CN113215652A

CN113215652A - Full-automatic electric control cabinet of single crystal furnace

Info

Publication number: CN113215652A
Application number: CN202110650259.0A
Authority: CN
Inventors: 郑庆红; 王晓雷; 赵杰; 杨振雷; 顾明阳; 张旗; 段继超
Original assignee: Baoding Jing Xin Electrical Co ltd
Current assignee: Baoding Jing Xin Electrical Co ltd
Priority date: 2021-06-08
Filing date: 2021-06-08
Publication date: 2021-08-06

Abstract

The invention discloses a fully automatic electric control cabinet for a single crystal furnace, which is composed of an operation table and an electrical box; the operation table includes a sound and light alarm lamp, an industrial computer, an indicator light and a button, and a hand operator; the operation The station is connected to the electrical box by cables, and the electrical box includes heavy-duty connectors, brush wiring boxes, fans, circuit breakers, switching power supplies, transformers, intermediate relays, PLCs, servo drives and filters. The invention provides a fully automatic electric control cabinet for a single crystal furnace, which is composed of an operating table and an electrical box. The operating table is mainly used for man-machine interface interaction, which is movable and facilitates the operation of operators; the electrical box is used for arranging The main components of the electronic control device are mounted on the single crystal furnace components; the operation table and the electrical box work together on the moving parts and sensors of the single crystal furnace to realize the automatic control of the single crystal furnace.

Description

Full-automatic electric control cabinet of single crystal furnace

Technical Field

The invention relates to the technical field of single crystal furnaces, in particular to a full-automatic electric control cabinet of a single crystal furnace.

Background

Single crystal silicon is a semiconductor material commonly used in the fabrication of integrated circuits and other electronic components, and there are two types of single crystal silicon growth techniques: one is the zone melting method and the other is the Czochralski method, wherein the Czochralski method is the method which is generally adopted at present. The method for growing the monocrystalline silicon by the Czochralski method comprises the following steps: putting high-purity polycrystalline silicon raw materials into a quartz crucible of a Czochralski method single crystal furnace, heating and melting under the protection of flowing inert gas in low vacuum, putting a piece of monocrystalline silicon (also called seed crystal) with a specific growth direction into a seed crystal holding device, contacting the seed crystal with a silicon solution, adjusting the temperature of the molten silicon solution to be close to the melting point temperature, driving the seed crystal to extend into the molten silicon solution from top to bottom and rotate, slowly lifting the seed crystal, enabling the monocrystalline silicon to enter a cone part for growth, increasing the lifting speed of the seed crystal when the diameter of the cone is close to a target diameter, enabling the diameter of the monocrystalline silicon body not to increase any more and to enter a middle growth stage of the crystal, and increasing the lifting speed of the seed crystal again when the growth of the monocrystalline silicon body is close to the end, enabling the monocrystalline silicon body to gradually separate from the molten silicon to form a lower cone to finish the growth. The monocrystalline silicon grown by the method is in the shape of two conical cylinders, and the cylinders are sliced to obtain the monocrystalline silicon semiconductor raw material, and the circular monocrystalline silicon piece can be used as the material of integrated circuits or solar energy. The pulling of single crystal silicon is generally carried out in a Czochralski single crystal furnace.

The structure of the single crystal furnace on the market at present is simpler, the production state of the single crystal silicon can not be accurately grasped, the production efficiency is low, the control mode is dispersed and single, the centralized control management can not be realized, the safety performance is low, the product manufacturing shape is different, and the production percent of pass is low.

Disclosure of Invention

The invention aims to provide a full-automatic electric control cabinet of a single crystal furnace, wherein an operation table is mainly used for man-machine interface interaction, is movable and is convenient for operators to operate; the electric box is used for arranging main components of the electric control device and is hung on a single crystal furnace component; the operation table and the electric box jointly act on the moving parts and the sensor of the single crystal furnace to realize the full-automatic control of the single crystal furnace, so as to solve the problems in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme:

a full-automatic electric control cabinet of a single crystal furnace comprises an operation console and an electric box; the operating platform comprises an acousto-optic alarm lamp, an industrial computer, an indicator lamp, a button and a manual operator; the acousto-optic alarm lamp is arranged at the top of the industrial computer and is electrically connected with the industrial computer; the indicator light and the button are arranged on an operation panel of the operation table, and a manual operator is arranged on one side of the operation table; the operating platform is connected with an electric box through a cable, and the electric box comprises a heavy-load connector, a brush wiring box, a fan, a circuit breaker, a switching power supply, a transformer, an intermediate relay, a PLC (programmable logic controller), a servo driver and a filter; the heavy-load connector and the brush wiring box are arranged on two sides of the electric box, the heavy-load connector on one side of the electric box is connected with the operating platform, and the heavy-load connector on the other side of the electric box is connected with a circuit between single crystal furnace components; the fan is arranged at the bottom of the electric box, a circuit breaker, a switching power supply, a transformer, an intermediate relay, a PLC, a servo driver and a filter are respectively arranged in the electric box, and telecommunication connection is established among the circuit breaker, the switching power supply, the transformer, the intermediate relay, the PLC, the servo driver and the filter.

Furthermore, the bottom of the operation table is provided with universal wheels which are convenient to move.

Furthermore, the electric box is electrically connected with a moving part, a CCD image sensor, a position sensor, a pressure sensor, a temperature sensor, a weighing sensor and a vacuum gauge between the heavy-duty connector and the single crystal furnace part.

Furthermore, the servo driver is connected with the fan and used for reducing the temperature of the environment inside the electric box.

Further, the brush deck box is used for data interface connector threading of a heavy duty connector.

Further, the circuit breaker is electrically connected to a switching power supply, and the circuit breaker and the switching power supply are arranged in parallel in an electrical box.

Furthermore, the other end of the switch power supply is electrically connected with a transformer, the transformer is electrically connected with an intermediate relay, and the intermediate relay is connected to the PLC.

Furthermore, the PLC is in communication connection with an acousto-optic alarm lamp, an industrial computer, an indicator lamp, a button and a manual operator in the operating console, and the PLC is used for storing and executing an operating instruction.

Compared with the prior art, the invention has the beneficial effects that:

the full-automatic electric control cabinet of the single crystal furnace provided by the invention comprises an operation console and an electric box, wherein the operation console is mainly used for human-computer interface interaction, is movable and is convenient for operators to operate; the electric box is used for arranging main components of the electric control device and is hung on a single crystal furnace component; the operation table and the electric box jointly act on the moving parts and the sensor of the single crystal furnace, and full-automatic control of the single crystal furnace is realized.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a front view of the console of the present invention;

FIG. 3 is a left side view of the console of the present invention;

FIG. 4 is a right side view of the console of the present invention;

FIG. 5 is a rear view of the console of the present invention;

FIG. 6 is a front view of the electrical box of the present invention;

FIG. 7 is a left side view of the electrical enclosure of the present invention;

FIG. 8 is a right side view of the electrical box of the present invention;

FIG. 9 is a schematic diagram of the internal structure of the electrical box of the present invention;

fig. 10 is a top view of the electrical box of the present invention.

In the figure: 1. an operation table; 101. an acousto-optic alarm lamp; 102. an industrial computer; 103. indicator lights and buttons; 104. a manual operator; 2. an electric box; 201. a heavy duty connector; 202. a brush wiring box; 203. a fan; 204. a circuit breaker; 205. a switching power supply; 206. a transformer; 207. an intermediate relay; 208. a PLC; 209. a servo driver; 210. a filter; 301. a moving part; 302. a CCD image sensor; 303. a position sensor; 304. a pressure sensor; 305. a temperature sensor; 306. a weighing sensor; 307. a vacuum gauge.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-10, in the embodiment of the present invention: a full-automatic electric control cabinet of a single crystal furnace consists of an operating platform 1 and an electric box 2; the operating platform 1 comprises an acousto-optic alarm lamp 101, an industrial computer 102, an indicator lamp and a button 103 and a manual operator 104; the acousto-optic alarm lamp 101 is arranged at the top of the industrial computer 102 and is electrically connected with the industrial computer 102; the indicator light and the button 103 are arranged on an operation panel of the operation table 1, and a manual operator 104 is arranged on one side of the operation table 1; the operation table 1 is connected with an electric box 2 through a cable, and the electric box 2 comprises a heavy-load connector 201, a brush wiring box 202, a fan 203, a circuit breaker 204, a switching power supply 205, a transformer 206, an intermediate relay 207, a PLC208, a servo driver 209 and a filter 210; the heavy-load connector 201 and the brush wiring box 202 are arranged on two sides of the electric box 2, the heavy-load connector 201 on one side is connected with the operating platform 1, and the heavy-load connector 201 on the other side is connected with a circuit between single crystal furnace components; the fan 203 is arranged at the bottom of the electrical box 2, a circuit breaker 204, a switching power supply 205, a transformer 206, an intermediate relay 207, a PLC208, a servo driver 209 and a filter 210 are respectively arranged inside the electrical box 2, and the circuit breaker 204, the switching power supply 205, the transformer 206, the intermediate relay 207, the PLC208, the servo driver 209 and the filter 210 are in telecommunication connection with each other.

In the above embodiment, the bottom of the operation table 1 is provided with the universal wheels convenient to move, so that the operation of operators is facilitated.

In the above embodiment, the electric box 2 is electrically connected with the moving component 301, the CCD image sensor 302, the position sensor 303, the pressure sensor 304, the temperature sensor 305, the weighing sensor 306 and the vacuum gauge 307 between the heavy-duty connector 201 and the components of the single crystal furnace, so as to realize the full-automatic control of the single crystal furnace.

In the above embodiment, the servo driver 209 is connected to the fan 203, and is used to reduce the internal ambient temperature of the electrical box 2, ensure the ambient temperature of the components, and avoid high temperature damage.

In the above embodiment, the brush wire box 202 is used for threading the data interface connector of the heavy-duty connector 201, and has the advantages of dust prevention, convenience in wiring and the like.

In the above embodiment, the circuit breaker 204 is electrically connected to the switching power source 205, the circuit breaker 204 and the switching power source 205 are arranged in parallel in the electrical box 2, the circuit breaker 204 is used for on-off action, and the switching power source 205 is used for supplying power to different power devices.

In the above embodiment, the other end of the switching power supply 205 is electrically connected to the transformer 206, the transformer 206 is electrically connected to the intermediate relay 207, the intermediate relay 207 is connected to the PLC208, the transformer 206 transforms the voltage, and the intermediate relay 207 is used to transmit signals to control the circuit.

In the above embodiment, the PLC208 establishes communication connection with the audible and visual alarm lamp 101, the industrial computer 102, the indicator lamp and button 103, and the hand operator 104 in the console 1, and the PLC208 is configured to store and execute an operation instruction.

In the above embodiment, the filter 210 is used to filter out the interference.

In summary, the following steps: the invention provides a full-automatic electric control cabinet of a single crystal furnace, which consists of an operation platform 1 and an electric box 2, wherein the operation platform 1 is mainly used for human-computer interface interaction, is movable and is convenient for operators to operate; the electric box 2 is used for arranging main components of the electric control device and is hung on a single crystal furnace component; the operation table 1 and the electric box 2 jointly act on moving parts and a sensor of the single crystal furnace, and full-automatic control of the single crystal furnace is realized.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be able to cover the technical solutions and the inventive concepts of the present invention within the technical scope of the present invention.

Claims

1. A fully automatic electric control cabinet for a single crystal furnace, characterized in that, it is composed of two parts: a console (1) and an electrical box (2); a computer (102), an indicator light and a button (103), a hand-held communicator (104); the sound and light alarm light (101) is installed on the top of the industrial computer (102) and is electrically connected to the industrial computer (102); The indicator lights and buttons (103) are installed on the operation panel of the operation table (1), and a hand operator (104) is arranged on one side of the operation table (1); the operation table (1) is connected to an electrical box through cables. (2) Connection, the electrical box (2) includes a heavy-duty connector (201), a brush wiring box (202), a fan (203), a circuit breaker (204), a switching power supply (205), a transformer (206), The intermediate relay (207), PLC (208), servo driver (209) and filter (210); the heavy-duty connector (201) and the brush wiring box (202) are arranged on two sides of the electrical box (2). side, the heavy-duty connector (201) on one side is connected to the console (1), and the heavy-duty connector (201) on the other side is connected to the circuit between the single crystal furnace components; the fan (203) is installed in the electrical At the bottom of the box (2), a circuit breaker (204), a switching power supply (205), a transformer (206), an intermediate relay (207), a PLC (208), and a servo driver (209) are respectively installed inside the electrical box (2). and filter (210), and the circuit breaker (204), switching power supply (205), transformer (206), intermediate relay (207), PLC (208), servo drive (209), filter (210) are mutually Establish a telecommunication connection.

2 . The fully automatic electric control cabinet for a single crystal furnace according to claim 1 , wherein the bottom of the operating table ( 1 ) is equipped with a universal wheel that is easy to move. 3 .

3. The fully automatic electric control cabinet of a single crystal furnace according to claim 1, characterized in that: the electrical box (2) passes through the heavy-duty connector (201) and the moving parts (301) between the single crystal furnace components ), a CCD image sensor (302), a position sensor (303), a pressure sensor (304), a temperature sensor (305), a load cell (306), and a vacuum gauge (307) to establish circuit connections.

4 . The fully automatic electric control cabinet for a single crystal furnace according to claim 3 , wherein the servo driver ( 209 ) is connected to the fan ( 203 ) for reducing the internal ambient temperature of the electrical box ( 2 ). 5 .

5 . The fully automatic electric control cabinet for a single crystal furnace according to claim 4 , wherein the brush wiring box ( 202 ) is used for threading the data interface connector of the heavy-duty connector ( 201 ). 6 .

6. The fully automatic electric control cabinet for a single crystal furnace according to claim 5, wherein the circuit breaker (204) is electrically connected to the switching power supply (205), and the circuit breaker (204) is connected to the switching power supply (205). ) are arranged in parallel in the electrical box (2).

7. The fully automatic electric control cabinet of a single crystal furnace according to claim 6, wherein the other end of the switching power supply (205) is electrically connected to a transformer (206), and the transformer (206) is connected to an intermediate relay (206). 207) is electrically connected, and the intermediate relay (207) is connected to the PLC (208).

8. The fully automatic electric control cabinet of a single crystal furnace according to claim 7, wherein the PLC (208) and the sound and light alarm light (101), the industrial computer (102) in the operating console (1) ), indicator lights and buttons (103), and a hand-held communicator (104) to establish a communication connection, and a PLC (208) is used to store and execute operation instructions.