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CN113013319B - Low-frequency active vibration suppression system based on integrated structure - Google Patents

Low-frequency active vibration suppression system based on integrated structure Download PDF

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CN113013319B
CN113013319B CN202110210254.6A CN202110210254A CN113013319B CN 113013319 B CN113013319 B CN 113013319B CN 202110210254 A CN202110210254 A CN 202110210254A CN 113013319 B CN113013319 B CN 113013319B
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vibration suppression
piezoelectric
fiber composite
layer
vibration
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CN113013319A (en
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周静
周晶晶
侯大军
沈杰
陈文�
赵利军
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Wuhan University of Technology WUT
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041Beam type
    • H10N30/2042Cantilevers, i.e. having one fixed end
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Abstract

The invention provides a low-frequency active vibration suppression system based on an integrated structure, which comprises a vibration suppression function device and an active vibration suppression system device, wherein the vibration suppression function device structure comprises a piezoelectric fiber composite layer, two metal electrode layers respectively covering the top surface and the bottom surface of the piezoelectric fiber composite layer and two packaging layers for packaging the piezoelectric fiber composite layer and the metal electrode layers into a whole; the invention aims to solve the problem of low vibration suppression efficiency in a low-frequency vibration range in the prior art, provides a design idea based on an integrated structure, and through the embedded design of a vibration suppression function device part, the vibration suppression function device can be embedded into a vibration mechanism through a packaging layer in a conformal manner by virtue of the flexible characteristic of a piezoelectric fiber composite layer when in use, so that the vibration loss in the process of transmitting the vibration energy of the vibration mechanism to the vibration suppression function device is obviously reduced, and the mechanical coupling efficiency of the vibration suppression function device and the vibration mechanism is greatly improved.

Description

一种基于一体化结构的低频主动抑振系统A Low Frequency Active Vibration Suppression System Based on Integrated Structure

技术领域technical field

本发明涉及机械振动抑制领域,具体涉及一种基于一体化结构的低频主动抑振系统。The invention relates to the field of mechanical vibration suppression, in particular to a low-frequency active vibration suppression system based on an integrated structure.

背景技术Background technique

振动是人们日常生活中常见的一种自然现象,特别是在工程技术中,如桥体因海浪冲刷产生的振动;铁轨因列车飞速摩擦产生的振动;飞机在飞行过程中因气流冲击产生的振动;车床和模具因摩擦产生的振动等等。一般而言,将自然界中的振动分为有利振动和不利振动,而不利振动往往会带来一些损伤,如精密仪器因产生不利振动而使精确度大打折扣;构件因处于长时间的振动而出现疲劳损伤,导致器件的使用寿命大大缩减;有些振动还可能引起结构破坏性形变,如桥体因共振而塌陷、飞机尾翼因颤振往往造成严重的事故;此外,在人们日常生活中,某些设备因振动而产生的噪音会给人们的生活造成很多困扰。这些不利振动往往是人们不希望发生的,因此如何有效地控制这些不利振动亟待解决。Vibration is a common natural phenomenon in people's daily life, especially in engineering technology, such as the vibration of the bridge body due to the erosion of waves; the vibration of railroad tracks due to the rapid friction of trains; ; Vibration of lathes and molds due to friction, etc. Generally speaking, vibrations in nature are divided into favorable vibrations and unfavorable vibrations, and unfavorable vibrations often cause some damage, such as the accuracy of precision instruments is greatly reduced due to unfavorable vibrations; components appear due to long-term vibrations. Fatigue damage, resulting in greatly reduced service life of the device; some vibrations may also cause destructive deformation of the structure, such as bridge body collapse due to resonance, aircraft tail due to flutter often cause serious accidents; in addition, in people's daily life, some The noise generated by equipment vibration will cause a lot of troubles in people's life. These unfavorable vibrations are often undesirable, so how to effectively control these unfavorable vibrations needs to be solved urgently.

根据振动控制所需外部能源的多少,研究者们将其主要分为三类:被动振动控制、主动振动控制和半主动振动控制。被动振动控制主要通过吸振或隔振来降低结构的振动,不需要提供额外的能量,其适用的频率范围较窄,缺乏环境适应性,当结构体受到具有高度不确定性的宽频带扰动时,被动振动控制有很大的局限性。主动振动控制是通过引入与主体结构振动方向相反的驱动力作为抑振元件的一部分,然后通过不同的算法对结构体进行控制,使其对干扰具有更好的响应特性,这种方式具有灵活性,能够适应宽频带的振动,受到人们的青睐,具有更广泛的应用前景。对结构进行主动振动控制时,其振动信号必须反馈至控制系统,随后控制系统做出相应的反应对结构体实施控制,这就要求引入的抑振元件同时具有传感与驱动能力。According to the amount of external energy required for vibration control, researchers divide it into three categories: passive vibration control, active vibration control and semi-active vibration control. Passive vibration control mainly reduces the vibration of the structure through vibration absorption or vibration isolation, without providing additional energy, its applicable frequency range is narrow, and it lacks environmental adaptability. When the structure is disturbed by a broadband with high uncertainty, Passive vibration control has significant limitations. Active vibration control is to introduce the driving force opposite to the vibration direction of the main structure as part of the vibration suppression element, and then control the structure through different algorithms to make it have better response characteristics to disturbances. This method is flexible , can adapt to the vibration of wide frequency band, is favored by people, and has a wider application prospect. When actively controlling the vibration of a structure, the vibration signal must be fed back to the control system, and then the control system will respond accordingly to control the structure, which requires the introduction of vibration suppression components with both sensing and driving capabilities.

构成抑振元件的智能材料是现代技术发展的产物,形状记忆合金(SMA)、压电材料、电流变材料以及超磁致伸缩材料等智能材料的出现,使振动主动控制技术得到了飞速发展。其中压电材料是一类实现机械能与电能之间相互转换的智能材料,这类材料同时具有驱动性强、传感能力突出、响应速度快等特点,在驱动和传感等领域得到了广泛应用。因此,采用压电材料作为抑振元件对主体结构进行主动振动控制具有很大的应用前景。The intelligent materials constituting the vibration suppression components are the product of the development of modern technology. The emergence of intelligent materials such as shape memory alloy (SMA), piezoelectric materials, electrorheological materials and giant magnetostrictive materials has made the active vibration control technology develop rapidly. Among them, piezoelectric materials are a kind of intelligent materials that realize the mutual conversion between mechanical energy and electrical energy. This type of material has the characteristics of strong drive, outstanding sensing ability, and fast response speed, and has been widely used in the fields of drive and sensing. . Therefore, the active vibration control of the main structure using piezoelectric materials as vibration suppression elements has great application prospects.

传统压电式主动抑振系统存在振动源机构与压电抑振器件之间的机械耦合效率问题,由于两者都是独立存在,一般通过简单的局部化学粘合、局部焊接和物理紧固等手段实现两者之间的机械连接,所以振动源机构产生的不利振动在传导到压电抑振器件的过程中,或多或少会存在振动损耗和耦合效率偏低的问题。The traditional piezoelectric active vibration suppression system has the problem of mechanical coupling efficiency between the vibration source mechanism and the piezoelectric vibration suppression device. Since both of them exist independently, they are generally solved by simple local chemical bonding, local welding and physical fastening, etc. Therefore, the adverse vibration generated by the vibration source mechanism will more or less have the problems of vibration loss and low coupling efficiency when it is transmitted to the piezoelectric vibration suppression device.

发明内容Contents of the invention

为了解决现有技术存在低频振动范围内抑振效率偏低的问题,本发明的目的在于提供一种基于一体化结构的低频主动抑振系统,凭借压电纤维复合层的柔性特征,可以将该器件通过封装层共形嵌入到振动机构内部,显著降低了振动机构的振动能传导到抑振功能器件过程中的振动损耗,极大地提高了抑振功能器件与振动机构的机械耦合效率。In order to solve the problem of low vibration suppression efficiency in the low-frequency vibration range in the prior art, the purpose of the present invention is to provide a low-frequency active vibration suppression system based on an integrated structure. With the flexible characteristics of the piezoelectric fiber composite layer, the The device is conformally embedded into the vibration mechanism through the packaging layer, which significantly reduces the vibration loss in the process of the vibration energy of the vibration mechanism being transmitted to the vibration suppression function device, and greatly improves the mechanical coupling efficiency between the vibration suppression function device and the vibration mechanism.

本发明是采用了以下技术方案来实现的:The present invention is achieved by adopting the following technical solutions:

一种基于一体化结构的低频主动抑振系统,包括抑振功能器件和主动抑振系统装置;A low-frequency active vibration suppression system based on an integrated structure, including a vibration suppression function device and an active vibration suppression system device;

所述抑振功能器件包括压电纤维复合层、两金属电极层以及两封装层,其中,所述两金属电极层分别覆盖在压电纤维复合层的顶面和底面,所述压电纤维复合层与两金属电极层构成压电纤维复合材料片,所述两封装层从所述压电纤维复合材料片两侧将压电纤维复合层和金属电极层封装成一体;The vibration-suppressing functional device includes a piezoelectric fiber composite layer, two metal electrode layers and two encapsulation layers, wherein the two metal electrode layers respectively cover the top surface and the bottom surface of the piezoelectric fiber composite layer, and the piezoelectric fiber composite layer layer and two metal electrode layers constitute a piezoelectric fiber composite sheet, and the two encapsulation layers encapsulate the piezoelectric fiber composite layer and the metal electrode layer from both sides of the piezoelectric fiber composite sheet;

所述压电纤维复合层包括多条相互平行间隔的压电陶瓷纤维以及多条分别填充设置在每相邻两压电陶瓷纤维之间的环氧树脂纤维,每条压电陶瓷纤维、每条环氧树脂纤维在压电纤维复合层中交替排列。The piezoelectric fiber composite layer includes a plurality of piezoelectric ceramic fibers parallel to each other and a plurality of epoxy resin fibers respectively filled and arranged between every two adjacent piezoelectric ceramic fibers, each piezoelectric ceramic fiber, each Epoxy fibers are arranged alternately in the piezoelectric fiber composite layer.

进一步地,为了实现低频主动抑振应用,主动抑振系统装置包括电性连接的信号发生器、高压放大器及控制器;Further, in order to realize low-frequency active vibration suppression applications, the active vibration suppression system device includes an electrically connected signal generator, a high-voltage amplifier, and a controller;

其中,所述控制器控制信号发生器产生交流信号,高压放大器将该交流信号放大后对所述抑振功能器件进行驱动。Wherein, the controller controls the signal generator to generate an AC signal, and the high-voltage amplifier amplifies the AC signal to drive the vibration suppression functional device.

进一步地,所述压电纤维复合层的厚度为0.1mm-3mm;在所述压电纤维复合层中,每一所述压电陶瓷纤维的宽度为0.01mm-0.1mm,每一环氧树脂纤维的宽度为0.01mm-0.1mm。Further, the thickness of the piezoelectric fiber composite layer is 0.1mm-3mm; in the piezoelectric fiber composite layer, the width of each piezoelectric ceramic fiber is 0.01mm-0.1mm, and each epoxy resin The width of the fiber is 0.01mm-0.1mm.

进一步地,所述压电纤维复合层是通过将厚度为T=0.1mm-3mm的大尺寸压电陶瓷片等间距d=0.01mm-0.1mm平行排列,并在其缝隙中灌装注入环氧树脂胶粘剂固化后所形成的复合材料块,沿着垂直于压电陶瓷片平面的方向进行精密机械切割后形成的纤维薄片,切割的厚度T1控制在0.1mm-3mm,切割长度不限制,可以依据实际需要,通过调整压电陶瓷片的长度来控制。Further, the piezoelectric fiber composite layer is made by arranging large-scale piezoelectric ceramic sheets with a thickness of T=0.1mm-3mm in parallel at equal intervals d=0.01mm-0.1mm, and filling and injecting epoxy into the gaps thereof. The composite material block formed after the resin adhesive is cured is precision mechanically cut along the direction perpendicular to the plane of the piezoelectric ceramic sheet to form a fiber sheet. The cutting thickness T1 is controlled at 0.1mm-3mm, and the cutting length is not limited. It can be based on The actual needs are controlled by adjusting the length of the piezoelectric ceramic sheet.

进一步地,用于形成压电纤维复合层的压电陶瓷片的材料即所述压电陶瓷纤维的材料可以是锆钛酸铅(PTZ)、铌酸钾钠(KNN)、钛酸钡(BT)等系列陶瓷材料。Further, the material of the piezoelectric ceramic sheet used to form the piezoelectric fiber composite layer, that is, the material of the piezoelectric ceramic fiber can be lead zirconate titanate (PTZ), potassium sodium niobate (KNN), barium titanate (BT ) and other series of ceramic materials.

进一步地,所述金属电极层是通过离子溅射的方式溅射到压电纤维复合层的顶/底面,其材料包括金、银、铜、铂等常用导电金属材料,所述金属电极层的厚度T2可以通过调控溅射时间精确控制在10nm-1000nm范围内,所述金属电极层覆盖的区域为压电纤维复合层的顶/底面。Further, the metal electrode layer is sputtered onto the top/bottom surface of the piezoelectric fiber composite layer by means of ion sputtering, and its material includes common conductive metal materials such as gold, silver, copper, platinum, etc., and the metal electrode layer The thickness T2 can be precisely controlled within the range of 10nm-1000nm by adjusting the sputtering time, and the area covered by the metal electrode layer is the top/bottom surface of the piezoelectric fiber composite layer.

进一步地,所述抑振功能器件还包括两条分别与两金属电极层连接的金属引出箔条,两面金属电极层分别通过两个金属引出箔条从封装层中引出,所述金属引出箔条可以为任意商品化的导电金属箔条。Further, the vibration-suppressing function device also includes two metal lead-out foil strips respectively connected to the two metal electrode layers, and the metal electrode layers on both sides are respectively drawn out from the packaging layer through two metal lead-out foil strips, and the metal lead-out foil strips It can be any commercially available conductive metal foil.

进一步地,所述封装层的材料为玻璃钢片;用于所述封装层的玻璃钢片具体由单层或多层玻纤布经环氧树脂胶粘剂浸润后再经固化形成。其中,采用单层玻纤布的玻璃钢片厚度T3为0.1mm,实际应用过程中,玻璃钢片的厚度T4可以通过调整玻纤布的层数n来调控,T4=n×T3。Further, the material of the packaging layer is a glass fiber reinforced plastic sheet; the glass fiber reinforced plastic sheet used for the packaging layer is specifically formed by curing a single-layer or multi-layer glass fiber cloth soaked with an epoxy resin adhesive. Among them, the thickness T3 of the glass fiber reinforced plastic sheet using a single layer of glass fiber cloth is 0.1 mm. In the actual application process, the thickness T4 of the glass fiber reinforced plastic sheet can be adjusted by adjusting the number n of layers of glass fiber cloth, T4=n×T3.

进一步地,所述抑振功能器件的制备过程为一体化结构的构件过程,该一体化结构的构件过程为:首先,将厚度为T5=T1+2×T2的压电纤维复合材料片的底面贴附在半固化的厚度为T4的玻璃钢片上,利用玻璃钢片上半固化的环氧树脂胶粘剂实现对金属电极层和压电纤维复合层的粘接固化;其次,为了实现抑振功能器件的封装,此后需要将另一片半固化的厚度为T4的玻璃钢片贴附到厚度为T5=T1+2×T2的压电纤维复合材料片的顶面,并固化;其中,两金属引出箔条必须保证从封装体内部延伸出来。Further, the preparation process of the vibration-suppressing functional device is a component process of an integrated structure, and the component process of the integrated structure is: first, the bottom surface of the piezoelectric fiber composite material sheet with a thickness of T5=T1+2×T2 Attached to the semi-cured FRP sheet with a thickness of T4, using the semi-cured epoxy resin adhesive on the FRP sheet to realize the bonding and curing of the metal electrode layer and the piezoelectric fiber composite layer; secondly, in order to realize the packaging of the vibration suppression function device, Afterwards, another semi-cured FRP sheet with a thickness of T4 needs to be attached to the top surface of the piezoelectric fiber composite sheet with a thickness of T5=T1+2×T2 and cured; among them, the two metal lead-out foils must be guaranteed to be from The inside of the package body extends out.

进一步地,所述的基于一体化结构的低频主动抑振系统,其谐振频率f范围为10Hz-50Hz,低频抑振效率e范围为50%-90%。Further, the low-frequency active vibration suppression system based on the integrated structure has a resonant frequency f in the range of 10 Hz-50 Hz, and a low-frequency vibration suppression efficiency e in the range of 50%-90%.

进一步地,所述抑振功能器件的工作模式主要采用压电材料d31模式,兼具部分压电材料d33模式。Further, the working mode of the vibration suppressing functional device mainly adopts the d31 mode of the piezoelectric material, and also has part of the d33 mode of the piezoelectric material.

与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:

(1)传统的抑振功能器件大多是局部化学粘合、局部焊接或者物理紧固到振动机构上来实现两者之间的机械耦合功能的,本发明采用嵌入式思路,借助环氧树脂胶粘剂的超强粘接能力,实现了抑振功能器件与振动机构的全贴合,尤其针对玻璃钢材质的振动机构,还可以实现全嵌入式结构模式,最终实现高效机械耦合,极大强化抑振效率。(1) Most of the traditional anti-vibration devices are partially chemically bonded, partially welded or physically fastened to the vibration mechanism to realize the mechanical coupling function between the two. The super-strong bonding ability realizes the full bonding of the vibration suppression function device and the vibration mechanism, especially for the vibration mechanism made of glass fiber reinforced plastic, and can also realize a fully embedded structure mode, and finally realize efficient mechanical coupling, which greatly enhances the vibration suppression efficiency.

(2)由于压电纤维复合层超薄和纤维柔韧性的特性,在曲面振动机构的应用方面,本发明涉及的抑振功能器件还能实现低频主动抑振系统与振动机构的共形功能,相较于传统抑振功能器件的适用范围更广。(2) Due to the characteristics of the ultra-thin piezoelectric fiber composite layer and fiber flexibility, in the application of the curved surface vibration mechanism, the vibration suppression functional device involved in the present invention can also realize the conformal function of the low-frequency active vibration suppression system and the vibration mechanism, Compared with the traditional anti-vibration function device, the application range is wider.

附图说明Description of drawings

图1为本发明涉及的一种基于一体化结构的低频主动抑振系统中抑振功能器件的结构解析图;Fig. 1 is a structural analysis diagram of a vibration suppression functional device in a low-frequency active vibration suppression system based on an integrated structure related to the present invention;

图2为本发明的具体实施方式的基于一体化结构的低频主动抑振系统的主动抑振系统装置以及性能测试平台实物图;Fig. 2 is the physical figure of the active vibration suppression system device and the performance test platform of the low-frequency active vibration suppression system based on the integrated structure according to the embodiment of the present invention;

图3为采用悬臂梁抑振片形式的抑振功能器件的实物图;Fig. 3 is the physical diagram of the vibration suppression function device in the form of a cantilever beam vibration suppression plate;

图4为图3中压电纤维复合材料片的断面金相图;Fig. 4 is the cross-sectional metallographic diagram of the piezoelectric fiber composite sheet in Fig. 3;

图5为图3中悬臂梁型的抑振功能器件的悬臂梁谐振频率测试图;Fig. 5 is the cantilever beam resonant frequency test chart of the cantilever beam type anti-vibration function device in Fig. 3;

图6为图3中悬臂梁型的抑振功能器件的驱动性能测试图。FIG. 6 is a test diagram of the driving performance of the cantilever beam type anti-vibration functional device in FIG. 3 .

具体实施方式Detailed ways

下面结合本发明专利实施例中的附图,对本发明实施例中的技术方案进行详细地描述。显然,本实施方式中所描述的实施例仅仅只是本发明所包含内容的一个普通案例,并不是全部实施例。基于本发明中的实施例,本领域普通技术人员在没有做出不同于本发明权利要求项之外的其它创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be described in detail below in combination with the drawings in the patent embodiments of the present invention. Apparently, the embodiment described in this implementation mode is only a general case of the content contained in the present invention, not all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without other creative work other than the claims of the present invention fall within the protection scope of the present invention.

本发明提供一种基于一体化结构的低频主动抑振系统,包括抑振功能器件和主动抑振系统装置两大部分。其中,如图1所示,所述抑振功能器件包括压电纤维复合层1、两层分别覆盖在压电纤维复合层1顶面和底面的金属电极层2以及两层将压电纤维复合层1和金属电极层2封装成一体的封装层3,其中,所述压电纤维复合层1与两金属电极层2构成压电纤维复合材料片,所述两封装层3分别从所述压电纤维复合材料片两侧进行封装。除了所述抑振功能器件,为了实现低频主动抑振应用,主动抑振系统装置需要包括电性连接的信号发生器6、高压放大器7及控制器8。The invention provides a low-frequency active vibration suppression system based on an integrated structure, which includes two parts: a vibration suppression function device and an active vibration suppression system device. Wherein, as shown in FIG. 1, the vibration suppression function device includes a piezoelectric fiber composite layer 1, two layers of metal electrode layers 2 covering the top and bottom surfaces of the piezoelectric fiber composite layer 1 respectively, and two layers of piezoelectric fiber composite layers. Layer 1 and metal electrode layer 2 are packaged into one packaging layer 3, wherein the piezoelectric fiber composite layer 1 and the two metal electrode layers 2 constitute a piezoelectric fiber composite material sheet, and the two packaging layers 3 are separated from the compressed The electrical fiber composite sheet is encapsulated on both sides. In addition to the above-mentioned anti-vibration functional devices, in order to realize low-frequency active anti-vibration applications, the active anti-vibration system device needs to include a signal generator 6 , a high-voltage amplifier 7 and a controller 8 that are electrically connected.

具体地,所述压电纤维复合层1包括多条相互平行间隔的压电陶瓷纤维11以及多条分别填充设置在每相邻两压电陶瓷纤维11之间的环氧树脂纤维12,每条压电陶瓷纤维11、每条环氧树脂纤维12在压电纤维复合层1层中交替排列。Specifically, the piezoelectric fiber composite layer 1 includes a plurality of piezoelectric ceramic fibers 11 spaced parallel to each other and a plurality of epoxy resin fibers 12 respectively filled and arranged between every two adjacent piezoelectric ceramic fibers 11, each Piezoelectric ceramic fibers 11 and each epoxy resin fiber 12 are alternately arranged in the first layer of piezoelectric fiber composite layer.

具体地,所述压电纤维复合层1的厚度为0.1mm-3mm;在所述压电纤维复合层1中,每一所述压电陶瓷纤维11的宽度为0.01mm-0.1mm,每一环氧树脂纤维12的宽度为0.01mm-0.1mm。Specifically, the thickness of the piezoelectric fiber composite layer 1 is 0.1mm-3mm; in the piezoelectric fiber composite layer 1, the width of each piezoelectric ceramic fiber 11 is 0.01mm-0.1mm, each The width of the epoxy resin fiber 12 is 0.01mm-0.1mm.

具体地,所述压电纤维复合层1的具体制备过程为:将多片压电陶瓷片等间距平行排列,其中,压电陶瓷片的厚度为T=0.01mm-0.1mm,相邻两压电陶瓷片的间距为d=0.01mm-0.1mm;然后在该多片平行排列的压电陶瓷片的缝隙中灌装注入环氧树脂胶粘剂,固化后得到复合材料块,接着沿着垂直于压电陶瓷片平面的方向从该复合材料块切割出纤维薄片,切割厚度为T1控制在0.1mm-3mm,切割长度不限制,可以依据实际需要,通过调整压电陶瓷片的长度来控制,该纤维薄片即可用作压电纤维复合层。Specifically, the specific preparation process of the piezoelectric fiber composite layer 1 is as follows: a plurality of piezoelectric ceramic sheets are arranged in parallel at equal intervals, wherein the thickness of the piezoelectric ceramic sheets is T=0.01mm-0.1mm, and two adjacent piezoelectric ceramic sheets are pressed The distance between the electric ceramic sheets is d=0.01mm-0.1mm; then the epoxy resin adhesive is filled and injected into the gaps of the multiple piezoelectric ceramic sheets arranged in parallel, and the composite material block is obtained after curing, and then along the vertical direction The direction of the plane of the electroceramic sheet is cut out of the fiber sheet from the composite material block. The cutting thickness is T1 controlled at 0.1mm-3mm, and the cutting length is not limited. It can be controlled by adjusting the length of the piezoelectric ceramic sheet according to actual needs. The fiber The sheets can then be used as piezoelectric fiber composite layers.

具体地,用于形成压电纤维复合层的压电陶瓷片的材料即所述压电陶瓷纤维的材料可以是PTZ、KNN、BT等系列陶瓷材料。Specifically, the material of the piezoelectric ceramic sheet used to form the piezoelectric fiber composite layer, that is, the material of the piezoelectric ceramic fiber, may be a series of ceramic materials such as PTZ, KNN, and BT.

具体地,所述金属电极层2通过离子溅射的方式溅射到所述压电纤维复合层1的顶/底面,其材料包括金、银、铜、铂等常用导电金属材料,其厚度T2可以通过调控溅射时间精确控制在10nm-1000nm范围内,金属电极层2覆盖的区域为压电纤维复合层1的顶/底面;进一步地,两面金属电极层2分别通过两个金属引出箔条(未图示)引出,所述金属引出箔条可以为任意商品化的导电金属箔条。Specifically, the metal electrode layer 2 is sputtered onto the top/bottom surface of the piezoelectric fiber composite layer 1 by means of ion sputtering, and its material includes common conductive metal materials such as gold, silver, copper, platinum, etc., and its thickness T2 It can be accurately controlled within the range of 10nm-1000nm by adjusting the sputtering time. The area covered by the metal electrode layer 2 is the top/bottom surface of the piezoelectric fiber composite layer 1; (not shown) leads, and the metal lead-out chaff can be any commercially available conductive metal foil.

具体地,所述金属引出箔条一端与金属电极层2连接,另一端从封装层3中延伸出来。Specifically, one end of the metal lead-out chaff is connected to the metal electrode layer 2 , and the other end extends from the encapsulation layer 3 .

具体地,所述封装层3的材料为玻璃钢片;用作所述封装层3的玻璃钢片的制备过程具体为:将单层或多层玻纤布在环氧树脂环氧树脂胶粘剂中浸润后,取出固化而成;其中,采用单层玻纤布的玻璃钢片厚度T3为0.1mm,实际应用过程中,玻璃钢片的厚度T4可以通过调整玻纤布的层数n来调控,T4=n×T3。Specifically, the material of the encapsulation layer 3 is a glass fiber reinforced plastic sheet; the preparation process of the glass fiber reinforced plastic sheet used as the encapsulation layer 3 is as follows: after soaking single-layer or multi-layer glass fiber cloth in epoxy resin epoxy resin adhesive, , taken out and solidified; wherein, the thickness T3 of the glass fiber reinforced plastic sheet using a single layer of glass fiber cloth is 0.1mm. T3.

具体地,所述抑振功能器件的制备过程为一体化结构的构件过程,该一体化结构的构件过程为:首先,将厚度为T5=T1+2×T2的压电纤维复合材料片的底面贴附在半固化的厚度为T4的玻璃钢片上,利用玻璃钢片上半固化的环氧树脂胶粘剂实现对金属电极层2和压电纤维复合层1的粘接固化;其次,为了实现抑振功能器件的封装,此后需要将另一片半固化的厚度为T4的玻璃钢片贴附到厚度为T5=T1+2×T2的压电纤维复合材料片的顶面,并固化;其中,两金属引出箔条必须保证从封装体内部延伸出来。由此,本发明涉及的这种基于一体化结构的低频主动抑振器件的主体功能部件即可形成。Specifically, the preparation process of the vibration-suppressing functional device is a component process of an integrated structure, and the component process of the integrated structure is: first, the bottom surface of the piezoelectric fiber composite material sheet with a thickness of T5=T1+2×T2 Attached to the semi-cured glass fiber reinforced plastic sheet with a thickness of T4, using the semi-cured epoxy resin adhesive on the glass fiber reinforced plastic sheet to realize the bonding and curing of the metal electrode layer 2 and the piezoelectric fiber composite layer 1; secondly, in order to realize the vibration suppression function device After that, another semi-cured FRP sheet with a thickness of T4 needs to be attached to the top surface of the piezoelectric fiber composite sheet with a thickness of T5=T1+2×T2, and cured; among them, the two metal lead-out foil strips must Guaranteed to extend from inside the package. Thus, the main functional parts of the low-frequency active vibration suppression device based on the integrated structure involved in the present invention can be formed.

图3为采用悬臂梁抑振片形式的抑振功能器件的实物图;图4为图3中压电纤维复合材料片的断面金相图;其中图3中的悬臂梁抑振片专门用作对该抑振功能器件的本征性能测试;由图4所示的断面金相图可看出,在压电纤维复合层中,环氧树脂纤维与压电陶瓷纤维紧密接触,无气泡产生,此外,溅射形成的金属电极层附着在压电纤维复合层上,没有脱落现象;说明抑振功能器件材料致密性良好。Fig. 3 is the physical diagram of the vibration suppression function device in the form of a cantilever beam vibration suppression sheet; Fig. 4 is a cross-sectional metallographic diagram of the piezoelectric fiber composite sheet in Fig. 3; wherein the cantilever beam vibration suppression sheet in Fig. 3 is specially used for Intrinsic performance test of the vibration-suppressing functional device; as can be seen from the cross-sectional metallographic diagram shown in Figure 4, in the piezoelectric fiber composite layer, the epoxy resin fiber is in close contact with the piezoelectric ceramic fiber, and no air bubbles are generated. , the metal electrode layer formed by sputtering adheres to the piezoelectric fiber composite layer without falling off; it shows that the vibration suppression function device material has good compactness.

为了测试本发明公开的一种基于一体化结构的低频主动抑振系统的低频抑振性能,以下实施例采用图3中的悬臂梁抑振片的抑振功能器件并为其搭建了一套性能测试平台。如图2所示,该性能测试平台包括信号发生器6、高压放大器7、控制器8、激振台9及MT3激光位移传感器10,其中,信号发生器6、高压放大器7、控制器8构成了全套的主动抑振系统装置,信号发生器6、高压放大器7、控制器8、激振台9及MT3激光位移传感器10构成的是性能测试平台。其中,所述控制器8控制所述信号发生器6产生交流信号,高压放大器7将该交流信号放大后对抑振功能器件进行驱动;激振台9用于产生振动,MT3激光位移传感器10用于检测悬臂梁抑振片的末端位移情况。具体测试过程如下:In order to test the low-frequency vibration suppression performance of a low-frequency active vibration suppression system based on an integrated structure disclosed in the present invention, the following examples use the vibration suppression function device of the cantilever beam vibration suppression plate in Figure 3 and build a set of performance for it testing platform. As shown in Figure 2, the performance test platform includes a signal generator 6, a high-voltage amplifier 7, a controller 8, an excitation table 9, and an MT3 laser displacement sensor 10, wherein the signal generator 6, the high-voltage amplifier 7, and the controller 8 constitute A complete set of active vibration suppression system devices, signal generator 6, high-voltage amplifier 7, controller 8, excitation table 9 and MT3 laser displacement sensor 10 constitute a performance testing platform. Wherein, the controller 8 controls the signal generator 6 to generate an AC signal, and the high-voltage amplifier 7 amplifies the AC signal to drive the vibration suppression functional device; the excitation table 9 is used to generate vibration, and the MT3 laser displacement sensor 10 is used It is used to detect the end displacement of the cantilever beam vibration suppression piece. The specific test process is as follows:

第一步,对压电纤维复合层进行极化处理:将制备好的悬臂梁抑振片置于有机硅油中,常温下,极化电场为2-3kV/mm,极化时间约为10-20min。The first step is to conduct polarization treatment on the piezoelectric fiber composite layer: place the prepared cantilever beam vibration suppression sheet in silicone oil, at room temperature, the polarization electric field is 2-3kV/mm, and the polarization time is about 10- 20min.

第二步,确定悬臂梁抑振片的谐振频率:将悬臂梁抑振片固定在激振台9上,给悬臂梁抑振片施加一个1-50Hz的电频率扫描,当电频率与其固有频率一致时,悬臂梁抑振片就会发生共振,此时其形变达到最大值,从而得到悬臂梁抑振片本身的固有频率(谐振频率)大小。由图5可看出,在频率约为24Hz处,悬臂梁抑振片尖端位移达到最大,故该悬臂梁抑振片的谐振频率约为24Hz。The second step is to determine the resonant frequency of the cantilever beam vibration suppression piece: fix the cantilever beam vibration suppression piece on the excitation table 9, apply an electrical frequency sweep of 1-50 Hz to the cantilever beam vibration suppression piece, when the electrical frequency and its natural frequency When they are consistent, the cantilever beam vibration suppression piece will resonate, and at this time its deformation reaches the maximum value, thereby obtaining the natural frequency (resonant frequency) of the cantilever beam vibration suppression piece itself. It can be seen from Fig. 5 that the displacement of the tip of the cantilever beam vibration suppression plate reaches the maximum at a frequency of about 24 Hz, so the resonance frequency of the cantilever beam vibration suppression plate is about 24 Hz.

第三步,借助如图2所示的性能测试平台,对基于一体化结构的低频主动抑振系统的驱动性能进行测试,测试结果如图6可以看出,将极化后的悬臂梁抑振片固定在激振台9上,对悬臂梁抑振片施加驱动电压测试驱动性能,在谐振频率24Hz下,随着驱动电压的增大,悬臂梁抑振片尖端位移逐渐增大,在驱动电压为600V时,压电悬臂梁的尖端位移达到最大值0.177mm。The third step is to use the performance test platform shown in Figure 2 to test the driving performance of the low-frequency active vibration suppression system based on the integrated structure. The test results can be seen in Figure 6. The plate is fixed on the excitation table 9, and the driving performance is tested by applying a driving voltage to the cantilever beam vibration suppression plate. At a resonant frequency of 24 Hz, with the increase of the driving voltage, the tip displacement of the cantilever beam vibration suppression plate gradually increases. When the voltage is 600V, the tip displacement of the piezoelectric cantilever reaches the maximum value of 0.177mm.

第四步,借助如图2所示的性能测试平台,对基于一体化结构的低频主动抑振系统的抑振性能进行测试,将悬臂梁抑振片固定在振动频率为24Hz左右下的激振台9上,不施加驱动电压下,悬臂梁抑振片会保持24Hz振动幅度最大的正弦运动。当施加驱动电压后,压电悬臂梁中的压电相由于力电耦合作用,产生驱动力以及形变振动,与激振台9产生的振动波两者发生波的叠加,达到减小振幅的效果,当施加电频率为24Hz,电压强度为600V的驱动电压后,压电悬臂梁的振幅减少约52.8%,抑振效果显著。The fourth step is to use the performance test platform shown in Figure 2 to test the vibration suppression performance of the low-frequency active vibration suppression system based on the integrated structure. On stage 9, under no driving voltage, the cantilever beam vibration suppression plate will maintain the sinusoidal motion with the largest vibration amplitude at 24Hz. When the driving voltage is applied, the piezoelectric phase in the piezoelectric cantilever beam generates driving force and deformation vibration due to the electromechanical coupling effect, and superimposes with the vibration wave generated by the excitation table 9 to achieve the effect of reducing the amplitude , when the driving voltage with an electric frequency of 24Hz and a voltage strength of 600V is applied, the amplitude of the piezoelectric cantilever beam is reduced by about 52.8%, and the vibration suppression effect is remarkable.

对于本领域技术人员而言,显然本发明不限于上述示范性实施例的细节,而且在不背离本发明的精神或者基本特征的情况下,能够以其他任何具体形式实现本发明。因此,本实施例仅仅只是示范性案例,而且是非限制性的。本发明的范围由所附权利要求而不是上述说明限定,旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本发明内。不应将权利要求中的任何附图标记视为限制所涉及的权利要求。It will be obvious to a person skilled in the art that the invention is not limited to the details of the above-described exemplary embodiments, but that the invention can be embodied in any other specific form without departing from the spirit or essential characteristics of the invention. Therefore, this embodiment is only an exemplary case, and is non-limiting. The scope of the present invention is defined by the appended claims rather than the above description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced in the present invention. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (9)

1.一种基于一体化结构的低频主动抑振系统,其特征在于,包括抑振功能器件和主动抑振系统装置;1. A low-frequency active vibration suppression system based on an integrated structure, characterized in that it includes a vibration suppression function device and an active vibration suppression system device; 所述抑振功能器件包括压电纤维复合层、两金属电极层以及两封装层,其中,所述两金属电极层分别覆盖在压电纤维复合层的顶面和底面,所述压电纤维复合层与两金属电极层构成压电纤维复合材料片,所述两封装层从所述压电纤维复合材料片两侧将压电纤维复合层和金属电极层封装成一体;The vibration-suppressing functional device includes a piezoelectric fiber composite layer, two metal electrode layers and two encapsulation layers, wherein the two metal electrode layers respectively cover the top surface and the bottom surface of the piezoelectric fiber composite layer, and the piezoelectric fiber composite layer layer and two metal electrode layers constitute a piezoelectric fiber composite sheet, and the two encapsulation layers encapsulate the piezoelectric fiber composite layer and the metal electrode layer from both sides of the piezoelectric fiber composite sheet; 所述压电纤维复合层包括多条相互平行间隔的压电陶瓷纤维以及多条分别填充设置在每相邻两压电陶瓷纤维之间的环氧树脂纤维,每条压电陶瓷纤维、每条环氧树脂纤维在压电纤维复合层中交替排列;The piezoelectric fiber composite layer includes a plurality of piezoelectric ceramic fibers parallel to each other and a plurality of epoxy resin fibers respectively filled and arranged between every two adjacent piezoelectric ceramic fibers, each piezoelectric ceramic fiber, each Epoxy resin fibers are alternately arranged in the piezoelectric fiber composite layer; 所述封装层的材料为玻璃钢片;所述封装层具体由单层或多层玻纤布经环氧树脂胶粘剂浸润后再经固化形成;The material of the encapsulation layer is a glass fiber reinforced plastic sheet; the encapsulation layer is specifically formed by solidifying after infiltration of a single-layer or multi-layer glass fiber cloth by an epoxy resin adhesive; 所述抑振功能器件通过所述封装层与振动机构贴合连接在一起。The vibration-suppressing functional device is bonded and connected with the vibration mechanism through the encapsulation layer. 2.根据权利要求1所述的基于一体化结构的低频主动抑振系统,其特征在于,所述压电纤维复合层的厚度为0.1mm-3mm;2. The low-frequency active vibration suppression system based on an integrated structure according to claim 1, wherein the thickness of the piezoelectric fiber composite layer is 0.1mm-3mm; 在所述压电纤维复合层中,每一所述压电陶瓷纤维的宽度为0.01mm-0.1mm,每一环氧树脂纤维的宽度为0.01mm-0.1mm。In the piezoelectric fiber composite layer, the width of each piezoelectric ceramic fiber is 0.01mm-0.1mm, and the width of each epoxy resin fiber is 0.01mm-0.1mm. 3.根据权利要求1-2中任一种所述的基于一体化结构的低频主动抑振系统,其特征在于,所述压电纤维复合层的制备过程为:将多片压电陶瓷片等间距平行排列,其中,压电陶瓷片的厚度为0.01mm-0.1mm,相邻两压电陶瓷片的间距为0.01mm-0.1mm;然后在该多片平行排列的压电陶瓷片的缝隙中灌装注入环氧树脂胶粘剂,固化后得到复合材料块,接着沿着垂直于压电陶瓷片平面的方向从该复合材料块切割出纤维薄片,该纤维薄片的切割厚度为0.1mm-3mm,得到压电纤维复合层。3. The low-frequency active vibration suppression system based on an integrated structure according to any one of claims 1-2, wherein the preparation process of the piezoelectric fiber composite layer is: multiple piezoelectric ceramic sheets, etc. The spacing is arranged in parallel, wherein the thickness of the piezoelectric ceramic sheets is 0.01mm-0.1mm, and the distance between two adjacent piezoelectric ceramic sheets is 0.01mm-0.1mm; then in the gaps between the multiple piezoelectric ceramic sheets arranged in parallel Filling and injecting epoxy resin adhesive, after curing, a composite material block is obtained, and then a fiber sheet is cut from the composite material block along a direction perpendicular to the plane of the piezoelectric ceramic sheet, and the cutting thickness of the fiber sheet is 0.1mm-3mm, to obtain Piezoelectric fiber composite layer. 4.根据权利要求1所述的基于一体化结构的低频主动抑振系统,其特征在于,在所述压电纤维复合层中,所述压电陶瓷纤维的材料为锆钛酸铅系列陶瓷材料、铌酸钾钠系列陶瓷材料、钛酸钡系列陶瓷材料中的一种或多种。4. The low-frequency active vibration suppression system based on an integrated structure according to claim 1, characterized in that, in the piezoelectric fiber composite layer, the material of the piezoelectric ceramic fiber is a lead zirconate titanate series ceramic material , Potassium sodium niobate series ceramic materials, and one or more of barium titanate series ceramic materials. 5.根据权利要求1所述的基于一体化结构的低频主动抑振系统,其特征在于,所述金属电极层的厚度为10nm-1000nm,所述金属电极层的材料为金、银、铜、铂中的一种或多种;所述金属电极层通过离子溅射的方式在所述压电纤维复合层表面溅射形成。5. The low-frequency active vibration suppression system based on an integrated structure according to claim 1, wherein the thickness of the metal electrode layer is 10nm-1000nm, and the material of the metal electrode layer is gold, silver, copper, One or more of platinum; the metal electrode layer is formed by ion sputtering on the surface of the piezoelectric fiber composite layer. 6.根据权利要求1所述的基于一体化结构的低频主动抑振系统,其特征在于,所述抑振功能器件还包括两条分别与两金属电极层连接的金属引出箔条,所述金属引出箔条一端与金属电极层连接,另一端从封装层中延伸出来。6. The low-frequency active vibration suppression system based on an integrated structure according to claim 1, wherein the vibration suppression functional device also includes two metal lead-out chaff strips respectively connected to the two metal electrode layers, and the metal One end of the lead-out chaff is connected to the metal electrode layer, and the other end extends from the encapsulation layer. 7.根据权利要求1所述的基于一体化结构的低频主动抑振系统,其特征在于,所述抑振功能器件的制备过程为一体化结构的构件过程,该一体化结构的构件过程为:首先,将压电纤维复合材料片的底面贴附在半固化的玻璃钢片上,利用玻璃钢片上半固化的环氧树脂胶粘剂实现对金属电极层和压电纤维复合层的粘接固化;其次,为了实现抑振功能器件的封装,将另一片半固化的玻璃钢片贴附到压电纤维复合材料片的顶面并固化。7. The low-frequency active vibration suppression system based on the integrated structure according to claim 1, wherein the preparation process of the vibration suppression functional device is a component process of the integrated structure, and the component process of the integrated structure is: First, attach the bottom surface of the piezoelectric fiber composite sheet to the semi-cured FRP sheet, and use the semi-cured epoxy resin adhesive on the FRP sheet to realize the bonding and curing of the metal electrode layer and the piezoelectric fiber composite layer; secondly, in order to realize For the packaging of the device with vibration suppression function, another semi-cured glass fiber reinforced plastic sheet is attached to the top surface of the piezoelectric fiber composite sheet and cured. 8.根据权利要求1所述的基于一体化结构的低频主动抑振系统,其特征在于,其谐振频率范围为10Hz-50Hz,低频抑振效率范围为50%-90%;8. The low-frequency active vibration suppression system based on an integrated structure according to claim 1, wherein the resonance frequency range is 10Hz-50Hz, and the low-frequency vibration suppression efficiency range is 50%-90%; 所述抑振功能器件的工作模式兼具压电材料d31模式和部分压电材料d33模式。The working mode of the vibration-suppressing functional device has both the d31 mode of the piezoelectric material and the d33 mode of a part of the piezoelectric material. 9.根据权利要求1所述的基于一体化结构的低频主动抑振系统,其特征在于,所述主动抑振系统装置包括电性连接的信号发生器、高压放大器及控制器;9. The low-frequency active vibration suppression system based on an integrated structure according to claim 1, wherein the active vibration suppression system device includes an electrically connected signal generator, a high-voltage amplifier and a controller; 所述控制器控制信号发生器产生交流信号,高压放大器将该交流信号放大后对所述抑振功能器件进行驱动。The controller controls the signal generator to generate an AC signal, and the high-voltage amplifier amplifies the AC signal to drive the vibration suppression functional device.
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