CN113314392B - Space plasma instrument calibration ion source device - Google Patents

Abstract

The invention discloses a space plasma instrument scaling ion source device, which comprises an ionization cavity (14), a differential pump (20), a hot cathode filament (10) discharge device and an accelerating electric field generating device (15), wherein the accelerating electric field generating device (15) comprises a positive electrode (16), a grounding electrode (17) and a negative electrode (18); the hot cathode filament (10) discharge device is assembled at one side of the ionization chamber (14), and the other side of the ionization chamber (14) is fixed with the accelerating electric field generating device (15) which are communicated with the ionization chamber (14); the center of the accelerating electric field generating device (15) is integrally provided with a through hole, and the accelerating electric field generating device comprises three layers of metal grids which are respectively used as a positive electrode (16), a grounding electrode (17) and a negative electrode (18) of an electric field area; the differential pump (20) is mounted on one side of the accelerating electric field generating device (15). The invention effectively reduces the ion beam current intensity, meets the ground calibration test of the space plasma instrument, optimizes the test device and simplifies the test process.

Description

Space plasma instrument calibration ion source device

technical field

The invention relates to the technical field of ion sources, in particular to a space plasma instrument calibration ion source device.

Background technique

Ion source is an applied science and technology with wide application, involving many sciences, strong technological process and rapid development. As a highly specialized ion source, the space plasma instrument calibration ion source device is mainly used in the ground calibration test of space probes. The space plasma instrument calibration ion source device uses tungsten wire to generate thermal electrons with limited quantity and intensity, which reduces the mean free path of electrons and reduces the number of ions generated. Then, by designing an accelerating electric field generating device with a large aperture, it can effectively control The intensity of the ion beam produced by the ion source. However, the ion beam intensity generated by the ion source used in modern science and technology reaches the level of milliamps to mu amps. The traditional space probe ground calibration test needs to install grids and other methods to reduce the ion beam generated by the ion source. The beam intensity leads to the complexity of the test device and test process.

Contents of the invention

The invention relates to a space plasma instrument calibration ion source device. The space plasma instrument calibration ion source device includes an ionization chamber 14, a differential pump 20, a hot cathode filament 10 discharge device, an accelerating electric field generating device 15, and the accelerating electric field generating device 15 includes a positive electrode 16, a ground electrode 17 and a negative electrode 18 . The hot cathode filament 10 discharge device is assembled on one side of the ionization chamber 14 , and the other side of the ionization chamber 14 is fixed with an accelerating electric field generator 15 , both of which communicate with the ionization chamber 14 . The center of the accelerating electric field generating device 15 has a hole of 10 cm, including three layers of metal grids, which serve as the positive electrode 16, the ground electrode 17 and the negative electrode 18 in the electric field area. The differential pump 20 is mounted on one side of the accelerating electric field generating device 15 . Using the above-mentioned space plasma instrument to calibrate the ion source device is to use the hot cathode filament 10 to emit thermal electrons with a small number and low intensity, and ionize a number of ions that are relatively small in the ionization chamber 14 compared with the traditional ion source, and then by The ion extraction through-hole 19 with a diameter of 10 cm extracts the ion beam, thereby effectively controlling the flow of the ion beam and meeting the ion beam intensity requirements for the ground calibration experiment of the space plasma instrument.

Based on this, it is necessary to overcome the defects of the prior art and provide a space plasma instrument calibration ion source device, which can simplify the test device, optimize the test process, and improve the test efficiency.

Its technical scheme is as follows:

A space plasma instrument calibration ion source device is characterized in that the space plasma instrument calibration ion source device includes an ionization chamber 14, a differential pump 20, a hot cathode filament 10 discharge device, an accelerating electric field generating device 15, and an acceleration The electric field generating device 15 includes a positive electrode 16, a ground electrode 17 and a negative electrode 18; the hot cathode filament 10 discharge device is assembled on one side of the ionization chamber 14, and the other side of the ionization chamber 14 is fixed with an accelerating electric field generating device 15, which are all connected to the ionization chamber 14 through; the center of the accelerating electric field generating device 15 is integrally opened, including three layers of metal grids, which are respectively used as the positive electrode 16, the ground electrode 17 and the negative electrode 18 in the electric field area; the differential pump 20 is assembled on one side of the accelerating electric field generating device 15 .

Further, the said through hole is the ion extraction through hole 19 . The diameter of the through hole is 5-10 cm.

Further, the ionization chamber 14 is designed with an air inlet pipe 13 and an ion outlet 21 .

Further, the hot cathode filament 10 discharge device uses tungsten wire as an electron generating material, and the tungsten wire is connected to a power source 11 .

Further, an ion extraction through hole 19 with a diameter of 10 cm is designed at the center of the accelerating electric field generating device 15 .

Further, the differential pump 20 is connected to the accelerating electric field generating device 15 , and the differential pump 20 is in communication with the ionization chamber 14 .

When the above-mentioned device is in operation, the gas enters the ionization chamber 14 and fills the entire ionization chamber 14. At the same time, the voltage source is connected to the hot cathode filament 10, and the tungsten filament generates heat to generate thermal electrons, which are discharged in the ionization chamber 14 Moved by the electromagnetic field and collide with gas atoms to generate ions, the ions are drawn out to the accelerating electric field generating device 15 in the ionization chamber 14 .

Specifically, a space plasma instrument calibration ion source device, the ion source includes: an ionization chamber 14, the ionization chamber 14 is designed with an inlet pipe 13, an ion exit port 21, and the two ends of the ionization chamber are designed with The assembly position that is convenient for other devices to install; Hot cathode filament 10 discharge device, described hot cathode filament 10 discharge device uses tungsten wire as electron generating material, and described tungsten wire is connected to power supply 11; Accelerating electric field generating device 15, described accelerating electric field An ion extraction through hole 19 with a diameter of 10 cm is designed at the center of the generating device 15. The accelerating electric field generating device 15 is provided with a three-layer metal grid. An electrode 18 ; a differential pump 20 , the differential pump is connected to the accelerating electric field generator 15 , and the differential pump is in communication with the ionization chamber 14 .

When the above-mentioned space plasma instrument calibration ion source device is working, the gas enters the ionization chamber and fills the entire ionization chamber. The interior is moved by the electromagnetic field and collides with gas atoms to generate a large number of ions, which are drawn out to the accelerating electric field generating device in the ionization chamber. On the one hand, the number and intensity of hot electrons generated by the hot cathode filament are limited, which can effectively control the number of ions generated in the ionization chamber; The flux of ions emitted by the ion source. Compared with the traditional ion source, the design of the present invention can effectively reduce the intensity of the ion beam, satisfy the ground calibration test of the space plasma instrument, and can optimize the test device and simplify the test process.

Advantages and positive effects:

The invention uses tungsten wires to generate thermal electrons with limited quantity and intensity, reduces the mean free path of electrons, reduces the number of ions generated, and then can effectively control the ion beam current generated by the ion source by designing an accelerating electric field generating device with a large aperture. strength. Compared with the traditional ion source, the design of the present invention can effectively reduce the intensity of the ion beam, satisfy the ground calibration test of the space plasma instrument, and can optimize the test device and simplify the test process.

Description of drawings

Fig. 1 is a schematic structural diagram of the calibration ion source device of the space plasma instrument of the present invention.

In the picture:

10. Hot cathode filament; 11. Power supply; 12. Air valve; 13. Intake pipe; 14. Ionization chamber; 15. Accelerating electric field generating device; 16. Positive electrode; 17. Grounding electrode; 18. Negative electrode; 19. Ion extraction through hole; 20, differential pump; 21, ion exit port.

detailed description

In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present application, not to limit the present application.

In one embodiment, as shown in FIG. 1, FIG. 1 is a schematic structural diagram of a space plasma instrument calibration ion source device in an embodiment. In this embodiment, a space plasma instrument calibration ion source device is provided, including Hot cathode filament 10, power supply 11, gas valve 12, air intake pipe 13, ionization chamber 14, accelerating electric field generating device 15, positive electrode 16, ground electrode 17, negative electrode 18, ion extraction through hole 19, differential pump 20. The hot cathode filament 10 discharge device is assembled on one side of the ionization chamber 14 , and the other side of the ionization chamber 14 is fixed with an accelerating electric field generator 15 , both of which communicate with the ionization chamber 14 . The center of the accelerating electric field generating device 15 has a hole of 10 cm, including three layers of metal grids, which serve as the positive electrode 16, the ground electrode 17 and the negative electrode 18 in the electric field area. The through holes are ion extraction through holes 19 . The differential pump 20 is mounted on one side of the accelerating electric field generating device 15 . Using the above-mentioned space plasma instrument to calibrate the ion source device is to use the hot cathode filament 10 to emit thermal electrons with a small number and low intensity, and ionize a number of ions that are relatively small in the ionization chamber 14 compared with the traditional ion source, and then by The ion extraction through-hole 19 with a diameter of 10 cm extracts the ion beam, thereby effectively controlling the flow of the ion beam and meeting the ion beam intensity requirements for the ground calibration experiment of the space plasma instrument.

An ionization chamber 14, the ionization chamber 14 is designed with an air inlet pipe 13 and an ion exit port 21, the two ends of the ionization chamber are designed with assembly positions for other devices to be installed; the air inlet pipe 13 is provided with an air valve 12. Hot cathode filament 10 discharge device, described hot cathode filament 10 discharge device uses tungsten wire as electron generating material, and described tungsten wire is connected to controllable power supply 11; Accelerating electric field generating device 15, the center of described accelerating electric field generating device 15 is designed There is an ion extraction through hole 19 with a diameter of 10 centimeters, and the accelerating electric field generating device 15 is provided with a three-layer metal grid, and the metal grid is respectively used as the positive electrode 16, the ground electrode 17 and the negative electrode 18 at the extreme end of the electric field; a differential pump 20 , the differential pump 20 is connected to the accelerating electric field generating device 15 , and the differential pump 20 is in communication with the ionization chamber 14 .

When the above-mentioned ion source is working, the gas valve 12 is opened, and the gas enters the ionization chamber 14 through the gas pipeline 13. At the same time, the power supply 11 is used to apply a voltage to the hot cathode filament 10, and the hot cathode filament 10 generates heat to generate thermal electrons, and the thermal electrons and gas Ions are generated by collisions in the ionization chamber 14, and the ions are drawn out to the accelerating electric field generator 15, and a positive strong electric field is generated between the positive electrode 16 and the grounding electrode 17 to accelerate the ions generated in the ionization chamber 14 to a certain exit velocity, and ground A reverse weak electric field is generated between the electrode 17 and the negative electrode 18 to prevent the electrons outside the ion source from entering the ion source through the ion extraction through hole 19. The differential pump 20 is assembled below the accelerating electric field generating device. The differential pump 20 is used to maintain the ion source. Pressure balance inside and outside the source.

The ion source in the above embodiment, on the one hand, can effectively control the quantity of ions produced in the ionization chamber 14 due to the limited number and intensity of thermionic electrons produced by the hot cathode filament 10; on the other hand, the accelerating electric field generating device 15 is designed with The ion extraction through hole 19 with a diameter of 10 cm can effectively reduce the flux of the ion extraction from the ion source. Therefore, to meet the needs of the ion intensity required for the ground calibration test of the space plasma instrument, improve the efficiency of the test, and optimize the test process.

It should be noted that the hot cathode filament 10 uses tungsten filament material.

It should be noted that the gas is specifically nitrogen, helium, hydrogen or other inert gases that do not participate in chemical reactions, which are not limited here and are set according to actual needs.

The above-mentioned embodiments only express the implementation mode of the present application, but should not be interpreted as limiting the scope of the patent for the invention. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present application, and these modifications and improvements all belong to the protection scope of the present application.

Claims (1)

1. A space plasma instrument calibration ion source device is characterized in that the space plasma instrument calibration ion source device comprises an ionization chamber (14), a differential pump (20), a hot cathode filament (10) discharge device And accelerating electric field generating device (15), accelerating electric field generating device (15) comprises positive electrode (16), ground electrode (17) and negative electrode (18); Hot cathode filament (10) discharge device is assembled in ionization chamber (14) On one side, the accelerating electric field generator (15) is fixed on the other side of the ionization chamber (14), which are all connected to the ionization chamber (14); the center of the accelerating electric field generator (15) is integrally opened, including three layers of metal grids, Positive electrode (16), ground electrode (17) and negative electrode (18) respectively as electric field area; Differential pump (20) is assembled on one side of accelerating electric field generating device (15); Described hot cathode filament (10) discharges The device uses a tungsten wire as an electron generating material, and the tungsten wire is connected to a power supply (11); the diameter of the through hole is 10 cm; the differential pump (20) is connected to the accelerating electric field generating device (15), The differential pump (20) communicates with the ionization chamber (14); The through holes are ion extraction through holes (19); The ionization chamber (14) is designed with an air inlet duct (13) and an ion exit port (21); When the device is in operation, the gas enters the ionization chamber (14) and fills the entire ionization chamber (14). At the same time, the voltage source is connected to the hot cathode filament (10), and the tungsten filament generates heat to generate thermal electrons. The ionization chamber (14) moves under the action of the electromagnetic field and collides with gas atoms to generate ions, and the ions are drawn out to the accelerating electric field generating device (15) in the ionization chamber (14).

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