CN113126195A - Frameless colorized optical filter and manufacturing method thereof - Google Patents
Frameless colorized optical filter and manufacturing method thereof Download PDFInfo
- Publication number
- CN113126195A CN113126195A CN202110406220.4A CN202110406220A CN113126195A CN 113126195 A CN113126195 A CN 113126195A CN 202110406220 A CN202110406220 A CN 202110406220A CN 113126195 A CN113126195 A CN 113126195A
- Authority
- CN
- China
- Prior art keywords
- optical filter
- typesetting
- sub
- rows
- columns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 32
- 230000008569 process Effects 0.000 claims abstract description 10
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 6
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 238000000576 coating method Methods 0.000 claims abstract description 5
- 239000002699 waste material Substances 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70541—Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7046—Strategy, e.g. mark, sensor or wavelength selection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7084—Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
Abstract
The invention discloses a frameless colorized optical filter and a manufacturing method thereof, and the method comprises the following steps: typesetting in the master plate according to the size required by the sub-film; dividing the effective area into a plurality of rows and a plurality of columns according to the typesetting of the sub-pieces; then coating color photoresist, exposing, developing and curing, coding the pixel units of the crossing points of the rows and the columns by adopting reserved blank areas in the exposing process, and expressing the rows and the columns of the sub-sheets in the effective area by using codes; the reserved blank area is adopted for coding in the pixel unit, so that the line and the column where the optical filter is located are marked to show position coordinates, only typesetting is needed in a photomask drawing file when different models exist subsequently, the line and the column with the nearest four pins are read in the drawing file after typesetting is completed, the optical filter can be attached without using an independent alignment mark, the number of photomasks is saved, and the waste of the optical filter caused by the traditional alignment mark mode is avoided.
Description
Technical Field
The invention belongs to the technical field of color filter manufacturing, and relates to a frameless colorized filter and a manufacturing method thereof.
Background
In the manufacturing process of the existing color filter, generally, a transparent substrate is cleaned, a Black Matrix (BM) for shading is manufactured on the transparent substrate, then three primary color filter layers of red, green and blue are manufactured in sequence, and finally a protective layer, a transparent electrode (ITO) and the like are manufactured. In the manufacture of the color filter layer of three primary colors of red, green and blue, the process steps of "coating photoresist of corresponding color to form a color filter film, pre-baking at the front section, exposing, developing and baking at the rear section" are usually adopted to complete, wherein the exposing and developing are the most important processes in the manufacture of the color filter layer, and play an important role in the pattern formation of the color filter layer. The exposure process is generally completed by using exposure equipment, a preset exposure alignment mark (mark) is automatically detected in real time by the exposure equipment, a mask plate provided with a color filter layer pattern is aligned with the mask plate, then the coated color filter film with the corresponding color is exposed, and the processes of developing, baking and the like are carried out, so that the corresponding color filter layer on the color filter is formed.
At present, in the production of color filters at the present stage, products must be typeset first, products with the same resolution and different sizes need to be manufactured by repeatedly opening a light cover, and the positions of alignment marks occupy a large amount of space, which causes the waste of the color filters.
Disclosure of Invention
The invention aims to: the method solves the problems that products are required to be typeset firstly in the production of the color filter at the present stage, products with the same resolution and different sizes are required to be manufactured by repeatedly opening the light cover, and the positions of alignment marks occupy a large amount of space, so that the waste of the color filter is caused.
The technical scheme adopted by the invention is as follows:
a method for manufacturing a frameless colorized optical filter comprises the following steps:
typesetting in the master plate according to the size required by the sub-film;
dividing the effective area into a plurality of rows and a plurality of columns according to the typesetting of the sub-pieces;
then coating color photoresist, exposing, developing and curing, and coding the pixel units at the intersections of the rows and the columns by using reserved blank areas in the exposing process, wherein the coding represents the rows and the columns of the sub-sheets in the effective area.
Further, the encoding uses binary, quaternary, decimal, or morse codes.
Further, different readings are indicated at the height positions of the pixel units according to the blank area.
The invention provides a frameless colored filter which is manufactured by using the manufacturing method of the frameless colored filter.
In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:
the invention marks the line and the column of the optical filter by adopting the reserved blank area for coding in the pixel unit, only needs to typeset in the photomask drawing file when different models exist subsequently, reads the line and the column with the nearest four pins in the drawing file after typesetting is finished, and the optical filter can be attached without using an independent contraposition mark, thereby saving the number of photomasks and avoiding the waste of the optical filter caused by adopting the traditional contraposition mark mode.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and that for those skilled in the art, other relevant drawings can be obtained according to the drawings without inventive effort, wherein:
FIG. 1 is a schematic flow diagram of the present invention;
FIG. 2 is a schematic diagram of a conventional optical filter;
FIG. 3 is a first encoding diagram of the present invention;
FIG. 4 is a second encoding scheme of the present invention;
FIG. 5 is a schematic diagram of a pixel cell of the present invention;
FIG. 6 is a layout diagram of the present invention;
FIG. 7 is a schematic diagram of the effective area division of the present invention;
reference numerals: 1-effective area, 2-outer frame, 3-contraposition mark, 4-upper part, 5-lower part, 6-color block, 7-blank area, 8-pixel unit, 9-row, 10-column, 11-mother plate and 12-sub-plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Example 1
As shown in fig. 1, 5, 6 and 7, a borderless color filter and a method for manufacturing the same according to a preferred embodiment of the present invention includes the following steps:
typesetting in the master 11 according to the size required by the sub-film 12;
dividing the effective area into a plurality of rows 9 and a plurality of columns 10 according to the typesetting of the sub-sheets 12;
then coating color photoresist, exposing, developing and curing, and encoding the pixel units 8 at the intersections of the rows 9 and the columns 10 by using the reserved blank areas 7 in the exposing process, wherein the rows 9 and the columns 10 of the sub-sheets 12 in the effective area are represented by codes.
The invention comprises the following steps: as shown in fig. 2, in the conventional alignment mark technology, an outer frame 2 is usually reserved outside the effective area, and the alignment mark 3 is disposed in the outer frame 2. The adoption of the alignment marking technology can cause the waste of the optical filter, and products with the same resolution and different sizes need to be manufactured by repeatedly opening the photomask. As shown in fig. 6, the invention firstly determines the size of the sub-piece 12 according to the design requirement, and then performs typesetting in the master 11 according to the size of the sub-piece 12, so as to realize the maximum utilization of the master 11. As shown in fig. 7, the effective area is then divided into several rows 9 and several columns 10 according to the layout of the sub-sheets 12. Then, the color photoresist is sequentially coated, and through exposure, development and curing, the pixel unit 8 is encoded in the pixel unit 8 in a manner of reserving the blank area 7, the pixel unit 8 is as shown in fig. 5, the coordinates of each piece can be determined by calculating the code subsequently, and the laminator can also identify the correct mark through the code. This changes from a multi-pass mask design to a one-time mask design. The original marked clearance area after the code is merged into the pixel unit 8 can be saved, and the utilization rate is increased.
The encoding method is as shown in FIG. 3, a blank area 7 is reserved in a certain color block 6 of a pixel unit 8, and the method is based on the blank areaDifferent readings are indicated by the height of the position of the blank area 7, so that the behavior 3 x 4 in fig. 2 can be obtained3+2*42+1*41+1*40I.e. 229 th row, column 0 x 4 in fig. 23+1*42+2*41+2*40I.e., column 26.
The encoding is performed in a manner as shown in fig. 4, wherein a blank area 7 is reserved in 4 color patches 6 in a pixel unit 8, and different readings are represented according to the position height of the blank area 7, the upper portion 4 of the pixel unit 8 represents a row, the lower portion 5 represents a column, and then the row is 2 × 41+3*40I.e. the 11 th row, the column is 1 x 41+0*40I.e. column 4.
The encoding method is not limited to the above-mentioned method, and may be any method as long as the blank regions 7 are left in the pixel cells 8 to indicate the filter array, and those skilled in the art can adjust the encoding method according to actual needs.
The coordinates of the four targets to be captured can then be determined by typesetting on the reticle map, such as: (5,5)(5, 75)(113,5)(113, 75). Thus, the encoded pixel unit 8 can be used to replace the original alignment mark 3, and thus the filter bonding can be performed without using a separate alignment mark 3. The number of light covers is saved, and in addition, the redundant part of the light filter can be saved and the utilization rate of the product is improved because the light filter does not need to be marked independently.
Preferably, the coding uses binary, quaternary, decimal or morse codes. In practice, it should be noted that the present application is not limited to binary, quaternary, decimal or morse code, and the encoding principle may be any method as long as it can satisfy the line and row of the marking filters.
Preferably, different readings are indicated depending on the height position of the blank area 7 at the pixel element 8. In practice, in order to distinguish the readings represented by the blank area 7, the embodiment uses the height position of the blank area 7 in the pixel unit 8 for distinction.
Example 2
The invention provides a frameless colored filter which is manufactured by using the manufacturing method of the frameless colored filter.
In this embodiment, although the area of the optical filter is increased properly by reserving the blank regions in the pixel units, the material used for the optical filter with the same specification is reduced relatively compared with the existing optical filter, so that the utilization rate of the master mask is improved.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, and any modifications, equivalents and improvements made by those skilled in the art within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (4)
1. A method for manufacturing a frameless colorized optical filter is characterized by comprising the following steps: the method comprises the following steps:
typesetting in the master plate according to the size required by the sub-film;
dividing the effective area into a plurality of rows and a plurality of columns according to the typesetting of the sub-pieces;
then coating color photoresist, exposing, developing and curing, and coding the pixel units at the intersections of the rows and the columns by using reserved blank areas in the exposing process, wherein the coding represents the rows and the columns of the sub-sheets in the effective area.
2. The method of claim 1, wherein the method comprises: the code is binary, quaternary, decimal or Morse code.
3. The method of claim 1, wherein the method comprises: different readings are indicated according to the height position of the blank area in the pixel unit.
4. A frameless colorized optical filter is characterized in that: manufactured using the method of any one of claims 1 to 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110406220.4A CN113126195A (en) | 2021-04-15 | 2021-04-15 | Frameless colorized optical filter and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110406220.4A CN113126195A (en) | 2021-04-15 | 2021-04-15 | Frameless colorized optical filter and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113126195A true CN113126195A (en) | 2021-07-16 |
Family
ID=76776704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110406220.4A Pending CN113126195A (en) | 2021-04-15 | 2021-04-15 | Frameless colorized optical filter and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113126195A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201117008Y (en) * | 2005-06-27 | 2008-09-17 | 手持产品公司 | Bar code reading device, marking reading device and data acquisition device |
| TW200839314A (en) * | 2007-03-16 | 2008-10-01 | Chi Mei Optoelectronics Corp | Color filter, liquid crystal display panel and liquid crystal display device using the same, and color filter fabricating method |
| CN102308259A (en) * | 2009-02-05 | 2012-01-04 | 凸版印刷株式会社 | Exposure method, color filter manufacturing method, and exposure device |
| CN113747152A (en) * | 2020-05-29 | 2021-12-03 | 佳能株式会社 | Encoding apparatus and method, image capturing apparatus, and storage medium |
-
2021
- 2021-04-15 CN CN202110406220.4A patent/CN113126195A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201117008Y (en) * | 2005-06-27 | 2008-09-17 | 手持产品公司 | Bar code reading device, marking reading device and data acquisition device |
| TW200839314A (en) * | 2007-03-16 | 2008-10-01 | Chi Mei Optoelectronics Corp | Color filter, liquid crystal display panel and liquid crystal display device using the same, and color filter fabricating method |
| CN102308259A (en) * | 2009-02-05 | 2012-01-04 | 凸版印刷株式会社 | Exposure method, color filter manufacturing method, and exposure device |
| CN113747152A (en) * | 2020-05-29 | 2021-12-03 | 佳能株式会社 | Encoding apparatus and method, image capturing apparatus, and storage medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9360700B2 (en) | Half-transmitting and half-reflecting color film substrate, manufacture method thereof and liquid crystal display device | |
| US10001589B2 (en) | Mask assembly, color filter substrate and method of manufacturing the same | |
| CN105789118B (en) | A kind of display base plate and preparation method thereof | |
| CN103744214A (en) | Exposure method of glass substrate of LCD (Liquid Crystal Display) | |
| US10345693B2 (en) | Manufacturing method of a mask plate and a color filter substrate | |
| CN106997156B (en) | The exposure method of high-precision line pattern is prepared on high radian 3 D stereo | |
| CN103268037A (en) | Color filter substrate, manufacturing method of color filter substrate and display device | |
| CN104865729A (en) | Colored film baseplate and manufacture method of same, manufacture method of spacer and display device | |
| CN108585537B (en) | Preparation method of gradual change glass | |
| CN100405167C (en) | Color filter substrate and manufacturing method thereof | |
| CN108196421B (en) | Method for manufacturing gray-scale mask | |
| CN106773417B (en) | Display device | |
| US20070148565A1 (en) | Method for manufacturing a color filter | |
| CN113126195A (en) | Frameless colorized optical filter and manufacturing method thereof | |
| CN110703489A (en) | Mask plate, display panel and preparation method of display panel | |
| US8399162B2 (en) | Method of forming exposure patterns | |
| JP2000098126A (en) | Production of color filter | |
| CN105093818A (en) | Manufacturing method of mask pattern and mask pattern | |
| CN105404050B (en) | Color membrane substrates and preparation method thereof, display device | |
| CN109739030B (en) | Display panel, preparation method thereof, mask plate and display device | |
| CN103389533A (en) | Method for manufacturing color filter and color filter | |
| CN110806675A (en) | Mask plate and preparation method of color film substrate | |
| CN105894980B (en) | A kind of roll-to-roll color electric paper manufacturing method | |
| US11215923B1 (en) | Method for manufacturing large-scale touch sensing pattern | |
| KR950019780A (en) | Manufacturing method of color filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210716 |