CN113063372A - Portable automatic measurement method and device for mirror surface/mirror-like surface morphology - Google Patents
Portable automatic measurement method and device for mirror surface/mirror-like surface morphology Download PDFInfo
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Abstract
本发明涉及一种便携式镜面/类镜面形貌的自动测量方法及其装置，属光学检测技术领域。可伸缩框架由上、中、下三组平行导轨、伸缩杆和伸缩调节机构组成，显示模块和图像采集模块通过直线电机分别置于可伸缩框架的平行导轨上，嵌入式开发板通过Wi‑Fi模块与计算机无线连接，控制直线电机、伸缩调节机构的运动，自动调整显示模块、图像采集模块的位置和角度，在保证测量结果准确的同时兼顾了便携性与灵活性；显示屏显示基于时域变频相移的同心圆环正弦条纹，相机采集经被测物表面调制反射的变形条纹图，经计算机处理得到被测物的三维形貌。本发明提供的测量装置结构紧凑、便携性强、自动化程度高，所提供的测量方法能有效提高测量精度和效率。
The invention relates to a portable mirror surface/mirror-like surface topography automatic measuring method and device thereof, belonging to the technical field of optical detection. The retractable frame is composed of upper, middle and lower parallel guide rails, telescopic rods and a telescopic adjustment mechanism. The display module and image acquisition module are placed on the parallel guide rails of the retractable frame through linear motors, and the embedded development board is connected to Wi‑Fi The module is wirelessly connected to the computer, controls the movement of the linear motor and the telescopic adjustment mechanism, and automatically adjusts the position and angle of the display module and the image acquisition module, ensuring the accuracy of the measurement results while taking into account the portability and flexibility; the display screen is based on the time domain. Frequency conversion phase-shifted concentric ring sinusoidal fringes, the camera collects the deformed fringe pattern modulated and reflected by the surface of the object to be measured, and the three-dimensional topography of the object to be measured is obtained through computer processing. The measuring device provided by the invention has the advantages of compact structure, strong portability and high degree of automation, and the provided measuring method can effectively improve the measuring accuracy and efficiency.
Description
Technical Field
The invention relates to a method and a device for measuring the appearance of a mirror surface/mirror-like surface, belonging to the technical field of optical detection.
Background
The free-form optical element can more remarkably correct system aberration, improve system design performance and realize compactness and high transmittance of an optical system, so that the free-form optical element has great interest in the research and development and realization processes of optoelectronic systems such as a laser nuclear fusion system, a low-light level night vision device, a photoetching machine, an imaging spectrometer and the like. However, because of the characteristics and problems of large surface shape description freedom, complex gradient change and the like, the high-precision forming difficulty of the surface topography profile is far greater than that of the traditional optical element. The machining and detection are two important and inseparable parts in the manufacturing process of the optical element, and the quality of the machining and forming effect is directly determined by the detection precision.
With the continuous development of scientific technology, high-precision aspheric surface/free-form surface processing schemes such as a particle flow processing technology, a modern numerical control and controllable flexible body polishing technology and the like appear in sequence, and detection means suitable for the schemes are slow to develop. In the process of processing optical elements, the traditional and direct detection means is a contact/non-contact three-coordinate measuring machine. However, the dot-scan operation mode makes the whole testing process longer, the detection efficiency is not high, and the precision is limited (submicron order). Although aspheric interference technology based on a compensator (such as a computer-generated hologram element) can achieve nanometer-scale detection accuracy, corresponding wave surface compensation elements need to be designed and prepared for detected pieces with different surface shapes, and the problem of poor detection universality exists. The Phase retrieval (Phase retrieval) method, which is a simpler system configuration, has been successfully applied to in-situ detection of optical aspherical mirrors as a non-interference detection technique. However, the acquisition of a plurality of out-of-focus light fields required in the iterative recovery process depends on a precise translation guide rail device, and the requirement of the detected piece on high spatial resolution of the detector is further increased due to the large aspheric degree of the detected piece.
Due to the improvement of technologies such as calculating geometry, displaying and processing digital images and the like, the other free-form surface shape detection technology, namely Phase Measurement Deflection (PMD), has a rapidly developed situation, and the measurement accuracy of the PMD is even comparable to that of interferometry. PMD is a measuring technique which uses sine/cosine fringe signals as media, modulates and demodulates the normal vector of the surface of a measured object by phase change, and restores the surface appearance of the object by gradient integration or stereoscopic vision. Aiming at a mirror surface object, PMD simplifies the system constitution and greatly expands the dynamic measurement range (up to tens of millimeters) of the system on the basis of keeping the measurement resolution level close to that of interferometry. However, the existing PMD measuring devices are not portable enough, and the automation degree of adjustment and detection is not high enough; in the measurement process, two groups of anisotropic sinusoidal straight fringe patterns in the horizontal and vertical directions need to be displayed in sequence, and the detection efficiency needs to be improved. Therefore, the mirror surface/mirror-like surface appearance measuring device and method based on the PMD principle are provided, which are research hotspots and trends in the field, and have the advantages of compact structure, strong portability, high automation degree and high detection efficiency.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the automatic measurement method and the device for the mirror surface/mirror-like surface morphology, which are convenient to use and carry, have higher automation degree and can effectively improve the measurement precision and efficiency.
In order to achieve the above purpose, the technical solution adopted by the invention is a portable automatic measuring device for mirror surface/mirror-like surface appearance, which comprises a display module, an image acquisition module, a telescopic frame, an objective table, an embedded development board and a computer;
the embedded development board is in wireless connection with the computer through the Wi-Fi module;
the telescopic frame comprises an upper group of parallel guide rails, a middle group of parallel guide rails and a lower group of parallel guide rails, a telescopic rod and a telescopic adjusting mechanism for adjusting the telescopic rod, wherein the guide rails are perpendicular to the telescopic rod, two ends of each guide rail are respectively fixed with the telescopic rod, and the telescopic adjusting mechanism is connected with the embedded development board through a data transmission control line;
the display module comprises a display screen and a linear motor, the linear motor is fixed with the display module, the linear motor is respectively arranged on the middle and lower groups of parallel guide rails of the telescopic frame, and the display screen faces the objective table; the display screen and the linear motor are respectively connected with the embedded development board through data transmission control lines;
the image acquisition module comprises a camera with an automatic focusing function, a sensor for determining the distance between a measured object and the camera and a linear motor; the linear motor is fixed with the image acquisition module and is respectively arranged on the middle and upper groups of parallel guide rails of the telescopic frame; the object stage is positioned on the front focal plane of the camera, the display screen, the object stage and the camera are placed in a triangular structure, and an object to be measured on the object stage and a reflected image of the display screen are positioned in the depth of field range of the camera; the sensor and the linear motor are respectively connected with the embedded development board through data transmission control lines;
the display screen displays the concentric circular ring sine stripes based on time domain frequency conversion phase shift and received by the embedded development board, and the camera collects the deformed stripe pattern modulated and reflected by the surface of the measured object and inputs the deformed stripe pattern into the computer through the embedded development board.
The invention provides a portable automatic measuring device for mirror surface/mirror-like surface appearance.
According to the portable automatic measuring device for the mirror surface/mirror-like surface appearance, the computer controls the linear motor and the telescopic adjusting mechanism to move through the embedded development board, and the positions and angles of the display module and the image acquisition module are automatically adjusted.
The technical scheme of the invention preferably comprises a portable automatic measurement method for the mirror surface/mirror-like surface appearance, which comprises the following steps:
step one, the installation and adjustment of a measuring device
Placing an object stage and an object to be measured on the bottom surface of a telescopic frame, and respectively and preliminarily installing a display module and an image acquisition module on two groups of parallel guide rails of a middle parallel guide rail, a lower parallel guide rail, a middle parallel guide rail and an upper parallel guide rail of the telescopic frame; the display screen of the display module and the camera of the image acquisition module face the objective table, and the display screen, the objective table and the camera are in triangular structure positions; the Wi-Fi module of the embedded development board is wirelessly connected with a computer, and the computer controls a distance sensor in an image acquisition module, controls a linear motor in a display module and the image acquisition module, controls the state of a telescopic adjusting mechanism in a telescopic frame and controls the focusing amount of a camera, so that an object to be measured on an object stage and a reflected display screen image thereof are positioned in the depth of field range of the camera;
step two, displaying and acquiring stripe images
Obtaining coding parameters of the concentric ring sine stripes based on time domain frequency conversion phase shift through software design, and transmitting the coding parameters to a display module through Wi-Fi by a computer; generating an isotropic concentric ring sine stripe image for measurement by an embedded development board in a display module according to parameter coding, transmitting the image to a display screen through a data transmission control line, reflecting the surface of an object to be measured, acquiring the image by a camera in an image acquisition module, and inputting the image into a computer through a Wi-Fi module of the embedded development board;
step three, demodulation and surface shape reconstruction of stripe images
Processing each single-frequency deformed stripe image obtained by a camera in an image acquisition module by adopting a least square N-step phase shift demodulation algorithm, and calculating to obtain each single-frequency truncation phase; processing by adopting a time domain phase expansion method to obtain absolute phase distribution related to the three-dimensional shape of the object to be measured under the highest frequency; under the constraint of the light reflection law, combining system geometric structure parameters and distance parameters fed back by a distance sensor in an image acquisition module, calculating absolute phase distribution to obtain surface shape slopes in all directions of the object to be measured, and obtaining surface shape gradient distribution in the optimal orthogonal direction of the object to be measured according to a slope gradient evaluation function; and then reconstructing by adopting a gradient integral algorithm to obtain the three-dimensional surface shape distribution of the object to be measured.
In the second step of the measuring method, the fringe frequency of the concentric ring sinusoidal fringe image based on the time domain frequency conversion phase shift is changed by one of a natural number sequence, a multiple sequence, a power function sequence and an exponent sequence. In the third step, the slope gradient evaluation function calculates to obtain the optimal surface shape gradient distribution in the orthogonal direction by taking the sum of squares of the slopes in the orthogonal direction as an evaluation index.
The invention provides a portable automatic measurement method for mirror surface/mirror-like surface appearance, wherein the stripe frequency adopts a multiple sequence change method;the fringe pattern is equal step phase shift with each step of phase shift theta
And N is the total number of phase shift steps,
。
compared with the prior art, the invention has the remarkable advantages that:
1. the measuring device provided by the invention has the advantages of compact structure, strong portability, high automation degree and detection efficiency, and is very suitable for automatic and wireless measurement and control of the surface shape of the mirror surface/mirror-like element.
2. By adopting the measuring device provided by the invention, the measuring method only needs to display a group of isotropic time domain frequency conversion phase shift concentric circular ring sine stripe images on the display screen, so that the problem that two groups of anisotropic frequency conversion phase shift sine straight stripe images in the horizontal and vertical directions need to be sequentially displayed in the prior art can be effectively avoided, the number of images required by measurement is greatly reduced, and the measuring efficiency is improved; the use of the distance sensor can avoid ambiguity of slope gradient calculation, and the use of the proposed slope gradient evaluation function can obtain the surface shape gradient distribution of the object to be measured in the optimal orthogonal direction, thereby improving the measurement accuracy.
Drawings
FIG. 1 is a schematic structural diagram of a portable automatic measuring device for mirror/mirror-like topography according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a display module in an automatic measuring device for portable mirror/mirror-like topography according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an image acquisition module in the apparatus for automatically measuring a mirror/mirror-like topography according to an embodiment of the present invention.
Wherein: 1. a display module; 2. an image acquisition module; 3. a telescoping frame; 4. an object stage; 5. a computer; 6. a measured object; 11. an embedded development board; 12. a display screen; 13. a linear motor; 21. a camera; 22. a distance sensor; 23. a linear motor; 31. an upper parallel guide rail; 32. a middle parallel guide rail; 33. a lower parallel guide rail; 34. the telescopic rod controls the motor.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples.
Example 1
Referring to fig. 1, it is a schematic structural diagram of a portable mirror/mirror-like surface appearance measuring device provided in this embodiment; the measuring device comprises: the device comprises a display module 1, an image acquisition module 2, a telescopic frame 3, an objective table 4, a computer 5 and a measured object 6; referring to fig. 2, which is a schematic structural diagram of the display module of this embodiment, an embedded development board 11, a display screen 12 and four linear motors 13 are arranged in the display module 1; referring to fig. 3, which is a schematic structural diagram of the image capturing module according to the embodiment, the image capturing module 2 includes a camera 21 with an auto-focusing function, a distance sensor 22, and four linear motors 23. As shown in fig. 1, the telescopic frame 3 includes three sets of parallel guide rails, namely an upper parallel guide rail 31, a middle parallel guide rail 32 and a lower parallel guide rail 33, and eight telescopic motors 34, wherein the guide rails are horizontally arranged and perpendicular to the telescopic rods, and two ends of each guide rail are respectively fixed to the telescopic rods. The output port of the distance sensor, the control ports of the linear motor and the telescopic motor are respectively connected with the embedded development board 11. The embedded development board 11 is wirelessly connected with the computer 5 through a Wi-Fi module;
the display module 1 is disposed on the two sets of parallel guide rails 32 and the lower parallel guide rail 33 of the telescopic frame 3 through the linear motor 13, and the display screen 12 of the display module 1 faces the object stage 4.
The image acquisition module 2 is arranged on two groups of parallel guide rails of the middle parallel guide rail 32 and the upper parallel guide rail 21 of the telescopic frame 3 through a linear motor 23, and the camera 21 of the image acquisition module 2 faces the objective table 4; the display module 1 and the image acquisition module 2 adjust the positions and the angles thereof through the linear motor 13, the linear motor 23 and the telescopic motor 34, so as to realize automatic adjustment;
the objective table 4 is positioned on the front focal plane of the camera, and the display screen 12, the objective table 4 and the camera 21 are arranged in a triangular structure, so that the camera 21 can clearly observe the measured object 6 on the objective table 4 and the mirror image of the display screen 12 reflected by the measured object 6; the embedded development board 11 is wirelessly connected with the computer 5 through Wi-Fi, so that the accuracy of a measurement result is ensured, and the portability and the flexibility are both considered; the concentric circular sine stripes based on time domain frequency conversion phase shift and displayed on the display screen 12 and input by the computer are modulated and reflected by the surface of the measured object 6 to obtain a deformed stripe pattern which is acquired by the camera 21; the camera 21 transmits the acquired pictures to the computer 5, and the three-dimensional shape of the measured object 6 is obtained after data processing.
The distance sensor 22 is one of a laser displacement sensor, an ultrasonic distance sensor, and an infrared distance sensor, and is used for determining the distance between the measured object 6 and the camera 21.
The measuring device provided by the embodiment is in wireless connection with the computer 5 through Wi-Fi, so that remote control is completed.
The embedded development board can be one of an FPGA, a DSP, a raspberry group, and a single chip microcomputer development board, and the embedded development board adopted in this embodiment is the embedded raspberry group development board and has a raspberry group operating system running thereon. The embedded development board is wirelessly connected with the computer through a Wi-Fi module; a telescopic motor in a telescopic frame related in the measuring device is connected with the raspberry development board through a General Purpose input/output port (GPIO) on the raspberry development board; a display screen and a linear motor in the display module are connected with the raspberry development board through a GPIO port on the raspberry development board; the Camera in the image acquisition module is connected with the raspberry development board through a Camera Serial Interface (CSI) on the raspberry development board, and the distance sensor and the linear motor are connected with the raspberry development board through a GPIO port on the raspberry development board.
The embodiment is adopted to provide the portable mirror surface/mirror-like surface appearance measuring device, and the measuring method comprises the following steps:
step one, the installation and adjustment of a measuring device
The structure of the measuring device is shown in figure 1, an object stage 4 and an object to be measured 6 are arranged on the bottom surface of a telescopic frame 3, a display module 1 and an image acquisition module 2 are connected through a data transmission control line and are respectively and preliminarily mounted on a middle parallel guide rail 32, a lower parallel guide rail 33, a middle parallel guide rail 32 and an upper parallel guide rail 31 of the telescopic frame 3, and a display screen 12 of the display module 1 and a camera 21 of the image acquisition module 2 face the object stage 4, so that the display screen 12, the object stage 4 and the camera 21 are in a triangular structure; the Wi-Fi module of the embedded development board 11 is in wireless connection with the computer 5, and the computer is combined with the distance sensor 22 in the image acquisition module 2 to control the states of the linear motors 13 and 23 in the display module 1 and the image acquisition module 2, the state of the telescopic motor 34 in the telescopic frame 3 and the focusing amount of the camera 21, so that an object to be measured on the object stage and a reflected image of the display screen are positioned in the depth of field range of the camera.
Step two, displaying and acquiring stripe images
Setting coding parameters of concentric ring sine stripes based on time domain frequency conversion phase shift by using GUI software developed in a matched way on a computer, and transmitting related parameters to a display module 1 through Wi-Fi; the isotropic concentric ring sine stripe image for measurement is generated by an embedded development board 11 in the display module 1 according to parameter coding, transmitted to a display screen 12 through a data transmission control line, reflected by the surface of the object 6 to be measured, and acquired by a camera 21 in the image acquisition module 2.
Step three, demodulation and surface shape reconstruction of stripe images
Processing each single-frequency deformed stripe image obtained by the camera 21 in the image acquisition module 2 by adopting a least square N-step phase shift demodulation algorithm, and calculating to obtain each single-frequency truncation phase; obtaining absolute Phase distribution related to the three-dimensional shape of the object 6 to be measured under the highest frequency by a time domain Phase unwarping (Temporal Phase unwarping) technology; under the constraint of the light reflection law, combining the system geometric structure parameters and the distance parameters fed back by the distance sensor 22 in the image acquisition module 2, calculating the surface shape slope of the object to be measured 6 in each direction unambiguously from the absolute phase distribution, and obtaining the surface shape gradient distribution of the object to be measured 6 in the optimal orthogonal direction according to the slope gradient evaluation function; and finally, reconstructing the three-dimensional surface shape distribution of the object 6 to be measured by using a gradient integral algorithm.
In the second step, a concentric ring sine stripe image based on time domain frequency conversion phase shift is obtainedThe stripe frequency can be changed according to one of a natural number sequence, a multiple sequence, a power function sequence and an exponential sequence, and in the invention, the stripe frequency is changed according to the multiple sequence (4 times of numerical values); the fringe pattern is equal step phase shift with each step of phase shift amount
Total number of phase shift steps
。
And calculating to obtain the optimal orthogonal direction surface shape gradient distribution by taking the square sum of the slopes in the orthogonal direction as an evaluation index in the slope gradient evaluation function in the third step.
Claims (7)
1. The utility model provides a portable mirror surface/automatic measuring device of class mirror surface appearance which characterized in that: the system comprises a display module (1), an image acquisition module (2), a telescopic frame (3), an objective table (4), an embedded development board (11) and a computer (5);
the embedded development board is in wireless connection with the computer through the Wi-Fi module;
the telescopic frame comprises an upper group of parallel guide rails, a middle group of parallel guide rails and a lower group of parallel guide rails, a telescopic rod and a telescopic adjusting mechanism for adjusting the telescopic rod, wherein the guide rails are perpendicular to the telescopic rod, two ends of each guide rail are respectively fixed with the telescopic rod, and the telescopic adjusting mechanism is connected with the embedded development board through a data transmission control line;
the display module comprises a display screen and a linear motor, the linear motor is fixed with the display module, the linear motor is respectively arranged on the middle and lower groups of parallel guide rails of the telescopic frame, and the display screen faces the objective table; the display screen and the linear motor are respectively connected with the embedded development board through data transmission control lines;
the image acquisition module comprises a camera with an automatic focusing function, a sensor for determining the distance between a measured object and the camera and a linear motor; the linear motor is fixed with the image acquisition module and is respectively arranged on the middle and upper groups of parallel guide rails of the telescopic frame; the object stage is positioned on the front focal plane of the camera, the display screen, the object stage and the camera are placed in a triangular structure, and an object to be measured on the object stage and a reflected image of the display screen are positioned in the depth of field range of the camera; the sensor and the linear motor are respectively connected with the embedded development board through data transmission control lines;
the display screen displays the concentric circular ring sine stripes based on time domain frequency conversion phase shift and received by the embedded development board, and the camera collects the deformed stripe pattern modulated and reflected by the surface of the measured object and inputs the deformed stripe pattern into the computer through the embedded development board.
2. A portable mirror/mirror-like topography automatic measuring device according to claim 1, characterized in that: the sensor is one of a laser displacement sensor, an ultrasonic distance sensor and an infrared distance sensor.
3. A portable mirror/mirror-like topography automatic measuring device according to claim 1, characterized in that: the computer controls the linear motor and the telescopic adjusting mechanism to move through the embedded development board, and the positions and the angles of the display module and the image acquisition module are automatically adjusted.
4. A portable automatic measurement method for the appearance of a mirror/mirror-like surface is characterized by comprising the following steps:
step one, the installation and adjustment of a measuring device
Placing an object stage and an object to be measured on the bottom surface of a telescopic frame, and respectively and preliminarily installing a display module and an image acquisition module on two groups of parallel guide rails of a middle parallel guide rail, a lower parallel guide rail, a middle parallel guide rail and an upper parallel guide rail of the telescopic frame; the display screen of the display module and the camera of the image acquisition module face the objective table, and the display screen, the objective table and the camera are in triangular structure positions; the Wi-Fi module of the embedded development board is wirelessly connected with a computer, and the computer controls a distance sensor in an image acquisition module, controls a linear motor in a display module and the image acquisition module, controls the state of a telescopic adjusting mechanism in a telescopic frame and controls the focusing amount of a camera, so that an object to be measured on an object stage and a reflected display screen image thereof are positioned in the depth of field range of the camera;
step two, displaying and acquiring stripe images
The computer obtains the coding parameters of the concentric ring sine stripes based on time domain frequency conversion phase shift through software design, and the coding parameters are transmitted to the display module through Wi-Fi; generating an isotropic concentric ring sine stripe image for measurement by an embedded development board in a display module according to parameter coding, transmitting the image to a display screen through a data transmission control line, reflecting the surface of an object to be measured, acquiring the image by a camera in an image acquisition module, and inputting the image into a computer through a Wi-Fi module of the embedded development board;
step three, demodulation and surface shape reconstruction of stripe images
Processing each single-frequency deformed stripe image obtained by a camera in an image acquisition module by adopting a least square N-step phase shift demodulation algorithm, and calculating to obtain each single-frequency truncation phase; processing by adopting a time domain phase expansion method to obtain absolute phase distribution related to the three-dimensional shape of the object to be measured under the highest frequency; under the constraint of the light reflection law, combining system geometric structure parameters and distance parameters fed back by a distance sensor in an image acquisition module, calculating absolute phase distribution to obtain surface shape slopes in all directions of the object to be measured, and obtaining surface shape gradient distribution in the optimal orthogonal direction of the object to be measured according to a slope gradient evaluation function; and then reconstructing by adopting a gradient integral algorithm to obtain the three-dimensional surface shape distribution of the object to be measured.
5. A method for automatic measurement of portable mirror/mirror-like topography according to claim 4, characterized in that: in the concentric ring sine stripe image based on time domain frequency conversion phase shift, the stripe frequency is changed in one of a natural number sequence, a multiple sequence, a power function sequence and an exponent sequence.
6. A method for automatic measurement of portable mirror/mirror-like topography according to claim 4, characterized in that: and calculating to obtain the optimal orthogonal direction surface shape gradient distribution by taking the slope square sum in the orthogonal direction as an evaluation index according to the slope gradient evaluation function in the step three.
7. A method for automatic measurement of portable mirror/mirror-like topography according to claim 5, characterized in that: the stripe frequency adopts a multiple sequence change method; the fringe pattern is equal step phase shift with each step of phase shift theta
，NFor the total number of phase shift steps,N≥4。
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