CN113406788B - Optical path changing device and optical interference system - Google Patents
Optical path changing device and optical interference system Download PDFInfo
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- CN113406788B CN113406788B CN202110844664.6A CN202110844664A CN113406788B CN 113406788 B CN113406788 B CN 113406788B CN 202110844664 A CN202110844664 A CN 202110844664A CN 113406788 B CN113406788 B CN 113406788B
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- 230000003287 optical effect Effects 0.000 title abstract description 80
- 230000007246 mechanism Effects 0.000 abstract description 51
- 230000001681 protective effect Effects 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 6
- 238000009434 installation Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 210000001110 axial length eye Anatomy 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
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Abstract
The invention discloses an optical path changing device and an optical interference system, comprising a driving motor, a turntable mechanism, a reference arm, a first collimator and a first reflecting mirror, wherein the reference arm can integrally rotate with the turntable mechanism, the reference arm comprises a triangular reflecting mirror for changing the optical path, and the triangular reflecting mirror comprises a first reflecting mirror, a second reflecting mirror and a third reflecting mirror which are intersected in pairs. The optical path changing device and the optical interference system can realize continuous changing of the optical path, and are high in efficiency and convenient to operate.
Description
Technical Field
The present invention relates to the field of optical path interference technology, and in particular, to an optical path changing device and an optical interference system.
Background
Michelson interferometers are one of the most common types of optical interferometers. The principle of the michelson interferometer is that one beam of incident light is divided into two beams by a spectroscope and then reflected by the corresponding plane mirror, and because the two beams have the same frequency, the same vibration direction and constant phase difference (namely, meet the interference condition), interference can occur. Interference occurs when the optical path difference of the two beams is within the range of the coherence length.
The present optical biological measuring instrument for measuring the eye axial length uses the principle, however, in order to achieve the axial resolution, the optical biological measuring instrument for ophthalmology generally adopts a broadband SLD light source with the 3dB bandwidth of 50nm, and the coherence length of the optical biological measuring instrument for ophthalmology is only tens of micrometers, which requires that the reference arm has the capability of continuously changing the optical path length so as to match the micrometer-scale coherence length of the light source.
At present, the optical biological measuring instrument based on the method adopts a linear slide rail mode for changing the optical path of a reference arm, has low optical path changing speed, and is difficult to realize continuous optical path changing.
Disclosure of Invention
The invention aims to provide an optical path changing device and an optical interference system, which can conveniently change the optical path, and have the advantages of high speed, high efficiency and large optical path changing range.
The technical scheme of the invention provides an optical path changing device, which comprises a driving motor, a turntable mechanism arranged on the driving motor, at least one reference arm arranged on the turntable mechanism, a first collimator arranged on one side of the turntable mechanism and a first reflecting mirror arranged below the first collimator;
The reference arm is fixedly arranged on the turntable mechanism and can integrally rotate with the turntable mechanism;
The reference arm comprises a triangular reflector for changing the optical path, and the triangular reflector comprises a first reflecting lens, a second reflecting lens and a third reflecting lens which are intersected in pairs;
When the triangular reflector is positioned on the light paths of the first collimator and the first reflector, the light emitted from the first collimator can be reflected to the first reflector through the first reflector, the second reflector and the third reflector in sequence, and the light reflected by the first reflector can be reflected back to the first collimator through the third reflector, the second reflector and the first reflector in sequence.
In one optional technical scheme, the emergent light reflected to the first reflector by the third reflector is perpendicular to the first reflector.
In one optional aspect, the first reflecting mirror is perpendicular to the axis of the light hole of the first collimator;
The emergent light rays reflected to the first reflector by the third reflector are parallel to the axis of the light hole.
In one optional technical scheme, the first reflecting lens, the second reflecting lens and the third reflecting lens are perpendicularly intersected and connected in pairs;
The first reflecting mirror is positioned at the top of the second reflecting mirror and the third reflecting mirror;
The first reflecting mirror gradually inclines upwards from inside to outside along the radial direction of the turntable mechanism, and the inner side edge and the outer side edge of the first reflecting mirror are respectively parallel to the reference plane of the turntable mechanism;
in the vertical direction, the light hole of the first collimator is higher than the inner side edge of the first reflecting mirror and lower than the outer side edge of the first reflecting mirror;
The third reflecting mirror is connected with the inner side edge of the first reflecting mirror;
the second reflector is connected with the rear end edge of the first reflector along the rotation direction of the turntable mechanism.
In one alternative, the first reflecting mirror is mounted on the support part by a telescopic adjusting mechanism.
In one alternative, the turntable mechanism includes a disk and a mounting boss disposed on a top surface of the disk;
the disc is connected with an output shaft of the driving motor, and the reference arm is mounted on the side face of the mounting boss.
In one optional technical scheme, the reference arm further comprises a protection shell, the triangular reflector is installed in the protection shell, and the protection shell is connected with the installation boss through a fastener.
In one optional technical scheme, the protection shell comprises a first plate, a second plate and a third plate which are intersected in pairs;
the first reflecting mirror is bonded with the first plate, the second reflecting mirror is bonded with the second plate, and the third reflecting mirror is bonded with the third plate;
the side surface of the mounting boss is provided with a mounting inclined surface which gradually inclines downwards from inside to outside along the radial direction of the disc;
the first plate and the second plate are respectively provided with connecting lugs, each connecting lug is respectively connected with the installation boss through the fastener, and the third plate is attached to the installation inclined plane.
In one alternative, a plurality of reference arms are uniformly distributed on the turntable mechanism at intervals along the circumferential direction.
The technical scheme of the invention also provides an optical interference system which comprises a light source, a circulator, a detector, a coupler, a second collimator, a second reflecting mirror and the optical path changing device in any one of the technical schemes;
the light source, the circulator, the coupler, the second collimator and the second reflecting mirror are sequentially arranged at intervals;
the circulator, the coupler and the second collimator are sequentially connected through optical fibers;
the circulator and the coupler are connected with the detector through optical fibers respectively;
the coupler is connected with the first collimator through an optical fiber.
By adopting the technical scheme, the method has the following beneficial effects:
According to the optical path changing device and the optical interference system, the turntable mechanism is driven by the driving motor to rotate, the turntable mechanism drives the reference arm to continuously and circularly rotate, the collimated light of the first collimator firstly strikes the first reflecting mirror of the triangular reflector, the first reflecting mirror reflects the light onto the second reflecting mirror, the second reflecting mirror reflects the light onto the third reflecting mirror, the third reflecting mirror reflects the light onto the first reflecting mirror, and the light reflected by the first reflecting mirror can return to the first collimator along the original optical path, so that the optical path is increased. The light returning to the first collimator can enter the coupler to interfere with the first path of light, so that the left and right of the optical signal are enhanced, and the optical signal is easier to be detected by the detector.
With the rotation of the driving motor, the optical path can be changed by more than 55mm when the optical path passes through one set of triangular reflector, and the optical path change amplitude is large. The optical path changing of one or more periods can be completed by rotating the driving motor for one circle, and the changing speed of the optical path and the cycle number can be arbitrarily improved by changing the rotating speed of the driving motor.
Drawings
FIG. 1 is a perspective view of an optical path changing device according to an embodiment of the present invention;
FIG. 2 is a top view of the reference arm mounted on the turntable mechanism;
FIG. 3 is a perspective view of the reference arm mounted on the turntable mechanism;
FIG. 4 is a perspective view of the turntable mechanism mounted on the drive motor;
FIG. 5 is a perspective view of a reference arm having a triangular mirror and a protective housing;
FIG. 6 is an exploded view of the triangular mirror and the protective housing;
FIG. 7 is a schematic view of the first mirror mounted on the support through a telescoping adjustment mechanism;
FIG. 8 is a schematic diagram of an optical interference system according to an embodiment of the present invention.
Detailed Description
Specific embodiments of the present invention will be further described below with reference to the accompanying drawings. Wherein like parts are designated by like reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to directions in the drawings, and the words "inner" and "outer" refer to directions toward or away from, respectively, the geometric center of a particular component.
As shown in fig. 1 to 3, an optical path changing device according to an embodiment of the present invention includes a driving motor 1, a turntable mechanism 2 provided on the driving motor 1, at least one reference arm 3 provided on the turntable mechanism 2, a first collimator 4 provided on one side of the turntable mechanism 2, and a first reflecting mirror 5 provided below the first collimator 4.
The reference arm 3 is fixedly mounted on the turntable mechanism 2 and is capable of rotating integrally with the turntable mechanism 2.
The reference arm 3 includes a triangular reflecting mirror 31 for changing an optical path, and the triangular reflecting mirror 31 includes a first reflecting mirror 311, a second reflecting mirror 312, and a third reflecting mirror 313 intersecting each other.
When the triangular reflecting mirror 31 is on the optical path of the first collimator 4 and the first reflecting mirror 5, the light emitted from the first collimator 4 can be reflected to the first reflecting mirror 5 through the first reflecting mirror 311, the second reflecting mirror 312 and the third reflecting mirror 313 in sequence, and the light reflected by the first reflecting mirror 5 can be reflected back to the first collimator 4 through the third reflecting mirror 313, the second reflecting mirror 312 and the first reflecting mirror 311 in sequence.
The optical path changing device provided by the invention is used for continuously changing the optical path.
The optical path changing device comprises a drive motor 1, a turntable mechanism 2, at least one reference arm 3, a first collimator 4 and a first mirror 5.
The turntable mechanism 2 is arranged on an output shaft of the driving motor 1, the driving motor 1 is a stepping motor, and the driving motor 1 can drive the turntable mechanism 2 to rotate.
The reference arm 3 is an optical structure for changing the optical path length for subsequent interference. The reference arm 3 is fixedly mounted on the turntable mechanism 2, and is capable of integrally rotating with the turntable mechanism 2.
The reference arm 3 comprises a triangular mirror 31 for changing the optical path. The triangular reflecting mirror 31 is composed of a first reflecting mirror 311, a second reflecting mirror 312 and a third reflecting mirror 313 intersecting with each other.
The first collimator 4 is located outside the turntable mechanism 2, which is used for beam collimation.
The first reflecting mirror 5 is located below the first collimator 4, and is configured to reflect the outgoing light of the third reflecting mirror 313.
As shown in fig. 1, when the triangular reflecting mirror 31 is rotated onto the optical path between the first collimator 4 and the first reflecting mirror 5, the light emitted from the first collimator 4 is directed to the first reflecting mirror 311 along arrow a, then reflected by the first reflecting mirror 311 to the second reflecting mirror 312 along arrow b, then reflected by the second reflecting mirror 312 to the third reflecting mirror 313 along arrow c, and finally reflected by the third reflecting mirror 313 to the first reflecting mirror 5 along arrow d. The first mirror 5 reflects light against arrow d to the third mirror 313, the third mirror 313 reflects light against arrow c to the second mirror 312, the second mirror 312 reflects light against arrow b to the first mirror 311, and the first mirror 311 reflects light against arrow a to the first collimator 4.
The light is emitted from the first collimator 4 to be reflected back to the first collimator 4 as an optical path changing period. Assuming that the optical path length of light from the first collimator 4 to the first reflecting mirror 311 is L 1, the optical path length of light from the first reflecting mirror 311 to the second reflecting mirror 312 is L 2, the optical path length of light from the second reflecting mirror 312 to the third reflecting mirror 313 is L 3, and the optical path length of light from the third reflecting mirror 313 to the first reflecting mirror 5 is L 4, the changed optical path length l=2 (L 1+ L2+ L3+ L4) in one optical path change period. The dimensions and angles of the first, second and third reflective lenses 311, 312 and 313 can be set as required, so that the optical path can be changed by more than 55mm when the optical path is reflected by one set of triangular reflective mirrors 31, the optical path change amplitude is large, and a better interference effect can be provided.
The optical path changing of one or more periods can be completed every time the driving motor 1 rotates, and the changing speed of the optical path and the cycle number can be arbitrarily increased by changing the rotating speed of the driving motor 1.
In one embodiment, as shown in fig. 1, the outgoing light beam reflected by the third mirror 313 to the first mirror 5 is perpendicular to the first mirror 5, so that all the light beams directed to the first mirror 5 are reflected by the first mirror 5 back to the third mirror 313 and then sequentially reflected back to the first collimator 4 through the third mirror 313, the second mirror 312 and the first mirror 311.
The outgoing light reflected to the first reflecting mirror 5 by the third reflecting mirror 313 may be perpendicular to the first reflecting mirror 5 by adjusting the angle or position of the first reflecting mirror 5.
It can be determined whether the outgoing light reflected by the third mirror 313 to the first mirror 5 is perpendicular to the first mirror 5 by the detector 600 shown in fig. 8.
Light returning to the first collimator 4 enters the coupler 300 and interferes with the collection of light returning from the second collimator 400.
The interference signal in the coupler 300 is strongest when all light emitted by the first collimator 4 is reflected back to the first collimator 4.
When the detector 600 detects that the optical signal is strongest, it indicates that the outgoing light reflected by the third mirror 313 to the first mirror 5 is perpendicular to the first mirror 5.
In one embodiment, as shown in fig. 1, the first reflecting mirror 5 is perpendicular to the axis of the light hole 41 of the first collimator 4, the outgoing light reflected by the third reflecting mirror 313 to the first reflecting mirror 5 is parallel to the axis of the light hole 41, so as to ensure that the incoming light of the first collimator 4 to the first reflecting mirror 311 is parallel to the outgoing light of the third reflecting mirror 313 to the first reflecting mirror 5, and is perpendicular to the first reflecting mirror 5, so that all the light is reflected by the first reflecting mirror 5.
The outgoing light reflected by the third mirror 313 to the first mirror 5 can be parallel to the axis of the light hole 41 by adjusting the inclination angle of the triangular mirror 31 on the turntable mechanism 2.
In one embodiment, as shown in fig. 1-3, the first reflecting mirror 311, the second reflecting mirror 312 and the third reflecting mirror 313 are perpendicularly connected to each other.
The first mirror 311 is on top of the second mirror 312 and the third mirror 313.
Wherein, in the radial direction along the turntable mechanism 2, the first reflective mirror 311 gradually slopes upward from inside to outside, and the inner side edge and the outer side edge of the first reflective mirror 311 are respectively parallel to the reference plane of the turntable mechanism 2.
In the vertical direction, the light hole 41 of the first collimator 4 is higher than the inner edge of the first reflection mirror 311 and lower than the outer edge of the first reflection mirror 311.
The third reflection lens 313 is connected to an inner edge of the first reflection lens 311.
The second reflecting mirror 312 is connected to the rear end edge of the first reflecting mirror 311 in the rotation direction along the turntable mechanism 2.
In this embodiment, the included angle of the triangular reflecting mirror 31 is a right angle, that is, the first reflecting mirror 311, the second reflecting mirror 312 and the third reflecting mirror 313 are perpendicularly intersected and connected.
When mounted, the first mirror 311 is above the second mirror 312 and the third mirror 313. The third reflection lens 313 is positioned at the inner edge of the first reflection lens 311. In the rotation direction along the turntable mechanism 2, the end of the first reflecting mirror 311 and the third reflecting mirror 313 passing through the first collimator 4 is referred to as a front end, and the end passing through the first collimator 4 is referred to as a rear end. The second reflection mirror 312 is connected to rear end edges of the first and third reflection mirrors 311 and 313.
In order to direct the light emitted from the first collimator 4 toward the first reflecting mirror 311, the first reflecting mirror 311 is arranged obliquely, specifically, the first reflecting mirror 311 is gradually inclined upward from inside to outside in the radial direction along the turntable mechanism 2, and the inner side edge and the outer side edge of the first reflecting mirror 311 are respectively parallel to the reference plane of the turntable mechanism 2. That is, the inner side edge of the first reflection mirror 311 is lower than the outer side edge thereof, and the first reflection mirror 311 is not inclined in the rotation direction along the dial mechanism 2. The reference plane of the turntable mechanism 2 may be the top surface of the disk 21 or the ground, which means that the front and rear end edges of the first reflection mirror 311 have the same height.
The second reflecting mirror 312 is kept perpendicular to the reference plane of the turntable mechanism 2, and the reflecting surface of the third reflecting mirror 313 is inclined upward and outward.
In the vertical direction, the light hole 41 of the first collimator 4 is between the inner and outer edges of the first reflecting mirror 311, so that the light emitted from the first collimator 4 can be directed to the first reflecting mirror 311, and then reflected by the second and third reflecting mirrors 312 and 313 in turn, and directed to the first reflecting mirror 5.
In one embodiment, as shown in fig. 7, the first reflecting mirror 5 is mounted on the support 6 by a telescopic adjustment mechanism 7.
The telescopic adjusting mechanism 7 can be a telescopic mechanism such as a screw, a cylinder or an oil cylinder. The telescopic end 71 of the adjusting mechanism 7 is connected with the first reflecting mirror 5 to drive the first reflecting mirror 5 to move.
Specifically, the base of the first mirror 5 is connected to the telescopic end 71.
The base of the first reflecting mirror 5 is connected with two adjusting mechanisms 7 according to the need, the telescopic ends 71 of the two adjusting mechanisms 7 are connected on the opposite angles of the base of the first reflecting mirror 5, and when the telescopic amounts of the two telescopic ends 71 are different, the angle of the first reflecting mirror 5 can be adjusted.
The telescopic end 71 is connected to the base of the first mirror 5 by means of a ball pin, and the first mirror 5 is swingable with respect to the telescopic end 71.
In one embodiment, as shown in fig. 2-4, the turntable mechanism 2 includes a disk 21 and a mounting boss 22 provided on the top surface of the disk 21.
The disk 21 is connected to the output shaft of the drive motor 1, and the reference arm 3 is mounted on the side of the mounting boss 22.
In this embodiment, the turntable mechanism 2 includes a disk 21 and a mounting boss 22, the mounting boss 22 is attached to the top surface of the disk 21, the mounting boss 22 is in the middle of the disk 21, and the reference arm 3 is mounted on the side surface of the mounting boss 22 by a fastener 23 (e.g., a bolt).
In one embodiment, as shown in fig. 1-6, the reference arm 3 further includes a protective housing 32, the triangular mirror 31 is mounted in the protective housing 32, and the protective housing 32 is connected to the mounting boss 22 by the fastener 23.
In the present embodiment, the protection of the triangular mirror 31 can be achieved by attaching the protection case 32 to the outside of the triangular mirror 31. When installed, the protective housing 32 is connected to the mounting boss 22 by the fastener 23.
In one embodiment, as shown in fig. 1-6, the protective housing 32 includes a first plate 321, a second plate 322, and a third plate 323 that intersect one another.
The first reflecting mirror 311 is bonded to the first plate 321, the second reflecting mirror 312 is bonded to the second plate 322, and the third reflecting mirror 313 is bonded to the third plate 323.
The side surface of the mounting boss 22 has a mounting slope 221, and the mounting slope 221 gradually slopes downward from inside to outside in the radial direction of the disk 21.
The first plate 321 and the second plate 322 are respectively provided with a connecting lug 324, each connecting lug 324 is respectively connected with the mounting boss 22 through a fastener 23, and the third plate 323 is attached to the mounting inclined surface 221.
In the present embodiment, the protection housing 32 is formed by two-to-two intersecting connection of a first plate 321, a second plate 322 and a third plate 323. The first reflection mirror 311 is adhered to the bottom surface of the first plate 321, the second reflection mirror 312 is adhered to the inner side surface of the second plate 322, and the third reflection mirror 313 is adhered to the inner side surface of the third plate 323. In order to facilitate the assembly of the protection housing 32 with the mounting boss 22, the side surface of the mounting boss 22 is provided with a mounting slope 221, the top of the mounting boss 22 being narrow and the lower portion being wide, so that the mounting slope 221 gradually slopes downward in the radial direction of the disk 21. Mounting holes 222 are respectively formed in the bottom corner and the top corner of the mounting inclined surface 221, connecting lugs 324 are respectively arranged on the first plate 321 and the second plate 322, each connecting lug 324 is respectively connected with the mounting boss 22 through a fastening piece 23, and the end part of the fastening piece 23 is fastened in the mounting hole 222. After installation, the third plate 323 is attached to the installation slope 221.
In one embodiment, as shown in fig. 1 to 3, a plurality of reference arms 3 are uniformly distributed on the turntable mechanism 2 at intervals along the circumferential direction.
The plurality of reference arms 3 are uniformly distributed along the circumferential direction of the turntable mechanism 2, and each reference arm 3 can change the optical path once when the turntable mechanism 2 is driven by the driving motor 1 to rotate for one circle, so that the efficiency of changing the optical path is improved, and the optical path can be continuously changed.
As shown in fig. 8, an optical interference system according to an embodiment of the present invention includes a light source 100, a circulator 200, a detector 600, a coupler 300, a second collimator 400, a second reflector 500, and an optical path changing device according to any of the foregoing embodiments.
The light source 100, the circulator 200, the coupler 300, the second collimator 400, and the second mirror 500 are sequentially spaced apart.
The circulator 200, the coupler 300 and the second collimator 400 are sequentially connected through optical fibers.
The circulator 200 and the coupler 300 are connected to the probe 600 through optical fibers, respectively.
The coupler 300 is connected to the first collimator 4 by an optical fiber.
The optical interference system provided by the embodiment can be used in medical equipment.
The optical interference system comprises a light source 100, a circulator 200, a detector 600, a coupler 300, a second collimator 400, a second mirror 500 and an optical path changing device.
For the structure, construction and operation principle of the optical path changing device, please refer to the description of the optical path changing device, and the description is omitted herein.
The light source 100 is an SLD light source, which is a broadband light source, for providing an interference light source.
The circulator 200 is used to protect the light source 100 from the reflected light to damage the light source 100.
The coupler 300 is used for splitting and combining light, and the splitting ratio can be arbitrarily set as needed.
The second collimator 400 is for collimating the light beam.
The second reflecting mirror 500 is used for reflecting the light emitted from the second collimator 400 back to the second collimator 400.
The detector 600 is used to monitor the optical signal.
Light from the light source 100 passes through the circulator 200 and enters the coupler 300. The coupler 300 splits the beam into two paths, a first path of beam propagating through the second collimator 400 and a second path of beam propagating through the first collimator 4. The first beam is used for actual detection or inspection, such as inspection of the length of the eye axis, and the second beam is used for changing the optical path length to interfere with the first beam in the coupler 300, and then the detector 600 can monitor the stronger optical signal for subsequent accurate operation.
After the first and second beams interfere at coupler 300, one beam passes directly to detector 600. The other beam is transmitted to the circulator 200 and then to the detector 600, so that no reflected light is transmitted to the light source 100, and thus the circulator 200 can prevent the reflected light from damaging the light source 100.
The above technical schemes can be combined according to the need to achieve the best technical effect.
What has been described above is merely illustrative of the principles and preferred embodiments of the present invention. It should be noted that several other variants are possible to those skilled in the art on the basis of the principle of the invention and should also be considered as the scope of protection of the present invention.
Claims (5)
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| CN102736234A (en) * | 2012-06-19 | 2012-10-17 | 天津市索维电子技术有限公司 | Hollow cube-corner prism optical delay line device with endogenous scale light source |
| CN205910705U (en) * | 2016-07-11 | 2017-01-25 | 深圳市兴通物联科技有限公司 | Optical prism and laser bar code scanning device |
| CN113574440A (en) * | 2019-03-06 | 2021-10-29 | 川崎重工业株式会社 | Light guide device |
| CN111557638A (en) * | 2020-06-10 | 2020-08-21 | 万灵帮桥医疗器械(广州)有限责任公司 | Reference arm device for ophthalmologic measuring apparatus |
| CN215867344U (en) * | 2021-07-26 | 2022-02-18 | 长沙安视康医疗科技有限公司 | Optical path changing device and optical interference system |
| CN219149041U (en) * | 2022-09-26 | 2023-06-09 | 广州明眸医疗科技有限公司 | Laser therapeutic instrument |
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