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CN113176455B - A device and method for measuring piezoelectric performance parameters of ferroelectric crystals under strong electric field - Google Patents

A device and method for measuring piezoelectric performance parameters of ferroelectric crystals under strong electric field Download PDF

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CN113176455B
CN113176455B CN202110442854.5A CN202110442854A CN113176455B CN 113176455 B CN113176455 B CN 113176455B CN 202110442854 A CN202110442854 A CN 202110442854A CN 113176455 B CN113176455 B CN 113176455B
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single crystal
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ferroelectric single
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polarized
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CN113176455A (en
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田昊
李飞
乔辽
高翔宇
贾楠香
徐卓
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/22Measuring piezoelectric properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0425Test clips, e.g. for IC's

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Abstract

本发明提供的一种强电场下铁电晶体压电性能参数的测量装置及方法,其特征在于,包括外加电场单元、测试夹具和非接触激光测位仪,其中,已极化待测铁电单晶安装在测试夹具上;所述外加电场单元通过测试夹具与已极化待测铁电单晶电连接,用于向已极化待测铁电单晶施加设定频率和电压幅值的交流电;非接触激光测位仪用于测量已极化待测铁电单晶的应变量,并将采集到的应变量传输至PC处理器;所述PC处理器用于根据接收到的应变量计算已极化待测铁电单晶的压电常数;本装置操作方便易控、安全性高。

The present invention provides a device and method for measuring the piezoelectric performance parameters of a ferroelectric crystal under a strong electric field, which are characterized by comprising an external electric field unit, a test fixture and a non-contact laser position finder, wherein a polarized ferroelectric single crystal to be tested is installed on the test fixture; the external electric field unit is electrically connected to the polarized ferroelectric single crystal to be tested through the test fixture, and is used to apply alternating current with a set frequency and voltage amplitude to the polarized ferroelectric single crystal to be tested; the non-contact laser position finder is used to measure the strain of the polarized ferroelectric single crystal to be tested, and transmit the collected strain to a PC processor; the PC processor is used to calculate the piezoelectric constant of the polarized ferroelectric single crystal to be tested according to the received strain; the device is easy to operate and controllable, and has high safety.

Description

Device and method for measuring piezoelectric performance parameters of ferroelectric crystal under strong electric field
Technical Field
The invention relates to the technical field of characterization of ferroelectric crystal strong electric fields, in particular to a device and a method for measuring piezoelectric performance parameters of ferroelectric crystals under the strong electric field and dynamic conditions.
Background
Ferroelectric crystals such as lead magnesium niobate-lead titanate (PMN-PT) and lead indium niobate-lead magnesium niobate-lead titanate (PIN-PMN-PT) have been widely paid attention to worldwide ferroelectric researchers because of their excellent piezoelectric and electromechanical, optical, acoustic and ferroelectric properties and their ability to achieve interconversions between various functional characteristics, and have been widely used in the fields of ultrasonic transducers, piezoelectric sensors, hydrophones, ferroelectric memories, electro-optic modulators, and the like.
The performance parameter of the material under the strong electric field of the ferroelectric material refers to the change condition of the performance parameter of the ferroelectric material when the ferroelectric is in the strong alternating current field, and the characteristics of the crystal change when the ferroelectric material device is in the strong alternating current field, so that the material is invalid and the device cannot work, and therefore, it is very important to measure the material performance parameter d 33、d31 of the ferroelectric under the strong electric field condition.
At present, the ferroelectric crystal testing method mainly uses a transmission line method and a quasi-static method for calculation, the traditional testing method can only measure the performance parameters of the ferroelectric crystal under low electric field intensity and small signals, and the performance parameters under high power can not be accurately obtained under the dynamic strong electric field environment.
Disclosure of Invention
The invention aims to provide a device and a method for measuring piezoelectric performance parameters of ferroelectric crystals under a strong electric field, which solve the defects in the prior art.
In order to achieve the above purpose, the invention adopts the following technical scheme:
The invention provides a measuring device for ferroelectric crystal piezoelectric performance parameters under a strong electric field, which is characterized by comprising an external electric field unit, a test fixture and a non-contact laser position finder, wherein a polarized ferroelectric single crystal to be measured is arranged on the test fixture; the external electric field unit is electrically connected with the polarized ferroelectric single crystal to be tested through a test fixture and is used for applying alternating current with set frequency and voltage amplitude to the polarized ferroelectric single crystal to be tested; the non-contact laser position finder is used for measuring the strain quantity of the polarized ferroelectric monocrystal to be measured and transmitting the collected strain quantity to the PC processor; the PC processor is used for calculating the piezoelectric constant of the polarized ferroelectric monocrystal to be detected according to the received strain quantity.
Preferably, the external electric field unit comprises a signal generator, and the output end of the signal generator is connected with two ends of the electrode of the ferroelectric single crystal to be detected.
Preferably, the output end of the signal generator is connected with the input end of the power amplifier; the output end of the power amplifier is connected with the two ends of the electrode of the ferroelectric monocrystal to be detected.
Preferably, the power amplifier is also connected with an oscilloscope.
Preferably, the ferroelectric single crystal to be tested is fixed on a test fixture; the test fixture comprises a conductive base, a conductive thimble and an insulating bracket, wherein one end of the insulating bracket is fixed on the side wall of the conductive base, the other end of the insulating bracket is fixed with the conductive thimble, and the free end of the conductive thimble is electrically connected with one electrode surface of the polarized ferroelectric monocrystal to be tested; the electrode surface of the other side of the polarized ferroelectric monocrystal to be detected is fixed on the upper surface of the conductive base through solid conductive silver colloid.
Preferably, the polarized ferroelectric single crystal to be measured is arranged on an air suspension optical platform.
A method for measuring piezoelectric performance parameters of ferroelectric crystals under a strong electric field comprises the following steps:
mounting the polarized ferroelectric monocrystal to be tested on a test fixture;
Applying alternating voltages with different electric field intensities and different frequencies to the polarized ferroelectric single crystal to be tested through an external electric field unit so as to enable the polarized ferroelectric single crystal to be tested to generate mechanical deformation vibration;
And measuring the mechanical deformation under the variable frequency and the variable field strength, and further calculating to obtain the piezoelectric performance parameters of the polarized ferroelectric single crystal to be measured under the variable frequency and the variable field strength.
Preferably, the method comprises the following steps:
Step 1, applying alternating current with set frequency and voltage amplitude to a polarized ferroelectric single crystal to be detected through an external electric field unit, and obtaining deformation of the polarized ferroelectric single crystal to be detected under the frequency and voltage amplitude;
Step 2, maintaining the amplitude of alternating voltage applied to the polarized ferroelectric single crystal to be detected unchanged, increasing the frequency, and obtaining the deformation of the polarized ferroelectric single crystal to be detected corresponding to different frequencies, wherein the electric field strength is unchanged; until the deformation amount of the ferroelectric single crystal to be measured is increased when the frequency is increased; recording the frequency as the turning frequency of the polarized ferroelectric crystal to be measured;
Step 3, calculating piezoelectric constants d 33 and d 31 of the polarized ferroelectric single crystal to be measured corresponding to different frequencies under the electric field intensity according to the obtained multiple deformation amounts corresponding to different frequencies;
step 4, increasing the amplitude and the frequency of alternating voltage applied to the polarized ferroelectric single crystal to be detected, and obtaining the deformation of the polarized ferroelectric single crystal to be detected under the frequency and the voltage amplitude;
Step 5, repeating the steps 2 to 4 until the amplitude of the alternating voltage applied to the polarized ferroelectric single crystal to be measured reaches the rated voltage amplitude of the external electric field unit, and the frequency applied to the polarized ferroelectric single crystal to be measured is smaller than the turning frequency; and then obtaining the piezoelectric performance parameters of the polarized ferroelectric monocrystal to be detected under the variable frequency and variable field strength conditions.
Compared with the prior art, the invention has the beneficial effects that:
According to the measuring device for the piezoelectric performance parameters of the ferroelectric crystal under the strong electric field, the piezoelectric characteristics of the ferroelectric crystal can deform when voltage is applied, the vertical mechanical vibration can be generated when alternating voltage is applied, and the polarized ferroelectric crystal to be measured can deform in two directions when voltage is applied, so that deformation quantity cannot be measured or measurement is inaccurate; the deformation quantity of the polarized ferroelectric monocrystal to be measured is measured through a non-contact laser position finder, so that the accuracy of deformation quantity measurement is further ensured; further, the piezoelectric performance parameters of the polarized ferroelectric single crystal to be measured under the variable frequency and variable field strength can be more accurately obtained; meanwhile, the device is convenient and easy to control in operation and high in safety, and the piezoelectric constant of the polarized ferroelectric single crystal to be measured under the strong electric field and dynamic conditions before the turning frequency can be measured by only preparing the polarized ferroelectric single crystals to be measured with different physical dimensions and determining the strain turning frequency point of the polarized ferroelectric single crystal to be measured in the test.
The invention provides a method for measuring piezoelectric performance parameters of ferroelectric crystals under a strong electric field, which utilizes the inverse piezoelectric effect of the polarized ferroelectric crystals to be measured, and can generate a certain deformation by applying an electric field with a certain strength to the polarization direction of the crystals; the deformation of the polarized ferroelectric monocrystal to be detected is easier to obtain, and the accuracy is higher; the piezoelectric performance parameters of the crystal are obtained more accurately through the deformation amount calculation, and the piezoelectric performance test of the polarized ferroelectric single crystal to be tested under the variable frequency and the variable field strength before the turning frequency can be completed through the determination of the turning frequency of the test sample.
Drawings
FIG. 1 is a schematic view of a measuring device according to the present invention;
FIG. 2 is a schematic structural view of a test fixture;
FIG. 3 is a flow chart of a measurement method according to the present invention;
fig. 4 is a diagram showing a change in the ferroelectric crystal d 33 according to example 1;
Fig. 5 is a diagram showing a change in the ferroelectric crystal d 31 according to example 1;
Fig. 6 is a diagram showing a change in the ferroelectric crystal d 33 according to example 2;
Fig. 7 is a diagram showing a change in the ferroelectric crystal d 31 according to example 2;
FIG. 8 is a schematic illustration of the crystal not mounted on the test fixture, and the mechanical deformation mounted on the test fixture.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, the device for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field and dynamic conditions provided by the invention comprises a signal generator 1, a power amplifier 2, a PC processor 3, an oscilloscope 4, a non-contact laser position finder 5, a polarized ferroelectric single crystal to be measured 6, a test fixture 7 and an air suspension optical platform 8, wherein the test fixture 7 is used for fixing the polarized ferroelectric single crystal to be measured 6; the output end of the power amplifier 2 is connected with two ends of an electrode of the polarized ferroelectric monocrystal 6 to be detected; the input end of the power amplifier 2 is connected with the output end of the signal generator 1.
The oscilloscope 4 is connected with a current and voltage monitoring output end of the power amplifier 2 and is used for detecting the voltage and the current applied to the two ends of the electrode of the polarized ferroelectric monocrystal 6 to be detected.
The signal generator 1 is used for providing a sinusoidal pulse signal of a certain frequency and amplitude to a power amplifier 2.
The power amplifier 2 is used for amplifying the electric signal generated by the signal generator 1 and providing alternating voltage for the polarized ferroelectric single crystal 7 to be tested.
The test fixture 7 is used for connecting the polarized ferroelectric single crystal 6 to be tested with other experimental equipment to apply voltage.
As shown in fig. 2, the test fixture 7 includes a conductive base 703, a conductive thimble 701, and an insulating bracket 702, wherein one end of the insulating bracket 702 is fixed on a side wall of the conductive base 703, the other end of the insulating bracket 702 is fixed with the conductive thimble 701, and a free end of the conductive thimble 701 is electrically connected with an electrode surface on one side of the polarized ferroelectric single crystal 6 to be tested; the other electrode surface of the polarized ferroelectric single crystal 6 to be measured is fixed on the upper surface of the conductive base 703 through solid conductive silver colloid; the conductive mount 703 is mounted on the air suspension optical platform 8.
Since the piezoelectric characteristics of the ferroelectric single crystal to be measured are deformed when a voltage is applied, mechanical vibration up and down is generated when an ac voltage is applied, the ferroelectric single crystal to be measured is deformed in both directions when a voltage is applied, as shown in fig. 8, in order to overcome the difficulty that deformation cannot be measured or is inaccurate, the polarized ferroelectric single crystal to be measured is arranged on the test fixture, so that the deformation of the polarized ferroelectric single crystal to be measured faces to one direction, the deformation is convenient to measure, and the measurement accuracy is improved.
The conductive thimble 701 and the conductive base 703 are connected to the power amplifier 2 through wires.
As shown in fig. 3, the method for measuring the piezoelectric performance parameter of the ferroelectric crystal under the strong electric field comprises the following steps of;
Step 1, obtaining polarized unpressurized ferroelectric crystals;
Step 2, cutting the ferroelectric crystal related to the step 1 into polarized ferroelectric single crystals with proper physical size by a dicing saw;
Step 3, placing the polarized ferroelectric single crystal 6 to be tested in the step 2 in a special test fixture, fixing, and applying voltage to the polarized ferroelectric single crystal 6 to be tested through the test fixture;
Step 4, applying alternating voltage with smaller amplitude and frequency to the test fixture related to the step 3, and obtaining the deformation of the alternating voltage; the ac voltage of the smaller amplitude and frequency corresponds to the minimum rated voltage value of the power amplifier 2;
Step 5, calculating a piezoelectric constant d 33、d31 according to the obtained deformation amount of the polarized ferroelectric single crystal 6 to be measured;
And 6, in the step 3, the amplitude of alternating voltage applied to the ferroelectric single crystal 6 to be measured is kept unchanged, the frequency is increased, when the deformation amount of the ferroelectric single crystal 6 to be measured is increased in the frequency increasing process, the frequency is recorded as turning frequency, and the data tested when the alternating voltage frequency applied to the ferroelectric single crystal 6 to be measured is smaller than the frequency is an effective value and is larger than or equal to an ineffective value.
Step 7, repeatedly changing the amplitude and frequency of the alternating voltage applied to the polarized ferroelectric single crystal 6 to be detected in the step 3 until the amplitude of the alternating voltage applied to the polarized ferroelectric single crystal 6 to be detected reaches the maximum rated voltage amplitude of the externally applied electric field unit; the deformation of the ferroelectric single crystal 6 to be measured which is polarized under the strong electric field and dynamic conditions can be obtained, so that the piezoelectric constant d 33、d31 of the ferroelectric single crystal under the strong electric field and dynamic conditions can be obtained.
The application method of the device for measuring the piezoelectric performance parameters of the ferroelectric crystal under the strong electric field and dynamic conditions comprises the following steps:
s1, wiring according to the testing device of FIG. 1;
S2, cutting the ferroelectric crystal bar into a test sample with proper physical size by using a dicing saw to obtain a polarized ferroelectric single crystal 6 to be tested;
S3, placing the polarized ferroelectric single crystal 6 to be tested in a test fixture 7, so that the polarized ferroelectric single crystal 6 to be tested is connected and fixed with the test fixture 7;
S4, placing a test fixture 7 for placing the polarized ferroelectric single crystal 6 to be tested on an air suspension optical platform 8;
S5, turning on the signal generator 1, the power amplifier 2, the PC processor 3, the oscilloscope 4 and the non-contact laser position finder;
S6, applying an alternating voltage with a certain frequency and a smaller amplitude to the polarized ferroelectric single crystal 6 to be tested by the signal generator 1 according to the test requirement, observing the amplitude of the voltage applied to the polarized ferroelectric single crystal 6 to be tested on the oscilloscope 4, recording the deformation of the polarized ferroelectric single crystal 6 to be tested under the frequency and the voltage amplitude by the non-contact laser position finder 5, and obtaining the following formula: the electric field intensity (E) =electric signal amplitude (V)/ferroelectric crystal thickness (m), the magnitude of the electric field intensity applied to the ferroelectric single crystal 6 to be measured polarized at this time is obtained;
S7, calculating d33 and d31 variation of the ferroelectric crystal under the electric field intensity by using the formula d33=deformation/applied voltage, d31=0.5d33;
s8, keeping the amplitude of the alternating voltage applied to the ferroelectric single crystal 6 to be tested to be polarized unchanged, increasing the frequency, and recording the frequency as a turning frequency when the deformation of the ferroelectric single crystal is increased in the frequency increasing process, so that the data tested when the frequency of the alternating voltage applied to the ferroelectric single crystal 6 to be tested to be polarized is smaller than the frequency is an effective value, and the frequency is greater than or equal to an ineffective value.
S9, changing the amplitude and frequency of the voltage applied to the ferroelectric single crystal 6 to be measured, wherein the frequency of the applied voltage does not exceed the turning frequency recorded in S8, and obtaining the deformation of the polarized ferroelectric single crystal 6 to be measured under different voltages and frequencies, so as to calculate the change condition of the piezoelectric constant d 33、d31 of the polarized ferroelectric single crystal 6 to be measured under different electric field intensities and frequencies;
the invention has the advantages of convenient and easy-to-control sample measurement operation and high safety, and can finish the measurement of the piezoelectric performance parameter d 33、d31 of the ferroelectric crystal under the strong electric field and dynamic conditions, the ferroelectric crystal is applied with voltage through an external electric field device, the strain capacity of the ferroelectric crystal is measured through a non-contact laser position finder, thus the piezoelectric constant d 33,d31 of the ferroelectric crystal under the electric field intensity of the frequency is calculated, the electric field intensity is kept unchanged, the test frequency is changed, data is recorded, the electric field intensity is changed, the test is repeated, and the piezoelectric constant d 33、d31 of the polarized ferroelectric single crystal 6 to be tested under different frequencies and different electric field intensities is obtained. The device is convenient and easy to control in operation and high in safety, and the piezoelectric performance parameter test of the polarized ferroelectric single crystal 6 to be tested under a strong electric field can be mainly finished, so long as the test frequency of the polarized ferroelectric single crystal 6 to be tested is far lower than resonance.
The test was performed with a [001] direction polarized PIN-PMN-PT relaxor ferroelectric single crystal sample.
Example 1
The method for measuring the piezoelectric performance parameter d 33、d31 under the strong electric field and dynamic condition of the ferroelectric crystal comprises the following steps:
Step one, performing crystallographic orientation on a PIN-PMN-PT relaxation ferroelectric single crystal by using X-ray diffraction, then cutting according to the crystallographic direction to obtain [001] oriented crystals, wherein the crystal size is 2.5mm X1 mm, the thickness direction of 1mm is the direction of applying an alternating electric field to the polarized ferroelectric single crystal to be tested, and polarizing the crystals along the thickness direction by adopting a direct current electric field of 1kV/mm after the crystals are subjected to electrode treatment to obtain the polarized ferroelectric single crystal to be tested 6;
Step two, the signal generator 1 controls the output frequency of alternating voltage to be 100Hz, the power amplifier 2 applies alternating voltage to the polarized ferroelectric single crystal 6 to be tested, and the output of the power amplifier is regulated, so that the amplitude of the voltage applied to the two ends of the polarized ferroelectric single crystal 6 to be tested is 30V;
Step three, when alternating voltage is applied, measuring the strain quantity of the polarized ferroelectric single crystal 6 to be measured by using a non-contact laser position finder 5, and recording the strain quantity of the polarized ferroelectric single crystal 6 to be measured by using a PC processor 3;
Step four, calculating d 33、d31 change condition of the polarized ferroelectric single crystal to be detected under the electric field intensity by using a formula d 33 = deformation quantity/applied voltage, d 31=0.5d33;
Step five, maintaining the amplitude of the alternating voltage applied to the ferroelectric single crystal 6 to be measured to be polarized unchanged, increasing the frequency of the voltage applied to the ferroelectric single crystal 6 to be measured to be polarized, detecting the deformation amount of the ferroelectric single crystal 6 to be measured to be polarized by using a non-contact laser position finder 5, and recording the frequency of the alternating voltage applied to the ferroelectric single crystal 6 to be measured to be polarized at the moment when the deformation amount of the ferroelectric single crystal 6 to be measured to be polarized is increased, and recording the frequency as turning frequency; ;
Step six, changing the amplitude and frequency of the voltage applied to the ferroelectric single crystal 6 to be measured, wherein the frequency of the applied voltage does not exceed the turning frequency recorded in the step four, and obtaining the deformation of the ferroelectric single crystal 6 to be measured under different voltages and frequencies, so as to calculate the change condition of the piezoelectric constant d 33、d31 of the ferroelectric single crystal 6 to be measured under different electric field intensities and frequencies;
as shown in fig. 4 and 5.
The test examples test rectangular samples of ferroelectric single crystals with dimensions of 2.5mm by 1mm, and applied alternating current electric field strengths of 30, 60, 90, 120, 150, 200V/mm. The test specimen has a turn-over frequency of 80Khz.
Example 2
The method for measuring the piezoelectric performance parameter d 33、d31 under the dynamic conditions of the strong electric field of the polarized ferroelectric single crystal 6 to be measured comprises the following steps:
Step one, performing crystallographic orientation on a PIN-PMN-PT relaxation ferroelectric single crystal by using X-ray diffraction, then cutting according to crystallographic directions to obtain [001] oriented crystals, wherein the crystal size is 2.5mm X1 mm, the thickness direction of 1mm is the direction of applying an alternating electric field to the polarized ferroelectric single crystal 6 to be tested, and polarizing the crystals along the thickness direction by adopting a direct current electric field of 1kV/mm after the crystals are subjected to electrode treatment to obtain the polarized ferroelectric single crystal 6 to be tested;
Step two, the signal generator 1 controls the output frequency of alternating voltage to be 100Hz, the power amplifier 2 applies alternating voltage to the polarized ferroelectric single crystal 6 to be tested, and the output of the power amplifier is regulated, so that the amplitude of the voltage applied to the two ends of the polarized ferroelectric single crystal 6 to be tested is 30V;
Step three, when alternating voltage is applied, measuring the strain quantity of the polarized ferroelectric single crystal 6 to be measured by using a non-contact laser position finder 5, and recording the strain quantity of the polarized ferroelectric single crystal 6 to be measured by using a PC processor 3;
Step four, calculating d33、d31 change conditions of the polarized ferroelectric single crystal to be detected under the electric field intensity by using a formula d 33 = deformation quantity/applied voltage, d 31=0.5d33;
Step five, maintaining the amplitude of the alternating voltage applied to the ferroelectric single crystal 6 to be measured to be polarized unchanged, increasing the frequency of the voltage applied to the ferroelectric single crystal 6 to be measured to be polarized, detecting the deformation amount of the ferroelectric single crystal 6 to be measured to be polarized by using a non-contact laser position finder 5, and recording the frequency of the alternating voltage applied to the ferroelectric single crystal 6 to be measured to be polarized at the moment when the deformation amount of the ferroelectric single crystal 6 to be measured to be polarized is increased, and recording the frequency as turning frequency;
Step six, changing the amplitude and frequency of the voltage applied to the ferroelectric single crystal 6 to be measured, wherein the frequency of the applied voltage does not exceed the turning frequency recorded in the step four, and obtaining the deformation of the ferroelectric single crystal 6 to be measured under different voltages and frequencies, thereby calculating the change condition of the piezoelectric constant d 33、d31 of the ferroelectric single crystal 6 to be measured under different electric field intensities and frequencies.
As shown in fig. 6 and 7.
The case test a rectangular sample of ferroelectric single crystal with a size of 2mm x 1mm, and an alternating current electric field strength of 30, 60, 90, 120, 150, 200V/mm was applied to the ferroelectric single crystal. The test specimen has a turn-over frequency of 150Khz.

Claims (4)

1.一种强电场下铁电晶体压电性能参数的测量方法,其特征在于,基于一种强电场下铁电晶体压电性能参数的测量装置,该装置包括外加电场单元、测试夹具(7)和非接触激光测位仪(5),其中,已极化待测铁电单晶(6)安装在测试夹具(7)上;所述外加电场单元通过测试夹具(7)与已极化待测铁电单晶(6)电连接,用于向已极化待测铁电单晶(6)施加设定频率和电压幅值的交流电;非接触激光测位仪(5)用于测量已极化待测铁电单晶(6)的应变量,并将采集到的应变量传输至PC处理器(3);所述PC处理器(3)用于根据接收到的应变量计算已极化待测铁电单晶(6)的压电常数;1. A method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field, characterized in that the method comprises a device for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field, the device comprising an external electric field unit, a test fixture (7) and a non-contact laser position finder (5), wherein a polarized ferroelectric single crystal (6) to be tested is mounted on the test fixture (7); the external electric field unit is electrically connected to the polarized ferroelectric single crystal (6) to be tested via the test fixture (7) and is used to apply an alternating current of a set frequency and voltage amplitude to the polarized ferroelectric single crystal (6) to be tested; the non-contact laser position finder (5) is used to measure the strain of the polarized ferroelectric single crystal (6) to be tested and transmit the collected strain to a PC processor (3); the PC processor (3) is used to calculate the piezoelectric constant of the polarized ferroelectric single crystal (6) to be tested according to the received strain; 所述测试夹具(7)包括导电底座(703)、导电顶针(701)和绝缘支架(702),其中,绝缘支架(702)的一端固定在导电底座(703)的侧壁上,绝缘支架(702)的另一端固定有导电顶针(701),所述导电顶针(701)的自由端与已极化待测铁电单晶(6)一侧电极面电连接;所述已极化待测铁电单晶(6)的另一侧电极面通过固体导电银胶固定在导电底座(703)的上表面;The test fixture (7) comprises a conductive base (703), a conductive ejector pin (701) and an insulating support (702), wherein one end of the insulating support (702) is fixed to the side wall of the conductive base (703), the other end of the insulating support (702) is fixed to the conductive ejector pin (701), and the free end of the conductive ejector pin (701) is electrically connected to an electrode surface on one side of the polarized ferroelectric single crystal (6) to be tested; the electrode surface on the other side of the polarized ferroelectric single crystal (6) to be tested is fixed to the upper surface of the conductive base (703) via a solid conductive silver glue; 所述已极化待测铁电单晶(6)布置在气悬浮光学平台(8)上;The polarized ferroelectric single crystal to be tested (6) is arranged on an air-suspended optical platform (8); 包括以下步骤:The following steps are involved: 将已极化待测铁电单晶(6)安装在测试夹具(7)上;Mounting the polarized ferroelectric single crystal (6) to be tested on a test fixture (7); 通过外加电场单元向已极化待测铁电单晶(6)施加不同电场强度和不同频率的交流电压,使已极化待测铁电单晶(6)产生机械形变振动;Applying alternating voltages of different electric field strengths and different frequencies to the polarized ferroelectric single crystal (6) to be tested by means of an external electric field unit, so that the polarized ferroelectric single crystal (6) to be tested generates mechanical deformation vibration; 通过测量变频率、变电场强度下的机械形变,进而计算得到变频率、变电场强度下的已极化待测铁电单晶(6)压电性能参数;By measuring the mechanical deformation under variable frequency and variable electric field strength, the piezoelectric performance parameters of the polarized ferroelectric single crystal (6) to be tested under variable frequency and variable electric field strength are calculated; 步骤1,通过外加电场单元向已极化待测铁电单晶(6)施加设定频率和交流电压幅值,获取已极化待测铁电单晶(6)在该频率和交流电压幅值下的形变量;Step 1, applying a set frequency and an AC voltage amplitude to the polarized ferroelectric single crystal (6) to be tested by means of an external electric field unit, and obtaining the deformation amount of the polarized ferroelectric single crystal (6) to be tested under the frequency and the AC voltage amplitude; 步骤2,保持对已极化待测铁电单晶(6)施加的交流电压幅值不变,增大频率,获取电场强度不变,不同频率对应的已极化待测铁电单晶(6)的形变量;直到已极化待测铁电单晶(6)的形变量在频率增加而增大时为止;记录该频率为已极化待测铁电晶体(6)的转折频率;Step 2, maintaining the amplitude of the AC voltage applied to the polarized ferroelectric single crystal (6) to be tested unchanged, increasing the frequency, obtaining the deformation amount of the polarized ferroelectric single crystal (6) to be tested corresponding to different frequencies while keeping the electric field intensity unchanged; until the deformation amount of the polarized ferroelectric single crystal (6) to be tested increases with increasing frequency; recording the frequency as the turning frequency of the polarized ferroelectric single crystal (6) to be tested; 步骤3,根据得到的不同频率对应的多个形变量,计算该电场强度下,不同频率对应的已极化待测铁电单晶(6)的压电常数d33和d31Step 3, according to the obtained multiple deformation amounts corresponding to different frequencies, calculate the piezoelectric constants d 33 and d 31 of the polarized ferroelectric single crystal (6) to be tested corresponding to different frequencies under the electric field strength; 步骤4,改变施加在已极化待测铁电单晶(6)上的交流电压幅值和频率,获取已极化待测铁电单晶(6)在该频率和电压幅值下的形变量;Step 4, changing the amplitude and frequency of the AC voltage applied to the polarized ferroelectric single crystal (6) to be tested, and obtaining the deformation amount of the polarized ferroelectric single crystal (6) to be tested under the frequency and voltage amplitude; 步骤5,重复步骤2至步骤4,直到向已极化待测铁电单晶(6)施加的交流电压幅值达到外加电场单元的最大额定电压幅值为止,且向已极化待测铁电单晶(6)施加的频率小于转折频率;进而获取得到已极化待测铁电单晶(6)在变频率、变电场强度条件下的压电性能参数。Step 5, repeating steps 2 to 4 until the amplitude of the AC voltage applied to the polarized ferroelectric single crystal (6) to be tested reaches the maximum rated voltage amplitude of the external electric field unit, and the frequency applied to the polarized ferroelectric single crystal (6) to be tested is less than the turning frequency; and then obtaining the piezoelectric performance parameters of the polarized ferroelectric single crystal (6) to be tested under the conditions of variable frequency and variable electric field strength. 2.根据权利要求1所述的一种强电场下铁电晶体压电性能参数的测量方法,其特征在于,外加电场单元包括信号发生器(1),信号发生器(1)的输出端连接待测铁电单晶(6)的电极两端。2. A method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field according to claim 1, characterized in that the external electric field unit comprises a signal generator (1), and the output end of the signal generator (1) is connected to the two ends of the electrode of the ferroelectric single crystal (6) to be measured. 3.根据权利要求2所述的一种强电场下铁电晶体压电性能参数的测量方法,其特征在于,所述信号发生器(1)的输出端连接功率放大器(2)的输入端;所述功率放大器(2)的输出端连接待测铁电单晶(6)的电极两端。3. A method for measuring piezoelectric performance parameters of a ferroelectric crystal under a strong electric field according to claim 2, characterized in that the output end of the signal generator (1) is connected to the input end of a power amplifier (2); and the output end of the power amplifier (2) is connected to both ends of electrodes of the ferroelectric single crystal (6) to be measured. 4.根据权利要求3所述的一种强电场下铁电晶体压电性能参数的测量方法,其特征在于,所述功率放大器(2)还连接有示波器(4)。4. The method for measuring the piezoelectric performance parameters of a ferroelectric crystal under a strong electric field according to claim 3, characterized in that the power amplifier (2) is also connected to an oscilloscope (4).
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