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CN113441449B - Spray plate detection system and detection method thereof - Google Patents

Spray plate detection system and detection method thereof Download PDF

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Publication number
CN113441449B
CN113441449B CN202010231117.6A CN202010231117A CN113441449B CN 113441449 B CN113441449 B CN 113441449B CN 202010231117 A CN202010231117 A CN 202010231117A CN 113441449 B CN113441449 B CN 113441449B
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main pipeline
spray
pipeline
value
standard
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CN113441449A (en
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郑文锋
许吉昌
孙尚培
许宏玮
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Boardtek Electronics Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Spray Control Apparatus (AREA)
  • Measuring Volume Flow (AREA)

Abstract

The invention is a complex spray plate connected in parallel with a main pipeline by complex auxiliary pipelines, the detecting system is installed on the auxiliary pipelines and the main pipeline, the detecting system at least includes: the device comprises a pump, a frequency converter, a plurality of first automatic switches, a pressure gauge, a first flow meter and a controller, wherein the first automatic switches are utilized to open the communication between a main pipeline and a plurality of secondary pipelines and input liquid, a standard fluid pressure value and a standard fluid flow value of the main pipeline are obtained, a standard resistance value is obtained according to the ratio of the standard fluid pressure value to the standard fluid flow value, then a plurality of second automatic switches are utilized to only open the communication between one secondary pipeline and the main pipeline, other secondary pipelines are closed, a fluid pressure value and a fluid flow value of the main pipeline are obtained, a resistance value is obtained according to the ratio of the two values, and if the resistance value is higher than the standard resistance value, the phenomenon that one spray disc is blocked is judged.

Description

喷盘检测系统及其检测方法Spray disc detection system and its detection method

技术领域technical field

本发明有关一种以自动化方式检测喷盘是否发生堵塞异常现象的检测系统及其检测方法。The invention relates to a detection system and a detection method for automatically detecting whether a spray disc is clogged or not.

背景技术Background technique

一般电路板或晶圆制程中，例如电镀、蚀刻等湿制程时，可能会需要将各式溶液均匀地喷洒在被加工物上；现有技术的用于电路板制程的液体喷洒装置包含有一循环槽及复数喷盘；循环槽内存放有欲喷洒的液体，例如电镀液、蚀刻液、光阻液、清洁液等等；喷盘包含有复数喷嘴；喷盘与循环槽以单一管路连接，该管路上设有一泵浦，其用以将循环槽内的液体推动至喷盘上，该等液体之后再从喷盘的各喷嘴再朝循环槽内喷洒出来。In the general circuit board or wafer manufacturing process, for example, during wet processes such as electroplating and etching, it may be necessary to spray various solutions evenly on the workpiece; the prior art liquid spraying device for the circuit board process includes a cycle tank and multiple spray plates; the liquid to be sprayed is stored in the circulation tank, such as electroplating solution, etching solution, photoresist liquid, cleaning solution, etc.; the spray plate contains multiple nozzles; the spray plate and the circulation tank are connected by a single pipeline, A pump is arranged on the pipeline, which is used to push the liquid in the circulation tank to the spray plate, and then the liquid is sprayed out from the nozzles of the spray plate towards the circulation tank.

由于循环槽内进行湿制程，进行湿制程后所残留的污泥或残屑，会阻塞于喷嘴导致喷嘴内压力不正常，而发生制程异常。因此将会造成各喷盘效能不一，进而造成生产良率的下降。再者，因喷盘及管路设置于机台内，机台操作人员无法即时检视喷盘，因此亦无法有效确认喷盘的复数喷嘴是否发生阻塞，因此亦使得机台操作人员无法即时反应，无法对机台进行即时的维修处理。Due to the wet process in the circulation tank, the sludge or debris left after the wet process will block the nozzle, resulting in abnormal pressure in the nozzle and abnormal process. Therefore, the performance of each spray plate will be different, and then the production yield will be reduced. Furthermore, since the spray plate and pipelines are installed inside the machine, the machine operator cannot check the spray plate in real time, so it is impossible to effectively confirm whether the multiple nozzles of the spray plate are blocked, so the machine operator cannot react immediately. It is impossible to perform immediate maintenance on the machine.

发明内容Contents of the invention

有鉴于此，本发明提供一种以自动化方式检测喷盘是否发生堵塞异常现象的检测系统及其检测方法，为其主要目的。In view of this, the main purpose of the present invention is to provide a detection system and detection method for automatically detecting whether the spray disc is clogged abnormally.

为达上揭目的，本发明的复数喷盘分别以复数副管路并联于一主管路，该复数喷盘设有至少一喷嘴，该检测系统装设于该副管路及该主管路，其至少包含：一泵浦，连接该主管路，可提供液体经由该主管路、该复数副管路至该复数喷盘，由该喷嘴喷洒而出；一变频器，连接该泵浦，用以控制该泵浦的动作频率；复数第一自动开关，分别配置于该复数喷盘与该复数副管路之间；一压力表，配置于该主管路，用以取得一流体压力值；一第一流量计，配置于该主管路，用以取得一流体流量值；以及一控制器，分别与该复数第一自动开关、该压力表及该第一流量计连接，可控制该第一自动开关的开启或关闭，并接收该流体压力值以及该流体流量值，以判断该复数喷盘阻塞与否。In order to achieve the above-disclosed purpose, the plurality of spray plates of the present invention are respectively connected in parallel with a plurality of auxiliary pipelines to a main pipeline, and the plurality of spray trays are provided with at least one nozzle, and the detection system is installed on the auxiliary pipeline and the main pipeline. At least include: a pump, connected to the main pipeline, which can provide liquid through the main pipeline, the multiple secondary pipelines to the multiple spray plates, and spray out from the nozzle; a frequency converter, connected to the pump, to control The operating frequency of the pump; a plurality of first automatic switches respectively arranged between the plurality of spray plates and the plurality of auxiliary pipelines; a pressure gauge arranged in the main pipeline to obtain a fluid pressure value; a first A flow meter is arranged on the main pipeline to obtain a fluid flow value; and a controller is respectively connected to the plurality of first automatic switches, the pressure gauge and the first flow meter to control the flow rate of the first automatic switch. Open or close, and receive the fluid pressure value and the fluid flow value to judge whether the plurality of spray discs are blocked or not.

在一较佳态样中，进一步设有一检测管路以及一第二、第三自动开关，该第二自动开关配置于该主管路，该第三自动开关配置于该检测管路，该主管路及该第二自动开关与该检测管路及该第三自动开关并联连接于该泵浦与该复数副管路之间。In a preferred form, a detection pipeline and a second and third automatic switches are further provided, the second automatic switch is arranged on the main pipeline, the third automatic switch is arranged on the detection pipeline, and the main pipeline And the second automatic switch is connected in parallel with the detection pipeline and the third automatic switch between the pump and the plurality of secondary pipelines.

在一较佳态样中，进一步设有一第二流量计配置于该检测管路，该第二流量计与该控制器连接。In a preferred mode, a second flowmeter is further arranged on the detection pipeline, and the second flowmeter is connected to the controller.

在一较佳态样中，该检测管路的管径小于该主管路的管径。In a preferred aspect, the diameter of the detection pipeline is smaller than that of the main pipeline.

在一较佳态样中，复数喷盘配置于一循环槽体，该循环槽体内容置有液体，另有一循环管路连接于该循环槽体与该泵浦，该泵浦将该循环槽体内的该液体提供至该主管路。In a preferred form, a plurality of spray discs are arranged in a circulation tank, and liquid is contained in the circulation tank, and a circulation pipeline is connected to the circulation tank and the pump, and the pump connects the circulation tank The fluid in the body is provided to the main line.

在一较佳态样中，该循环管路上配置有一第四自动开关。In a preferred form, a fourth automatic switch is arranged on the circulation pipeline.

本发明另提供一种检测方法，至少依序包括以下步骤：开启该主管路与该复数副管路的连通；输入液体于该主管路、该复数副管路、该复数喷盘以及由该喷嘴喷出；取得该主管路的一标准流体压力值以及一标准流体流量值，以该标准流体压力值与该标准流体流量值的比值得到一标准阻力值；开启该主管路与其中一副管路的连通，而关闭其他副管路；输入液体于该主管路、该其中一副管路、该其中一喷盘以及由该喷嘴喷出；取得该主管路的一流体压力值以及一流体流量值，以该流体压力值与该流体流量值的比值得到一阻力值；以及该阻力值与该标准阻力值进行比对，若该阻力值高于该标准阻力值，则判定该其中一喷盘有阻塞现象。The present invention also provides a detection method, which at least includes the following steps in sequence: opening the communication between the main pipeline and the plurality of auxiliary pipelines; inputting liquid into the main pipeline, the plurality of auxiliary pipelines, the plurality of spray plates and the nozzles; Ejection; obtain a standard fluid pressure value and a standard fluid flow value of the main pipeline, and obtain a standard resistance value based on the ratio of the standard fluid pressure value to the standard fluid flow value; open the main pipeline and one of the auxiliary pipelines connection, and close other auxiliary pipelines; input liquid in the main pipeline, one of the auxiliary pipelines, one of the spray discs and spray from the nozzle; obtain a fluid pressure value and a fluid flow value of the main pipeline , a resistance value is obtained by the ratio of the fluid pressure value to the fluid flow value; and the resistance value is compared with the standard resistance value, if the resistance value is higher than the standard resistance value, it is determined that one of the nozzles has blocking phenomenon.

在一较佳态样中，该输入液体的步骤由一泵浦提供动力来源。In a preferred aspect, the step of feeding liquid is powered by a pump.

在一较佳态样中，该泵浦进一步连接一变频器，用以控制该泵浦的动作频率。In a preferred form, the pump is further connected with a frequency converter for controlling the operating frequency of the pump.

在一较佳态样中，进一步配置有一检测管路，该检测管路与该主管路并联连接于该泵浦与该复数副管路之间，由该检测管路输入液体至该复数副管路进行检测。In a preferred form, a detection pipeline is further configured, the detection pipeline is connected in parallel with the main pipeline between the pump and the plurality of auxiliary pipelines, and the liquid is input from the detection pipeline to the plurality of auxiliary pipelines road for inspection.

附图说明Description of drawings

图1为本发明中检测系统第一实施例的结构示意图。Fig. 1 is a schematic structural diagram of the first embodiment of the detection system in the present invention.

图2为本发明中检测系统第二实施例的结构示意图。Fig. 2 is a schematic structural diagram of the second embodiment of the detection system in the present invention.

图3为本发明中检测系统第二实施例的使用示意图。Fig. 3 is a schematic view of the second embodiment of the detection system in the present invention.

图号说明：Description of figure number:

喷盘 1spray plate 1

喷嘴 11nozzle 11

副管路 2Secondary line 2

主管路 3main road 3

泵浦 41pump 41

变频器 42Inverter 42

第一自动开关 431First automatic switch 431

第二自动开关 432Second automatic switch 432

第三自动开关 433The third automatic switch 433

第四自动开关 434Fourth automatic switch 434

压力表 44Pressure gauge 44

第一流量计 451First Flow Meter 451

第二流量计 452Second flow meter 452

控制器 46controller 46

检测管路 47Test line 47

循环槽体 51Circulation tank 51

循环管路 52。Circulation line 52.

具体实施方式detailed description

请参阅图1所示为本发明中检测系统第一实施例的结构示意图。本发明的复数喷盘1分别以复数副管路2并联于一主管路3，该复数喷盘1设有至少一喷嘴11，该检测系统装设于该副管路2及该主管路3，该检测系统至少包含：泵浦41、变频器42、复数第一自动开关431、压力表44、第一流量计451以及控制器46。Please refer to FIG. 1 which is a schematic structural diagram of the first embodiment of the detection system in the present invention. The plurality of spray plates 1 of the present invention are respectively connected in parallel with a main line 3 with a plurality of auxiliary pipelines 2, and the plurality of spray plates 1 are provided with at least one nozzle 11, and the detection system is installed on the auxiliary line 2 and the main line 3, The detection system at least includes: a pump 41 , a frequency converter 42 , a plurality of first automatic switches 431 , a pressure gauge 44 , a first flow meter 451 and a controller 46 .

该泵浦41连接该主管路3，可提供液体经由该主管路3、该复数副管路2至该复数喷盘1，由该喷嘴11喷洒而出。而该复数喷盘1配置于一循环槽体51，该循环槽体51内容置有液体，另有一循环管路52连接于该循环槽体51与该泵浦41，该泵浦41将该循环槽体51内的该液体提供至该主管路3。The pump 41 is connected to the main pipeline 3 , and can provide liquid to the multiple spray plates 1 through the main pipeline 3 and the plurality of secondary pipelines 2 , and spray out from the nozzles 11 . The plurality of spray plates 1 are arranged in a circulation tank 51, and liquid is contained in the circulation tank 51, and a circulation pipeline 52 is connected to the circulation tank 51 and the pump 41, and the pump 41 circulates the The liquid in the tank body 51 is supplied to the main pipeline 3 .

该变频器42连接该泵浦41，用以控制该泵浦41的动作频率。The frequency converter 42 is connected to the pump 41 for controlling the operating frequency of the pump 41 .

该复数第二自动开关431分别配置于该复数喷盘1与该复数副管路2之间。The plurality of second automatic switches 431 are respectively disposed between the plurality of spray plates 1 and the plurality of secondary pipelines 2 .

该压力表44配置于该主管路3，用以取得一流体压力值；该第一流量计451配置于该主管路3，用以取得一流体流量值；而该控制器46分别与该复数第一自动开关431、该压力表44及该第一流量计451连接，可控制该复数第一自动开关431的开启或关闭，并接收该流体压力值以及该流体流量值。The pressure gauge 44 is configured in the main pipeline 3 to obtain a fluid pressure value; the first flowmeter 451 is configured in the main pipeline 3 to obtain a fluid flow value; and the controller 46 is connected to the plurality of first An automatic switch 431 is connected with the pressure gauge 44 and the first flow meter 451 to control the opening or closing of the plurality of first automatic switches 431 and receive the fluid pressure value and the fluid flow value.

因一般喷盘用的主管路的管径大约为2英吋或以上，而流量计在大管径下无法量测小流量，需再外接一小管径的检测管路出来，如图2所示，进一步设有一检测管路47、第二流量计452以及一第二、第三自动开关432、433，该第二自动开关432配置于该主管路3，该第三自动开关433配置于该检测管路47，该主管路3及该第二自动开关432与该检测管路47及该第三自动开关433并联连接于该泵浦41与该复数副管路2之间，该第二流量计452配置于该检测管路47，该第二、第三自动开关432、433以及该第二流量计452分别与该控制器46连接。Because the diameter of the main pipeline used by the general spray plate is about 2 inches or more, and the flowmeter cannot measure the small flow rate under the large diameter, it is necessary to connect a small diameter detection pipeline, as shown in Figure 2 As shown, a detection pipeline 47, a second flow meter 452, and a second and third automatic switches 432, 433 are further provided, the second automatic switch 432 is arranged on the main pipeline 3, and the third automatic switch 433 is arranged on the Detection pipeline 47, the main pipeline 3 and the second automatic switch 432 and the detection pipeline 47 and the third automatic switch 433 are connected in parallel between the pump 41 and the plurality of auxiliary pipelines 2, the second flow rate A meter 452 is disposed on the detection pipeline 47 , and the second and third automatic switches 432 , 433 and the second flow meter 452 are respectively connected to the controller 46 .

整体使用时，复数喷盘1配置于一循环槽体51，该循环管路52连接于该循环槽体51与该泵浦41，该循环管路52上配置有一第四自动开关434，该第四自动开关434与该控制器46连接；先开启该第一、第二、第四自动开关431、432、434并关闭该第三自动开关433，以开启该主管路3与该复数副管路2的连通；利用该泵浦41将该循环槽体51内的该液体提供至该主管路3、该复数副管路2、该复数喷盘1以及由该喷嘴11喷出；利用该压力表44以及第一流量计451分别取得该主管路3的一标准流体压力值PS以及一标准流体流量值QS，而该控制器46则以该标准流体压力值与该标准流体流量值的比值得到一标准阻力值(PS/QS)。When used as a whole, the plurality of spray discs 1 are arranged in a circulation tank 51, and the circulation pipeline 52 is connected to the circulation tank 51 and the pump 41. A fourth automatic switch 434 is arranged on the circulation pipeline 52, and the first Four automatic switches 434 are connected with the controller 46; first open the first, second and fourth automatic switches 431, 432, 434 and close the third automatic switch 433 to open the main pipeline 3 and the plurality of secondary pipelines 2; use the pump 41 to provide the liquid in the circulation tank 51 to the main pipeline 3, the plurality of secondary pipelines 2, the plurality of spray discs 1 and spray out from the nozzle 11; use the pressure gauge 44 and the first flow meter 451 obtain a standard fluid pressure value P S and a standard fluid flow value Q S of the main pipeline 3 respectively, and the controller 46 uses the ratio of the standard fluid pressure value to the standard fluid flow value Get a standard resistance value (P S /Q S ).

开启该主管路3与其中一副管路2的连通，而关闭其他副管路，如图3所示开启最左边第一自动开关431及第三、第四自动开关433、434，开启其他第一自动开关431及第二自动开关432；利用该泵浦41将该循环槽体51内的该液体提供至输入液体于该检测管路47、该其中一副管路2、该其中一喷盘1以及由该喷嘴11喷出；利用该压力表44以及第二流量计452分别取得该检测管路47的一流体压力值P1以及一流体流量值Q1，而该控制器46则以该流体压力值与该流体流量值的比值得到一阻力值(P1/Q1)；以及利用该控制器46比对该阻力值(P1/Q1)与该标准阻力值(PS/QS)，若该阻力值(P1/Q1)高于该标准阻力值(PS/QS)，则判定该其中一喷盘1的该喷嘴11有阻塞现象，若该阻力值(P1/Q1)小于与该标准阻力值(PS/QS)，则判定该其中一喷盘1的该喷嘴11并无阻塞现象。Open the communication between the main pipe 3 and one of the secondary pipelines 2, and close other secondary pipelines, open the first automatic switch 431 on the far left and the third and fourth automatic switches 433, 434 as shown in Figure 3, and open the other secondary pipelines. An automatic switch 431 and a second automatic switch 432; utilize the pump 41 to provide the liquid in the circulation tank 51 to the input liquid in the detection pipeline 47, one of the secondary pipelines 2, one of the spray trays 1 and ejected from the nozzle 11; use the pressure gauge 44 and the second flow meter 452 to respectively obtain a fluid pressure value P1 and a fluid flow value Q1 of the detection pipeline 47, and the controller 46 uses the fluid pressure value and the ratio of the fluid flow value to obtain a resistance value (P1/Q1); and use the controller 46 to compare the resistance value (P1/Q1) and the standard resistance value (P S /Q S ), if the resistance value (P1/Q1) is higher than the standard resistance value (P S /Q S ), it is determined that the nozzle 11 of one of the nozzles 1 is blocked, if the resistance value (P1/Q1) is less than the standard resistance value (P S /Q S ), then it is determined that the nozzle 11 of one of the spray trays 1 is not clogged.

之后再分次仅开启一副管路与该主管路的连通，经由取得的阻力值与标准阻力值进行比对，则可判断与开启一副管路所连接的喷盘是否有阻塞现象；本发明利用控制器来自动控制各自动开关的开启与关闭，并利用压力表及流量计所量测的值，做为检测喷盘的喷嘴是否阻塞的依据，以达到自动化检测的目的。Afterwards, only one sub-pipeline is connected to the main pipeline in stages, and by comparing the obtained resistance value with the standard resistance value, it can be judged whether there is any blockage in the nozzle connected to the opening of the sub-pipeline; The invention uses the controller to automatically control the opening and closing of each automatic switch, and uses the values measured by the pressure gauge and the flow meter as the basis for detecting whether the nozzle of the spray plate is blocked, so as to achieve the purpose of automatic detection.

另外，当因生产需求而需固定关闭至少一喷盘1的该喷嘴11时，主管路的流体压力会变大而使整体流量变小，造成生产条件不一，影响生产良率，因此需用变频器42来控制该泵浦41的动作频率，以调整流体压力达到一恒定值，流量就不会受其影响，维持生产稳定。In addition, when the nozzle 11 of at least one spray plate 1 needs to be fixedly closed due to production requirements, the fluid pressure of the main pipeline will increase and the overall flow rate will decrease, resulting in different production conditions and affecting the production yield. The frequency converter 42 is used to control the operating frequency of the pump 41 to adjust the fluid pressure to a constant value, and the flow rate will not be affected by it to maintain stable production.

Claims (10)

1.一种喷盘检测方法，其特征在于，复数喷盘分别以复数副管路并联于一主管路，该复数喷盘设有至少一喷嘴，该检测方法至少依序包括以下步骤：1. A detection method for spray trays, characterized in that the plurality of spray trays are respectively connected in parallel with a plurality of auxiliary pipelines to a main pipeline, and the plurality of spray trays are provided with at least one nozzle, and the detection method at least comprises the following steps in order: 开启该主管路与该复数副管路的连通；Opening the communication between the main pipeline and the plurality of auxiliary pipelines; 输入液体于该主管路、该复数副管路、该复数喷盘以及由该喷嘴喷出；input liquid into the main pipeline, the plurality of auxiliary pipelines, the plurality of spray plates and spray from the nozzles; 取得该主管路的一标准流体压力值以及一标准流体流量值，以该标准流体压力值与该标准流体流量值的比值得到一标准阻力值；Obtain a standard fluid pressure value and a standard fluid flow value of the main pipeline, and obtain a standard resistance value based on the ratio of the standard fluid pressure value to the standard fluid flow value; 开启该主管路与其中一副管路的连通，而关闭其他副管路；Open the communication between the main pipeline and one of the auxiliary pipelines, and close the other auxiliary pipelines; 输入液体于该主管路、该其中一副管路、其中一喷盘以及由该喷嘴喷出；input liquid into the main pipeline, one of the auxiliary pipelines, one of the spray trays and spray out from the nozzle; 取得该主管路的一流体压力值以及一流体流量值，以该流体压力值与该流体流量值的比值得到一阻力值；以及Obtain a fluid pressure value and a fluid flow value of the main pipeline, and obtain a resistance value based on the ratio of the fluid pressure value to the fluid flow value; and 该阻力值与该标准阻力值进行比对，若该阻力值高于该标准阻力值，则判定该其中一喷盘有阻塞现象。The resistance value is compared with the standard resistance value, and if the resistance value is higher than the standard resistance value, it is determined that one of the nozzles is blocked. 2.如权利要求1所述的喷盘检测方法，其特征在于，该输入液体的步骤由一泵浦提供动力来源。2 . The spray plate inspection method according to claim 1 , wherein the step of inputting liquid is powered by a pump. 3 . 3.如权利要求2所述的喷盘检测方法，其特征在于，该泵浦连接一变频器，用以控制该泵浦的动作频率。3 . The method for inspecting the spray plate according to claim 2 , wherein the pump is connected to a frequency converter to control the operating frequency of the pump. 4 . 4.如权利要求2或3所述的喷盘检测方法，其特征在于，配置有一检测管路，该检测管路与该主管路并联连接于该泵浦与该复数副管路之间，由该检测管路输入液体至该复数副管路进行检测。4. As claimed in claim 2 or 3, the spray plate detection method is characterized in that a detection pipeline is configured, and the detection pipeline and the main pipeline are connected in parallel between the pump and the plurality of secondary pipelines, by The detection pipeline inputs liquid to the plurality of auxiliary pipelines for detection. 5.一种喷盘检测系统，其特征在于，复数喷盘分别以复数副管路并联于一主管路，该复数喷盘设有至少一喷嘴，该检测系统装设于该副管路及该主管路，其至少包含：5. A spray plate detection system, characterized in that the plurality of spray plates are respectively connected in parallel with a plurality of auxiliary pipelines to a main pipeline, the plurality of spray plates are provided with at least one nozzle, and the detection system is installed on the auxiliary pipeline and the main road, which at least includes: 一泵浦，连接该主管路，可提供液体经由该主管路、该复数副管路至该复数喷盘，由该喷嘴喷洒而出；A pump, connected to the main pipeline, can supply liquid through the main pipeline and the plurality of auxiliary pipelines to the plurality of spray plates, and spray out from the nozzle; 一变频器，连接该泵浦，用以控制该泵浦的动作频率；a frequency converter connected to the pump to control the operating frequency of the pump; 复数第一自动开关，分别配置于该复数喷盘与该复数副管路之间；A plurality of first automatic switches are respectively arranged between the plurality of spray plates and the plurality of secondary pipelines; 一压力表，配置于该主管路，用以取得一流体压力值；a pressure gauge, configured in the main pipeline, for obtaining a fluid pressure value; 一第一流量计，配置于该主管路，用以取得一流体流量值；以及a first flowmeter, configured in the main pipeline, for obtaining a fluid flow value; and 一控制器，分别与该复数第一自动开关、该压力表及该第一流量计连接，可控制该第一自动开关的开启或关闭，并接收该流体压力值以及该流体流量值，以判断该复数喷盘阻塞与否；A controller, connected to the plurality of first automatic switches, the pressure gauge and the first flow meter respectively, can control the opening or closing of the first automatic switch, and receive the fluid pressure value and the fluid flow value to judge whether the plurality of nozzles are clogged; 其中，该喷盘检测系统用以检测的方法，依序包括以下步骤：Wherein, the detection method of the spray plate detection system includes the following steps in sequence: 开启该主管路与该复数副管路的连通；Opening the communication between the main pipeline and the plurality of secondary pipelines; 输入液体于该主管路、该复数副管路、该复数喷盘以及由该喷嘴喷出；input liquid into the main pipeline, the plurality of auxiliary pipelines, the plurality of spray plates and spray from the nozzles; 取得该主管路的一标准流体压力值以及一标准流体流量值，以该标准流体压力值与该标准流体流量值的比值得到一标准阻力值；Obtain a standard fluid pressure value and a standard fluid flow value of the main pipeline, and obtain a standard resistance value based on the ratio of the standard fluid pressure value to the standard fluid flow value; 开启该主管路与其中一副管路的连通，而关闭其他副管路；Open the communication between the main pipeline and one of the auxiliary pipelines, and close the other auxiliary pipelines; 输入液体于该主管路、该其中一副管路、其中一喷盘以及由该喷嘴喷出；input liquid into the main pipeline, one of the auxiliary pipelines, one of the spray trays and spray out from the nozzle; 取得该主管路的一流体压力值以及一流体流量值，以该流体压力值与该流体流量值的比值得到一阻力值；以及Obtain a fluid pressure value and a fluid flow value of the main pipeline, and obtain a resistance value based on the ratio of the fluid pressure value to the fluid flow value; and 该阻力值与该标准阻力值进行比对，若该阻力值高于该标准阻力值，则判定该其中一喷盘有阻塞现象。The resistance value is compared with the standard resistance value, and if the resistance value is higher than the standard resistance value, it is determined that one of the nozzles is blocked. 6.如权利要求5所述的喷盘检测系统，其特征在于，设有一检测管路以及一第二、第三自动开关，该第二自动开关配置于该主管路，该第三自动开关配置于该检测管路，该主管路及该第二自动开关与该检测管路及该第三自动开关并联连接于该泵浦与该复数副管路之间，该第二、第三自动开关与该控制器连接。6. The spray plate detection system as claimed in claim 5, characterized in that, a detection pipeline and a second and third automatic switches are provided, the second automatic switch is configured on the main pipeline, and the third automatic switch is configured In the detection pipeline, the main pipeline and the second automatic switch are connected in parallel with the detection pipeline and the third automatic switch between the pump and the plurality of auxiliary pipelines, and the second and third automatic switches and The controller is connected. 7.如权利要求6所述的喷盘检测系统，其特征在于，设有一第二流量计配置于该检测管路，该第二流量计与该控制器连接。7 . The spray plate detection system according to claim 6 , wherein a second flow meter is disposed on the detection pipeline, and the second flow meter is connected to the controller. 8 . 8.如权利要求7所述的喷盘检测系统，其特征在于，该检测管路的管径小于该主管路的管径。8. The spray plate detection system according to claim 7, wherein the diameter of the detection pipeline is smaller than the diameter of the main pipeline. 9.如权利要求5至8任一所述的喷盘检测系统，其特征在于，复数喷盘配置于一循环槽体，该循环槽体内容置有液体，另有一循环管路连接于该循环槽体与该泵浦，该泵浦将该循环槽体内的该液体提供至该主管路。9. The spraying plate detection system according to any one of claims 5 to 8, wherein a plurality of spraying plates are arranged in a circulation tank, liquid is placed in the circulation tank, and another circulation pipeline is connected to the circulation tank. The tank and the pump, the pump provides the liquid in the circulating tank to the main pipeline. 10.如权利要求9所述的喷盘检测系统，其特征在于，该循环管路上配置有一第四自动开关，该第四自动开关与该控制器连接。10 . The spray plate detection system according to claim 9 , wherein a fourth automatic switch is arranged on the circulation pipeline, and the fourth automatic switch is connected to the controller. 11 .
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