate traction force, and the traction force drives the guide sleeve 1 to make linear motion along the direction of the traveling wave on the guide shaft 2 along the direction of X degree of freedom, so that the self-driving of the magnetic suspension guide sleeve is realized.
The invention relates to a control method of a moving coil type self-driven magnetic suspension guide rail, which is characterized in that a primary coil 1-5-1 of a bipolar electromagnet 1-5-4 of an E-shaped component 1-5 positioned on a guide sleeve 1 is electrified, attraction force is generated between the bipolar electromagnet 1-5-4 and an I-shaped electromagnet 2-2, and the accurate control of Y freedom, Z freedom, Ry freedom and Rz freedom of the guide sleeve 1 is realized by adjusting the current of the bipolar electromagnet 1-5-4 two-stage primary coil 1-5-1 of the E-shaped component 1-5 on each guide sleeve supporting frame in the guide sleeve 1; the coil windings 1-6 on the shaft sleeve 1 are electrified, the coil windings 1-6 can generate a movable traveling wave magnetic field after being electrified, the traveling wave magnetic field makes linear motion along the direction of X degree of freedom, the magnetic field generated by the permanent magnets 2-3 on the guide shaft 2 interacts with the traveling wave magnetic field to generate traction force, and the traction force drives the guide sleeve 1 to make linear motion along the direction of the traveling wave along the direction of X degree of freedom on the guide shaft 2, so that the self-driving of the magnetic suspension guide sleeve 2 is realized.
The invention provides a control method of a moving coil type self-driven magnetic suspension guide rail, which is characterized in that a primary coil 1-5-1 in an E-shaped assembly 1-5 positioned on a shaft sleeve 1 is electrified, attraction force is generated between a bipolar electromagnet 1-5-4 and an I-shaped electromagnet 2-2, and the suspension of the shaft sleeve 1 is realized; the coil windings 1-6 on the shaft sleeve 1 are electrified, the coil windings 1-6 can generate a movable traveling wave magnetic field after being electrified, the traveling wave magnetic field makes linear motion along the direction of X degree of freedom, the magnetic field generated by the permanent magnets 2-3 on the guide shaft 2 interacts with the traveling wave magnetic field to generate traction force, and the traction force drives the shaft sleeve 1 to make linear motion along the direction of the traveling wave along the direction of X degree of freedom on the guide shaft, so that the self-driving of the magnetic suspension guide sleeve 1 is realized.
Further, as shown in fig. 6, the levitation gap is adjusted based on a magnetic flux feedback manner, in which,ΦG,refrepresenting the desired magnetic flux, [ phi ]GRepresenting the magnetic flux output by the magnetic levitation guideway system, S representing the differentiator, KP(g) For primary gain, a factor, K, representing the gap dependence of the primary output voltages(g) For the gain of the induction coil, the factor, K, representing the gap dependence of the induction coil output voltageH(g) A coefficient representing the output voltage of the Hall element in relation to the gap is taken as the gain of the Hall element, u represents the output voltage of the primary coilsRepresenting the output voltage of the induction coil, uHIndicating the output voltage of the Hall element, CSIndicating induction coil controllers, CHA Hall element controller is shown, G represents a control object, and 1/s represents an integrator; the invention relates to a control method of a moving coil type self-driven magnetic suspension guide rail, which consists of three signal loops. Wherein, the signal loop 1 is a magnetic flux forward control channel, and the signal flow 1 is the desired magnetic flux phiG,refThrough a differentiator S and a primary gain KP(g) The output voltage u acts on the control object G and is integrated through the integrator 1/s to obtain the magnetic flux phi output by the magnetic suspension guide rail systemGFurther generating magnetic force to adjust the gap; the signal loop 2 is a high-frequency regulation channel, the signal flow 2 of which is the desired magnetic flux phiG,refThrough a differentiator S and through an induction coil gain Ks(g) Then through an induction coil controller CSThe output voltage u acts on the control object G and is integrated by the integrator 1/s to obtain the magnetic flux phi output by the magnetic suspension guide rail systemGMeanwhile, a feedback loop is formed inside the induction coil, and the signal flow is expressed as: the output signal of the controlled object G passes through the induction coil gain Ks(g) Output induction coil voltage usForming a magnetic flux feedback inside the induction coil, wherein the channel mainly acts on high-frequency signals; the signal circuit 3 is a low-frequency flux-regulating channel, the signal flow of which is the desired magnetic flux phiG,refThrough a Hall element gain KH(g) Output voltage, and pass through Hall element controller CHThe output voltage u acts on the control object G and is integrated by the integrator 1/s to obtain the magnetic flux phi output by the magnetic suspension guide rail systemGTherewith, andmeanwhile, a feedback loop is formed inside the Hall element, and the signal flow of the feedback loop is expressed as: the signal flowing out after the output of the control object G passes through the integrator 1/s passes through the Hall element gain K againH(g) Output Hall element voltage uHForming feedback inside the Hall element, wherein the channel mainly processes low-frequency signals; the signal loop 2 and the signal loop 3 jointly form a full-frequency-band magnetic flux feedback adjusting channel, comprehensive magnetic flux information is provided for forward magnetic flux control of the signal loop 1, accurate adjustment of magnetic levitation force of the magnetic levitation guide rail can be achieved through the magnetic flux control, high-precision real-time control of a gap between the magnetic levitation guide sleeve and the guide shaft is further achieved, and robustness of rigidity of the magnetic levitation guide rail is guaranteed.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention, and the present invention is not limited thereto, and any person skilled in the art can substitute or change the technical solution of the present invention and its inventive concept within the technical scope of the present invention.
Claims (5)
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