CN113492602B - Alignment device, inkjet printing system including the same, and alignment method using the same - Google Patents

Abstract

The invention discloses an alignment device, an inkjet printing system including the same, and an alignment method using the same. An alignment apparatus according to an embodiment of the present invention includes: a first camera module supporting a substrate and mounted above a stage unit capable of photographing, wherein the stage unit is capable of transporting the substrate in a first direction; a second camera module mounted on a head unit having a head portion formed with a nozzle, the head portion being supported by a head bridge and being movable in a second direction orthogonal to the first direction, the nozzle ejecting ink onto the substrate, so as to face the stage unit and be capable of shooting downward; wherein the first camera module and the second camera module are coaxial to provide a pair of alignment marks.

Description

Alignment device and inkjet printing system comprising the same, alignment method using the same

technical field

The present invention relates to an alignment device and an inkjet printing system including the same, an alignment method using the same, and more specifically, to an alignment device that can adjust the position of the substrate before the substrate process and an inkjet printing system including the same, using the same Alignment method for this.

Background technique

Display devices are divided into liquid crystal display (LCD, liquid crystal display), organic light emitting display (OLED, organic light emitting diode display), plasma display (PDP, plasma display panel) and micro-luminescence display (Micro- LED), etc.

A display device is composed of mutually different substrates, and many manufacturing processes are performed in order to manufacture the display device. In order to form a predetermined pattern of electrodes or the like on a substrate or to form an organic light-emitting element constituting a pixel, ink droplets are ejected to form a pattern by an inkjet printing system.

When forming a pattern by inkjet printing, it is very important to spray ink droplets onto the substrate at an accurate position by the inkjet printing system. For this reason, the inkjet printing system is assembled using precise units such as needles and positioners in order to set each member constituting each inkjet printing system at an accurate position.

In the past, alignment was performed in the following order: the position of the substrate was photographed by the substrate vision camera mounted on the head bridge, ink droplets were ejected after alignment, and then the ink droplets carbonized on the substrate were measured again with the vision camera to adjust the alignment deviation ( alignoffset) or the head set position on the head bridge. This alignment process has the problem that frequent fine-tuning is required and alignment is achieved only through several repeated measurements.

In addition, conventionally, when an alignment process is used, when an inkjet printing system replaces parts with a predetermined service life, the same alignment process needs to be repeatedly performed, so there is a problem of doubling the manufacturing process time.

Contents of the invention

(problem to solve)

A technical subject to be solved by the present invention relates to an alignment device, an inkjet printing system including the same, and an alignment method using the same to accurately align the platform, the substrate, and the nozzles, so that the carbonization of the ink ejected from the nozzles on the substrate is accurate. s position.

(a means of solving a problem)

In order to solve the above technical problems, the present invention provides an alignment device.

An alignment device according to an embodiment of the present invention includes: a first camera module, supporting a substrate, and mounted on a platform unit capable of photographing the substrate, wherein the platform unit can transport the substrate in a first direction; a second camera module, carrying For the head unit, it can be photographed downward by facing each other with the platform unit, wherein the head unit has a head formed with a nozzle, the head is supported by a head bridge, and can be aligned with the first direction Moving in a second perpendicular direction, the nozzles spray ink onto the substrate; wherein, the coaxialization of the first camera module and the second camera module can provide a pair of alignment marks.

According to an embodiment, the first camera module may include: a first camera; and a linear moving component, which enables the first camera to perform linear reciprocating motion in the second direction.

According to an embodiment, the head unit may include: a main hinge shaft supporting one end of the head bridge and being a rotation center of the head bridge; and a sub hinge shaft supporting the other end of the head bridge , and the hinge is combined with the head bridge, so that the head bridge can rotate around the main hinge axis.

According to an embodiment, it may further include a linear moving part and a rotating part, the linear moving part makes the secondary hinge shaft move linearly in the second direction, and the rotating part makes the secondary hinge shaft move in the main direction. The hinge axis is the center of rotation for rotational movement.

In order to solve the above technical problems, the present invention provides an inkjet printing system.

An inkjet printing system according to an embodiment of the present invention includes: a platform unit supporting a substrate and capable of transporting the substrate in a first direction; a head unit supported by a head bridge capable of transporting the substrate in a first direction perpendicular to the first direction moving in two directions, and having a head formed with nozzles that eject ink onto the substrate; and an alignment device that generates alignment datums and moves the stage unit and the head bridge to be aligned with The substrates are aligned. Wherein, the head unit includes: a main hinge shaft that supports one end of the head bridge and is the center of rotation of the head bridge; and a secondary hinge shaft that supports the other end of the head bridge and is hinged to The head bridge, and thus the head bridge can rotate around the main hinge axis. Wherein, the alignment device includes: a first camera module, which is mounted on the platform unit and can shoot above; a second camera module, which is mounted on the head unit, to face each other with the platform unit and shoot downward; A quasi-module having a linear moving part for linearly moving the secondary hinge axis in the second direction and a rotating part for centering the secondary hinge axis on the primary hinge axis Make a swivel motion. Wherein, the coaxialization of the first camera module and the second camera module can provide a pair of alignment marks.

In order to solve the above technical problems, the present invention provides an alignment method.

An alignment method according to an embodiment of the present invention, according to an embodiment, includes an alignment step before ejecting ink onto the substrate while the head is moving in the second direction, and adjusting the head after the alignment step calculates alignment information. position, and adjust the alignment accordingly. Wherein, the alignment step includes: an alignment information calculation step, aligning the first camera module on the substrate to calculate substrate alignment information; and an alignment adjustment step, using the first camera module to scan the nozzle of the head, and then The position of the head is adjusted through the linear moving part and the rotating part according to the calculation information of the alignment information.

According to an embodiment, in the step of calculating the alignment information, the first camera module mounted on the platform and the second camera module mounted on the head are positioned on the same axis.

(effect of invention)

According to an embodiment of the present invention, the alignment unit aligns the platform, the substrate, and the nozzle in the first direction and the second direction, thereby improving the consistency of the position of carbonized ink on the substrate.

According to an embodiment of the present invention, mounting the first camera module on the platform unit can adjust the alignment position based on the nozzle, thus having the advantage of improving alignment accuracy.

According to another embodiment of the present invention, the first camera module and the second camera module are coaxial, and the positions can be aligned, and the first camera module and the second camera module are flexibly used as alignment marks, thereby simplifying components and improving The advantage of alignment accuracy.

According to another embodiment of the present invention, the adjustment accuracy is improved through the first camera module, the linear moving part, and the rotating part, thereby having the advantage of accurately realizing the perpendicularity of the substrate to the drive shaft and the balance of the substrate to the nozzle.

According to another embodiment of the present invention, the first camera module is used as a reference to align the platform, the substrate, and the nozzle, so the consistency of the overall position of the inkjet printing system including the alignment device is not required, and even when the inkjet printing system is driven When the position shifts due to vibration, wear, etc., it is only necessary to realign the platform, substrate, and nozzle with the first camera module as a reference, so it has the advantage of easy alignment.

Description of drawings

FIG. 1 is a diagram showing an inkjet printing system according to an embodiment of the present invention.

FIG. 2 is a diagram schematically showing an alignment operation state of a stage and a substrate according to an embodiment of the present invention.

(a) of FIG. 3 is a diagram showing a second camera module according to an embodiment of the present invention; (b) of FIG. 3 is a diagram showing a platform and a first camera module placed below (a) of FIG. 3 .

FIG. 4 is a perspective view illustrating a platform and a first camera module of (b) of FIG. 3 .

5 is a diagram schematically showing an alignment operation state of a head unit according to an embodiment of the present invention.

FIG. 6( a ) and FIG. 6( b ) are diagrams showing the head and the nozzle in FIG. 5 .

Fig. 7 is a diagram showing a head unit according to an embodiment of the present invention.

FIG. 8 is a diagram illustrating a main hinge axis and a sub hinge axis in FIG. 7 .

FIG. 9( a ) or FIG. 9( b ) is a diagram schematically showing before and after the operation of the head unit according to one embodiment of the present invention.

FIG. 10( a ) to FIG. 10( c ) are diagrams schematically showing the alignment operation state of the head unit according to one embodiment of the present invention.

FIG. 11 is a flowchart illustrating an alignment method according to an embodiment of the present invention.

FIG. 12 is a flowchart illustrating an alignment method according to an embodiment of the present invention.

(Description of Reference Signs)

10: Inkjet printing system

100: platform unit

110: Platform

120: drive shaft

200: head unit

210: Head Bridge

220: head

221: nozzle

230: main hinge axis

240: Auxiliary hinge shaft

300: alignment device

310, 320: the first camera module

330: Second camera module

340: Linear moving parts

350: rotating parts

S: Substrate

Area 1: Substrate alignment area

Area 2: inkjet area

Detailed ways

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical idea of the present invention is not limited to the embodiments described here, but may be refined into other forms. Rather, the embodiments described herein are provided so that the disclosure will be thorough and complete and fully convey the concept of the invention to those of ordinary skill.

In this specification, when it is mentioned that a certain member is located on another member, it means that it may be directly formed on the other member or a third member may also be interposed therebetween. In addition, in the drawings, shapes and dimensions are exaggerated to effectively explain technical contents.

In addition, in various embodiments of the present specification, terms such as first, second, and third are used to describe various components, and such terms should not be used to limit these components. These terms are used only to distinguish one element from another. Accordingly, what is referred to as a first component in one embodiment may also be referred to as a second component in another embodiment. Here, various embodiments described and illustrated also include complementary embodiments. In addition, in this specification, "and/or" is used in the meaning of including at least one of the members arranged in front and back.

In the specification, expressions in the singular include expressions in the plural unless there is a different meaning in the text. In addition, terms such as "comprising" or "having" are intended to designate the existence of features, numbers, steps, members or combinations thereof described in the specification, and shall not be interpreted as excluding one or more other features, numbers, steps, or members. Either the existence of these combinations or the possibility of addition. In addition, in this specification, "connection" is used in the meaning which includes all of indirect connection and direct connection of some members.

In addition, in the following description of the present invention, if it is judged that the specific description of related conventional functions or structures may make the gist of the present invention unclear, the detailed description will be omitted.

Fig. 1 is a diagram showing an inkjet printing system 10 according to an embodiment of the present invention; Fig. 2 is a diagram illustrating the alignment operation state of a platform 110 and a substrate S according to an embodiment of the present invention; Fig. 3 (a) is a diagram showing a second camera module 330 according to an embodiment of the present invention; FIG. 3 (b) shows a platform 110 and a first camera module 310 placed below (a) of FIG. , 320; FIG. 4 is a perspective view showing the platform 110 and the first camera module 310, 320 of FIG. 3 (b); FIG. Figure 6 (a) and Figure 6 (b) is a figure showing the head 220 and nozzle 221 in Figure 5; Figure 7 is a head showing an embodiment of the present invention The figure of unit 200; Fig. 8 is the figure showing main hinge axis 230 and secondary hinge axis 240 in Fig. 7; Fig. 9 (a) or Fig. 9 (b) is the head unit of an embodiment of the present invention Fig. 10(a) to Fig. 10(c) are diagrams graphically showing the alignment operation state of the head unit 200 according to an embodiment of the present invention. .

The first direction refers to the X-axis direction on the XYZ rectangular coordinate system. The second direction refers to a direction perpendicular to the first direction, and may specifically refer to the Y-axis direction.

Hereinafter, the alignment device 300 according to an embodiment of the present invention and each member constituting the inkjet printing system 10 including the same will be described in detail.

As shown in (c) of FIG. 1 to FIG. 10 , an inkjet printing system 10 according to an embodiment of the present invention may include a platform unit 100 , a head unit 200 , and an alignment device 300 . The inkjet printing system 10 can be divided into a substrate alignment area (Area 1 ) and an inkjet area (Area 2 ).

Referring back to FIGS. 1 to 5 , a platform unit 100 according to an embodiment of the present invention supports a substrate S and can transport the substrate S in a first direction.

The platform unit 100 may include a platform 110 and a drive shaft 120 .

The platform 110 can place the substrate S. As shown in FIG. In more detail, a chuck is placed on the platform 110, and the substrate S can be supported and fixed by the chuck through vacuum suction or electrostatic force.

The drive shaft 120 may provide a path of movement for the platform transport. The driving shaft 120 may be arranged side by side in the first direction. The platform transporter can move the platform 110 in a first direction along the drive shaft 120 . The drive shaft 120 can move the stage 110 to the substrate alignment area (Area 1 ) and the ink ejection area (Area 2 ).

The driving shaft 120 may have a gantry structure.

The substrate S is placed on the platform 110 and can move along the driving shaft 120 . The substrate S may be one of a display panel such as LCD and OLED, a PDP panel, a touch panel, a window panel, or may be a panel composed of multiple layers combining these panels in layers. In addition, the substrate S may include not only a rigid panel but also a flexible panel of a flexible material capable of bending, folding, or rolling.

Referring back to FIG. 1 and FIG. 5 to FIG. 10 (c), the head unit 200 according to an embodiment of the present invention ejects ink droplets to form a pattern with a predetermined thickness and shape at any position on the substrate S. The head unit 200 can be arranged in the ink ejection area (Area 2). The head unit 200 may be disposed above the platform unit 100 . The head unit 200 includes a head bridge 210 and a head 220 , and may further include a main hinge shaft 230 and a sub hinge shaft 240 .

As shown in FIGS. 1 and 2 , the head bridge 210 may support the head 220 . The head bridge 210 can move the head 220 in a second direction. According to an embodiment, the head bridge 210 may be a stone plate.

As shown in FIGS. 1 and 2 , the head 220 is movable in the second direction while being supported by the head bridge 210 . That is, the head 220 can move in a direction perpendicular to the drive shaft 120 . The head 220 may include a linear motor and an LM guide.

A linear motor may provide the driving force for moving the head 220 . The LM guide can perform linear reciprocating motion along the LM rail. The LM rail can be arranged in the second direction. The head 220 can be mounted on one end of the LM guide. Thus, the substrate S moves in the first direction along the driving shaft 120 , and the head 220 can move in the second direction along the head bridge 210 .

As shown in (b) of FIG. 6 , the head 220 may form a plurality of nozzles 221 . A plurality of nozzles 221 may be spaced at a predetermined distance in the second direction and may be formed side by side under the head 220 . The nozzles 221 eject ink droplets to carbonize the ink droplets on the substrate S. As shown in FIG.

As shown in (c) of FIG. 7 to FIG. 10 , the main hinge axis 230 and the secondary hinge axis 240 are arranged as a pair, and the positional deviation of the nozzle 221 including the head bridge 210 can be corrected. The main hinge shaft 230 and the sub hinge shaft 240 may support both side ends of the head bridge 210 . The head bridge 210 may be combined and supported at both ends of the driving shaft 120 through a main hinge shaft 230 and a sub hinge shaft 240 .

The main hinge shaft 230 may support one end of the head bridge 210 . The main hinge axis 230 can be hingedly combined to provide the main hinge axis 230 with the center of rotation of the head bridge 210 . The main hinge shaft 230 may include a rotating part 231 . The rotating member 231 of one embodiment may be a cross roller collar.

The secondary hinge axis 240 corresponds to the main hinge axis 230 and can support the other end of the head bridge 210 . The auxiliary hinge shaft 240 can be hingedly combined with the head bridge 210 so that the head bridge 210 can rotate around the main hinge shaft 230 . That is, the main hinge shaft 230 is fixed at a fixed position for rotational movement, and the secondary hinge shaft 240 guides the position movement of the head bridge 210 and can be hingedly combined with the head bridge 210 to enable the head bridge 210 to perform linear motion and rotational motion.

Referring back to FIGS. 1 to 5 , the alignment device 300 of an embodiment of the present invention measures the positions of the platform 110 and the substrate S and the head 220 to generate an alignment reference, and makes the platform 110 and the substrate S, the head bridge 210 , and the main hinge The movement of the axis 230 and the secondary hinge axis 240 can improve the perpendicularity of the substrate S with respect to the drive axis and the balance of the substrate S with respect to the nozzle 221 . That is, the alignment device 300 uses the first camera modules 310, 320 and the second camera module 330 to calculate alignment information, and aligns by correcting the positions of the various structures through the linear moving part and the rotating part.

The alignment device 300 is a plurality of cameras constituting the first camera modules 310 , 320 and the second camera module 330 to be described later, which can selectively or simultaneously photograph the nozzle 221 and the substrate S. The alignment device 300 uses a plurality of cameras as alignment marks, and achieves consistency of alignment positions through alignment position deviations, thereby minimizing process defects.

The alignment device 300 includes first camera modules 310 , 320 and a second camera module 330 , and may further include a linear moving part 340 and a rotating part 350 . The first camera modules 310 and 320 can move to face the second camera module 330 . The first camera module 310 , 320 photographs the second camera module 330 , and the second camera module 330 can photograph the first camera module 310 , 320 .

Referring to (b) of FIG. 5 to FIG. 6 , the first camera modules 310 and 320 can move toward the substrate alignment area (Area 1 ) and the ink ejection area (Area 2 ) while facing upward. The first camera modules 310 , 320 may provide a reference position for aligning the second camera module 330 with the platform 110 , the substrate S, and the nozzle 221 .

The first camera modules 310 , 320 are mounted on the platform unit 100 , generate nozzle shot images of the nozzles 221 formed on the head 220 , and can provide alignment marks. In addition, the first camera modules 310, 320 and the second camera module 330 to be described later are coaxial in the vertical direction, thereby providing a pair of alignment marks.

The first camera modules 310 and 320 can be mounted on the platform unit 100 . The first camera modules 310 and 320 may be respectively supported and arranged at one end of the platform 110 which does not interfere with the substrate S. As shown in FIG. In the first camera module 310, 320, the first camera can face upwards to take pictures of the upwards. The first camera modules 310 and 320 may include a first camera and a linear moving part 340 .

According to an embodiment, the first camera can be moved so as to face the nozzles 221 arranged side by side in the second direction. The first camera may be a nozzle view carema. At least one first camera can be configured on the platform 110 . In one embodiment, the number of first cameras may be configured corresponding to the number of heads of the head unit 200 .

The first camera can be accurately set at any position by using a laser. The first camera is moved in the second direction by a linear moving member 340 to be described later to perform nozzle scanning.

The linear moving part 340 can make the first camera move back and forth linearly in the second direction. According to an embodiment, the linear moving part 340 may include a linear motor and an LM guide. A linear motor provides the driving force for the movement of the first camera. The LM guide can perform linear reciprocating motion along the LM rail. The LM rail can be arranged in the second direction. The first camera can be mounted on one end of the LM guide.

The first camera can be arranged under the head unit 200 of the inkjet area (Area 2 ) along the drive shaft 120 through the platform delivery tool. The first camera can be moved in the second direction by the linear moving part 340, and can confirm whether the positions of the nozzles 221 are consistent.

The first camera is mounted on the LM guide and can be moved along the LM rail in the second direction by the driving force of the linear motor.

Referring again to FIG. 1 to (a) of FIG. 3 , the second camera module 330 is mounted on the head unit 200 to generate a substrate captured image of the substrate S and provide an alignment mark. The second camera module 330 provides reference coordinates for aligning the substrate before the head unit 200 ejects. The second camera module 330 is different from the first camera modules 310 and 320 that can be transported in the second direction in that its position is fixed, and the position of the second camera module 330 can be aligned with the first camera as a reference.

The second camera module 330 can be disposed in the inkjet area (Area 2). The second camera module 330 can be mounted on the head unit 200 . The second camera module 330 can be fixedly disposed at one end of the head bridge 210 to avoid interference with the head 220 operating in the second direction.

The second camera module 330 may face the platform unit 100 . The second camera module 330 can be arranged on the LM track, that is, on the same axis as the moving route of the first camera modules 310 and 320 . In the second camera module 330 , the second camera can face downward to take photos of the downward. The second camera module 330 is different from the first camera modules 310 and 320 and can be fixed without moving. The second camera module 330 may include a second camera.

Referring to FIG. 2, the linearly moving part and the rotating part on the substrate alignment area (Area 1) can change the positions of the stage 110 and the substrate S in the horizontal direction. The stage 110 can rotate or linearly move the chuck including the substrate S to adjust the position.

The linear moving part can linearly move the chuck including the substrate S in the first direction or the second direction. The chuck is linearly movable in a first direction by a drive shaft, and linearly movable in a second direction by a linear moving member.

According to an embodiment, the linear moving part may include a linear motor and an LM guide. The linear motor can provide the driving force for moving the chuck in the second direction. The LM guide can perform linear reciprocating motion along the LM rail. The LM rail can be arranged in the second direction. The chuck can be mounted on the LM guide.

The rotary part makes the chuck rotate by using the platform as the center of rotation. The chuck can change a predetermined angle by rotating the member.

According to an embodiment, the rotating member may be a cross-roller collar disposed on the outer periphery of the hinge shaft. According to another embodiment, the rotating member may be a bearing disposed on the outer circumference of the hinge shaft.

5 and 7, the linear moving part 340 and the rotating part 350 can change the position of the main hinge axis 230 in the horizontal direction by rotating, and can change the position of the secondary hinge axis 240 in the horizontal direction by moving linearly and rotating.

That is, the position of the secondary hinge shaft 240 can be changed in the horizontal direction by the linear movement member 340 and the rotation member 350 .

The linear moving part 340 can make the secondary hinge shaft 240 linearly move in the first direction or the second direction. The sub hinge shaft 240 is linearly movable in the first direction by the driving shaft 120 and is linearly movable in the second direction by the linear moving part 340 .

According to an embodiment, the linear moving part 340 may include a linear motor and an LM guide. The linear motor may provide a driving force to move the secondary hinge shaft 240 in the second direction. The LM guide can perform linear reciprocating motion along the LM rail. The LM rail can be arranged in the second direction. The secondary hinge shaft 240 may be mounted on one end of the LM guide.

The rotating part 350 rotates the main hinge shaft 230 with the rotation center axis, and the secondary hinge shaft 240 can also rotate in the process of position movement. The secondary hinge shaft 240 may change a predetermined angle to the first direction by the rotating part 350 .

According to an embodiment, the rotating member 350 may be a cross roller collar disposed on the outer peripheries of the main hinge shaft 230 and the sub hinge shaft 240, respectively. According to another embodiment, the rotating member 350 may be a bearing disposed on each outer periphery of the main hinge shaft 230 and the sub hinge shaft 240 .

The operation procedure of the alignment method using the alignment device 300 of the present invention having the above-mentioned components will be described.

FIG. 11 is a flowchart illustrating an alignment method according to an embodiment of the present invention; FIG. 12 is a flowchart illustrating an alignment method according to an embodiment of the present invention.

Referring to FIGS. 11 and 12 , the alignment method includes a pre-ink-jet substrate preparation step S00 and an alignment step S10 , and may include an ink-jet step S20 .

Hereinafter, each step of the alignment method will be described in chronological order.

In the substrate preparation step S00, the substrate may be prepared on the stage. In the substrate preparation step S00, the chuck on the platform may support and fix the substrate.

The alignment step S10 may include an alignment information calculation step S11 and an alignment adjustment step S12.

In the alignment information calculation step S11, the first camera module can be used to calculate the alignment information of the second camera, the alignment information of the substrate, and the alignment information of the nozzle.

In the alignment information calculation step S11, the first camera module can be moved along the driving axis, and then fit on the substrate alignment area (Area 1). In the alignment information calculation step S11, the first camera modules are arranged side by side with the second camera modules respectively, and the alignment information of the second camera modules can be calculated. In the alignment information calculation step S11, the first camera module mounted on the platform and the second camera module mounted on the head can be coaxially positioned automatically or semi-automatically.

In the alignment information calculation step S11, the second camera module photographs a specific point on the substrate to calculate the alignment information of the substrate.

In addition, in the alignment information calculation step S11, the first camera module can be moved along the driving axis, and then arranged on the ink ejection area (Area 2). In the alignment information calculation step S11, the first camera module is arranged side by side with the head, and the nozzle alignment information can be calculated. As shown in (a) of FIG. 10 , the second camera module can calculate the position coordinates of the main hinge axis and the secondary hinge axis based on the nozzle alignment information.

The first camera module can independently acquire substrate alignment information and nozzle alignment information. There is no precedence. However, the substrate alignment information may be generated based on the second camera alignment information.

In the alignment adjustment step S12, use the first camera module to scan the nozzles of the head, and then calculate information based on alignment information such as the alignment information of the second camera, substrate alignment information, nozzle alignment information, etc. Linear moving parts and rotating parts on the unit and head unit adjust the substrate and head position.

More specifically, the relationship between operations in the alignment adjustment step will be described as follows.

For a chuck that includes a substrate, alignment adjustments may be made based on substrate alignment information. A chuck including a substrate may be moved in a first direction by a platform carrying platform along a drive shaft. The chuck including the substrate is movable in the second direction on the LM guide by the linear motor. In this case, the sequence of position changes in the first direction and the second direction can be changed arbitrarily. In addition, the chuck including the substrate can be rotated at any angle with the rotation center of the center part of the stage by the rotating member, and the position can be changed to (Ax, Ay) on the XY rectangular coordinate system.

Referring back to FIG. 9( a ), FIG. 9( b ), FIG. 10 ( b ), and FIG. 10 ( c ), alignment adjustment of the nozzles can be performed based on the nozzle alignment information. Alignment adjustments should be made to the head bridge so that the head bridge is aligned with the substrate in the second orientation. The two ends of the head bridge are fixed and supported, and then can be supported and fixed by the main hinge shaft and the auxiliary hinge shaft. According to the positional shift, the position of the head bridge shifted in the X direction and the Y direction may be corrected based on the nozzle alignment information.

As shown in (b) of FIG. 10 , the main hinge shaft located at one end of the head bridge can be rotated at point A1 on the same axis through the rotating member. As shown in (c) of Figure 10, the auxiliary hinge axis located at the other end of the head bridge moves linearly from A2 to A2' in the first direction and the second direction through the linear moving part, and can be moved at point A2' through the rotating part. to rotate.

One end of the head bridge is fixed on the main hinge shaft and the auxiliary hinge shaft, and can be aligned to the alignment position of the nozzle through the rotation of the main hinge shaft and the linear movement and rotation of the auxiliary hinge shaft. The head bridge is movable in the second direction on the LM guide by the linear motor. In this case, the sequence can be changed arbitrarily by the positional changes of the linear moving part in the first direction and the second direction. The auxiliary hinge axis can be rotated at any angle with the main hinge axis as the rotation center, and then the position can be changed to (Ax, Ay) in the XY Cartesian coordinate system.

In the ink ejection step S20 , in order to make the substrate face the head, the head is moved in the second direction after the substrate is transported in the first direction perpendicular to the second direction, and ink can be ejected onto the substrate at the same time.

As above, the present invention has been described in detail using preferred embodiments, but the scope of the present invention is not limited to the specific embodiments, but should be interpreted by the scope of the claims. In addition, it should be understood by those skilled in the art that modifications and variations can be made without departing from the scope of the present invention.

Claims (4)

1. An inkjet printing system comprising:

a stage unit supporting a substrate and capable of transporting the substrate in a first direction;

a head unit which is disposed in an ink ejection area, is supported by a head bridge, is movable in a second direction orthogonal to the first direction, and has a head portion in which a nozzle for ejecting ink onto the substrate is formed; and

an alignment device generating an alignment reference and moving the stage unit and the head bridge to be aligned with the substrate;

wherein the head unit includes:

a main hinge shaft supporting one end of the head bridge and being a rotation center of the head bridge; and

a sub hinge shaft supporting the other end of the head bridge and hinge-coupled to the head bridge so that the head bridge can rotate about the main hinge shaft;

the alignment device includes:

first camera modules, which are carried on the platform unit to shoot upwards and can move along the first direction or the second direction to be positioned with each second camera module;

a plurality of second camera modules mounted on the head unit, spaced and fixed to each other in a substrate alignment region on one side of the ink ejection region, and shooting downward facing the stage unit;

an alignment module having a linear movement member that linearly moves the sub hinge shaft in the second direction and a rotation member that rotationally moves the sub hinge shaft around the main hinge shaft;

the first camera module is co-axial with the second camera module to obtain second camera alignment information and provide a pair of alignment marks, the first camera module being configured to enable acquisition of substrate alignment information based on the second camera alignment information.

2. The inkjet printing system of claim 1,

the first camera module includes:

a first camera; and

and a linear moving component which makes the first camera perform linear reciprocating motion in the second direction.

3. An alignment method used in the inkjet printing system according to claim 1 or 2 to include an alignment step of adjusting a head position after calculating alignment information, thereby adjusting alignment, before the head unit includes the head unit moves in the second direction to eject ink onto the substrate;

wherein the aligning step comprises:

an alignment information calculation step of causing a first camera module, which is arranged side by side with each of second camera modules, to perform positional movement along a drive shaft and is further arranged on a substrate alignment area, calculating second camera module alignment information by imaging the second camera modules and the substrate moved along the drive shaft, the second camera modules photographing specific points of the substrate to calculate substrate alignment information, and calculating nozzle alignment information by arranging the first camera modules side by side with the head; and

an alignment adjustment step of adjusting a position of the head by a linear movement member and a rotation member based on the second camera module alignment information, the substrate alignment information, and the nozzle alignment information,

the second camera modules are positioned to be spaced apart from each other in the head, and the first camera module is mounted on a stage unit and movable in a first direction or the second direction.

4. The alignment method according to claim 3,

in the alignment information calculation step, it is possible to calculate,

and enabling the first camera module carried on the platform and the second camera module carried on the head part to be positioned on the same axis.

Images