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CN113156168A - Acceleration sensing verification device and method based on gas capacitance electric field effect - Google Patents

Acceleration sensing verification device and method based on gas capacitance electric field effect Download PDF

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CN113156168A
CN113156168A CN202110511971.2A CN202110511971A CN113156168A CN 113156168 A CN113156168 A CN 113156168A CN 202110511971 A CN202110511971 A CN 202110511971A CN 113156168 A CN113156168 A CN 113156168A
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gas
capacitance
acceleration
verification device
acceleration sensing
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王洪迅
赵天云
杨敏博
胡金博
于滟文
张书扬
程嗣怡
王超
王红卫
朱文龙
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Northwestern Polytechnical University
Air Force Engineering University of PLA
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Air Force Engineering University of PLA
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance

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Abstract

本发明公开了一种基于空气电容电场效应的加速度传感验证装置，包括壳体基座、封盖、密封垫圈、上气门嘴、下气门嘴、电容测量基片和结构平板电容器；壳体基座为长方体，内部为长方体空腔，长方体空腔的一个侧面敞开；密封垫圈夹在壳体基座的敞开侧面与封盖之间；壳体基座、密封垫圈和封盖用多颗铆钉固定，将长方体空腔密封，长方体空腔内填充介质气体；壳体基座内部安装电容测量基片，在电容测量基片上安装多个结构平板电容器；上气门嘴和下气门嘴分别安装在壳体基座的上下两个侧面上，用于更换壳体基座内的气体。本发明提供的装置结构紧凑设计科学合理，可应用于空气电容加速度特性的验证和测量，能够更加精确实时地验证被测测量平台的加速度。

Figure 202110511971

The invention discloses an acceleration sensing verification device based on the electric field effect of air capacitance, comprising a shell base, a cover, a sealing gasket, an upper valve, a lower valve, a capacitance measurement substrate and a structural plate capacitor; The seat is a cuboid, the interior is a cuboid cavity, and one side of the cuboid cavity is open; the sealing gasket is sandwiched between the open side of the shell base and the cover; the shell base, the sealing gasket and the cover are fixed with multiple rivets , seal the cavity of the cuboid, and the cavity of the cuboid is filled with medium gas; the capacitance measurement substrate is installed inside the shell base, and a plurality of structural plate capacitors are installed on the capacitance measurement substrate; the upper valve and the lower valve are respectively installed in the shell On the upper and lower sides of the base, it is used to replace the gas in the housing base. The device provided by the invention has a compact structure and a scientific and reasonable design, can be applied to the verification and measurement of the acceleration characteristics of the air capacitance, and can verify the acceleration of the measured measurement platform more accurately and in real time.

Figure 202110511971

Description

Acceleration sensing verification device and method based on gas capacitance electric field effect
Technical Field
The invention belongs to the technical field of measurement, and particularly relates to an acceleration sensing verification device and method.
Background
The traditional acceleration sensor is designed according to Hooke's law and Newton's second law, and the accelerometer has shown wide application prospect in various fields. According to Hooke's law, the deformation of a spring is in direct proportion to the force applied to the spring; according to Newton's second law, the acceleration of the object is in direct proportion to the acting force under the condition of certain mass; therefore, a specific structural construction can be carried out, so that a certain quantitative relation exists between the deformation and the acceleration of the spring; i.e. acceleration can be measured by spring deformation, which is the basic working principle of such accelerometers.
Such accelerometers typically consist of a proof mass (also called a proof mass), a support, a potentiometer, a spring, a damper and a housing. The proof mass is constrained to move along only one axis, which is often referred to as the input shaft or the sensitive shaft. According to Newton's law, when the instrument shell moves with the carrier in an accelerating way along the sensitive axis direction, the detection mass body diagram with certain inertia keeps the original motion state unchanged; relative movement is generated between the detection mass body and the shell, so that the spring is deformed, and the detection mass body accelerates under the action of the spring force. When the spring force is balanced with the inertia force generated by the detection mass body during the acceleration movement, the detection mass body and the shell do not move relatively any more, and the deformation of the spring reflects the magnitude of the detected acceleration. The acceleration signal is then converted to an electrical signal by the displacement sensing element for output. However, the accelerometer will oscillate due to the characteristics of the spring, and is essentially a one-degree-of-freedom oscillating system, and a damper is used to improve the dynamic quality of the system.
Most accelerometers currently use the principle and construction described above to measure and calculate the acceleration; and it is obvious that the key parts thereof are the proof mass and the spring. However, the spring has a certain damping, and the elastic coefficient of the spring changes along with the continuous wear of the spring, so that a great measurement error is generated after the accelerometer is used for a period of time, and a great hidden danger is possibly caused to the safety of the used equipment due to inaccurate measurement. In the acceleration measuring device, due to the inherent working principle of the device, the structure formed by the detection mass body, the spring and the damper inevitably has certain reaction time, so that the output of the measured value of the accelerometer is inevitably delayed, and the acceleration cannot be really monitored in real time.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides the acceleration sensing verification device which is not based on Hooke's law, further has no solid structures such as a detection mass body and a spring and is based on the gas acceleration characteristic and the capacitance electric field effect. The device constructs a cuboid closed space cavity to seal certain medium gas; a plurality of plate capacitors with the same size are constructed on two sides of the long wall of the cuboid, and gas in the cuboid cavity is used as a medium. Due to the van der Waals force action among the dielectric gas molecules, if no external force action exists, the dielectric gas is uniformly distributed, and the capacitance values of the flat capacitors are the same. When the whole device moves along the long side of the cuboid with acceleration, the medium gas molecules have mass and inevitably generate acting force in the acceleration action process; the density of air molecules in the rectangular parallelepiped enclosed space necessarily changes with the change of the acceleration. When the plate capacitor constructed on the side wall of the rectangular cavity is energized, the polarization characteristics of the dielectric gas are different inevitably, and further the capacitance values are different. Therefore, the distribution of the density of the medium gas can be obtained by measuring the capacitance distribution of the cuboid cavity along the long edge direction, and the measured value of the acceleration is obtained.
The invention comprises a shell base, a sealing cover, a sealing gasket, an upper air valve nozzle, a lower air valve nozzle and a capacitance measuring substrate. There are mainly three functional modules. The first functional module is a shell base, a sealing cover and a sealing gasket and is used for forming a closed cuboid cavity. The second functional module is an upper valve and a lower valve, and the two valves are used for ventilation of gas media in the cavity. The third functional module is two groups of capacitor substrates which are attached to two side walls of the rectangular cavity and used for forming flat capacitors which take cavity gas as a medium and have the same area and the same distance; the capacitor is output to the outside of the sealed cavity through the lead wire and insulated from the whole case. The device provided by the invention has a compact structure and scientific and reasonable design, can be applied to verification and measurement of gas capacitance acceleration characteristics, and can verify the acceleration of a measured measurement platform more accurately and accurately.
The technical scheme adopted by the invention for solving the technical problems is as follows:
an acceleration sensing verification device based on a gas capacitance electric field effect comprises a shell base, a sealing cover, a sealing gasket, an upper air valve nozzle, a lower air valve nozzle, a capacitance measurement substrate, a structural flat capacitor and an outer circuit board; the shell base is a cuboid, a cuboid cavity is formed in the shell base, and one side surface of the cuboid cavity is open; the sealing gasket is clamped between the open side surface of the shell base and the sealing cover and is used for enhancing the air tightness of the acceleration sensing verification device; the shell base, the sealing washer and the sealing cover are fixed by a plurality of rivets, so that the cuboid cavity is sealed; two opposite side surfaces in the shell base are respectively provided with a capacitance measuring substrate, and the two capacitance measuring substrates have the same size; the number of the structural flat capacitors is N, two pole plates of each structural flat capacitor are respectively arranged on two capacitance measuring substrates, and the N structural flat capacitors are uniformly distributed on the capacitance measuring substrates; the middle relative position of the upper side surface and the lower side surface of the shell base is provided with a hole, and the upper inflating valve and the lower inflating valve are respectively arranged on the holes formed in the middle relative position of the upper side surface and the lower side surface of the shell base and used for replacing medium gas in the shell base.
Preferably, four base fixing lugs respectively positioned at four corners of the housing base are arranged on the bottom surface of the exterior of the housing base opposite to the open side surface, and are used for fixing the acceleration sensing and verifying device on the mobile platform.
Preferably, the upper valve and the lower valve contain valve cores, the valve cores can be opened automatically when the cuboid cavity is filled with medium gas, so that the medium gas enters the inner space, and the valve cores can be closed automatically and seal the medium gas after the filling is finished.
Preferably, the medium gas in the cuboid cavity can be replaced, and technical verification of the acceleration sensing verification device is performed on different medium gases.
Preferably, 2N small holes are formed in the shell base and on the bottom surface, and are used for connecting pins of N structural flat capacitors and connecting electric signals; measuring capacitance values at different positions in the device, and further completing verification measurement of the acceleration of the mobile platform; the 2N pins are respectively welded in the 2N small holes to seal the small holes.
Preferably, N-5.
A method for measuring acceleration of an acceleration sensing verification device based on a gas capacitance electric field effect comprises the following steps:
step 1: for bare gas located at the earth's surface, the gas is assumed to be located at a three-dimensional right angleIn the coordinate system xyz, the number of gas molecules dN per unit volume elementx,y,zComprises the following steps:
Figure BDA0003060739990000031
wherein n is0Representing the density of gas molecules in a unit volume element, m representing the equivalent mass of a single gas molecule, k representing the boltzmann constant, T being the temperature of the gas, epsilonkDenotes the average molecular kinetic energy,. epsilonpRepresents the potential energy of a single molecule, vx、vy、vzRespectively representing the velocity components of the gas molecules along the x, y and z directions;
due to the fact that
Figure BDA0003060739990000032
Therefore, it is not only easy to use
Figure BDA0003060739990000033
The density n of the number of gas molecules located in the open space is:
Figure BDA0003060739990000034
wherein V1Is a unit volume element; if a is the acceleration of the gas moving along the x direction, x is the distance in the acceleration direction, and m represents the equivalent mass of a single gas molecule, the molecular potential energy distribution of the gas molecule along the x direction is:
εp＝max (5)
then n is in functional relation with the displacement x in the direction of the acceleration a, and x is different from n, and the expression is:
Figure BDA0003060739990000041
step 2: assuming that the acceleration sensing and verifying device continuously performs acceleration motion towards the x direction by the acceleration a, the total number of gas molecules in the cuboid cavity is defined as N, and the maximum molecular number density of the gas is defined as N'0Establishing a coordinate system by taking the gravity center of any one capacitance measuring substrate as an original point, the length direction of the capacitance measuring substrate as an x axis, the width direction y axis of the capacitance measuring substrate and the direction vertical to the capacitance measuring substrate as a z axis; then for the cuboid cavity there are:
Figure BDA0003060739990000042
obviously n'0And n0Unequal, i.e. the density of the number of molecules in the rectangular parallelepiped cavity at each moment is n0' all are constantly changing; simplifying formula (7) to obtain:
Figure BDA0003060739990000043
wherein l is the length of the capacitance measurement substrate, and V is the internal volume of the rectangular parallelepiped cavity, so that the maximum molecular number density n 'of the gas in the rectangular parallelepiped cavity'0Is composed of
Figure BDA0003060739990000044
Further, the density distribution n (x) of the number of molecules in the cavity of the cuboid is obtained as follows:
Figure BDA0003060739990000045
and step 3: the dielectric coefficient in the medium gas is in positive correlation with the distribution density of medium molecules, namely the electric conduction capability of the air is different corresponding to the positions with different medium gas densities;
assuming the dielectric constant of the dielectric gas:
ε0＝bn(x) (11)
wherein b is a constant to be measured; then
Figure BDA0003060739990000046
Wherein d is the distance between two polar plates of the structural flat capacitor; then
Figure BDA0003060739990000047
The dielectric constant and position coordinate relation epsilon (x) of any point in the cuboid cavity is obtained through calculation:
Figure BDA0003060739990000051
if P is the polarization of the dielectric gas, χeThe polarizability of the dielectric gas is shown, and E is the total electric field intensity after the dielectric polarization; under the action of polarized charges and electric fields, the following are provided:
P＝ε0χeE (15)
in the medium gas, the electric field intensity E, the electric displacement vector D and the polarizability chi of the medium gaseThe relationship between them is:
D＝ε0E+P＝ε0(1+χe)E (16)
ε＝ε0(1+χe)＝ε0εr (17)
D＝εE (18)
according to a medium electrostatic field equation, obtaining a parallel metal plate capacitor C with the area S and the distance d as follows:
Figure BDA0003060739990000052
this cuboid cavity inside width w is fixed, and its electric capacity infinitesimal dC is:
Figure BDA0003060739990000053
and integrating the specified space dC (x) to obtain the integral capacitance of the specified space dC (x), wherein the integral capacitance C of the rectangular cavity is as follows:
Figure BDA0003060739990000054
and 4, step 4: the capacitance values of 5 structural plate capacitors in the acceleration sensing verification device are deduced:
step 4-1: for front
Figure BDA0003060739990000055
In part, the molecular density of the gas is expressed as
Figure BDA0003060739990000056
The capacitor element of the part is
Figure BDA0003060739990000057
I.e. in the corresponding coordinate system
Figure BDA0003060739990000058
To
Figure BDA0003060739990000059
Part of (2), its overall capacitance expression C in the x-direction1Comprises the following steps:
Figure BDA00030607399900000510
then there is
Figure BDA00030607399900000511
Step 4-2: for the
Figure BDA0003060739990000061
And part, the gas molecular density expression of which is:
Figure BDA0003060739990000062
i.e. in the corresponding coordinate system
Figure BDA0003060739990000063
To
Figure BDA0003060739990000064
The capacitor element of the part is as follows:
Figure BDA0003060739990000065
its overall capacitance expression C along the x direction2Comprises the following steps:
Figure BDA0003060739990000066
then there are:
Figure BDA0003060739990000067
step 4-3: for the
Figure BDA0003060739990000068
And part, the gas molecular density expression of which is:
Figure BDA0003060739990000069
i.e. in the corresponding coordinate system
Figure BDA00030607399900000610
To
Figure BDA00030607399900000611
The capacitor element of the part is as follows:
Figure BDA00030607399900000612
its overall capacitance expression C along the x direction3Comprises the following steps:
Figure BDA00030607399900000613
then there is
Figure BDA00030607399900000614
Step 4-4: to pair
Figure BDA00030607399900000615
And part, the gas molecular density expression of which is:
Figure BDA00030607399900000616
i.e. in the corresponding coordinate system
Figure BDA00030607399900000617
To
Figure BDA00030607399900000618
The capacitor element of the part is as follows:
Figure BDA00030607399900000619
its overall capacitance expression C along the x direction4Comprises the following steps:
Figure BDA0003060739990000071
then there are:
Figure BDA0003060739990000072
and 4-5: for the
Figure BDA0003060739990000073
Parts, i.e. tails
Figure BDA0003060739990000074
And part, the gas molecular density expression of which is:
Figure BDA0003060739990000075
i.e. in the corresponding coordinate system
Figure BDA0003060739990000076
To
Figure BDA0003060739990000077
The capacitor element of the part is as follows:
Figure BDA0003060739990000078
its overall capacitance expression C along the x direction5Comprises the following steps:
Figure BDA0003060739990000079
then there are:
Figure BDA00030607399900000710
and 4-7: by the formula:
Figure BDA00030607399900000711
calculating the b value of each structural flat capacitor;
and 4-7: and (4) conclusion: the capacitance of the capacitor in the acceleration sensing verification device is only related to the magnitude of the acceleration a, the rest of the capacitance is a constant coefficient, and the capacitance and the a form a single-value function relation, namely, the capacitance value at any position is measured, and the acceleration a of the acceleration sensing verification device can be obtained in real time.
A method for verifying an acceleration sensing verification device based on a gas capacitance electric field effect comprises the following steps:
step 1: the inner space of the shell base of the acceleration sensing verification device can be filled with filled medium gas and replaced by gas types through a valve, and different gas media can be filled in the acceleration sensing verification device when the acceleration sensing verification device is used; in addition, the device can be periodically inflated and ventilated during use, so that the verification and measurement accuracy of the device is ensured;
step 2: fixing an acceleration sensing verification device filled with test gas on a moving platform, so that the measured capacitance of the acceleration sensing verification device is distributed along the acceleration direction; connecting a test cable to enable the acceleration sensing verification device to work;
and step 3: under the condition that the mobile platform has no acceleration, the capacitors in the acceleration sensing verification device are tested for multiple times through the multi-capacitor test platform, and test results are recorded;
and 4, step 4: setting an acceleration value through the mobile platform, ensuring the acceleration value to be constant, respectively testing the capacitors in the acceleration sensing verification device for multiple times through the multi-capacitor test platform, and recording test results;
and 5: setting a new acceleration value through the mobile platform, ensuring the acceleration value to be constant, respectively testing the capacitors in the acceleration sensing verification device for multiple times through the multi-capacitor test platform, and recording test results;
step 6: repeating the step 5 until the set repetition times is reached;
and 7: if the medium gas is replaced, repeating the steps 1 to 6;
and 8: and analyzing the test result, and verifying the relation between the acceleration of the mobile platform and the parameters of the acceleration sensing verification device.
The invention has the following beneficial effects:
1. the device provided by the invention has no spring and no solid sensitive mass body, and a series of structural structures such as corresponding supports, dampers and the like are cancelled, so that the structure is simpler.
2. The device provided by the invention has the advantages of no spring, no solid sensitive mass, no support, no damper and the like, shorter reaction time and faster acceleration test;
3. the invention is provided with the sealing structure and the two air valves, can fill different gas media into the inner space of the valve, and can realize the measurement and verification of different gases.
4. The invention is provided with the sealing structure and the two inflating valves, and can fill different pressures in specific gas media, so that the measurement and verification under different air pressure conditions can be realized.
5. The device has no structure such as a spring, a mass body, a support and the like, so that the acceleration measuring range can be larger, and the device is not only suitable for a small acceleration moving platform, but also suitable for a large acceleration moving platform.
6. The device is provided with a plurality of groups of capacitors, can describe the distribution condition of internal gas molecules under specific acceleration, and tests and verifies the technical scheme.
Drawings
Fig. 1 is a schematic view of the overall appearance structure of the device of the present invention.
FIG. 2 is a schematic diagram showing the construction of each component structure of the apparatus of the present invention.
Fig. 3 is a view of the various sides of the device of the present invention.
Fig. 4 is a schematic structural view and various side views of a housing base in the device of the present invention.
Fig. 5 is a schematic structural view and various side views of a closure in the device of the present invention.
FIG. 6 is a schematic view of a capacitance measurement substrate constructed in accordance with the apparatus of the present invention using a selected coordinate system for the capacitance measurement substrate.
Fig. 7 is a schematic structural diagram of an embodiment of the present invention.
Wherein: 1-a housing base; 2, an upper valve mouth; 3-lower valve; 4-a capacitance measuring substrate; 5-a capacitance measuring substrate; 6-a sealing gasket; 7, sealing the cover; 8, riveting; 9-a structured plate capacitor; 10-acceleration sensing verification device; 11-a mobile platform; 12-multi-capacitor test platform; 13-test cable.
a-the lower surface of the housing base; b-the upper surface of the housing base; c-the back side of the housing base; d-the front side of the housing base; e-the right side of the housing base; f-left side of the housing base.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
The invention provides an acceleration sensing verification device based on a gas capacitance electric field effect. The device is exquisite and compact, is suitable for various mobile platforms needing acceleration measurement, can be firmly fixed on various mobile platforms, and ensures that the acceleration of each mobile platform can be more accurately verified and measured in real time in the moving process.
An acceleration sensing verification device based on a gas capacitance electric field effect comprises a shell base 1, a sealing cover 7, a sealing gasket 6, an upper air valve mouth 2, a lower air valve mouth 3, a capacitance measurement substrate 4, a structural flat capacitor 9 and an external circuit board; the shell base 1 is a cuboid, a cuboid cavity is formed inside the shell base 1, and one side surface of the cuboid cavity is open; the sealing gasket 6 is clamped between the open side surface of the shell base 1 and the sealing cover 7, and can completely seal a gap possibly existing between the shell base 1 and the sealing cover 7, so that the air tightness of the device is ensured; the shell base 1, the sealing washer 6 and the sealing cover 7 are fixed by a plurality of rivets 8, a cuboid cavity is sealed, and medium gas is filled in the cuboid cavity; the shape and size of the sealing cover 7 are completely the same as the shape and size of the a-surface of the shell base 1, the hole diameter of a rivet reserved on the sealing cover 7 is slightly larger than the diameter of the rivet 8 so as to ensure that the rivet can be matched with the rivet 8, and the position of a rivet hole reserved on the sealing cover 7 is the same as that of the rivet hole reserved on the shell base 1; two opposite side surfaces in the shell base 1 are respectively provided with a capacitance measuring substrate 4, and the two capacitance measuring substrates 4 have the same size; the number of the structural flat capacitors 9 is N, two pole plates of each structural flat capacitor 9 are respectively arranged on the two capacitance measuring substrates 4, and the N structural flat capacitors 9 are uniformly distributed on the capacitance measuring substrates 4; the middle relative position of the upper side surface and the lower side surface of the shell base 1 is provided with a hole, the upper inflating valve 2 and the lower inflating valve 3 are respectively arranged on the holes formed in the middle relative position of the upper side surface and the lower side surface of the shell base 1, and the diameters of the upper inflating valve 2 and the lower inflating valve 3 are the same as the diameter of the reserved mounting hole of the shell base 1 and are used for replacing the medium gas in the shell base 1.
Preferably, four base fixing lugs respectively positioned at four corners of the housing base 1 are arranged on the bottom surface of the exterior of the housing base 1 opposite to the open side surface, and are used for fixing the acceleration sensing and verifying device on the mobile platform.
Preferably, the upper valve 2 and the lower valve 3 contain valve cores inside, the valve cores can be opened automatically when the cuboid cavity is filled with medium gas so that the medium gas enters the inner space, and the valve cores can be closed automatically and seal the medium gas after the filling is finished.
Preferably, the medium gas in the cuboid cavity can be replaced, and technical verification of the acceleration sensing verification device is performed on different medium gases.
Preferably, 2N small holes are formed in the housing base 1 and on the bottom surface, and are used for connecting pins of N structural flat capacitors 9 for connecting electrical signals; measuring capacitance values at different positions in the device, and further completing verification measurement of the acceleration of the mobile platform; the 2N pins are respectively welded in the 2N small holes to seal the small holes.
Preferably, two opposite side surfaces inside the housing base 1 are respectively provided with four groove tenons, and the capacitance measuring substrate 4 is clamped between the four groove tenons and is installed on the housing base 1.
Preferably, as shown in fig. 5, there are 20 rivets 8 for fixing the housing base 1, the sealing gasket 6 and the cover 7.
Preferably, N-5.
A method for verifying an acceleration sensing verification device based on a gas capacitance electric field effect comprises the following steps:
step 1: the inner space of the shell base of the acceleration sensing verification device can be filled with filled medium gas and replaced by gas types through a valve, and different gas media can be filled in the acceleration sensing verification device when the acceleration sensing verification device is used; in addition, the device can be periodically inflated and ventilated during use, so that the verification and measurement accuracy of the device is ensured;
step 2: fixing an acceleration sensing verification device filled with test gas on a moving platform, so that the measured capacitance of the acceleration sensing verification device is distributed along the acceleration direction; connecting a test cable to enable the acceleration sensing verification device to work;
and step 3: under the condition that the mobile platform has no acceleration, the capacitors in the acceleration sensing verification device are tested for multiple times through the multi-capacitor test platform, and test results are recorded;
and 4, step 4: setting an acceleration value through the mobile platform, ensuring the acceleration value to be constant, respectively testing the capacitors in the acceleration sensing verification device for multiple times through the multi-capacitor test platform, and recording test results;
and 5: setting a new acceleration value through the mobile platform, ensuring the acceleration value to be constant, respectively testing the capacitors in the acceleration sensing verification device for multiple times through the multi-capacitor test platform, and recording test results;
step 6: repeating the step 5 until the set repetition times is reached;
and 7: if the medium gas is replaced, repeating the steps 1 to 6;
and 8: and analyzing the test result, and verifying the relation between the acceleration of the mobile platform and the parameters of the acceleration sensing verification device.
The specific embodiment is as follows:
as shown in fig. 1 to 6, an acceleration sensing verification device based on a gas capacitance electric field effect includes a housing base 1 and a cover 7 that can be tightly attached to an opening surface of a housing, a sealing gasket 6 for enhancing the air tightness of the device is installed between the housing base 1 and the cover 7, the housing base 1 and the cover 7 are tightly sealed by 20 rivets 8, an upper air valve 2 and a lower air valve 3 for replacing the air filled in the acceleration sensing verification device are respectively installed at the same position on the upper side and the lower side of the housing base 1, a pair of capacitance measurement substrates 4 and 5 are installed inside the housing base 1 on the opposite left and right sides, and five flat capacitors 9 with tightly attached structures are respectively distributed on the surfaces of the capacitance measurement substrates 4 and 5 according to a central line.
In this embodiment, the sealing gasket 6 and the sealing cover 7 mainly cover and encapsulate the upper surface of the base casing base to keep the number of gas molecules in the device constant, so as to ensure the function of the device, and the rivet 8 mainly connects the sealing sheet 7 with the base casing base 1 to ensure the integrity of the connection of the device and the perfect air tightness of the device.
In this embodiment, five flat square plate capacitors 9 are respectively distributed on the capacitance measurement substrate 4 and the capacitance measurement substrate 5 along the central line, and are used for measuring capacitances at different positions in the measurement device, and the measurement data can be led out to an external circuit through pins for real-time processing and calculation, and meanwhile, the data measured at different positions can be combined, calculated and verified to ensure that the obtained acceleration is more precise.
The upper inflating valve 2 and the lower inflating valve 3 internally comprise valve cores, the valve cores can be automatically opened by the inflating valves during inflation so that gas can enter an internal closed space, and the valve cores can be automatically closed and hermetically store the internal gas after inflation is finished so as to be isolated from the outside to ensure the gas tightness of the device. The internal space of the shell base 1 is inflated and replaced by medium gas through the inflating valve, different gas media can be filled according to actual requirements when the device is used, and in addition, the device can be inflated and ventilated regularly in the using process, so that the verification and measurement accuracy of the device can be ensured.
In this embodiment, the inner space of the housing base can be filled with the filled medium gas through the valve and replaced with the gas type, different gas media can be filled according to actual requirements during use, and in addition, the device can be inflated and ventilated regularly during use, so that the verification and measurement accuracy of the device can be ensured.
One use of this embodiment is shown in fig. 7, which contains 4 components. Wherein the component 10 is an abstract representation of the inventive arrangement, which is abstracted to 5 capacitors. The component 11 is a mobile platform; the member 10 is attached to the member 11 in the same manner as the member 11 moves, so that the acceleration of the member 11 can be sensed. The component 12 is a multi-capacitor test platform that can measure the capacitance values of 5 capacitors in the component 10. The component 13 is a connection cable for completing the connection of signals between the component 10 and the component 12.
The method for verifying the acceleration sensing verification device of the embodiment is as follows:
1. the acceleration sensing verification device is filled with test gas through the upper inflating valve 2 and the lower inflating valve 3, different gases have different dielectric constants and different molecular weights, and therefore the performance characteristics are different; any one of the upper inflating valve 2 and the lower inflating valve 3 can be used as an air inlet, and the other one is an air outlet; in the process of inflating the air inlet, the air outlet is opened for a period of time, so that the container discharges interference gas and is filled with corresponding test gas; and then the air valve of the air outlet is stopped, and the accelerometer of the invention is continuously inflated until the accelerometer is inflated to a set value.
2. Fixing the device 10 of the present invention filled with the test gas on the mobile platform 11, and ensuring that 5 capacitors of the device 10 are distributed along the acceleration direction; the test cable 13 is connected well, and the multi-capacitor test platform 12 can work normally.
3. In the absence of acceleration, the capacitance in the device 10 is tested multiple times by the multi-capacitance test platform 12, and the test results are recorded.
4. A specific acceleration value is set through the mobile platform 11 and is guaranteed to be stable, the capacitors in the device 10 are tested for multiple times through the multi-capacitor testing platform 12, and the testing results are recorded.
5. A new acceleration value is set by the mobile platform 11 and is guaranteed to be stable, the capacitors in the device 10 are tested for multiple times by the multi-capacitor testing platform 12, and the test results are recorded.
6. And (5) repeating the step (5) as required, and if the test gas needs to be replaced, repeating the step (1) to the step (5).
7. The above test record data is analyzed to verify the relationship between the acceleration a of the mobile platform and other factors of the device 10 in this embodiment.

Claims (8)

1.一种基于气体电容电场效应的加速度传感验证装置，其特征在于，包括壳体基座、封盖、密封垫圈、上气门嘴、下气门嘴、电容测量基片、结构平板电容器和外电路板；所述壳体基座为长方体，壳体基座内部为长方体空腔，长方体空腔的一个侧面敞开；所述密封垫圈夹在壳体基座的敞开侧面与封盖之间，用于增强加速度传感验证装置的气密性；所述壳体基座、密封垫圈和封盖用多颗铆钉固定，从而将长方体空腔密封；所述壳体基座内部两个相对侧面上分别安装一片电容测量基片，两片电容测量基片大小相同；所述结构平板电容器有N个，每个结构平板电容器的两个极板分别安装在两片电容测量基片上，N个结构平板电容器在电容测量基片上均匀分布；所述壳体基座的上下两个侧面中间相对位置开孔，所述上气门嘴和下气门嘴分别安装在壳体基座的上下两个侧面中间相对位置所开的孔上，用于更换壳体基座内的介质气体。1. an acceleration sensing verification device based on gas capacitance electric field effect, is characterized in that, comprises shell base, cover, sealing gasket, upper valve, lower valve, capacitance measurement substrate, structural plate capacitor and external circuit board; the shell base is a cuboid, the interior of the shell base is a cuboid cavity, and one side of the cuboid cavity is open; the sealing gasket is sandwiched between the open side of the shell base and the cover, with It is used to enhance the air tightness of the acceleration sensing verification device; the housing base, the sealing gasket and the cover are fixed with a plurality of rivets, so as to seal the cavity of the cuboid; the two opposite sides inside the housing base are respectively A capacitance measurement substrate is installed, and the two capacitance measurement substrates are of the same size; there are N structural plate capacitors, and the two plates of each structural plate capacitor are respectively installed on the two capacitance measurement substrates, and the N structural plate capacitors are installed on the two capacitance measurement substrates respectively. Evenly distributed on the capacitance measurement substrate; holes are opened in the middle of the upper and lower sides of the housing base, and the upper valve and the lower valve are respectively installed at the relative positions of the upper and lower sides of the housing base. On the open hole, it is used to replace the medium gas in the housing base. 2.根据权利要求1所述的一种基于气体电容电场效应的加速度传感验证装置，其特征在于，所述壳体基座外部与敞开侧面相对的底面上有四个分别位于壳体基座四角的底座固定耳，用于将加速度传感验证装置固定在移动平台上。2 . The acceleration sensing verification device based on the electric field effect of gas capacitance according to claim 1 , wherein, on the bottom surface opposite to the open side outside the casing base, there are four respectively located on the casing base. 3 . The four-corner base fixing ears are used to fix the acceleration sensor verification device on the mobile platform. 3.根据权利要求1所述的一种基于气体电容电场效应的加速度传感验证装置，其特征在于，所述上气门嘴和下气门嘴内部含有气门芯，在对长方体空腔填充介质气体时能够自动打开气门芯以使介质气体进入内部空间，充气完毕后气门芯能够自动关闭并密封介质气体。3. A kind of acceleration sensing verification device based on gas capacitance electric field effect according to claim 1, is characterized in that, described upper valve and lower valve contain valve core inside, when filling medium gas to the cuboid cavity The valve core can be automatically opened to allow the medium gas to enter the inner space, and the valve core can automatically close and seal the medium gas after the inflation is completed. 4.根据权利要求1所述的一种基于气体电容电场效应的加速度传感验证装置，其特征在于，所述长方体空腔内的介质气体能够更换，对于不同介质气体进行加速度传感验证装置的技术验证。4 . The acceleration sensing verification device based on the electric field effect of gas capacitance according to claim 1 , wherein the medium gas in the cuboid cavity can be replaced, and the acceleration sensing verification device is performed for different medium gases. 5 . Technical verification. 5.根据权利要求1所述的一种基于气体电容电场效应的加速度传感验证装置，其特征在于，所述壳体基座内与底面上开有2N个小孔，用于N个结构平板电容器的引脚接出，用于连接电信号；对装置内部不同位置的电容值进行测量，进而完成对移动平台加速度的验证测量；所述2N个引脚分别焊接在2N个小孔中，将小孔密封。5. A kind of acceleration sensing verification device based on gas capacitance electric field effect according to claim 1, is characterized in that, described shell base and bottom surface are provided with 2N small holes, which are used for N structural plates The pins of the capacitor are connected to connect electrical signals; the capacitance values at different positions inside the device are measured, and then the verification measurement of the acceleration of the mobile platform is completed; the 2N pins are respectively welded in the 2N small holes, and the Small holes are sealed. 6.根据权利要求5所述的一种基于气体电容电场效应的加速度传感验证装置，其特征在于，所述N＝5。6 . The acceleration sensing verification device based on the gas capacitance electric field effect according to claim 5 , wherein the N=5. 7 . 7.一种基于气体电容电场效应的加速度传感验证装置测量加速度的方法，包括以下步骤：7. A method for measuring acceleration based on an acceleration sensing verification device based on gas capacitance electric field effect, comprising the following steps: 步骤1：对于位于地球表面的裸露气体，假设气体位于三维直角坐标系xyz中，则单位体积元内的气体分子数dNx，y，z为：Step 1: For the bare gas located on the surface of the earth, assuming that the gas is located in the three-dimensional Cartesian coordinate system xyz, the number of gas molecules dN x, y, z in a unit volume element is:
Figure FDA0003060739980000021
Figure FDA0003060739980000021
 其中，n0表示单位体积元中的气体分子密度，m表示单个气体分子的等效质量，k表示玻耳兹曼常量，T为气体的温度，εk表示平均分子动能，εp表示单个分子的势能，vx、vy、vz分别表示气体分子沿x、y、z方向的速度分量；where n 0 is the density of gas molecules per unit volume element, m is the equivalent mass of a single gas molecule, k is the Boltzmann constant, T is the temperature of the gas, ε k is the average molecular kinetic energy, and ε p is the single molecule The potential energy of , v x , v y , v z represent the velocity components of gas molecules along the x, y, and z directions, respectively; 由于because
Figure FDA0003060739980000022
Figure FDA0003060739980000022
 所以so
Figure FDA0003060739980000023
Figure FDA0003060739980000023
 则位于开放空间的气体分子数的密度n为：Then the density n of the number of gas molecules in the open space is:
Figure FDA0003060739980000024
Figure FDA0003060739980000024
 其中V1为单位体积元；若a为气体沿x方向运动时的加速度，x为加速度方向上的距离，m表示单个气体分子的等效质量，则气体分子沿x方向的分子势能分布为：where V 1 is the unit volume element; if a is the acceleration of the gas moving along the x direction, x is the distance in the acceleration direction, and m is the equivalent mass of a single gas molecule, then the molecular potential energy distribution of the gas molecule along the x direction is: εp＝max (5)ε p = max (5) 则n与加速度a方向的位移x就存在函数关系，x不同n也不同，其表达式为：Then there is a functional relationship between n and the displacement x in the direction of acceleration a, and n is also different when x is different. Its expression is:
Figure FDA0003060739980000025
Figure FDA0003060739980000025
 步骤2：假设加速度传感验证装置以加速度a持续向x方向做加速运动，定义长方体空腔内的气体分子总数为N，气体的最大分子数密度为n′0，以任一片电容测量基片的重心为原点，电容测量基片的长度方向为x轴，电容测量基片的宽度方向y轴，垂直与电容测量基片的方向为z轴，建立坐标系；则对于该长方体空腔，有：Step 2: Assuming that the acceleration sensing verification device continues to accelerate in the x direction with the acceleration a, define the total number of gas molecules in the cuboid cavity as N, and the maximum molecular number density of the gas as n′ 0 , measure the substrate with any capacitance The center of gravity is the origin, the length direction of the capacitance measurement substrate is the x-axis, the width direction of the capacitance measurement substrate is the y-axis, and the direction perpendicular to the capacitance measurement substrate is the z-axis, and a coordinate system is established; then for the cuboid cavity, there are :
Figure FDA0003060739980000026
Figure FDA0003060739980000026
 显然n′0与n0不相等，即每时每刻长方体空腔的分子数密度为n0′都在不断发生变化；化简式(7)，得：Obviously n' 0 is not equal to n 0 , that is, the molecular number density of the cuboid cavity is n 0 ' is constantly changing at every moment; simplifying formula (7), we get:
Figure FDA0003060739980000027
Figure FDA0003060739980000027
 其中，l为电容测量基片的长度，V为长方体空腔内部体积，故长方体空腔内气体的最大分子数密度n′0为Among them, l is the length of the capacitance measurement substrate, V is the internal volume of the cuboid cavity, so the maximum molecular number density n′ 0 of the gas in the cuboid cavity is
Figure FDA0003060739980000031
Figure FDA0003060739980000031
 进而求得长方体空腔内分子数密度分布n(x)为：Then, the molecular number density distribution n(x) in the cuboid cavity can be obtained as:
Figure FDA0003060739980000032
Figure FDA0003060739980000032
 步骤3：由于介质气体中的介电系数与介质分子的分布密度呈正相关，即对应介质气体密度不同的位置，空气的导电能力也不相同；Step 3: Since the dielectric coefficient in the medium gas is positively correlated with the distribution density of the medium molecules, that is, the electrical conductivity of the air is also different for the positions corresponding to the different density of the medium gas; 假定介质气体的介电常数：Assuming the dielectric constant of the medium gas: ε0＝bn(x) (11)ε 0 =bn(x) (11) 其中b为一待测常数；则where b is a constant to be measured; then
Figure FDA0003060739980000033
Figure FDA0003060739980000033
 其中，d为结构平板电容器两个极板之间的距离；则Among them, d is the distance between the two plates of the structural plate capacitor; then
Figure FDA0003060739980000034
Figure FDA0003060739980000034
 由此计算得到长方体空腔内任意一点介电常数与位置坐标的关系式ε(x)为：From this calculation, the relationship between the dielectric constant of any point in the cuboid cavity and the position coordinate ε(x) is:
Figure FDA0003060739980000035
Figure FDA0003060739980000035
 若P为介质气体的极化强度，χe为介质气体的极化率，E为介质极化后的总电场强度；在极化电荷和电场作用下，有：If P is the polarization strength of the dielectric gas, χ e is the polarization rate of the dielectric gas, and E is the total electric field strength after the dielectric polarization; under the action of the polarization charge and the electric field, there are: P＝ε0χeE (15)P=ε 0 χ e E (15) 在介质气体中，电场强度E、电位移矢量D和介质气体的极化率χe之间的关系为：In the dielectric gas, the relationship between the electric field strength E, the electric displacement vector D and the polarizability χ e of the dielectric gas is: D＝ε0E+P＝ε0(1+χe)E (16)D=ε 0 E+P=ε 0 (1+χ e )E (16) ε＝ε0(1+χe)＝ε0εr (17)ε=ε 0 (1+χ e )=ε 0 ε r (17) D＝εE (18)D=εE (18) 依据介质静电场方程，得到面积为S，距离为d的平行金属板电容C为：According to the dielectric electrostatic field equation, the capacitance C of the parallel metal plate with area S and distance d is obtained as:
Figure FDA0003060739980000036
Figure FDA0003060739980000036
 本长方体腔体内部宽度w是固定的，其电容微元dC为：The internal width w of the cuboid cavity is fixed, and its capacitance element dC is:
Figure FDA0003060739980000037
Figure FDA0003060739980000037
 对特定空间dC(x)进行积分，则得到其整体电容，如长方体空腔整体电容C为：Integrate the specific space dC(x) to get its overall capacitance. For example, the overall capacitance C of the cuboid cavity is:
Figure FDA0003060739980000041
Figure FDA0003060739980000041
 步骤4：对加速度传感验证装置中5个结构平板电容器的电容值进行推导：Step 4: Derive the capacitance values of the five structural plate capacitors in the acceleration sensing verification device: 步骤4-1：对于前
Figure FDA0003060739980000042
部分，气体分子密度表达式为Step 4-1: For ex
Figure FDA0003060739980000042
part, the gas molecular density is expressed as
Figure FDA0003060739980000043
Figure FDA0003060739980000043
 该部分的电容微元为The capacitance element of this part is
Figure FDA0003060739980000044
Figure FDA0003060739980000044
 即对应坐标系中
Figure FDA0003060739980000045
至
Figure FDA0003060739980000046
的部分，其沿x方向的整体电容表达式C1为：That is, in the corresponding coordinate system
Figure FDA0003060739980000045
to
Figure FDA0003060739980000046
The part of , its overall capacitance along the x-direction expression C1 is:
Figure FDA0003060739980000047
Figure FDA0003060739980000047
 则有then there are
Figure FDA0003060739980000048
Figure FDA0003060739980000048
 步骤4-2：对于
Figure FDA0003060739980000049
部分，其气体分子密度表达式为：Step 4-2: For
Figure FDA0003060739980000049
part, its gas molecular density expression is:
Figure FDA00030607399800000410
Figure FDA00030607399800000410
 即对应坐标系中
Figure FDA00030607399800000411
至
Figure FDA00030607399800000412
的部分，该部分的电容微元为：That is, in the corresponding coordinate system
Figure FDA00030607399800000411
to
Figure FDA00030607399800000412
part, the capacitance element of this part is:
Figure FDA00030607399800000413
Figure FDA00030607399800000413
 其沿x方向的整体电容表达式C2为：Its overall capacitance expression C2 along the x - direction is:
Figure FDA00030607399800000414
Figure FDA00030607399800000414
 则有：Then there are:
Figure FDA00030607399800000415
Figure FDA00030607399800000415
 步骤4-3：对于
Figure FDA00030607399800000416
部分，其气体分子密度表达式为：Step 4-3: For
Figure FDA00030607399800000416
part, its gas molecular density expression is:
Figure FDA00030607399800000417
Figure FDA00030607399800000417
 即对应坐标系中
Figure FDA0003060739980000051
至
Figure FDA0003060739980000052
的部分，该部分的电容微元为：That is, in the corresponding coordinate system
Figure FDA0003060739980000051
to
Figure FDA0003060739980000052
part, the capacitance element of this part is:
Figure FDA0003060739980000053
Figure FDA0003060739980000053
 其沿x方向的整体电容表达式C3为：Its overall capacitance expression C3 along the x - direction is:
Figure FDA0003060739980000054
Figure FDA0003060739980000054
 则有then there are
Figure FDA0003060739980000055
Figure FDA0003060739980000055
 步骤4-4：对
Figure FDA0003060739980000056
部分，其气体分子密度表达式为：Steps 4-4: Right
Figure FDA0003060739980000056
part, its gas molecular density expression is:
Figure FDA0003060739980000057
Figure FDA0003060739980000057
 即对应坐标系中
Figure FDA0003060739980000058
至
Figure FDA0003060739980000059
的部分，该部分的电容微元为：That is, in the corresponding coordinate system
Figure FDA0003060739980000058
to
Figure FDA0003060739980000059
part, the capacitance element of this part is:
Figure FDA00030607399800000510
Figure FDA00030607399800000510
 其沿x方向的整体电容表达式C4为：Its overall capacitance expression C4 along the x-direction is:
Figure FDA00030607399800000511
Figure FDA00030607399800000511
 则有：Then there are:
Figure FDA00030607399800000512
Figure FDA00030607399800000512
 步骤4-5：对于
Figure FDA00030607399800000513
部分，即末尾
Figure FDA00030607399800000514
部分，其气体分子密度表达式为：Steps 4-5: For
Figure FDA00030607399800000513
part, the end
Figure FDA00030607399800000514
part, its gas molecular density expression is:
Figure FDA00030607399800000515
Figure FDA00030607399800000515
 即对应坐标系中
Figure FDA00030607399800000516
至
Figure FDA00030607399800000517
的部分，该部分的电容微元为：That is, in the corresponding coordinate system
Figure FDA00030607399800000516
to
Figure FDA00030607399800000517
part, the capacitance element of this part is:
Figure FDA00030607399800000518
Figure FDA00030607399800000518
 其沿x方向的整体电容表达式C5为：Its overall capacitance expression C5 along the x-direction is:
Figure FDA00030607399800000519
Figure FDA00030607399800000519
 则有：Then there are:
Figure FDA0003060739980000061
Figure FDA0003060739980000061
 步骤4-7：通过公式：Steps 4-7: Via the formula:
Figure FDA0003060739980000062
Figure FDA0003060739980000062
 对每个结构平板电容器的b值进行计算；Calculate the b value of each structural plate capacitor; 步骤4-7：结论：加速度传感验证装置内电容器的电容仅与加速度a的大小有关，其余部分均为常系数，电容与a构成单值函数关系式，即测得任意位置处的电容值，就能实时得到加速度传感验证装置的加速度a。Step 4-7: Conclusion: The capacitance of the capacitor in the acceleration sensing verification device is only related to the size of the acceleration a, and the rest are constant coefficients. The capacitance and a form a single-valued function relationship, that is, the capacitance value at any position can be measured. , the acceleration a of the acceleration sensing verification device can be obtained in real time. 8.一种验证基于气体电容电场效应的加速度传感验证装置的方法，包括以下步骤：8. A method for verifying an acceleration sensing verification device based on gas capacitance electric field effect, comprising the following steps: 步骤1：所述加速度传感验证装置的壳体基座内部空间能够通过气门嘴对所填充的介质气体进行充装与气体种类的更换操作，在使用时能够填充不同的气体介质；并且在使用过程中还能够对装置进行定期充气与换气操作，从而保证装置的验证测量精度；Step 1: The inner space of the housing base of the acceleration sensing verification device can be filled with the medium gas to be filled and the gas type can be replaced through the valve, and different gas media can be filled during use; During the process, the device can also be regularly inflated and ventilated to ensure the verification and measurement accuracy of the device; 步骤2：将充满测试气体的加速度传感验证装置固定在一个移动平台上，使加速度传感验证装置的被测电容沿着加速度方向分布；连接测试电缆使加速度传感验证装置工作；Step 2: Fix the acceleration sensing verification device filled with test gas on a mobile platform, so that the measured capacitance of the acceleration sensing verification device is distributed along the acceleration direction; connect the test cable to make the acceleration sensing verification device work; 步骤3：在移动平台无加速度的情况下，通过多电容测试平台对加速度传感验证装置中的电容分别进行多次测试，并记录测试结果；Step 3: In the case that the mobile platform has no acceleration, the capacitance in the acceleration sensing verification device is tested for multiple times through the multi-capacitance test platform, and the test results are recorded; 步骤4：通过移动平台设定一个加速度值，并保证该加速度值恒定，通过多电容测试平台对加速度传感验证装置中的电容分别进行多次测试，并记录测试结果；Step 4: Set an acceleration value through the mobile platform, and ensure that the acceleration value is constant, conduct multiple tests on the capacitance in the acceleration sensing verification device through the multi-capacitor test platform, and record the test results; 步骤5：通过移动平台设定一个新的加速度值，并保证该加速度值恒定，通过多电容测试平台对加速度传感验证装置中的电容分别进行多次测试，并记录测试结果；Step 5: Set a new acceleration value through the mobile platform, and ensure that the acceleration value is constant, conduct multiple tests on the capacitance in the acceleration sensing verification device through the multi-capacitor test platform, and record the test results; 步骤6：重复步骤5，直到达到设定重复次数；Step 6: Repeat step 5 until the set number of repetitions is reached; 步骤7：如果更换介质气体，则重复第1步～第6步；Step 7: If the medium gas is replaced, repeat steps 1 to 6; 步骤8：对于上述测试结果进行分析，验证移动平台的加速度与加速度传感验证装置参数的关系。Step 8: Analyze the above test results to verify the relationship between the acceleration of the mobile platform and the parameters of the acceleration sensing verification device.
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* Cited by examiner, † Cited by third party
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WO1998001761A2 (en) * 1996-07-08 1998-01-15 Philips Electronics N.V. Acceleration detection device
CN1668892A (en) * 2002-06-20 2005-09-14 株式会社生方制作所 Electrostatic capacity type liquid sensor
US20060065051A1 (en) * 2004-09-29 2006-03-30 Balogh W T Dielectric accelerometer
CN1831539A (en) * 2006-04-19 2006-09-13 中北大学 Mercury capacitive acceleration sensor
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