CN112802732B - Ceramic migration tube and manufacturing method thereof - Google Patents

Abstract

The present application relates to the technical field of trace detection, in particular to a ceramic transfer tube and a manufacturing method thereof. The ceramic migration tube comprises: a migration chamber; an ionization chamber, arranged at one end of the migration chamber; a Faraday cup assembly, arranged at the other end of the migration chamber; an ion gate assembly, arranged between the ionization chamber and the migration chamber; and a suppression grid, arranged Between the migration chamber and the Faraday cup assembly; wherein, the migration chamber includes a plurality of annular insulating ceramic sheets and a plurality of annular metal electrode sheets, the annular insulating ceramic sheets and the annular metal electrode sheets are arranged alternately in sequence, and the adjacent annular insulating ceramic sheets and the annular metal electrode sheets are arranged alternately. The annular metal electrode sheet is sealed and welded. Compared with the prior art, the ring-shaped insulating ceramic sheets and ring-shaped metal electrode sheets in the migration chamber are arranged alternately in sequence, and the adjacent ring-shaped insulating ceramic sheets and ring-shaped metal electrode sheets are sealed and welded, which is convenient for installation and low in manufacturing cost; the sealing performance is good, The connection is reliable and firm, the mechanical strength is high, and the shock resistance is strong, which improves the system stability.

Description

A kind of ceramic transfer tube and its manufacturing method

technical field

The present application relates to the technical field of trace detection, in particular to a ceramic transfer tube and a manufacturing method thereof.

Background technique

Ion mobility spectrometer has the advantages of sensitivity, speed, low power consumption, and portability. It is currently the mainstream technology for on-site detection of trace substances in the fields of anti-terrorism and anti-drugs in the world. The use of ion migration detection technology has greatly strengthened the monitoring of personnel and luggage at important gates such as border defense, customs, and civil aviation, and effectively cracked down on smuggling, drug trafficking, and terrorist attacks.

Migration tube is the core device of ion mobility spectrometer, and also the key factor to determine the separation and detection of ion mobility spectrometer. The transfer tube of the existing commercial ion mobility spectrometer is mainly made of insulating materials such as polyimide/polytetrafluoroethylene/Pick and metal electrodes are crimped by nuts, springs and O-rings.

The transfer tubes of existing commercial ion mobility spectrometers are difficult to assemble and seal, time-consuming and laborious, and have high manufacturing costs, which is not conducive to the mass production of ion mobility spectrometers and the improvement of system stability.

In addition, the boiling point of most drugs and explosives is relatively high (higher than 250°C). To obtain better detection effect and faster cleaning speed during the detection process, the temperature of the transfer tube needs to be set at a higher working temperature. However, no matter it is polyimide, polytetrafluoroethylene or peak, it is difficult to work at a working temperature exceeding 200°C, and this type of transfer tube will also produce trace release at high temperatures, and multiple thermal shocks will also affect the transfer tube. The tightness of the ion mobility spectrometer affects the normal use of the ion mobility spectrometer.

Contents of the invention

In view of this, the present application provides a ceramic transfer tube and a manufacturing method thereof, which are used to solve the problems of difficult assembly and sealing, time-consuming and labor-intensive, and high manufacturing costs of the existing transfer tube.

According to the first aspect of the present application, a ceramic transfer tube is provided. The ceramic transfer tube includes:

Migration chamber;

an ionization chamber, the ionization chamber is arranged at one end of the migration chamber;

a Faraday cup assembly, the Faraday cup assembly is arranged at the other end of the migration chamber;

an ion gate assembly disposed between the ionization chamber and the migration chamber; and

a suppression grid disposed between the migration chamber and the Faraday cup assembly;

Wherein, the migration chamber includes a plurality of ring-shaped insulating ceramic sheets and a plurality of ring-shaped metal electrode sheets, the ring-shaped insulating ceramic sheets and the ring-shaped metal electrode sheets are arranged alternately in sequence, and the adjacent ring-shaped insulating ceramic sheets are connected to the ring-shaped metal electrode sheets. The annular metal electrode sheet is sealed and welded.

Optionally, the annular insulating ceramic sheet and the annular metal electrode sheet are fixed by soldering, and the expansion coefficient of the annular metal electrode sheet is equal to or close to that of the annular insulating ceramic sheet.

Optionally, the annular insulating ceramic sheet is made of 95 porcelain or 99 porcelain, and the thickness of the annular insulating ceramic sheet is 1mm-3mm; and/or,

The annular metal electrode sheet is made of Kovar alloy, and the thickness of the annular metal electrode sheet is 1mm-3mm, and/or,

The solder is silver-copper alloy.

Optionally, the surface of the annular insulating ceramic sheet is metallized and treated by burning hydrogen, and the surface of the ring-shaped metal electrode piece is cleaned and plated with nickel and treated by burning hydrogen.

Optionally, the ionization chamber includes a source base, a C-shaped shrapnel and a sheet-shaped ionization source, a hollow hole is formed through the source base, and the C-shaped shrapnel is fixed in the hollow hole with an interference fit. The sheet ionization source is deposited on the inner wall of the C-shaped shrapnel by sputtering or evaporation;

A limiting boss is protrudingly provided on the inner wall of the hollow hole for axially blocking the C-shaped shrapnel;

A clamping groove is provided on one radial side of the hollow hole for clamping, installing or dismounting the C-shaped elastic piece.

Optionally, the ion gate assembly includes a first ion gate, a ceramic spacer and a second ion gate; the ceramic spacer is disposed between the first ion gate and the second ion gate , for setting the distance between the first ion gate and the second ion gate; the ceramic spacer is sealed and welded to the first ion gate and the second ion gate.

Optionally, the Faraday cup assembly includes a Faraday cup and a ceramic shield sleeved on the Faraday cup; the surface of the Faraday cup is polished and gold-plated to reduce detector noise; the outer ring of the ceramic shield is metal After welding, it is equipotential with the suppression grid to shield the interference of external signals on the Faraday cup signal; the Faraday cup is sealed and welded to the ceramic shielding cover through a connecting rod.

According to the second aspect of the present application, a method for manufacturing a ceramic transfer tube is provided. The manufacturing method of the ceramic transfer tube comprises:

A ceramic migration tube preform to be welded is provided, the ceramic migration tube preform to be welded includes a plurality of annular insulating ceramic sheets and a plurality of annular metal electrode sheets, and the annular insulating ceramic sheets and the annular metal electrode sheets are arranged alternately in sequence, Solder is disposed between the adjacent ring-shaped insulating ceramic sheet and the ring-shaped metal electrode sheet;

Place the preformed ceramic transfer tube to be welded in a hydrogen brazing furnace, raise the temperature of the hydrogen brazing furnace to a first preset temperature at a first preset heating rate under a hydrogen protective atmosphere, and keep warm for the first preset temperature. Set a time period, wherein the first preset temperature is less than the melting point of the solder;

raising the temperature of the hydrogen brazing furnace to a second preset temperature at a second preset heating rate, and keeping it warm for a second preset time period, wherein the second preset temperature is greater than or equal to the melting point of the solder, and the first The second preset heating rate is less than the first preset heating rate;

cooling the hydrogen brazing furnace to a third preset temperature at a third preset cooling rate;

The temperature of the hydrogen brazing furnace is lowered to a fourth preset temperature, and the supply of hydrogen in the hydrogen brazing furnace is stopped.

Optionally, the surface of the annular insulating ceramic sheet in the ceramic transfer tube preform to be welded is metallized and treated with hydrogen, and the surface of the annular metal electrode sheet in the ceramic transfer tube preform to be welded is cleaned and plated Nickel is processed by burning hydrogen, and the solder is silver-copper alloy.

Optionally, a mounting tool is also provided, the mounting tool coaxially fixes the plurality of annular insulating ceramic sheets and the plurality of annular metal electrode sheets in the ceramic transfer tube preform to be welded.

It is to be understood that both the foregoing general description and the following detailed description are exemplary only and are not restrictive of the application.

Description of drawings

In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that need to be used in the description of the specific embodiments or prior art. Obviously, the accompanying drawings in the following description The drawings are some implementations of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative work.

Fig. 1 is a cross-sectional view of a ceramic transfer tube provided by an embodiment of the present application.

FIG. 2 is a schematic structural diagram of the ionization chamber in FIG. 1 .

FIG. 3 is an exploded schematic view of the ion gate assembly in FIG. 1 .

FIG. 4 is a schematic structural diagram of the annular insulating ceramic sheet in FIG. 1 .

FIG. 5 is a schematic structural view of the annular metal electrode sheet in FIG. 1 .

FIG. 6 is a schematic structural diagram of the suppression grid and the Faraday cup assembly in FIG. 1 .

Reference signs:

1 - ionization chamber;

11 - source seat;

111-hollow hole;

112-limiting boss;

113-clamping groove;

12-C-shaped shrapnel;

13-sheet ionization source;

2 - ion gate assembly;

21 - the first ion gate;

22-ceramic separator;

23 - second ion gate;

3 - migration chamber;

31-annular insulating ceramic sheet;

32-ring metal electrode piece;

4 - suppression grid;

5- Faraday cup assembly;

51 - Faraday Cup;

52-ceramic shield.

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description serve to explain the principles of the application.

Detailed ways

The technical solutions of the present application will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

Terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms "a", "said" and "the" used in the embodiments of this application and the appended claims are also intended to include plural forms unless the context clearly indicates otherwise.

It should be understood that the term "and/or" used herein is only an association relationship describing associated objects, which means that there may be three relationships, for example, A and/or B, which may mean that A exists alone, and A and B exist simultaneously. B, there are three situations of B alone. In addition, the character "/" in this article generally indicates that the contextual objects are an "or" relationship.

It should be noted that the orientation words such as "up", "down", "left", and "right" described in the embodiments of the present application are described from the angles shown in the drawings, and should not be interpreted as limiting the implementation of the present application. Example limitations. Furthermore, in this context, it also needs to be understood that when it is mentioned that an element is connected "on" or "under" another element, it can not only be directly connected "on" or "under" another element, but can also To be indirectly connected "on" or "under" another element through an intervening element.

As shown in FIG. 1 , the embodiment of the present application provides a ceramic transfer tube. The ceramic migration tube includes a migration chamber 3 , an ionization chamber 1 , a Faraday cup assembly 5 , an ion gate assembly 2 and a suppression grid 4 .

The migration chamber 3 is used to provide a uniform weak drift electric field and an electrically neutral reverse flow field to separate mobility and different ion groups in the migration chamber 3 area.

The ionization chamber 1 is arranged at one end of the migration chamber 3, and the ionization chamber 1 is used to provide ionization energy and ionization space for ionizing sample molecules or other molecules.

The ion gate assembly 2 is arranged between the ionization chamber 1 and the migration chamber 3, and the ion gate assembly 2 is used for providing an ion accelerating electric field/cutoff electric field and a migration clock signal.

The Faraday cup assembly 5 is arranged at the other end of the migration chamber 3, and the Faraday cup assembly 5 is used for detecting ions and generating ion signals. The ion groups separated by the migration chamber 3 successively arrive at the Faraday cup assembly to generate ion signals.

The suppression grid 4 is arranged between the migration chamber 3 and the Faraday cup assembly 5 , and the suppression grid 4 is used to shield the interference of the ion gate pulse voltage on the signal of the Faraday cup assembly.

As shown in FIG. 1 , FIG. 4 and FIG. 5 , the migration chamber 3 includes a plurality of annular insulating ceramic sheets 31 and a plurality of annular metal electrode sheets 32 . The annular insulating ceramic sheets 31 and the annular metal electrode sheets 32 are arranged alternately in sequence. Adjacent annular insulating ceramic sheets 31 are sealed and welded to annular metal electrode sheets 32 . Specifically, a plurality of ring-shaped insulating ceramic sheets 31 are arranged at intervals in sequence, and an annular metal electrode sheet 32 is arranged between every two ring-shaped insulating ceramic sheets 31, and the ring-shaped metal electrode sheet 32 and the adjacent two ring-shaped insulating ceramic sheets 31 Hermetically welded together.

The ring-shaped insulating ceramic sheets 31 and ring-shaped metal electrode sheets 32 in the migration chamber 3 are arranged alternately in sequence, and the adjacent ring-shaped insulating ceramic sheets 31 and ring-shaped metal electrode sheets 32 are sealed and welded, which is convenient for installation and low in manufacturing cost; good sealing performance and reliable connection Strong, high mechanical strength, strong anti-seismic performance, which improves the stability of the system. The annular insulating ceramic sheet 31 in the migration chamber 3 has a high thermal conductivity, which can shorten the cold start time of the machine.

The sealing welding structure between the adjacent ring-shaped insulating ceramic sheets 31 and the ring-shaped metal electrode sheets 32 can be specifically set according to needs. Preferably, the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 can be fixed by soldering. The expansion coefficient of the annular metal electrode sheet 32 may be equal to or close to that of the annular insulating ceramic sheet 31 .

The solder can use high-melting-point solder, which eliminates the use of non-heat-resistant materials and high-temperature trace volatile materials. Therefore, the transfer tube can work at a temperature of 250°C and above, which can more effectively deal with the detection of high-boiling-point prohibited items such as drugs and explosives. , and can improve the cleaning speed of the system.

The material and thickness of the annular insulating ceramic sheet 31, the annular metal electrode sheet 32, and the solder should be selected in consideration of their weldability and welding stability.

More preferably, as shown in FIG. 4 , the annular insulating ceramic sheet 31 is made of 95 porcelain or 99 porcelain. The thickness of the annular insulating ceramic sheet 31 can be specifically set to be 1mm-3mm.

As shown in FIG. 5 , Kovar alloy can be used for the annular metal electrode piece 32 . The coefficient of expansion of the Kovar alloy is close to that of the annular insulating ceramic sheet 31 . The thickness of the Kovar alloy can be set to 1mm-3mm. For example, the annular metal electrode piece 32 can be made of 4J33 Kovar alloy.

The solder can be silver-copper alloy. The copper-silver alloy has a high melting point, which allows the transfer tube to work at a higher temperature, which can more effectively deal with the detection of high-boiling prohibited items such as drugs and explosives, and can improve the cleaning speed of the system. Specifically, the solder is 72:8 silver-copper alloy, the ratio of silver to copper is 72:8, its solidus is 779°C, and its melting point is 810°C.

The specific structure of the ionization chamber can be set as required, as long as it can provide ionization energy and ionization space for ionizing sample molecules or other molecules. Preferably, as shown in FIG. 2 , the ionization chamber 13 includes an ionization source and a source base 11 . The source base 11 is used to install and fix the ionization source 13 , and its specific structure can be set according to the specific structure of the ionization source 13 . The ionization source 13 can be a radioactive source such as 63Ni, 3H, or a non-radiative source such as UV, DBD (dielectric barrier discharge) and corona discharge ionization source.

Specifically, as shown in FIG. 2 , the ionization chamber 1 may include a source base 11 , a C-shaped shrapnel 12 and a sheet-shaped ionization source 13 . The source seat 11 is a ring structure, and a hollow hole 111 is formed through it. The C-shaped elastic piece 12 has elasticity, and can elastically deform when it is stressed. The C-shaped elastic piece 12 is fixed in the hollow hole 111 through interference fit. The C-shaped elastic piece 12 can be elastically deformed radially inward, and abut against the inner wall of the hollow hole 111 of the source base 11 . The sheet-shaped ionization source 13 can be deposited on the inner wall of the C-shaped shrapnel 12 by sputtering, evaporation, or other methods.

A limiting boss 112 can protrude from the inner wall of the hollow hole 111 for blocking the C-shaped shrapnel 12 in the axial direction. When the C-shaped shrapnel 12 is placed in the hollow hole 111 of the source base 11, the limit boss 112 can block the C-shaped shrapnel 12 to prevent the C-shaped shrapnel 12 from continuing to be inserted and prompt the installation of the C-shaped shrapnel 12 and the sheet ionization source 13 Restrictions and reminders in place The radioactive source is installed in place.

A clamping groove 113 can be provided on one radial side of the hollow hole 111 , and the clamping groove 113 communicates with the hollow hole 111 and can be used for clamping, installing or disassembling the C-shaped elastic piece 12 .

More specifically, the sheet ionization source 13 can use 63Ni source. The C-shaped shrapnel 12 is correspondingly set as a C-shaped nickel-based shrapnel. The sheet-shaped ionization source 13 of 63Ni source can be vapor-deposited on the inner wall of the C-shaped nickel-based shrapnel.

The specific structure of the ion gate assembly can be set according to needs, and it only needs to provide the acceleration electric field/cutoff electric field and the migration clock signal of ions. Preferably, as shown in FIG. 2 , the ion gate assembly 2 may include a first ion gate 21 , a ceramic spacer 22 and a second ion gate 23 . The ceramic spacer 22 is arranged between the first ion gate 21 and the second ion gate 23 for separating the first ion gate 21 and the second ion gate 23 by a set distance. The sealing welding between the ceramic spacer 22 and the first ion gate 21 and the second ion gate 23 can prevent the molten solder from splashing/overflowing and reducing the insulation between the ion gates. More preferably, the ceramic spacer 22 is no longer than 0.7 mm, and is used to isolate the first ion gate 21 and the second ion gate 23 . Correspondingly, the distance between the first ion gate 21 and the second ion gate 23 is no more than 0.7 mm.

The specific structure of the Faraday cup assembly can be set as required, as long as it can realize the functions of detecting ions and generating ion signals. Preferably, as shown in FIG. 6 , the Faraday cup assembly 5 may include a Faraday cup 51 and a ceramic shield 52 . The Faraday cup 51 is hermetically welded to the ceramic shield 52 through a connecting rod. For example, as shown in FIG. 1 , the ceramic shielding cover 52 can be sleeved on the connecting rod of the Faraday cup 51 . The surface of the Faraday cup 51 is polished and gold-plated to reduce detector noise. The outer ring of the ceramic shielding cover 52 is metallized, and is equipotential with the suppression grid 4 after welding, and is used to shield the interference of the external signal to the signal of the Faraday cup 51 .

The Faraday cup 51 and the ceramic shield 52 are hermetically welded. For example, the sealing method between the Faraday cup 51 and the shielding case is that the connecting rod connecting the Faraday cup 51 can be nested with an annular ceramic shielding case 52 with metallized inner and outer rings, and can be sealed in a double-layer sealing method.

The specific structure of the suppression grid can be set according to needs, and it only needs to shield the interference of the ion gate pulse voltage on the signal of the Faraday cup 51 . Preferably, the suppression grid 4 can be set as a sheet grid structure, and the sheet grid structure can be specifically set as a hexagon, a circle, or the like.

According to the same inventive concept, the present application also provides a method for manufacturing a ceramic transfer tube. As shown in Figure 1, the manufacturing method of the ceramic transfer tube comprises:

Firstly, a ceramic transfer tube preform to be welded is provided. The ceramic migration tube preform to be welded includes a plurality of annular insulating ceramic sheets 31 and a plurality of annular metal electrode sheets 32, the annular insulating ceramic sheets 31 and the annular metal electrode sheets 32 are arranged alternately in sequence, and the adjacent annular insulating ceramic sheets 31 and annular metal electrode sheets are arranged alternately. Solder is provided between the electrode pads 32 .

Then, the ceramic transfer tube preform to be welded is placed in a hydrogen brazing furnace, and the hydrogen brazing furnace is heated to a first preset temperature at a first preset heating rate under a hydrogen protective atmosphere, and kept warm for a first preset time section to ensure uniform temperature of the weldment. Wherein the first preset temperature is lower than the melting point of the solder.

Afterwards, the hydrogen brazing furnace is heated up to a second preset temperature at a second preset temperature rise rate, and kept warm for a second preset time period, so as to ensure that the solder of each weld seam is fully melted and the welding interface is well infiltrated. Wherein the second preset temperature is greater than or equal to the melting point of the solder, and the second preset temperature rise rate is less than the first preset temperature rise rate;

Afterwards, the hydrogen brazing furnace is cooled to a third preset temperature at a third preset cooling rate, so as to slowly release the sealing stress of the weld between the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 to prevent the ceramic from bursting.

Afterwards, the temperature of the hydrogen brazing furnace is lowered to a fourth preset temperature, and the supply of hydrogen in the hydrogen brazing furnace is stopped.

The ring-shaped insulating ceramic sheets 31 and ring-shaped metal electrode sheets 32 in the migration chamber 3 in this embodiment are arranged alternately in sequence, and the adjacent ring-shaped insulating ceramic sheets 31 and ring-shaped metal electrode sheets 32 are sealed and welded by solder, and are integrally formed, which is convenient for installation. The manufacturing cost is low; the sealing performance is good, the connection is reliable and firm, the mechanical strength is high, the shock resistance is strong, and the system stability is improved. The annular insulating ceramic sheet 31 in the migration chamber 3 has a high thermal conductivity, which can shorten the cold start time of the machine.

The solder can use high-melting-point solder, which eliminates the use of non-heat-resistant materials and high-temperature trace volatile materials. Therefore, the transfer tube can work at a temperature of 250°C and above, which can more effectively deal with the detection of high-boiling-point prohibited items such as drugs and explosives. , and can improve the cleaning speed of the system.

In order to enable the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 to be better sealed and welded together, preferably, before welding, the surface of the annular insulating ceramic sheet 31 in the ceramic transfer tube preform to be welded is metallized and treated with hydrogen, The surface of the annular metal electrode sheet 32 in the ceramic transfer tube preform to be welded is cleaned and plated with nickel and treated with hydrogen burning. In this way, the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 are easily welded together by solder.

In order to achieve welding stability, the manufacturing method of the ceramic transfer tube can also provide a mounting tool. The mounting tool coaxially fixes multiple annular insulating ceramic sheets 31 and multiple annular metal electrode sheets 32 in the ceramic transfer tube preform to be welded. Specifically, solder with a suitable width and thickness is placed between the ring-shaped insulating ceramic sheet 31 and the ring-shaped metal electrode sheet 32, and positioned with a mounting tool to ensure that the ring-shaped insulating ceramic sheet 31 and the ring-shaped metal electrode sheet 32 are coaxial. fasten.

Preferably, silver-copper alloy can be used as solder. For example, the solder can be specifically 72:8 silver-copper alloy, the ratio of silver to copper is 72:8, its solidus is 779°C, and its melting point is 810°C.

The first preset heating rate may be equal to or less than 20° C./min. The first preset temperature can be set to 780°C. The first preset time period can be set to 20 minutes.

The second preset heating rate can be set to 1-4°C/min. The second preset temperature can be set as the melting point temperature of 810°C. The second preset time period can be set to 1 min.

The third preset cooling rate may be equal to or less than 30° C./min. The third preset temperature is 500°C.

The hydrogen brazing furnace can naturally cool down to the fourth preset temperature. The fourth preset temperature may be equal to or less than 200°C.

Preferably, after cooling down the hydrogen brazing furnace to the fourth preset temperature and stopping the supply of hydrogen in the hydrogen brazing furnace, the obtained ceramic transfer tube can be tested for pressure resistance and air tightness. If the leakage rate of the tube body is not higher than 1.5×10 ^-8 Pa·m3/s, and the withstand voltage value between electrodes is better than 5×10 ⁵ V/cm, then the leakage and withstand voltage requirements of the mobility spectrometer equipment are met.

The above are only preferred embodiments of the present application, and are not intended to limit the present application. For those skilled in the art, there may be various modifications and changes in the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this application shall be included within the protection scope of this application.

Claims (9)

1. A ceramic transfer tube, comprising:

a transfer chamber (3);

an ionization chamber (1), the ionization chamber (1) being arranged at one end of the transfer chamber (3);

a Faraday cup assembly (5), the Faraday cup assembly (5) being disposed at the other end of the migration chamber (3);

an ion gate assembly (2), the ion gate assembly (2) being disposed between the ionization chamber (1) and the transfer chamber (3); and

a suppressor grid (4), the suppressor grid (4) being disposed between the migration chamber (3) and the Faraday cup assembly (5);

the transfer chamber (3) comprises a plurality of annular insulating ceramic plates (31) and a plurality of annular metal electrode plates (32), the annular insulating ceramic plates (31) and the annular metal electrode plates (32) are sequentially and alternately arranged, and the adjacent annular insulating ceramic plates (31) and the adjacent annular metal electrode plates (32) are hermetically welded;

the ionization chamber (1) comprises a source seat (11), a C-shaped elastic sheet (12) and a sheet ionization source (13), wherein a hollow hole (111) is formed in the source seat (11) in a penetrating mode, the C-shaped elastic sheet (12) is fixed in the hollow hole (111) in an interference fit mode, and the sheet ionization source (13) is deposited on the inner wall of the C-shaped elastic sheet (12) in a sputtering or evaporation mode;

a limiting boss (112) is arranged on the inner wall of the hollow hole (111) in a protruding mode and used for axially pushing and blocking the C-shaped elastic sheet (12);

and a clamping groove (113) is arranged at one radial side of the hollow hole (111) and used for clamping and mounting or dismounting the C-shaped elastic sheet (12).

2. The ceramic transfer tube according to claim 1, wherein the annular insulating ceramic sheet (31) and the annular metallic electrode sheet (32) are fixed by welding with solder, and the coefficient of expansion of the annular metallic electrode sheet (32) is equal to or close to that of the annular insulating ceramic sheet (31).

3. The ceramic transfer pipe of claim 2, wherein the annular insulating ceramic sheet (31) is 95 porcelain or 99 porcelain, and the thickness of the annular insulating ceramic sheet (31) is 1mm-3mm; and/or the presence of a gas in the gas,

the annular metal electrode plate (32) is made of kovar alloy, the thickness of the annular metal electrode plate (32) is 1mm-3mm, and/or,

the solder adopts silver-copper alloy.

4. The ceramic transfer pipe of claim 2, wherein the surface of the annular insulating ceramic sheet (31) is metallized and subjected to hydrogen burning treatment, and the surface of the annular metal electrode sheet (32) is subjected to nickel cleaning and hydrogen burning treatment.

5. The ceramic transfer tube of claim 1, wherein the ion gate assembly (2) comprises a first ion gate grid (21), a ceramic spacer (22), and a second ion gate grid (23); the ceramic spacer (22) is arranged between the first ion gate grid (21) and the second ion gate grid (23) and used for enabling the first ion gate grid (21) and the second ion gate grid (23) to be separated by a set distance; the ceramic isolation sheet (22) is hermetically welded with the first ion gate grid (21) and the second ion gate grid (23).

6. The ceramic transfer tube of claim 1, wherein the faraday cup assembly (5) comprises a faraday cup (51) and a ceramic shield (52) nested over the faraday cup (51); the Faraday cup (51) is surface polished and gold plated to reduce the noise of the detector; the outer ring of the ceramic shielding cover (52) is subjected to metallization treatment, is equipotential with the suppression grid (4) after being welded, and is used for shielding the interference of an external signal on a Faraday cup signal; the Faraday cup (51) is hermetically welded with the ceramic shielding case (52) through a connecting rod.

7. A method of manufacturing a ceramic transfer tube, the method being used to manufacture the ceramic transfer tube according to any one of claims 1 to 6, the method comprising:

providing a to-be-welded ceramic migration tube prefabricated part, wherein the to-be-welded ceramic migration tube prefabricated part comprises a plurality of annular insulating ceramic sheets (31) and a plurality of annular metal electrode sheets (32), the annular insulating ceramic sheets (31) and the annular metal electrode sheets (32) are sequentially and alternately arranged, and solder is arranged between the adjacent annular insulating ceramic sheets (31) and the adjacent annular metal electrode sheets (32);

placing the to-be-welded ceramic migration tube prefabricated part in a hydrogen brazing furnace, heating the hydrogen brazing furnace to a first preset temperature at a first preset heating rate in a hydrogen protection atmosphere, and keeping the temperature for a first preset time period, wherein the first preset temperature is less than the melting point of the solder;

heating the hydrogen brazing furnace to a second preset temperature at a second preset heating rate, and keeping the temperature for a second preset time period, wherein the second preset temperature is greater than or equal to the melting point of the solder, and the second preset heating rate is smaller than the first preset heating rate;

cooling the hydrogen brazing furnace to a third preset temperature at a third preset cooling rate;

and cooling the hydrogen brazing furnace to a fourth preset temperature, and stopping hydrogen supply in the hydrogen brazing furnace.

8. The manufacturing method of the ceramic transfer pipe as claimed in claim 7, wherein the surface of the annular insulating ceramic sheet (31) in the to-be-welded ceramic transfer pipe prefabricated member is metallized and subjected to hydrogen burning treatment, the surface of the annular metal electrode sheet (32) in the to-be-welded ceramic transfer pipe prefabricated member is subjected to cleaning nickel plating and hydrogen burning treatment, and the solder is silver-copper alloy.

9. The manufacturing method of the ceramic transfer pipe as claimed in claim 7, wherein a mounting tool is further provided, and the mounting tool fixes the plurality of annular insulating ceramic sheets (31) and the plurality of annular metal electrode sheets (32) in the preform of the ceramic transfer pipe to be welded coaxially.

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