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CN112880912B - Space resolution pressure measurement system and method based on vacuum holographic optical tweezers - Google Patents

Space resolution pressure measurement system and method based on vacuum holographic optical tweezers Download PDF

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CN112880912B
CN112880912B CN202110025166.9A CN202110025166A CN112880912B CN 112880912 B CN112880912 B CN 112880912B CN 202110025166 A CN202110025166 A CN 202110025166A CN 112880912 B CN112880912 B CN 112880912B
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light
beam splitter
electric field
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CN112880912A (en
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胡慧珠
陈铭
陈杏藩
高晓文
李楠
刘承
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Zhejiang University ZJU
Zhejiang Lab
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Zhejiang Lab
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Abstract

本发明公开了一种基于真空全息光镊的空间分辨压强测量系统及方法。包括真空腔、微纳粒子、光镊装置及反馈冷却装置、驱动电场装置、空间光调制器、偏振控制及检测装置和残余气体分析仪；激光从激光源出来经过第一分光镜入射到第一偏振分光镜发生透射，经空间光调制器反射调制、第一凸透镜透射汇聚后形成捕获光，捕获光照射微纳粒子处形成光阱捕获区域，捕获光经过微纳粒子后经第二凸透镜透射汇聚后入射到第二偏振分光镜发生反射和透射，第二偏振分光镜发生反射的光束入射到第一光电二极管；六个电极布置在光阱捕获区域周围。本发明利用全息光镊的操控灵活性，结合微纳粒子的局域探测手段，可以实现高真空下微纳尺度空间分辨率的压强分布测量。

Figure 202110025166

The invention discloses a space-resolved pressure measurement system and method based on vacuum holographic optical tweezers. Including vacuum cavity, micro-nano particles, optical tweezers device and feedback cooling device, driving electric field device, spatial light modulator, polarization control and detection device and residual gas analyzer; The polarizing beam splitter transmits, is reflected and modulated by the spatial light modulator, and the first convex lens transmits and converges to form trapped light. The trapped light illuminates the micro-nano particles to form a light trap capture area. The trapped light passes through the micro-nano particles and is transmitted and converged by the second convex lens. After being incident on the second polarizing beam splitter, it is reflected and transmitted, and the light beam reflected by the second polarizing beam splitter is incident on the first photodiode; six electrodes are arranged around the light trap capturing area. The invention utilizes the manipulation flexibility of the holographic optical tweezers and combines the local detection means of micro-nano particles to realize the pressure distribution measurement of the micro-nano-scale spatial resolution under high vacuum.

Figure 202110025166

Description

Space resolution pressure measurement system and method based on vacuum holographic optical tweezers
Technical Field
The invention relates to an instrument and a method for measuring micro-nano scale local pressure intensity spatial distribution, belongs to the technical field of precision measurement, and particularly relates to a spatial resolution pressure intensity measuring system and method based on vacuum holographic optical tweezers.
Background
A vacuum gauge is an instrument that measures the degree of vacuum or pressure. Has wide application in scientific research and industrial fields. The traditional vacuum measuring means include ionization vacuum gauge, capacitance film vacuum gauge, magnetic suspension rotor vacuum gauge, etc., and the principle and calibration means are different. For example, ionization vacuum gauges ionize gas molecules by applying an electric field, and then measure the conductivity. The magnitude of the electrical conductivity depends on the density of the surrounding ionized gas molecules, so that the magnitude of the pressure can be deduced; the capacitance film vacuum gauge uses a film as a polar plate of a capacitor, and when the external pressure intensity changes, the movement of the film can cause the change of the capacitor, so as to measure the pressure intensity; the magnetic suspension rotor vacuum gauge is characterized in that a sphere is suspended through a magnetic field, and the pressure intensity can be obtained by measuring the retardation force of surrounding gas on the rotation of the sphere.
All the above methods measure the pressure at the macro scale, and the pressure is not necessarily equal at the micro scale due to problems such as pumping impedance during the vacuum pumping. The current methods for measuring local pressure are limited. The vacuum optical tweezers system can suspend micro-nano particles, and naturally has the local detection capability of micro-nano scale.
Since 1971 the optical tweezers was invented by Ashkin et al, a physicist of the united states, this technology was applied to the fields of medical treatment, thermodynamic research, and the like. Then, a vacuum optical tweezers technology is developed, so that the method can be well decoupled from the environment, and very high measurement accuracy is obtained. For example, optical tweezers may be used to measure weak forces, accelerations, displacements, etc. The trapping light of the vacuum optical tweezers has no influence on the rotational freedom for trapping the micro-nano particles if pure linear polarized light is used. And because the effect of the suspended micro-nano particles on the environment is little, the rotational freedom degree of the particles is simply retarded by surrounding gas molecules, and therefore the particles can be used for measuring the surrounding pressure. Meanwhile, the interaction between the gas molecules and the micro-nano particles can only be realized in a collision mode, so that the pressure measured by the micro-nano particles is the local pressure equivalent to the size of the micro-nano particles. Moreover, the micro-nano particles are slightly interfered by the outside, so that the measuring method can still have higher measuring precision under high vacuum.
By exploiting the interference properties of light, the way a light beam propagates in space can be manipulated by modulating the wavefront. The holographic optical tweezers adjust the intensity or phase distribution of a light beam to a specific form through a spatial light modulator and the like, so that a plurality of focusing positions can be formed in space, or a focusing point can be moved in a preset track. The control flexibility of the holographic optical tweezers is combined with the local pressure measurement means of the vacuum optical tweezers, and the obtained vacuum holographic optical tweezers can measure the micro-nano scale resolution ratio of the pressure distribution in the space.
The traditional pressure measurement means is difficult to realize for the pressure distribution measurement of micro-nano scale spatial resolution, especially under high vacuum. The particle is suspended at different positions in the space by using the vacuum holographic optical tweezers technology, so that the particle is almost only influenced by the collision of surrounding gas molecules, and the pressure measurement means is greatly expanded. Industrially and academically, in particular, the development of vacuum technology is of great significance.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides a spatial resolution pressure measurement system and method based on vacuum holographic optical tweezers.
The technical scheme adopted by the invention is as follows:
a spatial resolution pressure measurement system based on vacuum holographic optical tweezers comprises:
the vacuum holographic optical tweezers spatial resolution pressure measurement system comprises a vacuum cavity VC, a micro-nano particle MS, an optical tweezers device, a feedback cooling device, a driving electric field device E, a spatial light modulator SLM, a polarization control and detection device and a residual gas analyzer RGA;
the driving electric field device E comprises six electrodes, the polarization control and detection device comprises a polarization control device and a polarization detection device, the polarization control device adopts a first polarization beam splitter PBS1, the polarization detection device comprises a second polarization beam splitter PBS2 and a first photodiode PD1, the optical tweezers device comprises a laser source LS, a first convex lens L1 and a second convex lens L2, and the feedback cooling device comprises a first beam splitter BS1, a second beam splitter BS2, a first reference light source LO1, a second photodiode PD2, a third beam splitter BS3, a second reference light source LO2 and a four-quadrant detector QPD;
an optical tweezers device, a driving electric field device E, a micro-nano particle MS and a residual gas analyzer RGA are arranged in a vacuum cavity VC, a second convex lens L2 and a first convex lens L1 are respectively symmetrically positioned at the upper side and the lower side of the micro-nano particle MS and are arranged on the same optical axis, a spatial light modulator SLM, a first polarizing beam splitter PBS1, a first beam splitter BS1, a second beam splitter BS2, a laser source LS, a first reference light source LO1 and a second photodiode PD2 are arranged outside the vacuum cavity VC below the first convex lens L1, a second polarizing beam splitter PBS2 is arranged outside the vacuum cavity VC above the second convex lens L2, and a first photodiode PD1, a third beam splitter BS3, a second reference light source LO2 and a four-quadrant detector QPD are arranged outside the vacuum cavity VC;
original laser is emitted from a laser source LS, is transmitted through a first beam splitter BS1 and then enters a first polarization beam splitter PBS1 to be transmitted, so that a light beam is changed into p polarization, the p polarization is parallel to an incident surface, the s polarization is vertical to the incident surface, then the light is subjected to reflection modulation by a spatial light modulator SLM and transmission convergence by a first convex lens L1 in sequence to form captured light, the captured light irradiates a micro-nano particle MS to form a light trap capturing area, meanwhile, the captured light passes through the micro-nano particle MS and then is transmitted and converged by a second convex lens L2 and then enters a second polarization beam splitter PBS2 to be reflected and transmitted, wherein the reflected light only contains the s polarization, the transmitted light only contains the p polarization, the light beam reflected by a second polarization beam splitter PBS2 enters a first photodiode PD1, the light beam transmitted by a second polarization beam splitter PBS2 enters a third beam splitter BS3 to be transmitted, and the light beam transmitted by a third splitter BS3 enters a four-quadrant detector QPD, a light beam emitted by the second reference light source LO2 is reflected by the third beam splitter BS3 and then is incident on the four-quadrant detector QPD;
a reflected light beam of the captured light irradiating the micro-nano particles MS is reversely reflected to a first beam splitter BS1 to be reflected and then enters a second polarization beam splitter PBS2 to be transmitted, a light beam transmitted by the second polarization beam splitter PBS2 enters a second photodiode PD2, and a light beam emitted by a first reference light source LO1 is reflected by a second polarization beam splitter PBS2 and then enters a second photodiode PD 2;
the six electrodes are respectively arranged beside the side of the solid six sides around the optical trap capturing area.
The light beam transmitted by the second polarizing beam splitter PBS2 is combined with light emitted by a second reference light source LO2 at a third beam splitter BS3, and the light is incident to a four-quadrant detector for detection and heterodyne interferometry to obtain the displacement of the micro-nano particle MS on a two-dimensional plane vertical to the direction of captured light;
the light beam reflected back to the first polarizing beam splitter PBS1 after the micro-nano particle MS is irradiated by the captured light is reflected by the first beam splitter BS1, then is combined with the light emitted by the first reference light source LO1 at the position of the second beam splitter BS2, and is incident to the second photodiode PD2 for detection and heterodyne interferometry, so that the displacement of the micro-nano particle MS in the direction parallel to the captured light is obtained;
and performing feedback cooling adjustment on the light intensity I output by the laser source LS by using the measured displacement of the micro-nano particles MS in three dimensions which are vertical to the direction of the captured light and parallel to the direction of the captured light.
And a light-transmitting optical window for light beam transmission/passing is arranged on the cavity wall of the vacuum cavity VC.
The optical tweezers device is output by a laser source LS, and is modulated by a spatial light modulator SLM and converged in a vacuum cavity VC through a first convex lens L1 to form the vacuum holographic optical tweezers.
Secondly, a pressure measurement method of a space resolution pressure measurement system based on the vacuum holographic optical tweezers is characterized in that: the method comprises the following steps:
1) starting a spatial resolution pressure measurement system, irradiating the micro-nano particles MS in the vacuum cavity VC by using captured light to form a light trap capture area, and generating optical power on the micro-nano particles MS by using the captured light;
2) releasing a micro-nano particle MS from the upper part of the optical trap capturing area, then enabling the micro-nano particle MS to make free falling body movement downwards under the action of gravity, enabling the micro-nano particle MS to reach the optical trap capturing area to be captured, and stabilizing the micro-nano particle MS at the center of the optical trap capturing area through feedback cooling;
3) applying voltage to six electrodes around the optical trap trapping region to form a vertical upward electric field, wherein the electric field generates an electric field force F to the micro-nano particles MSEAdjusting the light intensity I of the trapped light to make the micro-nano particles MS in the electric field force FEKeeping balance under the stress of the light force and the gravity, and measuring the electric field force and the light intensity of the captured light;
4) gradually increasing the electric field in the preset electric field value range from small to large, repeating the step 4) for multiple times of measurement, and utilizing the linear relation I between the electric field force obtained by multiple times of measurement and the light intensity I of the captured light according to the following formula ═ alpha FEFitting the + beta to obtain a first fitting parameter alpha and a second fitting parameter beta to obtain a linear relation;
5) will not catchWhen the light intensity I of the obtained light is 0, the linear relation I is alpha FEThe electric field force F obtained in + betaEObtaining the mass m of the micro-nano particle MS as the gravity of the micro-nano particle MS, and then calculating by combining the known density of the micro-nano particle MS to obtain the radius r of the micro-nano particle MS;
6) measuring molecular mass m of residual gas in vacuum cavity VC by residual gas analyzer RGA0；
7) Under the condition of no electric field, the micro-nano particles MS are kept balanced under the stress of light force and gravity by adjusting the light intensity I of the captured light, and the rotation frequency of the micro-nano particles MS is measured by a polarization control and detection device to be used as the stable rotation frequency f of the micro-nano particles MS without the electric fieldopt；
8) Modulating through a Spatial Light Modulator (SLM), moving an optical trap capturing area of the vacuum holographic optical tweezers, and moving to a required position to be measured;
9) opening an electric field, and controlling the electric field to drive the micro-nano particles MS to have a stable rotation frequency f higher than that of the micro-nano particles MS without the electric fieldoptRotating, keeping the micro-nano particles MS balanced under the stress of light force and gravity by adjusting the light intensity I of the captured light, and measuring the rotation frequency of the micro-nano particles MS as the stable rotation frequency f with an electric field by using a polarization control and detection device0；
10) Closing the electric field, measuring the data of the change of the rotation frequency of the micro-nano particles MS along with the time after the electric field is closed, and fitting the following formula by substituting to obtain the relaxation time tau:
Figure GDA0003267238870000041
wherein f (t) represents the rotation frequency of the micro-nano particles at the moment t, t represents the moment, e represents a natural constant, tau represents relaxation time, t represents0Indicating the moment when the electric field is switched off;
then, the retardation coefficient beta of the gas is calculated according to the following formula based on the relaxation time taurot：
τ＝J/βrot
Wherein, betarotIndicating gasThe retardation coefficient of the body, J represents the moment of inertia of the micro-nano particle MS, and the moment of inertia J of the micro-nano particle MS is obtained through the mass m and the radius r of the micro-nano particle MS;
finally according to the retardation coefficient beta of the gasrotMolecular mass m of residual gas0And processing the radius r of the micro-nano particles by adopting the following formula to obtain the pressure of the position to be measured:
Figure GDA0003267238870000042
Figure GDA0003267238870000043
where κ denotes the pressure coefficient, P denotes the pressure at the desired location to be measured, T denotes the temperature of the residual gas molecules in the vacuum chamber VC, kBRepresents Boltzmann constants;
11) and continuously repeating the steps 8) to 10), and measuring the pressure intensities of different positions in the space in the vacuum cavity VC to form pressure intensity distribution.
In the polarization control and detection device, a first photodiode PD1 receives an optical signal and analyzes the optical signal to obtain the light intensity change frequency of s polarization vertical to captured light, and 1/2 of the light intensity change frequency of s polarization is taken as the rotation frequency of the micro-nano particles.
The micro-nano particles are uniform silica spheres with known density, and the size of the micro-nano particles determines the spatial resolution of the pressure intensity measured by the method. Before the implementation of the method is started, the micro-nano particles can be adsorbed on a supporting device by Van's force, and the micro-nano particles are released by high-frequency vibration of piezoelectric ceramics at the beginning of measurement and enter an optical trap capturing area to be captured.
The laser is adjusted to be linearly polarized by a polarization control device, and after the laser interacts with the micro-nano particles, the change frequency f of the s-polarized light intensity is detected by a polarization detection devicePSo as to obtain the rotation frequency f of the micro-nano particle MSP/2。
Driving using electric field and electric dipole moment coupling of micro-nano particlesMicro-nano particles ofopt×102Or higher frequency, to rotate stably. And then, the driving electric field is closed, so that the rotation speed of the micro-nano particles is gradually reduced under the retardation action of residual gas molecules around. By measuring the change of the rotation frequency along with the time, the local pressure at the current position can be obtained.
The measurement of the electric field force is obtained by obtaining the electric field at the micro-nano particles by using the known voltage and electrode position and combining the electric charge quantity of the micro-nano particles. The charge amount of the micro-nano particles is controlled by irradiating the electrodes with ultraviolet light to discharge the electrodes to the micro-nano particles. The charge quantity of the micro-nano particles can be accurately regulated and controlled to a single electron electric quantity by utilizing the quantization characteristic of the charge.
The spatial light modulator is used for generating holographic optical tweezers in the form of diffraction gratings and Fresnel lenses, and the capture positions of micro-nano particles can be changed in a three-dimensional mode, so that different positions in space can be measured.
The pressure intensity measured by the method is the local pressure intensity of the micro scale, and the pressure intensity distribution of each position in the space can be measured by combining the characteristic that the holographic optical tweezers can change the capture position of the micro-nano particles. The holographic optical tweezers are a method for changing the capture position of the holographic optical tweezers by modulating the phase or intensity distribution of light by using the interference characteristics of light.
In the invention, the optical tweezers device outputs laser through a laser source, and the laser is converged in a vacuum cavity through a convex lens to form vacuum optical tweezers; the feedback cooling device collects light reflected and transmitted by the micro-nano particles, utilizes the spectroscope and light output by the reference light source to perform heterodyne interferometry, and generates a feedback signal to adjust the power of laser output by the laser source; the micro-nano particle release device is positioned in the vacuum cavity and provides micro-nano particles as a measuring medium; the electric field and the electric dipole moment of the micro-nano particles are driven to be coupled so as to rotate at a high speed; the spatial light modulator generates holographic optical tweezers by modulating the wave front of the captured light; the polarization control and detection device detects the rotating speed of the micro-nano particles by utilizing the coupling of the electric dipole moment of the micro-nano particles and the polarization of light, and achieves the effect of measuring pressure by combining a gas component measuring device.
The spatial resolution pressure measurement system provided by the invention utilizes the high spatial resolution of the vacuum optical tweezers to suspend the micro-nano particles, combines the easy controllability of the holographic optical tweezers, and measures the pressure distribution of the micro-nano scale through the retardation of the rotational freedom of the micro-nano particles by gas molecules.
The invention has the beneficial effects that:
the invention provides a system and a method for measuring the spatial resolution pressure intensity based on vacuum holographic optical tweezers for the first time, the pressure intensity is measured by utilizing the collision between the micro-nano particles and the surrounding gas, and the measured resolution can reach the size of the micro-nano particles due to the local interaction. And because the vacuum holographic optical tweezers system well eliminates the interference of the external environment on the micro-nano particles, the micro-nano particles are almost only influenced by the gas to be measured, and thus, the good measurement precision can be achieved. And by combining the characteristic that the holographic optical tweezers can change the capture position of the micro-nano particles, the method can realize the measurement of the spatial pressure distribution of the micro-nano scale resolution. Provides a novel measuring means for industrial and scientific research, especially for the technical field of vacuum.
Drawings
FIG. 1 is a schematic view of the apparatus of the present invention;
FIG. 2 is a flow chart of the spatially resolved pressure measurement of the present invention;
fig. 3 is a schematic diagram of the holographic optical tweezers adjusting the trapping position according to the present invention.
In the figure: the device comprises a vacuum cavity VC, a micro-nano particle MS, a first convex lens L1, a second convex lens L2, a first polarization beam splitter PBS1, a second polarization beam splitter PBS2 and a photodiode PD.
Detailed Description
The invention is further illustrated by the following examples in conjunction with the accompanying drawings:
the vacuum holographic optical tweezers spatial resolution pressure measurement system comprises a vacuum cavity VC, a micro-nano particle MS, an optical tweezers device, a feedback cooling device, a driving electric field device E, a spatial light modulator SLM, a polarization control and detection device and a residual gas analyzer RGA; the driving electric field device E comprises six electrodes, the polarization control and detection device comprises a polarization control device and a polarization detection device, the polarization control device adopts a first polarization beam splitter PBS1, the polarization detection device comprises a second polarization beam splitter PBS2 and a first photodiode PD1, the first photodiode PD1 is used for detecting optical signals, and the optical tweezer device comprises a first convex lens L1 and a second convex lens L2; an optical tweezers device, a driving electric field device E, a micro-nano particle MS, a release device of the micro-nano particle MS and a residual gas analyzer RGA are arranged in a vacuum cavity VC, a second convex lens L2 and a first convex lens L1 are symmetrically arranged at the upper side and the lower side of the micro-nano particle MS respectively and are arranged on the same optical axis, the driving electric field device E is six electrodes and is arranged beside the side of the six-side of a three-dimensional surface of the micro-nano particle MS to form six surfaces of a cube, a spatial light modulator SLM is arranged outside the vacuum cavity VC below the first convex lens L1, a first polarization beam splitter PBS1, a first beam splitter BS1, a second beam splitter BS2, a laser source LS, a first reference light source LO1 and a second photodiode PD2, and a second polarization beam splitter PBS2 is arranged outside the vacuum cavity VC above the second convex lens L2, a first photodiode PD1, a third beam splitter BS3, a second reference light source LO2 and a four-quadrant detector QPD are arranged in the vacuum cavity VC; the optical tweezers device outputs laser through a laser source LS, and the SLM and the first convex lens L1 are modulated through the spatial light modulator and converged in the vacuum cavity VC to form vacuum holographic optical tweezers; the feedback cooling device collects light reflected and transmitted by the micro-nano particles MS, the reflected light and the light combined beam output by the first reference light source LO1 are incident to the second photodiode PD2 through the second beam splitter BS2 for heterodyne interference measurement, the transmitted light and the light combined beam output by the second reference light source LO2 are incident to the four-quadrant detector QPD through the third beam splitter BS3 for heterodyne interference measurement, and a feedback signal is generated to adjust the power of the laser output by the laser source LS. Captured light emitted from a laser source LS is incident to a first polarization beam splitter PBS1 through a first beam splitter BS1 to be transmitted, then is subjected to reflection modulation through a spatial light modulator SLM and is transmitted and converged through a first convex lens L1 in sequence to form captured light, light beams are converged in a vacuum cavity to form vacuum holographic optical tweezers, the captured light irradiates a micro-nano particle MS to form a single-beam light trap capturing area aiming at micro-nano particles, meanwhile, the captured light is incident to a second polarization beam splitter PBS2 to be reflected and transmitted after being subjected to transmission and convergence through a second convex lens L2 after passing through the micro-nano particles, and light beams reflected by a second polarization beam splitter PBS2 are incident to a first photodiode PD 1; the light beam transmitted by the second PBS2 is combined with the laser emitted by the second reference light source LO2 at the third beam splitter BS3 and then is incident on the four-quadrant detector QPD for heterodyne interferometry; the captured light reflected by the micro-nano particles MS is reflected by a first spectroscope BS1 after passing through a first convex lens L1, a spatial light modulator SLM and a first polarizing beam splitter PBS1, and is incident to a second photodiode PD2 for heterodyne interference measurement after passing through a second spectroscope BS2 and the light beam emitted by a first reference light source LO 1; the micro-nano particles MS are positioned in the center of the vacuum cavity VC, and six electrodes are symmetrically arranged on the sides of the six sides of the solid around the optical trap capturing area to form six sides of a cube.
And receiving a light beam transmitted by the second polarizing beam splitter PBS2 and a light beam reflected back to the first polarizing beam splitter PBS1 after the micro-nano particles MS are irradiated by the captured light. For the light beam transmitted by the second polarization beam splitter PBS2, the light beam is combined with the light beam emitted by the second reference light source LO2 by the third beam splitter BS3, and heterodyne interferometry is performed by a four-quadrant detector, so that the displacement of the micro-nano particles in the direction perpendicular to the captured light is obtained. And for the light beam returning to the first polarizing beam splitter PBS1, the light beam is reflected by the first beam splitter BS1, and under the action of the second beam splitter BS2, the light beam is combined with the light beam emitted from the first reference light source LO1 and enters the second photodiode PD2 to perform heterodyne interferometry, so that the displacement of the micro-nano particles in the direction parallel to the captured light is obtained. And (3) carrying out feedback cooling regulation on the light intensity I output by the laser source LS by using the measured displacement of the micro-nano particles.
The micro-nano particle MS is a medium for pressure measurement and is provided by a micro-nano particle release device in each measurement process; the micro-nano particles MS are made of silicon materials.
The vacuum cavity provides a measuring environment close to vacuum for the micro-nano particles, a light-transmitting optical window is arranged on the cavity wall of the vacuum cavity, and optical signals inside and outside the vacuum cavity are transmitted through the optical window.
Six electrodes of the driving electric field apply voltages for driving the particles to rotate.
The spatial light modulator modulates the wave front phase of the captured light to form the holographic optical tweezers, and is further used for changing the optical trap capturing area of the holographic optical tweezers.
The polarization control and detection device is used for detecting the rotation frequency of the micro-nano particles, and the rotation frequency of the micro-nano particles is obtained by analyzing and processing light signals received by the first photodiode PD 1.
The original laser is processed into laser in a p polarization direction through the first polarizing beam splitter PBS1, then the captured light is in the p polarization direction, the captured light in the p polarization direction is influenced by rotation of the micro-nano particles in the vacuum cavity to generate light in an s polarization direction, and then the light is reflected to the first photodiode PD1 through the second polarizing beam splitter PBS2, and then the light intensity change frequency in the s polarization direction is analyzed to obtain the rotation frequency of the micro-nano particles.
The residual gas analyzer is used for the composition and quality of gas molecules in the vacuum chamber.
The specific implementation process of the invention is as follows:
1) starting a spatial resolution pressure measurement system, irradiating the micro-nano particles MS in the vacuum cavity VC with captured light to form a single-beam light trap capture area aiming at the micro-nano particles, and capturing light to generate light force on the micro-nano particles MS;
2) releasing a micro-nano particle from the upper part of the optical trap capturing area, then enabling the micro-nano particle MS to make free falling body movement downwards under the action of gravity, enabling the micro-nano particle MS to reach the optical trap capturing area to be captured, and stabilizing the micro-nano particle MS at the center of the optical trap capturing area through feedback cooling;
3) applying voltage to six electrodes around the optical trap trapping region to form a vertical upward electric field, wherein the electric field generates an electric field force F to the micro-nano particles MSEAdjusting the light intensity I of the captured light through feedback cooling to enable the micro-nano particles MS to have the electric field force FEKeeping balance under the stress of the light force and the gravity, and measuring the electric field force and the light intensity of the captured light;
4) gradually increasing the electric field from small to large in a preset electric field value range, specifically from 1 × 103V/m is gradually increased to 1X 105V/m, repeating the step 4) for multiple times of measurement, reducing the light intensity I of the captured light through feedback cooling during each measurement, enabling the micro-nano particles to be always in a stress balance state, and measuring the electric field force and the light intensity of the captured light; the electric field force obtained by multiple times of measurement and the light intensity I of the captured light are utilized to obtain the linearity of the light intensity I according to the following formulaThe relationship I ═ α FEFitting the + beta to obtain a first fitting parameter alpha and a second fitting parameter beta to obtain a linear relation;
5) the linear relation I-alpha F is entered when the light intensity I-0 of the non-captured light is equal toEThe electric field force F obtained in + betaECalculating to obtain the radius r of the micro-nano particles by combining the known density of the micro-nano particles as the gravity of the micro-nano particles, namely the mass m of the micro-nano particles;
6) measuring residual gas molecular mass m in vacuum cavity VC by residual gas analyzer0；
7) Under the condition of no electric field, the light intensity of the captured light is adjusted through feedback cooling to keep the micro-nano particles MS in balance under the stress of light force and gravity, the micro-nano particles reach a stable motion state under the action of the captured light, and the rotation frequency of the micro-nano particles at the moment is measured by a polarization control and detection device to be used as the stable rotation frequency f of the micro-nano particles without the electric fieldopt；
A first photodiode PD1 in the polarization control and detection device receives an optical signal and analyzes the optical signal to obtain the change frequency of the polarized light intensity vertical to the captured light, and 1/2 of the change frequency of the polarized light intensity vertical to the captured light is taken as the rotation frequency of the micro-nano particles.
8) Modulating through a Spatial Light Modulator (SLM), moving an optical trap capturing area of the holographic optical tweezers, and moving to a position to be measured;
9) opening an electric field, and controlling the electric field to drive the micro-nano particles to be higher than the stable rotation frequency f of the micro-nano particles without the electric fieldoptRotating, adjusting the light intensity of the captured light through feedback cooling to keep the micro-nano particles MS balanced under the stress of light force and gravity, and measuring the rotation frequency of the micro-nano particles at the moment by using a polarization control and detection device as the stable rotation frequency f with an electric field0；
The specific implementation generally needs to be more than two orders of magnitude higher, and here the higher the rotation frequency, the lower limit of the air pressure that can be measured.
Sinusoidal voltage signals with equal amplitude and frequency are applied to the front, back, left and right electrodes on the same plane, and the phase of the driving signals between the two adjacent electrodes is different by a quarter of a cycle. Thus, an electric field with constant size and direction rotating in a plane is generated at the micro-nano particles. Due to the electric dipole moment coupling of the electric field and the micro-nano particles, the micro-nano particles can rotate along with the electric field.
10) Closing the electric field, measuring the data of the change of the rotation frequency of the micro-nano particles along with the time after the electric field is closed, and fitting the following formula by substituting to obtain the relaxation time tau:
Figure GDA0003267238870000091
wherein f (t) represents the rotation frequency of the micro-nano particles at the moment t, t represents the moment, e represents a natural constant, tau represents relaxation time, t represents0Indicating the moment when the electric field is switched off;
then, the retardation coefficient beta of the gas is calculated according to the following formula based on the relaxation time taurot：
τ＝I/βrot
Wherein, betarotThe retardation coefficient of the gas is represented, I represents the moment of inertia of the micro-nano particles, and the moment of inertia I of the micro-nano particles is obtained through the mass m and the radius r of the micro-nano particles;
finally according to the retardation coefficient beta of the gasrotMolecular mass m of residual gas0And processing the radius r of the micro-nano particles by adopting the following formula to obtain the pressure of the position to be measured:
Figure GDA0003267238870000092
Figure GDA0003267238870000093
wherein, k represents the pressure coefficient, P represents the pressure of the position to be measured, T represents the temperature of the residual gas in the vacuum chamber, kBRepresents Boltzmann constants;
11) and continuously repeating the steps 8) to 10), and measuring the pressure intensities of different positions in the vacuum cavity to form pressure intensity distribution.
Fig. 3 is a schematic diagram of changing the trapping position using holographic optical tweezers. Where a), c), e) represent three phase distributions on the spatial light modulator, for convenience represented by a transmissive spatial light modulator, and b), d), f) are the corresponding three trapping patterns. In an optical path diagram, collimated capture light beams sequentially pass through a spatial light modulator and a converging lens from left to right, and are finally focused at a designated position in an image space to form a capture area. a) The spatial light modulator does not modulate the captured light, the phase of the captured light is equal everywhere on the exit surface of the spatial light modulator, and correspondingly in b), the captured light is focused on the center of the focal plane of the lens after being converged by the lens. c) The medium spatial light modulation adjusts the phase of the trapped light in the form of a diffraction grating, as shown in fig. d), causing the focus position of the trapped light to shift laterally. The distance and direction of movement can be adjusted by varying the groove density and groove direction of the diffraction grating. e) The medium spatial light modulator adjusts the phase of the trapped light in the form of a Fresnel lens such that the focal position of the trapped light in f) is moved axially by a distance that is adjustable by the axial reticle density on the spatial light modulator. Scalar sum is carried out on the two phase modulations of c) and e), and 2 pi is subjected to residue, so that a phase adjusting mode for simultaneously changing the transverse and axial focusing positions can be obtained.
Therefore, the implementation shows that the pressure distribution measurement of the micro-nano scale spatial resolution under high vacuum can be realized by utilizing the control flexibility of the holographic optical tweezers and combining the local detection means of the micro-nano particles.

Claims (6)

1.一种基于真空全息光镊的空间分辨压强测量系统，其特征在于：1. a spatially resolved pressure measurement system based on vacuum holographic optical tweezers, is characterized in that: 所述的真空全息光镊空间分辨压强测量系统包括真空腔VC、微纳粒子MS、光镊装置及反馈冷却装置、驱动电场装置E、空间光调制器SLM、偏振控制及检测装置和残余气体分析仪RGA；The vacuum holographic optical tweezers space-resolved pressure measurement system includes a vacuum cavity VC, a micro-nano particle MS, an optical tweezers device and a feedback cooling device, a driving electric field device E, a spatial light modulator SLM, a polarization control and detection device, and residual gas analysis. Instrument RGA; 驱动电场装置E包含六个电极，偏振控制及检测装置包含偏振控制装置和偏振检测装置，偏振控制装置采用第一偏振分光镜PBS1，偏振检测装置包含第二偏振分光镜PBS2和第一光电二极管PD1，光镊装置包含激光源LS第一凸透镜L1和第二凸透镜L2，反馈冷却装置包含第一分光镜BS1、第二分光镜BS2、第一参考光源LO1、第二光电二极管PD2、第三分光镜BS3、第二参考光源LO2和四象限探测器QPD；真空腔VC内布置光镊装置、驱动电场装置E、微纳粒子MS和残余气体分析仪RGA，第二凸透镜L2和第一凸透镜L1分别对称位于微纳粒子MS的上下两侧且同光轴布置，第一凸透镜L1下方的真空腔VC外布置空间光调制器SLM、第一偏振分光镜PBS1、第一分光镜BS1、第二分光镜BS2、激光源LS、第一参考光源LO1和第二光电二极管PD2，第二凸透镜L2上方的真空腔VC外布置第二偏振分光镜PBS2，第一光电二极管PD1、第三分光镜BS3、第二参考光源LO2和四象限探测器QPD；The driving electric field device E includes six electrodes, the polarization control and detection device includes a polarization control device and a polarization detection device, the polarization control device adopts a first polarization beam splitter PBS1, and the polarization detection device includes a second polarization beam splitter PBS2 and a first photodiode PD1 , the optical tweezers device includes a laser source LS, a first convex lens L1 and a second convex lens L2, and the feedback cooling device includes a first beam splitter BS1, a second beam splitter BS2, a first reference light source LO1, a second photodiode PD2, and a third beam splitter BS3, the second reference light source LO2 and the four-quadrant detector QPD; the optical tweezers device, the driving electric field device E, the micro-nano particle MS and the residual gas analyzer RGA are arranged in the vacuum chamber VC, the second convex lens L2 and the first convex lens L1 are respectively symmetrical The space light modulator SLM, the first polarizing beam splitter PBS1, the first beam splitter BS1, and the second beam splitter BS2 are arranged outside the vacuum cavity VC under the first convex lens L1, which are located on the upper and lower sides of the micro-nano particle MS and are arranged on the same optical axis. , the laser source LS, the first reference light source LO1 and the second photodiode PD2, the second polarizing beam splitter PBS2 is arranged outside the vacuum cavity VC above the second convex lens L2, the first photodiode PD1, the third beam splitter BS3, the second reference Light source LO2 and four-quadrant detector QPD; 原始激光从激光源LS出射，经过第一分光镜BS1透射入射到第一偏振分光镜PBS1发生透射，使光束变成p偏振，再依次经空间光调制器SLM反射调制、第一凸透镜L1透射汇聚后形成捕获光，捕获光照射微纳粒子MS处形成光阱捕获区域，同时捕获光经过微纳粒子MS后再经第二凸透镜L2透射汇聚后入射到第二偏振分光镜PBS2发生反射和透射，其中反射光只包含s偏振，透射光只包含p偏振，第二偏振分光镜PBS2反射的光束入射到第一光电二极管PD1，第二偏振分光镜PBS2透射的光束入射到第三分光镜BS3发生透射，第三分光镜BS3透射的光束入射到四象限探测器QPD，第二参考光源LO2发出光束经第三分光镜BS3反射后入射到四象限探测器QPD；捕获光照射微纳粒子MS的反射光束按原路逆反到第一分光镜BS1发生反射，再入射到第二偏振分光镜PBS2发生透射，第二偏振分光镜PBS2透射的光束入射到第二光电二极管PD2，第一参考光源LO1发出光束经第二偏振分光镜PBS2反射后入射到第二光电二极管PD2；六个电极分别布置在光阱捕获区域周围的立体六面侧旁。The original laser is emitted from the laser source LS, transmitted through the first beam splitter BS1 and incident to the first polarization beam splitter PBS1 for transmission, so that the beam becomes p-polarized, and then is reflected and modulated by the spatial light modulator SLM in turn, and transmitted and converged by the first convex lens L1. Then the trapping light is formed, and the trapping light irradiates the micro-nano particle MS to form a light trap capturing area. At the same time, the trapping light passes through the micro-nano particle MS and then is transmitted and concentrated by the second convex lens L2, and then incident on the second polarizing beam splitter PBS2 for reflection and transmission. The reflected light only contains s-polarization, and the transmitted light only contains p-polarization. The beam reflected by the second polarizing beam splitter PBS2 is incident on the first photodiode PD1, and the beam transmitted by the second polarizing beam splitter PBS2 is incident on the third beam splitter BS3 for transmission. , the beam transmitted by the third beam splitter BS3 is incident on the four-quadrant detector QPD, and the beam emitted by the second reference light source LO2 is reflected by the third beam splitter BS3 and then incident on the four-quadrant detector QPD; the captured light illuminates the reflected beam of the micro-nano particles MS According to the original path, it is reflected by the first beam splitter BS1, and then incident on the second polarizing beam splitter PBS2 for transmission. The beam transmitted by the second polarizing beam splitter PBS2 is incident on the second photodiode PD2, and the first reference light source LO1 emits a beam through the The second polarizing beam splitter PBS2 is reflected and incident to the second photodiode PD2; the six electrodes are respectively arranged beside the three-dimensional six-sided side around the light trap capturing area. 2.根据权利要求1所述的一种基于真空全息光镊的空间分辨压强测量系统，其特征在于：透射过第二偏振分光镜PBS2的光束在第三分光镜BS3处和第二参考光源LO2射出的光进行合束，入射到四象限探测器探测进行外差干涉测量，得到微纳粒子MS在垂直于捕获光的方向上的位移；经捕获光照射微纳粒子MS后反射回到第一偏振分光镜PBS1的光束，经过第一分光镜BS1的反射后在第二分光镜BS2处与第一参考光源LO1出射的光进行合束，入射到第二光电二极管PD2探测进行外差干涉测量，得到微纳粒子MS在平行于捕获光的方向上的位移；利用测得的微纳粒子MS在垂直于捕获光的方向和平行于捕获光的方向的位移对激光源LS输出的光强I进行反馈冷却调节。2. a kind of space-resolved pressure measurement system based on vacuum holographic optical tweezers according to claim 1, is characterized in that: the light beam transmitted through the second polarizing beam splitter PBS2 is at the third beam splitter BS3 and the second reference light source LO2 The emitted light is combined into beams, incident on a four-quadrant detector for detection by heterodyne interferometry, and the displacement of the micro-nano particle MS in the direction perpendicular to the captured light is obtained; after the capture light illuminates the micro-nano particle MS, it is reflected back to the first The light beam of the polarizing beam splitter PBS1 is reflected by the first beam splitter BS1 and then combined with the light emitted by the first reference light source LO1 at the second beam splitter BS2, and then incident on the second photodiode PD2 for detection and heterodyne interferometry. The displacement of the micro-nano particle MS in the direction parallel to the captured light is obtained; the measured displacement of the micro-nano particle MS in the direction perpendicular to the captured light and the direction parallel to the captured light is used to measure the light intensity I output by the laser source LS. Feedback cooling adjustment. 3.根据权利要求1所述的一种基于真空全息光镊的空间分辨压强测量系统，其特征在于：所述的真空腔VC的腔壁上开有用于光束透过/经过的透光光学窗口。3. A kind of space-resolved pressure measurement system based on vacuum holographic optical tweezers according to claim 1, it is characterized in that: the cavity wall of described vacuum cavity VC is provided with the light-transmitting optical window for light beam to pass through/through . 4.根据权利要求1所述的一种基于真空全息光镊的空间分辨压强测量系统，其特征在于：所述的光镊装置由激光源LS输出，经过空间光调制器SLM调制和第一凸透镜L1汇聚在真空腔VC内形成真空全息光镊。4. a kind of space-resolved pressure measurement system based on vacuum holographic optical tweezers according to claim 1, is characterized in that: described optical tweezers device is output by laser source LS, modulates through spatial light modulator SLM and first convex lens L1 converges in the vacuum cavity VC to form vacuum holographic optical tweezers. 5.根据权利要求1-4任一所述基于真空全息光镊的空间分辨压强测量系统的压强测量方法，其特征在于：方法如下：5. according to the arbitrary described pressure measuring method of the space-resolved pressure measuring system based on vacuum holographic optical tweezers of claim 1-4, it is characterized in that: method is as follows: 1)开启空间分辨压强测量系统，捕获光照射真空腔VC内微纳粒子MS处形成光阱捕获区域，捕获光对微纳粒子MS产生光力；1) Turn on the space-resolved pressure measurement system, and the trapping light irradiates the micro-nano particles MS in the vacuum chamber VC to form an optical trap capturing area, and the trapping light generates optical force on the micro-nano particles MS; 2)从光阱捕获区域上方释放一个微纳粒子MS，之后微纳粒子MS在重力作用下向下做自由落体运动，到达光阱捕获区域被捕获，并通过反馈冷却稳定于光阱捕获区域的中心；2) A micro-nano particle MS is released from the top of the trapping area of the optical trap, and then the micro-nano particle MS is in free fall under the action of gravity, reaches the trapping area of the optical trap and is captured, and is stabilized in the trapping area of the optical trap by feedback cooling. center; 3)对光阱捕获区域周围的六个电极施加电压形成竖直向上的电场，电场对微纳粒子MS产生电场力FE，通过调节捕获光的光强I使微纳粒子MS在电场力FE、光力和重力受力下保持平衡，测量电场力和捕获光的光强；3) Apply a voltage to the six electrodes around the capture area of the optical trap to form a vertical upward electric field, and the electric field generates an electric field force F E on the micro-nano particles MS. By adjusting the light intensity I of the captured light, the micro-nano particles MS are in the electric field force F E. Keep balance under the force of light force and gravity, measure the electric field force and the light intensity of the captured light; 4)将电场在预设电场值范围从小到大逐渐增加，重复步骤4)多次测量，再利用多次测量获得的电场力和捕获光的光强I按照以下公式的线性关系I＝αFE+β拟合获得第一拟合参数α和第二拟合参数β，获得线性关系；4) Gradually increase the electric field in the preset electric field value range from small to large, repeat step 4) for multiple measurements, and then use the electric field force obtained by multiple measurements and the light intensity I of the captured light according to the linear relationship of the following formula I=αF E +β fitting obtains the first fitting parameter α and the second fitting parameter β, and obtains a linear relationship; 5)将无捕获光的光强I＝0时代入线性关系I＝αFE+β中获得的电场力FE作为微纳粒子MS的重力，即可得到微纳粒子MS的质量m，再结合微纳粒子MS的已知密度计算获得微纳粒子MS的半径r；5) The electric field force F E obtained from the linear relationship I = αF E + β is taken as the gravity of the micro-nano particle MS, and the mass m of the micro-nano particle MS can be obtained, and then combined Calculate the known density of the micro-nano particle MS to obtain the radius r of the micro-nano particle MS; 6)用残余气体分析仪RGA测量真空腔VC内的残余气体分子质量m0；6) measure the residual gas molecular mass m 0 in the vacuum chamber VC with the residual gas analyzer RGA; 7)在未加电场的情况下，通过调节捕获光的光强I使微纳粒子MS在光力和重力受力下保持平衡，用偏振控制及检测装置测量此时微纳粒子MS的转动频率作为无电场的微纳粒子MS的稳定转动频率fopt；7) In the absence of an electric field, the light intensity I of the captured light is adjusted to keep the micro-nano particles MS in balance under the force of light and gravity, and the rotation frequency of the micro-nano particles MS is measured with a polarization control and detection device. as the stable rotational frequency f opt of the micro-nano particle MS without electric field; 8)通过空间光调制器SLM调制，移动真空全息光镊的光阱捕获区域，移动到所需待测位置；8) Move the optical trap capturing area of the vacuum holographic optical tweezers to the desired position to be measured by modulating the spatial light modulator SLM; 9)打开电场，控制电场驱动微纳粒子MS以高于无电场的微纳粒子MS的稳定转动频率fopt旋转，通过调节捕获光的光强I使微纳粒子MS在光力和重力受力下保持平衡，利用偏振控制及检测装置测量测出此时微纳粒子MS的转动频率作为有电场的稳定转动频率f0；9) Turn on the electric field, and control the electric field to drive the micro-nano particles MS to rotate at a higher frequency f opt than the stable rotation frequency f opt of the micro-nano particles MS without electric field. Keep the balance under the condition, and use the polarization control and detection device to measure and measure the rotation frequency of the micro-nano particle MS at this time as the stable rotation frequency f 0 of the electric field; 10)关闭电场，通过测量关闭电场后微纳粒子MS的转动频率随时间变化的数据，通过代入拟合以下公式获得弛豫时间τ：10) Turn off the electric field, and obtain the relaxation time τ by substituting and fitting the following formula by measuring the data of the change of the rotation frequency of the micro-nano particle MS with time after the electric field is turned off:
Figure FDA0003267238860000031
Figure FDA0003267238860000031
 其中，f(t)表示时刻t下的微纳粒子MS的转动频率，t表示时刻，e表示自然常数，τ表示弛豫时间，t0表示关闭电场的时刻；Among them, f(t) represents the rotational frequency of the micro-nano particle MS at time t, t represents the time, e represents the natural constant, τ represents the relaxation time, and t 0 represents the moment when the electric field is turned off; 接着根据弛豫时间τ按照以下公式计算气体的阻滞系数βrot：Then, according to the relaxation time τ, the retardation coefficient β rot of the gas is calculated according to the following formula: τ＝J/βrot τ=J/ βrot 其中，βrot表示气体的阻滞系数，J表示微纳粒子MS的转动惯量，微纳粒子MS的转动惯量J是通过微纳粒子MS的质量m和半径r获得；Among them, β rot represents the retardation coefficient of the gas, J represents the moment of inertia of the micro-nano particle MS, and the moment of inertia J of the micro-nano particle MS is obtained by the mass m and the radius r of the micro-nano particle MS; 最后根据气体的阻滞系数βrot、残余气体分子质量m0和微纳粒子MS的半径r采用以下公式处理获得所需待测位置的压强：Finally, according to the gas retardation coefficient β rot , the residual gas molecular mass m 0 and the radius r of the micro-nano particle MS, the following formula is used to obtain the required pressure at the position to be measured:
Figure FDA0003267238860000032
Figure FDA0003267238860000032
Figure FDA0003267238860000033
Figure FDA0003267238860000033
 其中，κ表示压强系数，P表示所需待测位置的压强，T表示真空腔VC内残余气体分子的温度，kB表示波尔兹曼常数；Among them, κ represents the pressure coefficient, P represents the pressure at the required position to be measured, T represents the temperature of the residual gas molecules in the vacuum chamber VC, and k B represents the Boltzmann constant; 11)不断重复以上8)～10)步骤，测出真空腔VC内空间中不同位置的压强，形成压强分布。11) Repeat the above steps 8) to 10) continuously to measure the pressure at different positions in the space in the vacuum chamber VC to form a pressure distribution. 6.根据权利要求5所述的压强测量方法，其特征在于：6. pressure measurement method according to claim 5, is characterized in that: 所述的偏振控制及检测装置中第一光电二极管PD1接收光信号分析获得s偏振的光强变化频率，取s偏振光强变化频率的1/2作为微纳粒子MS的转动频率。The first photodiode PD1 in the polarization control and detection device analyzes the received light signal to obtain the s-polarized light intensity change frequency, and takes 1/2 of the s-polarized light intensity change frequency as the rotation frequency of the micro-nano particle MS.
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