CN113213523A - Nano cerium oxide powder with high cutting efficiency and preparation method thereof - Google Patents
Nano cerium oxide powder with high cutting efficiency and preparation method thereof Download PDFInfo
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- CN113213523A CN113213523A CN202110726937.7A CN202110726937A CN113213523A CN 113213523 A CN113213523 A CN 113213523A CN 202110726937 A CN202110726937 A CN 202110726937A CN 113213523 A CN113213523 A CN 113213523A
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- 239000000843 powder Substances 0.000 title claims abstract description 65
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 229910000420 cerium oxide Inorganic materials 0.000 title claims abstract description 43
- 238000005520 cutting process Methods 0.000 title claims abstract description 21
- 238000002360 preparation method Methods 0.000 title abstract description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims abstract description 27
- 238000001354 calcination Methods 0.000 claims abstract description 22
- 238000000498 ball milling Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000002245 particle Substances 0.000 claims abstract description 15
- 239000002002 slurry Substances 0.000 claims abstract description 14
- 150000007524 organic acids Chemical class 0.000 claims abstract description 11
- 238000001704 evaporation Methods 0.000 claims abstract description 10
- 230000008020 evaporation Effects 0.000 claims abstract description 10
- 238000003801 milling Methods 0.000 claims abstract description 10
- 239000004576 sand Substances 0.000 claims abstract description 10
- 150000000703 Cerium Chemical class 0.000 claims abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000001035 drying Methods 0.000 claims abstract description 4
- 239000002105 nanoparticle Substances 0.000 claims description 13
- 229960001759 cerium oxalate Drugs 0.000 claims description 5
- ZMZNLKYXLARXFY-UHFFFAOYSA-H cerium(3+);oxalate Chemical compound [Ce+3].[Ce+3].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O ZMZNLKYXLARXFY-UHFFFAOYSA-H 0.000 claims description 5
- GHLITDDQOMIBFS-UHFFFAOYSA-H cerium(3+);tricarbonate Chemical compound [Ce+3].[Ce+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O GHLITDDQOMIBFS-UHFFFAOYSA-H 0.000 claims description 5
- 239000000725 suspension Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 abstract description 23
- 238000009826 distribution Methods 0.000 abstract description 3
- 238000001000 micrograph Methods 0.000 description 12
- 239000000203 mixture Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 239000000919 ceramic Substances 0.000 description 9
- 238000003756 stirring Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 229910021642 ultra pure water Inorganic materials 0.000 description 6
- 239000012498 ultrapure water Substances 0.000 description 6
- 239000003082 abrasive agent Substances 0.000 description 5
- 229910052761 rare earth metal Inorganic materials 0.000 description 4
- 150000002910 rare earth metals Chemical class 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000011258 core-shell material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010436 fluorite Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- -1 spectacles Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F17/00—Compounds of rare earth metals
- C01F17/20—Compounds containing only rare earth metals as the metal element
- C01F17/206—Compounds containing only rare earth metals as the metal element oxide or hydroxide being the only anion
- C01F17/224—Oxides or hydroxides of lanthanides
- C01F17/235—Cerium oxides or hydroxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F17/00—Compounds of rare earth metals
- C01F17/10—Preparation or treatment, e.g. separation or purification
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/03—Particle morphology depicted by an image obtained by SEM
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Analytical Chemistry (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Abstract
The invention discloses a nano cerium oxide powder with high cutting efficiency and a preparation method thereof, which is characterized by comprising the following steps: a. adding a certain amount of organic acid into water for dissolving, adding insoluble cerium salt into a solution of the organic acid and the water, and performing ball milling or sand milling to obtain uniformly dispersed slurry; b. drying the slurry obtained in the step a in a flash evaporation mode to obtain dry, uniform and fine powder; c. b, calcining the powder obtained in the step b to obtain the powder; the organic acid in the step a is citric acid. Compared with the prior art, the nano cerium oxide powder prepared by the method has the advantages of about 100nm of particle size, narrow particle size distribution, edge angle appearance and higher cutting efficiency, and further can effectively improve the polishing rate.
Description
Technical Field
The invention relates to the technical field of surface polishing treatment, in particular to 100 nm-grade cerium oxide powder and a preparation method thereof.
Background
Chemical Mechanical Polishing (CMP) is a technique for achieving planarization by chemical and mechanical action of a polishing liquid, and is used for planarization of surfaces including glass, spectacles, or semiconductor lenses. Polishing solutions for planarizing or polishing the surface of a substrate are well known in the art and typically include an abrasive in an aqueous solution. Abrasives known in the art include cerium oxide, silicon oxide, aluminum oxide, zirconium oxide, tin oxide, and the like. The polishing solution containing the rare earth polishing powder has the advantages of high polishing speed and high precision. Since the rare earth polishing powder was invented in the last 40 th century, the production capacity and the amount of the rare earth polishing powder were gradually increased. In recent years, with rapid development of optical and information industries, liquid crystal displays, light emitting devices, optical elements, and the like have been increasingly demanded for polishing powders, and the requirements for polishing precision and polishing rate have been increasingly high.
At present, in practical polishing applications, traditional inorganic abrasives such as alumina and silica are mainly used, and the polishing rate of the traditional inorganic abrasives cannot well meet industrial requirements. In the existing technology of grafting an organic core-shell structure on the surface of part of traditional inorganic abrasive materials, the dispersibility is improved by reducing the hardness of the inorganic abrasive materials, but the organic materials are inert systems and cannot react with the surface of a substrate well, so that the polishing efficiency cannot be effectively improved.
Among rare earth polishing materials, cerium oxide (CeO)2) The abrasive particles have controllable heterogeneous material selective removal characteristics, and are widely applied to the chemical mechanical polishing process of integrated circuit dielectric materials. Compared with the traditional abrasive grains such as silicon oxide, aluminum oxide and the like, the cerium oxide abrasive grain has the greatest characteristic of having both mechanical grinding effect and chemical reaction activity. CeO (CeO)2Having fluorite type atomic arrangement and surface with Ce3+And may be reacted with Ce4+And (4) mutual transformation. CeO (CeO)2Ce of the surface3+The interaction between the CeO2 and the hydration layer on the surface of the medium material can be improved, thereby improving the polishing rate.
A Chinese patent application with publication number CN109734121A discloses a preparation method of nano cerium oxide for polishing silicon wafers, which comprises the following steps: a. adding a certain amount of silicate into water, stirring and dissolving, adding insoluble cerium salt into a solution of the silicate and the water, and performing ball milling to obtain uniformly dispersed slurry; b. drying the slurry obtained in the step a in a flash evaporation mode to obtain dry, uniform and fine powder; c. and c, calcining the powder obtained in the step b to obtain the catalyst. The invention has the advantages of simple process, low requirement on equipment, easy absorption and treatment of tail gas, low production cost, particle size of 100-120nm, narrow particle size distribution, easy dispersion and the like. However, the cerium oxide prepared in this patent has a spherical or spheroidal surface morphology and is still not high enough in cutting efficiency for polishing the surface of a substrate.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a method for preparing nano-scale cerium oxide powder with edge angle appearance and higher cutting efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme.
A method for preparing nano-scale cerium oxide powder with high cutting efficiency is characterized by comprising the following steps: a. adding a certain amount of organic acid into water for dissolving, adding insoluble cerium salt into a solution of the organic acid and the water, and performing ball milling or sand milling to obtain uniformly dispersed slurry; b. drying the slurry obtained in the step a in a flash evaporation mode to obtain dry, uniform and fine powder; c. b, calcining the powder obtained in the step b to obtain the powder; the organic acid in the step a is citric acid.
In some embodiments, the cerium salt in step a is cerium carbonate or cerium oxalate;
in some embodiments, the mass ratio of the organic acid to the cerium salt in step a is 0.03-0.2: 1.
in some embodiments, the ball milling and sand milling method used in step a is planetary ball milling or vertical sand milling.
In some embodiments, in step c, the equipment used for calcination is a muffle furnace, a tube furnace, a shuttle kiln, a pusher kiln, a rotary kiln, a suspension calciner, or the like.
In some embodiments, in step c, the temperature of calcination is 600 to 1000 ℃, and the time of calcination is 30 to 60 min.
The present invention also provides a nano-sized cerium oxide powder having high cutting efficiency, which is characterized by being prepared by the above-mentioned preparation method, and having a particle size of 100nm level.
The invention has the beneficial effects that: compared with the prior art, the nano cerium oxide powder prepared by the method has the advantages of about 100nm of particle size, narrow particle size distribution, edge angle appearance and higher cutting efficiency, and further can effectively improve the polishing rate. The practical production proves that compared with the existing spherical or sphere-like cerium oxide powder, the nano-scale cerium oxide powder provided by the invention can improve the polishing rate by more than 40% under the condition of keeping other experimental conditions unchanged.
Drawings
FIG. 1 is a scanning electron microscope image of nano-sized cerium oxide powder prepared in example 1 of the present invention.
FIG. 2 is a scanning electron microscope image of the nano-sized cerium oxide powder prepared in example 2 of the present invention.
FIG. 3 is a scanning electron microscope image of the nano-sized cerium oxide powder prepared in example 3 of the present invention.
FIG. 4 is a scanning electron microscope image of the nano-sized cerium oxide powder prepared in example 4 of the present invention.
FIG. 5 is a scanning electron microscope image of the nano-sized cerium oxide powder prepared in example 5 of the present invention.
FIG. 6 is a scanning electron microscope image of the nano-sized cerium oxide powder prepared in example 6 of the present invention.
Detailed Description
The following further describes embodiments of the present invention in conjunction with the drawings of the specification. The embodiments described below are exemplary and are intended to be illustrative of the invention, but are not to be construed as limiting the invention.
Example 1
A method for preparing nano-scale cerium oxide powder with high cutting efficiency is characterized by comprising the following steps:
(1) 1g of citric acid was dissolved with ultrapure water under stirring.
(2) And mixing 10g of cerium carbonate with the solution obtained in the previous step, performing ball milling to obtain dispersed slurry, and further performing flash evaporation to obtain dried and uniform mixture powder. Preferably, the ball milling mode is planetary ball milling.
(3) Placing the mixture powder into a ceramic crucible, placing into a muffle furnace, calcining at 800 ℃, and keeping the temperature for 60 min; cooling to room temperature along with the furnace.
(4) Calcining and sintering to obtain cerium oxide powder with particle size of about 100nm and angular appearance, and scanning electron microscope image thereof is shown in figure 1.
Example 2
A method for preparing nano-scale cerium oxide powder with high cutting efficiency is characterized by comprising the following steps:
(1) 0.3g of citric acid was dissolved with ultrapure water under stirring.
(2) 10g of cerium carbonate was mixed with the solution obtained in the previous step, and a dispersed slurry was obtained by sand milling, and further by flash evaporation, a dried and uniform mixture powder was obtained. Preferably, the sanding mode is vertical sanding.
(3) Placing the mixture powder into a ceramic crucible, placing into a tube furnace, calcining at 600 deg.C, and maintaining for 60 min; cooling to room temperature along with the furnace.
(4) Calcining and sintering to obtain cerium oxide powder with particle size of about 100nm and angular appearance, and scanning electron microscope image of the cerium oxide powder is shown in FIG. 2.
Example 3
(1) 2g of citric acid was dissolved by stirring with ultrapure water.
(2) And mixing 10g of cerium carbonate with the solution obtained in the previous step, performing ball milling to obtain dispersed slurry, and further performing flash evaporation to obtain dried and uniform mixture powder. Preferably, the ball milling mode is planetary ball milling.
(3) Placing the mixture powder in a ceramic crucible, placing the ceramic crucible in a shuttle kiln, calcining at 1000 ℃, and keeping the temperature for 30 min; cooling to room temperature along with the furnace.
(4) Calcining and sintering to obtain cerium oxide powder with particle size of about 100nm and angular appearance, and scanning electron microscope image thereof is shown in FIG. 3.
Example 4
A method for preparing nano-scale cerium oxide powder with high cutting efficiency is characterized by comprising the following steps:
(1) 0.8g of citric acid was dissolved with ultrapure water under stirring.
(2) 10g of cerium oxalate was mixed with the solution obtained in the previous step, and a well dispersed slurry was obtained by sand milling, and further dried and uniform mixture powder was obtained by flash evaporation. Preferably, the sanding mode is vertical sanding.
(3) Placing the mixture powder in a ceramic crucible, placing the ceramic crucible in a pushed slab kiln, calcining at 800 ℃, and keeping the temperature for 50 min; cooling to room temperature along with the furnace.
(4) Calcining and sintering to obtain cerium oxide powder with particle size of about 100nm and angular appearance, and scanning electron microscope image thereof is shown in FIG. 4.
Example 5
A method for preparing nano-scale cerium oxide powder with high cutting efficiency is characterized by comprising the following steps:
(1) 1.5g of citric acid was dissolved with ultrapure water under stirring.
(2) And mixing 10g of cerium oxalate with the solution obtained in the previous step, performing ball milling to obtain dispersed slurry, and further performing flash evaporation to obtain dried and uniform mixture powder. Preferably, the ball milling mode is planetary ball milling.
(3) Placing the mixture powder in a ceramic crucible, placing in a rotary kiln, calcining at 600 deg.C, and maintaining for 45 min; cooling to room temperature along with the furnace.
(4) The cerium oxide powder with the particle size of about 100nm and angular appearance can be obtained after calcination, and a scanning electron microscope image of the cerium oxide powder is shown in fig. 5.
Example 6
A method for preparing nano-scale cerium oxide powder with high cutting efficiency is characterized by comprising the following steps:
(1) 2g of citric acid was dissolved by stirring with ultrapure water.
(2) 10g of cerium oxalate was mixed with the solution obtained in the previous step, and a well dispersed slurry was obtained by sand milling, and further dried and uniform mixture powder was obtained by flash evaporation. Preferably, the sanding mode is vertical sanding.
(3) Placing the mixture powder into a ceramic crucible, and placing the ceramic crucible into a suspension calciner, wherein the calcination temperature is 1000 ℃, and the heat preservation time is 30 min; cooling to room temperature along with the furnace.
(4) The cerium oxide powder with the particle size of about 100nm and angular appearance can be obtained after calcination, and a scanning electron microscope image of the cerium oxide powder is shown in fig. 6.
It will be appreciated by those skilled in the art from the foregoing description of construction and principles that the invention is not limited to the specific embodiments described above, and that modifications and substitutions based on the teachings of the art may be made without departing from the scope of the invention as defined by the appended claims and their equivalents. The details not described in the detailed description are prior art or common general knowledge.
Claims (7)
1. A method for preparing nano-scale cerium oxide powder with high cutting efficiency is characterized by comprising the following steps:
a. adding a certain amount of organic acid into water for dissolving, adding insoluble cerium salt into a solution of the organic acid and the water, and performing ball milling or sand milling to obtain uniformly dispersed slurry;
b. drying the slurry obtained in the step a in a flash evaporation mode to obtain dry, uniform and fine powder;
c. b, calcining the powder obtained in the step b to obtain the powder;
the organic acid is citric acid.
2. The method for preparing nano-sized cerium oxide powder with high cutting efficiency according to claim 1, wherein the cerium salt in the step a is cerium carbonate or cerium oxalate.
3. The method for preparing nano-sized cerium oxide powder with high cutting efficiency according to claim 1, wherein the mass ratio of the organic acid to the cerium salt in the step a is 0.03 to 0.2: 1.
4. the method for preparing nano-sized cerium oxide powder with high cutting efficiency according to claim 1, wherein the ball milling or sand milling used in the step a is planetary ball milling or vertical sand milling.
5. The method for preparing nano-sized cerium oxide powder with high cutting efficiency according to claim 1, wherein the calcination is performed in step c using a muffle furnace, a tube furnace, a shuttle kiln, a pusher kiln, a rotary kiln or a suspension calciner.
6. The method for preparing nano-sized cerium oxide powder with high cutting efficiency according to claim 1, wherein the calcination temperature is 600 to 1000 ℃ and the calcination time is 30 to 60min in step c.
7. A nano-sized cerium oxide powder having high cutting efficiency, which is obtained by using any one of claims 1 to 6, and has a particle size of 100nm order.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115140756A (en) * | 2022-08-05 | 2022-10-04 | 湖南省产商品质量检验研究院 | Preparation method of sphere-like nano cerium oxide |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115140756A (en) * | 2022-08-05 | 2022-10-04 | 湖南省产商品质量检验研究院 | Preparation method of sphere-like nano cerium oxide |
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