CN113253087B - Silicon carbide dynamic detection equipment - Google Patents
Silicon carbide dynamic detection equipment Download PDFInfo
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- CN113253087B CN113253087B CN202110677477.3A CN202110677477A CN113253087B CN 113253087 B CN113253087 B CN 113253087B CN 202110677477 A CN202110677477 A CN 202110677477A CN 113253087 B CN113253087 B CN 113253087B
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 175
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 171
- 238000001514 detection method Methods 0.000 title claims abstract description 74
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- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
- B65G17/12—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface comprising a series of individual load-carriers fixed, or normally fixed, relative to traction element
- B65G17/123—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface comprising a series of individual load-carriers fixed, or normally fixed, relative to traction element arranged to keep the load-carriers horizontally during at least a part of the conveyor run
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
- B65G17/30—Details; Auxiliary devices
- B65G17/32—Individual load-carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
- B65G23/22—Arrangements or mountings of driving motors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/84—Star-shaped wheels or devices having endless travelling belts or chains, the wheels or devices being equipped with article-engaging elements
- B65G47/841—Devices having endless travelling belts or chains equipped with article-engaging elements
- B65G47/842—Devices having endless travelling belts or chains equipped with article-engaging elements the article-engaging elements being grippers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G59/00—De-stacking of articles
- B65G59/02—De-stacking from the top of the stack
- B65G59/026—De-stacking from the top of the stack with a stepwise upward movement of the stack
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G65/00—Loading or unloading
- B65G65/30—Methods or devices for filling or emptying bunkers, hoppers, tanks, or like containers, of interest apart from their use in particular chemical or physical processes or their application in particular machines, e.g. not covered by a single other subclass
- B65G65/32—Filling devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The invention belongs to the technical field of semiconductor detection equipment, and particularly relates to silicon carbide dynamic detection equipment which comprises a detection equipment main body and a sample introduction device, wherein the sample introduction device comprises a vertical frame and a shell, a lead connected with a silicon carbide device port and a detection equipment main body wiring port is laid on the vertical frame, one end of the lead used for being inserted into the port adopts a conductive metal column, and the top of the shell is provided with a penetrating port; a sample storage box, a sample conveying device, a sample collecting box and a controller are arranged in the shell, the sample conveying device is positioned between the conductive metal column and the sample storage box, and the sample conveying device is used for conveying the silicon carbide device to a proper position. The sample feeding device capable of continuous detection is developed and used with the silicon carbide detection equipment, all silicon carbide devices to be detected can be continuously tested, the speed is greatly increased compared with the traditional one-by-one device testing process, and the labor is saved.
Description
Technical Field
The invention belongs to the technical field of semiconductor detection equipment, and particularly relates to silicon carbide dynamic detection equipment.
Background
Semiconductor devices such as IGBTs, silicon carbide and the like are used in many apparatuses, the most common silicon carbide semiconductor device is a transistor, and silicon carbide transistors have the advantages of high blocking voltage, low on voltage, short off time, high temperature resistance and the like, and have great advantages in the application occasions of power electronic devices. SiC BJTs have more unique advantages during silicon carbide, such as close turn-off time to SiC MOSFETs, and no need for complex gate oxide processes. Although SiC BJTs have unique advantages, they are current-controlled devices that require a continuous supply of base current during device operation, which requires that the device function be stable.
In the prior art, in order to improve various performances of a silicon carbide device, researchers have conducted various researches, developed 1200V silicon carbide bipolar transistors with fast switches and low VCESAT, developed integrated silicon carbide transistors including NPN transistors, and the like. Regardless of the direction of emphasis on the function of a transistor, it is necessary to perform a functional test before it is put into use.
Some transistor testers have been developed in my earlier work, for example, the transistor scanning test system disclosed in CN203838298U, which includes a tester for testing transistors or diodes, and further includes a relay group and a relay control unit, where the relay control unit is used to control the on/off of each relay, the relay control unit is disposed in the tester, the tester can be connected with a plurality of transistor devices simultaneously, the transistors to be tested are selected by the on/off of the relays, and programmable devices such as a matched single chip microcomputer can realize automatic testing and improve the testing efficiency. However, although the conventional transistor tester can change the inefficient detection of one sample into a continuous sample detection process, the device still needs to rely on electrical components such as relays for performing a sample replacement process, and when the number of the electrical components is limited, the number of the samples to be detected is also limited. In order to further improve the detection efficiency of the silicon carbide sample, a device capable of continuously replacing the detection sample is required to be developed, which can meet the detection requirements of a large number of samples to be detected, can automatically replace the detection sample, and reduce the workload of replacing the detection sample.
Disclosure of Invention
In order to solve the technical problem, the invention provides silicon carbide dynamic detection equipment.
The invention aims to provide silicon carbide dynamic detection equipment which comprises a detection equipment main body and a sample introduction device, wherein the sample introduction device comprises a vertical frame and a shell, a lead connected with a silicon carbide device port and a detection equipment main body wiring port is paved on the vertical frame, one end of the lead connected with the silicon carbide device port is connected with a conductive metal column, the top of the shell is provided with a penetrating port, and the conductive metal column penetrates through the penetrating port;
a sample storage box, a sample conveying device, a sample collecting box and a controller are arranged in the shell, the sample conveying device is arranged on the inner side wall of the shell and is positioned between the conductive metal column and the sample storage box, the controller is arranged on the inner wall of the shell, and the controller is connected with the sample conveying device; the controller is used for controlling the sample conveying device to clamp the silicon carbide devices in the sample storage box and convey the silicon carbide devices to the conductive metal columns so that the conductive metal columns can be inserted into the corresponding silicon carbide device ports, and the sample conveying device is also used for transferring the detected silicon carbide devices into the sample collection box and then grabbing new silicon carbide devices in the sample storage box;
and a movable door is arranged at the position of the sample storage box and the sample collection box on the shell.
Preferably, in the above dynamic silicon carbide detection apparatus, the sample transfer device is a gripper, and the controller is connected to the gripper.
Preferably, in the above silicon carbide dynamic testing apparatus, the sample conveying device comprises an eccentric wheel, a non-eccentric conveying wheel, a conveying belt, a sample clamping member, a sample unlocking member and a rotating motor;
the rotating shafts of the eccentric wheel and the conveying wheel are rotatably arranged in the shell, the rotating shaft of the eccentric wheel, the center line of the sample storage box and the center line of the conductive metal column are positioned on the same vertical line, the eccentric wheel is positioned between the sample storage box and the conductive metal column, the conveying wheel is positioned on the side of the eccentric wheel, and the conveying belt is wrapped and in transmission connection between the eccentric wheel and the conveying wheel; a plurality of sample clamping pieces are dispersedly and uniformly distributed on the conveying belt along the transmission direction of the conveying belt;
the bottom in the sample storage box is provided with a lifting device, the silicon carbide devices are used for being stacked on the lifting device, and the silicon carbide device positioned at the topmost part can be clamped by the sample clamping piece on the conveyor belt;
the sample unlocking piece is installed on the inner wall of the shell and is positioned on the side of the sample conveying device, the sample unlocking piece and the conveying wheel are respectively positioned on two sides of the eccentric wheel, in addition, the sample unlocking piece is positioned right above the sample collecting box, and the sample unlocking piece can be opened close to the sample clamping piece on the silicon carbide device.
Preferably, in the above dynamic silicon carbide detection apparatus, the sample holder includes two insulated clamp arms disposed on the conveyor belt, and the clamp arms are elastic clamp arms or connected to the conveyor belt through elastic members;
sample unlocking piece includes two back timber slashes, every back timber slash and its homonymy the arm lock position is relative, works as the eccentric wheel is rotatory to lowest department and is passed through from the highest point during sample unlocking piece, back timber slash and its homonymy the arm lock butt gradually, and will the arm lock is to keeping away from the direction top of carborundum device is from, continues to rotate to lowest when the eccentric wheel, then the back timber slash gradually with the arm lock separation.
Preferably, in the above dynamic silicon carbide detection apparatus, an inclined edge is provided on the surface of each clamp arm, the inclined edge is in a shape of a half circular truncated cone or a shape of a smaller half circular truncated cone, one surface of the inclined edge close to the conveyor belt is a plane and is not in contact with the conveyor belt, the inclined edge is connected to one end of the elastic member, and the other end of the elastic member is connected to the conveyor belt;
the top beam diagonal rod is in a bent shape, and the bent radian is matched with the edge track of the eccentric wheel when the eccentric wheel rotates from the highest position to the lowest position and passes through the sample unlocking piece.
Preferably, in the above dynamic silicon carbide detection apparatus, the two top beam diagonal rods are connected by a baffle, a distance is reserved between the baffle and the eccentric wheel, and the thickness of the sample holder is smaller than that of the silicon carbide device.
Preferably, in the above silicon carbide dynamic detection apparatus, the elastic member is a spring or an elastic air bag, and the elastic member is movable relative to the conveyor belt.
Preferably, the silicon carbide dynamic detection device is provided with flanges along two edges of the conveyor belt, and the elastic member is connected to the flanges.
Preferably, in the above dynamic silicon carbide detection device, the vertical frame is an electric telescopic frame, and the electric telescopic frame is connected to the controller.
Preferably, in the above dynamic silicon carbide detection apparatus, the lifting device is an electric lifting table, and an inclined surface is adopted on an upper surface of the lifting device, and when the sample holder is located directly above the lifting device, the inclined surface is parallel to the sample holder. Preferably, a pressure sensor is arranged at the top of the lifting device, and the controller is connected with the pressure sensor.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention discloses a silicon carbide device dynamic parameter test board series developed in earlier period, which is suitable for time parameter test of devices such as silicon carbide diodes, the equipment can meet the detection requirement of the market for the silicon carbide devices, in order to further improve the performance of the equipment and develop more equipment meeting the market requirement, the invention develops a sample injection device which is matched with silicon carbide detection equipment and can carry out continuous detection, can finish the continuous test of all silicon carbide devices to be detected, greatly improves the test speed compared with the traditional test of one device, and saves manpower.
2. The invention also provides a sample conveying device with a special structure, which comprises an eccentric wheel, a non-eccentric conveying wheel, a conveying belt, a sample clamping piece, a sample unlocking piece and a rotating motor, wherein the sample clamping piece is used for clamping a silicon carbide device; the sample unlocking piece can open the sample clamping piece on the silicon carbide device close to the sample unlocking piece and release the silicon carbide device into the sample collecting box; when the eccentric wheel rotated to the lower and through the sample unlocking piece from the highest, the back timber down tube was rather than the arm lock of homonymy butt gradually to push away from its orientation to keeping away from the carborundum device, at this moment, the carborundum device had lacked the clamping-force and dropped, continued to rotate to the lower when the eccentric wheel, then the back timber down tube was separated with the arm lock gradually. The structure is matched with the conveying belt for use, and the conveying belt can sequentially bear a plurality of silicon carbide devices, so that the streamlined sample conveying process is realized, the time is saved compared with a mechanical claw, and the detection efficiency is further improved.
3. According to the invention, the inclined edge with a special shape is arranged on one surface of each clamping arm far away from the silicon carbide device, the inclined edge is matched with the work of the eccentric wheel, the top beam inclined rod is continuously contacted with the clamping arm, the unlocking state of the sample clamping piece is always maintained in the process, and the unlocking smoothness is good.
Drawings
Fig. 1 is a schematic front view of a silicon carbide dynamic testing apparatus according to embodiment 1 of the present invention;
FIG. 2 is a side view of a first embodiment of a sample transfer device according to the present invention;
FIG. 3 is a side view of a second embodiment of the sample transfer device of example 2 of the present invention;
FIG. 4 is a side view of a sample transfer device according to example 2 of the present invention in a third operating state;
FIG. 5 is a schematic top view of a sample transfer device according to example 2 of the present invention;
FIG. 6 is a graph of the angle between the conductive metal pillar and the SiC device of example 2 of the present invention;
FIG. 7 is a schematic top view showing the connection between the sample-transferring device and the unlocking device in example 3;
fig. 8 is a schematic top front view of the sample transfer device and the unlocking device according to embodiment 3.
Detailed Description
In order that those skilled in the art will better understand the technical solutions of the present invention to be implemented, the present invention will be further described with reference to the following specific embodiments and accompanying drawings.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of the present invention, "a plurality" means two or more unless otherwise specified.
Example 1
A dynamic detection device for silicon carbide comprises a detection device main body 1, wherein the detection device main body 1 is used for generating different currents, voltages, pulse signals and the like and is used for testing the electrical performance of a silicon carbide device 101, for example, the detection device main body 1 can adopt a dynamic and static test integrated machine of a power device of a KEW6400 model of my department (Kelvin measurement and control technology Limited, Shanxi), and can also adopt a bronze sword pulse signal generator IGBT to test a SiC test power device PSG-06. The silicon carbide test equipment in the prior art generally has a wiring port, different interface ends of the silicon carbide device 101 are connected with different wiring ports of the test equipment, pulse signals and the like generated by the test equipment are transmitted to the silicon carbide device 101 to be tested, and then the test equipment reflects test results according to test conditions. The invention develops a sample introduction device matched with a detection equipment main body 1 to realize continuous sample introduction of a silicon carbide device 101, so that batch automatic detection of the silicon carbide device 101 detection equipment is realized.
The structure of the sample introduction device is shown in figure 1, and comprises a vertical frame 2 and a shell 3, wherein the vertical frame 2 is used for supporting a lead connected with a port of a silicon carbide device 101 and a wiring port of a detection equipment main body 1, one end of the lead connected with the port of the silicon carbide device 101 is of a conductive metal column 21 structure, the structure has rigidity and conductivity, the lead is conveniently connected to the port of the silicon carbide device 101 and conducts electricity, the lead is laid on the top of the vertical frame 2, and the conductive metal column 21 is fixed at the bottom of the vertical frame 2; preferably, the stand 2 may be a T-shaped stand as shown in fig. 1, or may be an inverted L-shaped stand, an i-shaped stand or a square stand. The top of shell 3 is equipped with the interface, and electrically conductive metal post 21 runs through the interface setting. When the number of the conductive metal posts 21 is plural, the number of the through holes is matched with that of the conductive metal posts, and the positions are arranged in one-to-one correspondence. The sample storage box 4, the sample conveying device 5, the sample collection box 6 and the controller are arranged in the shell 3, the sample storage box 4 and the sample collection box 6 are installed in the shell 3, the sample conveying device 5 is installed on the inner side wall of the shell 3 and located between the conductive metal column 21 and the sample storage box 4, and the controller is installed on the inner wall of the shell 3. The sample storage box 4 is used for stacking silicon carbide devices 101 to be tested, such as silicon carbide transistors, etc., and the sample conveying device 5 is used for clamping the silicon carbide devices 101 in the sample storage box 4 and conveying the silicon carbide devices to a position close to the conductive metal columns 21 in the casing 3, so that the conductive metal columns 21 are inserted into corresponding ports of the silicon carbide devices 101, and then the testing equipment main body 1 performs different testing items. It should be noted that the position of the through-interface on the housing 3 should correspond to the position of the port of the silicon carbide device 101, so as to ensure that all the conductive metal posts 21 can be inserted into the corresponding ports of the silicon carbide device 101 in a matching manner. After the detection is finished, the sample conveying device 5 transfers the detected silicon carbide devices 101 into the sample collection box 6, and then grabs new silicon carbide devices 101 in the sample storage box 4.
In this embodiment, the inner bottom surface of the sample storage box 4 is an inclined surface or a horizontal surface, and the size of the sample storage box 4 is close to that of the silicon carbide device 101, so that the silicon carbide device 101 can be placed in the sample storage box 4, and the silicon carbide device 101 can be stacked in the sample storage box 4. The sample transfer device 5 is a gripper having a gripping portion for gripping the silicon carbide device 101, a power portion for controlling the moving direction of the gripping portion, and a load bearing portion for supporting the power portion and the gripping portion, for example, with reference to the CN212706773U gripper structure. It should be noted that, in this embodiment, only the function of the gripper to grab and put down is utilized, and all the grippers in the prior art can be used as long as the volume size is within 1 cubic meter, and the gripper in a suitable volume range, for example, 1 to 10 cubic decimeters, is selected according to the size of the silicon carbide device 101 to be detected.
The controller adopts 89C51 series singlechip or STM32 series controller of prior art, and it is connected with the gripper electricity, and indoor power or battery are connected to the controller, and check out test set's work flow is as follows: firstly, placing silicon carbide devices 101 to be detected in a sample storage box 4 in a superposed mode, then starting a switch of a detection equipment main body 1 to enable the silicon carbide devices to be in a state to be detected, presetting detection time of the silicon carbide devices 101 and detection interval time of adjacent silicon carbide devices 101 in a controller, then controlling a mechanical claw to automatically grab the silicon carbide devices 101 to be connected with a conductive metal column 21 by the controller, recording detection results after the detection of the silicon carbide devices 101 is finished, controlling the mechanical claw to place the silicon carbide devices 101 into a sample collection box 6 by the controller, then controlling the mechanical claw to grab the next silicon carbide device 101 by the controller, detecting and recording the detection results, and repeating the steps until all the silicon carbide devices 101 are detected completely, and closing the detection equipment main body 1.
Preferably, in this embodiment, in order to prevent different silicon carbide devices 101 from being scratched and damaged before detection, an anti-collision pad is placed between adjacent silicon carbide devices 101, after the controller controls the gripper to grasp a previous silicon carbide device 101 and place the previous silicon carbide device 101 into the sample collection box 6 after detection is completed, the controller continues to control the gripper to grasp the anti-collision pad located on a next silicon carbide device 101 and place the anti-collision pad into the sample collection box 6, then the controller continues to control the gripper to grasp a new silicon carbide device 101 for detection, and the controller places the new silicon carbide device 101 into the sample collection box 6 after detection is completed; and circulating the steps until all the silicon carbide devices 101 are detected, and closing the detection equipment main body 1.
Preferably, in order to facilitate the placement and recovery of the silicon carbide devices 101, the housing 3 is provided with a movable door that can be opened and closed at a position where the sample storage case 4 and the sample collection case 6 are provided.
Example 2
A silicon carbide dynamic testing apparatus, having substantially the same structure as that of embodiment 1, except that this embodiment is not provided with a crash pad structure, and a sample transfer device 5 is not provided with a gripper, but with the following structure:
referring to fig. 2 to 6, the sample-transferring device 5 of the present embodiment includes an eccentric wheel 51, a non-eccentric transfer wheel 52, a transfer belt 53, a sample-holding member 54, a sample-unlocking member 55, and a rotary motor; the rotating shafts of the eccentric wheel 51 and the transmission wheel 52 are rotatably connected with the inner side wall of the shell 3, or the rotating shafts of the eccentric wheel 51 and the transmission wheel 52 are rotatably connected with the upright post 31 arranged in the shell 3, the sample storage box 4 and the sample collection box 6 are arranged in the shell 3, and the controller is arranged on the inner wall of the shell 3; the sample conveying device 5 is arranged on the inner side wall of the shell 3 and is positioned between the conductive metal column 21 and the sample storage box 4, specifically, a rotating shaft of an eccentric wheel 51 of the sample conveying device 5, a central line of the sample storage box 4 and a central line of the conductive metal column 21 are positioned on the same vertical line, the eccentric wheel 51 is positioned between the sample storage box 4 and the conductive metal column 21, a conveying wheel 52 is positioned on the side of the eccentric wheel 51, the rotating shaft of the eccentric wheel 51 and the rotating shaft of the conveying wheel 52 are positioned on the same horizontal line, or the distance between the rotating shafts of the eccentric wheel 51 and the conveying wheel 52 is 1-3cm, and a conveying belt 53 is wrapped and in transmission connection between the eccentric wheel 51 and the conveying wheel 52; a plurality of sample clamping pieces 54 are dispersedly and uniformly distributed on the conveyor belt 53 along the transmission direction of the conveyor belt, and the sample clamping pieces 54 are used for clamping the silicon carbide devices 101; the lifting device 41 is arranged at the bottom in the sample storage box 4, the silicon carbide devices 101 are stacked on the lifting device 41, and the silicon carbide device 101 at the topmost part can be clamped by the sample clamping piece 54 on the conveyor belt 53; the sample unlocking piece 55 is installed on the inner wall of the housing 3 and is positioned on the side of the sample conveying device 5, the sample unlocking piece 55 and the conveying wheel 52 are respectively positioned on two sides of the eccentric wheel 51, and the sample unlocking piece 55 is positioned right above the sample collection box 6, and the sample unlocking piece 55 can open the sample clamping piece 54 on the silicon carbide device 101 close to the sample unlocking piece 55 and release the silicon carbide device 101 into the sample collection box 6. In this embodiment, the controller is connected to a rotating electrical machine, the fixed base of which is mounted on the housing 3, and the output shaft of which is mounted on the output shaft of the eccentric 51 or the output shaft of the transmission wheel 52.
In this embodiment, referring to fig. 5, the sample holder 54 includes two insulated clamp arms 541 disposed on the conveyor belt 53, the clamp arms 541 are elastic clamp arms or are connected to the conveyor belt 53 through an elastic member 542, the elastic member 542 is a spring or an elastic airbag, the elastic member 542 is movable relative to the conveyor belt 53, the sample unlocking member 55 includes two top beam diagonal rods 551, each top beam diagonal rod 551 is opposite to the clamp arm 541 on the same side, when the eccentric wheel 51 rotates from the highest position to the lowest position and passes through the sample unlocking member 55, the top beam diagonal rods 551 gradually abut against the clamp arms 541 on the same side and push the clamp arms 541 away from the silicon carbide device 101, at this time, the silicon carbide device 101 falls due to lack of clamping force, and when the eccentric wheel 51 continues to rotate towards the lowest position, the top beam diagonal rods 551 gradually separates from the clamp arms 541. Note that the length and angle of the top beam diagonal member 551 are set to ensure that it does not block the rotation of the eccentric wheel 51, and can abut against the clamping arm 541 when the eccentric wheel 51 rotates from the highest position to the lowest position (not including the lowest position and the highest position). In this embodiment, in order to facilitate the installation of the elastic member 542, flanges 531 are provided along both edges of the conveyor belt 53, and the elastic member 542 is attached to the flanges 531.
The working principle of the embodiment is as follows: firstly, superposing and placing silicon carbide devices 101 to be detected in a sample storage box 4, then starting a switch of a detection device main body 1 to enable the silicon carbide devices to be detected to be in a state to be detected, then controlling a rotating motor to rotate by a controller, starting transmission by a conveyor belt 53, passing a sample clamping piece 54 from right above the sample storage box 4 and passing a sample clamping piece 54 from right below a conductive metal column 21 at intervals of t1 in the transmission process, and setting the diameter of an eccentric wheel 51, the diameter of a conveying wheel 52 and the distance between adjacent sample clamping pieces 54 according to the requirement when the eccentric wheel 51 rotates one circle; the controller controls the rotating motor to alternately rotate and temporarily operate at a specific frequency such that when the eccentric 51 is rotated to the uppermost position, exactly one silicon carbide device 101 is positioned directly above it and is connected to the conductive metal column 21, referring to fig. 2, when the eccentric 51 is rotated from the uppermost position to the lowermost position, exactly one silicon carbide device 101 passes between the eccentric 51 and the sample unlocking member 55, the sample unlocking member 55 opens the sample holding member 54, the silicon carbide device 101 falls into the sample collection container 6, referring to fig. 3, when the eccentric 51 is rotated to the lowermost position, exactly one silicon carbide device 101 is positioned directly below it, and the sample holding member 54 holds the uppermost silicon carbide device 101 positioned in the sample storage container 4, referring to fig. 4. For example, if the detection time of the silicon carbide device 101 is t1, the pause time of the rotating motor is t1, the time required for the subsequent silicon carbide device 101 to be transferred to the previous silicon carbide device 101 is t2, and the rotation time of the rotating motor is t2, by setting the frequency, the silicon carbide device 101 can be ensured to be regularly and alternately connected with the conductive metal column 21 and be regularly recycled by the sample collection box 6, and a new silicon carbide device 101 is regularly grabbed, so that the continuous detection of the silicon carbide device 101 is realized, the detection samples do not need to be manually replaced one by one, and the detection efficiency is improved; when all the silicon carbide devices 101 are tested, the testing apparatus main body 1 is turned off. The conveyor belt 53 can sequentially bear a plurality of silicon carbide devices 101, so that the flow of sample conveying is realized, the time is saved compared with that of a mechanical claw, and the detection efficiency is further improved.
Preferably, in order to make the connection between the conductive metal pillar 21 and the silicon carbide device 101 smoother, the bottom end of the conductive metal pillar 21 is tapered with a larger top and a smaller bottom, and since the motion track of the silicon carbide device 101 is constant, the port of the silicon carbide device 101 is positioned in a direction toward the conductive metal pillar 21, so that an obtuse angle is formed between the port of the silicon carbide device 101 and the conductive metal pillar 21 when the eccentric 51 rotates, as shown in fig. 6, and then becomes vertical slowly, and then becomes an obtuse angle again to separate.
In this embodiment, for the lifting requirement, the lifting device 41 is an electric lifting platform, which is connected with the controller, the lifting frequency of the electric lifting platform is preset, for example, the interval time from the conductive metal column 21 contacting one silicon carbide device 101 to another new silicon carbide device 101 is t3, the lifting device 41 raises the position of the height of one silicon carbide device 101 every t3 time, and the interval time from the grabbing of one silicon carbide device 101 to another new silicon carbide device 101 on the sample conveying device 5 is also t3, so that the detection and grabbing of the samples of the silicon carbide devices 101 can be performed regularly and orderly.
Example 3
A silicon carbide dynamic testing apparatus having substantially the same structure as that of example 2, except that,
referring to fig. 7-8, in the present embodiment, the sample holder 54 includes insulated clamp arms 541 disposed on the conveyor belt 53, a surface of each clamp arm 541 away from the silicon carbide device 101 is provided with a slanted edge 5411, the slanted edge 5411 is a half-truncated cone or a shape smaller than a half-truncated cone, a surface thereof close to the conveyor belt 53 is a flat surface, and is not in contact with the conveyor belt 53, since the eccentric 51 is disposed in the present invention, during the rotation and the movement of the slanted edge 5411, the slanted edge 5411 is blocked by the top beam diagonal bar 551 to move in a direction away from the silicon carbide device 101, and the greater the moving distance is, the greater the blocking force is, and the greater the moving distance of the slanted edge 5411 is blocked by the top beam diagonal bar 551 to move in a direction away from the silicon carbide device 101 is also.
The inclined edge 5411 is connected with one end of the elastic member 542, and the other end of the elastic member 542 is fixedly connected with the conveyor belt 53; the sample unlocking part 55 comprises two top beam inclined rods 551, the two top beam inclined rods 551 are connected through a baffle 552, each top beam inclined rod 551 is opposite to the clamping arm 541 on the same side, the top beam inclined rods 551 are in a bent shape, and the bent radian is consistent with or close to the track of the edge (the edge of the eccentric wheel 51 close to the sample unlocking part 55) when the eccentric wheel 51 rotates from the highest position to the lowest position and passes through the sample unlocking part 55, so that in the process, the top beam inclined rods 551 are continuously contacted with the clamping arms 541, the unlocking state of the sample clamping part 54 is always maintained in the process, and the unlocking smoothness is good. When the sample holder 54 is moved to match the position of a new silicon carbide device 101 in the sample storage tank 4, the sample unlocking member 55 is just separated from the sample holder 54, and the sample holder 54 just grips the silicon carbide device 101.
Preferably, the baffle 552 is spaced from the eccentric wheel 51, and the thickness of the sample holder 54 is less than the thickness of the silicon carbide device 101, for example, the thickness of the sample holder 54 is 0.3-0.5cm, then when the silicon carbide device 101 passes through the baffle 552, it contacts the baffle 552, but the sample holder 54 does not contact the baffle, then the baffle 552 can scrape the silicon carbide device 101 to help the silicon carbide device 101 fall off.
To better match the angle of the sample holder 54, the upper surface of the lifting device 41 is an inclined surface, and the inclined surface is parallel to the sample holder 54 when the sample holder 54 is located right above the lifting device 41. This embodiment can set up the crashproof pad structure, and sample storage box 4 sets up adjacent with sample collection box 6, and the top of the two adjacent wall is equipped with the breach that supplies the crashproof pad to flow, and elevating gear 41's inclined plane lower extreme is located near the breach or adjacent with the breach, elevating gear 41 every turn the rising position with and the breach lower limb flushes or is a little higher than the breach lower limb, then the crashproof pad on the carborundum device 101 flows into in sample collection box 6 under the action of gravity. The sample holder 54, by virtue of its thickness, can hold the silicon carbide device 101 up.
Example 4
A silicon carbide dynamic detection device is basically the same as the structure of embodiment 2, and is different in that a conductive metal column 21 can move up and down at a penetrating joint of a shell 3, a vertical frame 2 is arranged to be an electric telescopic frame, the electric telescopic frame is connected with a controller, the movement frequency of the vertical frame 2 is preset in the controller, the height of the vertical frame 2 is controlled firstly, so that the conductive metal column 21 is positioned above the shell 3, then when an eccentric wheel 51 rotates to the highest position, exactly one silicon carbide device 101 is positioned right above the eccentric wheel and is positioned horizontally, at the moment, a rotating motor stops rotating, then the controller controls the vertical frame 2 to move downwards, further drives the conductive metal column 21 to move downwards and is vertically inserted into a port of the silicon carbide device 101, after the detection of the silicon carbide device 101 is finished, the controller controls the vertical frame 2 to move upwards and further drives the conductive metal column 21 to move upwards, and separated from the ports of the silicon carbide devices 101, and then the rotating motor is controlled to continue rotating, and the process is repeated until all the silicon carbide devices 101 are detected.
Example 5
A silicon carbide dynamic testing device has a structure basically the same as that of embodiment 2, except that a pressure sensor is arranged on the top of a lifting device 41, a controller is connected with the pressure sensor, the pressure sensor can sense the pressure generated by the stacking of silicon carbide devices 101 on the lifting device 41, when a sample conveying device 5 grabs one silicon carbide device 101, the signal of the pressure sensor is greatly changed once, and the controller controls the lifting device 41 to rise by the distance of the thickness of one silicon carbide device 101, and when the pressure sensor is arranged, the time t3 of embodiment 2 is not preset.
It should be noted that, the connection relation of the components not specifically mentioned in the present invention is the default of the prior art, and the connection relation of the structures is not described in detail since it does not relate to the invention point and is a common application of the prior art.
It should be noted that, when the present invention relates to a numerical range, it should be understood that two endpoints of each numerical range and any value between the two endpoints can be selected, and since the steps and methods adopted are the same as those in the embodiment, in order to prevent redundancy, the present invention describes a preferred embodiment. While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (9)
1. The dynamic detection equipment for the silicon carbide comprises a detection equipment main body (1) and is characterized by further comprising a sample introduction device, wherein the sample introduction device comprises a vertical frame (2) and a shell (3), a lead connected with a port of a silicon carbide device (101) and a wiring port of the detection equipment main body (1) is paved on the vertical frame (2), one end of the lead connected with the port of the silicon carbide device (101) is connected with a conductive metal column (21), a penetrating port is arranged at the top of the shell (3), and the conductive metal column (21) penetrates through the penetrating port;
a sample storage box (4), a sample conveying device (5), a sample collecting box (6) and a controller are arranged in the shell (3), the sample conveying device (5) is installed on the inner side wall of the shell (3) and is located between the conductive metal column (21) and the sample storage box (4), the controller is installed on the inner wall of the shell (3), and the controller is connected with the sample conveying device (5); the controller is used for controlling the sample conveying device (5) to clamp the silicon carbide devices (101) in the sample storage box (4) and convey the silicon carbide devices to the conductive metal columns (21) so that the conductive metal columns (21) are inserted into the corresponding ports of the silicon carbide devices (101), and the sample conveying device (5) is also used for transferring the detected silicon carbide devices (101) into the sample collection box (6) and then grabbing new silicon carbide devices (101) in the sample storage box (4);
the sample conveying device (5) comprises an eccentric wheel (51), a non-eccentric conveying wheel (52), a conveying belt (53), a sample clamping piece (54), a sample unlocking piece (55) and a rotating motor;
the rotating shafts of the eccentric wheel (51) and the conveying wheel (52) are rotatably installed in the shell (3), the rotating shaft of the eccentric wheel (51) is positioned on the same vertical line with the central line of the sample storage box (4) and the central line of the conductive metal column (21), the eccentric wheel (51) is positioned between the sample storage box (4) and the conductive metal column (21), the conveying wheel (52) is positioned on the side of the eccentric wheel (51), and the conveying belt (53) is wrapped and in transmission connection between the eccentric wheel (51) and the conveying wheel (52); a plurality of sample clamping pieces (54) are distributed and uniformly distributed on the conveying belt (53) along the transmission direction of the conveying belt;
the bottom in the sample storage box (4) is provided with a lifting device (41), the silicon carbide devices (101) are used for being stacked on the lifting device (41), and the silicon carbide device (101) at the topmost part can be clamped by the sample clamping piece (54) on the conveyor belt (53);
the sample unlocking piece (55) is arranged on the inner wall of the shell (3) and is positioned on the side of the sample conveying device (5), the sample unlocking piece (55) and the conveying wheel (52) are respectively positioned on two sides of the eccentric wheel (51), in addition, the sample unlocking piece (55) is positioned right above the sample collecting box (6), and the sample unlocking piece (55) can open the sample clamping piece (54) on the silicon carbide device (101) close to the sample unlocking piece;
and a movable door is arranged at the position of the shell (3) where the sample storage box (4) and the sample collection box (6) are arranged.
2. The silicon carbide dynamic detection apparatus according to claim 1, wherein the sample transfer device (5) is a gripper, and the controller is connected to the gripper.
3. The silicon carbide dynamic detection equipment according to claim 1, wherein the sample holder (54) comprises two insulated clamp arms (541) arranged on the conveyor belt (53), and the clamp arms (541) are elastic clamp arms or are connected with the conveyor belt (53) through elastic members (542);
the sample unlocking piece (55) comprises two top beam inclined rods (551), each top beam inclined rod (551) is opposite to the clamping arm (541) on the same side, when the eccentric wheel (51) rotates from the highest position to the lowest position and passes through the sample unlocking piece (55), the top beam inclined rods (551) are gradually abutted to the clamping arms (541) on the same side, the clamping arms (541) are ejected away from the silicon carbide device (101), and when the eccentric wheel (51) continues to rotate towards the lowest position, the top beam inclined rods (551) are gradually separated from the clamping arms (541).
4. The silicon carbide dynamic detection apparatus according to claim 3, wherein the surface of each clamping arm (541) is provided with an inclined edge (5411), the inclined edge (5411) is in the shape of a half circular truncated cone or less than a half circular truncated cone, the surface of the inclined edge (5411) close to the conveyor belt (53) is a plane and is not in contact with the conveyor belt (53), one end of the elastic member (542) is connected to the inclined edge (5411), and the other end of the elastic member (542) is connected to the conveyor belt (53);
the top beam diagonal rod (551) is in a bent shape, and the bending radian of the top beam diagonal rod is matched with the edge track of the eccentric wheel (51) when the eccentric wheel rotates from the highest position to the lowest position and passes through the sample unlocking piece (55).
5. The silicon carbide dynamic detection equipment according to claim 3 or 4, characterized in that the two top beam diagonal rods (551) are connected through a baffle plate (552), the baffle plate (552) is spaced from the eccentric wheel (51), and the thickness of the sample holder (54) is smaller than that of the silicon carbide device (101).
6. The silicon carbide dynamic detection apparatus according to claim 3 or 4, characterized in that the elastic member (542) is a spring or an elastic air bag, and the elastic member (542) is movable with respect to the conveyor belt (53).
7. The apparatus for the dynamic detection of silicon carbide according to claim 3, wherein a flange (531) is provided along both edges of the conveyor belt (53), and the elastic member (542) is attached to the flange (531).
8. The silicon carbide dynamic detection apparatus according to claim 1, wherein the vertical frame (2) is an electric telescopic frame, and the electric telescopic frame is connected with the controller.
9. The silicon carbide dynamic detection apparatus according to claim 1, wherein the lifting device (41) is an electric lifting table, and an upper surface of the lifting device (41) is an inclined surface which is parallel to the sample holder (54) when the sample holder (54) is positioned directly above the lifting device (41).
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| CN114101138B (en) * | 2021-12-09 | 2023-04-07 | 南通大学附属医院 | Equipment based on ultrasonic detection stomach remains enteral nutrition liquid |
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