CN113390507B - Spectrum information acquisition method and spectrum detection device - Google Patents
Spectrum information acquisition method and spectrum detection device Download PDFInfo
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- CN113390507B CN113390507B CN202010168122.7A CN202010168122A CN113390507B CN 113390507 B CN113390507 B CN 113390507B CN 202010168122 A CN202010168122 A CN 202010168122A CN 113390507 B CN113390507 B CN 113390507B
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- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000001514 detection method Methods 0.000 title abstract description 29
- 238000001228 spectrum Methods 0.000 title description 48
- 230000003595 spectral effect Effects 0.000 claims abstract description 65
- 230000004044 response Effects 0.000 claims abstract description 62
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 238000012545 processing Methods 0.000 claims abstract description 9
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 238000009826 distribution Methods 0.000 claims description 13
- 239000011159 matrix material Substances 0.000 claims description 13
- 238000002834 transmittance Methods 0.000 claims description 13
- 238000011835 investigation Methods 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005316 response function Methods 0.000 description 3
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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Abstract
The invention provides a spectral information acquisition method and a spectral detection device. The spectral information acquisition method comprises the following steps: receiving light emitted from an object to be detected by adopting an optical system, irradiating the light on an array detector, and enabling the array detector to generate photoelectric response to the light; and processing the photoelectric response to obtain spectral information of the light, wherein the photoelectric response of the pixels of the array detector is modulated such that different pixels of the array detector have different photoelectric response curves for light in the spectral range under investigation.
Description
Technical Field
The invention relates to the field of spectral analysis, in particular to a spectral information acquisition method and a spectral detection device.
Background
Spectroscopic instruments are instruments that reveal the intensity distribution of electromagnetic radiation in terms of frequency or wavelength. The mainstream spectroscopic instrument adopts a grating as a spectroscopic device. The spectral resolution of the light split by the grating is influenced by the number of lines on the grating, the diffraction order and the focal length of the monochromator, the spectral resolution is high, and the area of the grating and the size of the monochromator are large; on the contrary, the grating monochromator has small volume and low spectral resolution. New spectral information acquisition methods or devices are needed while maintaining high spectral resolution and reducing the volume of the spectrometer.
Disclosure of Invention
Therefore, in order to overcome the above-mentioned drawbacks of the prior art, the present invention provides a spectral information acquisition method, comprising: receiving light emitted from an object to be detected by adopting an optical system, irradiating the light on an array detector, and enabling the array detector to generate photoelectric response to the light; and carrying out data processing on the photoelectric response to obtain the spectral distribution information of the light, wherein the photoelectric response of the pixel of the array detector is modulated, so that different pixels of the array detector have different photoelectric response curves for the light in the studied spectral range.
In one embodiment, before receiving the light emitted from the object to be measured by using the optical system, the method includes: the method comprises the steps of receiving monochromatic light with preset wavelength unit intensity by an array detector, and generating spectral response calibration information e (i, lambda) corresponding to the monochromatic light j ) The number of monochromatic light is consistent with the number of pixels, lambda j I is the wavelength of monochromatic light, and λ is the pixel at different positions corresponding to i 1 ≤λ j ≤λ 2 ，λ 1 Is the minimum wavelength, λ 2 Is the maximum wavelength.
In one embodiment, the data processing the photoelectric response to obtain the spectral distribution information of the light includes: calibrating information e (i, lambda) according to the spectral response j ) Generating an n-order calibration matrix corresponding to the light array detector, wherein n is the number of pixels; photoelectric response corresponding to each pixel and detected light
Constructing an n-order equation corresponding to the n-order calibration matrix, and calculating a unique solution of the n-order equation to obtain the spectral distribution information I (lambda) of the light j )。
The invention also provides a spectrum detection device, comprising: a spectrum modulation plate for modulating the light transmitted by the optical system; the array sensor is used for responding to the modulated light, generating photoelectric response, and performing data processing on the photoelectric response to obtain spectral information of the light, wherein different pixels of the array detector have different photoelectric response curves for the light in the researched spectral range.
In one embodiment, the picture elements are provided with a film layer with continuously changing transmittance response, so that different picture elements have one-to-one spectral transmittance.
In one embodiment, the film layer is formed by a coating method.
In one embodiment, the spectrum modulation panel is formed by any one of ion implantation, ion exchange, or printing.
The invention also provides a spectrum detection device for acquiring spectrum information, which comprises: the array sensor is used for responding to light transmitted by the optical system to generate photoelectric response, and performing data processing on the photoelectric response to obtain spectral information of the light, wherein pixels are arranged on the array sensor, and a film layer is arranged on the sensor, so that different pixels of the array detector have one-to-one corresponding spectral transmittance, and the array sensor has different photoelectric response curves for the light in the spectral range to be researched.
Compared with the prior art, the invention has the advantages that: the system retains all incident light energy, improves the spectral resolution, improves the spectral recognition sensitivity, and has simple structure, small volume, low cost and improved portability.
Drawings
FIG. 1 is a schematic diagram of a spectrum detection apparatus according to an embodiment of the present invention; and
fig. 2 is a schematic structural diagram of a spectrum detection apparatus according to another embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
Fig. 1 is a schematic structural diagram of a spectrum detection apparatus in an embodiment of the present invention.
As shown in fig. 1, the optical system 1 receives light emitted from an object to be detected and irradiates the spectral detection apparatus 100 with the light. The optical system 1 may be constituted by a lens, a mirror, a combination thereof, or the like.
The spectrum sensing apparatus 100 provided in this embodiment detects light transmitted by the optical system 1, generates a photoelectric response corresponding to the received light, and performs data processing on the photoelectric response to obtain spectrum information. The spectral detection apparatus 100 may be constituted by an array detector, wherein the photo-electric response of the picture elements of the array detector is modulated such that different picture elements of the array detector have different photo-electric response curves for light in the spectral range under investigation.
The photoelectric response of the spectrum detecting device 100 can be used
It is shown that e (I) is the output photoelectric response, e (I, λ) is the photoelectric response of the ith pixel corresponding to the monochromatic light with the incident wavelength λ one-to-one, I =1,2, \8230, N is the number of pixels, I (λ) is the incident light intensity, λ is the wavelength of the incident light 1 ≤λ≤λ 2 ，λ 1 Is the minimum wavelength, λ, of the input light 2 Is the maximum wavelength of the input light. When i is 1 ≠i 2 When function e (i) 1 λ) ≠ function e (i) 2 ,λ)，i 1 ,i 2 ＝1,2,…N，e(i 1 λ) is the i-th 1 Photoelectric response function of individual pixel element corresponding to monochromatic light of unit intensity with incident wavelength of lambda, e (i) 2 λ) is the i-th 2 And the photoelectric response function of each pixel element corresponding to the monochromatic light with the unit intensity of the incident wavelength lambda.
The spectrum detecting apparatus 100 may include a spectrum modulation board 10 and an array sensor 20.
The spectrum modulation plate 10 modulates incident light. The transmittance of the spectrum modulation panel 10 is not always 0. The transmittance (or reflectance) of the spectrum modulation panel 10 changes in a prescribed manner depending on the spatial position and the wavelength of light. The modulation mode of the spectrum modulation plate can be a film coating mode, but is not limited to film coating, and can also be formed by any other mode such as ion implantation, ion exchange or printing.
When the spectrum modulation board is prepared in a coating mode, the spectrum modulation board can modulate the transmittance (or the reflectivity) of the spectrum modulation board by adjusting the thickness of the coating.
The array sensor 20 generates a photoelectric response in response to the incident light modulated by the spectrum modulation plate 10. The sensor 2 may be a common CMOS or CCD chip. The CMOS (or CCD) chip is provided with a plurality of picture elements 21 which generate photoelectric responses independently of each other. The picture elements 21 may also be provided with a film layer having a continuously varying transmittance response such that different picture elements have a one-to-one correspondence of spectral transmittance. Wherein the photoelectric response output of each pixel element 21 on the spectrum detection device to the received light is
I =1,2, \8230 \ 8230, N is pixel number, I (lambda) i ) Is the wavelength lambda of the light to be measured j The intensity distribution of (a).
The film layers on the spectrum modulation board and the array sensor can be generated by adopting chemical coating or physical coating, and the final measured spectrum distribution of each pixel in the array sensor accords with the following formula:
I(λ j )＝[e(i,λ j )] -1 [e(i)]，
wherein e (i, λ) j ) Is the ith pixel element and the incident wavelength is lambda j The photoelectric response corresponding to the monochromatic light of unit intensity,
[e(i,λ j )] -1 is [ e (i, λ) ] j )]The inverse of the matrix of (a) is,
e (i) is the output photoelectric response.
Fig. 2 is a schematic structural diagram of a spectrum detection apparatus according to another embodiment of the present invention.
In another embodiment, as shown in fig. 2, the spectrum detecting device 200 may only include the array sensor 30, and the array sensor 30 may be provided with a coating 32 on each pixel 31, so that the photoelectric response of each pixel satisfies the one-to-one spectral response relationship; the sensor 3 may also be provided with a coating on the window of the spectral detection means, so that the picture elements 31 below the window output spectral information corresponding to the one-to-one spectral responses. The film layer can be generated on the picture element by means of optical coating or photolithography.
Or a film layer with continuously changed transmissivity response can be coated on a window, into which the incident light of the sensor of the spectrum detection device enters, in an optical coating mode or other modes, so that different pixels behind the film layer have one-to-one corresponding spectrum transmissivity. The product of the spectral transmittance function and the spectral response function of the pixel itself determines the spectral response matrix of the device.
Different pixels have one-to-one spectral transmittance with respect to incident light of different wavelengths, and the different pixels have different transmittance curves for monochromatic light within the spectral range under study, so that the different pixels have different photoelectric response curves for monochromatic light within the spectral range under study.
In the spectrum detection device, the spectrum resolution is only related to the number of pixels, and the higher the number of pixels is, the higher the spectrum resolution is. However, the relation between the spectral resolution and the volume of the pixel and the volume of the detector is not large, so that a complex optical system is not needed in the mode of acquiring the spectrum. The spectrum detection device of the embodiment is simple in structure, a light splitting device in the spectrum detection device is only an array spectrum detection device which modulates the spectral response of the pixel, the size can be set according to needs, no moving part is arranged, the structure is firm and compact, and the manufacturing process is simple. Moreover, each pixel can receive light with all wavelengths and generate photoelectric response when in work, so that the light flux analyzable by the spectrum detection device is far higher than that of the existing equipment under the same condition, and the detection and analysis of weak signals in incident light are facilitated.
The embodiment also provides a spectral information acquisition method, which comprises the following steps:
an optical system is adopted to receive light emitted from an object to be detected, so that the light irradiates on an array detector, and the array detector generates photoelectric response to the light;
the photoelectric response is processed to obtain the spectral information of the light,
wherein the photo-electric response of the picture elements of the array detector is modulated such that different picture elements of the array detector have different photo-electric response curves for light in the spectral range under investigation.
After different monochromatic lights pass through the modulation plate and the sensors, the relationship between the different monochromatic lights and the response output by the spectrum detection device is in one-to-one correspondence, so that a unique solution is ensured.
Before the spectrum detection device is adopted to receive incident light of a sample to be detected, the spectrum detection device needs to be calibrated and tested, and the calibration and test comprises the following contents: receiving monochromatic light with unit intensity of preset wavelength by adopting an array detector, and generating spectral response calibration information e (i, lambda) corresponding to the monochromatic light j ) The number of monochromatic light is the same as the number of pixels, lambda i Is the wavelength of monochromatic light.
i corresponds to picture elements at different positions, i =1,2, \8230, N is the number of picture elements. Can separate the wavelength interval [ lambda ] 1 ，λ 2 ]Dividing into N-1 equal parts to obtain N lambda beams with different wavelengths j . The device is calibrated by adopting monochromatic light with N wavelengths, namely monochromatic light I with unit intensity o (λ j ) As an inputThe signal is illuminated on the spectral detection means and the photoelectric output signal of the detector is measured. Detector for each lambda j Can obtain corresponding e (i, lambda) j ). The wavelength used for calibration here is λ j Bandwidth delta lambda of monochromatic light j The method comprises the following steps:
δλ j ＜(λ 2 -λ 1 )/(N-1)。
in another embodiment, the frequency interval [ v ] may be divided 1 ,ν 2 ]Dividing into N-1 equal parts to obtain v with N different wavelengths j . The detector is used for each v j The corresponding e (i, v) can be obtained j )。
In another embodiment, the data processing of the photo-electric response to obtain information on the spectral distribution of the light comprises:
Irradiating the spectrum detection device by adopting different monochromatic lights, recording test data irradiated by the detector, and obtaining a spectral response matrix element e (i, lambda) j ) And correspondingly forming a matrix by the spectral response matrix elements according to the position of the pixel element i on the detector. Receiving electromagnetic wave I (lambda), lambda to be measured by a spectrum detection device 1 ≤λ≤λ 2 ，λ 1 Is the minimum wavelength, λ 2 Is the maximum wavelength.
Mixing e (i, λ) i ) Generating an n-order calibration matrix corresponding to the spectrum detection device, namely obtaining a coefficient matrix:
i, j =1,2, \8230, N is the number of pixels.
Step 2, according to each pixel and photoelectric response corresponding to the measured light
Constructing an n-order equation corresponding to the n-order calibration matrix, and calculating a unique solution of the n-order equation to obtain the light of the lightInformation of spectral distribution I (lambda) j )。
Photoelectric response
So I (λ) j )＝[e(i,λ j )] -1 [e(i)]. The corresponding wavelength of light can be reversely deduced according to the detected photoelectric response, so as to obtain the spectral distribution information I (lambda) of the light j ). In the embodiment, the modulation mode corresponding to the spectral response of the pixel one by one ensures that the linear equation set of the n-th-order determinant has a unique solution.
The spectrum generated by the spectrum detection device can be represented by a function of the light intensity along with the wavelength, a function of the light intensity along with the frequency, and a transformation function of the light intensity along with the wave number.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention. The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (1)
1. A spectral information acquisition method, comprising:
receiving light emitted from an object to be detected by adopting an optical system, irradiating the light on an array detector, and enabling the array detector to generate photoelectric response to the light;
processing the photoelectric response to obtain the spectral distribution information of the light, wherein the spectral distribution information is represented by a function of light intensity changing along with wavelength, a function of light intensity changing along with frequency, or a function of light intensity changing along with wave number,
wherein the photoelectric response of the pixels of the array detector is modulated, different pixels have a one-to-one correspondence spectral transmittance with incident light of different wavelengths, and different pixels have different transmittance curves for monochromatic light within a spectral range under study, so that different pixels of the array detector have different photoelectric response curves for light within the spectral range under study,
before the optical system is adopted to receive the light emitted from the object to be measured, the method comprises the following steps:
the method comprises the steps of receiving monochromatic light with preset wavelength unit intensity by adopting an array detector, and generating spectral response calibration information e (i, lambda) corresponding to the monochromatic light j ) The number of the monochromatic light is consistent with that of the pixels, lambda j I is the wavelength of monochromatic light, and λ is the pixel at different positions corresponding to i 1 ≤λ j ≤λ 2 ，λ 1 Is the minimum wavelength, λ 2 Is the maximum wavelength of the light emitted by the light source,
the data processing of the photoelectric response to obtain the spectral distribution information of the light includes:
calibrating information e (i, lambda) according to the spectral response j ) Generating an n-order calibration matrix corresponding to the array detector, wherein n is the number of pixels;
photoelectric response corresponding to each pixel and the light to be measured
Constructing an n-order equation corresponding to the n-order calibration matrix, and calculating a unique solution of the n-order equation to obtain the spectral distribution information I (lambda) of the light j ）。
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