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CN112903178A - Oil-immersed pressure sensor - Google Patents

Oil-immersed pressure sensor Download PDF

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Publication number
CN112903178A
CN112903178A CN202110161750.7A CN202110161750A CN112903178A CN 112903178 A CN112903178 A CN 112903178A CN 202110161750 A CN202110161750 A CN 202110161750A CN 112903178 A CN112903178 A CN 112903178A
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CN
China
Prior art keywords
oil
circuit board
pressure sensor
utricule
cavity
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110161750.7A
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Chinese (zh)
Inventor
张灵辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taizhou Huiteng Pump Industry Co ltd
Original Assignee
Taizhou Huiteng Pump Industry Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taizhou Huiteng Pump Industry Co ltd filed Critical Taizhou Huiteng Pump Industry Co ltd
Priority to CN202110161750.7A priority Critical patent/CN112903178A/en
Publication of CN112903178A publication Critical patent/CN112903178A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The application relates to an oil-immersed pressure sensor, which comprises a shell, a capsule, a circuit board and a pressing piece; the inner part of the shell is hollow, an annular edge is arranged on the inner wall of the shell, and the annular edge divides the inner cavity of the shell into a sealing cavity and a detection cavity; the utricule is put into and is detected in the chamber and the border of utricule is contradicted on annular edge, compress tightly piece and circuit board and all set up in the sealed chamber of casing, compress tightly the piece and be used for compressing tightly the circuit board on the utricule and the utricule compresses tightly on annular edge, liquid oil is filled between utricule and the circuit board. Through the setting of utricule in this application to avoid external water etc. direct and circuit board contact, in order to improve this oil-immersed pressure sensor's life.

Description

Oil-immersed pressure sensor
Technical Field
The application relates to the field of sensors, in particular to an oil-immersed pressure sensor.
Background
A pressure sensor is the most common sensor in industrial practice, and is generally composed of a pressure sensitive element and a signal processing unit, so that the pressure sensor is a device or apparatus capable of sensing a pressure signal and converting the pressure signal into a usable output electric signal according to a certain rule.
Chinese patent with the current publication number of CN206945209U discloses a pressure sensor assembly structure, which comprises a circuit board, the screw thread clamping ring, grafting complex plug connector and casing, the upper portion of casing sets up the tube-shape cavity, the inner wall at this tube-shape cavity middle part sets up the internal thread, the outer wall setting of screw thread clamping ring and internal thread matched with external screw thread, the bottom in the tube-shape cavity is arranged in to the circuit board during assembly, screw thread clamping ring and tube-shape cavity screw-thread fit, the screw thread clamping ring carries on spacingly to the circuit board, form sealed chamber between circuit board up end and the screw thread clamping ring inner chamber, form the detection chamber under the circuit board between terminal surface.
Therefore, gas or liquid enters the detection cavity to be in contact with the sensor on the circuit board, and the pressure of the gas or liquid is detected, but the gas or liquid is in direct contact with the sensor on the circuit board, so that the service life of the pressure sensor is easily influenced.
Disclosure of Invention
In order to improve life, this application provides an oil-immersed pressure sensor.
The application provides an oily formula pressure sensor adopts following technical scheme:
an oil-immersed pressure sensor comprises a shell, a capsule, a circuit board and a pressing piece;
the inner part of the shell is hollow, an annular edge is arranged on the inner wall of the shell, and the annular edge divides the inner cavity of the shell into a sealing cavity and a detection cavity;
the utricule is put into and is detected in the chamber and the border of utricule is contradicted on annular edge, compress tightly piece and circuit board and all set up in the sealed chamber of casing, compress tightly the piece and be used for compressing tightly the circuit board on the utricule and the utricule compresses tightly on annular edge, liquid oil is filled between utricule and the circuit board.
Through adopting above-mentioned technical scheme, the utricule is put into the detection chamber from the sealed chamber of casing, the border of utricule is contradicted on the annular edge, the circuit board is arranged in on the utricule, sensor on the circuit board is towards utricule one side, liquid oil is filled between utricule and the circuit board, it compresses tightly the circuit board on the utricule to compress tightly the piece, and then can compress tightly the utricule on the annular edge, therefore, use the oily formula pressure sensor of this application, if install oily formula pressure sensor on the water pump, the water in the water pump is introduced into and is detected the chamber, the utricule can transmit the pressure that receives for the sensor on the circuit board and then realize the detection of pressure through the setting of utricule, thereby avoid direct and circuit board contact such as external water, in order.
Optionally, an internal thread is arranged on the cavity wall of the housing sealing cavity, and an external thread matched with the internal thread is arranged on the compressing member, or;
the wall of the shell sealing cavity is provided with a clamping groove, and the pressing piece is a clamping spring which is mutually clamped and embedded with the clamping groove.
By adopting the technical scheme, the pressing piece is installed on the sealing cavity of the shell in a threaded mode, so that the circuit board can be gradually pressed on the capsule body by the pressing piece, and the capsule body is pressed on the annular edge, so that the tightness between the capsule body and the annular plate and between the circuit board and the capsule body are ensured;
the clamp spring is used as the pressing piece, the clamp spring is embedded in the clamping groove, the circuit board can be pressed on the bag body through the clamp spring, the pressing piece adopts the design of the clamp spring, the structure is simpler, the processing convenience is high, and the processing cost is low.
Optionally, the sealing cavity is filled with epoxy resin, and the housing is provided with an end cover for closing the sealing cavity through threads.
Through adopting above-mentioned technical scheme, the end cover seals the seal chamber opening, and epoxy is used for filling whole seal chamber to ensure the leakproofness of seal chamber, compress tightly the fastening nature of a compact disc circuit board, also avoid the liquid oil infiltration in the utricule to seal chamber, improve the detection precision of circuit board to pressure.
Optionally, an extension groove is arranged at a joint between the cavity wall of the shell sealing cavity and the annular edge, and the extension groove is used for accommodating the edge of the capsule body.
Through adopting above-mentioned technical scheme, the border at the utricule is compressed tightly the back by the circuit board, because the border of utricule has certain ductility, consequently, the utricule will extend to the chamber wall of seal chamber, if do not have the setting of extending groove, the border of utricule will produce certain warpage after the chamber wall of seal chamber blocks, because the utricule receives the pressure of each direction in detecting the chamber, the border of utricule is dragged, cause easily that certain clearance produces between utricule border and the annular limit, influence the detection precision of sensor to pressure in the circuit board.
Optionally, the extension groove comprises a first ring groove formed in the wall of the sealing cavity of the shell and a second ring groove formed in the annular edge, and the first ring groove and the second ring groove are communicated with each other.
By adopting the technical scheme, the first ring groove is arranged on the wall of the sealing cavity, the second ring groove is arranged on the annular edge, therefore, the edge of the bag body is firstly embedded into the first ring groove after being extended, then the bag body is blocked by the first ring groove and is embedded into the second ring groove, therefore, the edge of the bag body forms a folding state, thereby the second ring groove realizes the limit fixation of the edge of the bag body, the contact tightness between the edge of the bag body and the ring-shaped edge is better, therefore, after the capsule body is pressed in all directions in the detection cavity, the edge of the capsule body is not easy to pull, the liquid oil in the capsule body is not easy to leak, and the liquid oil is not easy to seep out through the layer-by-layer sealing between the second ring groove and the edge of the capsule body, therefore, through the arrangement of the first ring groove and the second ring groove, the detection precision of the oil-immersed pressure sensor on the pressure is ensured.
Optionally, the groove depth of the first ring groove is 1mm, and the groove depth of the second ring groove is 0.5 mm.
Through adopting above-mentioned technical scheme, the groove depth setting of above-mentioned first annular and second annular can make the utricule border after the extension fully enter into first annular and second annular to with the compactness of being connected between first annular and the second annular better.
Optionally, a chamfer is provided at a position of the annular edge near the balloon body.
Through adopting above-mentioned technical scheme, when the utricule received the pressure of each direction in detecting the chamber, will produce great friction between the border on utricule and annular limit, through the setting of chamfer, can reduce the injury of annular border to the utricule outer wall face.
Optionally, when the capsule is placed in the detection cavity, the outer wall surface of the capsule is abutted against the inner ring wall surface of the annular edge.
Through adopting above-mentioned technical scheme, the outer wall of utricule is inconsistent with the inner ring wall on annular limit, from this, the water in the detection chamber only is used in the utricule part that is located the detection chamber, is difficult for entering into on the contact surface on utricule border and annular limit.
Optionally, the liquid oil is silicone oil.
Through adopting above-mentioned technical scheme, silicon oil can be effectively transmit the pressure that the utricule received to the sensor on the circuit board.
Optionally, the capsule body is made of fluorosilicone rubber.
By adopting the technical scheme, the fluorosilicone rubber has better corrosion resistance and flexibility, and the rebound force after being compressed.
In summary, the present application includes at least one of the following beneficial technical effects:
1. according to the oil-immersed pressure sensor, due to the arrangement of the bag body, external water bodies and the like are prevented from being directly contacted with the circuit board, and the service life of the oil-immersed pressure sensor is prolonged;
2. the setting of first annular and second annular in this application for the utricule border is drawn in spacingly, thereby the utricule receives the pressure of each direction in detecting the chamber and makes the border of utricule pulled, also is difficult for causing the utricule border and annular to produce the clearance between the limit, thereby ensures the detection precision of sensor to pressure on the circuit board.
Drawings
FIG. 1 is a schematic diagram of an oil-immersed pressure sensor;
FIG. 2 is an exploded schematic view of an oil immersed pressure sensor;
FIG. 3 is a cross-sectional view of an oil-immersed pressure sensor;
FIG. 4 is a schematic view showing the installation of the pressing member in the present embodiment;
figure 5 is a schematic view of the bladder installation in the present embodiment;
FIG. 6 is a schematic view showing the structure of another embodiment of the pressing member of the present embodiment;
fig. 7 is a schematic view showing the installation of another embodiment of the pressing member in this embodiment.
Description of reference numerals: 1. a housing; 2. a capsule body; 3. a circuit board; 31. a sensor; 4. a compression member; 5. an installation section; 6. an annular edge; 7. sealing the cavity; 8. a detection chamber; 9. a drainage duct; 10. a wire; 11. liquid oil; 12. an epoxy resin; 13. an end cap; 14. an extension groove; 141. a first ring groove; 142. a second ring groove.
Detailed Description
The present application is described in further detail below with reference to figures 1-7.
Referring to fig. 1, the oil-immersed pressure sensor includes a housing 1, a capsule 2, a circuit board 3, and a pressing member 4. Use the oil-immersed pressure sensor of this application, utricule 2 can transmit the pressure that receives for sensor 31 on the circuit board 3 and then realize the detection of pressure through liquid oil 11, through the setting of utricule 2 to avoid direct and circuit board 3 contacts such as external water, in order to improve this oil-immersed pressure sensor's life.
Specifically, the casing 1 is cylindrical as a whole, and both ends of the casing 1 are open and the inside of the casing 1 is hollow. Wherein, casing 1's one end is installation section 5, is provided with the external screw thread on installation section 5, and casing 1 can be installed on the equipment or the device that correspond through the external screw thread of installation section 5 by the screw thread, and in an embodiment, the oily formula pressure sensor in this application uses in the water pump field, and casing 1's installation section 5 is used for the screw thread to install on the water pump to the realization detects the water pressure of water pump.
Referring to fig. 2 and 3, the inner wall of the housing 1 is provided with an annular edge 6, and the annular edge 6 is located at the middle position of the housing 1. In this embodiment, the annular rim 6 is integrally formed on the inner wall of the housing 1. Through the setting of annular limit 6, annular limit 6 separates into seal chamber 7 and detection chamber 8 with the inner chamber of casing 1, and seal chamber 7 and detection chamber 8 communicate each other.
The sealing cavity 7 is far away from one side of the mounting section 5 of the shell 1, and the sealing cavity 7 is communicated with the end face of the shell 1. The detection cavity 8 is close to one side of the installation section 5 of the shell 1, and the shell 1 is provided with a drainage channel 9 on the installation section 5, so that the end surface of the installation section 5 of the shell 1 is communicated with the detection cavity 8 inside the shell 1 through the drainage channel 9.
Utricule 2 adopts fluorine silicon rubber, in order to pass through mould injection moulding, utricule 2 wholly is the semicircle sphere, utricule 2's one end opening, utricule 2 has the border around the opening round, from this, utricule 2 is from putting into when detecting the chamber 8 in the sealed chamber 7, utricule 2's outer wall is inconsistent with the inner ring wall of annular edge 6, utricule 2's border is contradicted on annular edge 6, thereby make utricule 2 embedding install the middle part position at casing 1.
Wherein, 6 departments that are close to utricule 2 on annular limit are provided with the chamfer, through the setting of chamfer, can reduce the injury of 6 borders on annular limit to 2 outer wall faces of utricule.
The circuit board 3 is disposed in the sealed cavity 7 of the housing 1, the circuit board 3 is closely attached to the capsule 2, the circuit board 3 is provided with a sensor 31, the sensor 31 faces one side of the capsule 2 and is located in an opening of the capsule 2, and a liquid oil 11 is filled between the capsule 2 and the circuit board 3, in this embodiment, the liquid oil 11 is silicone oil. Wherein, the circuit board 3 is provided with a lead 10, the lead 10 passes through the sealed cavity 7 of the shell 1 and is led out from the opening of the sealed cavity 7,
the pressing piece 4 is installed in the sealing cavity 7 of the shell 1, the pressing piece 4 is in contact with the circuit board 3, the pressing piece 4 is used for pressing the circuit board 3 on the capsule body 2, and then the pressing piece 4 can press the edge of the capsule body 2 on the annular edge 6.
In one embodiment, referring to fig. 4 and 5, the compressing element 4 is connected with the sealed cavity 7 of the housing 1 in a threaded manner, that is, an internal thread is provided on the wall of the sealed cavity 7 of the housing 1, the compressing element 4 is arranged in a ring shape, and an external thread matched with the internal thread is provided on the compressing element 4.
From this, compress tightly the mode that piece 4 installed on 1 sealed chamber 7 of casing through the screw thread, compress tightly piece 4 can compress tightly circuit board 3 on utricule 2 gradually, and then compress tightly the border of utricule 2 on annular edge 6, ensure the compactness between utricule 2 and annular board, circuit board 3 and utricule 2, liquid oil 11 between utricule 2 and the circuit board 3 can not ooze from utricule 2.
In another embodiment, referring to fig. 6 and 7, a clamping groove is formed in a wall of the sealed cavity 7 of the housing 1, the pressing member 4 is a clamp spring which is in clamping fit with the clamping groove, and a gasket is further arranged between the clamp spring and the circuit board 3 and used for reducing damage caused when the clamp spring presses the circuit board 3. It is worth to be noted that the clamping groove is arranged at a specific position on the wall of the sealed cavity 7 of the shell 1, after the capsule 2, the circuit board 3 and the gasket are installed, when the clamp spring is placed on the gasket, the clamp spring can be opposite to the clamping groove by providing downward pressing force of the clamp spring, and the clamp spring can be clamped into the clamping groove so as to press the circuit board 3. Consequently, compress tightly 4 and be the jump ring, through the jump ring gomphosis in the draw-in groove, the jump ring can compress tightly circuit board 3 on the utricule, compresses tightly 4 designs that adopt the jump ring, and the structure is simpler, and the processing convenience is high, and the processing cost is low.
From this, if install oily formula pressure sensor on the water pump, during detection chamber 8 is introduced to the water in the water pump, utricule 2 can transmit the pressure that receives for sensor 31 on circuit board 3 through liquid oil 11, and then realizes the detection of pressure, through the setting of utricule 2 to avoid direct and circuit board 3 contacts such as external water, in order to improve this oily formula pressure sensor's life.
In order to realize the sealing of the pressing piece 4 and the circuit board 3 in the sealing cavity 7, the sealing cavity 7 is filled with epoxy resin 12, the epoxy resin 12 is black epoxy resin 12, an end cover 13 for sealing the sealing cavity 7 is installed on the shell 1 in a threaded manner, and the end cover 13 and the pressing piece 4 share the internal thread of the inner wall of the sealing cavity 7 of the shell 1. It should be noted that, the middle portion of the end cap 13 is provided with a through hole for the wire 10 of the circuit board 3 to pass through, and after the sealing cavity 7 of the housing 1 is filled with the epoxy resin 12, the epoxy resin 12 can fill the gap between the through hole of the end cap 13 and the wire 10 of the circuit board 3 to ensure sealing.
Because, the border of utricule 2 is compressed tightly the back by circuit board 3, and the border of utricule 2 will produce certain extension, for the compactness of being connected between ensureing utricule 2 border and annular edge 6, this application will carry out following improvement to the structure on casing 1 installation cavity and annular edge 6.
Specifically, as shown in fig. 4 and 5, an extension groove 14 is disposed at a joint between a cavity wall of the sealing cavity 7 of the housing 1 and the annular edge 6, the extension groove 14 is used for accommodating an edge of the capsule 2, the extension groove 14 includes a first annular groove 141 opened on the cavity wall of the sealing cavity 7 of the housing 1 and a second annular groove 142 opened on the annular edge 6, the first annular groove 141 and the second annular groove 142 are communicated with each other, the first annular groove 141 extends in a radial direction of the housing 1, and the second annular groove 142 extends in an axial direction of the housing 1, in an embodiment, a groove depth of the first annular groove 141 is 1mm, and a groove depth of the second annular groove 142 is 0.5 mm. Thus, the first and second ring grooves 141 and 142 are formed in an L-shaped cross section.
Therefore, after the edge of the capsule body 2 is abutted against the annular edge 6, the edge of the capsule body 2 is embedded in the first annular groove 141, after the circuit board 3 is pressed on the capsule body 2 by the pressing piece 4, the edge of the capsule body 2 generates a certain extension, since the upper surface of the rim of the capsule 2 is blocked by the first ring groove 141, the rim of the capsule 2 is inserted into the second ring groove 142, therefore, the edge of the capsule 2 is folded, on one hand, the second annular groove 142 realizes the limit fixation of the edge of the capsule 2, the contact tightness between the edge of the capsule 2 and the annular edge 6 is better, after the capsule 2 is pressed in all directions in the detection cavity 8, the edge of the capsule body 2 is not easy to pull, the liquid oil 11 in the capsule body 2 is not easy to leak, and on the other hand, the liquid oil 11 is not easy to leak out from the space between the capsule body 2 and the annular edge 6 through the layer-by-layer sealing between the second annular groove 142 and the edge of the capsule body 2. Accordingly, the first ring groove 141 and the second ring groove 142 are provided, so that stability of the liquid oil 11 in the bladder 2 after being pressurized is ensured, and detection accuracy of the oil-immersed pressure sensor for pressure in the present application is ensured.
Through utricule 2's setting in this application to avoid direct and circuit board 3 contacts such as external water, with improve this oil-immersed pressure sensor's life.
Moreover, the setting of first annular groove 141 and second annular groove 142 in this application for 2 borders of utricule are drawn in spacingly, thereby utricule 2 receives the pressure of each direction in detecting chamber 8 and makes the border of utricule 2 pulled, also is difficult for causing the border of utricule 2 and the annular edge 6 between to produce the clearance, thereby ensures sensor 31 on the circuit board 3 to the detection precision of pressure.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (10)

1. An oil-immersed pressure sensor is characterized by comprising a shell (1), a capsule (2), a circuit board (3) and a pressing piece (4);
the inner part of the shell (1) is hollow, an annular edge (6) is arranged on the inner wall of the shell (1), and the annular edge (6) divides the inner cavity of the shell (1) into a sealing cavity (7) and a detection cavity (8);
the capsule body (2) is placed into the detection cavity (8), the edge of the capsule body (2) is abutted to the annular edge (6), the pressing piece (4) and the circuit board (3) are arranged in the sealing cavity (7) of the shell (1), the pressing piece (4) is used for pressing the circuit board (3) onto the capsule body (2) and pressing the capsule body (2) onto the annular edge (6), and liquid oil (11) is filled between the capsule body (2) and the circuit board (3).
2. The oil-immersed pressure sensor according to claim 1, wherein the wall of the sealed cavity (7) of the housing (1) is provided with an internal thread, and the pressing member (4) is provided with an external thread matched with the internal thread, or;
the clamping groove is formed in the wall of the sealing cavity (7) of the shell (1), and the pressing piece (4) is a clamping spring which is mutually clamped and embedded with the clamping groove.
3. Oil-filled pressure sensor according to claim 1, wherein the sealed cavity (7) is filled with epoxy resin (12), and an end cap (13) for closing the sealed cavity (7) is screwed on the housing (1).
4. Oil-filled pressure sensor according to claim 1, characterized in that an extension groove (14) is provided at the junction between the wall of the sealed cavity (7) of the housing (1) and the annular rim (6), and the extension groove (14) is used for accommodating the edge of the capsule (2).
5. Oil-filled pressure sensor according to claim 4, wherein the extension groove (14) comprises a first ring groove (141) formed in the wall of the sealing cavity (7) of the housing (1) and a second ring groove (142) formed in the annular rim (6), and the first ring groove (141) and the second ring groove (142) are in communication with each other.
6. Oil-filled pressure sensor according to claim 5, characterized in that the groove depth of the first ring groove (141) is 1mm and the groove depth of the second ring groove (142) is 0.5 mm.
7. Oil-filled pressure sensor according to claim 1, characterized in that the annular rim (6) is provided with a chamfer near the capsule (2).
8. Oil-filled pressure sensor according to claim 1, characterized in that the outer wall of the capsule (2) is in contact with the inner wall of the annular rim (6) when the capsule (2) is inserted into the detection chamber (8).
9. Oil-filled pressure sensor according to claim 1, characterized in that the liquid oil (11) is silicone oil.
10. Oil-filled pressure sensor according to claim 1, characterized in that the capsule (2) is made of fluorosilicone rubber.
CN202110161750.7A 2021-02-05 2021-02-05 Oil-immersed pressure sensor Pending CN112903178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110161750.7A CN112903178A (en) 2021-02-05 2021-02-05 Oil-immersed pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110161750.7A CN112903178A (en) 2021-02-05 2021-02-05 Oil-immersed pressure sensor

Publications (1)

Publication Number Publication Date
CN112903178A true CN112903178A (en) 2021-06-04

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110161750.7A Pending CN112903178A (en) 2021-02-05 2021-02-05 Oil-immersed pressure sensor

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CN (1) CN112903178A (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08285711A (en) * 1995-04-12 1996-11-01 Techno Excel Co Ltd Pressure detector
US20020077045A1 (en) * 1999-03-03 2002-06-20 Mitsubishi Materials Corporation Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
US20040050168A1 (en) * 2000-07-08 2004-03-18 Andreas Uberreiter System elements for measuring pressure in extracorporeal circuits
CN106573095A (en) * 2014-09-26 2017-04-19 费森尤斯医疗保健集团 Pressure output device for extracorporeal hemodialysis machine
CN209559390U (en) * 2019-03-11 2019-10-29 嵊州市铭动电子科技有限公司 A kind of pressure sensor structure
CN112292163A (en) * 2018-06-22 2021-01-29 日机装株式会社 Medical device and method of making the same
CN214748601U (en) * 2021-02-05 2021-11-16 台州辉腾泵业有限公司 Oil-immersed pressure sensor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08285711A (en) * 1995-04-12 1996-11-01 Techno Excel Co Ltd Pressure detector
US20020077045A1 (en) * 1999-03-03 2002-06-20 Mitsubishi Materials Corporation Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
US20040050168A1 (en) * 2000-07-08 2004-03-18 Andreas Uberreiter System elements for measuring pressure in extracorporeal circuits
CN106573095A (en) * 2014-09-26 2017-04-19 费森尤斯医疗保健集团 Pressure output device for extracorporeal hemodialysis machine
CN112292163A (en) * 2018-06-22 2021-01-29 日机装株式会社 Medical device and method of making the same
CN209559390U (en) * 2019-03-11 2019-10-29 嵊州市铭动电子科技有限公司 A kind of pressure sensor structure
CN214748601U (en) * 2021-02-05 2021-11-16 台州辉腾泵业有限公司 Oil-immersed pressure sensor

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