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CN113380278B - Optical disk reading method, reading device and optical disk reading and writing device based on nano photoetching - Google Patents

Optical disk reading method, reading device and optical disk reading and writing device based on nano photoetching Download PDF

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CN113380278B
CN113380278B CN202110772423.5A CN202110772423A CN113380278B CN 113380278 B CN113380278 B CN 113380278B CN 202110772423 A CN202110772423 A CN 202110772423A CN 113380278 B CN113380278 B CN 113380278B
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optical disc
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CN113380278A (en
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王中阳
张力
孙静
高琪
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Shanghai Advanced Research Institute of CAS
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/09Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B7/0908Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only

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Abstract

The invention provides an optical disk reading method, an optical disk reading device and an optical disk reading and writing device based on nano photoetching. The technical scheme of the invention comprises the following steps: forming a white light source, and focusing and irradiating the white light source on an information recording point of a recording layer of the physical storage medium of the optical disk; collecting a measurement light signal; obtaining the depth information w of the continuous writing groove on the recording layer of the optical disc physical storage medium in advance k And its corresponding digital storage information s k Reflectance measurement spectral information ref k The association relationship of (a); obtaining reflectance measurement spectral information ref from the measurement optical signal k ' thereafter, the reflectance measurement spectrum information ref matched with the correlation is searched in the correlation k Corresponding continuous writing groove depth information w k Further, the continuous writing groove depth information w k Digital storage information s of the corresponding information recording point k Reading out, so as to effectively improve the reading speed and resolution capability of the optical disc information and greatly improve the storage density and storage dimension of the optical disc.

Description

基于纳米光刻的光盘读取方法、读取装置及光盘读写装置Optical disc reading method, reading device and optical disc reading and writing device based on nano-lithography

本申请是同一申请人的申请日为2018-11-20、申请号为2018113839605、发明名称为“基于纳米光刻的光盘读写方法及刻写控制信息编解码方法”的中国发明专利申请的分案申请。This application is a divisional case of a Chinese invention patent application filed by the same applicant with an application date of 2018-11-20, an application number of 2018113839605, and an invention title of "A method for reading and writing optical discs based on nanolithography and a method for encoding and decoding writing control information" Apply.

技术领域technical field

本发明涉及光学技术领域,特别是涉及基于纳米光刻的光盘读取方法、读取装置及光盘读写装置。The invention relates to the field of optical technology, in particular to a method for reading an optical disc based on nano-lithography, a reading device and an optical disc reading and writing device.

背景技术Background technique

随着基因测序以及脑活动读取等技术的发展,不仅仅产生了大量的数据,同时对于数据如何有效、稳定、准确地保存提出了更高的要求。基于上述背景,光盘存储技术因其节能、存储寿命长、安全性好以及易加工等优点,很好地顺应了时代的要求。而对于光盘技术而言,存储容量的限制严重阻碍了光盘技术的发展。With the development of technologies such as gene sequencing and brain activity reading, not only a large amount of data is generated, but also higher requirements are put forward for how to store the data effectively, stably and accurately. Based on the above-mentioned background, the optical disk storage technology has well adapted to the requirements of the times due to its advantages of energy saving, long storage life, good safety and easy processing. As for optical disc technology, the limitation of storage capacity seriously hinders the development of optical disc technology.

为了提升光盘的容量,传统的技术路线是减小记录光斑的尺寸。随着短波长激光二极管(GaN蓝绿色激光器)的研制成功,使得蓝光光盘逐渐成为光盘市场上的主流存储方式。早期的CD光盘,记录激光波长为780nm,数值孔径为0.45,轨道间距为1.6μm,单层存储容量仅为650MB;后来的DVD光盘,记录激光波长为650nm,数值孔径为0.6,轨道间距为0.74μm,单层存储容量为4.7GB;而目前的蓝光光盘记录激光波长为405nm,数值孔径为0.85,轨道间距为0.32μm,轨道间距仅仅是红光DVD盘片(0.74μm)的一半,单层存储容量高达25GB,同时,蓝光光盘利用不同反射率达到多层写入效果,实现了12层300GB的蓝光光盘存储。In order to increase the capacity of the optical disc, the traditional technical route is to reduce the size of the recording spot. With the successful development of short-wavelength laser diodes (GaN blue-green lasers), Blu-ray discs have gradually become the mainstream storage method in the optical disc market. In the early CD discs, the recording laser wavelength was 780nm, the numerical aperture was 0.45, the track pitch was 1.6μm, and the single-layer storage capacity was only 650MB; the later DVD discs had a recording laser wavelength of 650nm, the numerical aperture was 0.6, and the track pitch was 0.74 μm, the single-layer storage capacity is 4.7GB; while the current Blu-ray disc recording laser wavelength is 405nm, the numerical aperture is 0.85, the track pitch is 0.32μm, and the track pitch is only half of that of the red DVD disc (0.74μm). The storage capacity is as high as 25GB. At the same time, the Blu-ray disc uses different reflectivity to achieve multi-layer writing effect, realizing 12 layers of 300GB Blu-ray disc storage.

为了进一步突破光盘存储量的限制,科研工作者也提出了一些提升存储容量的方法。2009年澳大利亚的顾敏研究团队利用不同长宽比的金纳米线对不同波长和偏振方向激光的响应差异,实现了厚度内,三层五维(以及偏振)光信息存储(Nature,2009,459(7245):410-413)。2011年,S.W Hell研究团队提出了一种可用于超分辨光存储读写的新型显微技术RESOLFT(reversible saturable optical‘fluorescence’transition between twostates),利用绿色荧光蛋白(rsEGFP)的光固化和光开关特性,通过超分辨写入读出的方法,实现了250nm点间距的高密度光存储实验(Nature,2011,478,204-208)。2012年澳大利亚的顾敏研究团队结合光致聚合以及超分辨受激辐射损耗技术原理,利用1,5-双(对二甲氨基辛酰亚胺)环戊酮(BDCC)材料体系,实现了9nm的光刻沟道宽度,52nm的沟道间距(Nature Communications,2013,4.6:2061),利用该光致聚合光刻的机制可高密度写入光盘信息。据此,顾敏研究团队申请了国际专利(Appl.No:15/039,368;PCT No:PCT/AU2013/001378)。In order to further break through the limitation of optical disk storage capacity, researchers have also proposed some methods to increase storage capacity. In 2009, Gu Min's research team in Australia used the difference in the response of gold nanowires with different aspect ratios to laser light of different wavelengths and polarization directions to realize three-layer five-dimensional (and polarization) optical information storage within the thickness (Nature, 2009, 459 (7245):410-413). In 2011, the S.W Hell research team proposed a new microscopic technology RESOLFT (reversible saturated optical'fluorescence'transition between twostates) that can be used for super-resolution optical storage reading and writing, using the photocuring and photoswitching properties of green fluorescent protein (rsEGFP) , through the method of super-resolution writing and reading, a high-density optical storage experiment with a pitch of 250nm was realized (Nature, 2011, 478, 204-208). In 2012, Gu Min's research team in Australia combined the principles of photopolymerization and super-resolution stimulated radiation loss technology, and used the 1,5-bis(p-dimethylaminooctaneimide) cyclopentanone (BDCC) material system to achieve a 9nm The lithographic channel width is 52nm and the channel pitch is 52nm (Nature Communications, 2013, 4.6:2061). Using this photopolymerization lithography mechanism, the optical disc information can be written in high density. Accordingly, Gu Min's research team applied for an international patent (Appl. No: 15/039,368; PCT No: PCT/AU2013/001378).

发明内容Contents of the invention

本发明的目的在于提供基于纳米光刻的光盘读取方法、读取装置及光盘读写装置,以提升光盘的读取速度。The purpose of the present invention is to provide an optical disc reading method, a reading device and an optical disc reading and writing device based on nano-lithography, so as to increase the reading speed of the optical disc.

为实现上述目的及其他相关目的,本发明提供一种基于纳米光刻的光盘读取方法,包括:形成白光光源,并将其聚焦照射于光盘物理存储介质的记录层的一信息记录点;收集测量光信号;所述测量光信号中包括所述信息记录点的由其各刻写沟槽的反射光场相干叠加而成的总反射光场

Figure BDA0003154257560000021
其中,/>
Figure BDA0003154257560000022
为所述信息记录点的第i个刻写沟槽的反射光场;E0为未刻写沟槽的反射光场;m为所述信息记录点的数据存储位点的位数;“0”和“1”数码分别表示所述信息记录点的数据存储位点是否有刻写沟槽;n1(λ)为所述光盘物理存储介质的记录层的折射率,其依赖于刻写光束的波长λ;Zi为第i个刻写沟槽的深度信息,Z0=0表示未刻写的沟槽深度信息为0;l0为所述记录层的厚度;
Figure BDA0003154257560000023
Δn=n1-n0,n0为空气的折射率;预先获得所述光盘物理存储介质的记录层上的连续刻写沟槽深度信息wk及其对应的数字存储信息sk、反射测量光谱信息refk的关联关系;在从所述测量光信号中得到反射测量光谱信息refk′后,在所述关联关系中查找与之匹配的反射测量光谱信息refk所对应的连续刻写沟槽深度信息wk,进而将该连续刻写沟槽深度信息wk对应的所述信息记录点的数字存储信息sk读出。In order to achieve the above object and other related objects, the present invention provides a method for reading an optical disc based on nanolithography, comprising: forming a white light source, and focusing and irradiating it on an information recording point of the recording layer of the physical storage medium of the optical disc; collecting Measuring optical signal; the measuring optical signal includes the total reflected light field coherently superimposed by the reflected light fields of the writing grooves of the information recording point
Figure BDA0003154257560000021
where, />
Figure BDA0003154257560000022
Be the reflected light field of the i-th writing groove of the information recording point; E 0 is the reflected light field of the unwritten groove; m is the number of bits of the data storage position of the information recording point; "0" and The numbers "1" respectively indicate whether there is a writing groove at the data storage point of the information recording point; n 1 (λ) is the refractive index of the recording layer of the physical storage medium of the optical disc, which depends on the wavelength λ of the writing beam; Z i is the depth information of the i-th written groove, Z 0 =0 means that the depth information of the unwritten groove is 0; l 0 is the thickness of the recording layer;
Figure BDA0003154257560000023
Δn=n 1 -n 0 , n 0 is the refractive index of air; obtain in advance the continuously written groove depth information w k on the recording layer of the optical disc physical storage medium and its corresponding digital storage information s k , reflection measurement spectrum The association relationship of information ref k ; after obtaining the reflection measurement spectrum information ref k ' from the measurement optical signal, search for the corresponding continuous writing groove depth corresponding to the reflection measurement spectrum information ref k in the association relationship information w k , and then read out the digital storage information sk of the information recording point corresponding to the continuously written groove depth information w k .

于本发明一实施例中,所述方法还包括:将白光光源聚焦照射于所述光盘物理存储介质的记录层的下一信息记录点;根据下一信息记录点的测量光信号与所述关联关系得到下一信息记录点的数字存储信息,直至读出所有信息记录点的数字存储信息skIn an embodiment of the present invention, the method further includes: focusing and irradiating a white light source on the next information recording point of the recording layer of the optical disc physical storage medium; according to the measurement optical signal of the next information recording point and the correlation The relationship is to obtain the digital storage information of the next information recording point until the digital storage information sk of all information recording points is read out.

为实现上述目的及其他相关目的,本发明提供一种从反射测量光谱中解码出光刻信息的方法,包括:预先建立光盘物理存储介质的记录层上的连续刻写沟槽深度信息wk及其对应的数字存储信息sk、反射测量光谱信息refk的关联关系;其中,各反射测量光谱信息refk构成反射测量光谱集

Figure BDA0003154257560000024
在获得经测量得到的一信息记录点的反射光谱信息refk′时,在所述关联关系中查找与之匹配的反射测量光谱信息refk所对应的连续刻写沟槽深度信息wk,进而将该连续刻写沟槽深度信息wk对应的数字存储信息sk作为解码得到的所述信息记录点的数字存储信息。In order to achieve the above object and other related objects, the present invention provides a method for decoding lithographic information from the reflectance measurement spectrum, including: establishing in advance the continuous writing groove depth information w k and its Corresponding relationship between digital storage information s k and reflection measurement spectral information ref k ; wherein, each reflection measurement spectral information ref k constitutes a reflection measurement spectrum set
Figure BDA0003154257560000024
When obtaining the measured reflection spectrum information ref k ′ of an information recording point, search for the corresponding continuously written groove depth information w k corresponding to the reflection measurement spectrum information ref k in the correlation relationship, and then write The digital storage information sk corresponding to the continuous writing groove depth information w k is used as the digital storage information of the information recording point obtained by decoding.

为实现上述目的及其他相关目的,本发明提供一种基于纳米光刻的光盘读取装置,包括:光路模块,用于形成白光光源,并将其聚焦照射于光盘物理存储介质的记录层的一信息记录点;用于收集光测量信号;所述测量光信号中包括所述信息记录点的由其各深度信息刻写沟槽的反射光场相干叠加而成的总反射光场

Figure BDA0003154257560000031
其中,
Figure BDA0003154257560000032
为所述信息记录点的第i个刻写沟槽的反射光场;E0为未刻写沟槽的反射光场;m为所述信息记录点的数据存储位点的位数;“0”和“1”数码分别表示所述信息记录点的数据存储位点处是否有刻写沟槽;n1(λ)为所述光盘物理存储介质的记录层的折射率,其依赖于刻写光束的波长λ;Zi为第i个刻写沟槽的深度,Z0=0表示未刻写的沟槽深度信息为0;l0为所述记录层的厚度;/>
Figure BDA0003154257560000033
Δn=n1-n0,n0为空气的折射率;处理模块,用于预先获得所述光盘物理存储介质的记录层上的连续沟槽刻写信息wk及其对应的反射测量光谱信息refk的关联关系;在从所述测量光信号中得到反射测量光谱信息refk后,在所述关联关系中查找与之匹配的反射测量光谱信息refk所对应的连续刻写沟槽信息wk,据以作为所述信息记录点的数字存储信息sk读出。In order to achieve the above object and other related objects, the present invention provides a nano-lithography-based optical disc reading device, including: an optical path module, used to form a white light source, and focus and irradiate it on a recording layer of the physical storage medium of the optical disc. Information recording point; used to collect optical measurement signals; the measurement optical signal includes the total reflection light field coherently superimposed by the reflection light fields of the depth information writing grooves of the information recording point
Figure BDA0003154257560000031
in,
Figure BDA0003154257560000032
Be the reflected light field of the i-th writing groove of the information recording point; E 0 is the reflected light field of the unwritten groove; m is the number of bits of the data storage position of the information recording point; "0" and The numbers "1" respectively indicate whether there is a writing groove at the data storage point of the information recording point; n 1 (λ) is the refractive index of the recording layer of the physical storage medium of the optical disc, which depends on the wavelength λ of the writing beam ;Z i is the depth of the i-th writing groove, Z 0 =0 means that the depth information of the unwritten groove is 0; l 0 is the thickness of the recording layer;/>
Figure BDA0003154257560000033
Δn=n 1 -n 0 , n 0 is the refractive index of air; the processing module is used to obtain in advance the continuous groove writing information w k on the recording layer of the physical storage medium of the optical disc and its corresponding reflection measurement spectral information ref The association relationship of k ; after obtaining the reflection measurement spectrum information ref k from the measurement optical signal, searching for the continuous writing groove information w k corresponding to the reflection measurement spectrum information ref k matching it in the association relationship, The digitally stored information sk is read out as said information recording point.

于本发明一实施例中,所述光路模块包括:光源、透镜组、高倍物镜、分束镜、及单个透镜;所述处理模块包括:光谱仪;其中,所述光源,用于发出白光;所述透镜组,用于将所述白光进行准直扩束并汇聚到所述分束镜;所述分束镜,用于对接收的白光进行分光并发射至所述高倍物镜;所述高倍物镜,用于将接收的白光聚焦作用于光盘物理存储介质的表面,以对其记录层进行反射测量,并将收集的测量光信号射出;所述单个透镜,用于将所述测量光信号汇聚至所述光谱仪;所述光谱仪,用于处理接收的测量光信号,并从中解码出数据存储信息。In an embodiment of the present invention, the optical path module includes: a light source, a lens group, a high-magnification objective lens, a beam splitter, and a single lens; the processing module includes: a spectrometer; wherein, the light source is used to emit white light; the The lens group is used to collimate and expand the white light and converge it to the beam splitter; the beam splitter is used to split the received white light and emit it to the high-power objective lens; the high-power objective lens , used to focus the received white light on the surface of the physical storage medium of the optical disc to perform reflection measurement on its recording layer, and emit the collected measurement optical signal; the single lens is used to converge the measurement optical signal to The spectrometer; the spectrometer is used to process the received measuring light signal and decode data storage information therefrom.

于本发明一实施例中,所述光谱仪包括:光栅光谱仪或高速测量光谱仪;所述高速测量光谱仪包括:光学色散元件、窄带集成滤光片、及线阵探测器;其中,所述光学色散元件,用于对接收的测量光信号进行分光,以使反射光谱信息在空间上展开;所述窄带集成滤光片,用于获得经所述光学色散元件色散后的反射光谱信息所对应的波长的光;所述线阵探测器,用于对经所述窄带集成滤光片所得到的各波长的光的光强进行探测,以获得反射光谱信息。In an embodiment of the present invention, the spectrometer includes: a grating spectrometer or a high-speed measurement spectrometer; the high-speed measurement spectrometer includes: an optical dispersion element, a narrowband integrated filter, and a linear array detector; wherein the optical dispersion element , for splitting the received measurement optical signal so that the reflection spectrum information is spatially expanded; the narrow-band integrated filter is used for obtaining the wavelength corresponding to the reflection spectrum information dispersed by the optical dispersion element Light: the linear array detector is used to detect the light intensity of the light of each wavelength obtained by the narrow-band integrated optical filter, so as to obtain reflection spectrum information.

于本发明一实施例中,所述光源为卤素灯、钨灯、氙灯、白光LED灯、带通滤波的白光光源、或紫外LED光源。In an embodiment of the present invention, the light source is a halogen lamp, a tungsten lamp, a xenon lamp, a white LED lamp, a band-pass filtered white light source, or an ultraviolet LED light source.

为实现上述目的及其他相关目的,本发明提供一种基于纳米光刻的光盘读写装置,包括:所述的基于纳米光刻的光盘读取装置。To achieve the above object and other related objects, the present invention provides an optical disc reading and writing device based on nano-lithography, including: the above-mentioned optical disc reading device based on nano-lithography.

于本发明一实施例中,所述读取装置还包括第三二向色镜,设于所述读取装置的透镜组与分束镜之间,用于将经该透镜组准直扩束的白光反射至所述高倍物镜;所述分束镜,用于对所述高倍物镜射出的测量光信号进行分光;所述单个透镜,用于将经所述分束镜分光的测量光信号汇聚至所述光谱仪。In an embodiment of the present invention, the reading device further includes a third dichroic mirror, arranged between the lens group and the beam splitter of the reading device, for collimating and expanding the beam passing through the lens group The white light is reflected to the high-magnification objective lens; the beam splitter is used to split the measurement light signal emitted by the high-power objective lens; the single lens is used to converge the measurement light signal split by the beam splitter to the spectrometer.

如上所述,本发明的基于纳米光刻的光盘读取方法、读取装置及光盘读写装置,具有以下有益效果:As mentioned above, the optical disc reading method, reading device and optical disc reading and writing device based on nanolithography of the present invention have the following beneficial effects:

1、实现了纳米尺寸的信息记录点的读取;1. Realized the reading of nanometer-sized information recording points;

2、具有更高的存储密度与存储容量,更快的读取速度;2. It has higher storage density and storage capacity, and faster reading speed;

3、可扩展性强,无须对现有光驱系统进行较大改进。3. The scalability is strong, and there is no need to make major improvements to the existing optical drive system.

附图说明Description of drawings

图1A显示为本发明一实施例中的光盘物理存储介质的结构及刻写原理示意图。FIG. 1A is a schematic diagram showing the structure and writing principle of an optical disk physical storage medium in an embodiment of the present invention.

图1B显示为本发明另一实施例中的光盘物理存储介质的结构及刻写原理示意图。FIG. 1B is a schematic diagram showing the structure and writing principle of an optical disk physical storage medium in another embodiment of the present invention.

图1C显示为本发明一实施例中的二芳基乙烯材料吸收调制层光谱的示意图。FIG. 1C is a schematic diagram showing the spectrum of the absorption modulation layer of the diarylethene material in an embodiment of the present invention.

图1D显示为本发明一实施例中的光盘物理存储介质结构优化对光谱分辨能力的影响示意图。FIG. 1D is a schematic diagram showing the influence of optical disc physical storage medium structure optimization on spectral resolution in an embodiment of the present invention.

图1E显示为本发明又一实施例中的光盘物理存储介质的结构示意图。FIG. 1E is a schematic structural diagram of an optical disk physical storage medium in another embodiment of the present invention.

图2A显示为本发明一实施例中的基于纳米光刻的光盘写入方法的流程示意图。FIG. 2A is a schematic flowchart of a method for writing an optical disc based on nanolithography in an embodiment of the present invention.

图2B显示为本发明一实施例中的数字存储信息sk、连续刻写沟槽深度信息wk与反射测量光谱信息refk的关联关系示意图。FIG. 2B is a schematic diagram showing the relationship between digital storage information s k , continuous writing groove depth information w k and reflectance measurement spectral information ref k in an embodiment of the present invention.

图3A显示为本发明一实施例中的基于纳米光刻的光盘读取方法的流程示意图。FIG. 3A is a schematic flowchart of a method for reading an optical disc based on nanolithography in an embodiment of the present invention.

图3B显示为本发明一实施例中的反射光谱测量读取的原理示意图。FIG. 3B is a schematic diagram showing the principle of reflectance spectrum measurement and reading in an embodiment of the present invention.

图4显示为本发明一实施例中的基于单光束纳米光刻的光盘读写装置的结构示意图。FIG. 4 is a schematic structural diagram of an optical disc reading and writing device based on single-beam nanolithography in an embodiment of the present invention.

图5显示为本发明一实施例中的基于双光束纳米光刻的光盘读写装置的结构示意图。FIG. 5 is a schematic structural diagram of an optical disc read/write device based on dual-beam nanolithography in an embodiment of the present invention.

图6显示为本发明另一实施例中的基于纳米光刻的光盘只读装置的结构示意图。FIG. 6 is a schematic structural diagram of an optical disc read-only device based on nanolithography in another embodiment of the present invention.

具体实施方式Detailed ways

以下通过特定的具体实例说明本发明的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本发明的其他优点与功效。本发明还可以通过另外不同的具体实施方式加以实施或应用,本说明书中的各项细节也可以基于不同观点与应用,在没有背离本发明的精神下进行各种修饰或改变。需说明的是,在不冲突的情况下,以下实施例及实施例中的特征可以相互组合。Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, in the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

需要说明的是,以下实施例中所提供的图示仅以示意方式说明本发明的基本构想,遂图式中仅显示与本发明中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制,其实际实施时各组件的型态、数量及比例可为一种随意的改变,且其组件布局型态也可能更为复杂。It should be noted that the diagrams provided in the following embodiments are only schematically illustrating the basic ideas of the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbitrarily during actual implementation, and the component layout type may also be more complicated.

第一实施例first embodiment

如图1A所示,展示了一种光盘物理存储介质,其结构包括:As shown in Figure 1A, an optical disc physical storage medium is shown, and its structure includes:

1)保护层101,该层使光盘可以经受住频繁的使用、指纹、抓痕和污垢,以此保证光盘的存储质量和数据安全;1) protective layer 101, which enables the optical disc to withstand frequent use, fingerprints, scratches and dirt, thereby ensuring the storage quality and data security of the optical disc;

2)记录层102,用于进行信息的刻写与记录,该层特征为可以稳定保存,且可进行光学刻写,选用材料包括SiO2、GaF2、MgF2、有机玻璃、光敏材料等,但不限于这些;2) The recording layer 102 is used for writing and recording information. This layer is characterized by stable preservation and optical writing. The selected materials include SiO 2 , GaF 2 , MgF 2 , plexiglass, photosensitive materials, etc., but not limited to these;

3)反射层103,用于提高光谱反射率,易于光谱信息的反射测量,其采用反射率较高的材料,主要包括金属材料或者多层分布式布拉格反射镜(DBR)材料,但不限于这些。3) The reflective layer 103 is used to increase the spectral reflectance and facilitate the reflection measurement of spectral information. It adopts materials with high reflectivity, mainly including metal materials or multi-layer distributed Bragg reflector (DBR) materials, but not limited to these .

通过采用更短波长刻写激光束(可采用半导体激光405纳米或更短波长输出,或355纳米和266纳米固体激光输出,或者248纳米、193纳米和157纳米输出准分子激光等等)以及高数值孔径物镜的聚焦方式,获得压缩的衍射受限聚焦光斑104,该光束作用于记录层上进行数字信息刻写。结合2m位数字信息编码方法,以m=3为例,在101上信息记录点107的位置数据存储位点(1)、(2)、(3)处进行不同沟槽深度Z1,Z2,Z3的连续刻写,其中,对应(m)处进行刻写表示该处存储数码“1”,反之则为存储数码“0”,不同的(m)则对应2m位数字信息编码方法中的不同位数;至此,完成了107处的信息存储,再依据105移动至下一固定位置,重复上述过程完成数字信息存储;依次类推,完成数字信息存储全过程。By using shorter wavelength writing laser beams (semiconductor lasers with 405 nm or shorter wavelength output, or 355 nm and 266 nm solid-state laser outputs, or 248 nm, 193 nm, and 157 nm output excimer lasers, etc.) and high numerical The focusing mode of the aperture objective lens obtains a compressed diffraction-limited focused spot 104, and the light beam acts on the recording layer to write digital information. Combining with the 2 m -bit digital information encoding method, taking m=3 as an example, different groove depths Z 1 , Z 2 , the continuous writing of Z 3 , in which, the writing corresponding to (m) indicates that the digital "1" is stored in this place, otherwise, the digital "0" is stored, and the different (m) corresponds to the 2 m -bit digital information encoding method different digits; so far, the information storage at 107 is completed, and then move to the next fixed position according to 105, repeat the above process to complete the digital information storage; and so on, complete the whole process of digital information storage.

第二实施例second embodiment

如图1B所示,展示了一种光盘物理存储介质,其结构包括:As shown in Figure 1B, a physical storage medium of an optical disc is shown, and its structure includes:

1)保护层201,该层使光盘可以经受住频繁的使用、指纹、抓痕和污垢,以此保证光盘的存储质量和数据安全;1) protective layer 201, which enables the optical disc to withstand frequent use, fingerprints, scratches and dirt, thereby ensuring the storage quality and data security of the optical disc;

2)吸收调制层202,该层材料具有吸收调制特性,其吸收光谱具有如图1C所示特征,该层厚度小于500nm,吸收调制层材料包括二芳基乙烯类、俘精酸酐类材料、叠氮类材料,但不限于这些;2) Absorption modulation layer 202, the material of this layer has absorption modulation characteristics, and its absorption spectrum has the characteristics as shown in Figure 1C. Nitrogen-based materials, but not limited to these;

3)记录层203,用于进行信息的刻写与记录,该层特征为可以稳定保存,且可进行光学刻写,选用材料包括SiO2,GaF2,MgF2、有机玻璃、光敏材料等,但不限于这些;3) The recording layer 203 is used for writing and recording information. This layer is characterized by stable preservation and optical writing. The selected materials include SiO 2 , GaF 2 , MgF 2 , plexiglass, photosensitive materials, etc., but not limited to these;

4)反射层204,用于提高光谱反射率,易于光谱信息的反射测量,其采用反射率较高的材料,主要包括金属材料或者多层分布式布拉格反射镜(DBR)材料,但不限于这些。4) The reflective layer 204 is used to increase the spectral reflectance and facilitate the reflection measurement of spectral information. It adopts materials with high reflectivity, mainly including metal materials or multi-layer distributed Bragg reflector (DBR) materials, but not limited to these .

在另一实施例中,进一步地,吸收调制层202与记录层203之间根据需要,可增加一层10nm以下的过渡保护层,用于避免吸收调制层202对记录层203产生影响。所述过渡保护层的材料包括:PVA(聚乙烯醇)、PMMA(聚甲基丙烯酸甲酯)等。In another embodiment, further, a transition protection layer of less than 10 nm may be added between the absorption modulation layer 202 and the recording layer 203 as needed, so as to prevent the absorption modulation layer 202 from affecting the recording layer 203 . The material of the transition protective layer includes: PVA (polyvinyl alcohol), PMMA (polymethyl methacrylate) and the like.

结合上述光盘物理存储结构,实心刻写光束205与空心抑制光束206同时作用于吸收调制层202上,经吸收调制特性作用,空心抑制光束206抑制了实心刻写光束205的外围光束透过吸收调制层202,使透过吸收调制层的刻写光斑尺寸被进一步压缩,如207所示,空心抑制光束208,经吸收调制层202抑制了实心刻写光束209的外围光束,获得压缩后的光束210作用于记录层203上进行深度信息沟槽的刻写。结合2m位数字信息编码方法,以m=3为例,在203上信息记录点的固定位置212处的数字存储位点(1)、(2)、(3)处进行不同沟槽深度Z1,Z2,Z3的连续刻写,其中,对应(m)处进行刻写表示该处存储数码“1”,反之则为存储数码“0”,不同的(m)则对应2m位编码中的不同位数;至此,完成了212处的信息记录,再依据211移动至下一固定位置,重复上述过程完成数字信息存储;依次类推,完成数字信息存储全过程。Combined with the above-mentioned physical storage structure of the optical disc, the solid writing beam 205 and the hollow suppression beam 206 act on the absorption modulation layer 202 at the same time, and through the absorption modulation characteristic, the hollow suppression beam 206 suppresses the peripheral beams of the solid writing beam 205 from passing through the absorption modulation layer 202 , so that the writing spot size passing through the absorption modulation layer is further compressed, as shown in 207, the hollow suppression beam 208 suppresses the peripheral beam of the solid writing beam 209 through the absorption modulation layer 202, and the compressed beam 210 acts on the recording layer 203 for writing depth information grooves. Combined with the 2 m -bit digital information encoding method, taking m=3 as an example, the digital storage points (1), (2), and (3) at the fixed position 212 of the information recording point on the 203 are carried out with different groove depths Z 1 , Z 2 , Z 3 continuous writing, in which, the writing corresponding to (m) means that the number "1" is stored at this place, otherwise, the number "0" is stored, and the different (m) corresponds to the 2 m -bit code At this point, the information recording at 212 is completed, and then move to the next fixed position according to 211, repeat the above process to complete the digital information storage; and so on, complete the whole process of digital information storage.

需要说明的是,对于第一实施例和第二实施例中的光盘物理存储介质,保护层101、保护层201并非必须,在缺少保护层101、保护层201的情况下其他各层亦可以单独实施。It should be noted that, for the optical disk physical storage media in the first embodiment and the second embodiment, the protective layer 101 and the protective layer 201 are not necessary, and in the absence of the protective layer 101 and the protective layer 201, other layers can also be used independently. implement.

第三实施例third embodiment

参阅图1D,光谱的分辨能力决定了编码信息的位数,为了增加反射光谱测量的分辨能力,本实施例在第一实施例和第二实施例的基础上,通过在记录层102与反射层103之间或在记录层203与反射层204之间增加一层或多层中间层,从而提供一种光盘物理存储介质,详细而言,其结构包括:Referring to Figure 1D, the resolution of the spectrum determines the number of bits of coded information. In order to increase the resolution of the reflection spectrum measurement, this embodiment is based on the first embodiment and the second embodiment, by combining the recording layer 102 with the reflective layer 103 or between the recording layer 203 and the reflective layer 204 by adding one or more intermediate layers, thereby providing a physical storage medium for an optical disc. In detail, its structure includes:

1)记录层303,用于进行信息的刻写与记录,该层特征为可以稳定保存,且可进行光学刻写,选用材料包括SiO2、GaF2、MgF2、有机玻璃、光敏材料等,但不限于这些;1) The recording layer 303 is used for writing and recording information. This layer is characterized by stable preservation and optical writing. The selected materials include SiO 2 , GaF 2 , MgF 2 , plexiglass, photosensitive materials, etc., but not limited to these;

2)中间层304,为高折射率材料,折射率大于记录层303的材料的折射率,且光谱吸收率较低,该层材料厚度小于测量波长,选用材料包括Al2O3、Si3N4、Nb2O5、Ta2O5和TiO2等,但不限于这些;2) The middle layer 304 is a material with a high refractive index, the refractive index is greater than that of the material of the recording layer 303, and the spectral absorptivity is low. The material thickness of this layer is smaller than the measurement wavelength. The selected materials include Al 2 O 3 , Si 3 N 4. Nb 2 O 5 , Ta 2 O 5 and TiO 2 etc., but not limited to these;

3)反射层305,用于提高光谱反射率,易于光谱信息的反射测量,其采用反射率较高的材料,主要包括金属材料或者多层分布式布拉格反射镜(DBR)材料,但不限于这些。3) The reflective layer 305 is used to increase the spectral reflectance and facilitate the reflection measurement of spectral information. It adopts materials with high reflectivity, mainly including metal materials or multi-layer distributed Bragg reflector (DBR) materials, but not limited to these .

图1D展示了没有中间层的光盘物理存储介质与添加中间层的光盘存储物理介质所对应的反射测量光谱信息306与307。对比306与307可以明显看出,添加中间层后的光盘存储物理介质的光谱分辨能力得到了明显的提高:FIG. 1D shows reflectance measurement spectrum information 306 and 307 corresponding to the physical optical storage medium without an intermediate layer and the optical storage physical medium with an intermediate layer added. Comparing 306 and 307, it can be clearly seen that the spectral resolution ability of the optical disc storage physical medium after adding the intermediate layer has been significantly improved:

(1)307相较306而言,“峰位”的移动更为明显;(1) Compared with 306, 307 has a more obvious "peak position" movement;

(2)307的强度变化更为剧烈,在更小的窗口,如360nm~400nm之间就可以实现编码信息的区分,对采用紫外区间光源进行光谱信息读取提供了可能;(2) The intensity change of 307 is more severe, and the coding information can be distinguished in a smaller window, such as 360nm to 400nm, which provides the possibility to read spectral information by using a light source in the ultraviolet range;

(3)不同数字编码信息之间对应的反射光谱的峰型差异增大。(3) The difference in the peak shape of the corresponding reflection spectra between different digitally encoded information increases.

因此,通过增加一层中间层或者多层中间层,可使光谱的分辨能力得到巨大的提升,从而进一步提升下文待介绍的刻写控制信息的编码维度m,极大地提升了信息存储量。Therefore, by adding an intermediate layer or multiple intermediate layers, the spectral resolution can be greatly improved, thereby further improving the encoding dimension m of the writing control information to be introduced below, and greatly increasing the information storage capacity.

第四实施例Fourth embodiment

承接第二实施例所述结构,如图1E所示,展示了另一种光盘物理存储介质,该光盘物理存储介质的记录层402已在第二表面(见图中与403接触的平面)完成了光刻信息的写入,并在第一表面(见图中与401接触的平面)新增了反射层401。Carrying over the structure described in the second embodiment, as shown in FIG. 1E , another optical disc physical storage medium is shown. The recording layer 402 of the optical disc physical storage medium has been completed on the second surface (see the plane in contact with 403 in the figure). The writing of photolithographic information is realized, and a reflective layer 401 is newly added on the first surface (see the plane in contact with 401 in the figure).

该光盘物理存储介质的形成方式为:在对第二实施例的记录层203进行光学刻写后,对光盘的吸收调制层202(如有过渡层则含)进行超声等化学方法清洗,清洗后将记录层203进行180度翻转,以形成图1D所示的完成光学刻写的第二表面在下而第一表面在上的记录层303,此时,第二表面与原先的反射层204(也即图1E中的403)相叠设置,第一表面上新镀反射层401,反射层401与反射层403之间构成介质腔。反射层401可采用金、银等金属材料,或者多层DBR材料。反射层401同时也是光盘的保护层。The formation method of the physical storage medium of the optical disc is as follows: after the recording layer 203 of the second embodiment is optically written, the absorption modulation layer 202 of the optical disc (if there is a transition layer) is cleaned by chemical methods such as ultrasonic waves, and after cleaning, the The recording layer 203 is reversed 180 degrees to form the recording layer 303 in which the second surface of the optical writing shown in FIG. 1D is down and the first surface is on the top. 403) in 1E are stacked, the first surface is newly plated with a reflective layer 401, and a dielectric cavity is formed between the reflective layer 401 and the reflective layer 403. The reflective layer 401 can be made of metal materials such as gold and silver, or multi-layer DBR materials. The reflective layer 401 is also a protective layer of the optical disc.

介质腔结构使得光谱信息寿命仅依赖于记录层的寿命,进而实现存储信息的永久保存,除此之外,也实现了存储密度与存储容量的大幅度提升。The dielectric cavity structure makes the lifetime of spectral information depend only on the lifetime of the recording layer, thereby realizing the permanent preservation of stored information. In addition, it also achieves a substantial increase in storage density and storage capacity.

第五实施例fifth embodiment

第一实施例~第四实施例介绍的光盘物理存储介质皆可视为“单面”结构。本实施例提供一种“双面”光盘物理存储介质,从而达到双面高密度信息存储的效果。所谓的“双面”结构可视作由两个“单面”结构共用一反射层103或反射层204“背对背”设置而成。在本实施例中,第一实施例中的反射层103或第二实施例中的反射层204作为基底层,其他层对称设于所述基底层的上表面和下表面。例如,以第一实施例介绍的光盘物理存储介质为例,其扩展至双面后的结构由上至下依次为保护层、记录层、反射层、记录层、保护层。The optical disk physical storage media introduced in the first embodiment to the fourth embodiment can all be regarded as a "single-sided" structure. This embodiment provides a "double-sided" optical disk physical storage medium, so as to achieve the effect of double-sided high-density information storage. The so-called "double-sided" structure can be regarded as a "back-to-back" arrangement of two "single-sided" structures sharing a reflective layer 103 or reflective layer 204 . In this embodiment, the reflective layer 103 in the first embodiment or the reflective layer 204 in the second embodiment is used as the base layer, and other layers are symmetrically arranged on the upper surface and the lower surface of the base layer. For example, taking the optical disk physical storage medium introduced in the first embodiment as an example, its structure extended to double sides is a protection layer, a recording layer, a reflection layer, a recording layer, and a protection layer from top to bottom.

第六实施例Sixth embodiment

如图2A所示,本实施例提供一种基于纳米光刻的光盘写入方法,包括以下步骤:As shown in FIG. 2A, this embodiment provides a method for writing an optical disc based on nanolithography, which includes the following steps:

S21:压缩实心刻写光束的焦斑尺寸。S21: Compressing the focal spot size of the solid writing beam.

所述实心刻写光束的光束强度符合高斯强度分布,可采用可见、紫外、深紫外连续激光或波段在可见光至紫外光之间的脉冲激光。具体的,压缩实心刻写光束的焦斑尺寸可通过方式一或方式二来实现:The beam intensity of the solid writing beam conforms to the Gaussian intensity distribution, and visible, ultraviolet, and deep ultraviolet continuous lasers or pulsed lasers with wavelengths between visible light and ultraviolet light can be used. Specifically, compressing the focal spot size of the solid writing beam can be achieved by means 1 or 2:

方式一、分别形成波长不同的实心刻写光束及空心抑制光束,所述空心抑制光束的光束强度符合环形强度分布且中心强度趋于零;令所述实心刻写光束及所述空心抑制光束的焦平面在空间上重合;将重合后的光束照射于光盘物理存储介质,所述空心抑制光束抑制所述实心刻写光束的外围光斑,例如:所述空心抑制光束照射于所述光盘物理存储介质的吸收调制层;又例如:在所述空心抑制光束的作用下,所述吸收调制层抑制所述实心刻写光束的外围光斑透过吸收调制层,再例如:所述方式一或所述方式二的实心刻写光束采用脉冲光束实现双光子刻写方法等,据以压缩所述实心刻写光束的焦斑尺寸;Method 1: Form a solid writing beam and a hollow suppressing beam with different wavelengths respectively, the beam intensity of the hollow suppressing beam conforms to the annular intensity distribution and the central intensity tends to zero; make the focal plane of the solid writing beam and the hollow suppressing beam Spatially overlapped; the overlapped light beam is irradiated on the physical storage medium of the optical disc, and the hollow suppressing beam suppresses the peripheral spot of the solid writing beam, for example: the absorption modulation of the hollow suppressing beam irradiating on the physical storage medium of the optical disc Another example: under the action of the hollow suppression beam, the absorption modulation layer inhibits the peripheral light spot of the solid writing beam from passing through the absorption modulation layer, and another example: the solid writing of the method 1 or the method 2 The beam adopts a pulsed beam to realize a two-photon writing method, etc., so as to compress the focal spot size of the solid writing beam;

方式二、减小所述实心刻写光束的波长和/或增大物镜的数值孔径。Method 2: reducing the wavelength of the solid writing beam and/or increasing the numerical aperture of the objective lens.

S22:读取需存入光盘的数字存储信息,作为刻写控制信息。S22: Read the digital storage information to be stored in the optical disc as writing control information.

详细而言,所述刻写控制信息包括按序排列的各子刻写控制信息。每一所述子刻写控制信息用于控制一个信息记录点的刻写;所述信息记录点处包括m个数据存储位点,每一所述子刻写控制信息由m位二进制数构成,每位二进制数的“0”、“1”数码用于表示是否在对应的数据存储位点处进行相应深度信息沟槽的刻写。In detail, the writing control information includes sub-writing control information arranged in sequence. Each of the sub-writing control information is used to control the writing of an information recording point; the information recording point includes m data storage locations, and each of the sub-writing control information is composed of m-bit binary numbers, and each bit is binary The numbers "0" and "1" in the number are used to indicate whether to write the corresponding depth information groove at the corresponding data storage position.

具体的,所述刻写控制信息的编码方法包括以下步骤:Specifically, the encoding method for writing control information includes the following steps:

步骤一、将各待刻写信息记录点所包含的数据存储位点的数量m作为2的幂指数,以确定采用2m进制数来编码;Step 1, using the number m of data storage points contained in each information recording point to be written as a power of 2 to determine the use of 2 m- ary numbers for encoding;

步骤二、将m位二进制的待存入光盘的数字存储信息作为一待刻写信息记录点的刻写控制信息sk;根据所述待刻写信息记录点的各数据存储位点处是否要进行相应深度信息沟槽刻写的情况对应赋予组内每位二进制数的“0”和“1”数码;Step 2, using the m-bit binary digital storage information to be stored in the optical disc as the writing control information sk of an information recording point to be written; The writing of the information groove corresponds to the "0" and "1" numbers assigned to each binary number in the group;

步骤三、所有的待刻写信息记录点的刻写控制信息组成2m位数字信息集

Figure BDA0003154257560000081
1≤k≤2m,以作为总的刻写控制信息。Step 3. The writing control information of all the information recording points to be written forms a 2 m -bit digital information set
Figure BDA0003154257560000081
1≤k≤2 m , as the overall writing control information.

可选的,各所述数据存储位点处以不同深度信息表示不同位数进行数据存储,也即同一数据存储位点处采用多种不同深度信息沟槽分别表征不同存储数码,从而提高数据信息存储量。例如:在同一数据存储位点处采用4种不同深度信息分别对应表征存储数码“0”、“1”、“2”、“3”,从而提升存储数据的信息容量。Optionally, different depth information is used to represent different digits for data storage at each of the data storage sites, that is, a variety of different depth information grooves are used at the same data storage site to represent different storage numbers, thereby improving data information storage. quantity. For example: at the same data storage location, 4 different depth information are used to represent and store the numbers "0", "1", "2", and "3" respectively, so as to increase the information capacity of the stored data.

参见图2B,举例而言,现每个信息记录点具有3个数据存储位点,所以需采用八进制数进行编码;每3位二进制数的数字存储信息sk为一组,作为一待刻写信息记录点的刻写控制信息,且若该刻写信息记录点的第1位数据存储位点处需要刻写,则赋予组内第1位二进制数“1”数码,若不需刻写则赋予其“0”数码;若该刻写信息记录点的第2位数据存储位点处需要刻写,则赋予组内第2位二进制数“1”数码,若不需刻写则赋予其“0”数码,以此类推。于图2B中,“001”表示第二个待刻写信息记录点的刻写控制信息,其第1位和第2位分别为“0”,第3位为“1”,说明在第二个待刻写信息记录点的第1位数据存储位点处和第2个位数据存储位点处不做刻写,而在第3位数据存储位点处需要刻写Z3深度的沟槽。Referring to Fig. 2B, for example, each information recording point now has 3 data storage points, so it needs to be coded by octal numbers; the digital storage information sk of each 3-bit binary number is a group, as a piece of information to be written The writing control information of the recording point, and if the first data storage point of the writing information recording point needs to be written, the first binary number "1" in the group will be assigned, and if no writing is required, it will be assigned "0"Digital; if the second data storage point of the engraved information recording point needs to be engraved, then the second binary number "1" in the group is assigned, and if no engraving is required, it is assigned "0", and so on. In FIG. 2B, "001" represents the writing control information of the second information recording point to be written, and the first and second bits are "0" respectively, and the third bit is "1", indicating that the second bit to be written is "1". No writing is done at the first data storage point and the second data storage point of the writing information recording point, but a groove with a depth of Z 3 needs to be written at the third data storage point.

S23:根据所述刻写控制信息中的一组m位子刻写控制信息,控制被压缩的焦斑在光盘物理存储介质的记录层刻写对应的信息记录点。S23: According to a group of m bits of writing control information in the writing control information, control the compressed focal spot to write corresponding information recording points on the recording layer of the optical disc physical storage medium.

与步骤S22阐述的编码方法相对应的,本步骤在具体实施时采用一种刻写控制信息的解码方法,包括以下步骤:Corresponding to the encoding method described in step S22, this step adopts a decoding method for writing control information during specific implementation, including the following steps:

步骤一、根据数字存储信息中的一组m位二进制数,在光盘物理存储介质的记录层刻写对应的信息记录点;其中,根据每位二进制数的数码来判断是否要在所述信息记录点的对应的数据存储位点处进行相应深度信息沟槽刻写,刻写后形成该信息记录点的连续刻写沟槽深度信息wk1Step 1. According to a group of m-bit binary numbers in the digital storage information, write the corresponding information recording point on the recording layer of the optical disc physical storage medium; wherein, judge whether to record the information at the information recording point according to the digital number of each binary number The corresponding depth information groove is written at the corresponding data storage point, and the continuous writing groove depth information w k1 of the information recording point is formed after writing;

步骤二、待完成对所述信息记录点的刻写后,将实心刻写光束移动至下一信息记录点,并根据所述数字存储信息中的下一组m位二进制数控制所述实心刻写光束进行沟槽刻写,刻写后形成该信息记录点的连续刻写沟槽深度信息

Figure BDA0003154257560000091
直至完成所有信息记录点的刻写,形成总的连续刻写沟槽深度信息/>
Figure BDA0003154257560000092
1≤k1,k2≤2m。Step 2. After the writing of the information recording point is completed, the solid writing beam is moved to the next information recording point, and the solid writing beam is controlled according to the next set of m-bit binary numbers in the digital storage information. Groove writing, after writing, the continuous writing groove depth information of the information recording point is formed
Figure BDA0003154257560000091
Until the writing of all information recording points is completed, the total continuous writing groove depth information is formed />
Figure BDA0003154257560000092
1≤k 1 , k 2 ≤2 m .

参见图1A,以m=3为例,在记录层102的信息记录点107处的3个固定位置(1)、(2)、(3)处进行不同沟槽深度Z1、Z2、Z3的连续刻写,其中,是否刻写取决于上述刻写控制编码的内容,若该编码中对应(m)处的数码为“1”,则在(m)处进行沟槽深度Zm的刻写,若该编码中对应(m)处的数码为“0”,则不在(m)处刻写。当然,在具体应用中“0”和“1”的含义也可以交换,也即数码为“0”时刻写而为“1”时不刻写,本发明对此不做限定。在完成了信息记录点107的刻写后,根据105移动至下一信息记录点的刻写,以此类推,直至完成数据记录的全过程。Referring to FIG. 1A, taking m=3 as an example, three fixed positions (1), (2), and (3) at the information recording point 107 of the recording layer 102 are performed with different groove depths Z 1 , Z 2 , and Z 3 , wherein whether to write or not depends on the content of the above-mentioned writing control code, if the number corresponding to (m) in the code is "1", then the groove depth Z m is written at (m), if If the number corresponding to (m) is "0" in the code, it will not be written at (m). Of course, the meanings of "0" and "1" can also be exchanged in specific applications, that is, when the number is "0", it is written when it is "1", and it is not written when it is "1", which is not limited in the present invention. After the writing of the information recording point 107 is completed, move to the writing of the next information recording point according to 105 , and so on until the whole process of data recording is completed.

值得注意的是,亦可在同一数据存储位点处采用不同深度信息进行数据存储,从而提高数据信息存储量。It is worth noting that information of different depths can also be used for data storage at the same data storage location, thereby increasing the amount of data information storage.

S24:待完成所述信息记录点的刻写后,将所述被压缩的焦斑移动至下一待刻写信息记录点所在的位置,并根据所述刻写控制信息中的下一组m位子刻写控制信息控制所述被压缩的焦斑进行刻写,直至完成所有信息记录点的数字存储信息的写入。S24: After the writing of the information recording point is completed, move the compressed focal spot to the position of the next information recording point to be written, and control the writing according to the next group of m bits in the writing control information The information controls the compressed focal spots to write until the writing of digital storage information of all information recording points is completed.

进一步地,本实施例的基于纳米光刻的光盘写入方法还包括:通过控制所述实心刻写光束的光束强度和作用时间来控制对所述记录层上数据存储位点处的沟槽刻写深度;通过控制所述空心刻写光束的光束强度和作用时间来控制对所述记录层上数据存储位点处的沟槽刻写宽度。Further, the optical disc writing method based on nanolithography in this embodiment further includes: controlling the writing depth of the groove at the data storage site on the recording layer by controlling the beam intensity and action time of the solid writing beam ; controlling the writing width of the groove at the data storage site on the recording layer by controlling the beam intensity and action time of the hollow writing beam.

值得说明的是,通过本实施例的基于纳米光刻的光盘写入方法,可使信息记录点的大小不大于130nm,信息记录点的轨道间距不大于320nm,从而在提高光刻信息写入速度的同时,极大地提升了光盘的存储密度和存储维度。It is worth noting that, through the optical disc writing method based on nanolithography in this embodiment, the size of the information recording point can be made not greater than 130nm, and the track pitch of the information recording point is not greater than 320nm, thereby improving the lithographic information writing speed. At the same time, the storage density and storage dimension of the optical disc are greatly improved.

第七实施例Seventh embodiment

如图3A所示,本实施例提供一种基于纳米光刻的光盘读取方法,包括以下步骤:As shown in FIG. 3A, this embodiment provides a method for reading an optical disc based on nanolithography, including the following steps:

S31:形成白光光源,并将其聚焦照射于光盘物理存储介质的记录层的一信息记录点。S31: Forming a white light source and focusing it on an information recording point of the recording layer of the optical disc physical storage medium.

S32:收集测量光信号。S32: Collect and measure optical signals.

所述测量光信号中包括所述信息记录点的由其各刻写沟槽的反射光场相干叠加而成的总反射光场

Figure BDA0003154257560000101
其中,/>
Figure BDA0003154257560000102
为所述信息记录点的第i个刻写沟槽的反射光场;E0为未刻写沟槽的反射光场;m为所述信息记录点的数据存储位点的位数;“0”和“1”数码分别表示所述信息记录点的数据存储位点是否有刻写沟槽;n1(λ)为所述光盘物理存储介质的记录层的折射率,其依赖于刻写光束的波长λ;Zi为第i个刻写沟槽的深度信息,Z0=0表示未刻写的沟槽深度信息为0;l0为所述记录层的厚度;
Figure BDA0003154257560000103
Δn=n1-n0,n0为空气的折射率。The measurement optical signal includes the total reflection light field formed by the coherent superposition of the reflection light fields of the writing grooves of the information recording point
Figure BDA0003154257560000101
where, />
Figure BDA0003154257560000102
Be the reflected light field of the i-th writing groove of the information recording point; E 0 is the reflected light field of the unwritten groove; m is the number of bits of the data storage position of the information recording point; "0" and The numbers "1" respectively indicate whether there is a writing groove at the data storage point of the information recording point; n 1 (λ) is the refractive index of the recording layer of the physical storage medium of the optical disc, which depends on the wavelength λ of the writing beam; Z i is the depth information of the i-th written groove, Z 0 =0 means that the depth information of the unwritten groove is 0; l 0 is the thickness of the recording layer;
Figure BDA0003154257560000103
Δn=n 1 -n 0 , where n 0 is the refractive index of air.

以下结合图3B对本步骤进行解释。详细而言,采用第一实施例的光盘物理存储介质,入射光场为

Figure BDA0003154257560000104
先经过记录层,折射率为n1(λ)、厚度为l0,再经过反射层,折射率为n2(λ)、厚度为l1,高倍物镜收集反射光谱信号即可获得反射光场,也即刻写方向与读取方向相反。由于,对于不同沟槽深度Zi,对应的记录层厚度为(l0-Zi),因此,某个信息记录点的第i个刻写沟槽的反射光场信号可表示为/>
Figure BDA0003154257560000105
其中,m为该信息记录点的数据存储位点的位数,“0”和“1”数码分别表示所述信息记录点的数据存储位点是否有刻写沟槽,n1(λ)为记录层折射率,其依赖于波长λ,l0为记录层厚度,Zi为对应刻写沟槽深度(Z0=0),/>
Figure BDA0003154257560000111
Δn=n1-n0。这些不同的沟槽深度对应的反射光场构成了反射光谱测量的完备基E0,E1,E2...Em;测量光束衍射受限光斑内刻写了m位沟槽深度,其对应总的反射光场为各阶光场的相干叠加,即/>
Figure BDA0003154257560000112
反射光谱强度为
Figure BDA0003154257560000113
This step will be explained below in conjunction with FIG. 3B . In detail, using the optical disc physical storage medium of the first embodiment, the incident light field is
Figure BDA0003154257560000104
First pass through the recording layer with a refractive index of n 1 (λ) and a thickness of l 0 , and then pass through the reflective layer with a refractive index of n 2 (λ) and a thickness of l 1 , and collect the reflected spectral signals with a high-magnification objective lens to obtain the reflected light field , that is, the writing direction is opposite to the reading direction. Since, for different groove depths Z i , the corresponding recording layer thickness is (l 0 -Z i ), therefore, the reflected optical field signal of the i-th writing groove of a certain information recording point can be expressed as />
Figure BDA0003154257560000105
Among them, m is the number of digits of the data storage position of the information recording point, and the numbers "0" and "1" respectively indicate whether the data storage position of the information recording point has a writing groove, and n 1 (λ) is the record Layer refractive index, which depends on the wavelength λ, l 0 is the thickness of the recording layer, Z i is the depth of the corresponding writing groove (Z 0 =0), />
Figure BDA0003154257560000111
Δn=n 1 −n 0 . The reflected light fields corresponding to these different groove depths constitute the complete bases E 0 , E 1 , E 2 ... E m for reflection spectrum measurement; m-bit groove depths are written in the diffraction-limited spot of the measurement beam, which corresponds to The total reflected light field is the coherent superposition of light fields of each order, that is, />
Figure BDA0003154257560000112
The reflection spectrum intensity is
Figure BDA0003154257560000113

S33:预先获得所述光盘物理存储介质的记录层上的连续刻写沟槽深度信息wk及其对应的数字存储信息sk、反射测量光谱信息refk的关联关系。S33: Obtain in advance the relationship between the continuously written groove depth information w k on the recording layer of the optical disc physical storage medium, its corresponding digital storage information s k , and the reflection measurement spectrum information ref k .

如图2B所示,以m=3为例,对应的刻写控制编码为“000”到“111”,分别在(1)、(2)、(3)处进行不同深度沟槽Z1、Z2、Z3的信息刻写,每组刻写控制编码所对应的刻写结果与反射光谱曲线展示在其下方。由图1D中对应的反射光谱信息可以看出,在光谱窗口340nm~500nm内,对应的反射光谱存在较大的差异性,包括有“峰值”的移动、强度的变化以及“峰谷”的移动等。As shown in Figure 2B, taking m=3 as an example, the corresponding writing control codes are "000" to "111", and grooves Z 1 and Z of different depths are respectively performed at (1), (2) and (3). 2. For the information writing of Z 3 , the writing results and reflection spectrum curves corresponding to each group of writing control codes are displayed below it. From the corresponding reflectance spectrum information in Figure 1D, it can be seen that within the spectral window of 340nm to 500nm, the corresponding reflectance spectra have large differences, including the movement of "peak", the change of intensity and the movement of "peak valley". wait.

S34:在从所述测量光信号中得到反射测量光谱信息refk′后,在所述关联关系中查找与之匹配的反射测量光谱信息refk所对应的连续刻写沟槽深度信息wk,进而将该连续刻写沟槽深度信息wk对应的所述信息记录点的数字存储信息sk读出。S34: After obtaining the reflection measurement spectral information ref k ′ from the measurement optical signal, search for the continuous writing groove depth information w k corresponding to the matching reflection measurement spectral information ref k in the association relationship, and then The digital storage information sk of the information recording point corresponding to the continuously written groove depth information w k is read out.

以上,结合步骤S33~S34即可从反射光谱中解码出数据存储信息。根据测量的反射光谱曲线与对应的叠加光场分布进行比对来反解出刻写信息,能一次性读取m位数字存储信息,大大加快了光盘的读取速率。The data storage information can be decoded from the reflection spectrum in combination with the above steps S33-S34. According to the comparison between the measured reflection spectrum curve and the corresponding superimposed light field distribution, the writing information can be deciphered, and the m-bit digital storage information can be read at one time, which greatly speeds up the reading speed of the optical disc.

进一步地,本实施例的基于纳米光刻的光盘读取方法还包括:将白光光源聚焦照射于所述光盘物理存储介质的记录层的下一信息记录点;根据下一信息记录点的测量光信号与所述关联关系得到下一信息记录点的数据存储信息,直至读出所有信息记录点的数据存储信息。Further, the optical disc reading method based on nanolithography in this embodiment also includes: focusing and irradiating a white light source on the next information recording point of the recording layer of the physical storage medium of the optical disc; according to the measurement light of the next information recording point The data storage information of the next information recording point is obtained from the signal and the association relationship, until the data storage information of all information recording points is read out.

第八实施例Eighth embodiment

如图4所示,展示了一种基于纳米光刻的光盘读写装置,该读写装置可划分为基于纳米光刻的光盘写入装置与基于纳米光刻的光盘读取装置两部分。本实施例的光盘写入装置可用于实现对第一实施例的光盘物理存储介质的信息的写入,其光盘写入方法的原理与第六实施例对应;而光盘读取装置可用于实现对第一实施例的光盘物理存储介质的数字存储信息的读取,其光盘读取方法的原理与第七实施例对应。As shown in FIG. 4 , an optical disc reading and writing device based on nanolithography is shown, and the reading and writing device can be divided into two parts: an optical disc writing device based on nanolithography and an optical disc reading device based on nanolithography. The optical disc writing device of this embodiment can be used to implement the writing of information on the optical disc physical storage medium of the first embodiment, and the principle of the optical disc writing method corresponds to that of the sixth embodiment; The principle of the optical disc reading method for reading digital storage information from the physical storage medium of the optical disc in the first embodiment corresponds to that of the seventh embodiment.

本实施例的基于纳米光刻的光盘写入装置包括:光路模块、控制模块,其中,控制模块可采用CPU、MCU、SOC等控制器件,用于执行第六实施例中介绍的步骤S22~S24,以及通过控制所述实心刻写光束的光束强度和作用时间来控制对所述记录层上数据存储位点处的刻写沟槽深度;通过控制所述空心刻写光束的光束强度和作用时间来控制对所述记录层上数据存储位点处的刻写沟槽宽度。The optical disc writing device based on nanolithography in this embodiment includes: an optical path module and a control module, wherein the control module can use CPU, MCU, SOC and other control devices to execute steps S22-S24 introduced in the sixth embodiment , and by controlling the beam intensity and action time of the solid writing beam to control the writing groove depth at the data storage site on the recording layer; by controlling the beam intensity and action time of the hollow writing beam to control the The writing groove width at the data storage site on the recording layer.

当所述光路模块采用第六实施例中的方式二来压缩实心刻写光束的焦斑尺寸并将其照射于光盘物理存储介质时,所述光路模块包括:第一激光器501、第一透镜502、第一滤波件503、第二透镜504、第一二向色镜505、及高倍物镜508。When the optical path module uses the second method in the sixth embodiment to compress the focal spot size of the solid writing beam and irradiate it on the physical storage medium of the optical disc, the optical path module includes: a first laser 501, a first lens 502, A first filter 503 , a second lens 504 , a first dichroic mirror 505 , and a high-magnification objective lens 508 .

工作时:所述第一激光器501发出第一预设波长的激光,以作为实心刻写光束;第一透镜502、第一滤波件503、及第二透镜504沿所述实心刻写光束的光路依次布置;其中,第一透镜502汇聚所述实心刻写光束,滤波件503对经第一透镜502汇聚的实心刻写光束进行滤波,第二透镜504对经第一滤波件503滤波的实心刻写光束进行准直扩束,并汇聚到第一二向色镜505;第一二向色镜505与第二透镜504呈一定角度布置,将经第二透镜504准直扩束的实心刻写光束反射至高倍物镜508;高倍物镜508聚焦接收的实心刻写光束并将其照射于光盘物理存储介质509的表面,以进行数据存储信息的写入。When working: the first laser 501 emits laser light with a first preset wavelength as a solid writing beam; the first lens 502, the first filter 503, and the second lens 504 are arranged in sequence along the optical path of the solid writing beam Wherein, the first lens 502 converges the solid writing beam, the filter 503 filters the solid writing beam converged by the first lens 502, and the second lens 504 collimates the solid writing beam filtered by the first filter 503 The beam is expanded and converged to the first dichroic mirror 505; the first dichroic mirror 505 is arranged at a certain angle with the second lens 504, and reflects the solid writing beam collimated and expanded by the second lens 504 to the high-magnification objective lens 508 ; The high-magnification objective lens 508 focuses the received solid writing beam and irradiates it on the surface of the optical disk physical storage medium 509 to write data storage information.

较佳的,第一激光器501采用蓝光激光器、紫外激光器、深紫外激光器、或波段在可见光到紫外光之间的高峰值功率激光器,通过采用更短波长刻写光束(可采用半导体激光405纳米或更短波长输出,或355纳米和266纳米固体激光输出,或者248纳米、193纳米和157纳米输出准分子激光等等)以及高数值孔径物镜的聚焦方式,获得压缩的衍射受限聚焦光斑104,该光束作用于记录层上进行信息记录。Preferably, the first laser 501 adopts a blue laser, an ultraviolet laser, a deep ultraviolet laser, or a high peak power laser with a wavelength range between visible light and ultraviolet light. Short-wavelength output, or 355 nm and 266 nm solid-state laser output, or 248 nm, 193 nm, and 157 nm output excimer laser, etc.) and the focusing mode of the high numerical aperture objective lens, to obtain a compressed diffraction-limited focus spot 104, the The light beam acts on the recording layer to perform information recording.

较佳的,第一滤波件503采用小孔或单模光纤,比如:刻写光束从激光器501中出射,经透镜502聚焦,根据透镜502的焦距和NA选择对应的μm级小孔503对光束进行滤波,亦可选择单模光纤代替小孔503。Preferably, the first filter element 503 uses a small hole or a single-mode fiber, for example: the writing beam exits from the laser 501, is focused by the lens 502, and selects the corresponding μm-level small hole 503 according to the focal length and NA of the lens 502 to process the light beam. For filtering, a single-mode fiber can also be selected instead of the small hole 503 .

本实施例的基于纳米光刻的光盘读取装置包括:光路模块、处理模块,其中,处理模块可采用光谱仪514,用于执行第七实施例中介绍的步骤S31~S34。光谱仪514的类型包括但不限于光栅光谱仪或高速测量光谱仪、高速测量光谱仪等。The optical disc reading device based on nanolithography in this embodiment includes: an optical path module and a processing module, wherein the processing module can use a spectrometer 514 to execute steps S31-S34 described in the seventh embodiment. Types of spectrometer 514 include, but are not limited to, grating spectrometers or high-speed measurement spectrometers, high-speed measurement spectrometers, and the like.

常用的光栅光谱仪采用机械转动光栅的方法,不适用于数据的高速读取与处理。为达到光盘读取对速率、灵敏度的要求,本实施例的光谱仪514采用高速测量光谱仪,具体包括:光学色散元件、窄带集成滤光片、及线阵探测器;其中,所述光学色散元件对接收的测量光信号进行分光,以使反射光谱信息在空间上展开;所述窄带集成滤光片获得经所述光学色散元件色散后的反射光谱信息所对应的波长的光;所述线阵探测器对经所述窄带集成滤光片所得到的各波长的光的光强进行探测,以获得反射光谱信息。当然,在其他具体应用中,亦可根据实际光谱测量需求,光谱仪可仅用“光学色散元件+线阵探测器”或者“集成式窄带滤波片+线阵探测器”的方式进行快速光谱信息测量。The commonly used grating spectrometer adopts the method of mechanically rotating the grating, which is not suitable for high-speed reading and processing of data. In order to meet the requirements of optical disc reading on speed and sensitivity, the spectrometer 514 of this embodiment adopts a high-speed measuring spectrometer, which specifically includes: an optical dispersion element, a narrow-band integrated filter, and a linear array detector; wherein, the optical dispersion element is The received measurement optical signal is split to expand the reflection spectrum information in space; the narrowband integrated filter obtains the light of the wavelength corresponding to the reflection spectrum information dispersed by the optical dispersion element; the line array detects The detector detects the light intensity of the light of each wavelength obtained by the narrow-band integrated filter to obtain reflection spectrum information. Of course, in other specific applications, according to the actual spectral measurement requirements, the spectrometer can only use "optical dispersive element + linear array detector" or "integrated narrow-band filter + linear array detector" for fast spectral information measurement .

当所述光路模块采用第六实施例中的方式二来压缩实心刻写光束的焦斑尺寸并将其照射于光盘物理存储介质时,所述光路模块包括:光源513、透镜组512、高倍物镜508、分束镜507、单个透镜511,此外,为了实现与写入装置的结合,读取装置还包括第三二向色镜506,设于透镜组512与分束镜507之间。When the optical path module uses the second method in the sixth embodiment to compress the focal spot size of the solid writing beam and irradiate it on the physical storage medium of the optical disc, the optical path module includes: a light source 513, a lens group 512, and a high-magnification objective lens 508 , a beam splitter 507, and a single lens 511. In addition, in order to realize the combination with the writing device, the reading device further includes a third dichroic mirror 506, which is arranged between the lens group 512 and the beam splitting mirror 507.

工作时:光源513发出白光;透镜组512将所述白光进行准直扩束并反射至第三二向色镜506,经反射到达分束镜507;分束镜507对接收的白光进行分光并发射至高倍物镜508;高倍物镜508将接收的白光聚焦作用于光盘物理存储介质509的表面,以对其记录层进行反射测量,并将收集的测量光信号射出;分束镜507对高倍物镜508射出的测量光信号进行分光;单个透镜511将接收的测量光信号汇聚至光谱仪514;光谱仪514处理接收的测量光信号,并从中解码出数据存储信息。During operation: the light source 513 emits white light; the lens group 512 collimates and expands the white light and reflects it to the third dichroic mirror 506, and then reaches the beam splitter 507; the beam splitter 507 splits the received white light and Emitted to the high-magnification objective lens 508; the high-magnification objective lens 508 focuses the received white light on the surface of the physical storage medium 509 of the optical disc to perform reflection measurement on its recording layer, and emits the collected measurement light signal; the beam splitter 507 pairs the high-magnification objective lens 508 The emitted measurement light signal is split; the single lens 511 converges the received measurement light signal to the spectrometer 514; the spectrometer 514 processes the received measurement light signal and decodes the data storage information therefrom.

较佳的,所述光源为卤素灯、钨灯、氙灯、白光LED灯、带通滤波的白光光源、或紫外LED光源。带通滤波的白光光源使得测量光斑得到压缩。紫外LED光源使得测量信息记录点间距和轨道间距可进一步提高。Preferably, the light source is a halogen lamp, a tungsten lamp, a xenon lamp, a white LED lamp, a band-pass filtered white light source, or an ultraviolet LED light source. The band-pass filtered white light source enables the measurement spot to be compressed. The ultraviolet LED light source enables the measurement information recording point pitch and track pitch to be further improved.

另外,记录层的具体材料可根据光源的种类进行相应选择,如选择卤素灯、钨灯、氙灯和白光LED灯等白光光源,可选择SiO2、光敏材料等作为记录层材料,该类材料特征为在可见光及紫外波段具有较高透射率材料;而采用紫外LED光源,用以提高测量信息记录点间距和轨道间距时,则选择GaF2,MgF2等作为记录层材料,该类材料特征为在紫外及深紫外波段具有较高的透射率。In addition, the specific material of the recording layer can be selected according to the type of light source. For example, white light sources such as halogen lamps, tungsten lamps, xenon lamps, and white LED lamps can be selected. SiO 2 and photosensitive materials can be selected as recording layer materials. The characteristics of such materials In order to have a high transmittance material in the visible light and ultraviolet band; and when using ultraviolet LED light source to improve the measurement information recording point spacing and track spacing, GaF 2 , MgF 2 etc. are selected as the recording layer material. The characteristics of this type of material are It has high transmittance in the ultraviolet and deep ultraviolet bands.

第九实施例Ninth embodiment

如图5所示,展示了一种基于纳米光刻的光盘读写装置,该读写装置可划分为基于纳米光刻的光盘写入装置与基于纳米光刻的光盘读取装置两部分。本实施例的光盘写入装置用于实现对第二实施例的光盘物理存储介质的信息的写入,其光盘写入方法的原理与第六实施例对应,而光盘读取装置用于实现对第二实施例的光盘物理存储介质的信息的读取,其光盘读取方法的原理与第七实施例对应。As shown in FIG. 5 , a device for reading and writing an optical disc based on nanolithography is shown, and the device for reading and writing can be divided into two parts: an optical disc writing device based on nanolithography and an optical disc reading device based on nanolithography. The optical disc writing device of this embodiment is used to implement the writing of information on the optical disc physical storage medium of the second embodiment, the principle of the optical disc writing method corresponds to that of the sixth embodiment, and the optical disc reading device is used to realize the writing of information on the optical disc physical storage medium of the second embodiment. The principle of the method for reading information from the optical disk physical storage medium of the second embodiment corresponds to that of the seventh embodiment.

与第八实施例不同的是,本实施例的光路模块采用第六实施例中的方式一来压缩实心刻写光束的焦斑尺寸并将其照射于光盘物理存储介质。由此,本实施例的光盘写入装置的结构可视为在图3A结构的基础上新增了:第二激光器601、第三透镜603、第二滤波件605、第四透镜607、空心光束生成件609、及第二二向色镜610。由于本实施例的光盘读取装置的结构和工作原理与图3A所示读取装置相同,因而不再重复赘述。Different from the eighth embodiment, the optical path module of this embodiment adopts the first method in the sixth embodiment to compress the focal spot size of the solid writing beam and irradiate it on the optical disk physical storage medium. Therefore, the structure of the optical disk writing device of this embodiment can be regarded as adding: the second laser 601, the third lens 603, the second filter 605, the fourth lens 607, the hollow beam A generating element 609 and a second dichroic mirror 610 . Since the structure and working principle of the optical disc reading device of this embodiment are the same as those of the reading device shown in FIG. 3A , the details will not be repeated here.

工作时:第二激光器601发出第二预设波长的激光;第三透镜603、第二滤波件605、第四透镜607、及空心光束生成件609沿所述第二预设波长的激光的光路依次布置;其中,第三透镜603汇聚所述第二预设波长的激光,第二滤波件605对经第三透镜603汇聚的第二预设波长的激光进行滤波,第四透镜607对经第二滤波件605滤波的第二预设波长的激光进行准直扩束,并汇聚到空心光束生成件609,空心光束生成件609根据接收的第二预设波长的激光生成空心抑制光束,并将其发射至第二二向色镜610;第二二向色镜610与空心光束生成件609呈一定角度布置且与第一二向色镜611平行布置,将空心抑制光束反射至高倍物镜614;高倍物镜614将所述实心刻写光束聚焦形成“衍射极限”尺寸大小的实心光斑616与所述空心抑制光束的空心光束617在空间上重合,并将二者同时照射于光盘物理存储介质615的表面,以进行数据存储信息的写入;其中,实心光斑616用于数据存储信息的写入,而空心光束617用于抑制实心光斑616的外围光斑透过光盘物理存储介质815的吸收调制层。When working: the second laser 601 emits laser light with a second preset wavelength; the third lens 603, the second filter element 605, the fourth lens 607, and the hollow beam generator 609 are along the optical path of the laser light with the second preset wavelength Arranged in sequence; wherein, the third lens 603 condenses the laser light of the second preset wavelength, the second filter 605 filters the laser light of the second preset wavelength condensed by the third lens 603, and the fourth lens 607 filters the laser light of the second preset wavelength condensed by the third lens 603. The laser beam of the second preset wavelength filtered by the second filter element 605 is collimated and expanded, and converged to the hollow beam generator 609, and the hollow beam generator 609 generates a hollow suppression beam according to the received laser beam of the second preset wavelength, and It emits to the second dichroic mirror 610; the second dichroic mirror 610 is arranged at a certain angle with the hollow beam generating member 609 and arranged parallel to the first dichroic mirror 611, and reflects the hollow suppression beam to the high-magnification objective lens 614; The high-magnification objective lens 614 focuses the solid writing beam to form a solid spot 616 with a size of "diffraction limit" and the hollow beam 617 of the hollow suppressing beam in space, and irradiates both on the surface of the physical storage medium 615 of the optical disc at the same time , to write data storage information; wherein, the solid light spot 616 is used for writing data storage information, and the hollow light beam 617 is used to prevent the peripheral light spot of the solid light spot 616 from passing through the absorption modulation layer of the optical disk physical storage medium 815 .

上述令实心光斑616与空心光束617在空间上重合的实现方式可以为:以空心光束617为基准,通过调节透镜608前后位置调节光束616的发散度,同时调节二向色镜611,调节光束616的入射角度,使实心光斑616与空心光束617在空间上重合,同时作用于光盘物理存储介质结构615上,以在记录层进行数据存储信息写入过程618。The above-mentioned realization of making the solid spot 616 and the hollow beam 617 coincide in space can be as follows: taking the hollow beam 617 as a reference, adjusting the divergence of the beam 616 by adjusting the front and rear positions of the lens 608, and simultaneously adjusting the dichroic mirror 611 to adjust the beam 616 The incident angle makes the solid light spot 616 and the hollow light beam 617 overlap in space, and acts on the physical storage medium structure 615 of the optical disc at the same time, so as to perform a data storage information writing process 618 on the recording layer.

较佳的,所述第一预设波长的激光的光强符合高斯强度分布;所述第二预设波长的激光的光强符合环形强度分布且中心强度趋于零。刻写光束可选用蓝光或紫外短波长连续激光,亦可根据记录层的材料的双光子吸收特性选择可见到紫外的高峰值功率脉冲激光,实现更小尺寸的双光子双光束纳米信息刻写。Preferably, the light intensity of the laser with the first predetermined wavelength conforms to a Gaussian intensity distribution; the light intensity of the laser with the second predetermined wavelength conforms to a circular intensity distribution and the center intensity tends to zero. The writing beam can be blue light or ultraviolet short-wavelength continuous laser, or a high-peak-power pulsed laser from visible to ultraviolet can be selected according to the two-photon absorption characteristics of the material of the recording layer, so as to realize smaller-sized two-photon double-beam nano-information writing.

较佳的,第二滤波件605采用小孔或单模光纤,具体的:刻写光束从激光器602中出射,经透镜604聚焦,根据透镜604的焦距和NA选择对应的μm级小孔606对光束进行滤波,亦可选择单模光纤代替小孔606;抑制光束从激光器601中出射,经透镜603聚焦,根据透镜603的焦距和NA选择对应的μm级小孔605对光束进行滤波,亦可选择单模光纤代替小孔605。Preferably, the second filter 605 uses a small hole or a single-mode fiber, specifically: the writing beam exits from the laser 602, is focused by the lens 604, and the corresponding μm-level small hole 606 is selected according to the focal length and NA of the lens 604. For filtering, a single-mode optical fiber can also be selected to replace the small hole 606; the suppressed beam is emitted from the laser 601, focused by the lens 603, and the corresponding μm-level small hole 605 is selected according to the focal length and NA of the lens 603 to filter the light beam. A single mode fiber replaces the aperture 605.

较佳的,空心光束生成件609采用涡旋相位板或空间光调制器,产生相位由0到π分布的激光束。Preferably, the hollow beam generator 609 adopts a vortex phase plate or a spatial light modulator to generate laser beams whose phases are distributed from 0 to π.

第十实施例Tenth embodiment

如图6所示,显示为一种基于纳米光刻的光盘只读装置,用于实现对第一实施例或第二实施例等光盘物理存储介质的信息的读取。本实施例的基于纳米光刻的读取装置包括:光源701、透镜组702、高倍物镜704、分束镜703、单个透镜707、光谱仪708。As shown in FIG. 6 , it is an optical disc read-only device based on nanolithography, which is used to read the information of the optical disc physical storage medium such as the first embodiment or the second embodiment. The reading device based on nanolithography in this embodiment includes: a light source 701 , a lens group 702 , a high-magnification objective lens 704 , a beam splitter 703 , a single lens 707 , and a spectrometer 708 .

工作时:光源701发出白光;透镜组702将所述白光进行准直扩束并汇聚到分束镜703;分束镜703对接收的白光进行分光并发射至高倍物镜704;高倍物镜704将接收的白光聚焦作用于光盘物理存储介质705的表面,以对其记录层进行反射测量,并将收集的测量光信号射出;单个透镜707将所述测量光信号汇聚至光谱仪708;光谱仪708处理接收的测量光信号,并从中解码出数据存储信息。When working: the light source 701 emits white light; the lens group 702 collimates and expands the white light and converges it to the beam splitter 703; the beam splitter 703 splits the received white light and emits it to the high-power objective lens 704; the high-power objective lens 704 will receive The white light focused on the surface of the physical storage medium 705 of the optical disc to measure the reflection of its recording layer, and emit the collected measurement optical signal; the single lens 707 converges the measurement optical signal to the spectrometer 708; the spectrometer 708 processes the received Optical signals are measured and data storage information is decoded from them.

由于本实施例的光盘只读装置所执行的基于纳米光刻的光盘读取方法与第七实施例的原理相同,因而不再重复赘述。Since the optical disc reading method based on nanolithography performed by the optical disc read-only device in this embodiment has the same principle as that in the seventh embodiment, it will not be described again.

本实施例的光盘只读装置可实现信号的快速测量读取,光路简洁、稳定性强,光谱仪708通过采用光学色散元件与窄带滤光片的方法,结合线阵探测器快速获得光谱信息,并进行信号处理,满足光盘读取时数据快速处理的实用要求,适用于光盘信息的高速读取。The optical disk read-only device of this embodiment can realize fast measurement and reading of signals, and the optical path is simple and stable. The spectrometer 708 obtains spectral information quickly by using an optical dispersion element and a narrow-band filter combined with a linear array detector, and Carry out signal processing to meet the practical requirements of fast data processing when reading CDs, and is suitable for high-speed reading of CD information.

综上所述,本发明的基于纳米光刻的光盘读写方法及刻写控制信息的编解码方法,具有以下有益技术效果:In summary, the method for reading and writing optical discs based on nanolithography and the encoding and decoding method for writing control information of the present invention have the following beneficial technical effects:

1、与现有蓝光光盘存储方法相比,当m=0时,本发明的纳米光刻信息的光盘写入方法与现有蓝光光盘存储技术相近,但本发明能够实现更小尺寸的信息记录点,使得刻写的信息记录点的大小和轨道间距可以等于或小于或远小于现有蓝光的记录点130nm和轨道间距320nm;而当m≥1时,本发明有效提升了存储密度和存储维度。因此,本方法具有更高的存储容量、更快的读取速度、更强的可扩展性;1. Compared with the existing Blu-ray disc storage method, when m=0, the disc writing method of the nanolithographic information of the present invention is similar to the existing Blu-ray disc storage technology, but the present invention can realize smaller-sized information recording point, so that the size of the recorded information recording point and the track pitch can be equal to or smaller than or much smaller than the 130nm recording point and the 320nm track pitch of the existing Blu-ray; and when m≥1, the present invention effectively improves the storage density and storage dimension. Therefore, this method has higher storage capacity, faster reading speed, and stronger scalability;

2、本发明的基于纳米光刻的光盘写入方法通过减小刻写光束的光斑尺寸来提高信息存储密度,通过使用不同沟槽深度表征不同位数数码信息来提升信息存储维度,从而极大地提升了光盘信息存储的存储密度和存储容量;2. The optical disc writing method based on nanolithography of the present invention increases the information storage density by reducing the spot size of the writing beam, and improves the information storage dimension by using different groove depths to represent different digits of digital information, thereby greatly improving Improve the storage density and storage capacity of optical disc information storage;

3、利用本发明的基于纳米光刻的光盘写入方法进行数据存储,相较现有蓝光光盘利用材料折射率变化进行数据存储,具有更高的稳定性,更适用于信息的长久保存;3. Utilizing the optical disc writing method based on nanolithography of the present invention for data storage, compared with the existing Blu-ray discs that use material refractive index changes for data storage, it has higher stability and is more suitable for long-term preservation of information;

4、利用材料吸收调制特性对刻写光束聚焦光斑进行压缩,并通过控制刻写光束和抑制光束的强度和作用时间精准控制刻蚀深度和刻蚀宽度,实现了纳米尺寸的纳米光刻信息写入过程;4. Utilize the absorption modulation characteristics of the material to compress the focused spot of the writing beam, and precisely control the etching depth and etching width by controlling the intensity and action time of the writing beam and suppressing beam, and realize the nano-sized nano-lithography information writing process ;

5、反射光谱测量方法可实现存储信息的快速读取,同时,在数据读取过程中由于采用白光光谱读取方式,即可在现有光驱定位精度要求下进行数据读取,无须对现有光驱系统进行较大改进;5. The reflection spectrum measurement method can realize fast reading of stored information. At the same time, due to the white light spectrum reading method used in the data reading process, the data can be read under the positioning accuracy requirements of the existing optical drive, without the need for existing The optical drive system has been greatly improved;

6、通过增加高折射率材料的中间层用以提高反射光谱差异和光谱读取分辨能力,根据具体实用要求对光盘结构进行优化,可进一步提高光盘的存储容量;6. By increasing the middle layer of high-refractive index material to improve the reflection spectrum difference and spectral reading resolution, the optical disc structure can be optimized according to specific practical requirements, which can further increase the storage capacity of the optical disc;

7、提出光盘的新型介质腔物理存储结构,进一步提升信息写入密度和光谱读取效率,并且提升光盘的寿命以及抗刮痕和抗灰尘能力;7. Propose a new physical storage structure of the media cavity of the optical disc, further improve the information writing density and spectral reading efficiency, and improve the life of the optical disc and the ability to resist scratches and dust;

8、高速测量光谱仪采用光学色散元件与窄带滤光片,结合线阵探测器的形式,可以快速获得光谱信息,将其应用于光盘信息的读取,极大地提升了光盘的读取速率。8. The high-speed measurement spectrometer adopts optical dispersive elements and narrow-band filters, combined with the form of linear array detectors, can quickly obtain spectral information, and apply it to the reading of optical disc information, which greatly improves the reading rate of optical discs.

上述实施例仅例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟悉此技术的人士皆可在不违背本发明的精神及范畴下,对上述实施例进行修饰或改变。因此,举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变,仍应由本发明的权利要求所涵盖。The above-mentioned embodiments only illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical ideas disclosed in the present invention should still be covered by the claims of the present invention.

Claims (7)

1.一种基于纳米光刻的光盘读取方法,其特征在于,包括:1. A method for reading an optical disc based on nanolithography, characterized in that it comprises: 形成白光光源,并将其聚焦照射于光盘物理存储介质的记录层的一信息记录点,所述记录层上数据存储位点处的沟槽刻写深度通过实心刻写光束的光束强度和作用时间来控制,所述记录层上数据存储位点处的沟槽刻写宽度通过空心刻写光束的光束强度和作用时间来控制;Form a white light source and focus it on an information recording point of the recording layer of the optical disc physical storage medium. The groove writing depth at the data storage site on the recording layer is controlled by the beam intensity and action time of the solid writing beam , the writing width of the groove at the data storage site on the recording layer is controlled by the beam intensity and action time of the hollow writing beam; 收集测量光信号;所述测量光信号中包括所述信息记录点的由其各刻写沟槽的反射光场相干叠加而成的总反射光场
Figure FDA0004081245590000011
其中,/>
Figure FDA0004081245590000012
为所述信息记录点的第i个刻写沟槽的反射光场;E0为未刻写沟槽的反射光场;m为所述信息记录点的数据存储位点的位数;“0”和“1”数码分别表示所述信息记录点的数据存储位点是否有刻写沟槽;n1(λ)为所述光盘物理存储介质的记录层的折射率,其依赖于刻写光束的波长λ;Zi为第i个刻写沟槽的深度信息,Z0=0表示未刻写的沟槽深度信息为0;
Collecting measurement light signals; the measurement light signals include the total reflection light field formed by the coherent superimposition of the reflection light fields of the respective writing grooves of the information recording point
Figure FDA0004081245590000011
where, />
Figure FDA0004081245590000012
Be the reflected light field of the i-th writing groove of the information recording point; E 0 is the reflected light field of the unwritten groove; m is the number of bits of the data storage position of the information recording point; "0" and The numbers "1" respectively indicate whether there is a writing groove at the data storage point of the information recording point; n 1 (λ) is the refractive index of the recording layer of the physical storage medium of the optical disc, which depends on the wavelength λ of the writing beam; Z i is the depth information of the i-th written groove, Z 0 =0 means that the depth information of the unwritten groove is 0;
l0为所述记录层的厚度;
Figure FDA0004081245590000013
Δn=n1-n0,n0为空气的折射率,各所述数据存储位点处以不同深度信息表示不同位数进行数据存储,也即同一数据存储位点处采用多种不同深度信息沟槽分别表征不同存储数码;
l 0 is the thickness of the recording layer;
Figure FDA0004081245590000013
Δn=n 1 -n 0 , n 0 is the refractive index of air, different depth information is used to represent different bits for data storage at each data storage site, that is, multiple different depth information grooves are used at the same data storage site The slots respectively represent different storage numbers;
预先获得所述光盘物理存储介质的记录层上的连续刻写沟槽深度信息wk及其对应的数字存储信息sk、反射测量光谱信息refk的关联关系;Obtaining in advance the relationship between the continuously written groove depth information w k on the recording layer of the optical disc physical storage medium and its corresponding digital storage information sk and reflectance measurement spectral information ref k ; 在从所述测量光信号中得到反射测量光谱信息refk′后,在所述关联关系中查找与之匹配的反射测量光谱信息refk所对应的连续刻写沟槽深度信息wk,进而将该连续刻写沟槽深度信息wk对应的所述信息记录点的数字存储信息sk读出。After obtaining the reflection measurement spectral information ref k ′ from the measurement optical signal, search for the continuous writing groove depth information w k corresponding to the matching reflection measurement spectral information ref k in the association relationship, and then use the The digital storage information s k of the information recording point corresponding to the continuous writing of the groove depth information w k is read out.
2.根据权利要求1所述的方法,其特征在于,还包括:2. The method according to claim 1, further comprising: 将白光光源聚焦照射于所述光盘物理存储介质的记录层的下一信息记录点;Focusing and irradiating the white light source on the next information recording point of the recording layer of the physical storage medium of the optical disc; 根据下一信息记录点的测量光信号与所述关联关系得到下一信息记录点的数字存储信息,直至读出所有信息记录点的数字存储信息。The digital storage information of the next information recording point is obtained according to the measurement optical signal of the next information recording point and the association relationship, until the digital storage information of all information recording points is read out. 3.一种从反射测量光谱中解码出光刻信息的方法,其特征在于,包括:3. A method for decoding lithography information from reflectance measurement spectra, comprising: 预先建立光盘物理存储介质的记录层上的连续刻写沟槽深度信息wk及其对应的数字存储信息sk、反射测量光谱信息refk的关联关系;其中,各反射测量光谱信息refk构成反射测量光谱集Ref={ref1,ref2,...,ref2m};Pre-establish the relationship between the continuously written groove depth information w k on the recording layer of the optical disc physical storage medium and its corresponding digital storage information s k , and reflection measurement spectral information ref k ; wherein, each reflection measurement spectral information ref k constitutes a reflection Measurement spectrum set Ref={ref 1 ,ref 2 ,...,ref 2m }; 在获得经测量得到的一信息记录点的反射光谱信息refk′时,在所述关联关系中查找与之匹配的反射测量光谱信息refk所对应的连续刻写沟槽深度信息wk,进而将该连续刻写沟槽深度信息wk对应的数字存储信息sk作为解码得到的所述信息记录点的数字存储信息。When obtaining the measured reflection spectrum information ref k ′ of an information recording point, search for the corresponding continuously written groove depth information w k corresponding to the reflection measurement spectrum information ref k in the correlation relationship, and then write The digital storage information sk corresponding to the continuous writing groove depth information w k is used as the digital storage information of the information recording point obtained by decoding. 4.一种基于纳米光刻的光盘读取装置,其特征在于,包括:4. An optical disc reading device based on nanolithography, characterized in that it comprises: 光路模块,用于形成白光光源,并将其聚焦照射于光盘物理存储介质的记录层的一信息记录点;用于收集光测量信号;所述测量光信号中包括所述信息记录点的由其各深度信息刻写沟槽的反射光场相干叠加而成的总反射光场
Figure FDA0004081245590000021
其中,
The optical path module is used to form a white light source and focus it on an information recording point of the recording layer of the optical disc physical storage medium; it is used to collect optical measurement signals; the measurement optical signal includes the information recording point by its The total reflected light field formed by the coherent superimposition of the reflected light fields of each depth information writing groove
Figure FDA0004081245590000021
in,
Figure FDA0004081245590000022
为所述信息记录点的第i个刻写沟槽的反射光场;E0为未刻写沟槽的反射光场;m为所述信息记录点的数据存储位点的位数;“0”和“1”数码分别表示所述信息记录点的数据存储位点处是否有刻写沟槽;n1(λ)为所述光盘物理存储介质的记录层的折射率,其依赖于刻写光束的波长λ;Zi为第i个刻写沟槽的深度,Z0=0表示未刻写的沟槽深度信息为0;l0为所述记录层的厚度;/>
Figure FDA0004081245590000023
Δn=n1-n0,n0为空气的折射率,所述光路模块包括:光源、透镜组、高倍物镜、分束镜、及单个透镜;
Figure FDA0004081245590000022
Be the reflected light field of the i-th writing groove of the information recording point; E 0 is the reflected light field of the unwritten groove; m is the number of bits of the data storage position of the information recording point; "0" and The numbers "1" respectively indicate whether there is a writing groove at the data storage point of the information recording point; n 1 (λ) is the refractive index of the recording layer of the physical storage medium of the optical disc, which depends on the wavelength λ of the writing beam ;Z i is the depth of the i-th writing groove, Z 0 =0 means that the depth information of the unwritten groove is 0; l 0 is the thickness of the recording layer;/>
Figure FDA0004081245590000023
Δn=n 1 -n 0 , n 0 is the refractive index of air, and the optical path module includes: a light source, a lens group, a high-magnification objective lens, a beam splitter, and a single lens;
处理模块,用于预先获得所述光盘物理存储介质的记录层上的连续沟槽刻写信息wk及其对应的反射测量光谱信息refk的关联关系;在从所述测量光信号中得到反射测量光谱信息refk后,在所述关联关系中查找与之匹配的反射测量光谱信息refk所对应的连续刻写沟槽信息wk,据以作为所述信息记录点的数字存储信息sk读出,所述处理模块包括:光谱仪;其中,所述光源,用于发出白光;所述透镜组,用于将所述白光进行准直扩束并汇聚到所述分束镜;所述分束镜,用于对接收的白光进行分光并发射至所述高倍物镜;所述高倍物镜,用于将接收的白光聚焦作用于光盘物理存储介质的表面,以对其记录层进行反射测量,并将收集的测量光信号射出;所述单个透镜,用于将所述测量光信号汇聚至所述光谱仪;所述光谱仪,用于处理接收的测量光信号,并从中解码出数据存储信息,所述光谱仪包括:光栅光谱仪或高速测量光谱仪;所述高速测量光谱仪包括:光学色散元件、窄带集成滤光片、及线阵探测器;其中,所述光学色散元件,用于对接收的测量光信号进行分光,以使反射光谱信息在空间上展开;所述窄带集成滤光片,用于获得经所述光学色散元件色散后的反射光谱信息所对应的波长的光;所述线阵探测器,用于对经所述窄带集成滤光片所得到的各波长的光的光强进行探测,以获得反射光谱信息。The processing module is used to pre-obtain the relationship between the continuous groove writing information w k on the recording layer of the physical storage medium of the optical disc and the corresponding reflectance measurement spectral information ref k ; obtain the reflectance measurement from the measurement optical signal After the spectral information ref k , search for the matching continuous writing groove information w k corresponding to the reflectance measurement spectral information ref k in the association relationship, and read it as the digital storage information sk of the information recording point , the processing module includes: a spectrometer; wherein, the light source is used to emit white light; the lens group is used to collimate and expand the white light and converge it to the beam splitter; the beam splitter , for splitting the received white light and sending it to the high-magnification objective lens; the high-magnification objective lens is used for focusing the received white light on the surface of the physical storage medium of the optical disc to measure the reflection of the recording layer, and collect The measurement light signal is emitted; the single lens is used to converge the measurement light signal to the spectrometer; the spectrometer is used to process the received measurement light signal and decode data storage information therefrom, and the spectrometer includes : a grating spectrometer or a high-speed measurement spectrometer; the high-speed measurement spectrometer includes: an optical dispersion element, a narrow-band integrated filter, and a linear array detector; wherein the optical dispersion element is used to split the received measurement optical signal, to expand the reflection spectrum information in space; the narrow-band integrated filter is used to obtain the light of the wavelength corresponding to the reflection spectrum information dispersed by the optical dispersion element; the linear array detector is used to detect The light intensity of each wavelength of light obtained by the narrow-band integrated filter is detected to obtain reflection spectrum information.
5.根据权利要求4所述的光盘读取装置,其特征在于,所述光源为卤素灯、钨灯、氙灯、白光LED灯、带通滤波的白光光源、或紫外LED光源。5 . The optical disc reading device according to claim 4 , wherein the light source is a halogen lamp, a tungsten lamp, a xenon lamp, a white LED lamp, a band-pass filtered white light source, or an ultraviolet LED light source. 6.一种基于纳米光刻的光盘读写装置,其特征在于,包括:如权利要求4至5中任一项所述的基于纳米光刻的光盘读取装置。6. A device for reading and writing an optical disc based on nanolithography, characterized in that it comprises: the device for reading and writing an optical disc based on nanolithography according to any one of claims 4 to 5. 7.根据权利要求6所述的光盘读写装置,其特征在于,所述读取装置还包括第三二向色镜,设于所述读取装置的透镜组与分束镜之间,用于将经该透镜组准直扩束的白光反射至所述高倍物镜;7. The optical disc reading and writing device according to claim 6, wherein the reading device further comprises a third dichroic mirror, which is arranged between the lens group and the beam splitter of the reading device, for To reflect the white light collimated and expanded by the lens group to the high-power objective lens; 所述分束镜,用于对所述高倍物镜射出的测量光信号进行分光;The beam splitter is used to split the measurement optical signal emitted by the high-magnification objective lens; 所述单个透镜,用于将经所述分束镜分光的测量光信号汇聚至所述光谱仪。The single lens is used for converging the measurement optical signal split by the beam splitter to the spectrometer.
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