CN112782945A - Exposure machine - Google Patents
Exposure machine Download PDFInfo
- Publication number
- CN112782945A CN112782945A CN202110134354.5A CN202110134354A CN112782945A CN 112782945 A CN112782945 A CN 112782945A CN 202110134354 A CN202110134354 A CN 202110134354A CN 112782945 A CN112782945 A CN 112782945A
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- CN
- China
- Prior art keywords
- image intensifier
- light
- image
- exposure machine
- quantum dot
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002096 quantum dot Substances 0.000 claims abstract description 48
- 230000001678 irradiating effect Effects 0.000 claims abstract description 3
- 238000003384 imaging method Methods 0.000 claims description 35
- 239000013307 optical fiber Substances 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 9
- 239000000835 fiber Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000002105 nanoparticle Substances 0.000 claims description 3
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70375—Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
Abstract
The invention discloses an exposure machine which comprises a quantum dot LED screen and an image intensifier; the quantum dot LED screen is provided with a luminous surface; the light emitting surface faces the image intensifier to irradiate the light emitted by the quantum dot LED screen into the image intensifier; the image intensifier is used for irradiating light to an image surface. The invention can make the light intensity distribution of the formed image uniform.
Description
Technical Field
The invention relates to the technical field of exposure, in particular to an exposure machine.
Background
The exposure machine is a machine device for transferring image information on a film or other transparent body onto a surface coated with a photosensitive substance, and is also a core component of photocuring 3D printing. Most of image modulation devices of the existing exposure machine are non-luminous devices and can be used only by illumination of a light source; however, in general, each light emitting unit of the image modulator capable of self-emitting light has a large light emitting angle, so that the light intensity of an image directly entering the lens is not uniform, the light intensity in the middle of the image is large, and the light intensity on the edge of the image is small.
The above background disclosure is only for the purpose of assisting understanding of the inventive concept and technical solutions of the present invention, and it is not necessarily prior art to the present invention, and should not be used for evaluating the novelty and inventive step of the present invention without explicit evidence to suggest that the above content has been disclosed at the filing date of the present invention.
Disclosure of Invention
The invention provides an exposure machine, which can make the light intensity distribution of the formed image uniform.
An exposure machine comprises a quantum dot LED screen and an image intensifier;
the quantum dot LED screen is provided with a luminous surface;
the light emitting surface faces the image intensifier to irradiate the light emitted by the quantum dot LED screen into the image intensifier;
the image intensifier is used for irradiating light to an image surface.
In some preferred embodiments, the system further comprises an imaging lens; the imaging lens is arranged between the image intensifier and the image plane.
In some preferred embodiments, the image intensifier has a set numerical aperture for making the intensity of light exiting the imaging lens uniform.
In some preferred embodiments, the image intensifier has a numerical aperture.
In some preferred embodiments, the particular form of image intensifier comprises a fibre-optic image intensifier.
In some preferred embodiments, the fiber optic image intensifier has an optical fiber; the optical fiber has a set numerical aperture for making the intensity of light exiting from the image intensifier uniform.
In some preferred embodiments, the imaging lens is a lens capable of reducing an object image.
In some preferred embodiments, the image intensifier has an optical exit face; the imaging lens has a light receiving surface and a light emitting surface; a specified distance exists between the light receiving surface of the imaging lens and the light emergent surface of the image intensifier; and a specified distance exists between the light emergent surface of the imaging lens and the image surface.
In some preferred embodiments, the quantum dot LED screen is a device that acts as a light source and a spatial light modulator.
In some preferred embodiments, the light emitting face is attached to the image intensifier.
In some preferred embodiments, the imaging lens is fitted to the image intensifier to collect as much light as possible that emerges from the image intensifier.
In some preferred embodiments, the quantum dot LED screen comprises:
a substrate;
an electrode disposed on the substrate;
particles disposed on the electrode and capable of being driven by the electrode to emit light;
in some preferred embodiments, the particles are nanoparticles.
Compared with the prior art, the invention has the beneficial effects that:
the quantum dot LED screen emits light through the uniformly distributed quantum dots; the light emitted by the quantum dot LED screen enters the image intensifier opposite to the light emitting surface of the quantum dot LED screen and is received by the image intensifier as much as possible, and the light emitted by the middle and the light emitted by the periphery of the quantum dot LED screen can be basically received by the image intensifier; thus, the intensity of the light emitted from the image intensifier has good uniformity, so that the light intensity distribution of the subsequent image is uniform.
Drawings
Fig. 1 is a schematic structural diagram of a quantum dot LED screen according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an exposure machine according to an embodiment of the present invention;
FIG. 3 is a schematic configuration diagram of a modification of the exposure machine according to an embodiment of the present invention;
FIG. 4 is a schematic configuration diagram of another modification of the exposure machine according to an embodiment of the present invention;
FIG. 5 is a schematic configuration diagram of a third modification of the exposure machine according to the embodiment of the present invention;
fig. 6 is a schematic structural view of a fourth modification of the exposure machine according to an embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the embodiments of the present invention more clearly apparent, the present invention is further described in detail below with reference to fig. 1 to 6 and the embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element. The connection may be for fixation or for circuit connection.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the embodiments of the present invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be in any way limiting of the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present invention, "a plurality" means two or more unless specifically limited otherwise.
The embodiment provides an exposure machine, in particular to a uniform light intensity exposure machine; the exposure machine of the present embodiment includes a quantum dot LED panel 1 and an image intensifier 2.
The quantum dot LED panel 1 is a device including quantum dot LEDs. Quantum dot LEDs may also be referred to as qleds (quantum LEDs).
Referring to fig. 1, a quantum dot LED screen 1 includes a substrate 11, particles 12, electrodes 13, and a circuit 14.
The quantum dot LED screen 1 is a quantum dot display device; the quantum dots are individual particles 12, specifically nanoparticles, and each particle 12 is capable of emitting light. The number of the particles 12 is plural; the individual particles 12 are disposed on a substrate 11; specifically, the individual particles 12 are disposed on the substrate 11 by coating, or a plurality of particles 12 are coated on the substrate 11.
An electrode 13 and an electric circuit 14 are provided on the substrate 11. The electrode 13 is a controllable electrode. The circuit 14 supplies power to the electrodes 13. The quantum dots, that is, the particles 12, can be driven to emit light after the electrode 13 is energized, and the circuit 14 controls which particles 12 emit light and which particles 12 do not emit light, so that the quantum dot LED panel 1 has the property of active modulation. Therefore, the quantum dot LED panel 1 is a device as a light source and a spatial light modulator, and functions as both the light source and the spatial light modulator.
The quantum dot LED screen 1 has a light emitting face 101; light emitted from the inside of the quantum dot LED panel 1 exits from the light emitting surface 101.
The image intensifier 2 can reduce light emitted from a large light-emitting area to a smaller area by using the optical fiber array, thereby improving the brightness of the light.
The light emitting surface 101 of the quantum dot LED screen 1 is disposed facing the image intensifier 2 to irradiate light emitted from the quantum dot LED screen 1 into the image intensifier 2. Specifically, the light emitting surface 101 of the quantum dot LED panel 1 is a surface facing the image intensifier 2, such as a surface 201 facing a larger area. In the present embodiment, the light emitting surface 101 of the quantum dot LED screen 1 is disposed directly opposite to the image intensifier 2, for example, the light emitting surface 101 is attached to the surface 201 of the image intensifier 2, so that the light emitted from the quantum dot LED screen 1 is received by the image intensifier 2.
Thus, referring to fig. 2, the image intensifier 2 can receive the light emitted from the quantum dot LED screen 1 and irradiate the light to the image plane 100, such as the surface of the workpiece; the image intensifier 2 has a light emitting surface 202, and the light emitting surface 202 of the image intensifier 2 is attached to the image plane 100.
As can be seen from the above, the quantum dot LED panel 1 emits light by the uniformly dispersed quantum dots, and functions as both a light source and a spatial light modulator; light emitted by the quantum dot LED screen 1 enters the image intensifier 2 arranged opposite to the light emitting surface 101 of the quantum dot LED screen 1 and is received by the image intensifier 2 as much as possible, and particularly when the light emitting surface 101 of the quantum dot LED screen 1 is arranged opposite to the image intensifier 2, light emitted by the middle of the quantum dot LED screen 1 and light emitted by the periphery of the quantum dot LED screen can be basically received by the image intensifier 2; in this way, the intensity of the light emitted from the image intensifier 2 has good uniformity, so that the light intensity distribution of the subsequently formed image is uniform.
Referring to fig. 3, the exposure machine of the present embodiment further includes an imaging lens 3. The imaging lens 3 is used to form a desired image, that is, a target image, and can reduce or enlarge an object image.
The imaging lens 3 is disposed between the image intensifier 2 and the image plane 100. The light emitted from the image intensifier 2 is transmitted to the imaging lens 3, and then transmitted to the image plane 100 by the imaging lens 3, so that exposure is realized. In other embodiments, the imaging lens 3 is optional, and light emitted from the image intensifier 2 is directly irradiated to the image plane 100; wherein the image formed on the image plane 100 is determined by the quantum dot LED panel 1 itself or by a computing device controlling the quantum dot LED panel 1.
The image intensifier 2 has a numerical aperture. The numerical aperture of the image intensifier 2 determines the size of the cone angle at which the image intensifier 2 receives light. The image intensifier 2 is set with a set numerical aperture, and the cone angle of light can be screened; specifically, light having a propagation angle smaller than the set numerical aperture is received by the image intensifier 2, and light having a propagation angle larger than the set numerical aperture is not received by the image intensifier 2.
Referring to fig. 3, the image intensifier 2 of the present embodiment is a fiber-optic image intensifier; the quantum dot LED screen 1 is closely attached to the optical fiber image intensifier 2. The optical fiber image intensifier 2 has an optical fiber 21, specifically, a plurality of optical fibers (such as an optical fiber array); the optical fiber 21 has a set numerical aperture for making the intensity of light emitted from the image intensifier uniform. For the optical fiber 21, the numerical aperture describes the amount of cone angle that the light enters and exits the fiber. Then, the fiber optic image intensifier 2 with a set numerical aperture defines the size of the cone angle of light in and out.
Referring to fig. 3, the optical fiber image intensifier 2 has a large end and a small end, and is formed like a boss in appearance. Specifically, referring to FIG. 3, the fiber optic image intensifier 2 has a large first end 2A and a small second end 2B; the first end 2A is used for collecting light, and the second end 2B collects and outputs light, thereby increasing the optical power density.
The image intensifier 2 has a set numerical aperture, the angle of light emitted from the image intensifier 2 is within the set numerical aperture, the angle of the light is selected, namely the size of the cone angle of the light entering and exiting is limited, so that the emitted light can be received by the imaging lens 3, the intensity of the light imaged later is consistent, and the uniformity of the light is further improved.
Referring to fig. 3, an end face (i.e., a light receiving face) of the first end 3A of the imaging lens 3 receives light exiting from the second end 2B of the image intensifier 2; a specified distance exists between the imaging lens 3 and the image intensifier 2, and light emitted from the image intensifier 2 is projected on the imaging lens 3; the first end 3A of the imaging lens 3 has a larger outer dimension (e.g., outer diameter) than the second end 2B of the image intensifier 2 to receive light exiting from the edge of the second end 2B of the image intensifier 2, so as to collect as much light exiting from the image intensifier 2 as possible; a prescribed distance exists between an end surface (i.e., a light exit surface) of the second end 3B of the imaging lens 3 and the image plane 100, and light exiting from the imaging lens 3 is projected on the image plane 100. Therefore, the uniformity of light can be better improved.
Referring to fig. 4, in other embodiments, an end surface of the first end 3A of the imaging lens 3 is attached to the image intensifier 2, and a specified distance exists between an end surface (i.e., a light emitting surface) of the second end 3B of the imaging lens 3 and the image plane 100.
Referring to fig. 5, in other embodiments, there is a specified distance between the end surface of the first end 3A of the imaging lens 3 and the image intensifier 2, and the end surface of the second end 3B of the imaging lens 3 is attached to the image plane 100.
Referring to fig. 6, in other embodiments, an end surface of the first end 3A of the imaging lens 3 is attached to the image intensifier 2, and an end surface of the second end 3B of the imaging lens 3 is attached to the image plane 100.
In the present embodiment, the imaging lens 3 is a lens capable of reducing the size of an object image, and the exposure surface is reduced, so that the optical power density can be increased.
The exposure machine of the embodiment can greatly improve the quality of exposure.
The foregoing is a more detailed description of the invention in connection with specific/preferred embodiments and is not intended to limit the practice of the invention to those descriptions. It will be apparent to those skilled in the art that various substitutions and modifications can be made to the described embodiments without departing from the spirit of the invention, and these substitutions and modifications should be considered to fall within the scope of the invention.
Claims (10)
1. An exposure machine characterized in that:
the device comprises a quantum dot LED screen and an image intensifier;
the quantum dot LED screen is provided with a luminous surface;
the light emitting surface faces the image intensifier to irradiate the light emitted by the quantum dot LED screen into the image intensifier;
the image intensifier is used for irradiating light to an image surface.
2. The exposure machine according to claim 1, characterized in that: the device also comprises an imaging lens; the imaging lens is arranged between the image intensifier and the image plane.
3. The exposure machine according to claim 2, characterized in that: the image intensifier has a set numerical aperture for making the intensity of light emitted from the imaging lens uniform.
4. The exposure machine according to claim 1 or 2, characterized in that: the image intensifier has a numerical aperture.
5. The exposure machine according to claim 1, characterized in that: a particular form of the image intensifier comprises a fibre optic image intensifier.
6. The exposure machine according to claim 5, characterized in that: the optical fiber image intensifier has an optical fiber; the optical fiber has a set numerical aperture for making the intensity of light exiting from the image intensifier uniform.
7. The exposure machine according to claim 2, characterized in that: the imaging lens is a lens capable of reducing an object image.
8. The exposure machine according to claim 1, characterized in that: the quantum dot LED screen is used as a light source and a spatial light modulator.
9. The exposure machine according to claim 1, characterized in that:
the luminous surface is attached to the image intensifier;
the image intensifier has an optical emergent surface; a specified distance exists between the light emergent surface of the image intensifier and the image surface;
the quantum dot LED screen includes:
a substrate;
an electrode disposed on the substrate;
particles disposed on the electrode and capable of being driven by the electrode to emit light;
the particles are nanoparticles.
10. The exposure machine according to claim 2, characterized in that: the image intensifier has an optical emergent surface; the imaging lens has a light receiving surface and a light emitting surface; a specified distance exists between the light receiving surface of the imaging lens and the light emergent surface of the image intensifier; and a specified distance exists between the light emergent surface of the imaging lens and the image surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110134354.5A CN112782945A (en) | 2021-01-29 | 2021-01-29 | Exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110134354.5A CN112782945A (en) | 2021-01-29 | 2021-01-29 | Exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112782945A true CN112782945A (en) | 2021-05-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110134354.5A Pending CN112782945A (en) | 2021-01-29 | 2021-01-29 | Exposure machine |
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| Country | Link |
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| CN (1) | CN112782945A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105724A (en) * | 2011-11-15 | 2013-05-15 | 台湾创新记忆体股份有限公司 | Quantum dot exposure plate and photolithography process using said quantum dot exposure plate |
| CN108169846A (en) * | 2018-02-11 | 2018-06-15 | 深圳市润沃自动化工程有限公司 | Fiber optic imaging device |
| CN209624823U (en) * | 2019-03-21 | 2019-11-12 | 深圳市润沃自动化工程有限公司 | A kind of fiber optic imaging device with lens |
| CN214335465U (en) * | 2021-01-29 | 2021-10-01 | 深圳光韵达光电科技股份有限公司 | Exposure machine based on image modulation |
| CN214375817U (en) * | 2021-01-29 | 2021-10-08 | 深圳光韵达光电科技股份有限公司 | Uniform light intensity exposure machine |
-
2021
- 2021-01-29 CN CN202110134354.5A patent/CN112782945A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105724A (en) * | 2011-11-15 | 2013-05-15 | 台湾创新记忆体股份有限公司 | Quantum dot exposure plate and photolithography process using said quantum dot exposure plate |
| CN108169846A (en) * | 2018-02-11 | 2018-06-15 | 深圳市润沃自动化工程有限公司 | Fiber optic imaging device |
| CN209624823U (en) * | 2019-03-21 | 2019-11-12 | 深圳市润沃自动化工程有限公司 | A kind of fiber optic imaging device with lens |
| CN214335465U (en) * | 2021-01-29 | 2021-10-01 | 深圳光韵达光电科技股份有限公司 | Exposure machine based on image modulation |
| CN214375817U (en) * | 2021-01-29 | 2021-10-08 | 深圳光韵达光电科技股份有限公司 | Uniform light intensity exposure machine |
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