CN113418004B - Vacuum feedthrough and method for producing the same - Google Patents
Vacuum feedthrough and method for producing the same Download PDFInfo
- Publication number
- CN113418004B CN113418004B CN202110717227.8A CN202110717227A CN113418004B CN 113418004 B CN113418004 B CN 113418004B CN 202110717227 A CN202110717227 A CN 202110717227A CN 113418004 B CN113418004 B CN 113418004B
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- Prior art keywords
- guide
- sealing
- positioning
- outer conductor
- ceramic window
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000007789 sealing Methods 0.000 claims abstract description 101
- 239000004020 conductor Substances 0.000 claims abstract description 89
- 238000002347 injection Methods 0.000 claims abstract description 53
- 239000007924 injection Substances 0.000 claims abstract description 53
- 239000000919 ceramic Substances 0.000 claims abstract description 50
- 239000000565 sealant Substances 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 239000004814 polyurethane Substances 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 239000003795 chemical substances by application Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/14—Sealings between relatively-stationary surfaces by means of granular or plastic material, or fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B1/00—Devices for securing together, or preventing relative movement between, constructional elements or machine parts
- F16B1/02—Means for securing elements of mechanisms after operation
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Connections Arranged To Contact A Plurality Of Conductors (AREA)
Abstract
The invention provides a manufacturing method of a vacuum through-hole, which relates to the field of power transmission matching equipment and comprises an outer conductor, an inner conductor arranged in the outer conductor and a ceramic window for connecting the outer conductor and the inner conductor, wherein a plurality of annular sealing grooves I are formed in the joint of the ceramic window and the outer conductor, a plurality of positioning pieces I for connecting the sealing grooves I are arranged at equal angles in the circumferential direction of the outer conductor, a plurality of injection holes I corresponding to the positioning pieces one to one are formed in the end part of the outer conductor, the injection holes I are communicated with the sealing grooves I through the positioning pieces I, and a plurality of annular sealing grooves II are formed in the joint of the inner conductor and the ceramic window. After the outer conductor, the ceramic window and the inner conductor are clamped with each other, sealant is injected from the first sealant injection hole and the second sealant injection hole, the sealant enters into the first sealing groove, which is connected with the ceramic window, of the outer conductor and the second sealing groove, which is connected with the inner conductor, of the ceramic window along the first sealant injection hole, and an annular sealing ring is formed, so that the two connected components are firmly connected, and the sealing performance is better.
Description
Technical Field
The invention relates to the technical field of power transmission matching equipment, in particular to a vacuum feedthrough and a manufacturing method thereof.
Background
A vacuum feedthrough is a sealing device that can transmit various electrical power, electrical signals, motion, operation, fluids, light beams, etc., through the walls of a vacuum chamber. The vacuum feedthrough in the prior art comprises an outer conductor, an inner conductor embedded in the outer conductor, and a ceramic window connecting the outer conductor and the inner conductor.
However, at present, when the outer conductor, the inner conductor and the ceramic window are assembled, the outer conductor, the inner conductor and the ceramic window are connected in a clamping manner, so that the sealing can be achieved only by extremely high precision of the joint of the outer conductor, the inner conductor and the ceramic window, but after long-time use, clearance holes are easy to appear in the joint due to various reasons such as expansion caused by heat and contraction caused by cold, the sealing is not realized, and the ceramic window and the inner conductor are easy to fall off.
Disclosure of Invention
(one) solving the technical problems
In order to overcome the defects in the prior art, the invention provides a vacuum feedthrough and a manufacturing method thereof, and solves the problems in the prior art.
(II) technical scheme
In order to achieve the above purpose, the invention is realized by the following technical scheme: the utility model provides a vacuum feedthrough, includes the outer conductor, the inner conductor of arranging the outer conductor in and the ceramic window of connecting outer conductor and inner conductor in, a plurality of annular seal grooves first have been seted up to ceramic window and the junction of outer conductor, outer conductor inner ring is equiangular to be provided with a plurality of setting element first that are used for connecting seal groove first, a plurality of annotating agent hole first with setting element one-to-one is seted up to the tip of outer conductor, annotate agent hole first and seal groove first intercommunication through setting element, a plurality of annular seal grooves second have been seted up to the junction of inner conductor and ceramic window, ceramic window inner ring is equiangular to be provided with a plurality of setting elements second that are used for connecting seal groove second, a plurality of annotating agent holes second with setting element second one-to-one are seted up to the tip of ceramic window, annotating agent hole second and seal groove second intercommunication through setting element second.
Preferably, the first locating part comprises a plurality of groups of arc locating pipes, guide blocks and springs, the locating pipes are matched with the first sealing groove, a plurality of guide cavities are formed in the outer conductor at equal angles in the circumferential direction, the guide blocks are slidably matched in the guide cavities and are connected with the bottoms of the guide cavities through the springs, the locating pipes are connected with the guide blocks, sealing holes communicated with the guide cavities are formed in the locating pipes and the guide blocks, and the first injection holes are communicated with the guide cavities.
Preferably, the second locating part comprises a plurality of groups of arc locating pipes II, guide blocks II and springs II, the locating pipes II are matched with the sealing grooves II, a plurality of guide cavities II are formed in the inner ring of the ceramic window at equal angles, the guide blocks II are slidably matched in the guide cavities II and are connected with the bottoms of the guide cavities II through the springs II, the locating pipes II are connected with the guide blocks II, sealing holes II communicated with the guide cavities II are formed in the locating pipes II and the guide blocks II, and the injection holes II are communicated with the guide cavities II.
Preferably, the number of the positioning pipes and the second positioning pipes is at least four.
A method of manufacturing a vacuum feedthrough comprising the steps of:
step one: processing the outer conductor, the inner conductor and the sealing groove I, the sealing groove II, the injection hole I, the injection hole II, the guide cavity and the guide cavity II by using a processing center, wherein the injection hole I is communicated with the guide cavity, and the injection hole II is communicated with the guide cavity II;
step two: connecting a tubular guide block with a tubular positioning tube and adapting the tubular positioning tube in a guide cavity, connecting the tubular positioning tube and the guide block with the guide cavity through a spring, and communicating the positioning tube and a sealing hole on the guide block with the guide cavity; the second tubular guide block is connected with the second tubular positioning tube and is adapted in the second guide cavity, and is connected with the second guide cavity through the second spring, and the second positioning tube and the second sealing hole on the second guide block are communicated with the second guide cavity;
step three: inserting an inner conductor into the ceramic window, embedding a positioning tube II into a sealing groove II under the action of a spring II, then injecting sealant from a sealant injection hole II, enabling the sealant to enter the sealing groove II along the sealant injection hole II, a guide cavity II and the sealing hole II, and forming an annular sealing ring in the sealing groove II; the ceramic window is inserted into the outer conductor, the positioning tube is embedded into the first sealing groove under the action of the spring, then the sealant is injected from the first sealant injection hole, the sealant enters the first sealing groove along the first sealant injection hole, the guide cavity and the sealing hole, and an annular sealing ring is formed in the first sealing groove.
Preferably, the sealant is a polyurethane material.
(III) beneficial effects
The invention provides a vacuum feedthrough and a method for manufacturing the same. The beneficial effects are as follows:
1. according to the vacuum feedthrough and the manufacturing method thereof, after the outer conductor, the ceramic window and the inner conductor are clamped with each other, sealant is injected from the first injection hole and the second injection hole, and enters the first sealing groove for connecting the outer conductor and the ceramic window and the second sealing groove for connecting the ceramic window and the inner conductor along the first injection hole, and an annular sealing ring is formed, so that the two connected parts are firmly connected, and the sealing performance is better.
Drawings
FIG. 1 is an external construction diagram of the present invention;
FIG. 2 is a schematic view of a ceramic window of the present invention;
FIG. 3 is a schematic view of an inner conductor of the present invention;
FIG. 4 is a schematic cross-sectional view of the present invention;
FIG. 5 is an enlarged view of FIG. 4A in accordance with the present invention;
FIG. 6 is an enlarged view of FIG. 4B in accordance with the present invention;
FIG. 7 is a schematic view of a positioning tube according to the present invention.
In the figure: the ceramic window comprises an outer conductor 1, a ceramic window 2, an inner conductor 3, a sealing groove 4, a sealing groove 5, a pouring hole 6, a pouring hole 7, a positioning tube 8, a guide block 9, a guide cavity 10, a spring 11, a sealing hole 12, a positioning tube 13, a guide block 14, a guide cavity 15, a spring 16 and a sealing hole 17.
Detailed Description
The embodiment of the invention provides a vacuum feedthrough, as shown in fig. 1-7, comprising an outer conductor 1, an inner conductor 3 arranged in the outer conductor 1 and a ceramic window 2 connecting the outer conductor 1 and the inner conductor 3, wherein the outer conductor 1 is integrally formed by a plurality of circular rings, the center of the outer conductor 1 is provided with a through hole, and the ceramic window 2 is arranged at the through hole in the center. While one end of the inner conductor 3 passes through the ceramic window 2 and is arranged in the cavity of the outer conductor 1, and the other end extends outwards from the outer conductor 1.
As shown in fig. 2, a plurality of annular sealing grooves I4 are formed at the joint of the ceramic window 2 and the outer conductor 1.
As shown in fig. 4 and 5, a plurality of positioning pieces I for connecting with the first sealing groove 4 are arranged at equal angles in the circumferential direction of the outer conductor 1, a plurality of injection holes I6 corresponding to the positioning pieces one by one are formed at the end part of the outer conductor 1, and the injection holes I6 are communicated with the first sealing groove 4 through the positioning pieces I.
As shown in fig. 3, a plurality of annular sealing grooves II 5 are formed at the joint of the inner conductor 3 and the ceramic window 2.
As shown in fig. 4 and 6, a plurality of positioning pieces II for connecting with the second sealing groove 5 are arranged at equal angles in the circumferential direction in the ceramic window 2, a plurality of injection holes II 7 corresponding to the positioning pieces II one by one are formed in the end part of the ceramic window 2, and the injection holes II 7 are communicated with the second sealing groove 5 through the positioning pieces II.
As shown in fig. 5, the first positioning piece comprises a plurality of groups of arc-shaped positioning pipes 8, guide blocks 9 and springs 11, the positioning pipes 8 are matched with the first sealing groove 4, a plurality of guide cavities 10 are formed in the outer conductor 1 at equal angles in the circumferential direction, the guide blocks 9 are slidably matched in the guide cavities 10 and are connected with the bottoms of the guide cavities 10 through the springs 11, the guide blocks 9 can stretch and retract in the guide cavities 10 under the action of the springs 11, the positioning pipes 8 are connected with the guide blocks 9, sealing holes 12 communicated with the guide cavities 10 are formed in the positioning pipes 8 and the guide blocks 9, and the first injection holes 6 are communicated with the guide cavities 10. When the positioning pipe 8 is clamped into the first sealing groove 4, the first injection hole 6, the guide cavity 10, the sealing hole 12 and the first sealing groove 4 are all in a communication state, and the sealing agent can enter the first sealing groove 4 along the first injection hole 6, the guide cavity 10 and the sealing hole 12.
As shown in fig. 6, the second positioning member comprises a plurality of groups of arc-shaped second positioning pipes 13, second guiding blocks 14 and second springs 16, the second positioning pipes 13 are matched with the second sealing groove 5, a plurality of second guiding cavities 15 are formed in the ceramic window 2 at equal angles in the circumferential direction, the second guiding blocks 14 are slidably matched in the second guiding cavities 15 and are connected with the bottoms of the second guiding cavities 15 through the second springs 16, the second positioning pipes 13 are connected with the second guiding blocks 14, second sealing holes 17 communicated with the second guiding cavities 15 are formed in the second positioning pipes 13 and the second guiding blocks 14, and the second injection holes 7 are communicated with the second guiding cavities 15. When the positioning pipe II 13 is clamped into the sealing groove II 5, the injection hole II 7, the guide cavity II 15, the sealing hole II 17 and the sealing groove II 5 are all in a communication state, and the sealing agent can enter the sealing groove II 5 along the injection hole II 7, the guide cavity II 15 and the sealing hole II 17.
The number of the positioning pipes 8 and the positioning pipes II 13 is at least four. The four positioning pipes 8 and the two positioning pipes 13 are used as four fulcrums for molding the sealant.
A method of manufacturing a vacuum feedthrough comprising the steps of:
step one: processing the outer conductor 1, the inner conductor 3, the first sealing groove 4, the second sealing groove 5, the first injection hole 6, the second injection hole 7, the guide cavity 10 and the second guide cavity 15 by using a processing center, wherein the first injection hole 6 is communicated with the guide cavity 10, and the second injection hole 7 is communicated with the second guide cavity 15;
step two: the outer conductor 1, the ceramic window 2 and the inner conductor 3 are chemically cleaned by ultrapure water, nickel is plated on the surfaces of the outer conductor 1, the ceramic window 2 and the inner conductor 3, and heat treatment is carried out by utilizing a vacuum heating and annealing mode.
Step three: the tubular guide block 9 is connected with the tubular positioning tube 8 and is adapted in the guide cavity 10, and is connected with the guide cavity 10 through the spring 11, and the positioning tube 8 and the sealing hole 12 on the guide block 9 are communicated with the guide cavity 10; the second tubular guide block 14 is connected with the second tubular positioning tube 13 and is adapted in the second guide cavity 15, and is connected with the second guide cavity 15 through the second spring 16, and the second positioning tube 13 and a second sealing hole 17 on the second guide block 14 are communicated with the second guide cavity 15;
step four: the inner conductor 3 is inserted into the ceramic window 2, the positioning tube II 13 is embedded into the sealing groove II 5 under the action of the spring II 16, and then the sealant is injected from the injection hole II 7, and the sealant is made of polyurethane material. The sealant enters the second sealing groove 5 along the second injection hole 7, the second guide cavity 15 and the second sealing hole 17, and an annular sealing ring is formed in the second sealing groove 5; the ceramic window 2 is inserted into the outer conductor 1, the positioning tube 8 is embedded into the sealing groove I4 under the action of the spring 11, then the sealant is injected from the injection hole I6, and enters the sealing groove I4 along the injection hole I6, the guide cavity 10 and the sealing hole 12, so that an annular sealing ring is formed in the sealing groove I4.
Step five: the coaxiality and vacuum degree of the outer conductor 1 and the inner conductor 3 are measured and compared with design values.
After the outer conductor 1, the ceramic window 2 and the inner conductor 3 are clamped with each other, sealant is injected from the first injection hole 6 and the second injection hole 7, and enters the first sealing groove 4 where the outer conductor 1 is connected with the ceramic window 2 and the second sealing groove 5 where the ceramic window 2 is connected with the inner conductor 3 along the first injection hole, so that an annular sealing ring is formed, the two connected parts are firmly connected, and the sealing performance is better.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. Vacuum feedthrough comprising an outer conductor (1), an inner conductor (3) built into the outer conductor (1) and a ceramic window (2) connecting the outer conductor (1) and the inner conductor (3), characterized in that: the ceramic window (2) is provided with a plurality of annular sealing grooves I (4) at the joint of the ceramic window (2) and the outer conductor (1), a plurality of positioning pieces I used for connecting the sealing grooves I (4) are arranged at equal angles in the circumferential direction of the outer conductor (1), a plurality of injection holes I (6) corresponding to the positioning pieces one by one are arranged at the end part of the outer conductor (1), the injection holes I (6) are communicated with the sealing grooves I (4) through the positioning pieces I, a plurality of annular sealing grooves II (5) are arranged at the joint of the inner conductor (3) and the ceramic window (2), a plurality of positioning pieces II used for connecting the sealing grooves II (5) are arranged at equal angles in the circumferential direction of the ceramic window (2), a plurality of injection holes II (7) corresponding to the positioning pieces II are arranged at the end part of the ceramic window (2), and the injection holes II (7) are communicated with the sealing grooves II (5) through the positioning pieces II; the first locating piece comprises a plurality of groups of arc locating pipes (8), guide blocks (9) and springs (11), the locating pipes (8) are matched with the first sealing groove (4), a plurality of guide cavities (10) are formed in the outer conductor (1) at equal angles in the circumferential direction, the guide blocks (9) are slidably matched in the guide cavities (10) and are connected with the bottoms of the guide cavities (10) through the springs (11), the locating pipes (8) are connected with the guide blocks (9), sealing holes (12) communicated with the guide cavities (10) are formed in the locating pipes (8) and the guide blocks (9), and the first injection holes (6) are communicated with the guide cavities (10); the two-dimensional ceramic window comprises a positioning piece and is characterized in that the positioning piece comprises a plurality of groups of arc-shaped positioning pipes II (13), a guide block II (14) and a spring II (16), the positioning pipes II (13) are matched with the sealing groove II (5), a plurality of guide cavities II (15) are formed in the inner ring of the ceramic window (2) at equal angles, the guide block II (14) is slidably matched in the guide cavities II (15) and is connected with the bottom of the guide cavities II (15) through the spring II (16), the positioning pipes II (13) are connected with the guide block II (14), sealing holes II (17) communicated with the guide cavities II (15) are formed in the positioning pipes II (13) and the guide block II (14), and the injection holes II (7) are communicated with the guide cavities II (15).
2. A vacuum feedthrough according to claim 1, characterized in that: the number of the positioning pipes (8) and the number of the positioning pipes II (13) are at least four.
3. A method of manufacturing a vacuum feedthrough employing a vacuum feedthrough according to any one of claims 1-2, comprising the steps of:
step one: processing the outer conductor, the inner conductor and the sealing groove I, the sealing groove II, the injection hole I, the injection hole II, the guide cavity and the guide cavity II by using a processing center, wherein the injection hole I is communicated with the guide cavity, and the injection hole II is communicated with the guide cavity II;
step two: connecting a tubular guide block with a tubular positioning tube and adapting the tubular positioning tube in a guide cavity, connecting the tubular positioning tube and the guide block with the guide cavity through a spring, and communicating the positioning tube and a sealing hole on the guide block with the guide cavity; the second tubular guide block is connected with the second tubular positioning tube and is adapted in the second guide cavity, and is connected with the second guide cavity through the second spring, and the second positioning tube and the second sealing hole on the second guide block are communicated with the second guide cavity;
step three: inserting an inner conductor into the ceramic window, embedding a positioning tube II into a sealing groove II under the action of a spring II, then injecting sealant from a sealant injection hole II, enabling the sealant to enter the sealing groove II along the sealant injection hole II, a guide cavity II and the sealing hole II, and forming an annular sealing ring in the sealing groove II; the ceramic window is inserted into the outer conductor, the positioning tube is embedded into the first sealing groove under the action of the spring, then the sealant is injected from the first sealant injection hole, the sealant enters the first sealing groove along the first sealant injection hole, the guide cavity and the sealing hole, and an annular sealing ring is formed in the first sealing groove.
4. A method of manufacturing a vacuum feedthrough according to claim 3, characterized in that: the sealant is a polyurethane material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202110717227.8A CN113418004B (en) | 2021-06-28 | 2021-06-28 | Vacuum feedthrough and method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202110717227.8A CN113418004B (en) | 2021-06-28 | 2021-06-28 | Vacuum feedthrough and method for producing the same |
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CN113418004A CN113418004A (en) | 2021-09-21 |
CN113418004B true CN113418004B (en) | 2024-04-16 |
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CN202110717227.8A Active CN113418004B (en) | 2021-06-28 | 2021-06-28 | Vacuum feedthrough and method for producing the same |
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AU6241400A (en) * | 1996-12-05 | 2000-12-07 | Lattice Intellectual Property Limited | Installing pipes |
CN2521447Y (en) * | 2001-12-31 | 2002-11-20 | 孙文华 | Sealing device |
DE10334394B3 (en) * | 2003-07-28 | 2004-11-18 | Tuilaser Ag | Current through-feed for laser has electrical conductor fitted through sealed opening in laser housing provided with flexible electrical connection elements at its inner end |
CN101714708A (en) * | 2008-10-07 | 2010-05-26 | 安德鲁有限责任公司 | Inner conductor sealing insulator for coaxial connector |
CN202363706U (en) * | 2011-11-22 | 2012-08-01 | 安徽华东光电技术研究所 | Novel coaxial energy feed-in terminal |
CN104625634A (en) * | 2014-12-30 | 2015-05-20 | 江苏安德信超导加速器科技有限公司 | Feedthrough processing and welding process |
CN204533835U (en) * | 2014-12-25 | 2015-08-05 | 江苏德佐电子科技有限公司 | A kind of vacuum feedthroughs |
CN205745323U (en) * | 2016-06-22 | 2016-11-30 | 无锡惠山泵业有限公司 | A kind of preferable cock of sealing effectiveness |
CN110112611A (en) * | 2019-04-25 | 2019-08-09 | 中国科学院声学研究所 | A kind of pressure balance type high-voltage electricity crossing cabin connector and connection method |
CN211344159U (en) * | 2019-12-31 | 2020-08-25 | 成都川硬合金材料有限责任公司 | A high-tight sealing ring |
CN213212501U (en) * | 2020-11-09 | 2021-05-14 | 镇江南方电子有限公司 | A kind of sealing structure for N-type connector |
-
2021
- 2021-06-28 CN CN202110717227.8A patent/CN113418004B/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU6241400A (en) * | 1996-12-05 | 2000-12-07 | Lattice Intellectual Property Limited | Installing pipes |
CN2521447Y (en) * | 2001-12-31 | 2002-11-20 | 孙文华 | Sealing device |
DE10334394B3 (en) * | 2003-07-28 | 2004-11-18 | Tuilaser Ag | Current through-feed for laser has electrical conductor fitted through sealed opening in laser housing provided with flexible electrical connection elements at its inner end |
CN101714708A (en) * | 2008-10-07 | 2010-05-26 | 安德鲁有限责任公司 | Inner conductor sealing insulator for coaxial connector |
CN202363706U (en) * | 2011-11-22 | 2012-08-01 | 安徽华东光电技术研究所 | Novel coaxial energy feed-in terminal |
CN204533835U (en) * | 2014-12-25 | 2015-08-05 | 江苏德佐电子科技有限公司 | A kind of vacuum feedthroughs |
CN104625634A (en) * | 2014-12-30 | 2015-05-20 | 江苏安德信超导加速器科技有限公司 | Feedthrough processing and welding process |
CN205745323U (en) * | 2016-06-22 | 2016-11-30 | 无锡惠山泵业有限公司 | A kind of preferable cock of sealing effectiveness |
CN110112611A (en) * | 2019-04-25 | 2019-08-09 | 中国科学院声学研究所 | A kind of pressure balance type high-voltage electricity crossing cabin connector and connection method |
CN211344159U (en) * | 2019-12-31 | 2020-08-25 | 成都川硬合金材料有限责任公司 | A high-tight sealing ring |
CN213212501U (en) * | 2020-11-09 | 2021-05-14 | 镇江南方电子有限公司 | A kind of sealing structure for N-type connector |
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CN113418004A (en) | 2021-09-21 |
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