CN112965116A - Device for detecting metal foreign matters on substrate in coating - Google Patents
Device for detecting metal foreign matters on substrate in coating Download PDFInfo
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- CN112965116A CN112965116A CN202110333941.7A CN202110333941A CN112965116A CN 112965116 A CN112965116 A CN 112965116A CN 202110333941 A CN202110333941 A CN 202110333941A CN 112965116 A CN112965116 A CN 112965116A
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 92
- 239000002184 metal Substances 0.000 title claims abstract description 92
- 238000000576 coating method Methods 0.000 title claims abstract description 74
- 239000011248 coating agent Substances 0.000 title claims abstract description 68
- 239000000758 substrate Substances 0.000 title claims abstract description 63
- 238000001514 detection method Methods 0.000 claims abstract description 50
- 244000126211 Hericium coralloides Species 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229920005575 poly(amic acid) Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
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- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
- G01V3/02—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with propagation of electric current
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
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Abstract
The invention provides a device for detecting metal foreign matters of a substrate in coating, which comprises an interference strip, a detection device and a control device, wherein the interference strip is arranged above the substrate to be coated and is positioned at one side of a nozzle in a coating machine, which is close to the uncoated substrate to be coated; a film, which is coated on the outer surface of the interference strip; a patterned metal electrode layer arranged on the surface of the film; and the input end of the detection component is connected with the metal electrode layer and used for prompting the detection of the metal foreign body when the metal electrode layer is conducted. The device for detecting the metal foreign matters on the substrate in coating can effectively detect the metal foreign matters which cannot be detected in the prior art and exist on the substrate in the coating process, can timely stop the coating equipment after the foreign matters are found, avoids the foreign matters from damaging the substrate, can furthest avoid the damage of the foreign matters in coating to products and nozzles, improves the yield of the coated products, and reduces the damage loss of the products to the minimum.
Description
Technical Field
The invention relates to the technical field of photoresist coating equipment, in particular to a device for detecting metal foreign matters of a substrate in coating.
Background
The coating and developing machine is an important component of the yellow light process, is mainly responsible for coating and developing the photoresist, and transfers the pattern on the photomask to the photoresist by matching with an exposure machine. In actual coating, a part of the substrate carries foreign matters or the environment accidentally drops the foreign matters onto the substrate during coating, and when the height of the foreign matters exceeds the coating height, the coating Nozzle collides with the foreign matters, so that the Nozzle is damaged, and the production process is directly influenced. Therefore, it is necessary to provide a foreign object detection device in front of the Nozzle to detect and clean foreign objects that may damage the Nozzle or the substrate in time.
The methods for blocking and detecting foreign matters in the DNS Track (dean coating and developing machine) coating include two types, optical foreign matter detection and interference fringe rotation detection. The former detects the foreign matter through a specific transmitting and receiving device, and generally specifically includes an optical transmitting component and an optical receiving component which are arranged at two sides of the substrate, if the foreign matter blocks the laser and the like transmitted by the optical transmitting component, the laser and the like received by the optical receiving component are reduced, and the existence of the foreign matter can be found; the latter rotates by means of the interference strip contacting the foreign matter itself, and the light receiving amount changes to detect the foreign matter. In specific production and practice, the detection capabilities of the two foreign matter detection modes are limited, and the situation that the foreign matter is not detected still occurs. In the interference strip detection mode, because the detection capability is limited or the foreign matter is not enough to make the interference strip rotate, the foreign matter existing on the substrate is not detected, the coating can be continued until the end, so that the interference strip pushes the foreign matter to move forward in the coating direction, the substrate is scratched, the product is damaged, and great economic loss is caused.
In analyzing detected and undetected foreign matters, the foreign matter analysis result shows that the foreign matter component is mainly metal, so that a more sensitive device capable of detecting metal foreign matters in coating is required.
Disclosure of Invention
The invention aims to solve the technical problem that part of metal foreign matters in coating are difficult to detect in the prior art, and provides a device for detecting metal foreign matters on a substrate in coating, which can effectively detect tiny metal foreign matters in coating and protect a product from being damaged by the metal foreign matters.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a device for detecting metal foreign matters on a substrate in coating, which comprises
The interference strip is arranged above the substrate to be coated and positioned on one side, close to the uncoated substrate to be coated, of the nozzle in the coating machine;
a film, which is coated on the outer surface of the interference strip;
a patterned metal electrode layer arranged on the surface of the film;
and the input end of the detection component is connected with the metal electrode layer and used for prompting the detection of the metal foreign body when the metal electrode layer is conducted.
Further, the material of the film is polyimide.
Further, the metal electrode layer includes:
the first electrode pattern is comb-shaped and is arranged on one side of the film;
the second electrode pattern is comb-shaped and is arranged on one side of the film opposite to the first electrode pattern;
the comb teeth of the comb-shaped first electrode patterns are mutually interlaced with the comb teeth of the comb-shaped second electrode patterns.
Further, the gap between the first electrode pattern and the second electrode pattern is 2-20 micrometers.
Further, the detection assembly includes:
the anode of the first power supply is connected with the first electrode pattern, and the cathode of the first power supply is connected with the second electrode pattern;
the anode of the second power supply is connected with the first electrode pattern, the cathode of the second power supply is connected with the second electrode pattern, and the voltage of the second power supply is equal to that of the first power supply;
a first current detection part connected in series between the positive electrode of the first power supply and the first electrode pattern;
and the second current detection part is connected between the positive electrode of the second power supply and the first electrode pattern in series.
Further, the detection assembly further comprises:
and the at least one current judging component is connected with the first current detecting component and/or the second current detecting component and a control circuit of a driving motor of the coating machine and is used for generating a control signal to be sent to the control circuit of the driving motor of the coating machine when the current detected by the first current detecting component and/or the second current detecting component is larger than a preset threshold value so as to stop the driving motor of the coating machine.
Further, the interference strip includes:
a first face;
the second surface is opposite to the first surface;
when the film covers the surface of the interference strip, the comb handle part of the comb-shaped first electrode pattern is horizontally positioned on the first surface, the comb tooth part of the comb-shaped first electrode pattern downwards vertically extends to the second surface, and
the comb handle part of the comb-shaped second electrode pattern is horizontally positioned on the second surface, and the comb tooth parts of the comb-shaped second electrode pattern downwards vertically extend to the first surface.
Further, the apparatus for detecting the metallic foreign matter of the substrate in coating calculates the position of the metallic foreign matter on the interference stripe in the horizontal direction and the resistance value of the metallic foreign matter by the following formula:
(2ρ*L1/S)*I1+Rx(I1+I2)＝(2ρ*(L-L1)/S)*I2+Rx(I1+I2)＝V；
wherein RX is the resistance value of the foreign matter;
i1 is the reading of the first current sensing component;
i2 is the reading of the second current detection component;
l is the length of the comb handle portion of the first electrode pattern and the comb handle portion of the second electrode pattern;
ρ is an average resistivity of the comb handle portions of the first and second electrode patterns;
s is the average sectional area of the comb handle part of the first electrode pattern and the comb handle part of the second electrode pattern;
l1 is the position of the metallic foreign object on the interference strip in the horizontal direction;
v is the voltage of the first power supply and the second power supply.
Further, the device for detecting the substrate metal foreign matter in coating further comprises:
and the at least one stretching component is arranged at the upper end of the interference strip and used for tensioning the film on the surface of the interference strip.
Further, the device for detecting the substrate metal foreign matter in coating further comprises:
and the tension detection part is arranged on the stretching part and used for detecting the tension applied to the film.
By adopting the technical scheme, compared with the prior art, the invention has the following technical effects:
the invention provides a device for detecting metal foreign matters on a substrate in coating, wherein a layer of film which is tightly attached and coated and a patterned metal electrode layer on the film are arranged on the surface of an interference strip, two comb-shaped electrode patterns which are respectively connected with two power supplies, namely a positive electrode and a negative electrode, are arranged in the interference strip, comb teeth of the comb-shaped electrode patterns are arranged in a staggered manner, and the metal foreign matters can be detected when the metal foreign matters simultaneously contact the comb teeth of the two comb-shaped electrode patterns by arranging the space between the comb teeth of the two comb-shaped electrode patterns; the invention also arranges two current detecting parts on the circuit connected with the two power supplies and the patterned metal electrode layer, the position of the metal foreign body on the film circuit can be calculated according to the current value in the two paths, the power supply voltage, the length and the resistivity of the comb handle part of the comb electrode pattern and other information, the resistance value of the metal foreign body can be calculated, the type of the metal foreign body can be deduced according to the resistance value, and the invention is beneficial to the arrangement and the improvement of the coating equipment and the coating environment. The device for detecting the metal foreign matters on the substrate in coating can effectively detect the metal foreign matters which cannot be detected in the prior art and exist on the substrate in the coating process, can avoid the damage of the foreign matters in coating to the product to the maximum extent, reduces the damage loss of the product to the minimum, and improves the yield of the coated product.
Drawings
FIG. 1 is a schematic diagram illustrating a substrate with a metal foreign material not detected during coating process in the prior art;
FIG. 2 is a schematic structural diagram of an apparatus for detecting metal foreign matter on a substrate during coating according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a metal electrode layer and a detection assembly in an apparatus for detecting metal foreign matter on a substrate during coating according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a metal electrode layer and a detection assembly in an apparatus for detecting metal foreign matter on a substrate during coating according to an embodiment of the present invention;
wherein the reference numerals are: 10-nozzle, 20-first interference bar, 30-substrate, 40-metallic foreign matter, 50-second interference bar, 51-first side, 52-second side, 60-film, 61-stretching part, 62-tension detecting part, 70-metallic electrode layer, 71-first electrode pattern, 72-second electrode pattern, 80-detecting component, 81-first power supply, 82-second power supply, 83-current judging part, 84-coater driving motor;
a1-first current detecting part, A2-second current detecting part, L-length of comb handle part of first electrode pattern and second electrode pattern, L1-position of metallic foreign matter on interference strip in horizontal direction.
Detailed Description
The present invention will be described in detail and specifically with reference to the following examples to facilitate better understanding of the present invention, but the following examples do not limit the scope of the present invention.
As shown in fig. 1, in the prior art, the first interference strip 20 is used to detect a foreign object, so as to protect the nozzle 10 from being damaged by the foreign object, but the first interference strip 20 has a limited detection capability, and the foreign object is still pushed by the first interference strip 20 during the coating process, so as to damage the substrate 30, damage the product, and cause economic loss. The main component of the foreign matter in the coating is generally metal by the detection and analysis of the foreign matter component.
As shown in fig. 2, the present invention provides a device for detecting metal foreign matter on a substrate during coating, which includes a second interference strip 50, wherein the second interference strip 50 is disposed above the substrate 30 to be coated, and is located on a side of the nozzle 10 and the first interference strip 20 close to the substrate 30 to be coated, and is not in contact with the substrate 30.
The second interference strip 50 is provided with a film 60 covering the surface thereof, and the surface of the film 60 is provided with a patterned metal electrode layer 70; the apparatus further includes a detection component 80, the input end of which is connected to the metal electrode layer 70, for prompting to detect the metal foreign object 40 on the substrate 30 when the metal electrode layer 70 is conducted during the coating process.
In a preferred embodiment of the present invention, the film 60 is made of polyimide, which can more precisely ensure the flatness of the second interference strip 50 wrapped by the film 60, and simultaneously make the metal electrode layer 70 more flat, thereby enhancing the performance of detecting the metal foreign matter 40.
As shown in fig. 3, the metal electrode layer 70 includes a first electrode pattern 71 and a second electrode pattern 72, wherein the first electrode pattern 71 and the second electrode pattern 72 are both comb-shaped and are respectively disposed on two sides of the film 60 oppositely; the comb teeth of the first electrode pattern 71 and the second electrode pattern 72 are arranged to be staggered with each other, that is, the comb teeth of the first electrode pattern 71 are located in the gaps formed by the comb teeth of the second electrode pattern 72, and two adjacent comb teeth belong to the first electrode pattern 71 and the second electrode pattern 72, respectively.
As shown in fig. 2, the second interference strip 50 includes a first surface 51 and a second surface 52 opposite to each other, when the film 60 covers the surface of the second interference strip 50, the comb-shaped stems of the comb-shaped first electrode patterns 71 are horizontally located on the first surface 51, and the comb-teeth of the comb-shaped first electrode patterns 71 vertically extend downward to the second surface 52. The comb-shaped stem portion of the comb-shaped second electrode pattern 72 is horizontally located on the second face 52, and the comb-tooth portions of the comb-shaped second electrode pattern 72 vertically extend downward to the first face 51. In this way, when the foreign metal particles 40 contact the second interference fringe 50, the foreign metal particles 40 can contact the comb teeth of the first electrode pattern 71 and the second electrode pattern 72 at the same time.
The preparation of the metal electrode layer 70 adopts a part of the production process of the flexible panel, specifically: coating polyamic acid on carrier glass, and completing the manufacture of a polyimide flexible substrate, namely the manufacture of a film 60, through vacuum drying and high-temperature baking; continuously depositing a metal film on the polyimide flexible substrate, coating photoresist, matching with a mask plate with a shape matched with the first electrode pattern 71 and the second electrode pattern 72, transferring the shape of the mask plate to the template by using an exposure machine, obtaining a required circuit diagram by etching and removing the photoresist, and finally removing carrier glass by using a laser lift-off (laser lift-off) method and the like to complete the manufacturing of the flexible metal electrode layer 70.
Wherein, the gap between the comb-teeth part of the first electrode pattern 71 and the comb-teeth part of the second electrode pattern 72 is 2-20 μm. Due to the limitation of the precision of the exposure machine in the process of preparing the metal electrode layer 70, the distance between the comb teeth of the first electrode pattern 71 and the second electrode pattern 72 of the prepared metal electrode layer 70 can be reduced to 2 microns at the minimum. It is apparent that the smaller the pitch between the comb-teeth portions of the first electrode pattern 71 and the second electrode pattern 72, the more minute the metallic foreign matter 40 can be detected. In practical production, the dead zone of the size of the metal foreign object 40 on the detection side of the conventional first interference strip 20 is 90 to 150 micrometers, the metal foreign object 40 in the size interval may damage the substrate 30, and the metal electrode layer 70 can effectively detect the foreign object with the size. If the size of the foreign matter is too small, the first interference stripe 20 and the second interference stripe 50 cannot be contacted during the coating process, and the substrate 30 and the nozzle 10 are not damaged.
As shown in FIG. 3, the apparatus for detecting metal foreign matter on a substrate during coating includes a detection assembly 80 including a first power source 81 and a second power source 82, wherein the positive electrode of the first power source 81 is connected to the first electrode pattern 71, and the negative electrode is connected to the second electrode pattern 72. The positive electrode of the second power supply 82 is connected to the first electrode pattern 71, the negative electrode is connected to the second electrode pattern 72, and the voltage is equal to the first power supply 81; the first power source 81 and the second power source 82 supply power to the metal electrode layer 70, and when the foreign metal 40 simultaneously contacts the comb-shaped portions of the first electrode pattern 71 and the second electrode pattern 72, the metal electrode layer 70 is turned on.
The inspection module 80 further includes a first current sensing block a1 and a second current sensing block a 2. in a preferred embodiment of the invention, the first current sensing block a1 and the second current sensing block a2 are current meters. The first current detection part a1 is connected in series between the positive electrode of the first power supply 81 and the first electrode pattern 71; the second current detecting unit a2 is connected in series between the positive electrode of the second power supply 82 and the first electrode pattern 71, and is used for detecting the current levels in the two circuits. The first current sensing part a1 may be connected in series between the negative electrode of the first power source 81 and the second electrode pattern 72, and similarly, the second current sensing part a2 may be connected in series between the negative electrode of the second power source 82 and the second electrode pattern 72.
To this end, when the device for detecting metallic foreign matter on a substrate during coating detects the metallic foreign matter 40, two paths are formed in the metal electrode layer 70 and in the circuit formed by the detection assembly 80, and the position of the metallic foreign matter on the interference strip in the horizontal direction and the resistance value of the metallic foreign matter can be calculated by the following formula:
(2ρ*L1/S)*I1+Rx(I1+I2)＝(2ρ*(L-L1)/S)*I2+Rx(I1+I2)＝V；
wherein: RX is the resistance of the foreign matter;
i1 is the reading of the first current detection element a 1;
i2 is the reading of the second current detection element a 2;
l is the length of the comb-handle portion of the first electrode pattern 71 and the comb-handle portion of the second electrode pattern 72;
ρ is an average resistivity of the comb-handle portions of the first electrode pattern 71 and the comb-handle portions of the second electrode pattern 72;
s is an average sectional area of the comb-handle portions of the first electrode patterns 71 and the comb-handle portions of the second electrode patterns 72;
l1 is the horizontal position of the foreign metal object 40 on the second interference strip 50;
v is the voltage of the first power source 81 and the second power source 82.
Where ρ, S, I1, I2, L, and V are known; l1, Rx are unknown.
As described above, L1 and Rx can be calculated, and the position of the foreign metal object 40 in the metal electrode layer 70 and the resistance of the foreign metal object 40 can be obtained. Knowing the position of the metallic foreign object 40 within the metallic electrode layer 70 facilitates cleaning the metallic foreign object 40; knowing the resistance of the metallic foreign material 40, it is possible to roughly infer the type of the metallic foreign material 40, such as aluminum or copper, for subsequent experimental detection and optimization of the coating equipment.
The detecting module 80 further comprises at least one current determining component 83, wherein the at least one current determining component 83 is connected to the first current detecting component a1 and/or the second current detecting component a2 and the control circuit of the coater driving motor 84, and is used for generating a control signal to be sent to the control circuit of the coater driving motor 84 when the current detected by the first current detecting component a1 and/or the second current detecting component a2 is larger than a predetermined current threshold, so that the coater driving motor 84 stops working.
In a preferred embodiment of the present invention, the current determining part 83 is a current out-of-limit breaker, in which a current threshold value can be preset, and when the current value detected by the first current detecting part a1 and/or the second current detecting part a2 is greater than the current threshold value, the driving motor of the coating machine is stopped and an alarm is given.
As shown in fig. 3, when the current determination unit 83 is one, the current determination unit 83 is connected to the second current detection unit a2 and the control circuit of the coater drive motor 84, when the metal foreign object 40 contacts the second interference strip 50, two paths are formed in the metal electrode layer 70 and the detection assembly 80, the current determination unit 83 can determine the magnitude relationship between the current value detected by the second current detection unit a2 and the preset current threshold, at this time, the current threshold can be set to be small, and when the current value detected by the second current detection unit a2 exceeds the current threshold, the current determination unit 83 sends a signal to the drive circuit of the coater drive motor 84 to stop the coater drive motor 84, and the current determination unit 83 sends an alarm.
As shown in fig. 4, when there are two current determination units 83, the two current determination units 83 are respectively connected to the control circuit of the first current detection unit and the coater drive motor 84 and the control circuit of the second current detection unit and the coater drive motor 84, when the foreign metal object 40 contacts the second interference strip 50, two paths are formed in the metal electrode layer 70 and the detection assembly 80, the two current determination units 83 can respectively compare the current values detected by the first current detection unit a1 and the second current detection unit a2 with a preset current threshold value, the current threshold value can be selected according to actual conditions, and if the current value in one of the paths is greater than the current threshold value, the current determination unit 83 sends a signal to stop the coater drive motor 84 and send an alarm. In addition to being able to determine the currents in the two paths simultaneously, the two current detection members 83 can also avoid the problem that one of the current detection members 83 is temporarily damaged, and the other current determination member 83 can also continue to operate, thereby improving the stability of foreign object detection and substrate 30 protection.
As shown in fig. 2, the apparatus for detecting metal foreign matter on a substrate during coating further includes at least one stretching member 61 disposed at an upper end of the second interference bar 50, connecting the film 60, and stretching the film 60 upward to closely adhere the film 60 to the surface of the second interference bar 50.
Wherein, the stretching component 61 is further provided with a tension detecting component 62 for detecting the tension applied to the film 60. In a preferred embodiment of the present invention, the stretching unit 61 is a stretching motor, the tension detecting unit 62 is a tension meter, and the tension detecting unit 62 can prevent the film 60 from separating from the surface of the second interference strip 50 due to too low tension or prevent the film 60 from deforming or breaking due to too high tension. If the worker observes that the tension detecting part 62 displays that the tension exceeds the preset interval, the worker can adjust the stretching part 61.
The device for detecting the metal foreign matters on the substrate in the coating is only used for detecting the metal foreign matters, but can not detect the non-metal foreign matters, but the components of the foreign matters in the coating are basically mainly metal or all comprise metal by detecting and analyzing the components of the foreign matters in the prior art, so the device for detecting the metal foreign matters on the substrate in the coating can detect the foreign matters on the substrate in the coating to the maximum extent. Based on the assumed purpose, even if foreign matters completely not containing metal appear on the substrate, the foreign matters can be detected when the foreign matters pass through the first interference strip 20 or other foreign matter detection devices except the device for detecting metal foreign matters of the substrate, so that after the device for detecting metal foreign matters of the substrate in coating provided by the invention is adopted by the coating and developing machine in the prior art, the capability of detecting the foreign matters can be improved to the maximum extent, the substrate and the nozzle are prevented from being damaged by the foreign matters, the product yield is improved, and the loss of product damage is reduced.
The embodiments of the present invention have been described in detail, but the embodiments are merely examples, and the present invention is not limited to the embodiments described above. Any equivalent modifications and substitutions to those skilled in the art are also within the scope of the present invention. Accordingly, equivalent changes and modifications made without departing from the spirit and scope of the present invention should be covered by the present invention.
Claims (10)
1. A device for detecting metal foreign matter on a substrate in coating, comprising
The interference strip is arranged above the substrate to be coated and is positioned on one side, close to the uncoated substrate to be coated, of the nozzle in the coating machine;
a film, which is coated on the outer surface of the interference strip;
the patterned metal electrode layer is arranged on the surface of the film;
and the input end of the detection component is connected with the metal electrode layer and used for prompting the detection of the metal foreign body when the metal electrode layer is conducted.
2. The apparatus for detecting foreign metal on a substrate during coating according to claim 1, wherein the film is made of polyimide.
3. The apparatus for detecting metallic foreign matter on a substrate in coating according to claim 1, wherein the metal electrode layer comprises:
the first electrode pattern is comb-shaped and is arranged on one side of the film; and
the second electrode pattern is comb-shaped and is arranged on one side of the film opposite to the first electrode pattern;
the comb-teeth parts of the comb-shaped first electrode patterns and the comb-teeth parts of the comb-shaped second electrode patterns are mutually staggered.
4. The apparatus for detecting foreign metal on a substrate in coating according to claim 3, wherein a gap between the comb-teeth of the first electrode pattern and the comb-teeth of the second electrode pattern is 2 to 20 μm.
5. The apparatus for detecting foreign metal on a substrate in coating according to claim 3, wherein the detecting unit comprises:
the positive electrode of the first power supply is connected with the first electrode pattern, and the negative electrode of the first power supply is connected with the second electrode pattern;
the anode of the second power supply is connected with the first electrode pattern, the cathode of the second power supply is connected with the second electrode pattern, and the voltage of the second power supply is equal to that of the first power supply;
a first current detecting part connected in series between the positive electrode of the first power source and the first electrode pattern; and
and the second current detection part is connected between the positive electrode of the second power supply and the first electrode pattern in series.
6. The apparatus for detecting foreign metal on a substrate in coating according to claim 5, wherein the detection module further comprises:
and the current judging component is connected with the first current detecting component and/or the second current detecting component and a control circuit of a driving motor of the coating machine, and is used for generating a control signal to be sent to the control circuit of the driving motor of the coating machine when the current detected by the first current detecting component and/or the second current detecting component is larger than a preset threshold value so as to stop the driving motor of the coating machine.
7. A device for detecting metal foreign matter on a substrate in coating according to claim 5, wherein said interference strip comprises:
a first face;
the second surface is opposite to the first surface;
when the film covers the surface of the interference strip, the comb handle part of the comb-shaped first electrode pattern is horizontally positioned on the first surface, the comb tooth part of the comb-shaped first electrode pattern vertically extends downwards to the second surface, and
the comb handle part of the comb-shaped second electrode pattern is horizontally positioned on the second surface, and the comb tooth parts of the comb-shaped second electrode pattern vertically extend downwards to the first surface.
8. The apparatus for detecting metallic foreign matter on a substrate in coating according to claim 7, wherein the position of the metallic foreign matter on the interference stripe in the horizontal direction and the resistance value of the metallic foreign matter are calculated by the following formula:
(2ρ*L1/S)*I1+Rx(I1+I2)＝(2ρ*(L-L1)/S)*I2+Rx(I1+I2)＝V；
wherein RX is the resistance value of the foreign matter;
i1 is a reading of the first current detection component;
i2 is a reading of the second current detection component;
l is the length of the comb handle portion of the first electrode pattern and the comb handle portion of the second electrode pattern;
ρ is the average resistivity of the comb handle portions of the first and second electrode patterns;
s is the average cross-sectional area of the comb handle portion of the first electrode pattern and the comb handle portion of the second electrode pattern;
l1 is the horizontal position of the metallic foreign matter on the interference strip;
and V is the voltage of the first power supply and the second power supply.
9. The apparatus for detecting foreign metal on a substrate in coating according to claim 1, further comprising:
at least one stretching component is arranged at the upper end of the interference strip and used for tensioning the film on the surface of the interference strip.
10. The apparatus for detecting foreign metal on a substrate in coating according to claim 9, further comprising:
and the tension detection part is arranged on the stretching part and is used for detecting the tension borne by the film.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115684153A (en) * | 2022-10-14 | 2023-02-03 | 深圳赛意法微电子有限公司 | Semiconductor device failure detection method |
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