[go: up one dir, main page]

CN113138215B - Copper ion concentration monitoring method - Google Patents

Copper ion concentration monitoring method Download PDF

Info

Publication number
CN113138215B
CN113138215B CN202010054568.7A CN202010054568A CN113138215B CN 113138215 B CN113138215 B CN 113138215B CN 202010054568 A CN202010054568 A CN 202010054568A CN 113138215 B CN113138215 B CN 113138215B
Authority
CN
China
Prior art keywords
copper ion
ion concentration
solution
electrode
peak current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010054568.7A
Other languages
Chinese (zh)
Other versions
CN113138215A (en
Inventor
郑文锋
许吉昌
孙尚培
许宏玮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boardtek Electronics Corp
Original Assignee
Boardtek Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boardtek Electronics Corp filed Critical Boardtek Electronics Corp
Priority to CN202010054568.7A priority Critical patent/CN113138215B/en
Publication of CN113138215A publication Critical patent/CN113138215A/en
Application granted granted Critical
Publication of CN113138215B publication Critical patent/CN113138215B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416Systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

The monitoring method of the invention comprises the following steps: providing a solution to be tested containing copper ions; providing a monitoring device; in a specific potential interval, determining a cyclic voltammetry curve of the solution to be detected by the monitoring device, wherein the cyclic voltammetry curve has a peak current value; providing a plurality of groups of standard solutions with known concentrations of copper ions, measuring cyclic voltammograms of the plurality of groups of standard solutions in the specific potential interval by the monitoring device, wherein the cyclic voltammograms of the standard solutions with each concentration have a peak current value, and determining a linear equation by the copper ion concentration values of the plurality of groups of standard solutions and the peak current values of the corresponding cyclic voltammograms, wherein the linear equation is y=ax+b, wherein Y represents the peak current value, a represents the slope of the linear equation, X represents the copper ion concentration, and B represents the intercept of the linear equation; and determining the copper ion concentration of the solution to be detected by using the linear equation and the peak current value of the cyclic voltammetry curve of the solution to be detected.

Description

铜离子浓度监控方法Copper ion concentration monitoring method

技术领域Technical field

本发明有关一种借由循环伏安法定量测定铜离子浓度的监控方法。The present invention relates to a monitoring method for quantitatively measuring copper ion concentration by cyclic voltammetry.

背景技术Background technique

在制备液晶显示面板与印刷电路板的制程中,往往需要使用各种蚀刻溶液来进行金属材料的蚀刻。蚀刻过程中产生的金属离子会不断累积于蚀刻溶液中,当蚀刻溶液中金属离子的浓度升高到一定程度后,就会使得蚀刻溶液不堪使用,而成为蚀刻废液。In the process of preparing liquid crystal display panels and printed circuit boards, it is often necessary to use various etching solutions to etch metal materials. The metal ions generated during the etching process will continue to accumulate in the etching solution. When the concentration of metal ions in the etching solution increases to a certain level, the etching solution will become unusable and become etching waste liquid.

目前在工业中广泛使用的蚀刻液体有酸性氯化铜蚀刻液和碱性氯化铜蚀刻液两种。酸性氯化铜蚀刻液使用氯化铜作为蚀铜剂,并使用酸性氧化系统进行蚀铜剂的再生。碱性氯化铜蚀刻液使用氯化铜与氨水络合反应所生成的二价铜氨络合物Cu(NH3)4Cl2作为蚀铜剂,并与氧气、NH4+和Cl-反应,进行蚀铜剂的再生。而随着蚀刻的进行,板件上的铜会被咬蚀而形成一价铜Cu(NH3)2Cl,因一价铜不溶于水,使二价铜的浓度随着咬时而逐渐降低,导致蚀刻速度受到影响。Currently, there are two etching liquids widely used in industry: acidic copper chloride etching liquid and alkaline copper chloride etching liquid. The acidic copper chloride etching solution uses copper chloride as the copper etching agent, and uses an acidic oxidation system to regenerate the copper etching agent. Alkaline copper chloride etching solution uses the divalent copper ammonia complex Cu(NH 3 ) 4 Cl 2 generated by the complex reaction of copper chloride and ammonia water as the copper etching agent, and reacts with oxygen, NH 4+ and Cl - , to regenerate the copper etching agent. As the etching proceeds, the copper on the plate will be etched to form monovalent copper Cu(NH 3 ) 2 Cl. Since monovalent copper is insoluble in water, the concentration of divalent copper gradually decreases with the etching time. As a result, the etching speed is affected.

在本领域中,随着厂商与产业别的不同,所用的蚀刻溶液配方与可容忍的金属离子浓度都不尽相同。以国内某些薄膜电晶体液晶显示器 (thin film transistor liquidcrystal display,TFT LCD)制造业者所使用的蚀刻溶液为例,当蚀刻溶液中铜离子的浓度到达约1000ppm时,蚀刻溶液就失去了蚀刻的能力,而必须更换新的蚀刻溶液。另外,在某些印刷电路板(print circuit board,PCB)厂商所利用的铜蚀刻的蚀刻溶液中,可容忍的铜离子浓度约为130g/L。In this field, the etching solution formulas used and the tolerable metal ion concentrations vary among manufacturers and industries. Take the etching solution used by some domestic thin film transistor liquid crystal display (TFT LCD) manufacturers as an example. When the concentration of copper ions in the etching solution reaches about 1000ppm, the etching solution loses its etching ability. , and the etching solution must be replaced with a new one. In addition, in the etching solution for copper etching used by some printed circuit board (PCB) manufacturers, the tolerable copper ion concentration is about 130g/L.

一般控制碱性蚀刻液浓度的方法为测量pH、比重计和温度,但并无直观的方法去监控测量溶液中一价铜的浓度;另,现有技术中亦有利用螯合剂(例如EDTA)的化学反应来对铜离子进行螯合作用以控制溶液中的铜离子(Cu2+)浓度,但因其无法精确地定量控制铜浓度,且有污染槽液和发热等副作用,造成铜的控制成效不彰、成本增加及具有潜在的危险性。另外,现有技术CN201686754U提出一种提铜的自动控制装置,然而自动控制装置是透过比重法进行废液中铜离子浓度的量测,该方法对小体积溶液且低浓度(ppm)的铜离子的灵敏度不高,仍具有待改善的空间。The general method to control the concentration of alkaline etching solution is to measure pH, hydrometer and temperature, but there is no intuitive way to monitor and measure the concentration of monovalent copper in the solution; in addition, chelating agents (such as EDTA) are also used in the existing technology. A chemical reaction is used to chelate copper ions to control the concentration of copper ions (Cu 2+ ) in the solution. However, it cannot accurately and quantitatively control the copper concentration, and has side effects such as contamination of the bath solution and heat generation, resulting in copper control. Ineffective, costly and potentially dangerous. In addition, the existing technology CN201686754U proposes an automatic control device for copper extraction. However, the automatic control device measures the copper ion concentration in the waste liquid through a specific gravity method. This method is suitable for small volume solutions and low concentrations (ppm) of copper. The sensitivity of ions is not high and there is still room for improvement.

发明内容Contents of the invention

有鉴于此,本发明提供一种借由循环伏安法定量测定铜离子浓度的监控统,为其主要目的。In view of this, the main purpose of the present invention is to provide a monitoring system for quantitatively measuring copper ion concentration by cyclic voltammetry.

本发明所采用的技术手段如下所述。The technical means adopted in the present invention are as follows.

为达上揭目的,本发明的监控方法包括以下步骤:提供一含有铜离子的待测溶液;提供一监控装置;于一特定电位区间内,借由该监控装置测定该待测溶液的一循环伏安曲线,该循环伏安曲线具有一峰电流值;提供复数组浓度已知的铜离子标准溶液,于该特定电位区间,借由该监控装置测定该复数组标准溶液的循环伏安曲线,每一浓度的标准溶液的循环伏安曲线具有一峰电流值,以该复数组标准溶液的铜离子浓度值及其相对应的循环伏安曲线的峰电流值确定一线性方程式,该线性方程式为Y=AX+B,其中Y表示该峰电流值,A表示该线性方程式的斜率,X 表示铜离子浓度,B表示该线性方程式的截距;以该线性方程式及该待测溶液的循环伏安曲线的峰电流值,确定该待测溶液的铜离子浓度。In order to achieve the above purpose, the monitoring method of the present invention includes the following steps: providing a solution to be tested containing copper ions; providing a monitoring device; and using the monitoring device to measure a cycle of the solution to be tested within a specific potential range. A voltammogram curve, the cyclic voltammogram curve has a peak current value; a plurality of sets of copper ion standard solutions with known concentrations are provided, and in the specific potential interval, the cyclic voltammogram curves of the plurality of sets of standard solutions are measured by the monitoring device, each time The cyclic voltammogram curve of a standard solution with a concentration has a peak current value. A linear equation is determined based on the copper ion concentration values of the complex set of standard solutions and the peak current value of the corresponding cyclic voltammogram curve. The linear equation is Y= AX+B, where Y represents the peak current value, A represents the slope of the linear equation, The peak current value determines the copper ion concentration of the solution to be tested.

在一较佳态样中,该监控装置具有一容置槽,该容置槽配置有一流入口及一流出口,并有一工作电极、一辅助电极一参考电极、一安培计及一伏特计配置于该容置槽内,该伏特计连接于该工作电极与该参考电极之间,且另有相连接的供电单元以及控制单元,该供电单元与该工作电极以及该辅助电极电性连接,该安培计则连接于该辅助电极与该供电单元之间。In a preferred aspect, the monitoring device has a receiving tank, which is equipped with a first-flow inlet and a first-flow outlet, and a working electrode, an auxiliary electrode, a reference electrode, an ampere meter and a voltmeter are arranged in the In the accommodation tank, the voltmeter is connected between the working electrode and the reference electrode, and has a connected power supply unit and a control unit. The power supply unit is electrically connected to the working electrode and the auxiliary electrode, and the ampere meter is Connected between the auxiliary electrode and the power supply unit.

在一较佳态样中,该工作电极以及该辅助电极可以为铂圆环电极。In a preferred aspect, the working electrode and the auxiliary electrode may be platinum ring electrodes.

在一较佳态样中,该参考电极可以为饱和甘汞电极。In a preferred embodiment, the reference electrode may be a saturated calomel electrode.

在一较佳态样中,该特定电位区间为0.1~0.9伏特。In a preferred embodiment, the specific potential range is 0.1-0.9 volts.

在一较佳态样中,该监控装置配置于一蚀刻槽,以连续方式对该蚀刻槽内的待测溶液进行监控。In a preferred aspect, the monitoring device is configured in an etching tank to continuously monitor the solution to be measured in the etching tank.

在一更佳态样中,该线性方程式中A值为54.019,B值为-0.4159。In a more optimal version, the value of A in this linear equation is 54.019 and the value of B is -0.4159.

附图说明Description of the drawings

图1为本发明中监控装置的结构示意图。Figure 1 is a schematic structural diagram of the monitoring device in the present invention.

图2为本发明中容置槽的结构立体图。Figure 2 is a structural perspective view of the accommodation tank in the present invention.

图3为本发明中不同标准溶液相对应的峰电流值线性图。Figure 3 is a linear graph of peak current values corresponding to different standard solutions in the present invention.

图号说明:Figure number description:

监控装置 1Monitoring device 1

容置槽 10Accommodation tank 10

流入口 11Inlet 11

流出口 12Outlet 12

隔板 13Partition 13

工作电极 21Working electrode 21

辅助电极 22Auxiliary electrode 22

参考电极 23Reference electrode 23

供电单元 30Power supply unit 30

控制单元 40Control unit 40

安培计 51Amperemeter 51

伏特计 52。Voltmeter 52.

具体实施方式Detailed ways

请参阅图1所示为本发明中监控装置的结构示意图所示。本发明的监控装置1至少包含:一容置槽10、一工作电极21、一辅助电极22、一参考电极23、一供电单元30、一控制单元40、一安培计51以及一伏特计52。Please refer to Figure 1, which is a schematic structural diagram of the monitoring device in the present invention. The monitoring device 1 of the present invention at least includes: a receiving tank 10 , a working electrode 21 , an auxiliary electrode 22 , a reference electrode 23 , a power supply unit 30 , a control unit 40 , an ammeter 51 and a voltmeter 52 .

其中,该容置槽10配置有一流入口11及一流出口12,请同时参阅图2所示,该容置槽10内进一步设有至少一隔板13,该隔板13一端固定于该容置槽10内侧壁面,另端则与容置槽10内侧壁面具有间距,如图所示的实施例中,设置有三个隔板13,可将容置槽10区隔成一蜿蜒的施体流道。The accommodating tank 10 is equipped with a first-flow inlet 11 and a first-flow outlet 12. Please refer to FIG. The inner wall of the groove 10 and the other end are spaced apart from the inner wall of the accommodating groove 10. In the embodiment shown in the figure, three partitions 13 are provided to divide the accommodating groove 10 into a meandering donor flow channel. .

该工作电极21、该辅助电极22以及该参考电极23配置于该容置槽 10内,该工作电极21与该参考电极23连接一伏特计52,而该工作电极 21以及该辅助电极22部分外露于该容置槽10并与该供电单元30电性连接,在供电单元30和辅助电极22间连接一安培计51,且该供电单元 30则与该控制单元40电性连接,由该控制单元40于一预定电压下,由伏特计52监控电位值,由安培计51监控电流值的变化;其中,该工作电极21以及该辅助电极22可以为铂圆环电极,该参考电极23可以为饱和甘汞电极,且如图所示的实施例中,该工作电极21以及该辅助电极 22可分别为两个圆环位于同一圆棒上,而该参考电极23则独立位于另一圆棒上。The working electrode 21, the auxiliary electrode 22 and the reference electrode 23 are arranged in the accommodating tank 10. The working electrode 21 and the reference electrode 23 are connected to a voltmeter 52, and the working electrode 21 and the auxiliary electrode 22 are partially exposed. The accommodating tank 10 is electrically connected to the power supply unit 30 . An ammeter 51 is connected between the power supply unit 30 and the auxiliary electrode 22 . The power supply unit 30 is electrically connected to the control unit 40 . The control unit 40 Under a predetermined voltage, the potential value is monitored by the voltmeter 52, and the change of the current value is monitored by the ammeter 51; wherein, the working electrode 21 and the auxiliary electrode 22 can be platinum ring electrodes, and the reference electrode 23 can be saturated calomel. electrodes, and in the embodiment as shown in the figure, the working electrode 21 and the auxiliary electrode 22 may be two rings located on the same round rod, while the reference electrode 23 is independently located on another round rod.

本发明较佳实施例的监控方法以测定蚀刻槽中的碱性蚀刻液为例进行说明。其具体包括以下步骤:取适量蚀刻槽中的含有铜离子的待测溶液放置于容置槽10中。借由所述监控装置1,对容置槽10中的待测溶液进行循环伏安扫描,其具体步骤为:将工作电极21、辅助电极22及参考电极23置于容置槽10中,并与待测溶液接触,设定供电单元30的特定电位区间为0.1伏特~0.9伏特,开启该供电单元30,于所述电位区间内循环扫描,记录工作电极21的电位值及与其相对应的电流值,控制单元40根据所述的记录的数据同步绘制循环伏安曲线。本实施例中,工作电极21的电位值为0.1伏特~0.9伏特之间时,会出现一个波峰,记录该波峰所对应的峰电流值Ip。The monitoring method of the preferred embodiment of the present invention is explained by taking the measurement of alkaline etching liquid in the etching tank as an example. It specifically includes the following steps: taking an appropriate amount of the solution to be tested containing copper ions in the etching tank and placing it in the holding tank 10 . Through the monitoring device 1, a cyclic voltammetry scan is performed on the solution to be measured in the accommodation tank 10. The specific steps are: placing the working electrode 21, the auxiliary electrode 22 and the reference electrode 23 in the accommodation tank 10, and Contact the solution to be measured, set the specific potential range of the power supply unit 30 to 0.1 volts to 0.9 volts, turn on the power supply unit 30, scan cyclically within the potential range, and record the potential value of the working electrode 21 and its corresponding current. value, the control unit 40 synchronously draws a cyclic voltammogram curve according to the recorded data. In this embodiment, when the potential value of the working electrode 21 is between 0.1 volts and 0.9 volts, a wave peak will appear, and the peak current value Ip corresponding to the wave peak will be recorded.

配置复数组已知浓度的铜离子标准溶液,其中该复数组标准溶液的铜离子浓度不同。借由监控装置1于0.1伏特~0.9伏特的电位扫描区间的条件下,分别对所述复数组标准溶液重复上述伏安扫描步骤,并记录所述复数组标准溶液相对应的峰电流值。Configure a plurality of sets of copper ion standard solutions with known concentrations, wherein the plurality of sets of standard solutions have different copper ion concentrations. The monitoring device 1 repeats the above voltammetric scanning steps for the plurality of sets of standard solutions under the condition of a potential scanning interval of 0.1 volts to 0.9 volts, and records the peak current values corresponding to the plurality of sets of standard solutions.

依据所述复数组标准溶液的铜离子浓度值及其相对应的峰电流值,可以发现,所述复数组标准溶液的铜离子浓度值与其循环伏安曲线的峰电流值成一线性关系。因此,以该复数组标准溶液浓度值与相对应的循环伏安曲线的峰电流值可确定一线性方程。该线性方程式为Y=AX+B,其中Y表示该峰电流值,A表示该线性方程式的斜率,X表示铜离子浓度,B表示该线性方程式的截距。According to the copper ion concentration values of the plurality of standard solutions and their corresponding peak current values, it can be found that the copper ion concentration values of the plurality of standard solutions have a linear relationship with the peak current values of their cyclic voltammetry curves. Therefore, a linear equation can be determined based on the complex set of standard solution concentration values and the peak current value of the corresponding cyclic voltammogram curve. The linear equation is Y=AX+B, where Y represents the peak current value, A represents the slope of the linear equation, X represents the copper ion concentration, and B represents the intercept of the linear equation.

将待测溶液所对应的循环伏安曲线的峰电流值代入该线性方程式,以此确定该待测溶液的铜离子浓度。The peak current value of the cyclic voltammetry curve corresponding to the solution to be tested is substituted into the linear equation to determine the copper ion concentration of the solution to be tested.

而本发明较佳实施例中,以下列方式配置标准溶液,在五个可密封的塑胶瓶分别加入100ml的无一价铜蚀刻液,分别加入0.01、0.05、0.10、 0.15、0.20克的铜粉到塑胶瓶,再将塑胶瓶密封30分钟,则完成五组已知浓度的铜离子标准溶液,分别对所述五组标准溶液重复上述伏安扫描步骤,并记录所述五组标准溶液相对应的峰电流值如图3所示。(注:横坐标表示五组标准溶液,纵座标表示峰电流值。)In a preferred embodiment of the present invention, the standard solution is configured in the following manner: 100 ml of monovalent copper-free etching solution is added to five sealable plastic bottles, and 0.01, 0.05, 0.10, 0.15, and 0.20 grams of copper powder are added respectively. to the plastic bottle, and then seal the plastic bottle for 30 minutes to complete five sets of copper ion standard solutions with known concentrations. Repeat the above voltammetric scanning steps for the five sets of standard solutions, and record the corresponding values of the five sets of standard solutions. The peak current value is shown in Figure 3. (Note: The abscissa represents the five sets of standard solutions, and the ordinate represents the peak current value.)

由图3可得到一线性方程式为Y=54.019X-0.4159,再将待测溶液所对应的循环伏安曲线的峰电流值代入该线性方程式中的Y值,以此确定该待测溶液的铜离子浓度,亦即可以得知蚀刻槽中的碱性蚀刻液的铜离子浓度。From Figure 3, a linear equation can be obtained as Y=54.019X-0.4159. Then the peak current value of the cyclic voltammetry curve corresponding to the solution to be tested is substituted into the Y value in the linear equation to determine the copper content of the solution to be tested. The ion concentration, that is, the copper ion concentration of the alkaline etching solution in the etching tank can be known.

另外,本发明的监控装置可直接配置安装于一蚀刻槽的流通槽,利用流入口及流出口与该流通槽构成流通,以连续方式对该蚀刻槽内的待测溶液进行即时监控,并进一步配合一光电感测器,来计算通过蚀刻槽的板件数,不仅利用本发明的监控方法可以监控蚀刻液中一价铜离子浓度,并可利用光电感测器得知所对应的板件数,借以控制板件的生产量,亦可控制碱性蚀刻液的添加及再生,可维持稳定的蚀刻速度,以稳定生产品质。In addition, the monitoring device of the present invention can be directly configured and installed in the flow tank of an etching tank, using the inlet and outlet to form a flow with the flow tank, and continuously monitor the solution to be measured in the etching tank in real time, and further With a photoelectric sensor to count the number of boards passing through the etching tank, the monitoring method of the present invention can not only monitor the concentration of monovalent copper ions in the etching solution, but also use the photoelectric sensor to know the corresponding number of boards, thereby Controlling the production volume of panels can also control the addition and regeneration of alkaline etching solution, maintaining a stable etching speed to stabilize production quality.

Claims (5)

1.一种铜离子浓度监控方法,其特征在于,其包括以下步骤:1. A copper ion concentration monitoring method, characterized in that it includes the following steps: 提供一含有铜离子的待测溶液;Provide a solution to be tested containing copper ions; 提供一监控装置,配置于一蚀刻槽,以连续方式对该蚀刻槽内的待测溶液进行监控,该监控装置具有一容置槽,该容置槽配置有一流入口及一流出口,并有一工作电极、一辅助电极、一参考电极、一安培计、一伏特计配置于该容置槽内,该伏特计连接于该工作电极与该参考电极之间,且另有相连接的供电单元以及控制单元,该供电单元与该工作电极以及该辅助电极电性连接,该安培计则连接于该辅助电极与该供电单元之间,该工作电极以及该辅助电极可分别为两个圆环位于同一圆棒上,而该参考电极则独立位于另一圆棒上;Provide a monitoring device, configured in an etching tank, to continuously monitor the solution to be measured in the etching tank. The monitoring device has a receiving tank, the receiving tank is equipped with a first-flow inlet and a first-flow outlet, and has a working An electrode, an auxiliary electrode, a reference electrode, an ammeter, and a voltmeter are arranged in the accommodation tank. The voltmeter is connected between the working electrode and the reference electrode, and has a connected power supply unit and a control unit. The power supply unit is electrically connected to the working electrode and the auxiliary electrode. The amperemeter is connected between the auxiliary electrode and the power supply unit. The working electrode and the auxiliary electrode can be two rings located on the same round rod. , and the reference electrode is independently located on another round rod; 该容置槽内设有至少一隔板,可将容置槽区隔成一蜿蜒的液体流道;At least one partition is provided in the holding tank to divide the holding tank into a meandering liquid flow channel; 于一特定电位区间内,借由该监控装置测定该待测溶液的一循环伏安曲线,该循环伏安曲线具有一峰电流值;Within a specific potential interval, a cyclic voltammogram curve of the solution to be measured is measured by the monitoring device, and the cyclic voltammogram curve has a peak current value; 提供复数组浓度已知的铜离子标准溶液,于该特定电位区间,借由监控装置测定复数组标准溶液的循环伏安曲线,每一浓度的标准溶液的循环伏安曲线具有一峰电流值,以该复数组标准溶液的铜离子浓度值及其相对应的循环伏安曲线的峰电流值确定一线性方程式,该线性方程式为Y=AX+B,其中Y表示该峰电流值,A表示该线性方程式的斜率,X表示铜离子浓度,B表示该线性方程式的截距;以及A plurality of sets of copper ion standard solutions with known concentrations are provided. In the specific potential interval, the cyclic voltammetry curves of the plurality of sets of standard solutions are measured by a monitoring device. The cyclic voltammetry curve of the standard solution of each concentration has a peak current value, so as to The copper ion concentration value of the complex set of standard solutions and the peak current value of the corresponding cyclic voltammetry curve determine a linear equation. The linear equation is Y=AX+B, where Y represents the peak current value and A represents the linear equation. The slope of the equation, where X represents the copper ion concentration and B represents the intercept of the linear equation; and 以该线性方程式及该待测溶液的循环伏安曲线的峰电流值,确定该待测溶液的铜离子浓度。The copper ion concentration of the solution to be tested is determined based on the linear equation and the peak current value of the cyclic voltammetry curve of the solution to be tested. 2.如权利要求1所述的铜离子浓度监控方法,其特征在于,该工作电极以及该辅助电极为铂圆环电极。2. The copper ion concentration monitoring method according to claim 1, wherein the working electrode and the auxiliary electrode are platinum ring electrodes. 3.如权利要求1所述的铜离子浓度监控方法,其特征在于,该参考电极为饱和甘汞电极。3. The copper ion concentration monitoring method according to claim 1, wherein the reference electrode is a saturated calomel electrode. 4.如权利要求1至3任一所述的铜离子浓度监控方法,其特征在于,该特定电位区间为0.1伏特~0.9伏特。4. The copper ion concentration monitoring method according to any one of claims 1 to 3, characterized in that the specific potential range is 0.1 volts to 0.9 volts. 5.如权利要求1至3任一所述的铜离子浓度监控方法,其特征在于,该线性方程式中A值为54.019,B值为-0.4159。5. The copper ion concentration monitoring method according to any one of claims 1 to 3, characterized in that the A value in the linear equation is 54.019 and the B value is -0.4159.
CN202010054568.7A 2020-01-17 2020-01-17 Copper ion concentration monitoring method Active CN113138215B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010054568.7A CN113138215B (en) 2020-01-17 2020-01-17 Copper ion concentration monitoring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010054568.7A CN113138215B (en) 2020-01-17 2020-01-17 Copper ion concentration monitoring method

Publications (2)

Publication Number Publication Date
CN113138215A CN113138215A (en) 2021-07-20
CN113138215B true CN113138215B (en) 2023-10-03

Family

ID=76808772

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010054568.7A Active CN113138215B (en) 2020-01-17 2020-01-17 Copper ion concentration monitoring method

Country Status (1)

Country Link
CN (1) CN113138215B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114740070B (en) * 2022-05-18 2023-11-03 福州大学 Method for detecting copper ion concentration in acidic copper plating solution

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1249697A (en) * 1997-01-28 2000-04-05 派尼逖克斯公司 Electrochemically assisted ion exchange
CN1912610A (en) * 2005-08-12 2007-02-14 深圳富泰宏精密工业有限公司 Investigating method of metal ion concentration
CN1916617A (en) * 2005-08-19 2007-02-21 深圳富泰宏精密工业有限公司 Method for measuring density of corrosion inhibitor
CN203870060U (en) * 2014-05-07 2014-10-08 北京化工大学 Device used for electrochemistry method for monitoring chemical oxygen demand
CN105278566A (en) * 2014-07-17 2016-01-27 株式会社平间理化研究所 Etching solution managing apparatus, dissolved metal concentration measuring apparatus and dissolved metal concentration measuring method
CN106525931A (en) * 2016-09-28 2017-03-22 中国科学院长春应用化学研究所 Detection method of copper ion concentration in solution

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1249697A (en) * 1997-01-28 2000-04-05 派尼逖克斯公司 Electrochemically assisted ion exchange
CN1912610A (en) * 2005-08-12 2007-02-14 深圳富泰宏精密工业有限公司 Investigating method of metal ion concentration
CN1916617A (en) * 2005-08-19 2007-02-21 深圳富泰宏精密工业有限公司 Method for measuring density of corrosion inhibitor
CN203870060U (en) * 2014-05-07 2014-10-08 北京化工大学 Device used for electrochemistry method for monitoring chemical oxygen demand
CN105278566A (en) * 2014-07-17 2016-01-27 株式会社平间理化研究所 Etching solution managing apparatus, dissolved metal concentration measuring apparatus and dissolved metal concentration measuring method
CN106525931A (en) * 2016-09-28 2017-03-22 中国科学院长春应用化学研究所 Detection method of copper ion concentration in solution

Also Published As

Publication number Publication date
CN113138215A (en) 2021-07-20

Similar Documents

Publication Publication Date Title
US9207204B2 (en) Method and apparatus for determining information concerning presence of constituents of a liquid sample with oxygen demand
KR100710101B1 (en) Multi-way electrical conductivity measuring device
KR100722888B1 (en) Ion concentration measuring device
JP5887372B2 (en) Electrochemical method for detecting boron in water
CN113138215B (en) Copper ion concentration monitoring method
CN104303051A (en) Method and apparatus for measuring total organic content of water streams
CN211505316U (en) Copper ion concentration monitoring system
US4235689A (en) Apparatus for detecting traces of a gas
CN102112886A (en) Voltammetric device having sample degassing system
TW202129271A (en) Method for monitoring copper ion concentration
US3218242A (en) Measurement of the concentration of dissolved oxygen in liquids
CN202492579U (en) Regenerative control device for acidic cupric chloride etchant
TWM594611U (en) Concentration monitoring system of copper ions
EP3767286B1 (en) Sp3 substituted carbon electrode analysis
CN211318408U (en) An automatic detection device and system for liquid monitoring sensor state
CN103969302B (en) A kind of method measuring dissolved oxygen coefficient of diffusion in biological membrane
Sue et al. Barrel plating rhodium electrode: application to flow injection analysis of hydrazine
JP4221504B2 (en) Chemical substance measuring method and apparatus
KR920006738A (en) Method and apparatus for measuring the pH of a liquid
CN207007768U (en) A kind of ammonia nitrogen water quality analytical instrument
US20200124567A1 (en) Apparatus and method for determining water chloride concentration
JPH01313754A (en) Method of measuring concentration of chlorine
SU1032402A1 (en) Mass transfer coefficient measuring method
CN110579519A (en) An electrochemically controlled COD rapid detection device and method thereof
CN107402239A (en) A kind of method by conductance measurement NaSCN solution concentrations

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant