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CN113242027B - Impedance-matched Josephson parametric amplifier based on series connection of a plurality of superconductive Josephson junctions - Google Patents

Impedance-matched Josephson parametric amplifier based on series connection of a plurality of superconductive Josephson junctions Download PDF

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CN113242027B
CN113242027B CN202110206157.XA CN202110206157A CN113242027B CN 113242027 B CN113242027 B CN 113242027B CN 202110206157 A CN202110206157 A CN 202110206157A CN 113242027 B CN113242027 B CN 113242027B
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direct current
impedance
nonlinear
resonator
superconducting
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CN113242027A (en
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孙国柱
卢亚鹏
左权
江俊良
魏兴雨
潘佳政
曹春海
许伟伟
吴培亨
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Nanjing University
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Nanjing University
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03FAMPLIFIERS
    • H03F7/00Parametric amplifiers

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  • Power Engineering (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
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Abstract

The invention discloses an impedance matching Josephson parametric amplifier based on series connection of a plurality of superconductive Josephson junctions, which comprises an input/output port, an impedance matching transmission line, a nonlinear LC resonator and a direct current bias line, wherein the nonlinear LC resonator consists of an interdigital capacitor and an equivalent inductor, the equivalent inductor consists of a superconductive Josephson junction series array and a direct current superconducting quantum interferometer, the direct current superconducting quantum interferometer consists of a closed loop formed by two superconductive Josephson junctions which are connected in parallel, the interdigital capacitor is connected with the impedance matching transmission line, the direct current bias line is arranged at the closed loop of the superconducting quantum interferometer, and the magnetic flux in the loop of the direct current superconducting quantum interferometer is changed by adjusting the current of the direct current bias line so as to realize the frequency adjustment of the nonlinear LC resonator. The invention effectively reduces the structural design complexity, realizes the impedance matching of the nonlinear resonator and an external transmission line, has continuously adjustable total resonant frequency in a larger range, and has stable and reliable device performance.

Description

Impedance-matched Josephson parametric amplifier based on series connection of a plurality of superconductive Josephson junctions
Technical Field
The invention relates to the field of amplifier design, in particular to an impedance matching parametric amplifier based on series connection of a plurality of superconductive Josephson junctions.
Background
The superconducting Josephson junction equivalent inductor has high nonlinearity and controllability, has become a core device of a superconducting electronic circuit, particularly a superconducting Josephson circuit, and is widely applied to development and research of superconducting quantum information processing technology, particularly superconducting qubits and superconducting Josephson devices. An amplifying device approaching quantum-limited noise performance can be realized by using nonlinear mixing of superconducting josephson junctions. The josephson broadband parametric amplifier has the unique advantage of high gain, broadband and ultra-low noise performance.
In the current broadband superconductive Josephson circuit device formed by superconductive Josephson structure, a structure of parallel connection of a plate capacitor and a nonlinear Josephson inductor is mostly adopted, the structure and the process are complex, a multilayer micro-nano processing preparation technology is needed, and the preparation precision requirement is extremely high. Meanwhile, the defect of the dielectric layer directly affects the quality of the device, so that the loss characteristic of the dielectric layer material of the panel capacitor is extremely high. Based on this, there is a need for a novel josephson parametric amplifier that has a simple structure, is not affected by dielectric loss materials, and is simple and reliable in manufacturing process.
Disclosure of Invention
The invention aims to provide an impedance matching parametric amplifier which can provide broadband and has adjustable frequency in a large range and is based on a plurality of superconductive Josephson junctions connected in series.
The technical solution for realizing the purpose of the invention is as follows: an impedance-matched josephson parametric amplifier based on a plurality of superconducting josephson junctions in series, comprising an input-output port, an impedance-matched transmission line, a nonlinear LC resonator and a dc bias line, wherein: one end of the impedance matching transmission line is connected with the input/output port, and the other end of the impedance matching transmission line is connected with the nonlinear LC resonator; the other end of the nonlinear LC resonator is connected with a direct current bias line;
the nonlinear LC resonator is composed of an interdigital capacitor and an equivalent inductor, wherein the equivalent inductor is composed of a superconducting Josephson junction series array and a direct current superconducting quantum interferometer, the direct current superconducting quantum interferometer is composed of a closed loop composed of two superconducting Josephson junctions which are connected in parallel, the interdigital capacitor is connected with an impedance matching transmission line, a direct current bias line is arranged at the closed loop of the superconducting quantum interferometer, and the frequency adjustment of the nonlinear LC resonator is realized by changing the magnetic flux in the loop of the direct current superconducting quantum interferometer through adjusting the current of the direct current bias line.
Furthermore, the input and output ports are the same port, signals enter through the input and output ports, are amplified and then output through the input and output ports, and are connected with the microwave circulator to realize input and output signal separation.
Further, the impedance matching transmission line is composed of a coplanar waveguide transmission line with gradually changed central conductor width, one end of the impedance matching transmission line is connected with the nonlinear LC resonator, the other end of the impedance matching transmission line is connected with the input/output port, and the central conductor width is changed according to the required impedance value.
Further, the equivalent inductance value of the equivalent inductor is proportional to the number of superconducting josephson junctions in the series array of superconducting josephson junctions.
Furthermore, the input/output port, the impedance matching transmission line, the interdigital capacitor of the nonlinear LC resonator and the direct current bias line are all subjected to one-time exposure and one-time etching by adopting an ultraviolet lithography process to prepare a pattern, and a direct current superconducting quantum interferometer formed by a series array of superconducting Josephson junctions and two parallel superconducting Josephson junctions of the nonlinear LC resonator is prepared by adopting an electron beam exposure and dual-angle electron beam evaporation process.
Compared with the prior art, the invention has the remarkable advantages that: 1) The whole device has simple design structure, compared with a nonlinear resonator formed by the prior multilayer flat capacitor structure, the invention adopts an interdigital capacitor structure and can be completed by one-time photoetching, thereby greatly simplifying the preparation steps and improving the yield, stability and manufacturing efficiency of device preparation. 2) The whole device is integrated by a plurality of superconductive Josephson junctions, and can provide larger inductance value. 3) The working frequency of the whole device can be regulated and controlled by the superconducting quantum interferometer, and a larger working frequency variation range can be provided. 4) The whole device can increase equivalent inductance by increasing the series number of superconductive Josephson junctions, thereby improving the dynamic range of the device and avoiding the undersize saturated power. 5) The whole device takes a direct current superconducting quantum interferometer as a regulating element, so that the influence of magnetic flux noise can be effectively reduced.
Drawings
Fig. 1 is a plan view of the impedance matching parametric amplifier of the present invention based on a series connection of a plurality of superconducting josephson junctions.
Fig. 2 is a circuit design diagram of a nonlinear LC resonator of the present invention.
Fig. 3 is a schematic diagram of an equivalent inductor of the present invention.
Fig. 4 is a graph of measurements of resonator frequency at different bias currents according to the invention.
Fig. 5 is a graph of the measurement of gain bandwidth of the device of the present invention.
Detailed Description
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
As shown in fig. 1, the impedance matching parametric amplifier based on a plurality of superconducting josephson junctions in series comprises four parts: an input/output port 101, an impedance matching transmission line 102, a nonlinear LC resonator 103, and a dc bias line 104. One end of an impedance matching transmission line 102 is connected with the input/output port 101, and the other end is connected with the nonlinear LC resonator 103; the other end of the nonlinear LC resonator 103 is connected to a dc bias line 104.
The input/output port 101 connects the external transmission line with the device internal impedance matching transmission line 102, and the port impedance 50W ensures the characteristic impedance matching with the external transmission line. The external signal to be amplified enters the device through the input/output port 101, and is output through the input/output port 101 after being amplified, and the input/output port is connected with the circulator for separating the input signal from the output signal.
The impedance matching transmission line 102 is in the form of a coplanar waveguide transmission line, and is made of Al or Nb materials, the thickness of the transmission line is about 70 nm a, the width of the central conductor is changed according to the required impedance value, and one end of the transmission line is connected with the signal input/output port by impedance 50W and is matched with the characteristic impedance of the external transmission line. The other end of the transmission line is connected in series with the nonlinear LC resonator 103, and the port characteristic impedance 120W is matched with the nonlinear LC resonator characteristic impedance. The transmission characteristics of the whole device can be ensured through the design.
As shown in fig. 2-3, the nonlinear LC resonator 103 includes two sections, a capacitor section and an inductor section, in parallel relationship. The capacitance part adopts an interdigital capacitor 201, and the inductance part adopts an equivalent inductor 202 formed by a direct current superconducting quantum interferometer 302 formed by a serial array 301 of ten superconducting Josephson junctions and two superconducting Josephson junctions in parallel. The nonlinear LC resonator 103 is provided with two ports, a port 204 on the capacitor side is connected to an impedance matching transmission line, and a port 203 on the inductor side is grounded. The drive signal enters the nonlinear LC resonator through the impedance matched transmission line section port 204 and is output along the same port 204. In addition, the characteristic impedance of the nonlinear LC resonator 103 is around 120W, ensuring a close proximity to the port impedance of the impedance matching transmission line 102.
The direct current bias line 104 is designed near the loop of the superconducting quantum interferometer 302, the frequency of the nonlinear LC resonator 103 is controlled by the magnetic flux entering the superconducting loop of the superconducting quantum interferometer 302, namely, the on-chip direct current bias line designed near the superconducting quantum interferometer is used as a bias circuit, the current value on the bias line is adjusted to control the magnetic flux in the superconducting loop, and finally, the frequency adjustment of the nonlinear LC resonator is realized.
For the impedance matching parametric amplifier structure, the input/output port 101, the impedance matching transmission line 102, the interdigital capacitor 201 and the direct current bias line 104 of the nonlinear LC resonator are all prepared into patterns by one-time exposure and one-time etching through an ultraviolet lithography process, and the direct current superconducting quantum interferometer 302 formed by the serial array 301 of ten superconducting josephson junctions and the parallel connection of two superconducting josephson junctions of the nonlinear LC resonator is prepared by adopting an electron beam exposure and dual-angle electron beam evaporation process.
Examples
To verify the effectiveness of the inventive protocol, the following experimental design was performed.
In this example, the single superconductive josephson junction inductance was designed to be 110 pH, the capacitance was designed to be 0.8 pf, and the lc cavity resonant frequency was 5.2 GHz.
Fig. 4 shows the measured resonance frequency of the nonlinear LC resonator of the actual device sample of this embodiment under a low temperature environment of 20 mK. By adjusting the current value on the DC bias circuit (104), the resonant frequency of the nonlinear LC resonator can be changed, for example, when the current value is changed from-0.6 mA to 0.3 mA, the resonant frequency of the device is changed, so that the frequency adjustment is realized.
Fig. 5 shows the bandwidth gain characteristics of the device obtained by measuring the actual device sample of this embodiment in a low temperature environment of 20 mK. The method comprises the steps of adjusting a direct current bias circuit (104) to a proper bias current working point, generating a driving signal by using a microwave signal generator, combining the driving signal with a signal generated by a vector network analyzer, feeding the combined signal into an input/output port together through an attenuator, separating an output signal from the input signal through a circulator, and then inputting the output signal into the vector network analyzer after passing through a low-temperature amplifier and a normal-temperature amplifier to measure an S21 curve. By comparing the changes in the S21 curve before and after the application of the drive signal, gain bandwidth characteristics of the device can be obtained, for example, a gain of 10 dB in the range of 400 MHz and a gain of 15 dB in the range of 200 MHz.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (5)

1. An impedance-matched josephson parametric amplifier based on a plurality of superconducting josephson junctions in series, comprising an input-output port (101), an impedance-matched transmission line (102), a nonlinear LC resonator (103) and a dc bias line (104), wherein: one end of an impedance matching transmission line (102) is connected with the input/output port (101), and the other end of the impedance matching transmission line is connected with the nonlinear LC resonator (103); the other end of the nonlinear LC resonator (103) is connected with a direct current bias line (104);
The nonlinear LC resonator (103) is composed of an interdigital capacitor (201) and an equivalent inductor (202), the equivalent inductor (202) is composed of a superconducting Josephson junction series array (301) and a direct current superconducting quantum interferometer (302), the direct current superconducting quantum interferometer (302) is composed of a closed loop composed of two superconducting Josephson junctions which are connected in parallel, the interdigital capacitor (201) is connected with an impedance matching transmission line (102), a direct current bias line (104) is arranged at the closed loop of the superconducting quantum interferometer (302), and the frequency adjustment of the nonlinear LC resonator (103) is realized by adjusting the current of the direct current bias line (104) and changing the magnetic flux in the loop of the direct current superconducting quantum interferometer (302).
2. The impedance-matched josephson parametric amplifier based on series connection of a plurality of superconducting josephson junctions according to claim 1, wherein the input and output ports (101) are the same port, signals enter through the input and output ports (101), and are output through the input and output ports (101) after being amplified, and the input and output ports (101) are connected with a microwave circulator to realize input and output signal separation.
3. The impedance-matched josephson parametric amplifier based on series connection of a plurality of superconducting josephson junctions according to claim 1, wherein the impedance-matched transmission line (102) is formed by a coplanar waveguide transmission line with a gradually changing width of a central conductor, one end of the impedance-matched transmission line (102) is connected to the nonlinear LC resonator (103), and the other end is connected to the input/output port (101), and the width of the central conductor is changed according to a desired impedance value.
4. The impedance-matched josephson parametric amplifier based on series connection of a plurality of superconducting josephson junctions according to claim 1, wherein the equivalent inductance value of the equivalent inductor (202) is proportional to the number of superconducting josephson junctions in the series array of superconducting josephson junctions (301).
5. The impedance-matched Josephson parametric amplifier based on the series connection of a plurality of superconducting Josephson junctions according to claim 1, wherein the input/output port (101), the impedance-matched transmission line (102), the interdigital capacitor (201) of the nonlinear LC resonator and the direct current bias line (104) are all prepared into patterns by one-time exposure and etching through an ultraviolet lithography process, and a direct current superconducting quantum interferometer (302) formed by the series array (301) of the superconducting Josephson junctions and two superconducting Josephson junctions connected in parallel is prepared by adopting an electron beam exposure and dual-angle electron beam evaporation process.
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CN116402151B (en) * 2021-12-24 2024-07-16 本源量子计算科技(合肥)股份有限公司 Characterization method and device of parametric amplifier and quantum computing system
CN114938207B (en) * 2022-05-06 2023-07-25 河南城建学院 A Broadband Josephson Parametric Amplifier Chip Combining Multi-section Impedance Transformers
CN114665836B (en) * 2022-05-07 2023-04-07 南京大学 Impedance matching Josephson parametric amplifier based on double-section quarter-wavelength conversion line
CN115238900B (en) * 2022-06-10 2024-11-29 华南师范大学 Superconducting LC atomic chip
CN115204402A (en) * 2022-06-24 2022-10-18 深圳国际量子研究院 A kind of superconducting quantum chip connection structure and connection method
CN115360990B (en) * 2022-08-17 2024-11-22 河南城建学院 A superconducting Josephson parametric amplifier with large dynamic range and a method for preparing the same
CN115498972A (en) * 2022-09-23 2022-12-20 山东云海国创云计算装备产业创新中心有限公司 Method, device and equipment for preparing superconducting quantum parametric amplifier and readable medium
CN117833844A (en) * 2022-09-27 2024-04-05 华为技术有限公司 Amplifying circuit, chip and quantum bit reading system
CN116388714B (en) * 2023-03-01 2025-02-11 北京量子信息科学研究院 Signal amplification device and preparation method thereof

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