CN113374742B - Silicon carbide steam jet vacuum pump - Google Patents
Silicon carbide steam jet vacuum pump Download PDFInfo
- Publication number
- CN113374742B CN113374742B CN202110711828.8A CN202110711828A CN113374742B CN 113374742 B CN113374742 B CN 113374742B CN 202110711828 A CN202110711828 A CN 202110711828A CN 113374742 B CN113374742 B CN 113374742B
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- China
- Prior art keywords
- conical
- silicon carbide
- mixing chamber
- cavity
- steam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 44
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 229910000831 Steel Inorganic materials 0.000 claims description 27
- 239000010959 steel Substances 0.000 claims description 27
- 230000008602 contraction Effects 0.000 claims description 7
- 230000008676 import Effects 0.000 claims 2
- 238000005260 corrosion Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 abstract description 7
- 230000007797 corrosion Effects 0.000 abstract description 6
- -1 polytetrafluoroethylene Polymers 0.000 abstract description 6
- 229920001343 polytetrafluoroethylene Polymers 0.000 abstract description 6
- 239000004810 polytetrafluoroethylene Substances 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000000605 extraction Methods 0.000 abstract 1
- 238000003825 pressing Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 229910000975 Carbon steel Inorganic materials 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 239000010962 carbon steel Substances 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- 238000010793 Steam injection (oil industry) Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
- F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
- F04F5/46—Arrangements of nozzles
- F04F5/463—Arrangements of nozzles with provisions for mixing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
- F04F5/46—Arrangements of nozzles
- F04F5/469—Arrangements of nozzles for steam engines
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Jet Pumps And Other Pumps (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
本发明所述的一种碳化硅蒸汽喷射真空泵的碳化硅喷咀具有高强度、高导热、耐高温等性能；本发明的碳化硅喷咀综合了蒸汽腔和喷嘴两个功能，使蒸汽喷射真空泵结构更简单，组装更方便；本发明的钢衬四氟混合室壳体和扩散器采用钢衬四氟材质，既能满足防腐要求，又能相应减少设备投入，有利于推广应用；本发明的过流件部分防腐性能优异，可以满足高温、强腐蚀条件下的抽真空要求；通过金属压板法兰将碳化硅喷咀密封面通过法兰对夹的方式与衬四氟混合室法兰连接在一起，增加了装配的可靠性；本发明包括用于喷射蒸汽的碳化硅喷咀、钢衬四氟混合室壳体、钢衬四氟扩散器和金属压板法兰。
The silicon carbide nozzle of the silicon carbide steam jet vacuum pump described in the present invention has the properties of high strength, high thermal conductivity, high temperature resistance, etc.; the silicon carbide nozzle of the present invention combines the two functions of the steam chamber and the nozzle, so that the steam jet vacuum pump has a simpler structure and is more convenient to assemble; the steel-lined polytetrafluoroethylene mixing chamber shell and the diffuser of the present invention are made of steel-lined polytetrafluoroethylene material, which can not only meet the anti-corrosion requirements, but also reduce the equipment investment accordingly, which is conducive to promotion and application; the flow-through part of the present invention has excellent anti-corrosion performance and can meet the vacuum extraction requirements under high temperature and strong corrosion conditions; the silicon carbide nozzle sealing surface is connected to the polytetrafluoroethylene mixing chamber flange by a flange clamping method through a metal pressure plate flange, thereby increasing the reliability of assembly; the present invention includes a silicon carbide nozzle for jetting steam, a steel-lined polytetrafluoroethylene mixing chamber shell, a steel-lined polytetrafluoroethylene diffuser and a metal pressure plate flange.
Description
Technical Field
The invention relates to the technical field of steam jet vacuum pumps, in particular to a silicon carbide steam jet vacuum pump.
Background
The steam jet vacuum pump is a reliable and economical device for preparing vacuum by using steam as power, does not need electric power, does not have moving and rotating parts, has simple system and reliable operation, and is widely used. A common steam injector consists of four components, a steam chamber, a nozzle, a mixing chamber and a diffuser.
The common materials of the existing steam jet vacuum pump are carbon steel, cast iron and stainless steel, but other materials such as Monel alloy, hastelloy, polytetrafluoroethylene, carbon steel lining graphite and the like are also frequently adopted due to the application universality of the steam jet vacuum pump. But the selection of current material is used and can not satisfy the operating mode of high strength, high temperature, strong corruption simultaneously, especially when being taken out when containing strong corruption gas such as high temperature hydrofluoric acid in the container, the steam injector of current material can not satisfy the requirement of long-time steady operation, exists deformation, corruption, the risk of damage at any time, and the structure of current steam injection vacuum pump is complicated, and the equipment is inconvenient.
Disclosure of Invention
In order to overcome the defects of the technology, the invention aims to provide the silicon carbide steam jet vacuum pump.
The technical scheme includes that the silicon carbide steam jet vacuum pump comprises a silicon carbide nozzle for jetting steam, a steel lining tetrafluoro mixing chamber shell, a steel lining tetrafluoro diffuser and a metal pressing plate flange, wherein the steel lining tetrafluoro diffuser comprises a first conical tube, a cylindrical tube and a second conical tube, the first conical tube, the cylindrical tube and the second conical tube are coaxially arranged, two ends of the cylindrical tube are fixedly communicated with the small diameter end of the first conical tube and the small diameter end of the second conical tube respectively, two ends of the steel lining tetrafluoro mixing chamber shell are respectively provided with an inlet and an outlet, the inlet end of the steel lining tetrafluoro mixing chamber shell is fixedly provided with a first flange matched with the metal pressing plate flange, the outlet end of the steel lining tetrafluoro mixing chamber shell is fixedly communicated with the large diameter end of the first conical tube, the steel lining tetrafluoro mixing chamber shell is provided with a driven inlet for enabling mixed gas to enter the steel lining tetrafluoro mixing chamber shell, the silicon carbide nozzle is sequentially provided with a small diameter end of the first conical tube and the small diameter end of the second conical tube, two ends of the cylindrical tube are sequentially communicated with the cylindrical throat and the cylindrical expansion cavity, the cylindrical expansion cavity is formed by the cylindrical expansion cavity is communicated with the small diameter of the cylindrical expansion cavity, and the cylindrical expansion cavity is communicated with the cylindrical expansion cavity, and the diameter of the cylindrical expansion cavity is communicated with the expansion cavity, and the expansion cavity is communicated with the expansion cavity.
Further, the diameter of the large diameter end of the conical shrinkage cavity is larger than that of the large diameter end of the conical expansion cavity, and the inner diameter of the large diameter end of the first conical pipe is smaller than that of the large diameter end of the second conical pipe.
Further, the cylindrical steam cavity, the conical shrinkage cavity, the cylindrical throat cavity, the conical expansion cavity, the first conical pipe, the cylindrical pipe and the second conical pipe are coaxially arranged.
Compared with the prior art, the invention has the following beneficial effects:
The silicon carbide nozzle has the advantages of high strength, high heat conduction and high temperature resistance, continuous flushing of working steam can not influence the structure of the silicon carbide nozzle, stable operation of the steam ejector is guaranteed, the silicon carbide nozzle integrates two functions of a steam cavity and a nozzle, the structure of a steam ejector vacuum pump is simpler, assembly is more convenient, the steel lining tetrafluoro mixing chamber shell and the steel lining tetrafluoro diffuser adopt steel lining tetrafluoro materials due to complex forming technology of silicon carbide special-shaped parts, corrosion resistance requirements can be met, equipment investment can be correspondingly reduced, popularization and application of the silicon carbide steam ejector vacuum pump are facilitated, the corrosion resistance of a part of the silicon carbide steam ejector vacuum pump can be excellent, vacuumizing requirements under high temperature and strong corrosion conditions can be met, the blank of the application field of vacuum equipment is filled, the sealing surface of the silicon carbide nozzle is connected with the flange of the steel lining tetrafluoro mixing chamber shell through a flange in a flange butt clamping mode through a metal pressing plate flange, and the assembly reliability is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic structural view of a silicon carbide nozzle of the present invention.
Detailed Description
The invention will now be described in detail with reference to the drawings and to specific embodiments.
As shown in fig. 1 to 2, the silicon carbide vapor injection vacuum pump comprises a silicon carbide nozzle 1 for injecting vapor, a steel-lined tetrafluoro mixing chamber shell 2, a steel-lined tetrafluoro diffuser 3 and a metal pressing plate flange 4, wherein the steel-lined tetrafluoro diffuser 3 comprises a first conical tube 301, a cylindrical tube 302 and a second conical tube 303, the first conical tube 301, the cylindrical tube 302 and the second conical tube 303 are coaxially arranged, two ends of the cylindrical tube 302 are fixedly communicated with the small diameter end of the first conical tube 301 and the small diameter end of the second conical tube 303 respectively, two ends of the steel-lined tetrafluoro mixing chamber shell 2 are provided with an inlet and an outlet respectively, the inlet end of the steel-lined tetrafluoro mixing chamber shell 2 is fixedly provided with a first flange 201 for being matched with the metal pressing plate flange 4, the outlet end of the steel-lined tetrafluoro mixing chamber shell 2 is fixedly communicated with the large diameter end of the first conical tube 301, the steel-lined tetrafluoro mixing chamber shell 2 is provided with an inlet 5 for allowing mixed gas to enter the steel-lined tetrafluoro mixing chamber shell 2, the silicon carbide nozzle 1 is sequentially connected with the cylindrical nozzle 1 along the direction of the cylindrical nozzle 1, the cylindrical silicon carbide chamber 1 is sequentially connected with the cylindrical silicon carbide chamber 101 and the other end of the cylindrical silicon carbide mixing chamber 1 by the cylindrical flange 1, and the cylindrical silicon carbide chamber 2 is sequentially connected with the cylindrical silicon carbide chamber 101 is sequentially communicated with the cylindrical silicon carbide chamber 1 by the cylindrical nozzle 1 through the cylindrical inlet and the cylindrical inlet end 101 and the cylindrical silicon carbide chamber 2 and the silicon carbide chamber 2 is sequentially provided with the silicon carbide chamber; the cylindrical steam chamber 101, the conical contraction chamber 102, the cylindrical throat chamber 103 and the conical expansion chamber 104 are all coaxially arranged, the two ends of the cylindrical throat cavity 103 are fixedly communicated with the small diameter end of the conical shrinkage cavity 102 and the small diameter end of the conical expansion cavity 104 respectively, and the large diameter end of the conical shrinkage cavity 102 is communicated with the cylindrical steam cavity 101.
The diameter of the large diameter end of the conical contraction cavity 102 is larger than that of the large diameter end of the conical expansion cavity 104, and the inner diameter of the large diameter end of the first conical tube 301 is smaller than that of the large diameter end of the second conical tube 303.
The cylindrical steam chamber 101, the conical shrink chamber 102, the cylindrical throat chamber 103, the conical expansion chamber 104, the first conical tube 301, the cylindrical tube 302 and the second conical tube 303 are coaxially arranged.
The steel lined tetrafluoro mixing chamber housing 2, the first conical tube 301, the cylindrical tube 302 and the second conical tube 303 are all made of steel lined tetrafluoro. The silicon carbide nozzle 1 is made of silicon carbide material.
The invention has excellent corrosion resistance at the contact part with the gas to be mixed, the flow rate of the working steam is increased after the working steam enters the silicon carbide nozzle 1 and is contracted by the conical contraction cavity 102, the Laval effect is generated when the working steam with the increased flow rate passes through the cylindrical throat cavity 103, the depressurization energy is completely converted into kinetic energy, the flow rate of the working steam reaches the sonic velocity, and the working steam is sprayed out from the large diameter end of the conical expansion cavity 104 to form vacuum, the gas to be mixed enters the steel-lined tetrafluoro mixing chamber shell 2 from the pumped inlet 5 under the action of pressure difference, enters the steel-lined tetrafluoro diffuser 3 after being mixed with the working steam, then the mixed gas passes through the steel-lined tetrafluoro diffuser 3 at the subsonic velocity, the flow rate of the mixed gas is reduced, the pressure is increased, and finally the mixed gas is discharged from the large diameter end of the second conical pipe 303.
The steel lined tetrafluoro mixing chamber housing 2 and the steel lined tetrafluoro diffuser 3 can be made in a variety of fluorine lined modes including tetrafluoro molding, PFA spraying, tetrafluoro winding, etc., and can be regarded as alternative fluorine lined modes as long as the manufacturing process can meet the design requirements.
According to different corrosion performances of the vacuumized medium, the silicon carbide nozzle 1 can be made of pressureless sintered silicon carbide or reaction sintered silicon carbide.
The steel lined tetrafluoro mixing chamber housing 2 and the steel lined tetrafluoro diffuser 3 can also be designed and fabricated using steel lined silicon carbide tubing technology, regardless of manufacturing costs.
The silicon carbide nozzle 1 can also be designed to be directly connected with the steel lined tetrafluoro mixing chamber shell 2 by a flange, but the flange holes on the silicon carbide flange plate can cause the cracking of the silicon carbide flange plate due to uneven stress of a fastener during locking, and the unreliable design is not taken as a preferable scheme.
The above examples give detailed embodiments and specific operation procedures on the premise of the technical solution of the present invention, but the scope of protection of the present invention is not limited to the above examples.
Claims (1)
1. A silicon carbide vapor jet vacuum pump, characterized in that: including being used for ejecting the carborundum nozzle (1), steel lining tetrafluoro mixing chamber casing (2), steel lining tetrafluoro diffuser (3) and metal clamp plate flange (4) of steam, steel lining tetrafluoro diffuser (3) are including first conical tube (301), cylinder pipe (302) and second conical tube (303), first conical tube (301), cylinder pipe (302) and second conical tube (303) coaxial setting, the both ends of cylinder pipe (302) respectively with the minor diameter end of first conical tube (301) and the minor diameter end fixed intercommunication of second conical tube (303), steel lining tetrafluoro mixing chamber casing (2) both ends are provided with import and export respectively, the import end fixed of steel lining tetrafluoro mixing chamber casing (2) is provided with first flange (201) that are used for with metal clamp plate flange (4) matched with, the export end of steel lining tetrafluoro mixing chamber casing (2) and the major diameter end fixed intercommunication of first conical tube (301), be provided with on steel lining tetrafluoro mixing chamber casing (2) and be used for supplying to get into the mixed gas and be used for the steam to get into in the steam inlet (102) of four conical mixing chamber casing (2), the steam inlet (102) is arranged in proper order in the steam inlet (101) of steam mixing chamber is followed, the cylindrical throat cavity (103) and the conical expansion cavity (104) are coaxially arranged, two ends of the cylindrical throat cavity (103) are fixedly communicated with the small diameter end of the conical contraction cavity (102) and the small diameter end of the conical expansion cavity (104) respectively, the large diameter end of the conical contraction cavity (102) is communicated with the cylindrical steam cavity (101), the diameter of the large diameter end of the conical contraction cavity (102) is larger than that of the large diameter end of the conical expansion cavity (104), the inner diameter of the large diameter end of the first conical pipe (301) is smaller than that of the large diameter end of the second conical pipe (303), and the cylindrical steam cavity (101), the conical contraction cavity (103), the conical throat cavity (104), the second conical pipe (302) and the cylindrical expansion pipe (303) are coaxially arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110711828.8A CN113374742B (en) | 2021-06-25 | 2021-06-25 | Silicon carbide steam jet vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110711828.8A CN113374742B (en) | 2021-06-25 | 2021-06-25 | Silicon carbide steam jet vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113374742A CN113374742A (en) | 2021-09-10 |
| CN113374742B true CN113374742B (en) | 2024-11-29 |
Family
ID=77579266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110711828.8A Active CN113374742B (en) | 2021-06-25 | 2021-06-25 | Silicon carbide steam jet vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113374742B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN215908133U (en) * | 2021-06-25 | 2022-02-25 | 无锡英罗唯森科技有限公司 | Silicon carbide steam jet vacuum pump |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101625000A (en) * | 2009-08-06 | 2010-01-13 | 河北科技大学 | Adjustable multi-streaming type steam jet heat pump |
| JP2016538426A (en) * | 2013-11-30 | 2016-12-08 | アルセロールミタル | Improved pusher pump that is resistant to corrosion by molten aluminum and has an improved flow profile |
| CN106050724B (en) * | 2016-07-27 | 2019-05-03 | 湖北托马斯流体技术有限公司 | A kind of desulfurization pump of lining resin silicon carbide |
| WO2020072393A1 (en) * | 2018-10-04 | 2020-04-09 | Harris George E | Jet pump |
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2021
- 2021-06-25 CN CN202110711828.8A patent/CN113374742B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN215908133U (en) * | 2021-06-25 | 2022-02-25 | 无锡英罗唯森科技有限公司 | Silicon carbide steam jet vacuum pump |
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| Publication number | Publication date |
|---|---|
| CN113374742A (en) | 2021-09-10 |
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