CN113497165B - Light emitting element mounting method and display device - Google Patents
Light emitting element mounting method and display device Download PDFInfo
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- CN113497165B CN113497165B CN202110354292.9A CN202110354292A CN113497165B CN 113497165 B CN113497165 B CN 113497165B CN 202110354292 A CN202110354292 A CN 202110354292A CN 113497165 B CN113497165 B CN 113497165B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
- H10H29/142—Two-dimensional arrangements, e.g. asymmetric LED layout
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
- H10H20/0364—Manufacture or treatment of packages of interconnections
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Abstract
提供利用了激光剥离的发光元件的安装方法以及显示装置。一实施方式的发光元件的安装方法是通过激光剥离将设于剥离用的蓝宝石基板的一个面上的发光元件剥离并对阵列基板进行安装所用的方法。该方法具备:通过密封件将阵列基板与蓝宝石基板固接的工序、对阵列基板与蓝宝石基板施加压力而将蓝宝石基板平坦化并且将阵列基板与蓝宝石基板固定的工序、从蓝宝石基板侧照射第1波段的第1激光光并将阵列基板的第1端子部与发光元件的端子部接合的工序、以及从蓝宝石基板侧照射第2波段的第2激光光并将发光元件从蓝宝石基板剥离的工序。
Provided are a method for mounting a light-emitting element using laser stripping and a display device. A method for mounting a light-emitting element in one embodiment is a method for stripping a light-emitting element provided on one surface of a sapphire substrate for stripping by laser stripping and mounting the light-emitting element on an array substrate. The method comprises: a step of fixing the array substrate to the sapphire substrate by a sealant, a step of applying pressure to the array substrate and the sapphire substrate to flatten the sapphire substrate and fix the array substrate to the sapphire substrate, a step of irradiating a first laser light of a first wavelength band from the sapphire substrate side and joining a first terminal portion of the array substrate to a terminal portion of the light-emitting element, and a step of irradiating a second laser light of a second wavelength band from the sapphire substrate side and stripping the light-emitting element from the sapphire substrate.
Description
本申请以日本专利申请2020-067627(申请日:2020年4月3日)为基础,通过该申请而享受优先权。本申请通过参照该申请而包含该申请的全部内容。This application is based on Japanese Patent Application No. 2020-067627 (filing date: April 3, 2020), and claims priority from the Japanese Patent Application No. 2020-067627, the entire contents of which are incorporated herein by reference.
技术领域Technical Field
本发明的实施方式涉及发光元件的安装方法以及显示装置。Embodiments of the present invention relate to a method for mounting a light emitting element and a display device.
背景技术Background technique
一般来说,已知有使用了作为自发光元件的发光二极管(LED:Light EmittingDiode)的LED显示器,但近年来,作为更高精细化的显示装置,开发有使用了被称为微LED的微小二极管元件的显示装置(以下记为微LED显示器)。Generally speaking, LED displays using light emitting diodes (LED) as self-luminous elements are known. However, in recent years, display devices using tiny diode elements called micro LEDs (hereinafter referred to as micro LED displays) have been developed as more sophisticated display devices.
该微LED显示器与以往的液晶显示显示器、有机EL显示器不同,由于在显示区域安装并形成有芯片状的多个微LED,因此容易实现高精细化和大型化的兼顾,作为下一代显示器而得到关注。This micro LED display is different from previous liquid crystal displays and organic EL displays. Since multiple micro LEDs in chip form are installed and formed in the display area, it is easy to achieve both high precision and large size, and it is attracting attention as the next generation display.
作为在显示区域安装芯片状的多个微LED的方法,研究了利用激光剥离(LLO:Laser Lift Off)的方法。As a method of mounting a plurality of micro LEDs in a chip form in a display region, a method utilizing laser lift-off (LLO: Laser Lift Off) has been studied.
发明内容Summary of the invention
本公开的目的之一在于,提供一种利用了激光剥离的微LED的安装方法以及微LED显示器(发光元件的安装方法以及显示装置)。One of the purposes of the present disclosure is to provide a micro LED mounting method and a micro LED display (a light emitting element mounting method and a display device) using laser lift-off.
一实施方式的发光元件的安装方法是通过激光剥离将设置在剥离用的蓝宝石基板的一个面上的发光元件剥离,并用于对阵列基板进行安装的方法。上述方法具备第1工序、第2工序、第3工序、第4工序。上述第1工序进行形成在上述阵列基板的一个面上的第1端子部与上述发光元件的端子部之间的对位,并且通过密封件将上述阵列基板与上述蓝宝石基板固接。上述第2工序对上述阵列基板与上述蓝宝石基板施加压力而将上述蓝宝石基板平坦化,并且将上述阵列基板与上述蓝宝石基板固定。上述第3工序对于设置于上述阵列基板的第1端子部之上的接合部件,从上述蓝宝石基板侧照射第1波段的第1激光光,并将上述阵列基板的第1端子部与上述发光元件的端子部接合。上述第4工序对于上述发光元件,从上述蓝宝石基板侧照射与上述第1波段不同的第2波段的第2激光光,将上述发光元件从上述蓝宝石基板剥离。A method for mounting a light-emitting element in one embodiment is a method for mounting an array substrate by removing a light-emitting element disposed on one surface of a sapphire substrate for removal by laser removal. The method comprises a first step, a second step, a third step, and a fourth step. The first step performs alignment between a first terminal portion formed on one surface of the array substrate and a terminal portion of the light-emitting element, and fixes the array substrate to the sapphire substrate through a seal. The second step applies pressure to the array substrate and the sapphire substrate to flatten the sapphire substrate, and fixes the array substrate to the sapphire substrate. The third step irradiates a first laser light of a first wavelength band from the sapphire substrate side to a bonding component disposed on the first terminal portion of the array substrate, and joins the first terminal portion of the array substrate to the terminal portion of the light-emitting element. The fourth step irradiates a second laser light of a second wavelength band different from the first wavelength band from the sapphire substrate side to the light-emitting element, and removes the light-emitting element from the sapphire substrate.
一实施方式的显示装置具备第1基板和第2基板。上述第1基板具备阵列基板、形成于上述阵列基板的一个面上的第1端子部、设置于上述阵列基板的一个面上且设置于俯视时与上述第1端子部不重叠的位置的密封件。上述第2基板具备蓝宝石基板和设置于上述蓝宝石基板的一个面上的发光元件。上述第1基板与上述第2基板通过上述密封件而被固接。A display device according to one embodiment includes a first substrate and a second substrate. The first substrate includes an array substrate, a first terminal portion formed on one surface of the array substrate, and a sealing member provided on one surface of the array substrate and provided at a position not overlapping with the first terminal portion when viewed from above. The second substrate includes a sapphire substrate and a light-emitting element provided on one surface of the sapphire substrate. The first substrate and the second substrate are fixedly connected by the sealing member.
一实施方式的显示装置具备阵列基板、设于上述阵列基板的一个面上的发光元件、形成于上述阵列基板的一个面上且形成于俯视时与上述发光元件不重叠的位置的端子部。在上述端子部的至少一部分附着有激光剥离时熔融的密封件的残渣,所述激光剥离用于将上述发光元件从蓝宝石基板剥离。A display device according to one embodiment includes an array substrate, a light emitting element provided on one surface of the array substrate, and a terminal portion formed on one surface of the array substrate and formed at a position not overlapping with the light emitting element when viewed from above. Residues of a sealing material melted during laser stripping for stripping the light emitting element from a sapphire substrate are attached to at least a portion of the terminal portion.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是概略地表示实施方式的显示装置的构成的立体图。FIG. 1 is a perspective view schematically showing the configuration of a display device according to an embodiment.
图2是概略地表示实施方式的第1基板的构成的剖面图。FIG. 2 is a cross-sectional view schematically showing the structure of a first substrate according to the embodiment.
图3是概略地表示实施方式的第2基板的构成的剖面图。FIG. 3 is a cross-sectional view schematically showing the structure of the second substrate according to the embodiment.
图4是概略地表示实施方式的发光元件的安装工序的剖面图。FIG. 4 is a cross-sectional view schematically showing a step of mounting a light emitting element according to the embodiment.
图5是概略地表示接续图4的安装工序的剖面图。FIG. 5 is a cross-sectional view schematically showing an installation step subsequent to FIG. 4 .
图6是概略地表示接续图5的安装工序的剖面图。FIG. 6 is a cross-sectional view schematically showing an installation step subsequent to FIG. 5 .
图7是概略地表示接续图6的安装工序的剖面图。FIG. 7 is a cross-sectional view schematically showing an installation step subsequent to FIG. 6 .
图8是概略地表示图4~图7所示的一系列的安装工序的结果的剖面图。FIG. 8 is a cross-sectional view schematically showing the result of a series of mounting steps shown in FIG. 4 to FIG. 7 .
图9是概略地表示实施方式的发光元件的构成的剖面图。FIG. 9 is a cross-sectional view schematically showing the structure of a light emitting element according to an embodiment.
图10是概略地表示图4~图7所示的一系列的安装工序的结果的其他的剖面图。FIG. 10 is another cross-sectional view schematically showing the result of the series of mounting steps shown in FIGS. 4 to 7 .
图11是概略地表示实施方式的第2基板的构成的其他的剖面图。FIG. 11 is another cross-sectional view schematically showing the structure of the second substrate according to the embodiment.
具体实施方式Detailed ways
对于若干的实施方式,边参照附图边说明。Several embodiments will be described with reference to the drawings.
另外,公开只不过是一例,对于本领域技术人员关于保留发明的主旨的适当变更而能够容易想到的方案,当然包含在本发明的范围内。并且,附图为了使说明更加明确,有与实施方式相比示意性地表示的情况,但只不过是一例,并不限定本发明的解释。并且,在本说明书和各图中,对于与已出现的图有关而叙述过的构成要素发挥相同或类似的功能的构成要素,赋予相同的参照标记,有时省略重复的详细的说明。In addition, the disclosure is only an example, and solutions that can be easily thought of by those skilled in the art with appropriate changes that retain the main purpose of the invention are of course included in the scope of the present invention. In addition, in order to make the description clearer, the drawings are schematically shown compared with the embodiments, but they are only examples and do not limit the interpretation of the present invention. In addition, in this specification and each figure, the same reference numerals are given to the constituent elements that have the same or similar functions as the constituent elements described in relation to the figures that have appeared, and repeated detailed descriptions are sometimes omitted.
图1是概略地表示一实施方式的显示装置1的构成的立体图。图1示出了由第1方向X、与第1方向X垂直的第2方向Y、与第1方向X以及第2方向Y垂直的第3方向Z规定的三维空间。另外,第1方向X以及第2方向Y相互正交,但也可以以90度以外的角度交叉。本说明书中,将从与第3方向Z平行的方向观察显示装置1的情况称为俯视。FIG. 1 is a perspective view schematically showing the structure of a display device 1 according to an embodiment. FIG. 1 shows a three-dimensional space defined by a first direction X, a second direction Y perpendicular to the first direction X, and a third direction Z perpendicular to the first direction X and the second direction Y. In addition, the first direction X and the second direction Y are orthogonal to each other, but may intersect at an angle other than 90 degrees. In this specification, the state of viewing the display device 1 from a direction parallel to the third direction Z is referred to as a top view.
以下,主要说明在本实施方式中显示装置1是使用了作为自发光元件的微LED的微LED显示器的情况。Hereinafter, a case where the display device 1 is a micro LED display using micro LEDs as self-luminous elements in the present embodiment will be mainly described.
如图1所示,显示装置1具备显示面板2、第1电路基板3以及第2电路基板4等。As shown in FIG. 1 , a display device 1 includes a display panel 2 , a first circuit board 3 , a second circuit board 4 , and the like.
显示面板2在一例中是矩形状。在图示的例中,显示面板2的短边EX与第1方向X平行,显示面板2的长边EY与第2方向Y平行。第3方向Z相当于显示面板2的厚度方向。第1方向X也可以被解读为与显示装置1的短边平行的方向,第2方向Y也可以被解读为与显示装置1的长边平行的方向,第3方向Z也可以被解读为显示装置1的厚度方向。显示面板2的主面与由第1方向X和第2方向Y规定的X-Y平面平行。显示面板2具有显示区域DA(显示部)和该显示区域DA的外侧的非显示区域NDA(非显示部)。非显示区域NDA具有端子区域MT。在图示的例中,非显示区域NDA包围显示区域DA。The display panel 2 is rectangular in one example. In the illustrated example, the short side EX of the display panel 2 is parallel to the first direction X, and the long side EY of the display panel 2 is parallel to the second direction Y. The third direction Z is equivalent to the thickness direction of the display panel 2. The first direction X can also be interpreted as a direction parallel to the short side of the display device 1, the second direction Y can also be interpreted as a direction parallel to the long side of the display device 1, and the third direction Z can also be interpreted as the thickness direction of the display device 1. The main surface of the display panel 2 is parallel to the X-Y plane defined by the first direction X and the second direction Y. The display panel 2 has a display area DA (display portion) and a non-display area NDA (non-display portion) outside the display area DA. The non-display area NDA has a terminal area MT. In the illustrated example, the non-display area NDA surrounds the display area DA.
显示区域DA是显示图像的区域,具备被配置为例如矩阵状的多个像素PX。像素PX包含发光元件(微LED)以及用于驱动该发光元件的开关元件(驱动晶体管)等。The display area DA is an area for displaying an image, and includes a plurality of pixels PX arranged in a matrix, for example. The pixels PX include a light emitting element (micro LED) and a switching element (driving transistor) for driving the light emitting element.
端子区域MT沿着显示面板2的短边EX被设置,包含用于将显示面板2与外部装置等电连接的端子。The terminal region MT is provided along the short side EX of the display panel 2 , and includes terminals for electrically connecting the display panel 2 to an external device or the like.
第1电路基板3安装在端子区域MT之上,与显示面板2电连接。第1电路基板3是例如柔性印刷电路基板(Flexible Printed Circuit Board)。第1电路基板3具备驱动显示面板2的驱动IC芯片(以下记为面板驱动器)5等。另外,在图示的例中,面板驱动器5配置在第1电路基板3之上,但也可以配置在第1电路基板3之下。或者,面板驱动器5也可以安装在第1电路基板3以外。该情况下,面板驱动器5也可以安装在显示面板2的非显示区域NDA,也可以安装在第2电路基板4。第2电路基板4是例如硬性印刷电路基板。第2电路基板4在例如第1电路基板3的下方与该第1电路基板3连接。The first circuit substrate 3 is mounted on the terminal area MT and is electrically connected to the display panel 2. The first circuit substrate 3 is, for example, a flexible printed circuit board (Flexible Printed Circuit Board). The first circuit substrate 3 includes a driver IC chip (hereinafter referred to as a panel driver) 5 for driving the display panel 2, etc. In addition, in the example shown in the figure, the panel driver 5 is arranged on the first circuit substrate 3, but it can also be arranged under the first circuit substrate 3. Alternatively, the panel driver 5 can also be installed outside the first circuit substrate 3. In this case, the panel driver 5 can also be installed in the non-display area NDA of the display panel 2, and can also be installed in the second circuit substrate 4. The second circuit substrate 4 is, for example, a rigid printed circuit substrate. The second circuit substrate 4 is connected to the first circuit substrate 3, for example, below the first circuit substrate 3.
面板驱动器5经由例如第2电路基板4而与未图示的控制基板连接。面板驱动器5基于从例如控制基板输出的影像信号来驱动多个像素PX,从而执行在显示面板2显示图像的控制。The panel driver 5 is connected to a control substrate (not shown) via, for example, the second circuit substrate 4. The panel driver 5 drives a plurality of pixels PX based on, for example, a video signal output from the control substrate, thereby controlling the display panel 2 to display an image.
另外,显示面板2也可以具有附加斜线而表示的弯曲区域BA。弯曲区域BA是显示装置1被收纳于电子机器等的壳体时被弯曲的区域。弯曲区域BA位于非显示区域NDA中的端子区域MT侧。在弯曲区域BA被弯曲的状态下,第1电路基板3以及第2电路基板4以与显示面板2对置的方式配置。In addition, the display panel 2 may also have a curved area BA indicated by adding oblique lines. The curved area BA is an area that is curved when the display device 1 is housed in a housing of an electronic device or the like. The curved area BA is located on the terminal area MT side in the non-display area NDA. In a state where the curved area BA is curved, the first circuit substrate 3 and the second circuit substrate 4 are arranged to face the display panel 2.
以下,说明对上述的显示面板2安装发光元件的方法。更详细来说,说明通过激光剥离(LLO)将发光元件LED从图3所示的第2基板SUB2剥离并对图2所示的第1基板SUB1进行安装的方法。首先,参照图2以及图3,对供发光元件LED安装的第1基板SUB1和剥离用的第2基板SUB2的构成进行说明。The following describes a method for mounting a light emitting element on the display panel 2. More specifically, the following describes a method for mounting the light emitting element LED on the first substrate SUB1 shown in FIG2 by peeling off the light emitting element LED from the second substrate SUB2 shown in FIG3 by laser lift-off (LLO). First, referring to FIG2 and FIG3, the configuration of the first substrate SUB1 on which the light emitting element LED is mounted and the second substrate SUB2 for peeling off are described.
图2是概略地表示第1基板SUB1的构成的剖面图。FIG. 2 is a cross-sectional view schematically showing the structure of the first substrate SUB1.
如图2所示,第1基板SUB1具备阵列基板10、多个第1端子部11、接合部件12、多个第2端子部13和密封件14等。As shown in FIG. 2 , the first substrate SUB1 includes an array substrate 10 , a plurality of first terminal portions 11 , a bonding member 12 , a plurality of second terminal portions 13 , a sealing member 14 , and the like.
阵列基板10包含第1主面10A和位于第1主面10A的相反侧的第2主面10B。在图示的例中进行了省略,但在阵列基板10中形成有用于驱动发光元件LED的开关元件和各种布线图案。阵列基板10也可以称为背板。The array substrate 10 includes a first main surface 10A and a second main surface 10B located on the opposite side of the first main surface 10A. Although omitted in the illustrated example, switch elements and various wiring patterns for driving the light-emitting elements LED are formed in the array substrate 10. The array substrate 10 may also be called a backplane.
多个第1端子部11形成于阵列基板10的第1主面10A。第1端子部11例如与安装于显示装置1的发光元件LED以相同数量形成。第1端子部11由例如Al(铝)、Ti(钛)、Mo(钼)、W(钨)等金属材料以及这些金属材料的层叠体形成。第1端子部11也被称为第1焊盘或安装电极。各第1端子部11之上分别配置有接合部件12。A plurality of first terminal portions 11 are formed on the first main surface 10A of the array substrate 10. The first terminal portions 11 are formed, for example, in the same number as the light-emitting elements LED mounted on the display device 1. The first terminal portions 11 are formed of metal materials such as Al (aluminum), Ti (titanium), Mo (molybdenum), W (tungsten), and laminates of these metal materials. The first terminal portions 11 are also referred to as first pads or mounting electrodes. A bonding component 12 is disposed on each of the first terminal portions 11.
接合部件12是用于将第1端子部11与后述的发光元件LED的端子部22接合的部件。关于详细情况在后叙述,但接合部件12由若被照射400nm~3000nm的波段的激光光则通过激光消融而加热/溶融的金属材料形成,例如由Sn(锡)、Ag(银)等金属材料形成。接合部件12也可以被称为钎焊部件。并且,本实施方式中,接合部件12设于阵列基板10的第1端子部11,但也可以设于发光元件LED的端子部22。The joining component 12 is a component for joining the first terminal portion 11 to the terminal portion 22 of the light-emitting element LED described later. The details will be described later, but the joining component 12 is formed of a metal material that is heated/melted by laser ablation when irradiated with laser light in the wavelength band of 400nm to 3000nm, for example, it is formed of a metal material such as Sn (tin) and Ag (silver). The joining component 12 can also be called a soldering component. In addition, in the present embodiment, the joining component 12 is provided at the first terminal portion 11 of the array substrate 10, but can also be provided at the terminal portion 22 of the light-emitting element LED.
多个第2端子部13形成于阵列基板10的第1主面10A。第2端子部13形成于俯视时与第1端子部11不重叠的位置,例如以包围设于显示装置1的多个发光元件LED的方式形成。例如,第2端子部13形成于非显示区域NDA。第2端子部13具有宽度W1地形成。宽度W1被设定为例如0.1mm~0.5mm。第2端子部13不与形成于阵列基板10的各种布线图案等电连接。但是,第2端子部13也可以是,在非显示区域NDA中以包围多个发光元件LED的方式形成并与形成于阵列基板10的各种布线图案电连接的端子部。关于详细情况在后叙述,但第2端子部13由通过激光光而产生激光消融的金属材料形成,例如由Al(铝)等金属材料形成,所述激光光是为了从后述的蓝宝石基板20将发光元件LED剥离而被照射的。第2端子部13也可以被称为第2焊盘或金属部或金属布线等。在各第2端子部13之上以覆盖第2端子部13的方式分别配置有密封件14。A plurality of second terminal portions 13 are formed on the first main surface 10A of the array substrate 10. The second terminal portion 13 is formed at a position that does not overlap with the first terminal portion 11 when viewed from above, for example, in a manner that surrounds a plurality of light-emitting elements LED provided in the display device 1. For example, the second terminal portion 13 is formed in the non-display area NDA. The second terminal portion 13 is formed with a width W1. The width W1 is set to, for example, 0.1 mm to 0.5 mm. The second terminal portion 13 is not electrically connected to various wiring patterns formed on the array substrate 10. However, the second terminal portion 13 may also be a terminal portion that is formed in the non-display area NDA in a manner that surrounds a plurality of light-emitting elements LED and is electrically connected to various wiring patterns formed on the array substrate 10. The details will be described later, but the second terminal portion 13 is formed of a metal material that is laser ablated by laser light, for example, a metal material such as Al (aluminum), and the laser light is irradiated to peel off the light-emitting element LED from the sapphire substrate 20 described later. The second terminal portion 13 may also be referred to as a second pad, a metal portion, or a metal wiring, etc. The sealing members 14 are disposed on the second terminal portions 13 so as to cover the second terminal portions 13 .
密封件14是用于将第1基板SUB1和第2基板SUB2固接的部件。密封件14由使对第2端子部13照射的激光光透射的材料形成。The sealing member 14 is a member for fixing the first substrate SUB1 and the second substrate SUB2 together and is formed of a material that transmits the laser light irradiated to the second terminal portion 13 .
密封件14与第2端子部13也可以以包围例如第1基板SUB1的显示区域DA的整周的方式在非显示区域NDA中沿着2个短边EX以及2个长边而形成。并且,密封件14与第2端子部13也可以仅沿着第1基板SUB1的2个短边EX而形成,也可以仅沿着2个长边EY而形成。进而,密封件14与第2端子部13也可以形成为,在非显示区域中以点状配置多个,并将第1基板SUB1与第2基板SUB2固接。The seal 14 and the second terminal portion 13 may also be formed along two short sides EX and two long sides in the non-display area NDA in a manner that surrounds the entire circumference of the display area DA of the first substrate SUB1, for example. Furthermore, the seal 14 and the second terminal portion 13 may also be formed only along the two short sides EX of the first substrate SUB1, or may also be formed only along the two long sides EY. Furthermore, the seal 14 and the second terminal portion 13 may also be formed so that a plurality of them are arranged in a dotted manner in the non-display area, and the first substrate SUB1 and the second substrate SUB2 are fixedly connected.
图3是概略地表示第2基板SUB2的构成的剖面图。FIG3 is a cross-sectional view schematically showing the structure of the second substrate SUB2.
如图3所示,第2基板SUB2具备蓝宝石基板20和多个发光元件LED等。发光元件LED包括发光层21和端子部22。As shown in FIG3 , the second substrate SUB2 includes a sapphire substrate 20 and a plurality of light emitting elements LED, etc. The light emitting element LED includes a light emitting layer 21 and a terminal portion 22 .
剥离用的蓝宝石基板20包含第1主面20A和位于第1主面20A的相反侧的第2主面20B。多个发光元件LED配置于蓝宝石基板20的第1主面20A。多个发光元件LED中包括具有红色(R)、绿色(G)、蓝色(B)的发光色的发光元件LED。The sapphire substrate 20 for peeling includes a first main surface 20A and a second main surface 20B located on the opposite side of the first main surface 20A. A plurality of light-emitting elements LED are arranged on the first main surface 20A of the sapphire substrate 20. The plurality of light-emitting elements LED include light-emitting elements LED having luminous colors of red (R), green (G), and blue (B).
发光层21经由未图示的剥离层而固接于蓝宝石基板20的第1主面20A。发光层21释放R、G、B的光。在发光层21之上配置有端子部22。端子部22通过配置于第1基板SUB1侧的接合部件12而与第1端子部11接合。由此,发光元件LED的端子部22被与第1端子部11电连接。端子部22相当于发光元件LED的阳极端子或阴极端子。端子部22也可以称为凸块。The light-emitting layer 21 is fixed to the first main surface 20A of the sapphire substrate 20 via a peeling layer not shown. The light-emitting layer 21 releases R, G, and B light. A terminal portion 22 is arranged on the light-emitting layer 21. The terminal portion 22 is joined to the first terminal portion 11 through a joining component 12 arranged on the first substrate SUB1 side. Thus, the terminal portion 22 of the light-emitting element LED is electrically connected to the first terminal portion 11. The terminal portion 22 is equivalent to the anode terminal or cathode terminal of the light-emitting element LED. The terminal portion 22 can also be called a bump.
图4~图8是依次表示发光元件LED的安装工序的一例的概略性的剖面图。4 to 8 are schematic cross-sectional views sequentially showing an example of the mounting process of the light emitting element LED.
首先,执行对位工序(第1工序)。具体来说,如图4所示,以阵列基板10的第1主面10A与蓝宝石基板20的第1主面20A对置的方式,使在阵列基板10上配置有多个第1端子部11、接合部件12、多个第2端子部13以及密封件14的状态的第1基板SUB1与在蓝宝石基板20上配置有多个发光元件LED的状态的第2基板SUB2相对置。在此基础上,进行第1基板SUB1的多个第1端子部11与第2基板SUB2的多个发光元件LED的端子部22之间的对位。并且,第1基板SUB1与第2基板SUB2通过密封件14而被固接。First, an alignment process (first process) is performed. Specifically, as shown in FIG4 , the first substrate SUB1 in which a plurality of first terminal portions 11, a bonding component 12, a plurality of second terminal portions 13, and a sealing member 14 are arranged on the array substrate 10 is opposed to the second substrate SUB2 in which a plurality of light-emitting elements LED are arranged on the sapphire substrate 20 in such a manner that the first principal surface 10A of the array substrate 10 is opposed to the first principal surface 20A of the sapphire substrate 20. On this basis, the plurality of first terminal portions 11 of the first substrate SUB1 and the terminal portions 22 of the plurality of light-emitting elements LED of the second substrate SUB2 are aligned. Furthermore, the first substrate SUB1 and the second substrate SUB2 are fixedly connected by the sealing member 14.
另外,图4中,设想了在第2基板SUB2的蓝宝石基板20没有产生翘曲的情况,因此在此阶段中,第1基板SUB1的多个第1端子部11与第2基板SUB2的多个发光元件LED的端子部22在俯视时重叠,但也可以是在此阶段中第1基板SUB1的多个第1端子部11与第2基板SUB2的多个发光元件LED的端子部22在俯视时不重叠。在此阶段中,在后述的固定工序结束了的阶段中,进行用于使第1基板SUB1的多个第1端子部11与第2基板SUB2的多个发光元件LED的端子部22在俯视时重叠的对位。In addition, FIG. 4 assumes that the sapphire substrate 20 of the second substrate SUB2 does not warp, so at this stage, the plurality of first terminal portions 11 of the first substrate SUB1 overlap with the terminal portions 22 of the plurality of light-emitting elements LED of the second substrate SUB2 when viewed from above, but it is also possible that the plurality of first terminal portions 11 of the first substrate SUB1 and the terminal portions 22 of the plurality of light-emitting elements LED of the second substrate SUB2 do not overlap when viewed from above. At this stage, in the stage after the fixing process described later is completed, alignment is performed to make the plurality of first terminal portions 11 of the first substrate SUB1 overlap with the terminal portions 22 of the plurality of light-emitting elements LED of the second substrate SUB2 when viewed from above.
接着,执行固定工序(第2工序)。具体来说,如图5所示,在第1基板SUB1的阵列基板10的第2主面10B侧依次配置缓冲件30和固定部件40,在第2基板SUB2的蓝宝石基板20的第2主面20B侧配置固定部件50。在此基础上,以夹着第1基板SUB1和第2基板SUB2的方式从上下施加压力(即,将各固定部件40以及50相互向反方向按压来施加压力),来执行蓝宝石基板20上产生的翘曲的平坦化。由此,第1基板SUB1与第2基板SUB2以如下的状态被固定:蓝宝石基板20上产生的翘曲被平坦化的状态、且是第1基板SUB1的多个第1端子部11与第2基板SUB2的多个发光元件LED的端子部22在俯视时重叠着的状态。并且,在固定工序中,第1基板SUB1与第2基板SUB2之间的间距由密封件14、发光元件LED保持,但也可以通过在第1基板SUB1或第2基板SUB2上设置间隔件(未图示),从而保持第1基板SUB1与第2基板SUB2之间的间距。Next, a fixing process (second process) is performed. Specifically, as shown in FIG. 5 , a buffer 30 and a fixing component 40 are sequentially arranged on the second main surface 10B side of the array substrate 10 of the first substrate SUB1, and a fixing component 50 is arranged on the second main surface 20B side of the sapphire substrate 20 of the second substrate SUB2. On this basis, the warping generated on the sapphire substrate 20 is flattened by applying pressure from the top and bottom in a manner of clamping the first substrate SUB1 and the second substrate SUB2 (that is, each fixing component 40 and 50 is pressed in opposite directions to each other). As a result, the first substrate SUB1 and the second substrate SUB2 are fixed in a state in which the warping generated on the sapphire substrate 20 is flattened and the plurality of first terminal portions 11 of the first substrate SUB1 and the terminal portions 22 of the plurality of light-emitting elements LED of the second substrate SUB2 overlap when viewed from above. Furthermore, during the fixing process, the distance between the first substrate SUB1 and the second substrate SUB2 is maintained by the seal 14 and the light-emitting element LED, but the distance between the first substrate SUB1 and the second substrate SUB2 can also be maintained by providing a spacer (not shown) on the first substrate SUB1 or the second substrate SUB2.
固定部件50由在后述的接合工序中使照射的激光光透射并且具有在施加了压力时不会弯折的程度的刚性的材料形成,例如由石英玻璃形成。固定部件40由具有在施加了压力时不会弯折的程度的刚性的材料形成,例如可以与固定部件50同样地由石英玻璃形成,也可以由与固定部件50不同的材料形成。The fixing member 50 is formed of a material that transmits the irradiated laser light in the bonding process described later and has a rigidity to the extent that it does not bend when pressure is applied, for example, it is formed of quartz glass. The fixing member 40 is formed of a material that has a rigidity to the extent that it does not bend when pressure is applied, for example, it can be formed of quartz glass like the fixing member 50, or it can be formed of a material different from the fixing member 50.
如上述那样,通过在第1基板SUB1与固定部件40之间配置缓冲件30,从而抑制由用于夹着第1基板SUB1与第2基板SUB2的压力引起的阵列基板10的破损。并且,第1基板SUB1与第2基板SUB2通过密封件14而被固接,因此能够抑制施加了压力时一个基板打滑等而可能发生的位置偏移。As described above, the buffer member 30 is disposed between the first substrate SUB1 and the fixing member 40, thereby suppressing damage to the array substrate 10 caused by the pressure for clamping the first substrate SUB1 and the second substrate SUB2. In addition, the first substrate SUB1 and the second substrate SUB2 are fixedly connected by the sealing member 14, so that the positional deviation that may occur due to the slippage of one substrate when pressure is applied can be suppressed.
接着,执行接合工序(第3工序)。具体来说,如图6所示,通过将400nm~3000nm的波段的激光光LZ1从固定部件50侧朝向接合部件12照射,并通过激光消融使接合部件12加热/溶融,从而第1基板SUB1的多个第1端子部11与第2基板SUB2的多个发光元件LED的端子部22被接合。在该接合工序结束了的阶段,缓冲件30、固定部件40以及固定部件50可以被除去,也可以在该阶段中不除去。本实施方式中,假想了使结束了接合工序的状态的第1基板SUB1以及第2基板SUB2移动到工作台、并在此基础上执行接下来的工序的情况,因此缓冲件30、固定部件40以及固定部件50在结束了接合工序的阶段中被除去。Next, the bonding process (third process) is performed. Specifically, as shown in FIG. 6, by irradiating the bonding component 12 with laser light LZ1 in the wavelength band of 400nm to 3000nm from the fixing component 50 side, and heating/melting the bonding component 12 by laser ablation, the plurality of first terminal portions 11 of the first substrate SUB1 and the terminal portions 22 of the plurality of light-emitting elements LED of the second substrate SUB2 are bonded. At the stage where the bonding process is completed, the buffer 30, the fixing component 40, and the fixing component 50 may or may not be removed at this stage. In the present embodiment, it is assumed that the first substrate SUB1 and the second substrate SUB2 in the state where the bonding process is completed are moved to the workbench and the next process is performed on this basis, so the buffer 30, the fixing component 40, and the fixing component 50 are removed at the stage where the bonding process is completed.
之后,执行LLO工序(第4工序)。具体来说,如图7所示,200nm~366nm的波段的激光光LZ2被从蓝宝石基板20侧朝向多个发光元件LED以及多个第2端子部13照射。由此,将多个发光元件LED固接于蓝宝石基板20的未图示的剥离层通过激光消融而升华,多个发光元件LED被从蓝宝石基板20剥离。并且,若多个第2端子部13通过激光消融而被加热,则该热分别传导到覆盖各第2端子部13的密封件14,密封件14熔融而被除去。After that, the LLO process (the fourth process) is performed. Specifically, as shown in FIG7 , the laser light LZ2 in the wavelength band of 200 nm to 366 nm is irradiated from the sapphire substrate 20 side toward the plurality of light-emitting elements LED and the plurality of second terminal portions 13. Thus, the peeling layer (not shown) that fixes the plurality of light-emitting elements LED to the sapphire substrate 20 is sublimated by laser ablation, and the plurality of light-emitting elements LED are peeled off from the sapphire substrate 20. Furthermore, if the plurality of second terminal portions 13 are heated by laser ablation, the heat is respectively conducted to the sealant 14 covering each second terminal portion 13, and the sealant 14 is melted and removed.
通过执行图4~图7所示的一系列的安装工序,蓝宝石基板20被剥离,如图8所示,多个发光元件LED被安装于第1基板SUB1(阵列基板10)上。By performing a series of mounting steps shown in FIG. 4 to FIG. 7 , the sapphire substrate 20 is peeled off, and as shown in FIG. 8 , a plurality of light emitting elements LED are mounted on the first substrate SUB1 (array substrate 10 ).
从以上说明的一系列的安装工序可知,第2端子部13为了通过激光消融将密封件14熔融而形成,所述密封件14是在上述的固定工序中为了抑制对第1基板SUB1与第2基板SUB2施加了压力时一个基板打滑等而可能发生的位置偏移而被配置的。因此,在一系列的安装工序结束以后,第2端子部13基本上对于显示面板2而言成为不需要的构成,但是例如也可以对于阵列基板10,作为安装第1电路基板3、第2电路基板4、面板驱动器5时的用于对位的对准标记而在一系列的安装工序之后也被利用。As can be seen from the series of installation steps described above, the second terminal portion 13 is formed in order to melt the seal 14 by laser ablation, and the seal 14 is arranged in the above-mentioned fixing process in order to suppress the positional deviation that may occur when pressure is applied to the first substrate SUB1 and the second substrate SUB2, such as one substrate slipping. Therefore, after the series of installation steps are completed, the second terminal portion 13 basically becomes an unnecessary structure for the display panel 2, but it can also be used as an alignment mark for alignment when installing the first circuit substrate 3, the second circuit substrate 4, and the panel driver 5 for the array substrate 10 after the series of installation steps.
本实施方式的发光元件LED可以是如图9的(A)所示在发光层21的一个面并列地配置有阳极端子22AN和阴极端子22CA的微LED,也可以是如图9的(B)所示在发光层21的一个面配置阳极端子22AN、在发光层21的另一个面配置阴极端子CA的微LED。在发光元件LED是图9的(A)所示的方式的微LED的情况下,第1端子部11不是与发光元件LED相同数量、而是与阳极端子22AN和阴极端子22CA相同数量地形成于阵列基板10上。另外,关于与一个发光元件LED对应的第1端子部11,与阳极端子22AN接合的第1端子部11和与阴极端子22CA接合的第1端子部11形成为以规定的间隔分离。无论发光元件LED是图9的(A)所示的方式的微LED还是图9的(B)所示的形态的微LED,通过上述的一系列的安装工序,都能够安装于第1基板SUB1(阵列基板10)上。The light-emitting element LED of this embodiment may be a micro-LED in which an anode terminal 22AN and a cathode terminal 22CA are arranged in parallel on one surface of the light-emitting layer 21 as shown in FIG. 9 (A), or may be a micro-LED in which an anode terminal 22AN is arranged on one surface of the light-emitting layer 21 and a cathode terminal CA is arranged on the other surface of the light-emitting layer 21 as shown in FIG. 9 (B). In the case where the light-emitting element LED is a micro-LED in the manner shown in FIG. 9 (A), the first terminal portions 11 are formed on the array substrate 10 in the same number as the anode terminals 22AN and the cathode terminals 22CA, not the same number as the light-emitting element LEDs. In addition, with respect to the first terminal portions 11 corresponding to one light-emitting element LED, the first terminal portion 11 joined to the anode terminal 22AN and the first terminal portion 11 joined to the cathode terminal 22CA are formed to be separated by a predetermined interval. Regardless of whether the light-emitting element LED is a micro-LED in the manner shown in FIG. 9 (A) or a micro-LED in the form shown in FIG. 9 (B), it can be mounted on the first substrate SUB1 (array substrate 10) through the above-mentioned series of mounting steps.
图8中,例示了以覆盖多个第2端子部13的方式配置的密封件14通过上述的LLO工序而被完全地除去的情况,但是实际上密封件14不被完全地融尽,可以预想如图10的(A)所示,一部分作为残渣而附着残留在第2端子部13上。但是,由于如上述那样在一系列的安装工序结束之后,第2端子部13基本上是对于显示面板2而言不需要的构成,因此即使密封件14的一部分作为残渣而附着残留在第2端子部13上,也没有特别的问题。并且,第2端子部13例如被配置在非显示区域NDA,因此从显示质量的观点等来看,密封件14的一部分作为残渣而附着残留在第2端子部13上,也没有特别的问题。但是,也可以如图10的(B)所示将第2端子部13与作为残渣附着的密封件14一起切除。FIG8 illustrates a case where the seal 14 arranged in a manner covering a plurality of second terminal portions 13 is completely removed by the above-mentioned LLO process, but in reality the seal 14 is not completely melted, and it can be expected that a portion of it remains attached to the second terminal portion 13 as a residue as shown in FIG10 (A). However, since the second terminal portion 13 is basically an unnecessary structure for the display panel 2 after a series of installation processes are completed as described above, there is no particular problem even if a portion of the seal 14 remains attached to the second terminal portion 13 as a residue. Furthermore, the second terminal portion 13 is arranged in the non-display area NDA, for example, so from the perspective of display quality, etc., there is no particular problem if a portion of the seal 14 remains attached to the second terminal portion 13 as a residue. However, the second terminal portion 13 may be removed together with the seal 14 attached as a residue as shown in FIG10 (B).
本实施方式中假想了第2端子部13形成于阵列基板10上的情况,但不限定于此,也可以例如如图11所示第2端子部13形成于蓝宝石基板20上。该情况下也通过上述的一系列的安装工序而能够在第1基板SUB1(阵列基板10)上安装发光元件LED,并且在LLO工序的阶段中,第2端子部13通过激光消融而被加热,因此也能够将以覆盖该第2端子部13的方式配置的密封件14除去。In this embodiment, it is assumed that the second terminal portion 13 is formed on the array substrate 10, but the present invention is not limited thereto, and the second terminal portion 13 may be formed on the sapphire substrate 20, for example, as shown in FIG11. In this case, the light emitting element LED can be mounted on the first substrate SUB1 (array substrate 10) through the above-mentioned series of mounting steps, and in the LLO process, the second terminal portion 13 is heated by laser ablation, so the sealing member 14 arranged in a manner to cover the second terminal portion 13 can also be removed.
在以上说明的一实施方式中,以夹着安装有发光元件LED的第1基板SUB1和剥离用的第2基板SUB2的方式施加压力而将第1基板SUB1和第2基板SUB2固定。因此,即使在第2基板SUB2(蓝宝石基板20)上产生了翘曲,也能将该翘曲平坦化,并使第1基板SUB1与第2基板SUB2无间隙地固定。并且,在第1基板SUB1上抵接着缓冲件30的基础上被施加压力,因此能抑制起因于该压力而导致的第1基板SUB1的阵列基板10的破损。In one embodiment described above, the first substrate SUB1 and the second substrate SUB2 are fixed by applying pressure in a manner of clamping the first substrate SUB1 on which the light-emitting element LED is mounted and the second substrate SUB2 for peeling. Therefore, even if warping occurs on the second substrate SUB2 (sapphire substrate 20), the warping can be flattened and the first substrate SUB1 and the second substrate SUB2 can be fixed without a gap. In addition, pressure is applied to the first substrate SUB1 on the basis of the buffer member 30 abutting against it, so that damage to the array substrate 10 of the first substrate SUB1 caused by the pressure can be suppressed.
并且,在以上说明的一实施方式中,在通过密封件14而将安装有发光元件LED的第1基板SUB1与剥离用的第2基板SUB2固接的基础上,以夹着第1基板SUB1与第2基板SUB2的方式施加压力,因此能够抑制施加了压力时一个基板打滑等而可能发生的位置偏移。进而,通过形成被密封件14覆盖且通过在LLO工序时所照射的激光光LZ2而产生激光消融的第2端子部13,能够在将发光元件LED从第2基板SUB2剥离的LLO工序时将密封件14除去。换言之,能够不增加仅仅为了除去密封件14的单独的工序地实现该密封件14的除去。Furthermore, in the embodiment described above, after the first substrate SUB1 on which the light-emitting element LED is mounted is fixedly connected to the second substrate SUB2 for peeling by the sealant 14, pressure is applied in a manner of sandwiching the first substrate SUB1 and the second substrate SUB2, thereby suppressing positional deviation that may occur due to slipping of one substrate when pressure is applied. Furthermore, by forming the second terminal portion 13 covered by the sealant 14 and laser ablated by the laser light LZ2 irradiated during the LLO process, the sealant 14 can be removed during the LLO process of peeling the light-emitting element LED from the second substrate SUB2. In other words, the removal of the sealant 14 can be achieved without adding a separate process just for removing the sealant 14.
根据以上说明的一实施方式,能够提供一种利用了激光剥离的微LED的安装方法以及微LED显示器(发光元件的安装方法以及显示装置)。According to one embodiment described above, it is possible to provide a micro LED mounting method and a micro LED display (a light emitting element mounting method and a display device) using laser lift-off.
说明了本发明的若干实施方式,但这些实施方式是作为例子提示的,不意图限定发明的范围。这些新的实施方式能够在其他的各种各种的方式下实施,能够在不脱离发明的主旨的范围内进行各种的省略、替换、变更。这些实施方式及其变形包含在发明的范围及主旨中,并且包含在权利要求书所记载的发明及其等价的范围中。Several embodiments of the present invention have been described, but these embodiments are presented as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and can be omitted, replaced, and changed in various ways without departing from the scope of the invention. These embodiments and their variations are included in the scope and purpose of the invention, and are included in the invention described in the claims and the scope of their equivalents.
附图标记说明Description of Reference Numerals
SUB1…第1基板,10…阵列基板,11…第1端子部,12…接合部件,13…第2端子部,14…密封件,SUB2…第2基板,20…蓝宝石基板,LED…发光元件,21…发光层,22…端子部,LZ1,LZ2…激光光。SUB1…1st substrate, 10…array substrate, 11…1st terminal portion, 12…joining component, 13…2nd terminal portion, 14…sealing member, SUB2…2nd substrate, 20…sapphire substrate, LED…light emitting element, 21…light emitting layer, 22…terminal portion, LZ1, LZ2…laser light.
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