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CN112894139B - Ultrafast laser glass welding method - Google Patents

Ultrafast laser glass welding method Download PDF

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Publication number
CN112894139B
CN112894139B CN201911220520.2A CN201911220520A CN112894139B CN 112894139 B CN112894139 B CN 112894139B CN 201911220520 A CN201911220520 A CN 201911220520A CN 112894139 B CN112894139 B CN 112894139B
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China
Prior art keywords
welding
welded
area
laser
preset
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Chinese (zh)
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CN112894139A (en
Inventor
陈上杭
葛一丰
姚瑶
胡述旭
曹洪涛
吕启涛
高云峰
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Han s Laser Technology Industry Group Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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Priority to CN201911220520.2A priority Critical patent/CN112894139B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20Bonding
    • B23K26/21Bonding by welding
    • B23K26/24Seam welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/04Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54Glass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention relates to the technical field of glass welding, and discloses an ultrafast laser glass welding method, which comprises the following steps: fixing a first welding part and a second welding part which meet preset welding requirements through a welding jig, wherein a first area to be welded of the first welding part and/or a second area to be welded of the second welding part are/is made of glass materials; pressing the first area to be welded and/or the second area to be welded to obtain a fitting area smaller than a preset distance threshold; the welding jig is driven by the moving part, so that laser generated by the ultrafast laser is used for welding the first to-be-welded area of the first welding part and the second to-be-welded area of the second welding part according to a preset welding path in the first to-be-welded area and the second to-be-welded area, and the initial welding position of the preset welding path is located in the attaching area. The ultra-fast laser glass welding method provided by the invention can improve the processing range and the processing efficiency of the laser glass welding method.

Description

Ultrafast laser glass welding method
Technical Field
The invention belongs to the technical field of glass welding, and particularly relates to an ultrafast laser glass welding method.
Background
The glass material has high hardness, good insulating property and excellent optical property, and is widely applied to the fields of aerospace, optical devices, biomedical science, electronic packaging and the like. In some special application scenarios, the glass material needs to be fixed. The existing glass fixedly-connecting method mainly comprises an adhesive bonding method and a laser glass welding method. The joint produced by the bonding method has poor fatigue resistance, and can be loosened due to solidification of the adhesive layer in the middle under a high-temperature environment, so that the joint is invalid. In the existing laser glass welding method, the F-theta field lens is used for focusing the light beam and the X-Y vibrating lens is used for high-speed scanning to perform wire welding.
However, in the conventional laser glass welding method, the F- θ field lens has a problem that the lens edge is not consistent with the center focus. The laser welding of glass is sensitive to the focal position, and when the welding range is large, the problems of low welding seam strength and poor sealing performance caused by the offset of focus are easily generated in the edge area. Meanwhile, only if the focusing light spot is small enough and the light spot energy density is high enough, glass melting and welding can be promoted. For F-theta field lenses, smaller focused spot size means smaller process range, which limits the application range of the laser glass welding method to some extent, as well as the process efficiency.
Disclosure of Invention
The invention aims to provide an ultrafast laser glass welding method, which aims to solve the technical problems of small processing range and low processing efficiency of the existing laser glass welding method.
In order to achieve the above purpose, the invention adopts the following technical scheme: an ultrafast laser glass welding method is provided, comprising:
fixing a first welding part and a second welding part which meet preset welding requirements through a welding jig, wherein a first area to be welded of the first welding part and/or a second area to be welded of the second welding part are made of glass materials;
pressing the first to-be-welded area and/or the second to-be-welded area made of glass materials so that a fitting area smaller than a preset distance threshold exists between the first to-be-welded area and the second to-be-welded area;
the welding jig is driven by the moving part, so that laser generated by the ultrafast laser is arranged in the first area to be welded and the second area to be welded, the first area to be welded of the first welding part and the second area to be welded of the second welding part are welded according to a preset welding path, and the initial welding position of the preset welding path is positioned in the attaching area.
Optionally, the pressing the first region to be welded and/or the second region to be welded made of glass material includes:
pressing the first area to be welded and/or the second area to be welded, which are made of glass materials, through an adjusting mechanism of the welding jig, so that the first area to be welded and the second area to be welded are clung;
judging whether interference fringes exist in the first area to be welded and/or the second area to be welded, which are made of glass materials;
and if interference fringes exist in the first area to be welded and/or the second area to be welded, which are made of glass materials, determining the area with the interference fringes as the attaching area.
Optionally, the preset distance threshold comprises 3 μm.
Optionally, before the first welding component and the second welding component meeting the preset welding requirement are fixed by the welding jig, the method further includes:
cleaning a first contact surface of the first welding part in the first area to be welded, a second contact surface of the second welding part in the second area to be welded and a non-contact surface containing a laser incidence position through a preset cleaning program so that the first welding part and the second welding part meet the preset welding requirement; the non-contact surface is a first non-contact surface of the first welding part, which is away from the first area to be welded, and/or a second non-contact surface of the second welding part, which is away from the second area to be welded.
Optionally, the preset cleaning procedure includes:
performing first cleaning on a surface to be cleaned by using a fat-soluble cleaning agent, wherein the surface to be cleaned comprises the first contact surface, the second contact surface and the non-contact surface;
performing a second cleaning of the surface to be cleaned using a water cleaner;
and drying the surface to be cleaned.
Optionally, the driving the welding jig through the moving part includes:
a first control signal is sent to the ultrafast laser through a control device so as to control the working state of the ultrafast laser; the ultrafast laser and the moving part are both connected with the control device;
and sending a second control signal to the moving part through the control device so as to control the moving part to drive the welding jig to move according to the preset welding path.
Optionally, the moving component drives the welding jig, so that laser generated by the ultrafast laser is in the first area to be welded and the second area to be welded, the first welding component and the second welding component are welded according to a preset welding path, and before the initial welding position is in the attaching area, the method further includes:
receiving a path planning instruction through an input device connected with the control device;
and setting the preset welding path on the control device according to the path planning instruction, and setting the initial welding position to be in the attaching area.
Optionally, the moving component drives the welding jig, so that laser generated by the ultrafast laser is in the first area to be welded and the second area to be welded, the first welding component and the second welding component are welded according to a preset welding path, and an initial welding position is in the attaching area, including:
adjusting the laser light generated by the ultrafast laser through an adjustable optical path so that the adjusted laser light acts on the first welding component and the second welding component; the adjustable light path is provided with a variable-magnification beam expander, a reflector and a microscope objective, laser generated by the ultrafast laser is reflected to the microscope objective for focusing through the reflector after the beam diameter is adjusted by the variable-magnification beam expander, and finally the focused laser acts on the first area to be welded and the second area to be welded.
Optionally, the spot diameter of the laser acting on the first area to be welded and the second area to be welded is 0-10 μm, and the focal depth is less than 20 μm.
Optionally, the moving part comprises a three-dimensional moving platform, wherein the moving speed of the three-dimensional moving platform on a horizontal plane is 0-100mm/s, and the moving precision on a vertical plane is +/-0.03 mm;
the power of the ultrafast laser is 1-2W.
The ultra-fast laser glass welding method provided by the invention has the beneficial effects that the motion tracks of the first welding part and the second welding part are controlled by the motion parts, and in the welding process, the focus of laser can be kept to act on the junction part of the first area to be welded and the second area to be welded, so that the consistency of the welding line quality in the processing range can be ensured, the welding strength of the welding line can be improved, and the applicable motion parts can be selected according to the requirement, wherein the motion range of the motion parts is far greater than the deflection range of the vibrating mirror, that is, the processing range of the welding line is greatly improved. Therefore, for the parts with larger welding range, the method provided by the invention can realize one-time welding without step-by-step welding, thereby greatly improving the welding efficiency of the parts with larger welding range. In addition, the welding jig arranged on the moving part can accurately adjust the distance between the first area to be welded and the second area to be welded, and the quality of laser welding is ensured.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of main components of an ultrafast laser glass welding method according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a first welding component according to an embodiment of the present invention;
fig. 3 is a schematic diagram of interference fringes generated in a bonding region according to an embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
Referring to fig. 1 and 2 together, the method for welding ultrafast laser glass according to the present invention will now be described. The ultra-fast laser glass welding method comprises the following steps:
fixing the first welding part 06 and the second welding part 07 which meet the preset welding requirement through a welding jig (not shown), wherein a first area to be welded of the first welding part 06 and/or a second area to be welded of the second welding part 07 are/is made of glass materials;
pressing the first region to be welded and/or the second region to be welded made of glass material so that a fitting region 0611 smaller than a preset distance threshold exists between the first region to be welded and the second region to be welded;
the welding jig is driven by the moving component, so that laser 05 generated by the ultrafast laser 01 is welded in the first region to be welded 061 and the second region to be welded according to a preset welding path, the first region to be welded 061 of the first welding component 06 and the second region to be welded of the second welding component 07 are welded, and the initial welding position of the preset welding path is located in the attaching region 0611.
In this embodiment, the preset welding requirement refers to a welding requirement applicable to laser processing. The ultra-fast laser glass welding method provided by the embodiment is suitable for welding glass materials and welding between glass materials and non-glass materials. In other words, at least one of the first region to be welded 061 of the first welding part 06 and the second region to be welded of the second welding part 07 is made of a glass material. Non-glass material refers to a material that can be welded with glass material, such as a metallic material.
The welding jig is a fixing mechanism which is adapted to the shape of the first welding member 06 and the second welding member 07 and can be used to fix the relative positions of the first welding member 06 and the second welding member 07. The welding jig is provided with an adjusting mechanism which can adjust the pressure between the first region to be welded 061 of the first welding part 06 and the second region to be welded of the second welding part 07, and further adjust the distance between the first region to be welded 061 and the second region to be welded. Within a certain pressure adjusting range (not exceeding the upper pressure bearing limit of the first welding part 06 and the second welding part 07), the greater the pressure applied by the adjusting mechanism to the first area to be welded 061 and the second area to be welded is, the smaller the distance between the first area to be welded 061 and the second area to be welded is; conversely, the smaller the pressure applied by the adjusting mechanism to the first region to be welded 061 and the second region to be welded, the larger the distance between the first region to be welded 061 and the second region to be welded. In some cases, a cylinder may be used as the adjustment mechanism.
The preset distance threshold may be set according to specific welding requirements. In the case where the first region to be welded 061 of the first welding part 06 is made of a glass material and the second region to be welded of the second welding part 07 is made of a glass material, the preset distance threshold may be 3 μm. In some cases, the thickness of the first region to be welded 061 and the thickness of the second region to be welded may also have an influence on the preset distance. It is noted that the pressure acting on the first area to be welded 061 and the second area to be welded is not required to be completely uniform here. Referring to fig. 2, in fig. 2, if there is a bonding region 0611 smaller than a preset distance threshold, the first region 061 to be welded and the second region to be welded may be welded. The bonding region 0611 in fig. 2 is only an exemplary region, and in reality, the shape of the bonding region 0611 may be an irregular pattern.
In particular, the ultrafast laser glass welding method provided in this embodiment must use the ultrafast laser 01 as a laser light source. The ultrafast laser 01 can be a femtosecond laser produced by a large-family laser company, and the laser produced by the laser has the advantages of short pulse width, high peak power and small welding heat affected zone. The laser wavelength selected may penetrate the glass material. The laser 05 generated by the ultrafast laser 01 also has the advantages of small spot size and short focal depth, can weld the ultrathin glass with the thickness as low as 0.1mm, and has no damage to the outer surface of the glass in the welding process.
The height of the moving part is adjustable and horizontally movable. The welding jig is fixed on the moving part. By adjusting the height of the moving part, the focal point of the laser generated by the ultrafast laser 01 falls between the first area to be welded 061 and the second area to be welded, that is, the laser penetrates the first area to be welded 061 of the first welding part 06 (at this time, the first area to be welded 061 is made of glass material), and falls between the first area to be welded 061 and the second area to be welded, so that the first area to be welded 061 and the second area to be welded are welded. Here, the first area to be welded 061 is a plate-shaped transparent glass, and the laser 05 is perpendicularly incident into the first area to be welded 061.
The preset welding path may refer to a track formed by a plurality of welding spots to be welded in the first region to be welded 061 and the second region to be welded. The moving part drives the welding jig according to a preset welding path, so that the first region to be welded 061 and the second region to be welded gradually generate welding spots with the positions close to each other (the welding spot spacing is 0.03-0.2 mm) along the preset welding path, and then the welding seam with the required high welding strength is formed. In particular, in order to ensure better welding quality, it is necessary to set the initial welding position within the fitting region 0611. Because the bonding effect of the first region to be welded 061 and the second region to be welded is better in the bonding region 0611, the quality of the formed weld is also higher. While the weld quality of the initial weld location has a significant impact on the overall weld quality. The bonding distance between the first region to be welded 061 and the second region to be welded in the adjacent contact region can be reduced by utilizing the internal stress of the welding seam formed in the bonding region 0611, so that the overall welding quality of the welding seam is improved.
In the welding process, the moving part moves in a horizontal mode (relative to the vertical downward direction of the laser 05), the laser 05 is always vertical to the surface of the first area to be welded 061, the focus is kept unchanged, the consistency of welding lines in the whole processing range can be ensured, and the welding strength is greatly improved. In addition, the movable range of the moving part is far larger than the scanning range of the traditional galvanometer, which can reach more than 4 times of the scanning range of the galvanometer, and the processing range is greatly improved. Therefore, for the parts with larger welding range, the ultrafast laser glass welding method provided by the embodiment can realize one-time welding without step welding, and greatly improves the welding efficiency of the parts with larger welding range.
Optionally, the pressing the first to-be-welded area 061 and/or the second to-be-welded area made of glass material includes:
pressing the first to-be-welded area 061 and/or the second to-be-welded area made of glass material through an adjusting mechanism of the welding jig, so that the first to-be-welded area 061 and the second to-be-welded area are clung;
judging whether interference fringes exist in the first to-be-welded area 061 and/or the second to-be-welded area made of glass materials;
if interference fringes exist in the first to-be-welded area 061 and/or the second to-be-welded area made of glass materials, determining the area where the interference fringes appear as the attaching area 0611.
In some cases, the fitting region 0611 smaller than the preset distance threshold may be determined by judging whether interference fringes occur between the first region to be welded 061 and the second region to be welded. As shown in fig. 3, fig. 3 is a schematic diagram of interference fringes produced in the bonding region 0611. In some cases, the force between the first region to be welded 061 and the second region to be welded is unbalanced, resulting in interference fringes not being straight lines but curved lines. But this case does not affect the determination of the fitting region 0611 nor the quality of the weld formed between the first region to be welded 061 and the second region to be welded.
Optionally, before the first welding component 06 and the second welding component 07 that meet the preset welding requirement are fixed by the welding jig, the method further includes:
cleaning a first contact surface of the first welding part 06 in the first area to be welded 061, a second contact surface of the second welding part 07 in the second area to be welded, and a non-contact surface including a laser incidence position by a preset cleaning program so that the first welding part 06 and the second welding part 07 meet the preset welding requirement; the non-contact surface is a first non-contact surface of the first welding component 06 facing away from the first area to be welded 061, and/or a second non-contact surface of the second welding component 07 facing away from the second area to be welded.
In this embodiment, in order to ensure good welding quality, the first welding member 06 and the second welding portion need to be cleaned at the portion where they contact the laser light 05. The specific cleaning parts are a first contact surface (in fig. 1, in the lower surface of the first welding member 06) at the first area to be welded 061, a second contact surface (in fig. 1, in the upper surface of the second welding member 07) at the second area to be welded, and a non-contact surface (in fig. 1, in the upper surface of the first welding member 06) including a laser beam incident position.
Optionally, the preset cleaning procedure includes:
performing first cleaning on a surface to be cleaned by using a fat-soluble cleaning agent, wherein the surface to be cleaned comprises the first contact surface, the second contact surface and the non-contact surface;
performing a second cleaning of the surface to be cleaned using a water cleaner;
and drying the surface to be cleaned.
In this embodiment, the preset cleaning program includes three subroutines, a first subroutine for removing fat-soluble stains on the first contact surface, the second contact surface and the non-contact surface, a second subroutine for removing water-soluble stains on the first contact surface, the second contact surface and the non-contact surface, and a third subroutine for drying the surface that has been cleaned twice (i.e., the original surface to be cleaned). The fat-soluble cleaning agent may be alcohol and the water-cleaning agent may be distilled water.
Optionally, the driving the welding jig through the moving part includes:
a first control signal is sent to the ultrafast laser 01 through a control device so as to control the working state of the ultrafast laser 01; the ultrafast laser 01 and the moving part are both connected with the control device;
and sending a second control signal to the moving part through the control device so as to control the moving part to drive the welding jig to move according to the preset welding path.
In this embodiment, the control device may be a computer device connected to the ultrafast laser 01 and the moving part, respectively. When the laser welding is performed, the control device can output the first control signal and the second control signal simultaneously, so that the first welding component 06 and the second welding component 07 are welded at a high speed and accurately. The first control signal is used for controlling the working state of the ultrafast laser 01; and the second control signal is used for controlling the moving part to drive the welding jig to move according to the preset welding path, and the first welding part 06 and the second welding part 07 also move along with the movement of the welding jig. The welding speed of the welding seam which can be realized by the moving part can reach 100mm/s.
Optionally, the driving the welding jig by using a moving component, so that the laser 05 generated by the ultrafast laser 01 welds the first welding component 06 and the second welding component 07 according to a preset welding path in the first area to be welded 061 and the second area to be welded, and before the initial welding position is located in the attaching area 0611, the method further includes:
receiving a path planning instruction through an input device connected with the control device;
and setting the preset welding path on the control device according to the path planning instruction, and setting the initial welding position to be in the attaching region 0611.
In this embodiment, the input device includes, but is not limited to, a keyboard and a mouse. The user can set the welding path and the initial welding position through the input device, and a path planning instruction is generated.
Optionally, the driving the welding jig by the moving component, so that the laser 05 generated by the ultrafast laser 01 is in the first area to be welded 061 and the second area to be welded, and the first welding component 06 and the second welding component 07 are welded according to a preset welding path, and an initial welding position is in the attaching area 0611, including:
adjusting the laser light generated by the ultrafast laser 01 by an adjustable optical path so that the adjusted laser light 05 acts on the first welding member 06 and the second welding member 07; the adjustable light path is provided with a variable-magnification beam expander 02, a reflector 03 and a microscope objective 04, after the beam diameter of laser 05 generated by the ultrafast laser 01 is adjusted by the variable-magnification beam expander 02, the laser 05 is reflected to the microscope objective 04 by the reflector 03 to focus, and finally the focused laser 05 acts on the first area to be welded 061 and the second area to be welded.
In this embodiment, the laser light generated by the ultrafast laser 01 may be adjusted using an adjustable optical path, so as to improve the workability of the ultrafast laser 01. The variable magnification beam expander 02 arranged on the adjustable light path can change the diameter of the laser 05. The microscope objective 04 provided on the tunable optical path focuses the laser light to reduce the focal depth (focal depth) of the laser light 05.
Optionally, the spot diameter of the laser light 05 acting on the first area to be welded 061 and the second area to be welded is 0-10 μm, and the focal depth is less than 20 μm.
In this embodiment, the diameter of the variable magnification beam expander 02 and the focal length of the microscope objective 04 are adjusted, so that the spot diameter of the laser 05 can be 0-10 μm, and the focal depth is less than 20 μm. The lower the depth of focus of laser 05, the smaller the heat affected zone and the lower the thickness of the processable glass lens. The thickness of the processable glass may be as low as 0.1mm.
Optionally, the moving part comprises a three-dimensional moving platform, wherein the moving speed of the three-dimensional moving platform on a horizontal plane is 0-100mm/s, and the moving precision on a vertical plane is +/-0.03 mm;
the power of the ultrafast laser 01 is 1-2W.
In the embodiment, on the premise of ensuring the welding quality, the moving speed of the three-dimensional moving platform on the horizontal plane is 0-100mm/s, namely the fastest welding speed of the ultrafast laser 01 can reach 100mm/s. The three-dimensional moving platform can move up and down in the vertical plane, and the position heights of the first welding part 06 and the second welding part 07 are adjusted so that the focus of the laser 05 acts on the first area to be welded 061 and the second area to be welded. Here, the movement accuracy of the three-dimensional movement platform in the vertical plane is ±0.03mm. The power of the ultrafast laser 01 may be 1-2W. Since the ultrafast laser 01 used in this embodiment has a smaller spot diameter and a lower power, the generated welding heat effect is also smaller.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims (7)

1. An ultrafast laser glass welding method, comprising:
fixing a first welding part and a second welding part which meet preset welding requirements through a welding jig, wherein a first area to be welded of the first welding part and/or a second area to be welded of the second welding part are/is made of glass materials;
pressing the first to-be-welded area and/or the second to-be-welded area made of glass materials so that a fitting area smaller than a preset distance threshold exists between the first to-be-welded area and the second to-be-welded area; the preset distance threshold is 3 mu m;
the welding jig is driven by the moving part, so that laser generated by the ultrafast laser welds the first to-be-welded area of the first welding part and the second to-be-welded area of the second welding part according to a preset welding path in the first to-be-welded area and the second to-be-welded area, and the initial welding position of the preset welding path is in the attaching area; the spot diameter of the laser acting on the first area to be welded and the second area to be welded is 0-10 mu m, and the focal depth is less than 20 mu m; the power of the ultrafast laser is 1-2W; the preset welding path refers to a track formed by a plurality of welding spots to be welded in the first area to be welded and the second area to be welded; the moving part drives a welding jig according to a preset welding path, so that welding spots with the adjacent positions are gradually generated by the first area to be welded and the second area to be welded along the preset welding path, and the welding spot spacing is 0.03mm-0.2mm; thereby forming a weld joint with high welding strength; in the welding process, keeping the focus of laser to act on the junction part of the first area to be welded and the second area to be welded;
wherein the pressing the first region to be welded and/or the second region to be welded made of glass material includes:
pressing the first area to be welded and/or the second area to be welded, which are made of glass materials, through an adjusting mechanism of the welding jig, so that the first area to be welded and the second area to be welded are clung;
judging whether interference fringes exist in the first area to be welded and/or the second area to be welded, which are made of glass materials;
and if interference fringes exist in the first area to be welded and/or the second area to be welded, which are made of glass materials, determining the area with the interference fringes as the attaching area.
2. The ultrafast laser glass welding method according to claim 1, wherein before the first welding part and the second welding part which meet the preset welding requirement are fixed by the welding jig, further comprising:
cleaning a first contact surface of the first welding part in the first area to be welded, a second contact surface of the second welding part in the second area to be welded and a non-contact surface containing a laser incidence position through a preset cleaning program so that the first welding part and the second welding part meet the preset welding requirement; the non-contact surface is a first non-contact surface of the first welding part facing away from the first area to be welded and/or a second non-contact surface of the second welding part facing away from the second area to be welded.
3. The ultra-fast laser glass welding method according to claim 2, wherein the preset cleaning procedure comprises:
performing first cleaning on a surface to be cleaned by using a fat-soluble cleaning agent, wherein the surface to be cleaned comprises the first contact surface, the second contact surface and the non-contact surface;
performing a second cleaning of the surface to be cleaned using a water cleaner;
and drying the surface to be cleaned.
4. The ultra-fast laser glass welding method according to claim 1, wherein the driving the welding jig by the moving part comprises:
a first control signal is sent to the ultrafast laser through a control device so as to control the working state of the ultrafast laser; the ultrafast laser and the moving part are both connected with the control device;
and sending a second control signal to the moving part through the control device so as to control the moving part to drive the welding jig to move according to the preset welding path.
5. The method for ultra-fast laser glass welding according to claim 4, wherein the moving part drives the welding jig so that the laser generated by the ultra-fast laser welds the first welding part and the second welding part according to a preset welding path in the first area to be welded and the second area to be welded, and the initial welding position is located before the bonding area, further comprising:
receiving a path planning instruction through an input device connected with the control device;
and setting the preset welding path on the control device according to the path planning instruction, and setting the initial welding position to be in the attaching area.
6. The method for ultra-fast laser glass welding according to claim 1, wherein the moving part drives the welding jig so that the laser generated by the ultra-fast laser welds the first welding part and the second welding part in the first area to be welded and the second area to be welded according to a preset welding path, and the initial welding position is located in the bonding area, comprising:
adjusting the laser light generated by the ultrafast laser through an adjustable optical path so that the adjusted laser light acts on the first welding component and the second welding component; the adjustable light path is provided with a variable-magnification beam expander, a reflector and a microscope objective, laser generated by the ultrafast laser is reflected to the microscope objective for focusing through the reflector after the beam diameter is adjusted by the variable-magnification beam expander, and finally the focused laser acts on the first area to be welded and the second area to be welded.
7. The ultrafast laser glass welding method according to claim 1, wherein the moving part comprises a three-dimensional moving platform, the moving speed of the three-dimensional moving platform in a horizontal plane is 0-100mm/s, and the moving precision in a vertical plane is +/-0.03 mm.
CN201911220520.2A 2019-12-03 2019-12-03 Ultrafast laser glass welding method Active CN112894139B (en)

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CN106925891A (en) * 2017-05-05 2017-07-07 湖南理工学院 It is a kind of while the method for realizing multiple pieces of glass encapsulation and internal processing
CN108723595A (en) * 2018-04-26 2018-11-02 华南师范大学 A kind of ultrafast laser welder and method
CN108581188A (en) * 2018-06-21 2018-09-28 华中科技大学 A kind of recombination laser welds the method and device of transparent fragile material
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