Direct-writing spray head based on plasma surface modification, direct-writing system device comprising same and direct-writing method
Technical Field
The invention belongs to the technical field of 3D printing, and relates to a direct-writing nozzle based on plasma surface modification, a direct-writing system device comprising the same and a direct-writing method.
Background
The ink direct-writing printing technology belongs to the additive manufacturing technology and is a non-contact printing forming technology. The ink material stored in the charging barrel is connected with the nozzle, and the ink is extruded out of the nozzle and formed on the substrate through a control system such as piston extrusion, screw extrusion and the like.
CN210974941U discloses a melting direct-writing nozzle, which comprises a storage barrel, wherein a heating device and a heat insulation plate are sequentially arranged outside the storage barrel, the storage barrel comprises a barrel body, a fixed seat and a discharge nozzle, the fixed seat and the discharge nozzle are respectively arranged at two end parts of the barrel body, one end of the fixed seat of the storage barrel is provided with a feed inlet, and the discharge nozzle is provided with a filament outlet needle head; wherein, a needle head heat preservation piece is sleeved outside the silk outlet needle head; the heating device comprises a heating coil, the heating coil is arranged on the outer wall of the cylinder body and uniformly wound along the axial direction of the cylinder body; the heat insulating board set up in heating device's the outside just forms the thermal-insulated chamber with heating device looks adaptation, the heat insulating board portion at storage barrel both ends is equipped with first through-hole and second through-hole respectively, the syringe needle heat preservation is located in the first through-hole, the barrel passes the second through-hole, the fixing base is fixed with the heat insulating board.
CN102019240A discloses an electrospinning direct-writing nozzle capable of start-stop control, which comprises a hollow sleeve with a nozzle, a threaded adjusting plug, a coil, an armature, a return spring, a probe and an exhaust pipeline; the front end of the hollow sleeve with the spray head is provided with a spray hole and a filling hole, the threaded adjusting plug is arranged at the rear end of the hollow sleeve with the spray head, the coil is sleeved outside the hollow sleeve with the spray head, the armature is arranged in the hollow sleeve with the spray head, the probe is fixedly connected with the armature, the front end of the probe is positioned in the spray hole at the front end of the hollow sleeve with the spray head, the rear end of the probe is fixedly connected with one end of a return spring, the other end of the return spring is fixedly connected with the inner end of the threaded adjusting plug, the exhaust pipeline is arranged on the threaded adjusting plug, the inner end of the exhaust.
CN108839337A discloses a 3D printing nozzle with a plasma processing device, a 3D printer, comprising a plasma processing device, wherein the plasma cleaning device comprises an inner cylinder, a coil and an outer cylinder, the inner cylinder is composed of a dielectric layer, the inner cylinder comprises an air inlet, air or nitrogen is introduced from the air inlet, the inner cylinder and an ejection port are coaxially arranged, and the diameter of the inner cylinder is larger than that of the heating device; a layer of spiral coil is formed on the outer wall of the inner barrel, and two ends of the spiral coil are respectively connected with two poles of a radio frequency power supply; the outer cylinder is cylindrical and is arranged coaxially with the inner cylinder, and a space between the outer cylinder and the inner cylinder is provided with an air suction device which absorbs particles or gas generated around the ejection port.
The existing methods for partial plasma treatment of material surfaces are usually performed by means of a mask. By covering the surface of the material to be processed with a layer of film with patterns, the covered surface is not processed by plasma in the plasma processing process, the uncovered surface is processed, when the pattern of the processed surface needs to be changed, a mask needs to be manufactured again, the process of manufacturing the mask is time-consuming and labor-consuming, the whole work flow needs a plurality of manual operation steps, and time is spent. Injection molding of hydrogels also requires the creation of molds on demand, as well as manual handling by a human, with significant time and effort, as shown in fig. 2.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a direct-writing spray head based on plasma surface modification, a direct-writing system device comprising the same and a direct-writing method.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a direct-writing nozzle based on plasma surface modification, which comprises a mounting plate and a driving assembly arranged on the mounting plate, wherein the driving assembly is provided with a plasma nozzle and an ink injector in a transmission manner; the driving assembly is used for driving the plasma spray head to move along the vertical direction and/or extruding ink in the ink injector.
According to the invention, a 3D printing ink direct writing mode is adopted, firstly, selective hydrophilic modification is carried out on the surface of the material through a plasma nozzle according to the track of a preset pattern, and then, the ink is injected into the area subjected to hydrophilic modification, so that the preset pattern is displayed. Compared with the traditional mask method, the direct-writing spray head provided by the invention can reduce the waste of the mask, reduce the participation degree of manpower, reduce the time cost, and can adopt thinner lines to draw the pattern, thereby improving the manufacturing efficiency and the pattern precision and realizing the programmed, automatic and integrated pattern drawing.
It should be noted that the direct-writing nozzle provided by the invention can not only realize the drawing of the hydrophilic pattern on the hydrophobic surface by using plasma treatment, but also realize the reliable adhesion between the hydrophobic material and the hydrophilic material.
As a preferable technical solution of the present invention, the ink injector includes an outer cylinder and a piston rod inserted into the outer cylinder, the outer cylinder is detachably fixed on the mounting plate, the piston rod is fixed on the driving assembly, and the piston rod is driven by the driving assembly to move in a vertical direction, so as to extrude ink in the outer cylinder.
Preferably, the outer cylinder is fixed on the mounting plate through a clamp.
It should be noted that, in the invention, the outer cylinder does not move up and down along with the driving component, the driving component only drives the piston rod to move along the vertical direction, and the ink injected into the outer cylinder is extruded out through the movement of the piston rod; in order to realize the function, the outer cylinder needs to be fixed on the mounting plate, a detachable fixing mode is preferably adopted in consideration of the flexibility of replacement and the convenience of subsequent maintenance, the detachable fixing mode is not particularly required and limited, and exemplarily, a clamp, a hoop, a buckle or a bolt and the like can be selected.
As a preferred technical scheme of the present invention, the driving assembly includes a sliding block, a screw rod and a driving motor, the screw rod is vertically disposed, the screw rod penetrates through the sliding block, one end of the screw rod is connected to the driving motor, and the sliding block is driven by the driving motor to move along the screw rod.
Preferably, the piston rod is fixed on the sliding block, the plasma nozzle is fixed on one side surface of the sliding block, and the sliding block drives the piston rod and the plasma nozzle to move along the vertical direction under the action of the driving motor.
As a preferable technical scheme of the invention, the mounting plate is also vertically provided with a guide rail, the guide rail is positioned at one side of the driving assembly, and the plasma nozzle is movably arranged on the guide rail.
Preferably, the plasma nozzle is driven by the slide block to move along the guide rail in the vertical direction.
Preferably, the guide rail is detachably fixed on the mounting plate.
Preferably, the guide rail is fixed to the mounting plate by bolts.
As a preferred technical solution of the present invention, the ink injected into the ink injector includes hydrogel and/or ionic liquid gel.
In a second aspect, the present invention provides a direct-writing system device based on plasma surface modification, where the direct-writing system device includes a direct-writing nozzle, a mounting base, and an operation console, and the direct-writing nozzle is the direct-writing nozzle of the first aspect.
The installation base is used for driving the direct-writing spray head to move in the horizontal direction, the operating platform is located under the direct-writing spray head, and the base material is placed on the operating platform.
As a preferred technical solution of the present invention, the mounting base includes a driving guide rail horizontally arranged, and the direct writing nozzle is movably arranged on the driving guide rail and moves in the horizontal direction along the driving guide rail; and support rods are arranged at two ends of the driving guide rail.
Preferably, a driving part is arranged at the bottom of the operating platform and used for driving the operating platform to move in the depth direction.
It should be noted that the driving element of the present invention is used for driving the operation platform to move in the depth direction, and the structure and type of the driving element are not specifically required or limited, and for example, a screw rod drive, an air cylinder drive, a sliding rail drive, or the like may be adopted. It will of course be understood that any drive member, known in the art or not known in the art, may be used in the present invention, provided that it is capable of performing the functions required by the present invention and that it satisfies the structural layout rationality.
In the present invention, the direct write head, the operation table, and the driving rail respectively undertake the movement of the plasma head and the ink injector in a single direction, specifically: the direct-writing nozzle drives the plasma nozzle to move in the vertical direction and completes ink injection, namely the direct-writing nozzle undertakes the movement in the z-axis direction in the three-dimensional coordinate system; the operation platform drives the base material to move in the depth direction, namely the operation platform bears the movement in the y-axis direction in the three-dimensional coordinate system; the driving guide rail drives the plasma nozzle and the ink injector to move in the horizontal direction, namely the driving guide rail bears the movement in the x-axis direction in a three-dimensional coordinate system, and the matched movement of the direct-writing nozzle, the operating platform and the driving guide rail realizes the plasma treatment on the surface of the base material according to the preset pattern and displays the preset pattern by injecting ink.
In a third aspect, the present invention provides a direct writing method for performing direct writing by using the direct writing system apparatus of the second aspect, where the direct writing method includes:
the base material is placed on an operation table, the plasma nozzle carries out hydrophilization treatment on the base material along a preset pattern track, the ink injector injects ink to the surface of the treated base material, and the ink forms a preset pattern on the surface of the base material.
In a preferred embodiment of the present invention, the moving speed of the plasma nozzle during the hydrophilization treatment is 400 to 800mm/min, for example, 400mm/min, 420mm/min, 440mm/min, 460mm/min, 480mm/min, 500mm/min, 520mm/min, 540mm/min, 560mm/min, 580mm/min, 600mm/min, 620mm/min, 640mm/min, 660mm/min, 680mm/min, 700mm/min, 720mm/min, 740mm/min, 760mm/min, 780mm/min, or 800mm/min, but is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are also applicable, and more preferably 450 to 750 mm/min.
Preferably, the vertical distance between the plasma spray nozzle and the substrate is 10 to 20mm, for example, 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable, and more preferably 14 to 20 mm.
Preferably, the plasma power of the plasma shower head is 100 to 200W, for example, 100W, 110W, 120W, 130W, 140W, 150W, 160W, 170W, 180W, 190W or 200W, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable, and more preferably 140 to 170W.
Preferably, the plasma pressure applied to the plasma shower head is 0.01 to 0.1MPa, and may be, for example, 0.01MPa, 0.02MPa, 0.03MPa, 0.04MPa, 0.05MPa, 0.06MPa, 0.07MPa, 0.08MPa, 0.09MPa or 0.1MPa, but is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are also applicable, and more preferably 0.03 to 0.06 MPa.
The research shows that four parameters of the moving speed of the plasma spray head, the vertical distance between the spray port of the plasma spray head and the base material, the plasma power and the plasma pressure influence the width of the pattern line, the width of the pattern line is related to the fineness degree of the finally formed pattern, and the pattern can be drawn by adopting the thinner line, so that a more fine and complicated pattern can be obtained. Therefore, in the direct writing process, it is necessary to control the moving speed of the plasma shower head, the vertical distance between the ejection port of the plasma shower head and the substrate, the plasma power, and the plasma pressure, thereby controlling the width of the pattern line. Based on the line width, the invention researches the specific influence relationship between the four parameters of the moving speed, the vertical distance, the plasma power and the plasma pressure and the line width, and tests show that the line width is gradually reduced along with the increase of the moving speed; the line width gradually decreases with increasing vertical distance; the line width gradually increases along with the increase of the plasma power; the line width gradually increases as the plasma pressure increases. Through the relationship, the related parameters of the plasma spray head can be guided to be reasonably set by a person skilled in the art, so that a finer pattern can be obtained.
In a preferred embodiment of the present invention, the width of the pattern lines formed on the surface of the substrate is 2 to 10mm, and may be, for example, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm or 10mm, but the present invention is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable, and more preferably 4 to 5 mm.
The system refers to an equipment system, or a production equipment.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, a 3D printing ink direct writing mode is adopted, firstly, selective hydrophilic modification is carried out on the surface of the material through a plasma nozzle according to the track of a preset pattern, and then, the ink is injected into the area subjected to hydrophilic modification, so that the preset pattern is displayed. Compared with the traditional mask method, the direct-writing spray head provided by the invention can reduce the waste of the mask, reduce the participation degree of manpower, reduce the time cost, and can adopt thinner lines to draw the pattern, thereby improving the manufacturing efficiency and the pattern precision and realizing the programmed, automatic and integrated pattern drawing.
Drawings
FIG. 1 is a schematic structural diagram of a direct write nozzle according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a partial structure of a direct write nozzle according to an embodiment of the present invention;
FIG. 3 is a graph of the moving speed and the vertical distance versus the line width obtained from the tests of examples 7 and 8;
fig. 4 is a graph showing the relationship between the plasma power and the plasma pressure and the line width obtained in examples 9 and 10 of the present invention.
Wherein, 1-mounting plate; 2-driving the motor; 3-a slide block; 4-a screw rod; 5-a piston rod; 6-outer cylinder; 7-a clamp; 8-a guide rail; 9-plasma shower nozzle.
Detailed Description
It is to be understood that in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be taken as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
It should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
In one embodiment, the invention provides a direct-writing ink jet head based on plasma surface modification, which is shown in fig. 1 and comprises a mounting plate 1 and a driving assembly arranged on the mounting plate 1, wherein a plasma jet head 9 and an ink injector are vertically arranged on the driving assembly side by side, and ink injected into the ink injector comprises hydrogel and/or ionic liquid gel. The driving component is used for driving the plasma spray head 9 to move along the vertical direction and/or extruding the ink in the ink injector.
The ink injector comprises an outer cylinder 6 and a piston rod 5 inserted into the outer cylinder 6, wherein the outer cylinder 6 is detachably fixed on the mounting plate 1, and optionally, the outer cylinder 6 is fixed on the mounting plate 1 through a clamp 7. The piston rod 5 is fixed on the driving component, and the piston rod 5 is driven by the driving component to move along the vertical direction, so that the ink in the outer cylinder 6 is extruded out. In the whole extrusion process, the outer cylinder 6 cannot move up and down along with the driving component, the driving component only drives the piston rod 5 to move in the vertical direction, and ink injected into the outer cylinder 6 is extruded out through the movement of the piston rod 5.
The driving assembly comprises a sliding block 3, a screw rod 4 and a driving motor 2, the screw rod 4 is vertically arranged, the screw rod 4 penetrates through the sliding block 3, one end of the screw rod 4 is connected with the driving motor 2, and the sliding block 3 is driven by the driving motor 2 to move along the screw rod 4. A piston rod 5 is fixed on the sliding block 3, a plasma sprayer 9 is fixed on one side face of the sliding block 3, and the sliding block 3 drives the piston rod 5 and the plasma sprayer 9 to move along the vertical direction under the action of the driving motor 2.
As shown in fig. 2, a guide rail 8 is further vertically disposed on the mounting plate 1, and optionally, the guide rail 8 is detachably fixed on the mounting plate 1 by bolts. The guide rail 8 is positioned at one side of the driving component, and the plasma nozzle 9 is movably arranged on the guide rail 8. The plasma shower nozzle 9 is driven by the slide block 3 to move in the vertical direction along the guide rail 8.
In another embodiment, the present invention provides a direct-writing system apparatus based on plasma surface modification, the direct-writing system apparatus includes a direct-writing nozzle, a mounting base, and a console (wherein, the mounting base and the console are not shown in the figures), and the direct-writing nozzle is the direct-writing nozzle provided in the above embodiment. The installation base is used for driving the direct-writing spray head to move in the horizontal direction, the operating platform is located under the direct-writing spray head, and the base material is placed on the operating platform. The installation base includes the drive guide rail 8 that the level set up, and the activity of directly writing the shower nozzle sets up on drive guide rail 8 to move on the horizontal direction along drive guide rail 8, 8 both ends of drive guide rail are provided with the bracing piece, and the operation panel bottom is provided with the driving piece, and the driving piece is used for driving the operation panel and removes along the depth direction. The direct write head, the console and the drive rail respectively undertake the movement of the plasma head 9 and the ink injector in a single direction, specifically: the direct-writing nozzle drives the plasma nozzle 9 to move in the vertical direction and complete ink injection, namely the direct-writing nozzle undertakes the movement in the z-axis direction in the three-dimensional coordinate system; the operation platform drives the base material to move in the depth direction, namely the operation platform bears the movement in the y-axis direction in the three-dimensional coordinate system; the driving guide rail drives the plasma nozzle 9 and the ink injector to move in the horizontal direction, namely the driving guide rail bears the movement in the x-axis direction in the three-dimensional coordinate system, and the matched movement of the direct-writing nozzle, the operating platform and the driving guide rail realizes the plasma treatment on the surface of the base material according to the preset pattern and displays the preset pattern by injecting ink.
Example 1
The embodiment provides a direct writing method, which uses a direct writing system device provided in a specific embodiment to perform 3D direct writing by using hydrogel as ink, and the direct writing method specifically includes the following steps:
(1) the base material is placed on an operation table, the plasma nozzle 9 carries out hydrophilization treatment on the base material along a preset pattern track, the moving speed of the plasma nozzle 9 in the hydrophilization treatment process is 400mm/min, the vertical distance between the ejection port of the plasma nozzle 9 and the base material is 10mm, the plasma power is 200W, and the plasma pressure is 0.1 MPa;
(2) after the hydrophilization treatment is finished, the ink injector injects hydrogel to the surface of the treated base material, and the hydrogel forms lines with the width of 10mm on the surface of the base material and forms a preset pattern by the lines.
Example 2
The embodiment provides a direct writing method, which uses a direct writing system device provided in a specific embodiment to perform 3D direct writing by using ionic liquid gel as ink, and the direct writing method specifically includes the following steps:
(1) the base material is placed on an operation table, the plasma nozzle 9 carries out hydrophilization treatment on the base material along a preset pattern track, the moving speed of the plasma nozzle 9 in the hydrophilization treatment process is 450mm/min, the vertical distance between the ejection port of the plasma nozzle 9 and the base material is 12mm, the plasma power is 180W, and the plasma pressure is 0.08 MPa;
(2) after the hydrophilization treatment is finished, the ink injector injects the ionic liquid gel to the treated surface of the base material, the ionic liquid gel forms lines with the width of 8mm on the surface of the base material, and the lines form a preset pattern.
Example 3
The embodiment provides a direct writing method, which uses a direct writing system device provided in a specific embodiment to perform 3D direct writing by using hydrogel as ink, and the direct writing method specifically includes the following steps:
(1) the base material is placed on an operation table, the plasma nozzle 9 carries out hydrophilization treatment on the base material along a preset pattern track, the moving speed of the plasma nozzle 9 in the hydrophilization treatment process is 550mm/min, the vertical distance between the ejection port of the plasma nozzle 9 and the base material is 14mm, the plasma power is 170W, and the plasma pressure is 0.06 MPa;
(2) after the hydrophilization treatment is finished, the ink injector injects hydrogel to the surface of the treated base material, and the hydrogel forms lines with the width of 6mm on the surface of the base material and forms a preset pattern by the lines.
Example 4
The embodiment provides a direct writing method, which uses a direct writing system device provided in a specific embodiment to perform 3D direct writing by using ionic liquid gel as ink, and the direct writing method specifically includes the following steps:
(1) the base material is placed on an operation table, the plasma nozzle 9 carries out hydrophilization treatment on the base material along a preset pattern track, the moving speed of the plasma nozzle 9 in the hydrophilization treatment process is 600mm/min, the vertical distance between the ejection port of the plasma nozzle 9 and the base material is 16mm, the plasma power is 140W, and the plasma pressure is 0.05 MPa;
(2) after the hydrophilization treatment is finished, the ink injector injects ionic liquid gel to the treated surface of the base material, the ionic liquid gel forms lines with the width of 5mm on the surface of the base material, and the lines form a preset pattern.
Example 5
The embodiment provides a direct writing method, which uses a direct writing system device provided in a specific embodiment to perform 3D direct writing by using hydrogel as ink, and the direct writing method specifically includes the following steps:
(1) the base material is placed on an operation table, the plasma nozzle 9 carries out hydrophilization treatment on the base material along a preset pattern track, the moving speed of the plasma nozzle 9 in the hydrophilization treatment process is 750mm/min, the vertical distance between the ejection port of the plasma nozzle 9 and the base material is 18mm, the plasma power is 120W, and the plasma pressure is 0.03 MPa;
(2) after the hydrophilization treatment is finished, the ink injector injects hydrogel to the surface of the treated base material, and the hydrogel forms lines with the width of 4mm on the surface of the base material and forms a preset pattern by the lines.
Example 6
The embodiment provides a direct writing method, which uses a direct writing system device provided in a specific embodiment to perform 3D direct writing by using ionic liquid gel as ink, and the direct writing method specifically includes the following steps:
(1) the base material is placed on an operation table, the plasma nozzle 9 carries out hydrophilization treatment on the base material along a preset pattern track, the moving speed of the plasma nozzle 9 in the hydrophilization treatment process is 800mm/min, the vertical distance between the ejection port of the plasma nozzle 9 and the base material is 20mm, the plasma power is 100W, and the plasma pressure is 0.01 MPa;
(2) after the hydrophilization treatment is finished, the ink injector injects ionic liquid gel to the treated surface of the base material, the ionic liquid gel forms lines with the width of 2mm on the surface of the base material, and the lines form a preset pattern.
Example 7
This example investigated the relationship between the moving speed of the plasma shower head and the line width. Controlling the plasma power, the plasma pressure and the vertical distance to be unchanged, and testing the line width at different moving speeds, wherein the specific test conditions are as follows: the plasma power was set at 140W, the plasma pressure was set at 0.04MPa, and the vertical distance was set at 16 mm. The moving speed is adjusted to 450mm/min, 500mm/min, 550mm/min, 600mm/min, 650mm/min, 700mm/min and 750mm/min in sequence, the line widths at different moving speeds are respectively measured, and the data are summarized and drawn into a relation chart shown in figure 3.
As can be seen from fig. 3, the line width gradually decreases as the moving speed increases.
Example 8
This example investigated the relationship between the vertical distance between the ejection orifice of the plasma shower head and the substrate and the line width. Controlling the plasma power, the plasma pressure and the moving speed to be unchanged, and testing the line width under different vertical distances, wherein the specific test conditions are as follows: the plasma power was set at 140W, the plasma pressure was set at 0.03MPa, and the moving speed was set at 650 mm/min. The vertical distances are adjusted to 14mm, 15mm, 16mm, 17mm, 18mm, 19mm and 20mm in sequence, the line widths at different vertical distances are measured respectively, and the data are summarized and drawn into a relational graph shown in fig. 3.
As can be seen from fig. 3, the line width gradually decreases with increasing vertical distance.
Example 9
This example investigated the relationship between plasma power and line width. Controlling the plasma pressure, the vertical distance and the moving speed to be unchanged, and testing the line width under different plasma powers, wherein the specific test conditions are as follows: the plasma pressure was set to 0.03MPa, the vertical distance was set to 18mm, and the moving speed was set to 650 mm/min. The plasma power is sequentially adjusted to 140W, 145W, 150W, 155W, 160W, 165W and 170W, the line width under different plasma powers is respectively measured, and the data are summarized and plotted as a relation graph shown in FIG. 4.
As can be seen from fig. 4, the line width gradually increases as the plasma power increases.
Example 10
This example investigated the relationship between plasma pressure and line width. Controlling the plasma power, the vertical distance and the moving speed to be unchanged, and testing the line width under different plasma pressures, wherein the specific test conditions are as follows: the plasma power was set at 140W, the vertical distance was set at 18mm, and the moving speed was set at 650 mm/min. The plasma power was adjusted to 0.03MPa, 0.035MPa, 0.04MPa, 0.045MPa, 0.05MPa, 0.055MPa and 0.06MPa in sequence, and the line widths at different plasma powers were measured respectively, and the data were summarized and plotted as shown in fig. 4.
As can be seen from fig. 4, the line width gradually increases as the plasma pressure increases.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.