CN113252943B - Method for improving shock vibration performance of silicon micro-resonance type accelerometer - Google Patents
Method for improving shock vibration performance of silicon micro-resonance type accelerometer Download PDFInfo
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- CN113252943B CN113252943B CN202110550830.1A CN202110550830A CN113252943B CN 113252943 B CN113252943 B CN 113252943B CN 202110550830 A CN202110550830 A CN 202110550830A CN 113252943 B CN113252943 B CN 113252943B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0865—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using integrated signal processing circuitry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
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Abstract
本发明公开了一种改善硅微谐振式加速度计冲击振动性能方法，包括硅微谐振式加速度计、差分检测梳齿、前端读取电路、阻尼控制电路、信号耦合电路和推挽驱动梳齿。所述方法通过与质量块连接的差分检测梳齿和前端读取电路感知质量块位移量并作用于阻尼控制电路，所产生的控制信号通过信号耦合电路作用于推挽驱动梳齿并对质量块产生静电力作用。本发明利用积分负反馈实现阻尼控制电路在系统带宽范围内幅值随频率线性增长的幅频特性，在高频段构造幅值的衰减特性，可通过调节阻尼控制电路幅频特性转折点抑制电路噪声；通过阻尼控制电路构成负反馈控制等效提高系统阻尼，降低质量块谐振模态的激励响应，改善硅微谐振式加速度计的冲击振动性能。
The invention discloses a method for improving the shock vibration performance of a silicon micro-resonance accelerometer, comprising a silicon micro-resonance accelerometer, a differential detection comb, a front-end reading circuit, a damping control circuit, a signal coupling circuit and a push-pull driving comb. The method senses the displacement of the mass block through a differential detection comb connected to the mass block and a front-end reading circuit, and acts on the damping control circuit, and the generated control signal acts on the push-pull driving comb through the signal coupling circuit and drives the comb to the mass block. produce electrostatic force. The invention utilizes integral negative feedback to realize the amplitude-frequency characteristic of the damping control circuit in which the amplitude increases linearly with the frequency in the system bandwidth range, constructs the attenuation characteristic of the amplitude in the high frequency band, and can suppress the circuit noise by adjusting the turning point of the amplitude-frequency characteristic of the damping control circuit; The damping control circuit constitutes a negative feedback control to effectively improve the system damping, reduce the excitation response of the mass block resonance mode, and improve the shock and vibration performance of the silicon micro-resonance accelerometer.
Description
Technical Field
The invention belongs to the technical field of micro-electro-mechanical systems (MEMS) and micro-inertia, relates to a silicon micro-resonance type accelerometer, and particularly relates to a method for improving the impact vibration performance of the silicon micro-resonance type accelerometer.
Background
The silicon micro-accelerometer is a micro-mechanical inertial device developed by relying on an MEMS (micro electro mechanical system) technology, and compared with a traditional inertial sensor, the MEMS device manufactured by adopting a micro-processing technology and an Integrated Circuit (IC) technology has the advantages of small volume, light weight, low power consumption, high integration level, easiness in realizing intellectualization, mass production and the like, and is widely applied to the fields of civilian use, military use and the like.
As one of micro-electro-mechanical accelerometers, a silicon micro-resonance accelerometer senses the acceleration by detecting the change of the frequency of a resonator, outputs a frequency signal in a quasi-digital form, is convenient for detection and digital integration, has the advantages of strong anti-interference capability, high resolution, wide dynamic range, high sensitivity, good stability and the like, and is a silicon micro-accelerometer with high-precision characteristic.
In order to improve the signal-to-noise ratio of the silicon micro-resonant accelerometer and improve the vibration performance of the resonator, the silicon micro-resonant accelerometer is often required to be packaged in a high-vacuum chamber to obtain a very high quality factor, so that the damping coefficient of a mass block of the silicon micro-resonant accelerometer is greatly reduced, and the resonance mode of the mass block is easier to excite. When the acceleration signal with the characteristic frequency of the mass resonance mode excites the mass, the mass generates an inertial force response which is mainly composed of the frequency component and has larger amplitude and longer time and acts on the resonator. When the silicon micro-resonance type accelerometer works in a mechanical environment with random vibration and short-time impact signals, due to the high Q value characteristic of the mass block, the resonance mode response of the mass block is easier to be excited and has larger response amplitude and longer attenuation time, so that the response capability and the recovery capability of the silicon micro-resonance type accelerometer in the impact vibration environment are reduced, and the impact vibration performance of the silicon micro-resonance type accelerometer is influenced. Aiming at the problems, in the application of the capacitive micro-mechanical accelerometer of the silicon micro-accelerometer, a commonly adopted solution is to introduce a PD controller to form negative feedback control to improve the damping coefficient of a mass block, but a differential control item in the PD controller has extremely high sensitivity to high-frequency signals, so that the controller is very sensitive to high-frequency noise signals, the output noise level of the controller is increased, unnecessary loop noise is introduced into the silicon micro-accelerometer, and the resolution of the system is reduced.
Disclosure of Invention
In order to solve the problems, the invention discloses a method for improving the shock vibration performance of a silicon micro-resonant accelerometer, which introduces a damping control link realized by integral feedback to inhibit the response of a mass block to a resonant mode signal, reduces the sensitivity of a damping control circuit to a noise signal and improves the shock vibration performance of the silicon micro-resonant accelerometer.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a method for improving the shock vibration performance of a silicon micro-resonant accelerometer comprises a set of control system, wherein the control system comprises the silicon micro-resonant accelerometer, differential detection comb teeth, a front end reading circuit, a damping control circuit, a signal coupling circuit and push-pull driving comb teeth; the silicon micro-resonance type accelerometer comprises a mass block which can sense external acceleration information, and differential detection comb teeth and push-pull driving comb teeth which are connected with the mass block; the differential detection comb converts the displacement variation of the mass block into capacitance variation; the front end reading circuit is connected with the differential detection comb teeth and is used for converting weak capacitance change signals of the differential detection comb teeth into voltage change signals; the damping control circuit is connected with the front-end reading circuit and is used for realizing the amplitude-frequency characteristic of linear increase within the bandwidth range of the second-order system of the silicon micro-resonant accelerometer; the signal coupling circuit is connected with the integral feedback type damping control circuit and the direct current driving signal to generate two paths of alternating current and direct current coupling signals with the same alternating current component amplitude, the opposite phase and the same direct current component; the upper driving comb teeth and the lower driving comb teeth of the push-pull driving comb teeth are respectively connected with two paths of alternating current-direct current coupling signals generated by the signal coupling circuit, electrostatic force negative feedback is formed by a push-pull driving comb tooth capacitor and acts on the mass block, and a closed loop is formed.
Furthermore, the damping control circuit is composed of a first-order low-pass filter and an integral feedback circuit, the output end of the first-order low-pass filter is used as the output end of the damping control circuit, the input end of the integral feedback circuit is connected with the output end of the first-order low-pass filter, and the output end of the integral feedback circuit is used as a feedback signal to be differed with the output end signal of the front-end reading circuit and then is sent to the first-order low-pass filter, so that a negative feedback loop is formed.
Furthermore, the first-order low-pass filter is used as a forward path of the damping control circuit, and introduces an amplitude-frequency characteristic turning point to the damping control circuit to inhibit loop noise; the position of the turning point of the amplitude-frequency characteristic and the loop gain of the damping control circuit can be adjusted by adjusting the loop gain of the first-order low-pass filter, so that the method is suitable for the parameters of the silicon micro-resonant accelerometer system.
Furthermore, the integral feedback circuit is used as a negative feedback control loop of the damping control circuit, an amplitude-frequency characteristic curve with linear growth characteristics is introduced into the damping control circuit, and the loop gain coefficient of the first-order low-pass filter jointly determine the position of the turning point of the amplitude-frequency characteristic of the damping control circuit.
Further, the method for improving the impact vibration performance of the silicon micro-resonance type accelerometer is characterized in that the signal coupling circuit is connected with the damping control circuit, and two paths of alternating current control signals with the same amplitude and opposite phases are generated and are respectively coupled with the direct current driving voltage.
Furthermore, the push-pull driving comb teeth are provided with upper driving comb teeth and lower driving comb teeth which are consistent in structural size and symmetrically arranged, the upper driving comb teeth and the lower driving comb teeth are respectively connected with two output end signals of the signal coupling circuit, electrostatic force is respectively applied to the mass blocks of the silicon micro-resonance type accelerometer, and the resultant force of the electrostatic force forms electrostatic force negative feedback action on the mass blocks.
The invention has the beneficial effects that:
(1) the invention adopts the damping control circuit as a feedback control loop, constructs an amplitude-frequency characteristic curve with linear growth characteristics in the system bandwidth range, and improves the system equivalent damping of the mass block and inhibits the resonance modal response of the mass block by the operation result of the control link with the amplitude-frequency characteristics on the displacement signal of the mass block.
(2) The invention adopts an integral negative feedback mode to realize the damping control effect, eliminates the static error introduced by a proportional control item in the PD controller and realizes the equivalent damping control in the system bandwidth range.
(3) The invention adopts a first-order low-pass filter as a forward path of the damping circuit, thereby constructing the turning point of the amplitude-frequency characteristic of the damping control circuit at a specific frequency point, and attenuating the frequency spectrum component higher than the frequency point, thereby inhibiting the sensitivity of the damping control circuit to high-frequency signals and inhibiting circuit noise; meanwhile, the corresponding frequency of the turning point can be set by adjusting the characteristic parameters of the first-order low-pass filter and the integral feedback circuit, so that the attenuation capability of the system on the response of the mass block resonance point is ensured.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a method for improving the shock vibration performance of a silicon micro-resonant accelerometer according to the present invention;
FIG. 2 is a schematic structural diagram of a silicon micro-resonant accelerometer according to the present invention;
FIG. 3 is a schematic diagram of a damping control circuit of the present invention;
FIG. 4 is an amplitude-frequency characteristic curve of the damping control circuit of the present invention;
FIG. 5 is a schematic diagram of a signal coupling circuit of the present invention;
FIG. 6 is a control block diagram of a method for improving the shock vibration performance of a silicon micro-resonance type accelerometer according to the present invention;
FIG. 7 is a comparison graph of amplitude-frequency characteristics of a silicon micro-resonant accelerometer relative to a silicon micro-resonant accelerometer without a damping control circuit as negative feedback control.
List of reference numerals:
the system comprises a 1 silicon micro-resonance accelerometer, a 101 mass block, a 102 lever amplification mechanism, a 103 resonator, 2 differential detection comb teeth, 3 front-end reading circuits, 4 damping control circuits, 5 signal coupling circuits and 6 push-pull driving comb teeth.
Detailed Description
The present invention will be further illustrated with reference to the accompanying drawings and specific embodiments, which are to be understood as merely illustrative of the invention and not as limiting the scope of the invention. After reading this disclosure, modifications of various equivalent forms of the present invention by those skilled in the art will fall within the scope of the appended claims.
As shown in fig. 2, the mechanical structure of the silicon micro-resonance type accelerometer to which the present invention is applied includes a mass block 101, a lever amplification mechanism 102, a resonator 103, a differential detection comb 2, and a push-pull drive comb 6. The resonator 103 is divided into an upper resonator and a lower resonator which have the same structure size and are symmetrically distributed, and each resonator is matched with a driving comb tooth and a detection comb tooth; the differential detection comb teeth 2 are divided into upper detection comb teeth and lower detection comb teeth which are consistent in structural size and symmetrically distributed; the push-pull driving comb teeth 6 are divided into upper driving comb teeth and lower driving comb teeth which are consistent in structural size and symmetrically distributed;
as shown in fig. 1, which is a schematic structural diagram of an embodiment of the present invention, the control system includes a silicon micro-resonant accelerometer 1, a differential detection comb 2, a front-end reading circuit 3, a damping control circuit 4, a signal coupling circuit 5, and a push-pull driving comb 6. Wherein, the differential detection comb teeth 2 are arranged on the mass block 101 of the silicon micro-resonance type accelerometer, the displacement information of the mass block 101 is converted into the differential capacitance change of the upper detection comb teeth and the lower detection comb teeth, the output signals of the upper detection comb teeth and the lower detection comb teeth are respectively connected with a front end reading circuit, the front end reading circuit 3 converts the differential capacitance signal into a voltage signal to be output, the output signal is connected with a damping control circuit 4, the damping control circuit 4 connects the output end of the control signal with a signal coupling circuit 5 after operation, the signal coupling circuit 5 divides the input into two paths, the two paths of signals are respectively coupled with a direct current driving voltage to form two paths of alternating current and direct current coupling signals with the same amplitude and opposite phase and the same direct current component after the same phase proportion operation and the opposite direction proportion operation, the two paths of coupling signals are respectively connected with the upper driving comb teeth and the lower driving comb teeth of the push-pull driving comb teeth 6, the push-pull driving comb teeth 6 are arranged on the mass block 101 of the silicon micro-resonant accelerometer, the upper driving comb teeth and the lower driving comb teeth respectively generate electrostatic force to the mass block under the driving of two paths of alternating current-direct current coupling signals to form a closed loop, the amplitude-frequency characteristic curve of the damping control circuit 4 in the system bandwidth range, which is realized by integral feedback, has a linear growth characteristic, and therefore the resultant force of the electrostatic force generated by the two driving comb teeth to the mass block is in a direct proportion relation with the displacement speed of the mass block under the action of the damping control circuit, so that the equivalent system damping of the mass block is increased, the resonant modal response of the mass block is inhibited, and the impact vibration performance of the silicon micro-resonant accelerometer is improved.
In an embodiment of the present invention, when the mass 101 is displaced due to the external acceleration, the capacitance of the comb capacitor C1 formed by the upper detection comb of the differential detection comb 2 and the capacitance of the comb capacitor C2 formed by the lower detection comb of the differential detection comb 2 in the present invention change in opposite directions, respectively, to form a differential capacitance change signal. The front-end reading circuit 3 detects at least one path of signal in the differential capacitance change, converts the weak capacitance change into voltage change and outputs the voltage change, and accordingly obtains a voltage signal reflecting the displacement information of the mass block.
Fig. 3 shows a schematic diagram of the damping control circuit 4 of the present invention, which includes a first-order low-pass filter and an integral feedback circuit. Wherein the output signal of the front-end reading circuit is taken as the input signal U of the damping control circuitITaking the output end of the first-order low-pass filter as the output signal U of the damping control circuitOWhile damping the control circuit output signal UOThe feedback signal is generated after the integral operation is carried out on the input signal of the integral feedback circuit, and the output signal of the front-end reading circuit and the feedback signal are subjected to difference and then are sent to a first-order low-pass filter so as to form a negative feedback loop.
Specifically, for a first order low pass filter, its pole is defined as AsdWith a loop gain factor of BsdThe forward path transfer function formed by the forward path transfer function is shown as the formula (1):
for the integral feedback circuit, the loop gain coefficient is defined as CsdThe transfer function of the negative feedback loop formed by the negative feedback loop is shown as the formula (2):
the output signal U of the damping control circuit of the present invention can be obtained from the formulas (1-2)OAnd an input signal UIThe transfer function of the relationship is shown in equation (3):
according to the transfer function of the damping control circuit 4, the introduction of the integral feedback circuit realizes the amplitude-frequency characteristic curve with linear growth characteristic in the full frequency band, the first-order low-pass filter introduces the turning point of the amplitude-frequency characteristic for the damping control loop, and the first-order low-pass filter is adjustedLoop gain factor BsdThe loop gain of the damping control circuit can be adjusted, so that the damping control strength of the feedback controller is adjusted; loop gain coefficient B of first-order low-pass filtersdAnd integral feedback circuit loop gain coefficient CsdDetermining the position of the turning point of the amplitude-frequency characteristic of the damping control circuit by adjusting the parameter BsdAnd parameter CsdThe turning point can be adjusted, so that the damping control link presents an attenuation characteristic outside the bandwidth range of the second-order system of the mass block, and a linear growth characteristic is kept in the system bandwidth, thereby reducing the sensitivity of the damping control circuit to high-frequency signals and suppressing circuit noise. The corresponding amplitude-frequency characteristic curve of the damping control circuit is shown in fig. 4.
FIG. 5 shows a schematic diagram of a signal coupling circuit 5 according to the present invention, which includes a non-inverting amplifier, an inverting amplifier, a first AC/DC coupling circuit and a second AC/DC coupling circuit, and the output signal U of the damping control circuitoAs an input signal of the signal coupling circuit, the in-phase amplifier and the inverting amplifier respectively carry out in-phase proportional operation and inverting proportional operation on the signal, so that two paths of control signals with the same amplitude and the same phase and opposite phases are generated. The first AC/DC coupling circuit and the second AC/DC coupling circuit respectively couple two control signals with the DC signal VrefTwo paths of alternating current-direct current coupling signals U with the same alternating current component amplitude, the same phase and the same direct current component are generated in a superposition mode+And U-. AC-DC coupled signal U+And U-An upper drive comb tooth and a lower drive comb tooth which are respectively connected to the push-pull drive comb tooth of the silicon micro-resonance type accelerometer, comb tooth capacitors C3 and C4 formed by the upper drive comb tooth and the lower drive comb tooth are arranged on the voltage signal U+And U-Generates electrostatic force under the action of the sensor, and acts on the mass block, wherein the direction of the electrostatic force is opposite to the direction of the inertial force sensed by the sensitive mass block under the action of the external acceleration. According to the comb capacitance electrostatic force calculation formula, the resultant force of the electrostatic force acting on the mass block and the output signal U of the damping control circuitOProportional to the damping negative feedback control based on the integrator.
Defining the gain of the front-end reading circuit to the quality block displacement output signalCoefficient of KCVElectrostatic force generated by push-pull driving comb teeth on mass block and output signal U of damping control circuitOThe drive gain coefficient of (1) is A, and the electrostatic force generated by the push-pull drive comb teeth on the mass block is Fd(ii) a The mass block of the silicon micro-resonance type accelerometer can be described by a typical 'mass-spring-damping' second-order system, the mass of the mass block is defined as m, the resonance angular frequency is omega, the damping ratio is zeta, and the equivalent resultant force acting on the sensitive mass block is FxAnd the displacement output of the sensitive mass block is X, the transfer function describing the relationship between the force input and the displacement output of the mass block of the silicon micro-resonant accelerometer can be obtained as shown in the formula (4):
the block diagram of the silicon micro-resonant accelerometer system with damping control as a negative feedback link is shown in fig. 6, where the inertial force generated by the sensing mass sensing the external acceleration input signal is defined as F.
Fig. 7 shows the comparison result of the amplitude-frequency characteristic curves of the silicon micro-resonant accelerometer system before and after introducing the damping control circuit as negative feedback control.
Claims (5)
1. A method for improving the shock vibration performance of a silicon micro-resonance type accelerometer is characterized by comprising the following steps: the system comprises a set of control system, wherein the control system comprises a silicon micro-resonance type accelerometer, a front-end reading circuit, a damping control circuit and a signal coupling circuit; the silicon micro-resonance type accelerometer comprises a mass block which can sense external acceleration information, and differential detection comb teeth and push-pull driving comb teeth which are connected with the mass block; the differential detection comb converts the displacement variation of the mass block into capacitance variation; the front end reading circuit is connected with the differential detection comb teeth and is used for converting weak capacitance change signals of the differential detection comb teeth into voltage change signals; the damping control circuit is connected with the front-end reading circuit and consists of a first-order low-pass filter and an integral feedback circuit, the output end of the first-order low-pass filter is taken as the output end of the damping control circuit, the input end of the integral feedback circuit is connected with the output end of the first-order low-pass filter, and the output end of the integral feedback circuit is used as a feedback signal which is subjected to difference with the signal at the output end of the front-end reading circuit and then is sent to the first-order low-pass filter so as to form a negative feedback loop and be used for realizing the amplitude-frequency characteristic of linear increase in the bandwidth range of the second-order system of the silicon micro-resonant accelerometer; the signal coupling circuit is connected with the damping control circuit and the direct current driving signal to generate two paths of alternating current and direct current coupling signals with the same alternating current component amplitude, the same phase and the same direct current component; the upper driving comb teeth and the lower driving comb teeth of the push-pull driving comb teeth are respectively connected with two paths of alternating current-direct current coupling signals generated by the signal coupling circuit, electrostatic force negative feedback is formed by a push-pull driving comb tooth capacitor and acts on the mass block, and a closed loop is formed.
2. The method of claim 1, wherein the first-order low-pass filter is used as a forward path of the damping control circuit, and introduces an amplitude-frequency characteristic turning point to the damping control circuit to suppress loop noise; the position of the turning point of the amplitude-frequency characteristic and the loop gain of the damping control circuit can be adjusted by adjusting the loop gain of the first-order low-pass filter, so that the method is suitable for the parameters of the silicon micro-resonant accelerometer system.
3. The method as claimed in claim 1, wherein the integral feedback circuit is used as a negative feedback control loop of the damping control circuit, an amplitude-frequency characteristic curve of linear growth characteristic is introduced into the damping control circuit, and a loop gain coefficient of a first-order low-pass filter jointly determine a turning point position of the amplitude-frequency characteristic of the damping control circuit.
4. The method of claim 1, wherein the signal coupling circuit is connected to a damping control circuit to generate two ac control signals with the same amplitude and opposite phases, and the two ac control signals are coupled to the dc driving voltage respectively.
5. The method as claimed in claim 1, wherein the push-pull driving comb has an upper driving comb and a lower driving comb, which are symmetrically arranged and have the same structural size, and the upper driving comb and the lower driving comb are respectively connected to two output signals of the signal coupling circuit, and apply electrostatic force to the mass block of the silicon micro-resonant accelerometer, and the resultant of the electrostatic force acts as electrostatic force negative feedback on the mass block.
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