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CN112924388B - Orthogonal double-channel acoustic resonance device - Google Patents

Orthogonal double-channel acoustic resonance device Download PDF

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CN112924388B
CN112924388B CN202110087822.8A CN202110087822A CN112924388B CN 112924388 B CN112924388 B CN 112924388B CN 202110087822 A CN202110087822 A CN 202110087822A CN 112924388 B CN112924388 B CN 112924388B
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resonant cavity
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CN112924388A (en
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朱文越
陈杰
刘强
钱仙妹
李学彬
郑健捷
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Hefei Institutes of Physical Science of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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Abstract

The utility model provides an orthogonal binary channels acoustic resonance device, resonance device includes the square, and first side and second side are the adjacent side of square, be provided with the first chamber unit that passes first side and its opposite face on the square, pass the second chamber unit of second side and its opposite face, first chamber unit includes first resonant cavity and symmetrical coaxial first buffer chamber and the second buffer chamber that set up at first resonant cavity both ends, the second chamber unit includes second resonant cavity and symmetrical coaxial third buffer chamber and the fourth buffer chamber that set up at resonant cavity both ends, the intersection zone that first resonant cavity and second resonant cavity center formed is provided with the acoustic pipe of perpendicular to two resonant cavity constitution planes, be provided with acoustic sensor on the other end of acoustic pipe. The invention realizes the double-channel synchronous measurement, simultaneously provides multiplied detection sensitivity, and increases the sampling flow of the measurement system, thereby greatly expanding the applicable range.

Description

正交双通道声学谐振装置Orthogonal dual-channel acoustic resonance device

技术领域technical field

本发明涉及大气环境污染物监测的技术领域,尤其涉及一种正交双通道声学谐振装置。The invention relates to the technical field of atmospheric environmental pollutant monitoring, in particular to an orthogonal dual-channel acoustic resonance device.

背景技术Background technique

光声光谱是基于光声效应的一种光谱技术,基本原理是样品粒子吸收周期性的光能量产生微弱压力波即声波。在光声光谱中,通常利用声学共振腔微弱的声信号进行放大,因此良好的声学共振腔结构设计可以有效的提高探测灵敏度和检测极限。如中国发明专利CN104697933B于2017年6月12日公告的一种三通道声学谐振腔光声光谱传感装置。该发明专利采用三支相互平行声谐振腔作为三种不同光吸收成分的吸收通道,三路光源通过声谐振腔产生声信号,声信号通过三支连接到声学谐振腔中点的声导管传递至麦克风探测。三支谐振腔的使用虽能实现多波长多组分痕量气体吸收探测,但其中单一成分单一波长的探测灵敏度并未提高。随着大气探测领域的发展,特别是弱吸收成分的探测。Photoacoustic spectroscopy is a spectroscopic technique based on the photoacoustic effect. The basic principle is that the sample particles absorb periodic light energy to generate weak pressure waves, namely sound waves. In photoacoustic spectroscopy, the weak acoustic signal of the acoustic resonator is usually used to amplify, so a good structure design of the acoustic resonator can effectively improve the detection sensitivity and detection limit. For example, the Chinese invention patent CN104697933B announced on June 12, 2017 a three-channel acoustic resonator photoacoustic spectrum sensing device. The invention patent uses three mutually parallel acoustic resonant cavities as the absorption channels of three different light-absorbing components. The three light sources generate acoustic signals through the acoustic resonant cavities, and the acoustic signals are transmitted to the Microphone detection. Although the use of three resonant cavities can realize multi-wavelength and multi-component trace gas absorption detection, the detection sensitivity of single component and single wavelength has not been improved. With the development of the field of atmospheric detection, especially the detection of weak absorbing components.

发明内容Contents of the invention

为了进一步的提高探测灵敏度和检测极限,为此,本发明提出了一种正交双通道声学谐振装置,具体方案如下:In order to further improve detection sensitivity and detection limit, the present invention proposes an orthogonal dual-channel acoustic resonance device. The specific scheme is as follows:

正交双通道声学谐振装置,包括方块,第一侧面和第二侧面为方块的相邻侧面,所述方块上设置有穿过第一侧面和其对立面的第一腔单元、穿过第二侧面和其对立面的第二腔单元,所述第一腔单元包括第一谐振腔和对称同轴设置在第一谐振腔两端的第一缓冲室和第二缓冲室,所述第二腔单元包括第二谐振腔和对称同轴设置在谐振腔两端的第三缓冲室和第四缓冲室,所述第一谐振腔和第二谐振腔中心形成的交汇区设置有垂直与两谐振腔组成平面的声导管,所述声导管的另一端上设置有声学传感器。Orthogonal dual-channel acoustic resonance device, comprising a block, the first side and the second side are adjacent sides of the block, the block is provided with a first cavity unit passing through the first side and its opposite face, passing through the second side And the second cavity unit on the opposite side, the first cavity unit includes the first resonant cavity and the first buffer chamber and the second buffer chamber symmetrically and coaxially arranged at both ends of the first resonant cavity, the second cavity unit includes the first The second resonant cavity and the third buffer chamber and the fourth buffer chamber are arranged symmetrically and coaxially at both ends of the resonant cavity, and the intersection area formed by the center of the first resonant cavity and the second resonant cavity is provided with an acoustic wall perpendicular to the plane formed by the two resonant cavities. A conduit, the other end of which is provided with an acoustic sensor.

优化的,所述声学传感器为麦克风或音叉。Optimally, the acoustic sensor is a microphone or a tuning fork.

优化的,所述方块上表面上开设有四个分别与缓冲室对应导通的孔,所述第一缓冲室和第三缓冲室上的孔作为进样孔,第二缓冲室和第四缓冲室上的孔为出样孔,所述第一缓冲室和第三缓冲室的外端部作为入射窗口,第二缓冲室和第四缓冲室的外端部作为出射窗口。Optimally, four holes corresponding to the buffer chambers are opened on the upper surface of the block, the holes on the first buffer chamber and the third buffer chamber are used as sampling holes, the second buffer chamber and the fourth buffer chamber are The holes on the chamber are sample outlets, the outer ends of the first buffer chamber and the third buffer chamber are used as incident windows, and the outer ends of the second buffer chamber and the fourth buffer chamber are used as outlet windows.

优化的,所述进样孔可以输入气体或者气溶胶颗粒。Optimally, the injection hole can input gas or aerosol particles.

优化的,所述入射窗口和出射窗口上均设置有窗片。Optimally, windows are provided on both the incident window and the exit window.

优化的,所述第一谐振腔和第二谐振腔直径范围为激光光束直径的2-4倍。Optimally, the diameter range of the first resonant cavity and the second resonant cavity is 2-4 times the diameter of the laser beam.

优化的,所述第一谐振腔的长度L1和第二谐振腔的长度L2相等,所述第一谐振腔、第二谐振腔、其中L1=L2=L,Lmin<L<Lmax,L=C/2f,C是声速,fmin=1000Hz,fmax=20000Hz;四个缓冲室长H=L/2,缓冲室直径为谐振腔直径的2-4倍。Optimally, the length L1 of the first resonant cavity is equal to the length L2 of the second resonant cavity, the first resonant cavity, the second resonant cavity, wherein L1=L2=L, Lmin<L<Lmax, L=C /2f, C is the speed of sound, fmin=1000Hz, fmax=20000Hz; the length of the four buffer chambers is H=L/2, and the diameter of the buffer chamber is 2-4 times the diameter of the resonant cavity.

优化的,还包括,Optimized, also includes,

激光组件,用于产生向入射窗口发送的光束;a laser assembly for generating a beam of light sent to the entrance window;

分光组件,将激光组件发射的光束分成两束分别发送到两个入射窗口;The beam splitting component divides the beam emitted by the laser component into two beams and sends them to two incident windows respectively;

锁相放大器,与所述声学传感器的输出端和控制信号源的输出端连接,用于接受控制信号源提供的参考信号、解调声学传感器感知的相应谐振腔中光声光谱信号。The lock-in amplifier is connected with the output end of the acoustic sensor and the output end of the control signal source, and is used for receiving the reference signal provided by the control signal source and demodulating the photoacoustic spectrum signal in the corresponding resonant cavity sensed by the acoustic sensor.

优化的,所述激光组件包括按光路依次设置的控制信号源、激光控制器、激光器。Optimally, the laser component includes a control signal source, a laser controller, and a laser arranged sequentially along the optical path.

优化的,所述分光组件包括半透半反镜、第一平面反射镜,第二平面反射镜,所述激光器的光束经过半透半反镜的中心分成第一光束和第二光束,所述第一光束与第一腔单元的中轴线重合,所述第二光束依次经过第一平面反射镜和第二平面反射镜的反射后进入第二腔单元中且与第二腔单元的中轴线重合。Optimally, the light splitting assembly includes a half-mirror, a first plane mirror, and a second plane mirror, and the beam of the laser is divided into a first beam and a second beam through the center of the half-mirror, and the The first light beam coincides with the central axis of the first cavity unit, and the second light beam enters the second cavity unit after being reflected by the first plane reflector and the second plane reflector in sequence and coincides with the central axis of the second cavity unit .

本发明的有益效果在于:本发明在单通道声学谐振装置的基础上添加第二通道声学谐振装置,每个声学谐振装置独自实现对声信号的共振放大,并且在腔中心处达到声压最大值。两个声学模块采用正交化放置,由于光经过两通道声学谐振的时间远远小于气体分子或气溶胶粒子的热弛豫时间,所以两个声学谐振装置分别产生的声信号可近似认为是同一时刻产生,进而可以在交点处实现两道共振放大后的声信号叠加,提供了成倍的探测灵敏度,又增加了测量系统的采样流量,从而极大地扩展了其适用的范围。The beneficial effect of the present invention is that: the present invention adds a second-channel acoustic resonance device on the basis of a single-channel acoustic resonance device, and each acoustic resonance device independently realizes the resonance amplification of the acoustic signal, and reaches the maximum sound pressure at the center of the cavity . The two acoustic modules are placed orthogonally. Since the time for light to pass through the acoustic resonance of the two channels is much shorter than the thermal relaxation time of gas molecules or aerosol particles, the acoustic signals generated by the two acoustic resonance devices can be approximately considered to be the same It is generated at all times, and then the superposition of the two resonantly amplified acoustic signals can be realized at the intersection point, which provides a doubled detection sensitivity and increases the sampling flow of the measurement system, thus greatly expanding its applicable range.

附图说明Description of drawings

图1为本发明中包括正交双通道声学谐振装置的光谱传感装置的结构原理图。Fig. 1 is a structural principle diagram of a spectrum sensing device including an orthogonal dual-channel acoustic resonance device in the present invention.

图2为谐振装置的剖视图。Fig. 2 is a cross-sectional view of the resonator device.

图3为第一腔单元和第二腔单元的透视图。Fig. 3 is a perspective view of a first chamber unit and a second chamber unit.

图4为谐振装置中双腔的本征频率分布图。Fig. 4 is a distribution diagram of the eigenfrequency of the dual cavities in the resonant device.

图5为谐振装置中双腔在1742Hz共振频率下的压力分布图。Fig. 5 is a pressure distribution diagram of the double cavity in the resonant device at a resonant frequency of 1742 Hz.

图6为谐振装置的频率响应图。Fig. 6 is a frequency response diagram of a resonant device.

对附图中各部件的说明如下:The description of each part in the accompanying drawings is as follows:

11、函数信号发生器;12、激光控制器、13、激光器;21、半透半反镜;22、第一平面反射镜;23、第二平面反射镜;31、方块;321、第一谐振腔;322、第一缓冲室;323、第二缓冲室;331、第二谐振腔;332、第三缓冲室;333、第四缓冲室;34、进样孔;35、出样孔;36、窗片;37、声导管;4、声学传感器;5、锁相放大器;61、第一探测器;62、第二探测器;7、PC。11. Function signal generator; 12. Laser controller; 13. Laser; 21. Half mirror; 22. First plane mirror; 23. Second plane mirror; 31. Square; 321. First resonance Cavity; 322, the first buffer chamber; 323, the second buffer chamber; 331, the second resonant cavity; 332, the third buffer chamber; 333, the fourth buffer chamber; 34, the sampling hole; 35, the sampling hole; 36 , window; 37, sound conduit; 4, acoustic sensor; 5, lock-in amplifier; 61, first detector; 62, second detector; 7, PC.

具体实施方式Detailed ways

实施例1Example 1

如图1-4所示,一种正交双通道声学谐振装置,包括方块31,所述方块31上设置有方块31第一侧面和其对立面的第一腔单元、穿过第二侧面和其对立面的第二腔单元,所述第一侧面和第二侧面为方块31的相邻侧面。所述第一腔单元包括第一谐振腔321和对称同轴设置在第一谐振腔321两端的第一缓冲室322和第二缓冲室323,所述第二腔单元包括第二谐振腔331和对称同轴设置在第二谐振腔331两端的第三缓冲室332和第四缓冲室333,所述第一谐振腔321和第二谐振腔331中心形成的交汇区设置有垂直与两谐振腔组成平面的声导管37,所述声导管37的另一端上设置有声学传感器4。所述声学传感器4为麦克风或音叉。As shown in Figures 1-4, an orthogonal dual-channel acoustic resonance device includes a block 31, on which a first cavity unit on the first side of the block 31 and its opposite side is arranged, passing through the second side and its opposite side. For the second chamber unit on the opposite side, the first side and the second side are adjacent sides of the block 31 . The first cavity unit includes a first resonant cavity 321 and a first buffer chamber 322 and a second buffer chamber 323 symmetrically and coaxially arranged at both ends of the first resonant cavity 321, and the second cavity unit includes a second resonant cavity 331 and a second buffer chamber 323. The third buffer chamber 332 and the fourth buffer chamber 333 are arranged symmetrically and coaxially at both ends of the second resonant cavity 331, and the intersection area formed at the center of the first resonant cavity 321 and the second resonant cavity 331 is provided with a vertical and two resonant cavity components. A planar sound conduit 37, the other end of which is provided with an acoustic sensor 4. The acoustic sensor 4 is a microphone or a tuning fork.

所述方块31上表面上开设有四个分别与缓冲室对应导通的孔,所述第一缓冲室322和第三缓冲室332上的孔作为进样孔34,第二缓冲室323和第四缓冲室333上的孔为出样孔35,所述第一缓冲室322和第三缓冲室332的外端部作为入射窗口,第二缓冲室323和第四缓冲室333的外端部作为出射窗口。The upper surface of the block 31 is provided with four holes corresponding to the buffer chambers, the holes on the first buffer chamber 322 and the third buffer chamber 332 are used as the injection holes 34, the second buffer chamber 323 and the second buffer chamber The holes on the four buffer chambers 333 are sampling holes 35, the outer ends of the first buffer chamber 322 and the third buffer chamber 332 are used as incident windows, and the outer ends of the second buffer chamber 323 and the fourth buffer chamber 333 are used as exit window.

优化的,所述进样孔34可以输入气体分子或者气溶胶颗粒,在该实施例中,所述进样孔34和或出样孔35处设置有浓度传感器,用于检测进样孔34和或出样孔35进出物料的浓度。在该方案中,所述进样孔34和出样孔35都设置有浓度传感器。Optimally, the injection hole 34 can input gas molecules or aerosol particles. In this embodiment, the injection hole 34 and or the sample outlet hole 35 are provided with concentration sensors for detecting the injection hole 34 and the Or the concentration of the material entering and leaving the sample outlet 35. In this solution, both the sampling hole 34 and the sampling hole 35 are provided with concentration sensors.

所述入射窗口和出射窗口上均设置有窗片36,形成封闭环境,减少外界环境噪声对测量的干扰。Both the incident window and the exit window are provided with windows 36 to form a closed environment and reduce the interference of external environmental noise to the measurement.

所述第一谐振腔321的长度L1和第二谐振腔331的长度L2相等。所述第一谐振腔321、第二谐振腔331、缓冲室的关系如下:L1=L2=L,Lmin<L<Lmax,L=C/2f,C是声速,fmin=1000Hz,fmax=20000Hz;四个缓冲室长H=L/2,缓冲室直径为谐振腔直径的2-4倍。在该实施例中,第一谐振腔321和第二谐振腔331长均为L=C/2000Hz,直径为激光光斑直径的2倍。The length L1 of the first resonant cavity 321 is equal to the length L2 of the second resonant cavity 331 . The relationship between the first resonant cavity 321, the second resonant cavity 331 and the buffer chamber is as follows: L1=L2=L, Lmin<L<Lmax, L=C/2f, C is the speed of sound, fmin=1000Hz, fmax=20000Hz; The length of the four buffer chambers is H=L/2, and the diameter of the buffer chamber is 2-4 times the diameter of the resonant cavity. In this embodiment, the length of the first resonant cavity 321 and the second resonant cavity 331 are both L=C/2000Hz, and the diameter is twice the diameter of the laser spot.

第一谐振腔321和第二谐振腔331直径范围均为2-4倍激光光斑直径,在该实施例中,第一谐振腔321和第二谐振腔331直径均为激光光斑直径的2倍。The diameters of the first resonant cavity 321 and the second resonant cavity 331 are both 2-4 times the diameter of the laser spot. In this embodiment, the diameters of the first resonant cavity 321 and the second resonant cavity 331 are both 2 times the diameter of the laser spot.

实施例2Example 2

与实施例1不同之处在于,本方案中第一谐振腔321和第二谐振腔331长均为L=C/4000Hz,直径为激光光斑直径的4倍。缓冲室直径为谐振腔直径的4倍。The difference from Embodiment 1 is that in this solution, the length of the first resonant cavity 321 and the second resonant cavity 331 are both L=C/4000Hz, and the diameter is 4 times the diameter of the laser spot. The diameter of the buffer chamber is 4 times the diameter of the resonant cavity.

实施例3Example 3

与实施例1不同之处在于,本方案中第一谐振腔321和第二谐振腔331长均为L=C/3000Hz,直径为激光光斑直径的3倍,缓冲室直径为谐振腔直径的3倍。The difference from Embodiment 1 is that in this solution, the length of the first resonant cavity 321 and the second resonant cavity 331 are both L=C/3000Hz, the diameter is 3 times of the diameter of the laser spot, and the diameter of the buffer chamber is 3 times of the diameter of the resonant cavity. times.

实施例4Example 4

如图4所示,一种包括实施例1、实施例2、实施例3中任意一个实施例中的正交双通道声学谐振装置的光谱传感装置,还包括As shown in Figure 4, a spectral sensing device including the orthogonal dual-channel acoustic resonance device in any one of Embodiment 1, Embodiment 2, and Embodiment 3, also includes

激光组件,用于向入射窗口发送光束;所述激光组件包括按光路依次设置的控制信号源、激光控制器12、激光器13,在该实施例中,所述控制信号源为函数信号发生器11。激光器13输出的光为脉冲光或经调制(机械斩波或电信号调制)的连续光。A laser assembly, used to send light beams to the incident window; the laser assembly includes a control signal source, a laser controller 12, and a laser 13 arranged in sequence according to the optical path. In this embodiment, the control signal source is a function signal generator 11 . The light output by the laser 13 is pulsed light or modulated (mechanical chopping or electrical signal modulation) continuous light.

分光组件,将激光组件发射的光束分成两束分别发送到两个入射窗口;所述分光组件包括半透半反镜21、第一平面反射镜22,第二平面反射镜23,所述激光器13的光束经过半透半反镜21的中心分成第一光束和第二光束,所述第一光束与第一腔单元的中轴线重合,所述第二光束依次经过第一平面反射镜22和第二平面反射镜23的反射后进入第二腔单元中且与第二腔单元的中轴线重合。The light beam splitting component is divided into two beams emitted by the laser component and sent to two incident windows respectively; the light splitting component includes a half mirror 21, a first plane mirror 22, a second plane mirror 23, and the laser 13 The light beam passes through the center of the half mirror 21 and is divided into a first light beam and a second light beam. The first light beam coincides with the central axis of the first cavity unit, and the second light beam passes through the first plane reflector 22 and the second light beam in turn. After being reflected by the two plane mirrors 23, it enters into the second cavity unit and coincides with the central axis of the second cavity unit.

锁相放大器5,与所述声学传感器4的输出端和控制信号源的输出端连接,用于接受控制信号源提供的参考信号、解调声学传感器4感知的相应谐振腔中光声光谱信号。The lock-in amplifier 5 is connected to the output end of the acoustic sensor 4 and the output end of the control signal source, and is used to receive the reference signal provided by the control signal source and demodulate the photoacoustic spectrum signal in the corresponding resonant cavity sensed by the acoustic sensor 4 .

装置还包括第一探测器61和第二探测器62,所述第一探测器61和第二探测器62分别对应接收出射窗口对应的光束。The device further includes a first detector 61 and a second detector 62, and the first detector 61 and the second detector 62 respectively correspond to receiving the light beam corresponding to the exit window.

所述第一探测器61、第二探测器62、锁相放大器5的输出端与PC7连接,将数据上传到PC7上进行分析。The output ends of the first detector 61, the second detector 62, and the lock-in amplifier 5 are connected to the PC7, and the data are uploaded to the PC7 for analysis.

两个声学谐振装置存在的共振频率都在图4中显示,从图4中可以看出仅在1742Hz共振频率处,两声学谐振装置才会出现如图5所示的相同的声压分布。当两道声学谐振腔同时在1742Hz频率处发生共振,两道相同的声压分布使得声压在两谐振装置的交点处得到叠加。通过扫描腔的频率,可以看到如图6所示仅在1742Hz处实现了最优的声信号放大。The resonance frequencies of the two acoustic resonance devices are shown in Figure 4. It can be seen from Figure 4 that only at the resonance frequency of 1742Hz, the two acoustic resonance devices will have the same sound pressure distribution as shown in Figure 5. When two acoustic resonant cavities resonate at the frequency of 1742Hz at the same time, the same sound pressure distribution of the two channels makes the sound pressure superimposed at the intersection of the two resonant devices. By sweeping the frequency of the cavity, it can be seen that the optimal acoustic signal amplification is only achieved at 1742 Hz as shown in Fig. 6 .

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,根据本发明的技术方案及其发明构思加以等同替换或改变,都应涵盖在本发明的保护范围之内。The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto, any person familiar with the technical field within the technical scope disclosed in the present invention, according to the technical solution of the present invention Any equivalent replacement or change of the inventive concepts thereof shall fall within the protection scope of the present invention.

Claims (6)

1. The orthogonal double-channel acoustic resonance device is characterized by comprising a square block (31), wherein a first side surface and a second side surface are adjacent side surfaces of the square block (31), a first cavity unit penetrating through the first side surface and the opposite side surface of the square block (31) and a second cavity unit penetrating through the second side surface and the opposite side surface of the square block are arranged on the square block (31), the first cavity unit comprises a first resonant cavity (321) and a first buffer chamber (322) and a second buffer chamber (323) which are symmetrically and coaxially arranged at two ends of the first resonant cavity (321), the second cavity unit comprises a second resonant cavity (331) and a third buffer chamber (332) and a fourth buffer chamber (333) which are symmetrically and coaxially arranged at two ends of the resonant cavity, an intersection area formed by the centers of the first resonant cavity (321) and the second resonant cavity (331) is provided with an acoustic guide pipe (37) which is perpendicular to the two resonant cavities to form a plane, and the other end of the acoustic guide pipe (37) is provided with an acoustic sensor (4); the acoustic sensor (4) is a microphone;
the length L1 of the first resonant cavity (321) is equal to the length L2 of the second resonant cavity (331), the first resonant cavity (321) and the second resonant cavity (331) are equal, wherein L1=L2=L, lmin < L < Lmax, L=C/2 f, C is sound velocity, fmin=1000 Hz, fmax=20000 Hz, the length H=L/2 of four buffer chambers is 2-4 times the diameter of the resonant cavities;
further comprises: a laser assembly for generating a beam of light that is transmitted toward the entrance window;
the beam splitting component is used for splitting the light beam emitted by the laser component into two beams and respectively transmitting the two beams to the two incident windows;
and the phase-locked amplifier (5) is connected with the output end of the acoustic sensor (4) and the output end of the control signal source and is used for receiving the reference signal provided by the control signal source and demodulating the photoacoustic signal in the corresponding resonant cavity perceived by the acoustic sensor (4).
2. The orthogonal dual-channel acoustic resonance device according to claim 1, wherein four holes which are respectively communicated with the buffer chambers are formed in the upper surface of the square block (31), the holes in the first buffer chamber (322) and the third buffer chamber (332) are used as sample injection holes (34), the holes in the second buffer chamber (323) and the fourth buffer chamber (333) are used as sample outlet holes (35), the outer end parts of the first buffer chamber (322) and the third buffer chamber (332) are used as incident windows, and the outer end parts of the second buffer chamber (323) and the fourth buffer chamber (333) are used as emergent windows.
3. The orthogonal two-channel acoustic resonator device according to claim 2, characterized in that a louver (36) is provided on both the entrance window and the exit window.
4. The orthogonal dual channel acoustic resonator device of claim 1, wherein the first resonator (321) and the second resonator (331) have diameters that are 2-4 times the laser beam diameter.
5. The orthogonal dual channel acoustic resonator device of claim 1, wherein the laser assembly comprises a control signal source, a laser controller (12), and a laser (13) arranged in order in the optical path.
6. The orthogonal dual-channel acoustic resonance device according to claim 5, wherein the beam splitting assembly comprises a half mirror (21), a first plane mirror (22) and a second plane mirror (23), the beam of the laser (13) is split into a first beam and a second beam through the center of the half mirror (21), the first beam coincides with the central axis of the first cavity unit, and the second beam sequentially enters the second cavity unit after being reflected by the first plane mirror (22) and the second plane mirror (23) and coincides with the central axis of the second cavity unit.
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